JP2005154427A5 - - Google Patents

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Publication number
JP2005154427A5
JP2005154427A5 JP2004314525A JP2004314525A JP2005154427A5 JP 2005154427 A5 JP2005154427 A5 JP 2005154427A5 JP 2004314525 A JP2004314525 A JP 2004314525A JP 2004314525 A JP2004314525 A JP 2004314525A JP 2005154427 A5 JP2005154427 A5 JP 2005154427A5
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JP
Japan
Prior art keywords
group
carbon atoms
alkyl group
cyclic hydrocarbon
hydrocarbon group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004314525A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005154427A (ja
JP5022563B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004314525A priority Critical patent/JP5022563B2/ja
Priority claimed from JP2004314525A external-priority patent/JP5022563B2/ja
Publication of JP2005154427A publication Critical patent/JP2005154427A/ja
Publication of JP2005154427A5 publication Critical patent/JP2005154427A5/ja
Application granted granted Critical
Publication of JP5022563B2 publication Critical patent/JP5022563B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004314525A 2003-10-31 2004-10-28 （メタ）アクリル酸エステルおよびその原料化合物 Expired - Lifetime JP5022563B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004314525A JP5022563B2 (ja) 2003-10-31 2004-10-28 （メタ）アクリル酸エステルおよびその原料化合物

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003372356 2003-10-31
JP2003372356 2003-10-31
JP2004314525A JP5022563B2 (ja) 2003-10-31 2004-10-28 （メタ）アクリル酸エステルおよびその原料化合物

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011023175A Division JP2011137163A (ja) 2003-10-31 2011-02-04 （メタ）アクリル酸エステルおよびその原料化合物

Publications (3)

Publication Number Publication Date
JP2005154427A JP2005154427A (ja) 2005-06-16
JP2005154427A5 true JP2005154427A5 (cs) 2007-08-16
JP5022563B2 JP5022563B2 (ja) 2012-09-12

Family

ID=34741269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004314525A Expired - Lifetime JP5022563B2 (ja) 2003-10-31 2004-10-28 （メタ）アクリル酸エステルおよびその原料化合物

Country Status (1)

Country Link
JP (1) JP5022563B2 (cs)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1574903A1 (en) * 2004-03-08 2005-09-14 Rohm and Haas Electronic Materials, L.L.C. Photoresists comprising cyanoadamantyl moiety-containing polymers
EP1586944A1 (en) * 2004-03-09 2005-10-19 Rohm and Haas Electronic Materials, L.L.C. Cyanoadamantyl compounds and polymers
EP1731504A4 (en) * 2004-04-02 2007-11-28 Idemitsu Kosan Co ADAMANTAN DERIVATIVE AND METHOD FOR THE PRODUCTION THEREOF
JP4810111B2 (ja) * 2005-03-22 2011-11-09 株式会社トクヤマ アルコラート化合物の製造方法
TWI477909B (zh) 2006-01-24 2015-03-21 Fujifilm Corp 正型感光性組成物及使用它之圖案形成方法
JP4991326B2 (ja) * 2006-01-24 2012-08-01 富士フイルム株式会社 ポジ型感光性組成物及びそれを用いたパターン形成方法
JP6074834B2 (ja) * 2012-03-15 2017-02-08 三菱レイヨン株式会社 レジスト材料の評価方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4296033B2 (ja) * 2003-05-15 2009-07-15 富士フイルム株式会社 ポジ型レジスト組成物

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