JP2005154894A5 - - Google Patents
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- Publication number
- JP2005154894A5 JP2005154894A5 JP2004297556A JP2004297556A JP2005154894A5 JP 2005154894 A5 JP2005154894 A5 JP 2005154894A5 JP 2004297556 A JP2004297556 A JP 2004297556A JP 2004297556 A JP2004297556 A JP 2004297556A JP 2005154894 A5 JP2005154894 A5 JP 2005154894A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- raw material
- material powder
- aerosol
- forming apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000443 aerosol Substances 0.000 claims description 16
- 239000000843 powder Substances 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 15
- 239000002994 raw material Substances 0.000 claims description 14
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims 6
- 238000007664 blowing Methods 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004297556A JP4327057B2 (ja) | 2003-10-27 | 2004-10-12 | 成膜装置 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003366165 | 2003-10-27 | ||
| JP2004297556A JP4327057B2 (ja) | 2003-10-27 | 2004-10-12 | 成膜装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005154894A JP2005154894A (ja) | 2005-06-16 |
| JP2005154894A5 true JP2005154894A5 (https=) | 2007-04-26 |
| JP4327057B2 JP4327057B2 (ja) | 2009-09-09 |
Family
ID=34741037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004297556A Expired - Fee Related JP4327057B2 (ja) | 2003-10-27 | 2004-10-12 | 成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4327057B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010180436A (ja) * | 2009-02-04 | 2010-08-19 | Nikon Corp | 箔基材連続成膜の微粒子噴射成膜システム及び箔基材連続成膜方法 |
-
2004
- 2004-10-12 JP JP2004297556A patent/JP4327057B2/ja not_active Expired - Fee Related
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