JP2005161131A - Monitoring method, monitoring device, drawing device, manufacturing method for electro-optical device, electro-optical device and electronic instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a monitoring method capable of confirming the action state of a function liquid consumption action by monitoring the action circumstance of the function liquid consumption action, a monitoring device, a drawing device, a manufacturing method for an electro-optical device, an electro-optical device and an electronic instrument. <P>SOLUTION: In the monitoring method, the function liquid consumption action that the function liquid is consumed from a function liquid tank 51 for feeding the function liquid to a function liquid drop delivery head 16 through the function liquid drop delivery head 16 is monitored. The method is provided with a consumption trend measurement step for measuring aging consumption trend of the function liquid by the function liquid consumption action; a reference consumption trend obtaining step for obtaining the consumption trend corresponding to the measured consumption trend as reference consumption trend from a consumption table specifying, with age, the consumption trend from starting of action at normal action to completion of the action; and a determination step for determining whether or not the function liquid consumption action is normal by comparing the measured consumption trend with the reference consumption trend. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a monitoring method and a monitoring device for a functional liquid consumption operation that consumes a functional liquid from a functional liquid tank that supplies the functional liquid to the functional liquid droplet ejection head via the functional liquid droplet ejection head, a drawing apparatus, and an electro-optical device. The present invention relates to a device manufacturing method, an electro-optical device, and an electronic apparatus.

In a drawing device that draws functional droplets on a workpiece by driving the functional droplet discharge head that receives the supply of functional liquid from the functional liquid tank, drawing operation (functional liquid consumption operation) ), The functional liquid droplet ejection head is ejected and a predetermined inspection pattern is drawn to confirm the ejection state of the functional liquid droplet ejection head.
JP 2003-251243 A

  However, in the conventional drawing apparatus, even if the discharge state before drawing on the workpiece can be confirmed, it is not possible to check the discharge state of the drawing operation performed on the workpiece, and the drawing operation performed on the workpiece. In order to confirm the operation state, an inspection for detecting missing dots or the like must be separately performed on the work on which the drawing operation has been performed. In other words, the operation state can only be confirmed by performing a new inspection on the operation result. Therefore, the present invention provides a monitoring method and a monitoring device that can monitor the operation state of the functional liquid consumption operation and confirm the operation state of the functional liquid consumption operation, as well as a drawing apparatus, an electro-optical device manufacturing method, an electro-optical apparatus, and an electronic device. The issue is to provide equipment.

  The present invention relates to a function according to a functional liquid consumption operation in a monitoring method for monitoring a functional liquid consumption operation for consuming a functional liquid via a functional liquid droplet ejection head from a functional liquid tank that supplies the functional liquid to the functional liquid droplet ejection head. From the consumption trend measurement process that measures the consumption trend of liquid over time and the consumption table that defines the consumption trend from the start of operation to the end of operation during normal operation over time, the consumption trend corresponding to the measured consumption trend is A reference consumption trend acquisition step that is acquired as a reference consumption trend, and a determination step that compares the measured consumption trend with the reference consumption trend to determine whether the functional liquid consumption operation is normal. Features.

  Further, the present invention provides a functional liquid consumption operation in a monitoring device that monitors a functional liquid consumption operation for consuming a functional liquid via a functional liquid droplet ejection head from a functional liquid tank that supplies the functional liquid to the functional liquid droplet ejection head. Consumption trend measurement means that measures the consumption trend of functional fluid over time and the consumption trend corresponding to the measured consumption trend from the consumption table that defines the consumption trend from the start of operation to the end of operation in normal operation over time A reference consumption trend acquisition means for acquiring a reference consumption trend, and a determination means for comparing the measured consumption trend with the reference consumption trend to determine whether the functional liquid consumption operation is normal or not. It is characterized by that.

  According to these configurations, it was performed by measuring the consumption trend of the functional liquid over time due to the functional liquid consumption operation, and by obtaining the corresponding standard consumption trend during normal operation and comparing them It can be determined whether or not the functional liquid consumption operation is normal. In other words, based on the consumption table that shows the consumption trend during normal operation, it is easy to determine whether the performed functional fluid consumption operation is appropriate by grasping the consumption trend of the actual functional fluid consumption operation. Can be judged. In addition, since it is possible to determine the suitability of the operation status of the functional liquid consumption operation simply by comparing the measured consumption trend of the functional liquid and the reference consumption trend acquired based on the consumption table, the functional liquid consumption operation is performed during the execution of the functional liquid consumption operation. It is also possible to determine whether the consumption operation is normal. In other words, in parallel with the functional fluid consumption operation, the operating status of the functional fluid consumption operation can be determined, so that even if a malfunction occurs during the functional fluid consumption operation, this can be quickly found and wasteful functional fluid consumption It is possible to prevent the operation from being continuously performed. The functional liquid tank only needs to supply the stored functional liquid to the functional liquid droplet ejection head, and may be of a pack type or a cartridge type.

  In these cases, the functional liquid consumption operation is performed from the drawing operation performed by the ejection driving of the functional liquid droplet ejection head, the discard ejection operation performed by the ejection driving of the functional liquid droplet ejection head, and the nozzle surface of the functional liquid droplet ejection head. Maintenance operation to maintain the functional liquid droplet ejection head by sucking the functional liquid, and functional liquid from the functional liquid tank to the functional liquid droplet ejection head by sucking the functional liquid from the nozzle surface of the functional liquid droplet ejection head It is preferable that the flow path includes at least one operation of filling a functional liquid into the functional liquid.

  According to this configuration, it is possible to easily determine whether or not the operation state of the operation constituting the functional liquid consumption operation is appropriately performed. In addition, the drawing operation, the disposal discharge operation, the maintenance operation, and the functional liquid filling operation are typical ones that can be the functional liquid consumption operation, and these operations differ in the amount of functional liquid consumption per operation. Each operation can be performed efficiently by making it possible to determine whether or not the situation is appropriately performed.

  In this case, it is preferable to further include a type of the monitored function liquid consumption operation and a notification step of notifying the determination result.

  In this case, it is preferable to further include a type of the functional liquid consumption operation and a notification unit that notifies the determination result.

  According to these configurations, since the type of the functional liquid consumption operation and the determination result are notified, the user can efficiently deal with them based on these. That is, if the monitored functional liquid consumption operation is normal, the subsequent operation can be instructed. On the other hand, if the functional liquid consumption operation is abnormal, maintenance can be performed to eliminate the cause of the abnormality.

  In this case, the consumption trend is a consumption amount of the functional liquid consumed within a predetermined time, and the consumption trend measurement step is predetermined from the first measurement step for measuring the weight of the functional liquid tank and the measurement by the first measurement step. A second measurement step for measuring the weight of the functional liquid tank again after time, and a calculation step for calculating a change in consumption over time from the measurement results of the first measurement step and the second measurement step. It is preferable.

  According to this configuration, the consumption amount of the functional liquid consumed within a predetermined time is calculated by the functional liquid consumption operation, and this is compared with the consumption amount of the functional liquid during normal operation (corresponding to the predetermined time). Thus, it is possible to determine the operation status of the functional liquid consumption operation. The consumption amount of the functional liquid indicates the consumption weight, the consumption volume, and the like of the functional liquid.

  In this case, the consumption trend is the weight of the functional liquid tank that decreases within a predetermined time, and the consumption trend measurement process includes the first measurement process for measuring the weight of the functional liquid tank and the measurement by the first measurement process. It is preferable to have a second measuring step of measuring the weight of the functional liquid tank again after a predetermined time.

  According to this configuration, if the functional liquid consumption operation is performed appropriately, the weight of the functional liquid tank is reduced in accordance with the reference consumption trend acquired from the consumption table. It is possible to determine the operation status of the functional liquid consumption operation by directly using the weight of the functional liquid tank.

  The present invention relates to a drawing apparatus that draws functional droplets on a workpiece by driving the functional droplet discharge head while relatively moving the functional droplet discharge head on which the discharge nozzle is formed with respect to the workpiece. The monitoring method according to any one of the above is applied, or the monitoring device according to any one of the above is provided.

  According to this configuration, the operation status of the functional liquid consumption operation (specifically, the drawing operation by the functional liquid droplet discharge head, the discard discharge operation, etc.) performed in the drawing apparatus is grasped by monitoring, and the suitability of the operation status is determined. It is possible to judge.

  A method of manufacturing an electro-optical device according to the present invention is characterized in that a film forming unit is formed by functional droplets on a work using the above drawing device. In addition, an electro-optical device according to the present invention is characterized in that a film forming unit made of functional droplets is formed on a workpiece using the above-described drawing device.

  According to these configurations, since the drawing device capable of grasping the operation status of the functional liquid consumption operation by monitoring is used, the malfunction of the functional liquid consumption operation can be quickly found, so that these can be manufactured efficiently. It can be carried out. Examples of the electro-optical device (device) include a liquid crystal display device, an organic EL (Electro-Luminescence) device, an electron emission device, a PDP (Plasma Display Panel) device, and an electrophoretic display device. The electron emission device is a concept including a so-called FED (Field Emission Display) device or SED (Surface-Conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to an aspect of the invention includes the electro-optical device manufactured by the above-described electro-optical device manufacturing method or the electro-optical device described above.

  In this case, the electronic apparatus corresponds to various electric products in addition to a mobile phone and a personal computer equipped with a so-called flat panel display.

  As described above, according to the monitoring method and the monitoring apparatus of the present invention, whether or not the operation is normally performed by comparing the consumption trend of the functional liquid due to the functional liquid consumption operation with the consumption trend during the normal operation. Can be easily determined. And since this determination can also be performed during execution of functional liquid consumption operation | movement, the malfunction which arose during operation | movement can be detected.

  Since the drawing apparatus of the present invention includes the monitoring method and the monitoring device described above, it is possible to determine whether or not the operation state of the functional liquid consumption operation is appropriate and perform the functional liquid consumption operation efficiently. For example, since an inappropriate functional liquid consumption operation can be prevented from being continuously performed, the amount of functional liquid consumed by an inappropriate functional liquid consumption operation can be reduced. In addition, since the electro-optical device manufacturing method, the electro-optical device, and the electronic apparatus of the present invention are manufactured using the above drawing apparatus, they can be efficiently manufactured.

  Hereinafter, a drawing apparatus to which the present invention is applied will be described with reference to the accompanying drawings. This drawing apparatus is incorporated into a so-called flat display production line, and by a droplet discharge method using a functional droplet discharge head, a color filter of a liquid crystal display device, a light emitting element that becomes each pixel of an organic EL device, or the like Is formed.

  FIG. 1 is a schematic plan view of a drawing apparatus. As shown in the figure, the drawing apparatus 1 has a functional liquid droplet ejection head 16, and is attached to the liquid droplet ejection apparatus 3 and a liquid droplet ejection apparatus 3 that is widely placed over the entire area of the machine base 2. Thus, a head maintenance device 4 placed on the machine base 2 and a control device 5 connected thereto are provided. Further, the drawing apparatus 1 is provided with a monitoring device 6 for monitoring the operation status of the drawing apparatus 1, and the monitoring device 6 is also connected to the control device 5.

  In the drawing apparatus 1, the control apparatus 5 performs overall control of the entire apparatus. Based on the control by the control apparatus 5, the droplet discharge apparatus 3 performs a drawing operation on the workpiece W and controls the functional droplet discharge head 16. Thus, the head maintenance device 4 appropriately performs a maintenance operation (maintenance). The droplet discharge operation by the droplet discharge device 3 and the maintenance operation by the head maintenance device 4 are monitored by the control device 5 via the monitoring device 6 to monitor whether each operation is normally performed. It has come to be.

  The droplet discharge device 3 includes an X / Y moving mechanism 11 including an X-axis table 12 for moving the workpiece W in the main scanning (moving in the X-axis direction) and a Y-axis table 13 orthogonal to the X-axis table 12, and a Y-axis table 13. A main carriage 14 movably attached to the head, a head unit 15 mounted on the main carriage 14 and mounted with the functional liquid droplet ejection head 16, and a functional liquid supply mechanism for supplying the functional liquid droplet head 16 with the functional liquid. 17.

  The X-axis table 12 has an X-axis slider 22 driven by an X-axis motor (not shown) constituting a drive system in the X-axis direction, and a set table 25 including a suction table 23, a θ table 24, and the like can be moved freely. It is configured on board. Similarly, the Y-axis table 13 has a Y-axis slider 27 for driving a Y-axis motor (not shown) constituting a drive system in the Y-axis direction, and supports the head unit 15 via a θ rotation mechanism 28. The main carriage 14 is mounted so as to be movable in the Y-axis direction.

  The X-axis table 12 is disposed in parallel with the X-axis direction and is directly supported on the machine base 2. On the other hand, the Y-axis table 13 is supported by left and right columns 31 erected on the machine base 2 and extends in the Y-axis direction so as to straddle the X-axis table 12 and the head maintenance device 4 (see FIG. 1).

  In the drawing apparatus 1, the area where the X-axis table 12 and the Y-axis table 13 intersect is the drawing area 32 where the workpiece W is drawn, and the area where the Y-axis table 13 and the head maintenance apparatus 4 intersect is functional recovery for the functional liquid droplet ejection head 16. A maintenance area 33 is provided for processing. The head unit 15 is allowed to face the drawing area 32 when drawing on the work W and to the maintenance area 33 when performing function recovery processing.

  The head unit 15 includes a (one) functional liquid droplet ejection head 16 and a head plate (not illustrated) on which the functional liquid droplet ejection head 16 is mounted via a head holding member (not illustrated). The main carriage 14 is attached with a θ rotation mechanism 28 that is supported by a Y-axis slider 27 and that slightly rotates the head unit 15 in the θ direction. That is, the head unit 15 is supported by the main carriage 14 via the head plate supported by the θ rotation mechanism 28.

  As shown in FIG. 2, the functional liquid droplet ejection head 16 has a so-called double structure, a functional liquid introduction part 41 having two connection needles 42, and a double head substrate connected to the functional liquid introduction part 41. 43, and a head main body 44 which is connected to the lower side of the functional liquid introducing portion 41 and has an in-head flow path filled with the functional liquid therein. The connection needle 42 is connected to the functional liquid supply mechanism 17 (not shown), and supplies the functional liquid to the flow path in the head of the functional liquid droplet ejection head 16. The head main body 44 includes a cavity 45 (piezoelectric piezoelectric element) and a nozzle plate 46 having a nozzle surface 47 in which a large number (180) of discharge nozzles 47 are opened, and discharges the functional liquid droplet discharge head 16. When driven, functional droplets are discharged from the discharge nozzle 47 by the pump action of the cavity 45. The ejection of the functional liquid droplet ejection head 16 is performed during a drawing operation on the workpiece W and during a flushing operation (described later) for preventing the nozzles of the ejection nozzle 47 from clogging.

  As shown in FIGS. 1 and 3, the functional liquid supply mechanism 17 includes a functional liquid pack 51 that stores the functional liquid, and a functional liquid supply tube 52 that connects the functional liquid pack 51 and the functional liquid droplet ejection head 16. Have. The functional liquid in the functional liquid pack 51 is continuously supplied to the functional liquid droplet ejection head 16 via the functional liquid supply tube 52 by the pump action of the functional liquid droplet ejection head 16. The functional liquid supply tube 52 in the vicinity of the functional liquid droplet ejection head 16 is provided with a flow sensor for measuring the flow rate of the functional liquid flowing through the functional liquid supply tube 52 and a functional liquid supply valve for opening and closing the functional liquid supply tube 52. It is also possible to intervene. Needless to say, the means for storing the functional liquid is not limited to the functional liquid pack 51, and a tank type or a cartridge type can be applied.

  The head maintenance device 4 is placed on the machine base 2, and a moving table 61 extending in the X-axis direction, a suction unit 62 placed on the moving table 61, and the moving table 61 along with the suction unit 62. And a wiping unit 63 disposed in the. The moving table 61 is configured to be movable in the X-axis direction, and is configured to appropriately move the suction unit 62 and the wiping unit 63 to the maintenance area 33 during maintenance of the functional liquid droplet ejection head 16. In addition to the above units, a discharge inspection unit for inspecting the flight state of the functional liquid droplets ejected from the functional liquid droplet ejection head 16 and the weight of the functional liquid droplets ejected from the functional liquid droplet ejection head 16 are measured. It is preferable to mount a weight measuring unit or the like on the head maintenance device 4.

  As shown in FIGS. 1 and 3, the suction unit 62 includes a cap stand 71, a cap 72 supported by the cap stand 71 and in close contact with the nozzle surface 47 of the functional liquid droplet ejection head 16, and a cap A suction pump 73 that performs suction of the functional liquid droplet ejection head 16 via 72, and a suction tube 74 that connects the cap 72 and the suction pump 73. A suction pressure detection sensor 75 for detecting the suction pressure and a liquid detection sensor 76 for detecting the presence or absence of the functional liquid passing through the suction tube 74 are provided on the downstream side (the suction pump 73 side) of the cap 72 of the suction tube 74. It has been. Although not shown in the figure, the cap stand 71 incorporates a cap lifting mechanism 77 that lifts and lowers the cap 72 by driving a motor, and with respect to the functional liquid droplet ejection head 16 of the head unit 15 facing the maintenance area 33. Thus, the cap 72 can be separated.

  When suctioning the functional liquid droplet ejection head 16, the cap lifting mechanism 77 is driven to bring the cap 72 into close contact with the nozzle surface 47 of the functional liquid droplet ejection head 16 and the suction pump 73 is driven. Thereby, a suction force can be applied to the functional liquid droplet ejection head 16 via the cap 72, and the functional liquid is forcibly discharged from the functional liquid droplet ejection head 16. The suction of the functional liquid is performed in order to eliminate / prevent clogging of the functional liquid droplet ejection head 16, and functions when the drawing apparatus 1 is newly installed or when the head of the functional liquid droplet ejection head 16 is replaced. This is performed to fill the functional liquid flow path from the liquid pack 51 to the functional liquid droplet ejection head 16 with the functional liquid.

  Note that the cap 72 has a function of a flushing box that receives the functional liquid ejected by the discarding (preliminary ejection) of the functional liquid droplet ejection head 16, and drawing on the workpiece W as when the workpiece W is replaced. The function liquid of the regular flushing performed when stopping temporarily is received. In the discard discharge (flushing operation), the cap lifting mechanism 77 moves the cap 72 (the upper surface thereof) slightly away from the nozzle surface 47 of the functional liquid droplet discharge head 16.

  The suction unit 62 is also used for storing the functional liquid droplet ejection head 16 when the drawing apparatus 1 is not in operation. In this case, the head unit 15 faces the maintenance area 33 and the cap 72 is brought into close contact with the nozzle surface 47 of the functional liquid droplet ejection head 16. As a result, the nozzle surface 47 is sealed, the functional liquid droplet ejection head 16 (ejection nozzle 47) is prevented from being dried, and the nozzle clogging of the ejection nozzle 47 can be prevented.

  As shown in FIG. 1, the wiping unit 63 includes a winding unit 81 that winds up a wiping sheet 83 wound in a roll shape by driving a winding motor 82 (not shown), and a cleaning liquid nozzle (not shown). And a wiping unit 84 for wiping the nozzle surface 47 with the wiping sheet 83 on which the cleaning liquid has been sprayed. Then, the wiping unit 63 faces the head unit 15 located in the maintenance area 33, and the nozzle surface 47 of the functional liquid droplet ejection head 16 is wiped with a wiping sheet 83 impregnated with a cleaning liquid (wiping). Remove dirt (functional liquid) adhering to the nozzle surface.

  As shown in FIGS. 1 and 3, the monitoring device 6 includes a balance 91 (for example, an electronic balance) fixedly installed on the machine base 2. The weight of the liquid pack 51 is measured. The balance 91 is connected to the control device 5, and the control device 5 consumes the functional liquid based on the measurement result of the balance 91 (drawing operation and flushing operation by ejection driving of the functional liquid droplet ejection head 16, The operation status of the suction maintenance operation and the functional liquid filling operation by the suction unit 62 can be determined. That is, since the functional liquid is consumed from the functional liquid pack 51 by the ejection drive of the functional liquid droplet ejection head 16 and the suction operation by the suction unit 62, the weight change of the functional liquid pack 51 is measured (monitored). Then, it is determined whether or not the ejection drive and suction operation of the functional liquid droplet ejection head 16 are appropriately performed (details will be described later).

  The control device 5 is composed of a personal computer or the like. The control device 5 includes an input device 104 such as a keyboard 102 and a mouse 103, various drives (not shown) such as an FD drive and a CD-ROM drive, a monitor display 105 and the like. Peripheral devices are connected (see FIG. 3).

  Next, the main control system of the drawing apparatus 1 will be described with reference to FIG. The drawing apparatus 1 includes a droplet discharge unit 111 having a droplet discharge device 3, a head maintenance unit 112 having a head maintenance device 4, a monitoring device 6, and various sensors of the droplet discharge device 3 and the head maintenance device 4. And a detection unit 113 that performs various detections, a drive unit 114 that drives each unit, and a control unit 115 (control device 5) that is connected to each unit and controls the drawing apparatus 1 as a whole.

  The control unit 115 has an interface 121 for connecting the droplet discharge device 3, the head maintenance device 4, and the monitoring device 6, a storage area that can be temporarily stored, and is used as a work area for control processing. RAM 122 that has various storage areas, ROM 123 that stores control programs and control data, drawing data for drawing on the workpiece W, various data from the droplet discharge device 3 and the head maintenance device 4, etc. In addition, a hard disk 124 for storing programs for processing various data, a CPU 125 for processing various data in accordance with programs stored in the ROM 123 and the hard disk 124, and a bus 126 for connecting them to each other are provided. Yes.

  The control unit 115 inputs various data from the droplet discharge device 3, the head maintenance device 4, the monitoring device 6 and the like via the interface 121 and is stored in the hard disk 124 (or by a CD-ROM drive or the like). Each means is controlled by causing the CPU 125 to perform arithmetic processing according to a program (sequentially read out) and outputting the processing result to the droplet discharge device 3 and the head maintenance device 4 via the interface 121 (see FIG. 4). ).

  Further, the control unit 115 monitors each unit via the detection unit 113 and checks whether each unit is operating properly. Then, by reflecting (feeding back) this monitoring result to the control of each means, the entire drawing apparatus 1 is appropriately driven and controlled.

  For example, the control unit 115 uses the monitoring device 6 to perform the discharge operation of the functional liquid droplet discharge head 16 and the suction operation of the suction unit 62 of the head maintenance device 4 to consume the functional liquid in the functional liquid pack 51. Monitoring as operation. As described above, the droplet discharge operation of the functional droplet discharge head 16 includes a drawing operation and a flushing operation, and the suction operation of the suction unit 62 includes a suction maintenance operation and a functional liquid filling operation. The control unit 115 controls each of the drawing operation, the flushing operation, the suction maintenance operation, and the functional liquid filling operation while monitoring each of these operation states to determine whether or not these operations are appropriately performed. Is monitoring.

  Here, the monitoring method of the functional liquid consumption operation will be described by taking the suction maintenance operation monitoring method by the control unit 115 as an example. Note that the monitoring method for the drawing operation, the flushing operation, and the functional liquid filling operation is substantially the same as the monitoring method for the suction maintenance operation. If the “suction maintenance operation” is read as the drawing operation, the flushing operation, and the functional liquid filling operation, Since each operation can be monitored, only the monitoring method in the suction maintenance operation will be described here.

  A monitoring execution program 131 for executing the monitoring process of the suction unit 62 is installed in the hard disk 124. When an execution instruction for the suction maintenance operation is issued, the monitoring execution program 131 is read and suction maintenance is performed. The operation monitoring process is started. The monitoring execution program 131 is expected to be consumed when the suction operation is normally performed within the predetermined time t corresponding to the consumption trend of the functional liquid actually consumed by the suction maintenance operation within the predetermined time t. This is for determining whether or not the suction maintenance operation is appropriately performed by comparing with the reference consumption trend of the functional fluid, and the control unit 115 performs the function of the monitoring device 6 according to the monitoring execution program 131. An actual consumption trend is acquired from the weight measurement result of the liquid pack 51, and it is determined whether or not an appropriate suction maintenance operation is performed. Here, “consumption trend of functional fluid” refers to the amount of change or rate of change in consumption of functional fluid over time.

  Note that the consumption trend measuring unit, the reference consumption trend obtaining unit, the determining unit, and the notifying unit described in the claims are virtual units realized by causing the CPU 125 to perform arithmetic processing according to the monitoring execution program 131.

  In addition, the control unit 115 has a standard consumption trend (reference consumption) of the functional liquid consumed when the suction maintenance operation is normally performed via a setting screen (not shown) provided by the monitoring execution program 131. The consumption table (consumption function) that associates (trend) with the elapsed time (from start Ts to end Te) of the suction maintenance operation, and the allowable range of the consumption trend in which the suction maintenance operation is recognized to be normal are set in advance. (See FIG. 5). Note that the theoretical value based on the suction amount of the suction pump 73 and the load fluctuation related to the suction pump 73 can be used for the consumption trend and the allowable range (error range) of the consumption trend. It is preferable to use a value obtained experimentally by performing the above.

  With reference to FIG. 5 and FIG. 6, the monitoring process in the case where the consumption weight of the functional liquid is used as the functional liquid consumption trend will be specifically described. As shown in FIG. 6, in the monitoring process, first, prior to the start of the execution of the suction maintenance operation (S2), the monitoring device 6 measures the weight of the functional liquid pack 51 and transmits the measurement result to the control unit 115. (S1: first measurement step). After a predetermined time t (T1) has elapsed since the start of execution of the suction maintenance operation Ts, the monitoring device 6 again measures the weight of the functional liquid pack 51 and transmits the measurement result to the control unit 115 (S3: second) Measurement process). Then, the difference between the weight measured in S1 and the weight measured in S3 is taken to calculate the actual consumed weight W1 of the functional fluid consumed within a predetermined time t from Ts to T1 (S4) (see FIG. 5). .

  Subsequently, the calculated actual consumption weight is compared with the reference consumption weight Ws1 consumed within a predetermined time t from Ts to T1 acquired based on the consumption table (S5). Then, it is determined whether or not the actual consumption weight W1 is within the allowable range of the reference consumption weight Ws1, and if the actual consumption weight is within the allowable range of the reference consumption weight (S5: Yes), the normal suction maintenance operation is performed. Assuming that the functional liquid is normally consumed from the functional liquid pack 51, it is determined that the suction maintenance operation is normal (S6).

  Then, after a predetermined time t has passed since the measurement by the second measurement step, it is confirmed whether or not the suction maintenance operation is finished (S7), and when the suction maintenance operation is finished (S7: Yes). Displays on the monitor display 105 of the control device 5 that the suction maintenance operation has ended normally (S8), and then ends the series of processes. When the suction maintenance operation is not completed (S7: No), the weight of the functional liquid pack 51 is measured again, and the actual consumption weight Wn and the reference consumption weight Wsn at the newly elapsed predetermined time t are compared. Continue monitoring the operation status of the suction maintenance operation. That is, the operation from S3 described above is performed, and it is determined whether or not the suction maintenance operation is normal every time the predetermined time t elapses.

  The reference consumption weight Ws1 may be acquired after S2, but is preferably performed by S3 in order to shorten the monitoring process time.

  On the other hand, if the actual consumption weight W1 is outside the allowable range of the reference consumption weight Ws1 (S5: No), it is determined that the suction maintenance operation is abnormal (inappropriate) (S11), and the abnormality of the suction maintenance operation is monitored. The information is displayed on the display (S12), and the series of monitoring processes is terminated. In addition, when performing an abnormality display, it is preferable to display the consumption amount of the functional liquid consumed within a predetermined time. In this case, it is preferable that the actual consumption weight W1 (Wn) is displayed so as to be distinguishable between the case where the actual consumption weight W1 (Wn) is below the allowable range of the reference consumption weight Ws1 (Wsn). Thereby, the user can perform maintenance corresponding to the abnormal state of the suction maintenance operation on the suction unit 62. Note that the display (notification) of the determination result by comparing the actual consumption weight and the reference consumption weight can be performed by a notification lamp, a notification buzzer, or the like.

  Next, a modification of this embodiment will be described. Here, rather than calculating and comparing the consumption amount of the functional fluid, the weight of the functional fluid pack 51 measured by the monitoring device 6 and the functional fluid pack 51 during normal operation estimated from the above consumption table are used. By comparing the weight (reference pack weight), it is determined whether or not an appropriate suction maintenance operation is performed. With reference to FIG. 7, it demonstrates centering on a different part. When the measurement result of the first measurement process is transmitted to the control unit 115 (S31), the suction maintenance operation is started (S32), and after a predetermined time t has elapsed from the start of the suction maintenance operation based on the consumption table. The reference pack weight Ws is calculated (acquired) (S33).

  Further, when the predetermined time t has elapsed since the execution of the suction maintenance operation, the weight of the functional liquid pack 51 is again measured by the monitoring device 6 and the measurement result is transmitted to the control unit 115 (S34: second measurement step). Then, the calculated reference pack weight Ws is compared with the actual weight W of the functional liquid pack 51 measured in the second measurement step (S35), and the actual weight of the functional liquid pack 51 is within the allowable range of the reference pack weight. If so (S35: Yes), it is determined that the suction maintenance operation is normal (S37), and if it is outside the allowable range (S35: No), it is determined that the suction maintenance operation is abnormal (S41).

  As described above, according to the monitoring process of the present embodiment, the operation state being executed is grasped, and appropriate functional liquid consumption operations (drawing operation, flushing operation, suction maintenance operation, and functional liquid filling operation) are performed. Therefore, after the operation is completed, it is not necessary to check again whether or not these have been properly performed. In addition, since abnormal operation is determined during the execution of functional fluid consumption operation, inappropriate functional fluid consumption operation is not continuously performed, and if an abnormal operation occurs, it is detected immediately. And it can alert | report to a user. Furthermore, since inappropriate functional liquid consumption operation can be prevented from continuing, expensive functional liquid is not wasted.

  In the present embodiment, the consumption weight of the functional liquid within the predetermined time t is used as the consumption trend of the functional liquid. However, the present invention is not limited to this. For example, the consumption volume within a predetermined time t can be used as the consumption trend. In this case, the monitoring device 6 includes the above-described flow rate sensor (not shown) that measures the flow rate of the functional liquid flowing out from the functional liquid pack 51, and the flowmeter ( (Not shown) etc. are preferable. Then, by comparing the reference consumption volume during normal operation defined by the consumption table with the actual consumption volume calculated from the measured flow rate or flow velocity of the functional fluid, the suction maintenance operation is performed normally. Determine whether it is done.

  In addition, when a functional liquid tank (not shown) is used instead of the functional liquid pack 51, a change in the position (change) of the liquid level of the functional liquid in the functional liquid tank may be used as the functional liquid consumption trend. In this case, as the monitoring device 6, a measuring device that measures the liquid surface position of the functional liquid using a laser or the like is used. Then, by comparing the change in the liquid level position at the predetermined time t during normal operation defined by the consumption table with the change in the liquid level position within the predetermined time t during the actual suction maintenance operation, suction maintenance is performed. It is determined whether or not the operation is normally performed. As described above, the consumption trend of the functional fluid can be arbitrarily set without departing from the gist of the present invention.

  In addition, the predetermined time t until the second measurement step is started and the predetermined time t that is the weight measurement interval of the functional liquid pack 51 can be arbitrarily set according to the actual situation. If this predetermined time t is shortened, an abnormal operation can be detected quickly, but it becomes difficult to acquire the trend of consumption of the functional fluid. Therefore, it may be set in consideration of the total consumption of functional fluid in each operation. In particular, when the total amount of functional liquid consumed by one operation (for example, a drawing operation for drawing one workpiece W, a series of flushing operations, a suction maintenance operation, and a functional liquid filling operation) is small, It is not necessary to dare to measure the weight of the functional liquid pack 51 during the execution of the operation, and the first measurement step and the second measurement step may be performed so as to sandwich one operation. That is, the time required for one operation may be a predetermined time t, and the second measurement process may be performed after the end of each operation.

  Further, in the present embodiment, the operation status of the functional liquid consumption operation is only monitored and the appropriateness thereof is notified via the monitor display 105. However, when an operation abnormality is determined, a possible abnormality cause is exemplified. You may make it enumerate. For example, when an abnormality in the droplet discharge operation (drawing operation and flushing operation) is determined, the nozzle clogging of the functional droplet discharge head 16, an abnormality in the drive waveform of the functional droplet discharge head 16, etc. may be displayed. Further, when abnormality in the suction operation (suction maintenance operation and functional liquid filling operation) is determined, deterioration of the suction tube 74 or a joint interposed in the suction tube 74, suction failure by the suction pump 73 (close contact of the cap 72) Defective) etc. are displayed. In addition, when a more detailed cause of abnormality can be identified from detection results from various sensors provided in the drawing apparatus 1, it is preferable to display this.

  Next, as an electro-optical device (flat panel display) manufactured using the drawing device 1 of the present embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device (FED device). The structure and the manufacturing method thereof will be described by taking an active matrix substrate and the like formed in these display devices as examples. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 8 is a flowchart showing the manufacturing process of the color filter, and FIG. 9 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S51), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S52), the bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 9B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 9C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the bank 503 serve as partition wall portions 507b for partitioning the pixel regions 507a. The colored layer (film forming portions) 508R, 508G, and 508B are formed by the droplet discharge head 71 in the subsequent colored layer forming step. The landing area of the functional droplet is defined when forming the.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material of the bank 503, a resin material whose coating film surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. The landing position accuracy is improved.

  Next, in the colored layer forming step (S53), as shown in FIG. 9D, functional droplets are ejected by the droplet ejection head 71 and landed in each pixel region 507a surrounded by the partition wall portion 507b. Let In this case, functional liquid droplets are ejected by introducing functional liquids (filter materials) of three colors of R, G, and B using the liquid droplet ejection head 71. Note that the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. If the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S54), and as shown in FIG. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 10 is a cross-sectional view of a main part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 9, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly composed of a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 10 are formed at predetermined intervals. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The drawing apparatus 1 of the embodiment applies, for example, the spacer material (functional liquid) that constitutes the cell gap described above, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material 529 is used. Liquid crystal (functional liquid) can be uniformly applied to the enclosed area. In addition, the above-described sealing material 529 can be printed by the droplet discharge head 71. Furthermore, the first and second alignment films 524 and 527 can be applied by the droplet discharge head 71.

FIG. 11 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 12 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also.

  Next, FIG. 13 is a cross-sectional view of a main part of a display area of an organic EL device (hereinafter simply referred to as a display device 600).

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 stacked on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power line 614 is disposed on the first interlayer insulating film 611a, and the power line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2 and the} like, and is laminated on the inorganic bank layer 618a. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. In addition, you may further form the other functional layer which has another function adjacent to this light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, the manufacturing process of said display apparatus 600 is demonstrated with reference to FIGS.
As shown in FIG. 14, the display device 600 includes a bank part forming step (S61), a surface treatment step (S62), a hole injection / transport layer forming step (S63), a light emitting layer forming step (S64), It is manufactured through an electrode formation step (S65). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S61), as shown in FIG. 15, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S62), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using oxygen as a processing gas, for example. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane. )
By performing this surface treatment process, when the functional layer 617 is formed using the droplet discharge head 71, the functional droplet can be landed more reliably on the pixel region, and has landed on the pixel region. It is possible to prevent the functional droplet from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 32 of the drawing apparatus 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S63) and light emitting layer forming step (S64) are performed.

  As shown in FIG. 17, in the hole injection / transport layer forming step (S63), the first composition containing the hole injection / transport layer forming material is transferred from the droplet discharge head 71 into each opening 619 that is a pixel region. To discharge. After that, as shown in FIG. 18, a drying process and a heat treatment are performed, the polar solvent contained in the first composition is evaporated, and a hole injection / transport layer 617a is formed on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S64) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform a surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 19, the second composition containing the light-emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 19) is used as a functional droplet as a pixel region ( A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 20, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the droplet discharge head 71, as shown in FIG. 21, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and green) are performed. A light emitting layer 617b corresponding to (G)) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. Further, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S65).

In the counter electrode forming step (S65), as shown in FIG. 22, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as electrodes, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are provided as appropriate.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 23 is an exploded perspective view of a main part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701 and a second substrate 702 that are disposed to face each other, and a discharge display portion 703 that is formed therebetween. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence. The red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the drawing apparatus 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 25 of the drawing apparatus 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the liquid droplet ejection head 71. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
In the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the droplet ejection head 71, and the corresponding color. In the discharge chamber 705.

Next, FIG. 24 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 includes a first substrate 801, a second substrate 802, and a field emission display unit 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A lattice-shaped bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, similarly to the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the drawing apparatus 1, and the fluorescence of each color can be formed. The bodies 813R, 813G, and 813B can be formed using the drawing apparatus 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 25A, and when these are formed, as shown in FIG. 25B. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, after the first element electrode 806a and the second element electrode 806b are formed in the groove portion constituted by the bank portion BB (inkjet method using the drawing apparatus 1), the solvent is dried, and film formation is performed. A conductive film 807 is formed (an ink jet method using the drawing apparatus 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the drawing apparatus 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is a plane schematic diagram of the drawing apparatus which concerns on embodiment of this invention. It is an external appearance perspective view of a functional droplet discharge head. It is explanatory drawing around a monitoring apparatus. It is a control block diagram explaining the main control system of the drawing apparatus. It is explanatory drawing of the monitoring process when the consumption weight of a functional liquid is made into a consumption trend, (a) is a figure which illustrated the consumption table, (b) is time-lapse | temporal by functional liquid consumption operation (suction maintenance operation). FIG. 6 is a diagram showing a change in the weight of the ink pack that decreases with time. It is the flowchart which illustrated a series of flows of the monitoring process. It is the flowchart which illustrated a series of flows of the monitoring process. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Drawing apparatus 6 Monitoring apparatus 16 Functional liquid droplet ejection head 47 Nozzle surface 51 Functional liquid pack 52 Functional liquid supply tube 115 Control part 125 CPU
W Work

Claims (12)

In a monitoring method for monitoring a functional liquid consumption operation for consuming a functional liquid from the functional liquid tank that supplies the functional liquid to the functional liquid droplet ejection head via the functional liquid droplet ejection head,
A consumption trend measuring step of measuring a trend of consumption of the functional liquid over time due to the functional liquid consumption operation;
A reference consumption trend acquisition step for acquiring the consumption trend corresponding to the measured consumption trend as a reference consumption trend from a consumption table that prescribes the consumption trend from the start of operation to the end of operation during normal operation;
A monitoring method comprising: a determination step of comparing the measured consumption trend and the reference consumption trend to determine whether the functional liquid consumption operation is normal. The functional liquid consumption operation is a drawing operation performed by the ejection drive of the functional liquid droplet ejection head,
Discard discharge operation performed by the discharge drive of the functional liquid droplet discharge head,
A maintenance operation for maintaining the functional liquid droplet ejection head by sucking the functional liquid from the nozzle surface of the functional liquid droplet ejection head;
And a functional liquid filling operation for filling the functional liquid flow path from the functional liquid tank to the functional liquid droplet ejection head by sucking the functional liquid from the nozzle surface of the functional liquid droplet ejection head. The monitoring method according to claim 1, comprising at least one operation.   The monitoring method according to claim 2, further comprising a notification step of notifying the type of the functional liquid consumption operation and the determination result. The consumption trend is a consumption amount of the functional liquid consumed within a predetermined time,
The consumption trend measurement step includes a first measurement step of measuring the weight of the functional liquid tank,
A second measurement step of measuring the weight of the functional liquid tank again after the predetermined time from the measurement by the first measurement step;
4. The method according to claim 1, further comprising a calculation step of calculating a change with time of the consumption amount from the measurement results of the first measurement step and the second measurement step. Monitoring method. The consumption trend is the weight of the functional liquid tank that decreases within a predetermined time,
The consumption trend measurement step includes a first measurement step of measuring the weight of the functional liquid tank,
4. The method according to claim 1, further comprising a second measurement step of measuring the weight of the functional liquid tank again after the predetermined time from the measurement by the first measurement step. 5. Monitoring method. In a monitoring device for monitoring a functional liquid consumption operation that consumes a functional liquid from the functional liquid tank that supplies the functional liquid to the functional liquid droplet ejection head via the functional liquid droplet ejection head,
Consumption trend measuring means for measuring the trend of consumption of the functional liquid over time due to the functional liquid consumption operation;
A reference consumption trend acquisition means for acquiring the consumption trend corresponding to the measured consumption trend as a reference consumption trend from a consumption table that defines the consumption trend from the start of operation to the end of operation during normal operation over time;
A monitoring apparatus comprising: a determination unit that compares the measured consumption trend with the reference consumption trend to determine whether the functional liquid consumption operation is normal. The functional liquid consumption operation is a drawing operation performed by the ejection drive of the functional liquid droplet ejection head,
Discard discharge operation performed by the discharge drive of the functional liquid droplet discharge head,
A maintenance operation for maintaining the functional liquid droplet ejection head by sucking the functional liquid from the nozzle surface of the functional liquid droplet ejection head;
And a functional liquid filling operation for filling the functional liquid flow path from the functional liquid tank to the functional liquid droplet ejection head by sucking the functional liquid from the nozzle surface of the functional liquid droplet ejection head. The monitoring device according to claim 6, comprising at least one operation.   The monitoring apparatus according to claim 7, further comprising a type of the functional liquid consumption operation and a notification unit that notifies the determination result. In a drawing apparatus that performs drawing with functional liquid droplets on the workpiece by driving the functional liquid droplet ejection head while relatively moving the functional liquid droplet ejection head on which a discharge nozzle is formed with respect to the workpiece.
A drawing apparatus, wherein the monitoring method according to any one of claims 1 to 5 is applied, or the monitoring apparatus according to any one of claims 6 to 8 is provided.   10. A method of manufacturing an electro-optical device, wherein the drawing apparatus according to claim 9 is used to form a film forming portion with functional droplets on the workpiece.   An electro-optical device using the drawing apparatus according to claim 9, wherein a film-forming unit made of functional droplets is formed on the workpiece. An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 10 or the electro-optical device according to claim 11.

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