JP2005177694A - Hard surface post-washing treatment method, and detergent composition used for it - Google Patents

Hard surface post-washing treatment method, and detergent composition used for it Download PDF

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JP2005177694A
JP2005177694A JP2003425505A JP2003425505A JP2005177694A JP 2005177694 A JP2005177694 A JP 2005177694A JP 2003425505 A JP2003425505 A JP 2003425505A JP 2003425505 A JP2003425505 A JP 2003425505A JP 2005177694 A JP2005177694 A JP 2005177694A
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cleaning
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organic solvent
soluble organic
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JP4356832B2 (en
JP4356832B6 (en
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Akira Shinohara
明 篠原
Hirotoshi Ushiyama
広俊 牛山
Yuta Fujita
雄太 藤田
Taku Kitahara
卓 北原
Hiroshi Miyake
博 三宅
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Lion Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a hard surface post-washing treatment method which has superior basic washing capacity (scale washability, rinsing property of the detergent), requires no large equipment nor treatment cost in rinsing waste water treatment, and reduces environmental load (waste water load and amount of industrial waste), and a detergent composition used for it. <P>SOLUTION: The hard surface post-washing treatment method includes: washing a washing object having the hard surface using a detergent composition containing anion surfactant and a slightly water soluble organic solvent; rinsing the washing object with water, adding a multivalent metal salt to the rinse waste liquid and mixing and leaving standing the resultant; and separating it into two phases of a liquid phase containing the slightly water soluble organic solvent and water phase then discharging the water phase. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、部品加工時に使用する切削油・圧延油等の加工油、防錆油、潤滑油、切削金属粉、光学レンズに付着した固定剤(ワックス・ピッチ等)、電子部品に付着したフラックス、液晶パネルに付着した液晶等の汚れの付着した金属部品、光学レンズ、ガラス、電子部品、精密部品等の硬質表面の洗浄後処理方法、並びにそれに用いる洗浄剤組成物に関する。   The present invention is applied to machining oils such as cutting oils and rolling oils used in parts processing, rust preventive oils, lubricating oils, cutting metal powders, fixing agents (wax, pitch, etc.) attached to optical lenses, and fluxes attached to electronic parts The present invention relates to a post-cleaning treatment method for hard surfaces such as metal parts, such as liquid crystals attached to a liquid crystal panel, optical lenses, glass, electronic parts and precision parts, and a cleaning composition used therefor.

一般に、部品加工時に付着した切削油等の加工油、光学レンズに付着した固定剤、及び電子部品に付着したフラックス、液晶パネルに付着した液晶等の洗浄には、従来、塩素・フロン系溶剤、代替フロン系溶剤、炭化水素等の非ハロゲン系溶剤、又は界面活性剤を含有した水系・準水系洗浄剤が使用されている。
塩素・フロン系溶剤については、オゾン層を破壊するため使用が制限されている。代替フロンについては洗浄性能に課題が多い。又炭化水素系溶剤は臭気の問題や引火性を示すため、安全上大きな課題がある。
In general, cleaning fluids such as cutting oils attached during processing of parts, fixing agents attached to optical lenses, fluxes attached to electronic components, liquid crystals attached to liquid crystal panels, etc. have conventionally been used with chlorine / fluorocarbon solvents, Alternative fluorocarbon solvents, non-halogen solvents such as hydrocarbons, or aqueous / semi-aqueous detergents containing surfactants are used.
The use of chlorine and chlorofluorocarbon solvents is restricted to destroy the ozone layer. There are many problems with cleaning performance for alternative CFCs. In addition, hydrocarbon solvents have a significant safety problem because they exhibit odor problems and flammability.

一方、上記のような問題点の少ない水系・準水系洗浄剤については、各種界面活性剤等の利用により、高い洗浄性を有する洗浄剤製品が開発されている(特許文献1参照)。しかしながら、この水系・準水系洗浄剤は、基本的には水を用いてすすぎ(以後「リンス」という。)を行うため、リンス廃液・排水による環境負荷が最大の課題である。
一般的な水系・準水系の洗浄プロセスでは、洗浄槽で洗浄された被洗物に付着した洗浄剤及び残存する僅かな汚垢を除去するために水が用いられる。このリンス廃液には、これらの洗浄剤成分が含まれるため、河川等に放流するにはこれらの成分を除去する必要がある。この水系・準水系洗浄剤を使用する際の最大の問題点は、このリンス廃液・排水の処理である。
On the other hand, as for the water-based and semi-aqueous cleaning agents with less problems as described above, cleaning products having high cleaning properties have been developed by using various surfactants (see Patent Document 1). However, since this water-based / quasi-water-based cleaning agent is basically rinsed with water (hereinafter referred to as “rinse”), the environmental load due to the rinse waste liquid / drainage is the biggest problem.
In a general aqueous / quasi-aqueous cleaning process, water is used to remove the cleaning agent adhering to the object cleaned in the cleaning tank and a slight amount of remaining dirt. Since this rinse waste liquid contains these detergent components, it is necessary to remove these components in order to release them into rivers and the like. The biggest problem when using this water-based / quasi-water-based cleaning agent is the treatment of the rinsing waste liquid / drainage.

水系・準水系洗浄剤使用時に発生するリンス廃液・排水より、これらの洗浄剤成分等を除去し、清浄な水として放流・再利用する方法として、従来より、沈降分離法(代表例:凝集沈殿方法等)、膜処理法(代表例:UF、RO膜処理方法等)、生物分解法(代表例:活性汚泥方法等)、吸着法(代表例:活性炭吸着方法、泡沫分離方法等)、浮上分離法(代表例:加圧浮上方法、抽出方法等)等が用いられてきている。
沈降分離法については、盛んに研究がなされ、ポリ塩化アルミニウム(PAC)、ポリ硫酸第二鉄等の無機凝集剤、ポリアクリルアミド等の高分子凝集剤等の優れた凝集剤が開発されてきている。
As a method of removing these cleaning agent components from the rinsing waste liquid and wastewater generated when using aqueous and semi-aqueous cleaning agents, and discharging and reusing them as clean water, a sedimentation separation method (typical example: coagulation precipitation) has been used. Method), membrane treatment method (typical example: UF, RO membrane treatment method, etc.), biodegradation method (typical example: activated sludge method, etc.), adsorption method (typical example: activated carbon adsorption method, foam separation method, etc.), levitation Separation methods (typical examples: pressurized flotation methods, extraction methods, etc.) have been used.
Active research has been conducted on the sedimentation separation method, and excellent flocculants such as inorganic flocculants such as polyaluminum chloride (PAC) and polyferric sulfate, and polymer flocculants such as polyacrylamide have been developed. .

しかしながら、この沈降分離方法は、凝集薬剤の添加方法が煩雑、凝集物がフロック状に分離するため分離処理に時間がかかる、設備コストが嵩む等の課題を抱えている。
上記膜処理方法は、特にRO膜処理は除去率が高く効果的であるが、設備、ランニングコスト等に課題が多く、また、生物分解法も一般的に用いられるが、分解速度、設備規模、ランニングコスト等に難点がある。
However, this sedimentation separation method has problems such as a complicated method for adding the agglutinating agent, separation of the agglomerates in a floc form, and time for the separation treatment, and increased equipment costs.
The above membrane treatment method is particularly effective because the RO membrane treatment has a high removal rate, but there are many problems in equipment, running cost, etc., and biodegradation methods are also commonly used. There are difficulties in running costs.

更に、活性炭吸着法も効果的ではあるが、ランニングコスト、運用の煩雑さより限られた用途でしか適用されていない。また、泡沫分離方法は、界面活性剤の発泡性という特長を上手く活用した技術ではあるが設備規模・コスト、対象除去物が界面活性物質に限定される等の課題がある。
更にまた、浮上分離方法として、加圧浮上については比較的設備がシンプルではあるが除去率に難点がある。
Furthermore, although the activated carbon adsorption method is effective, it is applied only in limited applications because of running costs and operational complexity. In addition, the foam separation method is a technique that makes good use of the characteristic of foaming property of a surfactant, but there are problems such as equipment scale and cost, and a target removal object is limited to a surfactant.
Furthermore, as a method of flotation separation, although there are relatively simple facilities for pressurized flotation, there is a problem in the removal rate.

また、抽出方法としては、排水に抽出物質を添加し分離させる方法として、フェノールによる抽出(特許文献2参照)、アミン系溶剤による抽出(特許文献3参照)、水不溶アニオン油による抽出(特許文献4参照)、ロウ状合成油による抽出(特許文献5参照)、C8以上の高級アルコールによる抽出(特許文献6参照)が知られている。
しかしながら、これらの文献等に記載される抽出法については、比較的高価な抽出物質をあえて排水に添加する必要が有り、ランニングコスト上問題が多い点に課題がある。
In addition, extraction methods include extraction with phenol (see Patent Document 2), extraction with an amine-based solvent (see Patent Document 3), and extraction with water-insoluble anionic oil (Patent Document). 4), extraction with waxy synthetic oil (see Patent Document 5), and extraction with higher alcohols of C8 or higher (see Patent Document 6).
However, the extraction methods described in these documents and the like have a problem in that it is necessary to dare to add a relatively expensive extraction substance to the waste water, and there are many problems in running cost.

一方、非イオン界面活性剤の曇点を利用しリンス排液より洗浄剤等を簡便に除去する方法(特許文献7参照)も知られているが、この方法は曇点を利用し分離できる洗浄剤は洗浄剤そのものの水溶性が低く洗浄剤の残留、特に閉じ穴、隙間等に保持された洗浄剤がリンスできず、満足な洗浄品質を得ることができない点に課題があるものである。
特開平7−150192号公報(特許請求の範囲、実施例等) 特開昭48−94257号公報(特許請求の範囲、実施例等) 特開昭51−62558号公報(特許請求の範囲、実施例等) 特開昭52−69号公報(特許請求の範囲、実施例等) 特開昭55−94678号公報(特許請求の範囲、実施例等) 特開平7−195065号公報(特許請求の範囲、実施例等) 特開平4−122480号公報(特許請求の範囲、実施例等)
On the other hand, there is also known a method (see Patent Document 7) in which a detergent or the like is simply removed from a rinse liquid using a cloud point of a nonionic surfactant. The cleaning agent has a problem in that the cleaning agent itself is low in water solubility, and the cleaning agent remaining, particularly the cleaning agent held in the closed hole, the gap or the like cannot be rinsed, and satisfactory cleaning quality cannot be obtained.
Japanese Patent Laid-Open No. 7-150192 (Claims, Examples, etc.) JP-A-48-94257 (Claims, Examples, etc.) JP-A-51-62558 (Claims, Examples, etc.) JP-A-52-69 (Claims, Examples, etc.) Japanese Patent Application Laid-Open No. 55-94678 (Claims, Examples, etc.) JP-A-7-195065 (Claims, Examples, etc.) JP-A-4-122480 (Claims, Examples, etc.)

本発明は、上記従来技術の課題等に鑑み、これを解消しようとするものであり、優れた基本洗浄能力(汚垢洗浄性、洗浄剤のリンス性)を備え、リンス廃液処理に多大な設備や処理費用を必要とせず、かつ、環境負荷(排水負荷、産廃量)を低減可能とする硬質表面の洗浄後処理方法、及びそれに用いる洗浄剤組成物を提供することを目的とする。   The present invention has been made in view of the above-mentioned problems of the prior art, and is intended to solve this problem. The present invention has excellent basic cleaning ability (stain cleansing ability, rinse ability of cleaning agent), and is a great facility for rinsing waste liquid treatment. It is an object of the present invention to provide a post-cleaning treatment method for a hard surface and a cleaning composition used therefor, which can reduce the environmental load (drainage load, industrial waste amount) without requiring any processing costs.

本発明者らは、上記従来の課題等を解決するために、鋭意検討した結果、水系洗浄剤使用時の、洗浄性・リンス性という基本性能とリンス排液処理という環境問題を一挙に解決すべく、鋭意研究を行った結果、特定の硬質表面の洗浄後処理方法、及びそれに用いる洗浄剤組成物を組み合わせることにより、洗浄性・リンス性が共に良好で、かつ、リンス廃液から簡易な装置で、迅速で、かつ、低コストで洗浄剤成分等を除去でき、環境負荷を低減することができる上記目的の硬質表面の洗浄後処理方法、及びそれに用いる洗浄剤組成物が得られることを見い出し、本発明を完成するに至ったのである。   As a result of diligent studies to solve the above-described conventional problems, the present inventors have solved the basic problems of cleaning and rinsing performance and environmental problems of rinsing drainage treatment when using an aqueous cleaning agent. As a result of intensive research, the combination of a specific post-cleaning treatment method for hard surfaces and a cleaning composition used therefor, both good cleaning and rinsing properties, and simple equipment from rinse waste liquid The present invention has been found to provide a post-cleaning treatment method for a hard surface and a cleaning composition used therefor, which can remove a cleaning agent component and the like quickly and at a low cost, and can reduce the environmental load. The present invention has been completed.

すなわち、本発明は、次の(1)〜(5)に存する。
(1) アニオン界面活性剤と水難溶性有機溶剤を含む洗浄剤組成物を用いて硬質表面を有する被洗浄物を洗浄し、次いで、被洗浄物を水でリンスした後、該リンス廃液に多価金属塩を添加して混合・静置し、水難溶性有機溶剤を含む液体相と水相の二相に分離して、水相を排出する洗浄後処理工程を含むことを特徴とする硬質表面の洗浄後処理方法。
(2) リンス廃液を分離する際、W/O型乳化系を経由して水相を排出する上記(1)記載の硬質表面の洗浄後処理方法。
(3) 上記(1)又は(2)記載の洗浄後処理方法に用いる洗浄剤組成物であって、該洗浄剤組成物が下記1)と、2)及び/又は3)とを含むことを特徴とする洗浄剤組成物。
1) アニオン界面活性剤のアニオンに対する対イオンが多価金属イオンのとき、該アニオン界面活性剤多価金属塩が油溶性又は油分散性となるアニオン界面活性剤。
2) 炭化水素系、エステル系、エーテル系、ケトン系から選ばれる少なくとも1つの水難溶性有機溶剤。
3) 下記一般式(I)で示される水難溶性グリコールエーテル系溶剤。

Figure 2005177694
(4) 更に、水を5〜70質量%含む上記(3)記載の洗浄剤組成物。
(5) 上記(1)又は(2)記載の洗浄後処理方法に用いる洗浄剤組成物であって、アニオン界面活性剤及び水難溶性有機溶剤を含有し、該洗浄剤組成物を水で10倍希釈した液に塩化カルシウム2000ppmを添加して混合後、25℃、24時間静置した際、水相と水難溶性有機溶剤を含む液体相のニ相に分離することを特徴とする洗浄剤組成物。 That is, the present invention resides in the following (1) to (5).
(1) An object having a hard surface is washed using a detergent composition containing an anionic surfactant and a poorly water-soluble organic solvent, and then the object to be washed is rinsed with water, The hard surface is characterized by including a post-cleaning treatment step in which a metal salt is added, mixed and allowed to stand, separated into two phases, a liquid phase containing a poorly water-soluble organic solvent and an aqueous phase, and the aqueous phase is discharged. Post-cleaning treatment method.
(2) The post-cleaning treatment method for a hard surface according to the above (1), wherein when the rinsing waste liquid is separated, the aqueous phase is discharged via a W / O type emulsification system.
(3) A cleaning composition used in the post-cleaning treatment method described in (1) or (2) above, wherein the cleaning composition contains the following 1), 2) and / or 3). A cleaning composition.
1) An anionic surfactant in which the anionic surfactant polyvalent metal salt is oil-soluble or oil-dispersible when the counter ion to the anion of the anionic surfactant is a polyvalent metal ion.
2) At least one poorly water-soluble organic solvent selected from hydrocarbons, esters, ethers, and ketones.
3) A poorly water-soluble glycol ether solvent represented by the following general formula (I).
Figure 2005177694
(4) The cleaning composition according to (3), further containing 5 to 70% by mass of water.
(5) A cleaning composition used in the post-cleaning treatment method according to (1) or (2) above, comprising an anionic surfactant and a poorly water-soluble organic solvent, and the cleaning composition is 10 times with water. 2,000 ppm calcium chloride is added to the diluted solution, mixed, and then allowed to stand for 24 hours at 25 ° C., the composition is separated into a water phase and a liquid phase containing a poorly water-soluble organic solvent. .

本発明によれば、優れた基本洗浄能力(汚垢洗浄性、洗浄剤のリンス性)を備え、リンス廃液処理に多大な設備や処理費用を必要とせず、且つ環境負荷(排水負荷、産廃量)を低減可能とする硬質表面の洗浄後処理方法、及びそれに用いる洗浄剤組成物が提供される。   According to the present invention, it has an excellent basic cleaning ability (fouling cleaning property, cleaning agent rinsing property), does not require a large amount of equipment and processing costs for rinsing waste liquid treatment, and has an environmental load (drainage load, industrial waste amount) ) And a cleaning composition used therefor are provided.

以下に、本発明の実施形態を詳しく説明する。
本発明の硬質表面の洗浄後処理方法は、アニオン界面活性剤と水難溶性有機溶剤を含む洗浄剤組成物を用いて硬質表面を有する被洗浄物を洗浄し、次いで、被洗浄物を水でリンスした後、該リンス廃液に多価金属塩を添加して混合・静置し、水難溶性有機溶剤を含む液体相と水相の二相に分離して、水相を排出する洗浄後処理工程を含むことを特徴とするものである。
Hereinafter, embodiments of the present invention will be described in detail.
According to the post-cleaning treatment method for a hard surface of the present invention, a cleaning object having a hard surface is cleaned using a cleaning composition containing an anionic surfactant and a poorly water-soluble organic solvent, and then the cleaning object is rinsed with water. Then, after adding a polyvalent metal salt to the rinsing waste liquid, mixing and allowing to stand, separating into two phases of a liquid phase containing a poorly water-soluble organic solvent and an aqueous phase, and a post-washing treatment step for discharging the aqueous phase It is characterized by including.

図1は、本発明の硬質表面の洗浄後処理方法の実施形態の一例を示すプロセス図である。
本実施形態の洗浄後処理方法は、図1に示すように、(a)洗浄槽にアニオン界面活性剤と水難溶性有機溶剤を含む洗浄剤組成物を入れ、該洗浄槽に硬質表面を有する被洗浄物(被洗物)を洗浄する工程、(b)洗浄直後に予備リンス槽(以降、「溜リンス槽」と言う)を設け、少量の水で効率的に洗浄剤成分をリンス、除去する工程と、(c)溜リンス廃液を定期的、又は連続的に清浄な水に交換し、排出された溜リンス廃液に多価金属塩を加え、洗浄剤成分を分離する工程とを含む構成であり、(d)のオーバーフローリンス槽及び(c)の分離槽より排水されるリンス排水負荷を従来の1/10〜1/100に低減可能な洗浄方後処理方法であり、準水系・水系洗浄剤の環境負荷を低減するものである。
FIG. 1 is a process diagram showing an example of an embodiment of a post-cleaning post-treatment method of the present invention.
In the post-cleaning treatment method of this embodiment, as shown in FIG. 1, (a) a cleaning composition containing an anionic surfactant and a poorly water-soluble organic solvent is placed in a cleaning tank, and the cleaning tank has a hard surface. (B) A preliminary rinsing tank (hereinafter referred to as “reservoir rinse tank”) is provided immediately after cleaning, and the cleaning agent components are efficiently rinsed and removed with a small amount of water. And a step of (c) periodically or continuously replacing the waste rinse waste liquid with clean water, adding a polyvalent metal salt to the discharged residual rinse waste liquid, and separating the cleaning agent component. Yes, it is a post-cleaning method that can reduce the rinse drainage load drained from the overflow rinse tank of (d) and the separation tank of (c) to 1/10 to 1/100 of the conventional method. It reduces the environmental impact of the agent.

本発明方法は、まず、アニオン界面活性剤と水難溶性有機溶剤を含む洗浄剤組成物を用いて硬質表面を有する被洗浄物を洗浄する。
本発明方法に用いる洗浄剤組成物としては、下記(1)と、(2)及び/又は(3)とを含むものであることが必要である。
(1) アニオン界面活性剤のアニオンに対する対イオンが多価金属イオンのとき、該アニオン界面活性剤多価金属塩が油溶性又は油分散性となるアニオン界面活性剤。
(2) 炭化水素系、エステル系、エーテル系、ケトン系から選ばれる少なくとも1つの水難溶性有機溶剤。
(3) 下記一般式(I)で示される水難溶性グリコールエーテル系溶剤。

Figure 2005177694
In the method of the present invention, first, an object to be cleaned having a hard surface is cleaned using a cleaning composition containing an anionic surfactant and a poorly water-soluble organic solvent.
The cleaning composition used in the method of the present invention needs to contain the following (1), (2) and / or (3).
(1) An anionic surfactant in which the anionic surfactant polyvalent metal salt becomes oil-soluble or oil-dispersible when the counter ion to the anion of the anionic surfactant is a polyvalent metal ion.
(2) At least one poorly water-soluble organic solvent selected from hydrocarbons, esters, ethers, and ketones.
(3) A poorly water-soluble glycol ether solvent represented by the following general formula (I).
Figure 2005177694

用いることができる上記(1)のアニオン界面活性剤としては、アニオン界面活性剤のアニオンに対する対イオンが多価金属イオンのとき、該アニオン界面活性剤多価金属塩が油溶性又は油分散性となるものであれば、特に限定されず、例えば、アルキルベンゼンスルホン酸塩、石鹸、アルファオレフィンスルホン酸塩、アルキル硫酸エステル塩、アルキルエーテルスルホン酸塩、ジアルキルスルホコハク酸塩、パラフィンスルホン酸塩等が挙げられる。
好ましいアニオン性界面活性剤としては、多価金属イオンと多価金属塩を形成して良好な液性を示すジアルキルスルホコハク酸塩、パラフィンスルホン酸塩等のアニオン界面活性剤が好適である。
As the anionic surfactant of the above (1) that can be used, when the counter ion to the anion of the anionic surfactant is a polyvalent metal ion, the anionic surfactant polyvalent metal salt is oil-soluble or oil-dispersible. If it becomes, it will not specifically limit, For example, alkylbenzene sulfonate, soap, alpha olefin sulfonate, alkyl sulfate ester salt, alkyl ether sulfonate, dialkyl sulfo succinate, paraffin sulfonate, etc. are mentioned. .
Preferred anionic surfactants are anionic surfactants such as dialkylsulfosuccinates and paraffinsulfonates that form a polyvalent metal salt with a polyvalent metal ion and exhibit good liquidity.

用いることができる上記(2)の水難溶性有機溶剤としては、炭化水素系溶剤、エステル系溶剤、エーテル系溶剤、ケトン系溶剤から選ばれる少なくとも1つ(各単独又は2種以上の混合物)が挙げられる。
好ましくは、25℃における水への溶解度が3質量%(以下、質量%を「%」と略記する)以下、更に好ましくは1%以下、特に好ましくは0.5%以下である水難溶性有機溶剤であることが望ましい。
具体的な炭化水素系容剤としては、例えば、n−オクタン、n−デカン、n−ドデカン、ドデセン、テトラデセン、イソパラフィンが挙げられる。エステル系溶剤としては、例えば、酢酸ベンジル、2−エチルヘキシルアセテート、ステアリン酸イソプロピルエステル、マロン酸ジエチル等が挙げられる。エーテル系溶剤としては、例えば、ブチルフェニルエーテル、ペンチルフェニルエーテル、ジフェニルエーテル系溶剤が挙げられる。ケトン系溶剤としては、例えば、アセトフェノンが挙げられる。
Examples of the poorly water-soluble organic solvent (2) that can be used include at least one selected from hydrocarbon solvents, ester solvents, ether solvents, and ketone solvents (each alone or a mixture of two or more). It is done.
Preferably, the poorly water-soluble organic solvent having a solubility in water at 25 ° C. of 3% by mass (hereinafter abbreviated as “%”), more preferably 1% or less, and particularly preferably 0.5% or less. It is desirable that
Specific examples of the hydrocarbon-based agent include n-octane, n-decane, n-dodecane, dodecene, tetradecene, and isoparaffin. Examples of the ester solvent include benzyl acetate, 2-ethylhexyl acetate, isopropyl stearate, diethyl malonate, and the like. Examples of the ether solvent include butyl phenyl ether, pentyl phenyl ether, and diphenyl ether solvent. Examples of the ketone solvent include acetophenone.

用いることができる上記(3)の水難溶性グリコールエーテル溶剤は、上記一般式(I)で示されるものが挙げられる。なお、該水難溶性グリコールエーテル溶剤も水難溶性有機溶剤の一種である。
好ましくは、25℃における水への溶解度が5%以下、更に好ましくは、2%以下、特に好ましくは、1%以下である水難溶性グリコールエーテルであることが望ましい。
具体的には、エチレングリコールモノヘキシルエーテル、ジエチレングリコールモノヘキシルエーテル、エチレングリコールモノ2−エチルヘキシルエーテル、ジエチレングリコールモノ2−エチルヘキシルエーテル、ジエチレングリコールジブチルエーテル、フェノキシエタノール、ジエチレングリコールモノフェニルエーテルが挙げられる。
Examples of the poorly water-soluble glycol ether solvent (3) that can be used include those represented by the general formula (I). The poorly water-soluble glycol ether solvent is also a kind of poorly water-soluble organic solvent.
Preferably, it is a poorly water-soluble glycol ether having a solubility in water at 25 ° C. of 5% or less, more preferably 2% or less, and particularly preferably 1% or less.
Specific examples include ethylene glycol monohexyl ether, diethylene glycol monohexyl ether, ethylene glycol mono 2-ethylhexyl ether, diethylene glycol mono 2-ethylhexyl ether, diethylene glycol dibutyl ether, phenoxyethanol, and diethylene glycol monophenyl ether.

本発明の洗浄剤組成物には、上記(1)のアニオン界面活性剤と、(2)の水難溶性有機溶剤及び/又は(3)の水難溶性グリコールエーテル溶剤とを含有するものであるが、更に、極性汚垢の洗浄性向上、引火性低減のために水(精製水、蒸留水、イオン交換水、純水、超純水等)を加えることも可能である。好ましくは、洗浄剤組成物全量に対して、5〜70%、更に好ましくは、5〜60%、特に好ましくは、10〜40%の水を含有することが望ましい。   The detergent composition of the present invention contains the anionic surfactant of (1) above and the (2) poorly water-soluble organic solvent and / or (3) the poorly water-soluble glycol ether solvent. Furthermore, water (purified water, distilled water, ion-exchanged water, pure water, ultrapure water, etc.) can be added to improve the cleanability of polar dirt and reduce flammability. Preferably, it is desirable to contain 5 to 70%, more preferably 5 to 60%, particularly preferably 10 to 40% of water with respect to the total amount of the cleaning composition.

本発明に用いる洗浄剤組成物としては、上述のアニオン界面活性剤、水難溶性有機溶剤、水難溶性グリコールエーテル、水を任意の比率で含有することができるが、洗浄性及び相分離性を考慮するとそれぞれ、
(1)アニオン界面活性剤 :3〜40%
(2)水難溶性有機溶剤 :0〜80%
(3)水難溶性グリコールエーテル :0〜80%
(4)水 :0〜60%
含有することが好ましい〔但し、上記(2)、(3)のどちらか一方は0%ではない。〕。
更に、分離性を高めるためそれぞれ、
(1)アニオン界面活性剤 :5〜30%
(2)水難溶性有機溶剤 :0〜70%
(3)水難溶性グリコールエーテル :10〜50%
(4)水 :5〜60%
含有することが更に好ましい。
また、本発明の洗浄剤組成物は、均一透明に一体化していることが安定した洗浄性・リンス性を得るためにより好ましい。更に、本発明の効果発現に影響を及ぼさない範囲内で、非イオン界面活性剤、有機キレート剤、防腐剤、アルカノールアミン等の有機アルカリ剤、水酸化カリウム、水酸化ナトリウム、炭酸ナトリウム等の無機アルカリ剤を含有することができる。
The cleaning composition used in the present invention can contain the above-mentioned anionic surfactant, poorly water-soluble organic solvent, poorly water-soluble glycol ether, and water in any ratio, but considering the cleaning properties and phase separation properties. Respectively,
(1) Anionic surfactant: 3 to 40%
(2) Slightly water-soluble organic solvent: 0 to 80%
(3) Water-insoluble glycol ether: 0 to 80%
(4) Water: 0-60%
It is preferable to contain [however, one of the above (2) and (3) is not 0%. ].
Furthermore, in order to improve the separability,
(1) Anionic surfactant: 5 to 30%
(2) Slightly water-soluble organic solvent: 0 to 70%
(3) poorly water-soluble glycol ether: 10 to 50%
(4) Water: 5-60%
It is more preferable to contain.
In addition, it is more preferable that the cleaning composition of the present invention is uniformly and uniformly integrated in order to obtain stable cleaning and rinsing properties. Further, within the range not affecting the expression of the effect of the present invention, nonionic surfactants, organic chelating agents, preservatives, organic alkali agents such as alkanolamine, inorganic substances such as potassium hydroxide, sodium hydroxide, sodium carbonate An alkali agent can be contained.

本発明の洗浄対象は、硬質表面に付着している各種汚垢であり、例えば、金属加工部品、光学加工部品、ガラス版加工部品、樹脂加工品、半導体部品等に付着している各種汚垢である。
金属加工部品としては、電子機器等に用いられる、ビデオヘッド、ハードディスク駆動部品、複写機駆動部品、CRTの電子銃部品等の加工時に使用する加工油等が本発明の洗浄対象となる。
また、光学部品としては、カメラレンズ、CD、CD−R、DVDのピックアップレンズ、眼鏡レンズ、プリズム等の加工時に付着する固定剤(ピッチ、ワックス)、研磨剤等が本発明の洗浄対象となる。
更に、ガラス版加工部品としては液晶パネル、PDPパネル、HDDガラス基板等の加工時に付着する液晶、研磨剤、異物等が本発明の洗浄対象となる。また、樹脂加工品としては、樹脂レンズ、電子機器の駆動部に使用する歯車、治具等に付着しているレンズ切りくず、潤滑油等が本発明の洗浄対象となる。
The object to be cleaned of the present invention is various kinds of dirt adhering to a hard surface, for example, various kinds of dirt adhering to metal processed parts, optically processed parts, glass plate processed parts, resin processed parts, semiconductor parts, etc. It is.
As the metal processing parts, processing oils used for processing video heads, hard disk drive parts, copying machine drive parts, CRT electron gun parts and the like used in electronic devices and the like are objects to be cleaned in the present invention.
In addition, as optical components, fixing agents (pitch, wax), abrasives, and the like that adhere during processing of camera lenses, CDs, CD-Rs, DVD pickup lenses, spectacle lenses, prisms, and the like are objects of cleaning of the present invention. .
Further, as glass plate processed parts, liquid crystals, abrasives, foreign substances, etc., which are adhered during processing of liquid crystal panels, PDP panels, HDD glass substrates, and the like are objects to be cleaned in the present invention. In addition, as the resin processed product, a resin lens, a gear used for a driving unit of an electronic device, a lens chip attached to a jig or the like, a lubricating oil, and the like are objects to be cleaned in the present invention.

本発明では、硬質表面を有する被洗浄物を上記構成となる洗浄剤組成物を用いて洗浄(洗浄工程)後、図1の(b)に示すように、洗浄直後に溜リンス槽を設け、少量の水で効率的に洗浄剤成分をリンス、除去し、溜リンス廃液を定期的、又は連続的に清浄な水に交換し、排出された溜リンス廃液に多価金属塩を加え、洗浄剤成分を分離するものである。
本実施形態では、(d)のオーバーフローリンス槽の前に、溜リンス槽を設置し、溜リンス槽で大部分の洗浄剤成分を除去し、オーバーフローリンス槽排水中への洗浄剤成分の持ち出しを大幅に削減するものである。
本発明で使用する上記多価金属塩としては、例えば、ポリ塩化アルミニウム(PAC)、硫酸アルミニウム(硫酸バンド)、ポリ硫酸第二鉄(ポリ鉄)、塩化カルシウム、塩化マグネシウム、硫酸マグネシウム等が適用可能である。なお、ポリアクリルアミド系、ポリビニルアミジン、ジメチルアミノエチルメタクリレート系のカチオン系高分子凝集剤を適宜併用することも可能である。
In the present invention, the object to be cleaned having a hard surface is cleaned with the cleaning composition having the above-described configuration (cleaning step), and then, as shown in FIG. Easily rinse and remove detergent components with a small amount of water, replace the waste rinse waste liquid regularly or continuously with clean water, add polyvalent metal salt to the discharged waste rinse waste liquid, and clean the detergent The components are separated.
In this embodiment, a reservoir rinse tank is installed in front of the overflow rinse tank of (d), most of the detergent components are removed in the reservoir rinse tank, and the detergent components are taken out into the overflow rinse tank drainage. This is a significant reduction.
Examples of the polyvalent metal salt used in the present invention include polyaluminum chloride (PAC), aluminum sulfate (sulfuric acid band), polyferric sulfate (polyiron), calcium chloride, magnesium chloride, magnesium sulfate and the like. Is possible. A polyacrylamide-based, polyvinylamidine, dimethylaminoethyl methacrylate-based cationic polymer flocculant may be used in combination as appropriate.

図1の(c)に示す溜リンス廃液を分離する方法としては、単純に多価金属塩を数十〜数千ppm加え攪拌・静置するだけでも水難溶性有機溶剤を含む液体相(この相には、水難溶性グリコールエーテル系溶剤、アニオン界面活性剤の多価金属塩、汚垢成分をも含む)と水相の液状に分離可能である。この場合、通常、O/W型乳化系となっている。好ましくは、水難溶性有機溶剤相を蓄積しておき、該水難溶性溶剤相の体積比率を高め、結果として水相/水難溶性有機溶剤相=80/20〜5/95、更に好ましくは、70/30〜50/50となるようにに調整し、W/O型乳化系を経由して分離を行うと、分離速度・分離精度が高まり実用上最も好ましい。
以上、バッチ式リンス廃液処理について具体的に本発明の洗浄後処理方法について説明したが、図1に示すオーバーフローリンス排水の一部を連続的に溜リンス液に供給し、洗浄装置を連続稼働させることも可能である。
なお、洗浄剤組成物を水で10倍希釈後、塩化カルシウム2000ppmを添加し、混合後、25℃にて、24時間静置して、水相と水難溶性有機溶剤を含む液体相のニ相に分離するか否かを指標として、該洗浄剤組成物が本プロセスに適合するか否かを見極めることもできる。
As a method for separating the rinsing waste liquid shown in FIG. 1 (c), a liquid phase containing a poorly water-soluble organic solvent (this phase) can be obtained simply by adding several tens to several thousand ppm of a polyvalent metal salt and stirring and standing. Can be separated into a water phase liquid and a slightly water-soluble glycol ether solvent, a polyvalent metal salt of an anionic surfactant, and a soil component. In this case, it is usually an O / W type emulsification system. Preferably, the poorly water-soluble organic solvent phase is accumulated, and the volume ratio of the poorly water-soluble solvent phase is increased. As a result, the aqueous phase / slightly water-soluble organic solvent phase = 80/20 to 5/95, more preferably 70 / If it adjusts so that it may be set to 30-50 / 50, and it isolate | separates via a W / O type | mold emulsification system, a separation speed and a separation precision will increase and it is the most preferable practically.
As described above, the post-cleaning treatment method of the present invention has been specifically described with respect to the batch type rinsing waste liquid treatment. However, a part of the overflow rinsing waste water shown in FIG. It is also possible.
The detergent composition was diluted 10-fold with water, added with 2000 ppm of calcium chloride, mixed, and allowed to stand at 25 ° C. for 24 hours to form a two-phase liquid phase containing an aqueous phase and a poorly water-soluble organic solvent. It can also be determined whether or not the detergent composition is compatible with the present process, using as an index whether or not it is separated.

本発明の洗浄後処理方法は、比較的洗浄剤成分の濃い溜リンス廃液の分離に好適となるものである。すなわち、溜リンス槽の無い従来用いられている一般的な洗浄プロセスでは、洗浄槽から持ち出された洗浄剤組成物を大量の水で希釈しつつリンスを行うものであるので、その結果リンス排水が多量に発生するため、廃水処理設備も大型になる。しかし、本発明のプロセスの溜リンス水は1回/日程度清浄な水に交換するだけでよく、オーバーフローリンス槽及び分離槽から排出されるリンス排水に持ち込まれる洗浄剤成分も従来方式の1/10〜1/100に低減する効果があり、リンス排水負荷を大幅に低減できる。また、処理するリンス廃液が少量のため(溜リンス槽の容量:200kg程度)、分離プロセスも小型になり設備的な投資も抑制可能である。   The post-cleaning treatment method of the present invention is suitable for separation of a waste liquid for rinsing with a relatively thick cleaning component. That is, in a general cleaning process that has been used conventionally without a rinsing tank, rinsing is performed while diluting the detergent composition taken out of the cleaning tank with a large amount of water. Due to the large amount, wastewater treatment facilities become large. However, the retained rinse water in the process of the present invention only needs to be replaced with clean water about once / day, and the cleaning agent component brought into the rinse water discharged from the overflow rinse tank and the separation tank is also 1 / There is an effect of reducing to 10/100, and the rinse drainage load can be greatly reduced. In addition, since the rinse waste liquid to be treated is small (capacity of the reservoir rinse tank: about 200 kg), the separation process becomes small, and the equipment investment can be suppressed.

なお、本発明方法は、上記図1のプロセスのみに限定されるものではなく、スプレー洗浄、ブラシ洗浄等にも適用可能である。また、溜リンス廃液の交換もバッチ式のみでなく、連続交換方式も可能である。   The method of the present invention is not limited to the process shown in FIG. 1 but can be applied to spray cleaning, brush cleaning, and the like. Moreover, not only the batch type but also the continuous exchange method can be used for exchanging the rinsing waste liquid.

このように構成される本発明では、アニオン界面活性剤と水難溶性有機溶剤を含む洗浄剤組成物を用いて硬質表面を有する被洗浄物を洗浄し、次いで、被洗浄物を水でリンスした後、該リンス廃液に多価金属塩を添加して混合・静置し、水難溶性有機溶剤を含む液体相と水相の二相に分離して、水相を排出する洗浄後処理工程を含む構成となるので、優れた基本洗浄能力(汚垢洗浄性、洗浄剤のリンス性)を備え、リンス廃液処理に多大な設備や処理費用を必要とせず、且つ環境負荷(排水負荷、産廃量)を低減可能となる硬質表面の洗浄後処理方法となるものである。
また、本発明の洗浄剤組成物は、従来から用いられているアニオン界面活性剤、溶剤を含有する洗浄剤組成物に較べて、液体状態で相分離するため分離が容易であり、分離速度が速く容易に分離可能である。また、水難溶性有機溶剤の分離抽出率が高く、水相への混入率が極めて少ないので、排水への負荷が少なく環境にやさしいものとなる。
In the present invention configured as described above, an object to be cleaned having a hard surface is cleaned using a cleaning composition containing an anionic surfactant and a poorly water-soluble organic solvent, and then the object to be cleaned is rinsed with water. , Including a post-cleaning treatment step of adding a polyvalent metal salt to the rinsing waste liquid, mixing and allowing to stand, separating into a liquid phase containing a poorly water-soluble organic solvent and an aqueous phase, and discharging the aqueous phase Therefore, it has excellent basic cleaning ability (cleaning of dirt, rinseability of cleaning agent), does not require a lot of equipment and processing costs for rinsing waste liquid treatment, and has an environmental load (drainage load, industrial waste amount) This is a post-cleaning treatment method for hard surfaces that can be reduced.
In addition, the cleaning composition of the present invention is easy to separate because the phase separation is performed in a liquid state as compared with cleaning compositions containing a conventional anionic surfactant and solvent, and the separation rate is high. Quick and easy separation. Moreover, since the separation and extraction rate of the poorly water-soluble organic solvent is high and the mixing rate in the aqueous phase is extremely low, the load on the waste water is small and it is environmentally friendly.

次に、実施例及び比較例により本発明を更に詳細に説明するが、本発明は下記実施例等に限定されるものではない。   EXAMPLES Next, although an Example and a comparative example demonstrate this invention further in detail, this invention is not limited to the following Example etc.

〔実施例1〜7及び比較例1〜3〕
下記表1に示す組成の各洗浄剤組成物(全量100質量%)を調製した。
得られた各洗浄剤組成物を用いて、下記方法により硬質表面を有する被洗浄物である液晶パネル、光学レンズ、精密アルミ部品の洗浄試験を行い、下記方法により洗浄性、リンス性、分離性状・分離率を評価等した。
これらの結果を下記表1に示す。
[Examples 1-7 and Comparative Examples 1-3]
Each cleaning composition (100% by mass in total) having the composition shown in Table 1 below was prepared.
Using each of the obtained cleaning compositions, a cleaning test is performed on liquid crystal panels, optical lenses, and precision aluminum parts, which are objects to be cleaned, according to the following methods, and cleaning properties, rinsing properties, and separation properties are measured by the following methods. -The separation rate was evaluated.
These results are shown in Table 1 below.

1)洗浄試験
図1に示す超音波洗浄プロセスで下記部品の洗浄を繰り返し行った。
液晶パネル:パネルギャップ部、表面に液晶の付着したパネル
光学レンズ:表面にワックス系の固定剤が付着した光学レンズ
精密アルミ部品:切削油が付着したビデオヘッド(閉じたネジ孔のある精密部品)
1) Cleaning test The following parts were repeatedly cleaned by the ultrasonic cleaning process shown in FIG.
Liquid crystal panel: Panel gap, panel with liquid crystal on the surface Optical lens: Optical lens with wax-based fixing agent on the surface Precision aluminum parts: Video head with cutting oil attached (Precise parts with closed screw holes)

2)評価
イ)洗浄性の評価
液晶パネル:5分洗浄・5分溜リンス後・5分オーバーフローリンス後、80℃で30分乾燥し、ギャップ部分、表面部分に残留した液晶(汚れ)を偏光顕微鏡で観察し下記評価基準で洗浄性を評価した。
光学レンズ:5分洗浄・5分溜リンス後・5分オーバーフローリンス後、80℃で30分乾燥し、表面部分に残留したワックス(汚れ)を目視により下記評価基準で洗浄性を評価した。
精密アルミ部品:5分洗浄・5分溜リンス後・5分オーバーフローリンス後、80℃で30分乾燥し、閉じたネジ孔に残留した切削油を偏光顕微鏡で観察し、下記評価基準で洗浄性を評価した。
評価基準:
○:汚れが認められない。
△:若干の汚れが認められる。
×:多量の汚れが認められる。
2) Evaluation b) Evaluation of detergency Liquid crystal panel: After washing for 5 minutes, after rinsing for 5 minutes and after rinsing for 5 minutes, dried at 80 ° C for 30 minutes and polarized liquid crystal (dirt) remaining on the gap and surface. The detergency was evaluated according to the following evaluation criteria observed with a microscope.
Optical lens: Washed for 5 minutes, rinsed for 5 minutes, rinsed for 5 minutes, rinsed for 5 minutes at 80 ° C., and dried at 80 ° C. for 30 minutes. The wax (dirt) remaining on the surface portion was visually evaluated on the following evaluation criteria.
Precision aluminum parts: 5 minutes after washing, 5 minutes after rinsing, 5 minutes after overflow rinsing, dried at 80 ° C for 30 minutes, and the cutting oil remaining in the closed screw hole is observed with a polarizing microscope. Evaluated.
Evaluation criteria:
○: Dirt is not recognized.
(Triangle | delta): Some dirt is recognized.
X: A lot of dirt is recognized.

ロ)リンス性の評価
予め四塩化炭素で洗浄した液晶パネル、光学レンズ、精密アルミ部品を10個各々用意し、5分洗浄・5分溜リンス後・5分オーバーフローリンス後、80℃で30分乾燥させる。各部品別に、10個の部品を80℃、100ccの水で10分間超音波処理した後、この100ccの残留洗浄剤抽出水について、TOC(有機炭素:JIS K01202に準拠した。使用機器:島津製作所社製 TOC−500、以下同様)により残留洗浄剤を定量し、リンス性を下記評価基準で評価した。
評価基準:
○:TOCが10ppm未満。
△:TOCが10〜50ppm。
×:TOCが50ppm超過。
B) Evaluation of rinsing properties Prepare 10 liquid crystal panels, optical lenses, and precision aluminum parts that have been washed with carbon tetrachloride in advance, wash for 5 minutes, rinse for 5 minutes, rinse for 5 minutes, rinse for 5 minutes, and then at 80 ° C for 30 minutes. dry. For each part, 10 parts were sonicated with 100 cc of water at 80 ° C. for 10 minutes, and then 100 cc of residual detergent extracted water was compliant with TOC (organic carbon: JIS K01202. Equipment used: Shimadzu Corporation Residual cleaning agent was quantified by TOC-500 (manufactured by company, the same applies hereinafter), and the rinse property was evaluated according to the following evaluation criteria.
Evaluation criteria:
○: TOC is less than 10 ppm.
(Triangle | delta): TOC is 10-50 ppm.
X: TOC exceeds 50 ppm.

ハ)分離性の評価
i)通常分離(O/W)
図1に示す溜リンス槽水中の洗浄剤成分及び汚れ成分によるTOCが約5%に上昇するまで洗浄を繰り返し、溜リンス廃液に多価金属塩としてCaC12を0.2%添加・攪拌し25℃で30分静置分離を行った。
分離してきた水難溶性有機溶剤及び汚れ成分等(切削油、液晶、ワックス)の混合物を含む上層の相分離性状(液体、フロック等)を確認すると共に、下層の分離水相のTOCを測定し、下記計算式により分離率を算出した。
分離率(%)=100×(分離前リンス廃液TOC−分離水相TOC)/分離前リンス排液TOC)
C) Evaluation of separability i) Normal separation (O / W)
Washing is repeated until the TOC due to the detergent component and the dirt component in the rinsing tank water shown in FIG. 1 rises to about 5%, and 0.2% of CaC12 is added to the rinsing waste liquid as a polyvalent metal salt and stirred at 25 ° C. For 30 minutes.
While confirming the phase separation properties (liquid, floc, etc.) of the upper layer containing a mixture of the poorly water-soluble organic solvent and dirt components (cutting oil, liquid crystal, wax) that have been separated, measure the TOC of the lower separated water phase, The separation rate was calculated by the following formula.
Separation rate (%) = 100 × (rinse waste liquid TOC before separation−separated aqueous phase TOC) / rinse drainage TOC before separation)

ii)W/O強制分離
上記i)の分離操作を繰り返し行い、分離水相は廃棄し水難溶性有機溶剤及び汚れ成分等(切削油、液晶、ワックス)の混合物の相を700cc作成した。そこに、TOC5%に上昇した溜リンス廃液にCaC12を0.2%添加・攪拌した溜リンス廃液300ccを流し込む。弱く攪拌し、W/O型乳化系を形成させたのち静置分離を行い、上記i)と同様に分離率を算出した。
ii) Forced W / O separation The separation operation of i) was repeated, the separated aqueous phase was discarded, and 700 cc of a mixture of a poorly water-soluble organic solvent and a soil component (cutting oil, liquid crystal, wax) was prepared. Then, 300 cc of a waste rinse waste liquid in which 0.2% of CaC12 was added and stirred into the waste liquid waste rinsed to 5% TOC. After weakly stirring to form a W / O type emulsification system, stationary separation was performed, and the separation rate was calculated in the same manner as i) above.

Figure 2005177694
Figure 2005177694

上記表1に示す結果から明らかなように、本発明範囲となる実施例1〜7は、本発明の範囲外となる比較例1〜3に較べて、洗浄性・リンス性共に良好で、且つ洗浄剤成分が液状に分離し、高い分離率を示すことが判明した。特に、実施例2、4、6及び7のW/O乳化系で分離を行った場合分離速度が著しく向上し(10分以内に平衡分離)、かつ、90%以上の分離率を示すことが判った。   As is clear from the results shown in Table 1 above, Examples 1 to 7, which are the scope of the present invention, have better cleaning and rinsing properties than Comparative Examples 1 to 3, which are outside the scope of the present invention, and It was found that the detergent component separated into a liquid and showed a high separation rate. In particular, when separation is performed in the W / O emulsification systems of Examples 2, 4, 6 and 7, the separation rate is remarkably improved (equilibrium separation within 10 minutes) and a separation rate of 90% or more is exhibited. understood.

本発明の硬質表面の洗浄後処理方法の実施形態の一例を示すプロセス図である。It is a process figure which shows an example of embodiment of the washing | cleaning post-processing method of the hard surface of this invention.

Claims (5)

アニオン界面活性剤と水難溶性有機溶剤を含む洗浄剤組成物を用いて硬質表面を有する被洗浄物を洗浄し、次いで、被洗浄物を水でリンスした後、該リンス廃液に多価金属塩を添加して混合・静置し、水難溶性有機溶剤を含む液体相と水相の二相に分離して、水相を排出する洗浄後処理工程を含むことを特徴とする硬質表面の洗浄後処理方法。   A cleaning object having a hard surface is cleaned using a cleaning composition containing an anionic surfactant and a poorly water-soluble organic solvent, and then the cleaning object is rinsed with water, and then a polyvalent metal salt is added to the rinsing waste liquid. Post-cleaning treatment of hard surfaces, which includes a post-cleaning treatment step that drains the aqueous phase by adding, mixing and standing, separating into two phases, a liquid phase containing a poorly water-soluble organic solvent and an aqueous phase. Method. リンス廃液を分離する際、W/O型乳化系を経由して水相を排出する請求項1記載の硬質表面の洗浄後処理方法。   The post-treatment method for cleaning a hard surface according to claim 1, wherein the aqueous phase is discharged via a W / O type emulsification system when separating the rinse waste liquid. 請求項1又は2記載の洗浄後処理方法に用いる洗浄剤組成物であって、該洗浄剤組成物が下記(1)と、(2)及び/又は(3)とを含むことを特徴とする洗浄剤組成物。
(1) アニオン界面活性剤のアニオンに対する対イオンが多価金属イオンのとき、該アニオン界面活性剤多価金属塩が油溶性又は油分散性となるアニオン界面活性剤。
(2) 炭化水素系、エステル系、エーテル系、ケトン系から選ばれる少なくとも1つの水難溶性有機溶剤。
(3) 下記一般式(I)で示される水難溶性グリコールエーテル系溶剤。
Figure 2005177694
A cleaning composition for use in the post-cleaning treatment method according to claim 1 or 2, wherein the cleaning composition contains the following (1), (2) and / or (3). Cleaning composition.
(1) An anionic surfactant in which the anionic surfactant polyvalent metal salt becomes oil-soluble or oil-dispersible when the counter ion to the anion of the anionic surfactant is a polyvalent metal ion.
(2) At least one poorly water-soluble organic solvent selected from hydrocarbons, esters, ethers, and ketones.
(3) A poorly water-soluble glycol ether solvent represented by the following general formula (I).
Figure 2005177694
更に、水を5〜70質量%含む請求項3記載の洗浄剤組成物。   Furthermore, the cleaning composition of Claim 3 which contains 5-70 mass% of water. 請求項1又は2記載の洗浄後処理方法に用いる洗浄剤組成物であって、アニオン界面活性剤及び水難溶性有機溶剤を含有し、該洗浄剤組成物を水で10倍希釈した液に塩化カルシウム2000ppmを添加して混合後、25℃、24時間静置した際、水相と水難溶性有機溶剤を含む液体相のニ相に分離することを特徴とする洗浄剤組成物。   A cleaning composition for use in the post-cleaning treatment method according to claim 1 or 2, comprising an anionic surfactant and a poorly water-soluble organic solvent, and calcium chloride in a solution obtained by diluting the cleaning composition 10 times with water. A detergent composition, which is separated into two phases of a liquid phase containing an aqueous phase and a poorly water-soluble organic solvent when 2000 ppm is added and mixed and left to stand at 25 ° C. for 24 hours.
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* Cited by examiner, † Cited by third party
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JP2008140855A (en) * 2006-11-30 2008-06-19 Lion Corp Cleaning agent composition for sliced silicon wafer or ingot

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