JP2005170038A - Metal mask and method of manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a metal mask which is for use in forming a solder end on which electronic parts are mounted with high density, by using cream solder according to screen printing, wherein the metal mask is free from defectiveness such as cracking, slipout, and chipping of the solder end caused by defective plate separation, and defective cream solder detachability from an opening even if a high-definition pattern is printed with high density and at high speed, and free from defectiveness at the solder end even if printing is repeatedly carried out, and to provide a method of manufacturing the metal mask. <P>SOLUTION: According to the method of manufacturing the metal mask, a metal mask flat having the opening for cream solder printing for a wiring pattern, is subjected to intermittent electro-polishing, and thereafter at least a wall surface of the opening formed in the metal mask flat is coated with a metal plating film containing fluorocarbon resin particulates. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a mask for stencil printing such as cream solder used for forming connection terminals for mounting electronic components and semiconductor chips at high density.

From the demand for miniaturization and weight reduction of electronic circuits, such as mobile phones and digital cameras, etc., high integration of LSI circuits, high density mounting of electronic components on printed wiring boards, especially electronic components on both sides of printed wiring boards For example, high-density mounting is widely performed. In this high integration of LSI circuits and high density mounting of electronic components on a printed wiring board, in order to mount electronic components on the LSI or printed wiring board surface, cream solder is printed on the wafer or printed wiring board, It is widely practiced to form a high-definition and high-density wiring pattern of solder terminals, mount electronic components and semiconductor chips on the solder terminals, and mount the electronic components and semiconductor chips through a solder reflow furnace.
At this time, various stencil printing plates have been proposed and put into practical use for printing the wiring patterns of solder terminals without defects and with high definition and high density.

  For example, metal masks with resin pattern openings, resin masks, metal-resin laminated masks, etc., have high-definition and high-density printability, durability of printing accuracy, ease of making printing plates, etc. Widely used. As a method of forming an opening in the form of a wiring pattern in the stencil mask described above (mask manufacturing method), an etching method that is made by etching a metal or resin on a metal or resin film or plate using a photolithography method. In addition, the laser method that directly opens an opening in a metal or resin film or plate with a laser pattern, and another method for manufacturing a metal mask is to form a wiring pattern with a resist film on the surface of a conductive metal, and then manufacture by electroforming. There are additive methods, etc., which are properly used from the viewpoints of electronic component mounting density and economy.

  When cream solder is printed on a wafer or printed wiring board using a mask for stencil printing made as described above to form solder terminals for mounting electronic components, the pattern becomes highly precise and dense. The longer the cream solder is removed from the plate, the more the printing plate is separated, and the transfer property of the cream solder is deteriorated. As a result, the transferred cream solder oozes out, and defects such as chipping, cracking, and disconnection occur in the formed solder terminal, which is a major cause of yield reduction. In particular, when the printing speed is increased, the aforementioned defects are more likely to occur, and the printing speed cannot be increased. In addition, due to the creep characteristics of the mask material, the printing endurance of the mask due to the deformation of the opening due to the squeegee's stress and the displacement of the position during printing, the cream solder oozing out, and the position accuracy of the solder terminal decreases. There is also a problem that the performance is reduced.

  Furthermore, in recent years, so-called lead-free solder that does not contain lead has been used for environmental considerations, but the lead-free cream solder is inferior in transferability as compared with conventional cream solder, and has been described above. Defects are likely to occur.

In order to improve the above printing problems,
In JP-A-4-357093, a composite plating film in which fluorine-containing compound particles are co-deposited and dispersed is formed on at least the inner peripheral wall of a metal mask having cream solder supply holes, thereby improving the ability to remove cream solder. Metal masks have been proposed. Japanese Patent Application Laid-Open No. 7-32759 discloses a metal mask in which a metal mask provided with an opening by etching is electropolished to smooth the opening and improve the ability to remove cream solder.

However, when the solder disclosed in Patent Documents 1 and 2 is used to print cream solder, particularly lead-free cream solder, when a high-definition pattern is printed at high density, the cream solder can be easily removed from the opening. Is not sufficient, and the releasability of the plate is poor, and cream solder oozes out, or defects such as chipping, detachment, and cracking occur in the formed solder terminals. Further, the above problem appears more remarkably when the printing speed is increased.
Therefore, any of the cream solder printing masks disclosed in the above-mentioned document is not necessarily sufficient for high-density and high-definition printing, and further improvements are required.

  An object of the present invention is a metal mask for forming high-density, high-definition solder terminals for high-density mounting on a wafer, a printed wiring board, etc., with a fine and smooth opening on a wall surface. As a result, when the cream solder is printed, the cream solder is easy to come off from the opening, and is excellent in release properties. An object of the present invention is to provide a metal mask that is free from defects such as omission and cracking, that can increase the printing speed, and that has excellent mask printing durability.

  In order to print cream solder with high definition and high density, the present inventors have intensively studied a method for forming an opening of a metal mask, a surface treatment method for the mask, and the like, thereby completing the present invention.

That is, the present invention
A metal mask original plate provided with an opening for cream solder printing is subjected to an intermittent electrolytic polishing treatment, and then at least the wall surface of the opening portion of the metal mask original plate is coated with a metal plating film containing fluororesin fine particles. A metal mask, a metal mask formed by irradiating a metal plate with a laser beam to form an opening of the metal mask original plate, and a photolithographic method in which the metal mask original plate has a photosensitive resin layer. A metal mask formed by electro-nickel or nickel alloy plating after a pattern corresponding to the opening is formed by a photosensitive resin, and a glass mask when irradiating light to the photosensitive resin layer in the photolithography method A photosensitive resin layer is laminated on the metal mask and the conductive substrate exposed through the photosensitive resin layer. After forming a pattern corresponding to the opening with a photosensitive resin by a photolithographic method of exposing through a glass mask, at least a metal mask original plate provided with an opening for cream solder printing made by electro nickel or nickel alloy plating A metal mask in which the wall surface of the opening is coated with a metal plating film containing fluororesin fine particles, a plate for stencil printing in which any one of the above metal masks is attached to a metal frame through a ridge, and cream A step of forming a metal mask original plate by forming an opening for solder printing, a step of performing an intermittent electrolytic polishing process on the metal mask original plate, and containing fluororesin fine particles at least on the wall surface of the opening of the metal mask original plate subjected to the intermittent electrolytic polishing process A method of manufacturing a metal mask comprising a step of forming a metal plating film, and In production method, the production method of the metal mask openings are metal mask original plate formed by irradiating a laser beam to the metal plate.
In the manufacturing method, the step of forming the opening includes laminating a photosensitive resin on a conductive substrate, forming a pattern corresponding to the opening by a photolithographic method with the photosensitive resin, and applying nickel or a nickel alloy electric material to the substrate. A method for producing a metal mask comprising a plating step, a method for producing a metal mask that is exposed through a glass mask when irradiating the photosensitive resin film with light in the photolithographic method, and a photosensitive substrate. A process for laminating a resin layer, a process for forming a pattern corresponding to an opening with a photosensitive resin by a photolithographic method in which the photosensitive resin layer is exposed through a glass mask, and printing for a solder paste made by electro-nickel or nickel alloy plating A step of manufacturing a metal mask original plate provided with an opening of at least the metal mask original plate Method for producing a metal mask made of a part wall the step of coating a metal plating film containing fluorine resin particulates is.

  The metal mask for stencil printing of the present invention has high-definition and smooth-walled openings with high density, and as a result, the cream solder can be easily removed from the openings and is excellent in stencil release. However, there is no occurrence of cream solder bleeding, and it is possible to prevent the occurrence of defects such as cracking, disconnection, and chipping of solder terminals resulting from poor transferability of cream solder, and the productivity and yield of the solder terminal forming process can be prevented. Greatly improved.

Hereinafter, the metal mask of the present invention will be described in detail.
A metal mask for stencil printing is provided with an opening for a printing pattern in a metal plate such as nickel, an alloy thereof, or stainless steel. Examples of the method of forming the opening include a chemical etching method, a method of directly irradiating a metal plate with laser light, a machining method, and a plating method, but the formation of the opening of the metal mask original plate of the present invention. As the method, a method of directly irradiating a metal plate with a laser beam or a plating method is preferable from the viewpoint that it is easy to form an opening with relatively small irregularities on the wall surface and a small taper.

  In the method of directly irradiating a metal plate with laser light, an opening is formed by directly irradiating a metal plate such as stainless steel with laser light. Examples of the laser include known solid lasers, semiconductor lasers, gas lasers, etc. Among them, a YAG laser is preferable, and the wavelength thereof may be any of a fundamental wave, a harmonic wave, or a mixed wave thereof.

  The metal mask original plate is produced by plating a photosensitive resin on a conductive substrate such as stainless steel, and a pattern corresponding to the opening is formed with the photosensitive resin by a photolithographic method in which exposure and development are performed. Except for the corresponding part, the surface of the conductive substrate is exposed. At this time, a glass mask is preferable as the mask used when exposing the photosensitive resin in the photolithographic method because the position accuracy of the opening and the taper of the opening can be reduced. A glass mask is a mask in which a layer of silver salt, chromium, or the like is provided in a portion that shields light on a glass substrate, has excellent dimensional stability as compared with a film mask, and can reduce a gap with an exposure surface.

One aspect of the present invention is a metal mask in which a metal mask original plate having openings formed by the above-described method is subjected to an intermittent electrolytic polishing treatment and then coated with a metal plating film containing fluororesin fine particles.
Intermittent electropolishing is a method in which electropolishing is intermittently performed. A metal mask original plate is immersed in a polishing solution and energized for a certain period of time, and then not energized for a certain period of time. This energization and non-energization cycle is repeated. At this time, it is more preferable to perform reverse energization for a short time between the energization process and the non-energization process. Specifically, the energization process has a current density of 5 to 35 A / dm 2, preferably 10 to 30 A / dm 2, an energization time of 5 to 30 seconds, and the reverse energization process has a current density of −3 to −0.3 A / dm 2, The energization time is 0.5 to 5 seconds, and the non-energization process takes about 10 to 60 seconds.
Needless to say, an electrolytic solution suitable for the material to be polished is used as the polishing liquid.

Next, the metal mask original plate that has been subjected to the above-described intermittent electropolishing treatment is immersed in a metal plating bath containing fluorine resin fine particles to perform metal electroplating, and coats at least the opening wall surface with the metal plating film containing the fluorine resin fine particles. . Of course, the surface of the printed material and the squeegee surface other than the wall surface of the opening may be covered. As the metal for electroplating of metal, nickel or a nickel alloy is preferable in view of the strength and hardness of the metal mask.
Specific examples of the plating bath include fluorine resin fine particles commonly used in nickel or nickel alloy plating, such as watt bath, sulfuric acid bath, sulfamic acid bath, chloride bath, complexing bath with inorganic or organic compounds, borofluoride bath, etc. Examples include added baths.
The film thickness of the metal plating film containing the fluororesin fine particles is preferably 1 μm or more in view of the effects of the present invention.

  When a metal plating film containing fluororesin fine particles is formed, various surface treatments such as mechanical treatment and chemical treatment may be performed in order to improve adhesion to the substrate surface. In particular, strike plating using nickel chloride is a preferable treatment for improving adhesion.

Examples of the fluororesin used in the present invention include homopolymers or copolymers such as tetrafluoroethylene, trifluoroethylene, chlorotrifluoroethylene, and trifluoropropylene, and copolymers with other monomers. The particle diameter is preferably about 0.1 to 0.5 μm. The addition amount of the fluororesin fine particles varies depending on the plating method, and it is preferable to control the content of the fluororesin fine particles in the coating to be 4 to 20% by weight in order to exhibit the effects of the present invention. ˜15% by weight is particularly preferred.
The content of the fluororesin fine particles in the coating can be determined by dissolving the metal with nitric acid or the like and measuring the weight of the remaining fluororesin fine particles.

  Another aspect of the present invention is a metal mask in which a metal plating film containing fluorine fine particles is formed by the above-described method without performing intermittent electrolytic polishing on the metal mask original plate manufactured by the above-described plating method. is there.

The shape of the opening of the metal mask of the present invention is not particularly limited, and for example, a circle, an ellipse, a square, a rectangle, a rhombus, a square such as a trapezoid, a polygon such as a hexagon and an octagon, other a bowl, a dumbbell The maximum opening of various shapes described above is about 30 to 500 μm for high-density mounting.
Moreover, although the thickness of the metal mask of this invention is based also on the shape of the solder terminal to form, it is about 20-500 micrometers.

  The metal mask of the present invention is attached to a metal frame made of aluminum, stainless steel, copper or the like through a ridge to form a plate for stencil printing. The specific method of attaching the metal mask through the heel is to attach the heel to the above-described metal frame with an adhesive, and the outer peripheral portion of the metal mask of the present invention smaller than the size of the metal frame at the center of the heel. Is attached to the ridge using an adhesive. Next, it can be made by cutting off the inner ridges other than the bonded portion.

  The printing plate created above is mounted on a screen printing machine, set on a printed wiring board, and cream solder is placed on the plate, and the cream solder is filled into the opening of the mask while being handled with a squeegee, and then printed. When the plate is separated from the printed wiring board, the cream solder filled in the opening is transferred onto the printed wiring board to form solder terminals. The size of the formed solder terminal is usually about 30 to 500 μm.

  Hereinafter, the present invention will be described in more detail with reference to examples. However, the present invention is not limited to these examples.

  The surface of a SUS304 substrate having a plate thickness of 0.2 mm and 550 × 650 mm was leveled (buffed), and a dry film resist (FP240, manufactured by Tokyo Ohka Kogyo Co., Ltd.) was laminated. Next, as a solder terminal pattern for mounting electronic components, a circle of 50 μm in diameter is used as a basic pattern of a square of 30 mm × 30 mm consisting of 68 (total 4624) each in a vertical and horizontal direction of 100 μm, and the basic pattern is repeated at a pitch of 43 mm. A mirror reflection type parallel light exposure machine (EXM) having a pattern in which a total of 15 pieces of 3 × 5 are arranged, using a glass mask in which a circle portion transmits ultraviolet rays and other than the circle portion does not transmit ultraviolet rays. -201, manufactured by Oak Co., Ltd.), aged for 15 minutes, developed with 1.0% sodium carbonate aqueous solution, washed with water, and solder terminal pattern group of 50 μm circular dry film resist film on SUS304 substrate (The surface of the SUS304 substrate was exposed except for the portion corresponding to the solder terminal).

  The SUS304 substrate on which the above pattern was formed was placed in a nickel sulfamate plating bath, and a nickel film having a thickness of 80 μm was formed on the substrate at 2 A / dm 2 and a bath temperature of 45 ° C. Next, the nickel film was peeled from the SUS304 substrate to produce a nickel maskal mask original plate.

  Nickel chloride coating film containing fluororesin fine particles using Nimflon FRS (manufactured by Uemura Kogyo Co., Ltd.) after applying nickel chloride strike plating to the above metal mask original plate Was deposited. The film thickness was 2 μm, and when the film was measured by dissolving it in nitric acid, it contained 8% by weight of fluororesin fine particles. The metal mask of the present invention was manufactured by cutting the outer shape to be 400 mm × 480 mm.

  After pasting the portion 1 cm inside from the outer periphery of the mask created as described above to an aluminum frame having an outer shape of 550 × 650 mm with a 180-mesh polyester wrinkle stretched, using an epoxy-based adhesive, A stencil printing plate was prepared by cutting off the wrinkles 1 cm inside from the outer periphery of the printing mask.

  The printing plate made as described above is mounted on a screen printing machine (SP28P-DH, manufactured by Panasonic Factory Solution Co., Ltd.), and lead-free cream solder (LF-71S-3, Tamra Chemical Research ( Manufactured by Co., Ltd.) and dried to form a solder terminal having a diameter of about 50 μm. The formed solder terminals were observed, but no defects such as cream solder bleeding, solder terminal cracks, omissions, and chipping occurred. Further, even if cream solder was repeatedly printed 5,000 times, no abnormality occurred in the formed solder terminals.

[Comparative Example 1]
In Example 1, a metal mask and a stencil printing plate were produced in exactly the same manner as in Example 1 except that a nickel plating film containing fluororesin fine particles was not formed, and printing evaluation of cream solder was performed. Chipping due to poor transferability of cream solder occurred in almost all of the formed solder terminals. Further, when the cream solder was repeatedly printed, the chipping due to the transfer defect became more severe.

In Example 1, before forming the nickel plating film containing the fluororesin fine particles, the metal mask original plate was subjected to a condition of 45 ° C. using an electrolytic solution having a phosphoric acid concentration of 600 ml / l and a sulfuric acid concentration of 180 ml / l. Then, using the metal mask original plate as an anode, the following intermittent electropolishing conditions were set to 1 cycle, and after 20 cycles of intermittent electropolishing treatment, a nickel plating film containing fluororesin fine particles was formed to produce a metal mask. did.
Current density Energization time energization: 15 A / dm2 15 seconds Reverse energization: -0.5 A / dm2 3 seconds Non-energization: 0 A / dm2 20 seconds Next, a stencil printing plate was prepared in the same manner as in Example 1, and the cream solder A printing test was conducted. No abnormality occurred in the solder terminals formed even after printing 7,000 times.

A stainless steel plate was irradiated with YAG laser light to form openings having the same pattern as in Example 1 to produce a metal mask original plate. The metal mask original plate was subjected to intermittent electropolishing under the following electropolishing conditions.
Current density Energization time energization: 25 A / dm2 10 seconds Reverse energization: -1.5 A / dm2 1 second Non-energization: 0 A / dm2 40 seconds Next, a nickel plating film containing fluororesin fine particles was formed in the same manner as in Example 1. A metal mask was prepared by film formation. Using this metal mask, a stencil printing plate was produced in the same manner as in Example 1, and printing evaluation of cream solder was performed. The formed solder terminals did not have any defects such as cream solder bleeding, cracks, breakage, or chipping of the solder terminals. Further, even if cream solder was repeatedly printed 7,000 times, no abnormality occurred in the formed solder terminals.

[Comparative Example 2]
In Example 3, a metal mask and a stencil printing plate were produced in exactly the same manner as in Example 3 except that nickel chloride strike plating and nickel plating containing fluororesin fine particles were not performed, and printing evaluation of cream solder was performed. It was. Chipping due to poor transferability of cream solder occurred in almost all of the formed solder terminals. Further, when the cream solder was repeatedly printed, the chipping due to the transfer defect became more severe.

In Example 3, instead of the electric nickel plating solution (Nimflon FRS, manufactured by Uemura Kogyo Co., Ltd.) containing fluororesin fine particles, the following electric nickel plating solution was used, with a current density of 2.5 A / dm 2 and a bath temperature of 40. A metal mask was produced in the same manner as in Example 3 except that electroplating was performed under the condition of ° C. The film thickness of the film containing fluororesin fine particles (polytetrafluoroethylene having an average particle system of 0.3 μm) was 5 μm, and the content of the fluororesin fine particles in the film was 6% by weight. Next, a stencil printing plate was produced in the same manner as in Example 1, and printing evaluation of cream solder was performed. The printing result was substantially the same as in Example 3.
Nickel sulfamate 400g / l
Nickel chloride 30g / l
Boric acid 30g / l
Fluororesin fine particles 80g / l

The metal mask of the present invention is capable of printing cream solder with excellent transferability even when high-definition patterns are printed at high density and at high speed, making solder terminals for high-density mounting of electronic components. Available.

Claims (11)

The metal mask original plate provided with the opening for cream solder printing is subjected to an intermittent electrolytic polishing treatment, and then at least the opening wall surface of the metal mask original plate is coated with a metal plating film containing fluororesin fine particles. A metal mask characterized by 2. The metal mask according to claim 1, wherein the opening of the metal mask original plate is formed by irradiating the metal plate with laser light. The metal mask original plate is formed by electro-nickel or nickel alloy plating after laminating a photosensitive resin layer on a conductive substrate and forming a pattern corresponding to the opening by a photolithographic method with the photosensitive resin. The metal mask according to claim 1. 4. The metal mask according to claim 3, wherein exposure is performed through a glass mask when the photosensitive resin layer is irradiated with light in a photolithographic method. A photosensitive resin layer is laminated on a conductive substrate, and a pattern corresponding to the opening is formed with a photosensitive resin by a photolithographic method in which the photosensitive resin layer is exposed through a glass mask. A metal mask characterized in that at least an opening wall surface of a metal mask original plate provided with an opening for cream solder printing is coated with a metal plating film containing fluororesin fine particles. A plate for stencil printing, wherein the metal mask according to any one of claims 1 to 5 is attached to a metal frame through a ridge. A step of manufacturing a metal mask original plate having an opening for cream solder printing, a step of performing an intermittent electrolytic polishing treatment on the metal mask original plate, and a fluororesin fine particle on at least the opening wall surface of the metal mask original plate subjected to the intermittent electrolytic polishing treatment The manufacturing method of the metal mask which consists of the process of forming the metal plating membrane | film | coat to contain. 8. The method of manufacturing a metal mask according to claim 7, wherein the opening is a metal mask original plate formed by irradiating a metal plate with laser light. The formation of the opening consists of a step of laminating a photosensitive resin on a conductive substrate, forming a pattern corresponding to the opening by a photolithographic method, and performing electroplating of nickel or a nickel alloy on the substrate. The method of manufacturing a metal mask according to claim 7. 10. The method of manufacturing a metal mask according to claim 9, wherein when the photosensitive resin film is irradiated with light in a photolithographic method, exposure is performed through a glass mask. A step of laminating a photosensitive resin layer on a conductive substrate, a step of forming a pattern corresponding to the opening with a photosensitive resin by a photolithographic method in which the photosensitive resin layer is exposed through a glass mask, and plating by electro nickel or nickel alloy plating. Characterized in that it comprises a step of manufacturing a metal mask original plate provided with an opening for cream solder printing, and a step of coating at least the wall surface of the opening of the metal mask original plate with a metal plating film containing fluororesin fine particles. A method for manufacturing a metal mask.