JP2005177576A - Agent for detoxifying halogen-based gas and acidic gas - Google Patents

Agent for detoxifying halogen-based gas and acidic gas Download PDF

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JP2005177576A
JP2005177576A JP2003419859A JP2003419859A JP2005177576A JP 2005177576 A JP2005177576 A JP 2005177576A JP 2003419859 A JP2003419859 A JP 2003419859A JP 2003419859 A JP2003419859 A JP 2003419859A JP 2005177576 A JP2005177576 A JP 2005177576A
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gas
halogen
agent
based gas
detoxifying
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Shinya Hasegawa
眞也 長谷川
Tetsuo Sato
哲郎 佐藤
Chiyo Asa
チョ 朝
Tetsushi Iwashita
哲志 岩下
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Yahashi Kogyo KK
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Yahashi Kogyo KK
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an agent for detoxifying halogen-based gas and acidic gas, by which waste gas such as halogen-based gas and acidic gas is fixed efficiently so that the fixed waste gas is not separated again from the agent and does not pollute the environment. <P>SOLUTION: This agent for detoxifying halogen-based gas and acidic gas contains slaked lime having ≥0.1 cc/g pore volume as a principal component and has a granulated shape. This agent can furthermore contain a hydroxide of an alkali metal or an alkaline-earth metal other than calcium and/or at least one of activated carbon, activated alumina, sepiolite, zeolite, silica gel and activated clay, as an adsorbent. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、特に半導体等製造時のエッチングガスや洗浄剤に使用されるハロゲン系ガス及び酸性ガスの廃ガスを効率よくアルカリ固体と反応させ固定化することにより、該廃ガスが再分離して環境汚染を起こさせないようにするための除害剤に関する。   The present invention is particularly effective in reacting and fixing waste gases such as halogen gases and acid gases used in etching gases and cleaning agents in the production of semiconductors, etc., efficiently with alkali solids, so that the waste gases are separated again. The present invention relates to a detoxifying agent for preventing environmental pollution.

ハロゲン系ガスにはＦ2 、Ｃｌ2 、Ｂｒ2 、ＣｌＦ3 、ＢｒＦ3 、ＢｒＦ5 があり、広義にはＳｉＦ4、ＢＣｌ３のような多くの種類のハロゲン化非金属ガスをも含む。また酸性ガスにはＨＦ、ＨＣｌ、ＨＣＯＯＨ、ＣＨ３ＣＯＯＨ、ＣＯ２他が存在する。従来、ハロゲン系ガス及び酸性ガスの乾式除害方法として、粒状の活性炭や活性アルミナ、ソーダ石灰を充填したカラムに廃ガスを通して除去する方法が実施されてきた。一般に乾式除害を行う場合、空気や不活性ガスで希釈された稀薄なガスを除害するため、除害効率が悪いという課題があった。その解決策として活性炭や活性アルミナ造粒品に薬剤を添着して除害効率を向上させる方法があるが、これは吸着・離脱の可逆反応であり、廃棄後に加熱等の影響で脱離するおそれがあった。ソーダ石灰は消石灰と水酸化ナトリウムからなる造粒品であるが、水酸化ナトリウムに換えて水酸化カリウムを使用することで効率よく除外できることが知られている（特開平０８−２１５５３８）。
特開平０８−２１５５３８ Halogen-based gases include F 2 , Cl 2 , Br 2 , ClF 3 , BrF 3 , and BrF 5 , and in a broad sense also includes many types of halogenated non-metal gases such as SiF 4 and BCl 3 . The acid gas includes HF, HCl, HCOOH, CH 3 COOH, CO 2 and others. Conventionally, a method of removing waste gas through a column filled with granular activated carbon, activated alumina, and soda lime has been practiced as a method for dry removal of halogen gas and acid gas. In general, when dry-type detoxification is performed, there is a problem that the detoxification efficiency is poor because dilute gas diluted with air or inert gas is detoxified. As a solution to this problem, there is a method to improve the detoxification efficiency by attaching a chemical to activated carbon or activated alumina granulated product, but this is a reversible reaction of adsorption and desorption, and it may be desorbed due to heating and other factors after disposal. was there. Soda lime is a granulated product composed of slaked lime and sodium hydroxide, but it is known that it can be efficiently excluded by using potassium hydroxide instead of sodium hydroxide (Japanese Patent Laid-Open No. 08-215538).
JP 08-215538 A

よって本発明の目的は、ハロゲン系ガス及び酸性ガスの廃ガスを効率よく固定化でき、かつ該廃ガスが再分離して環境汚染を起こすことのないハロゲン系ガス及び酸性ガスの除害剤を提供することにある。   Therefore, an object of the present invention is to provide a halogen-based gas and acid gas detoxifying agent that can efficiently fix waste gas of halogen-based gas and acid gas and that does not cause environmental pollution by re-separation of the waste gas. It is to provide.

上記目的を達成するために本発明に係るハロゲン系ガス及び酸性ガス用除害剤は、細孔容積０．１ｃｃ／ｇ以上の消石灰を主成分とし、かつ造粒されることにより構成される。さらに細孔容積０．１ｃｃ／ｇ以上の消石灰と、アルカリ金属又はカルシウム以外のアルカリ土類金属水酸化物と、吸着剤として活性炭、活性アルミナ、セピオライト、ゼオライト、シリカゲル、活性白土の少なくとも１つとを混合し、造粒される。   In order to achieve the above object, the halogen-based gas and acid gas scavenger according to the present invention is constituted by slaked lime having a pore volume of 0.1 cc / g or more as a main component and granulated. Furthermore, slaked lime having a pore volume of 0.1 cc / g or more, alkaline earth metal hydroxide other than alkali metal or calcium, and at least one of activated carbon, activated alumina, sepiolite, zeolite, silica gel, activated clay as an adsorbent. Mixed and granulated.

本発明に係るハロゲン系ガス及び酸性ガス除害剤はガスの除害効果に優れ、乾式除害装置のコンパクト化や除害剤の延命による省力化と廃棄物の減少に寄与し、また廃棄後にハロゲンや酸性物質が除害剤から再離脱するおそれもない。   The halogen-based gas and acid gas detoxifying agent according to the present invention are excellent in gas detoxifying effect, contribute to labor saving and reduction of waste by downsizing the dry-type detoxifying device and extending the life of the detoxifying agent, and after disposal There is also no risk of halogens or acidic substances releaving from the pesticide.

以下、本発明に係るハロゲン系ガス及び酸性ガス除害剤の実施の形態及び実施例について説明する。なお、以下の説明は発明をより深く理解するためのものであって、特許請求の範囲を限定するためのものではない。   Hereinafter, embodiments and examples of the halogen-based gas and acid gas scavenger according to the present invention will be described. The following description is for the purpose of understanding the invention more deeply and is not intended to limit the scope of the claims.

本明細書において細孔容積とは、通常の窒素ガスの吸着脱離法で測定可能な径２０Å〜１０００Åの細孔の容積を指し、従って細孔とはこの範囲の径を有する孔のことをいう。消石灰の細孔容積０．１ｃｃ／ｇ以下のものでは十分なガスの除害率が得られない。細孔容積０．１ｃｃ／ｇ以上の消石灰は、例えば特公平０６−８１９４や特開平０５−１９３９９７に記載されている生石灰と水と液状アルコールを反応させる方法により得ることができ、また特開２００２−８０２４９に記載されているように生石灰と水を反応させる際に冷却する方法によれば、比表面積が大きく、細孔容積が０．１ｃｃ／ｇ以上の消石灰を得ることができる。   In this specification, the pore volume refers to the volume of pores having a diameter of 20 to 1000 mm, which can be measured by the usual adsorption and desorption method of nitrogen gas, and therefore the pore has a diameter in this range. Say. If the pore volume of slaked lime is 0.1 cc / g or less, a sufficient gas abatement rate cannot be obtained. Slaked lime having a pore volume of 0.1 cc / g or more can be obtained, for example, by a method of reacting quick lime, water and liquid alcohol as described in JP-B 06-8194 and JP-A No. 05-193997. According to the method of cooling when reacting quick lime and water as described in -80249, slaked lime having a large specific surface area and a pore volume of 0.1 cc / g or more can be obtained.

本発明に係る除害剤には酸性ガスと反応し固定するための成分として、例えば水酸化ナトリウム、水酸化カリウム、水酸化バリウム、水酸化マグネシウム等のアルカリ金属又はカルシウム以外のアルカリ土類金属水酸化物を含むことができる。また本発明に係る除害剤には活性炭、活性アルミナ、セピオライト、ゼオライト（天然・合成）、シリカゲル、活性白土等の吸着剤を含むことができる。さらに、酸化マグネシウム、酸化鉄などの金属酸化物を含んでいてもよい。   As a component for reacting with and fixing the acid gas in the detoxifying agent according to the present invention, for example, alkali metal such as sodium hydroxide, potassium hydroxide, barium hydroxide, magnesium hydroxide, or alkaline earth metal water other than calcium An oxide can be included. Further, the detoxifying agent according to the present invention can include adsorbents such as activated carbon, activated alumina, sepiolite, zeolite (natural / synthetic), silica gel, activated clay. Furthermore, metal oxides such as magnesium oxide and iron oxide may be included.

上記のような水酸化物、吸着剤及び／または金属酸化物を配合する場合、消石灰に対して合わせて１０ｗｔ％以下であることが好ましく、望ましくは５ｗｔ％以下である。これらの配合割合が１０ｗｔ％を超えるとコストアップになったり、消石灰の減少分をこれら配合物との相乗効果では補いきれなくなる場合がある。   When blending the hydroxide, adsorbent and / or metal oxide as described above, the total amount is preferably 10 wt% or less, more preferably 5 wt% or less based on the slaked lime. If the blending ratio exceeds 10 wt%, the cost may increase, or the reduced amount of slaked lime may not be compensated by the synergistic effect with these blends.

本発明に係る除害剤には、水分を０．５〜２０ｗｔ％含むように調製されることが好ましい。通常、水分０．５ｗｔ％未満にするには水分除去に過度の時間とエネルギーを要するので経済的でなく、水分２０ｗｔ％以上では造粒品の強度が低く、造粒品の崩壊が生じ、形状を保持できなくなるともある。含有する水分は、除害するガスの種類によりきめ細かく調整することが可能であり、例えばハロゲンガスである塩素ガスやフッ素ガス用としては水分を可能な限り少なく（場合によっては５ｗｔ％以下）した方が好ましく、塩化水素やフッ化水素他酸性ガスや稀薄なガスには１２〜２０ｗｔ％程度が好ましい。   The detoxifying agent according to the present invention is preferably prepared so as to contain 0.5 to 20 wt% of water. Usually, it takes less time and energy to remove the water to make the water content less than 0.5 wt%, so it is not economical. If the water content is 20 wt% or more, the strength of the granulated product is low, and the granulated product is collapsed. May not be retained. The water content can be finely adjusted depending on the type of gas to be removed. For example, for chlorine gas or fluorine gas, which is a halogen gas, the water content is as low as possible (in some cases, 5 wt% or less) It is preferably about 12 to 20 wt% for acidic gas such as hydrogen chloride, hydrogen fluoride and other rare gases.

本発明に係る除害剤は、その少なくとも９５ｗｔ％が粒径０．５〜１０ｍｍの範囲になるように造粒されていることが好ましい。粒径０．５ｍｍ以下が５ｗｔ％以上になると該ガスの除害装置の圧力損失が大きくなり除害効率が悪い。粒径１０ｍｍ以上が５ｗｔ％以上になると接触効率が悪く不適当である。   The detoxifying agent according to the present invention is preferably granulated so that at least 95 wt% thereof is in the range of 0.5 to 10 mm in particle size. When the particle size of 0.5 mm or less is 5 wt% or more, the pressure loss of the gas abatement apparatus increases and the abatement efficiency is poor. If the particle size is 10 mm or more and 5 wt% or more, the contact efficiency is poor and inappropriate.

除害剤には、粉化・粉立ちを改善し、造粒時の安定製造を行うためにバインダーが添加される。バインダーには一般的な水ガラスやシリカ等の無機バインダーや、デンプン、セルロース類、ポリマーエマルジョン、ラテックス等の有機バインダーが使用される。本発明に係る除害剤は、細孔容積の比較的大きい消石灰を利用することにより、皮膜となって細孔を塞ぐ可能性のあるバインダーを使用しても、高いガス吸収性を維持することができる。こういった造膜性を有するバインダーとしては、例えばカルボキシルメチルセルロースアルカリ金属塩等のセルロース類、酢酸ビニル樹脂、アクリル樹脂、スチレン・アクリル樹脂、ＥＶＡ樹脂等のエマルジョン、ポリブタジエン、ポリイソプレン、ポリクロロプレン等のラテックス、ＰＶＡ、デンプン、水ガラス等が挙げられる。バインダーの添加量は全体の５ｗｔ％以下、好ましくは２ｗｔ％以下である。   A binder is added to the detoxifying agent in order to improve pulverization / powdering and perform stable production during granulation. As the binder, general inorganic binders such as water glass and silica, and organic binders such as starch, celluloses, polymer emulsions, and latex are used. By using slaked lime having a relatively large pore volume, the abatement agent according to the present invention maintains a high gas absorbency even when a binder that becomes a film and may block the pores is used. Can do. Examples of such a film-forming binder include celluloses such as carboxymethyl cellulose alkali metal salts, emulsions such as vinyl acetate resin, acrylic resin, styrene / acrylic resin, EVA resin, polybutadiene, polyisoprene, and polychloroprene. Examples include latex, PVA, starch, and water glass. The amount of binder added is 5 wt% or less, preferably 2 wt% or less.

除害剤の造粒方法は、造粒品が適切な硬度を有し、粉化しすぎず、かつ適当な圧潰強度を有するものが造粒可能であれば特に限定されず、転動式、押出方式、圧縮造粒方式等のさまざまな造粒機を用いることができる。造粒品の粒度は後破砕によっても調整可能である。造粒品の圧壊強度は５〜３０Ｎの範囲が好ましい。５Ｎ未満では造粒品の粉化が起きやすく、除害装置の圧損が生じるので好ましくなく、３０Ｎを超えると造粒品が緻密過ぎてガス除害効率が劣化する。   The granulating method of the pesticide is not particularly limited as long as the granulated product has an appropriate hardness, is not too pulverized, and has an appropriate crushing strength, and can be granulated. Various granulators such as a method and a compression granulation method can be used. The particle size of the granulated product can also be adjusted by post-crushing. The crushing strength of the granulated product is preferably in the range of 5 to 30N. If it is less than 5N, the granulated product is liable to be pulverized and pressure loss of the detoxifying device occurs, which is not preferable, and if it exceeds 30 N, the granulated product is too dense and the gas detoxification efficiency deteriorates.

次に本発明に係るハロゲン系ガス及び酸性ガス除害剤の実施例について説明する。   Next, examples of the halogen-based gas and acid gas scavenger according to the present invention will be described.

〔消石灰の製造〕
以下の実施例に使用した消石灰は、特開２００２−８０２４９記載の製法に従い製造した。すなわち（消石灰−１）は、生石灰１５０ｇと温度１８℃の消化水９０ｇ、冷却水７５ｇの割合で消化して得られたもので、細孔容積は０．１５２ｃｃ／ｇであった。（消石灰−２）は、生石灰１５０ｇに対して温度２８℃の７％トリエタノールアミン水溶液９７ｇと冷却水３００ｇを使用して調製され、細孔容積は０．１７６ｃｃ／ｇであった。 [Manufacture of slaked lime]
The slaked lime used in the following examples was produced according to the production method described in JP-A-2002-80249. That is, (slaked lime-1) was obtained by digesting at a ratio of 150 g quicklime, 90 g digested water at a temperature of 18 ° C., and 75 g cooling water, and the pore volume was 0.152 cc / g. (Slaked lime-2) was prepared using 97 g of 7% triethanolamine aqueous solution at a temperature of 28 ° C. and 300 g of cooling water with respect to 150 g of quicklime, and the pore volume was 0.176 cc / g.

〔実施例１〕
消石灰−１（細孔容積０．１５２ｃｃ／ｇ）１４００ｇにポリビニルアルコール（日本合成化学製ＧＨ−１７）５％水溶液を８０ｇ配合し、更に水６００ｇを混合し、前押しスクリュー形押出し造粒機の孔径３ｍｍΦダイスで造粒し、循環型温風電気乾燥機で乾燥し、水分３％の造粒品を得た。
細孔容積（２０〜１０００Å）：窒素吸着脱離法byNOVA3000細孔分布計
圧壊強度測定法：木屋式硬度計を使用
水分測定法：１０５℃、３時間 電気乾燥機（熱風無し）
ガス除害測定方法：
３４ｍｍφガラスフィルター付きガラスロートに５ｇの除害剤をセットし１％Ｃｌ２inＮ２ガスを５０ｍｌ／ｍｉｎの速度で通し、出口ガス濃度が５ｐｐｍになった時点での処理量をＣｌ２ガスの処理除害量（Ｌ）／除害剤１ｋｇに換算し比較した。
粒度：目開き０．５ｍｍと１０ｍｍの篩を使用し測定 [Example 1]
80 g of a 5% aqueous solution of polyvinyl alcohol (GH-17, manufactured by Nippon Synthetic Chemical) is blended with 1400 g of slaked lime-1 (pore volume 0.152 cc / g), and 600 g of water is further mixed. It granulated with a 3 mm diameter hole dies and dried with a circulating hot air electric dryer to obtain a granulated product with a moisture content of 3%.
Pore volume (20 ~ 1000mm): Nitrogen adsorption / desorption method by NOVA3000 pore distribution meter Crushing strength measurement method: Use Kiyama-type hardness meter Moisture measurement method: 105 ° C, 3 hours Electric dryer (no hot air)
Gas abatement measurement method:
Set a glass funnel with a 34 mmφ glass filter with 5 g of a detoxifying agent, pass 1% Cl 2 inN 2 gas at a rate of 50 ml / min, and treat the treatment amount when the outlet gas concentration becomes 5 ppm with the treatment of Cl 2 gas. Comparison was made in terms of the amount of detoxification (L) / kg of detoxifying agent.
Particle size: measured using sieves with apertures of 0.5 mm and 10 mm

〔実施例２〕
消石灰−２（細孔容積０．１７６ｃｃ／ｇ）１４００ｇと水４５０ｇと水酸化ナトリウム２０％水溶液２１０ｇとを混合し、水酸化カリウムを２８ｇを添加し、でんぷん粉体を１４ｇ添加して十分に混合し、前押しスクリュー押し出し造粒機で造粒後、乾燥した。水分は１５ｗｔ％であった。 [Example 2]
Mix 1400g of slaked lime-2 (pore volume 0.176cc / g), 450g of water and 210g of 20% aqueous solution of sodium hydroxide, add 28g of potassium hydroxide, add 14g of starch powder and mix well. Then, it was dried after granulation by a forward screw extrusion granulator. The moisture was 15 wt%.

〔実施例３〕
実施例２において、ダイス径を４．５ｍｍΦに換えて造粒し、水分５ｗｔ％に乾燥した後、粗砕機で粉砕して０．５ｍｍ目開きの篩で分級し、細い粒子をカットした。 Example 3
In Example 2, the dice diameter was changed to 4.5 mmΦ, granulated, dried to a moisture content of 5 wt%, pulverized with a crusher and classified with a sieve having an opening of 0.5 mm to cut fine particles.

〔実施例４〕
消石灰−２を１６００ｇと水４００ｇとに５％ＰＶＡ（日本合成化学製ＧＭ１４）を３０ｇ混合し、縦型押出機を使用し３ｍｍΦで造粒し、その後乾燥して水分６％の造粒品を得た。 Example 4
Mix 1g of slaked lime-2 with 30g of 5% PVA (GM14 manufactured by Nippon Synthetic Chemical) in 400g of water, granulate with 3mmΦ using a vertical extruder, and then dry to produce a granulated product with 6% moisture. Obtained.

〔比較例１〕
消石灰特号（矢橋工業（株）製、細孔容積０．０７５ｃｃ／ｇ）１４００ｇ、水４５０ｇ、水酸化ナトリウム２０ｗｔ％水溶液２１０ｇ、水酸化カリウム２８ｇ及びでんぷん粉体１４ｇを配合し、前押しスクリュー形押し出し機（口径３ｍｍのダイス）で造粒し、その後乾燥し、水分を１６ｗｔ％とした。 [Comparative Example 1]
Special slaked lime (Yabashi Kogyo Co., Ltd., pore volume 0.075 cc / g) 1400 g, water 450 g, sodium hydroxide 20 wt% aqueous solution 210 g, potassium hydroxide 28 g, and starch powder 14 g, pre-screw type Granulation was performed with an extruder (die having a diameter of 3 mm), and then dried to adjust the water content to 16 wt%.

〔比較例２〕
実施例２と同様の手順にて造粒した後、乾燥を省略して比較例２としたが、測定の途中目詰まりを起こしたので測定を中止した。 [Comparative Example 2]
After granulating in the same procedure as in Example 2, drying was omitted to make Comparative Example 2. However, the measurement was stopped because clogging occurred during the measurement.

〔比較例３〕
実施例３と同様の手順にて造粒・乾燥した後、０．５ｍｍ目開きの篩での分級を省略した造粒粗砕品を比較例３とし、測定に供したが圧損が大きくガスの流量が一定しないので測定を中止した。 [Comparative Example 3]
After granulating and drying in the same procedure as in Example 3, the granulated and crushed product in which classification with a sieve having an opening of 0.5 mm was omitted was used as Comparative Example 3, and the measurement was performed, but the pressure loss was large and the gas The measurement was stopped because the flow rate was not constant.

〔比較例４〕
水４５０ｇを添加しない以外は実施例２と同じ配合で混合物を作成し、コンパクティング形波板造粒機で波板状に造粒し、クラッシャーで粗砕し、１６ｍｍ目開きの篩で分級した後水分１３％まで加水した。 [Comparative Example 4]
A mixture was prepared with the same formulation as in Example 2 except that 450 g of water was not added, granulated into a corrugated plate with a compacting corrugated plate granulator, coarsely crushed with a crusher, and classified with a sieve having an opening of 16 mm. After that, water was added to 13%.

Figure 2005177576
Figure 2005177576

以上、本発明の実施の形態及び実施例について説明したが、本発明は上記実施の形態及び実施例に限定されるものではなく、本発明の要旨の範囲内において、適宜変形実施が可能であることは言うまでもない。   Although the embodiments and examples of the present invention have been described above, the present invention is not limited to the above-described embodiments and examples, and can be appropriately modified within the scope of the gist of the present invention. Needless to say.

Claims (5)

細孔容積０．１ｃｃ／ｇ以上の消石灰を主成分とし、かつ造粒されていることを特徴とするハロゲン系ガス及び酸性ガス除害剤。 A halogen-based gas and acid gas detoxifying agent, comprising as a main component slaked lime having a pore volume of 0.1 cc / g or more and granulated. さらに、アルカリ金属又はカルシウム以外のアルカリ土類金属の水酸化物、及び吸着剤を含む請求項１に記載のハロゲン系ガス及び酸性ガス除害剤。 The halogen-based gas and acid gas detoxifying agent according to claim 1, further comprising a hydroxide of an alkaline earth metal other than alkali metal or calcium, and an adsorbent. 吸着剤は活性炭、活性アルミナ、セピオライト、ゼオライト、シリカゲル、活性白土からなる群から選ばれた少なくとも一つである請求項１または２に記載のハロゲン系ガス及び酸性ガス除害剤。 The halogen-based gas and acid gas scavenger according to claim 1 or 2, wherein the adsorbent is at least one selected from the group consisting of activated carbon, activated alumina, sepiolite, zeolite, silica gel, and activated clay. 水分を０．５〜２０ｗｔ％含む請求項１乃至３のいずれかに記載のハロゲン系ガス及び酸性ガス除害剤。 The halogen-based gas and acid gas scavenger according to any one of claims 1 to 3, comprising 0.5 to 20 wt% of water. 少なくとも９５ｗｔ％が粒径０．５〜１０ｍｍの範囲に造粒されている請求項１乃至４のいずれかに記載のハロゲン系ガス及び酸性ガス除害剤。 The halogen-based gas and acid gas scavenger according to any one of claims 1 to 4, wherein at least 95 wt% is granulated in a particle size range of 0.5 to 10 mm.
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010064040A (en) * 2008-09-12 2010-03-25 Asahi Glass Co Ltd Halogen gas removing agent and method for removing halogen gas
WO2010139816A1 (en) * 2009-06-05 2010-12-09 Desarrollos Tecnicos Mc, S.L. Composition and use of an adsorbent material for filtering toxic components during the process of incineration and/or distillation of glycerine generated from the production of biodiesel
JP2014237582A (en) * 2014-07-05 2014-12-18 古手川産業株式会社 Hydrated lime, manufacturing method of hydrated lime and acidic gas removing agent
JP2015150538A (en) * 2014-02-18 2015-08-24 クラリアント触媒株式会社 Halogen compound absorbent and method for producing syngas using same
US11033878B2 (en) 2017-02-07 2021-06-15 Clariant Catalysts (Japan) K.K. Agent for removing halogen gas, method for producing same, method for removing halogen gas with use of same, and system for removing halogen gas

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010064040A (en) * 2008-09-12 2010-03-25 Asahi Glass Co Ltd Halogen gas removing agent and method for removing halogen gas
WO2010139816A1 (en) * 2009-06-05 2010-12-09 Desarrollos Tecnicos Mc, S.L. Composition and use of an adsorbent material for filtering toxic components during the process of incineration and/or distillation of glycerine generated from the production of biodiesel
JP2015150538A (en) * 2014-02-18 2015-08-24 クラリアント触媒株式会社 Halogen compound absorbent and method for producing syngas using same
WO2015125411A1 (en) * 2014-02-18 2015-08-27 クラリアント触媒株式会社 Halogen compound absorbent and method of producing syngas using same
JP2014237582A (en) * 2014-07-05 2014-12-18 古手川産業株式会社 Hydrated lime, manufacturing method of hydrated lime and acidic gas removing agent
US11033878B2 (en) 2017-02-07 2021-06-15 Clariant Catalysts (Japan) K.K. Agent for removing halogen gas, method for producing same, method for removing halogen gas with use of same, and system for removing halogen gas

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