JP2005154427A5 - - Google Patents
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- Publication number
- JP2005154427A5 JP2005154427A5 JP2004314525A JP2004314525A JP2005154427A5 JP 2005154427 A5 JP2005154427 A5 JP 2005154427A5 JP 2004314525 A JP2004314525 A JP 2004314525A JP 2004314525 A JP2004314525 A JP 2004314525A JP 2005154427 A5 JP2005154427 A5 JP 2005154427A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- carbon atoms
- alkyl group
- cyclic hydrocarbon
- hydrocarbon group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 125000004432 carbon atom Chemical group C* 0.000 claims description 17
- 125000000217 alkyl group Chemical group 0.000 claims description 11
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 7
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 125000002252 acyl group Chemical group 0.000 claims description 3
- 125000003545 alkoxy group Chemical group 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 3
- -1 magnesium halide Chemical class 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 229910052783 alkali metal Inorganic materials 0.000 claims description 2
- 150000001340 alkali metals Chemical class 0.000 claims description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
- 239000011777 magnesium Substances 0.000 claims description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004314525A JP5022563B2 (ja) | 2003-10-31 | 2004-10-28 | （メタ）アクリル酸エステルおよびその原料化合物 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003372356 | 2003-10-31 | ||
| JP2003372356 | 2003-10-31 | ||
| JP2004314525A JP5022563B2 (ja) | 2003-10-31 | 2004-10-28 | （メタ）アクリル酸エステルおよびその原料化合物 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011023175A Division JP2011137163A (ja) | 2003-10-31 | 2011-02-04 | （メタ）アクリル酸エステルおよびその原料化合物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005154427A JP2005154427A (ja) | 2005-06-16 |
| JP2005154427A5 true JP2005154427A5 (cg-RX-API-DMAC7.html) | 2007-08-16 |
| JP5022563B2 JP5022563B2 (ja) | 2012-09-12 |
Family
ID=34741269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004314525A Expired - Lifetime JP5022563B2 (ja) | 2003-10-31 | 2004-10-28 | （メタ）アクリル酸エステルおよびその原料化合物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5022563B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005258438A (ja) * | 2004-03-08 | 2005-09-22 | Rohm & Haas Electronic Materials Llc | シアノアダマンチル化合物およびポリマーおよびこれを含有するフォトレジスト |
| EP1586944A1 (en) * | 2004-03-09 | 2005-10-19 | Rohm and Haas Electronic Materials, L.L.C. | Cyanoadamantyl compounds and polymers |
| CN1780812A (zh) * | 2004-04-02 | 2006-05-31 | 出光兴产株式会社 | 金刚烷衍生物及其生产方法 |
| JP4810111B2 (ja) * | 2005-03-22 | 2011-11-09 | 株式会社トクヤマ | アルコラート化合物の製造方法 |
| TWI477909B (zh) | 2006-01-24 | 2015-03-21 | Fujifilm Corp | 正型感光性組成物及使用它之圖案形成方法 |
| JP4991326B2 (ja) * | 2006-01-24 | 2012-08-01 | 富士フイルム株式会社 | ポジ型感光性組成物及びそれを用いたパターン形成方法 |
| JP6074834B2 (ja) * | 2012-03-15 | 2017-02-08 | 三菱レイヨン株式会社 | レジスト材料の評価方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4296033B2 (ja) * | 2003-05-15 | 2009-07-15 | 富士フイルム株式会社 | ポジ型レジスト組成物 |
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2004
- 2004-10-28 JP JP2004314525A patent/JP5022563B2/ja not_active Expired - Lifetime