JP2005150950A - Surface acoustic wave element array and pressure sensor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface acoustic wave element array capable of precisely detecting an environmental change distribution over a wide range and flexibly coping with a shape change of an applied surface over a wide range with a simple configuration at a low manufacturing cost, and to provide a pressure sensor properly employing the array. <P>SOLUTION: The array 10 includes: a base member 16 equipped with a surface acoustic wave propagation face 14; and a plurality of surface acoustic wave elements 12a, 12b, 12c respectively including surface acoustic wave stimulation conversion means 18a, 18b, 18c for stimulating surface acoustic waves onto the propagation faces, propagating the surface acoustic waves onto the propagation faces, receiving the propagated surface acoustic waves and converting them into electric signals, wherein frequencies of the surface acoustic waves x, y, z propagated on the respective propagation faces are classified into different groups; a frequency analysis means 22 for analyzing the frequency of the electric signals into a plurality of frequency components; and a surface acoustic wave propagation state analysis means 24 for analyzing the propagation state of the surface acoustic waves on the propagation faces of the respective groups from each of a plurality of the frequency components. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a surface acoustic wave element array and a pressure sensor.

  A substrate having a propagation surface on which surface acoustic waves (SAW) propagate, and a surface acoustic wave is excited and propagated on the propagation surface of the substrate, and the propagated surface acoustic wave is received and converted into an electrical signal. A surface acoustic wave element having surface acoustic wave excitation conversion means is well known. Conventional surface acoustic wave elements are used in delay lines, oscillation elements or resonance elements for oscillators, filters for selecting frequencies, various sensors such as chemical sensors and biosensors, remote tags, and the like.

  International Publication WO 01/45255 A1 discloses a surface acoustic wave device having a spherical base material. This publication discloses a predetermined circle including a portion having a predetermined range of width when a surface acoustic wave having a predetermined range of frequency and a predetermined range of frequency is excited by a surface acoustic wave excitation conversion means on the surface of a spherical substrate. It is disclosed that the excited surface acoustic wave can be repeatedly circulated along an annular zone without greatly deteriorating. The above publication further discloses a surface acoustic wave element array in which a plurality of base materials of a plurality of such surface acoustic wave elements are connected to each other at surface portions other than their propagation surfaces.

  In the surface acoustic wave device as described above, when a change occurs in the external environment that is in contact with the predetermined annular band, the propagation speed of the surface acoustic wave propagating through the band also changes in response to this change. It is also known that this makes it possible to know changes in the external environment. The change in the external environment includes a change in pressure applied to the zone by an object in contact with the zone.

  By the way, research on tactile sensors (pressure sensors) used for humanoid robots has been actively conducted in recent years (for example, Kenichiro Suzuki, Minoru Tanikawa: Integrated tactile sensor array, Journal of the Robotics Society of Japan, Vol. 8, No. 4, pp. 472-474 (2000), Ryusuke Kageyama, Misa Kaga, Masayuki Inaba, Hiroaki Inoue: Development and application of flexible tactile sensors for robots using conductive gel, 16th Annual Conference of the Robotics Society of Japan (Refer to the literature, pp 873-874). These conventional tactile sensors are used in a relatively small area such as a gripping device having members corresponding to hands and fingers, and can be easily applied to the entire body surface of a humanoid robot. Research on tactile sensors (pressure distribution detection sensors) is still developing.

It is also well known to detect a pressure distribution on a surface by arranging a plurality of ON / OFF switches applied to a keyboard or the like. However, with such a conventional pressure distribution detection sensor, it is only possible to know whether or not a pressure higher than a predetermined value is applied to each ON / OFF switch, and the magnitude of the pressure applied to each ON / OFF switch. Can not know.
International Publication WO 01/45255 A1 Kenichiro Suzuki, Minoru Tanikawa: Integrated tactile sensor array, Journal of the Robotics Society of Japan, Vol. 8, No4, pp. 472-474 (2000) Ryosuke Kageyama, Misa Kaga, Masayuki Inaba, Hiroaki Inoue: Development and application of flexible tactile sensor for robot using conductive gel, Proceedings of the 16th Annual Conference of the Robotics Society of Japan, pp873-874

  A tactile sensor (pressure distribution detection sensor) used over the entire body surface of a humanoid robot is not only required to accurately detect the distribution of pressure magnitude, but also to follow the body surface well. It needs to be as flexible as possible. Moreover, the configuration is simple and the manufacturing cost is not low.

  In humanoid robots, it is known that by obtaining precise information about the distribution of pressure magnitude from the widest possible area of the body surface, preferably the whole, it is easy to control the center of gravity and posture. It is desired to realize a tactile sensor as described above with high accuracy at an early stage.

  The present invention has been made under the above circumstances, and the object of the present invention is to accurately detect the distribution of environmental changes including pressure changes over a wide area range, and has a simple configuration and low manufacturing costs. Another object of the present invention is to provide a surface acoustic wave element array that can flexibly follow a change in surface shape in a wide area range. Another object of the present invention is to provide an individual pressure sensor suitable for use in the surface acoustic wave element array.

  In order to achieve the above-described object of the present invention, a surface acoustic wave element array according to the present invention includes: a substrate having a propagation surface on which a surface acoustic wave propagates; And a surface acoustic wave excitation conversion means for receiving and converting the propagated surface acoustic wave into an electric signal, and the frequency of the electric signal converted by each is divided into at least two groups different from each other. A plurality of classified surface acoustic wave elements; a frequency analysis means for analyzing the electrical signal converted by the surface acoustic wave excitation conversion means into a plurality of frequency components; and at least the frequency components from each of the plurality of frequency components And a surface acoustic wave propagation state analyzing means for analyzing the propagation state of the surface acoustic wave on the propagation surface of each of the two groups of surface acoustic wave elements.

  In the present invention, the frequency analysis means includes a device that obtains the intensity for each frequency by performing spectrum analysis on the input signal, or separates and analyzes the signal input for each frequency, for example, a spectrum analyzer or a digital oscilloscope. Including a device for performing frequency analysis by Fourier transforming time waveform data obtained from the above.

  In order to achieve the above-described object of the present invention, another surface acoustic wave element array according to the present invention includes: a substrate having a propagation surface on which a surface acoustic wave propagates; and exciting the surface acoustic wave on the propagation surface And a surface acoustic wave excitation conversion means for receiving and converting the propagated surface acoustic wave into an electrical signal, and the propagation time of the surface acoustic wave that is excited and propagated on each propagation plane A plurality of surface acoustic wave elements classified into at least two groups different from each other; and, based on the arrival time of the electric signal converted from the surface acoustic wave in the surface acoustic wave excitation conversion means, A surface acoustic wave propagation state analyzing means for distinguishing the outputs of at least two groups of surface acoustic wave elements and analyzing the propagation states of the surface acoustic waves on the respective propagation surfaces independently of each other. It is.

  In order to achieve another object of the present invention described above, a pressure sensor according to the present invention includes: a substrate having a propagation surface on which a surface acoustic wave propagates; and excitation and propagation of the surface acoustic wave on the propagation surface And a surface acoustic wave excitation converting means for receiving and propagating the propagated surface acoustic wave and converting it into an electrical signal; and the substrate has at least a portion having piezoelectricity along the surface; The surface acoustic wave excitation conversion means is formed so as to be in contact with at least a part having the piezoelectric property, or is formed to face at least a part having the piezoelectric property with a predetermined gap interposed therebetween; Has a contact part with which the object comes into contact; received by the surface acoustic wave excitation conversion means based on the fact that the propagation state of the surface acoustic wave changes according to the contact of the object with the contact part From the electric signal converted from a surface acoustic wave, and a pressure detecting means for detecting the magnitude of the pressure, it is characterized in that.

  In the present invention, the property of being deformed by applying an electric field or generating an electric field by applying pressure is referred to as piezoelectricity, and a material having such piezoelectricity is referred to as piezoelectric material.

  According to the surface acoustic wave element array according to the present invention, which is configured as described above, it is possible to accurately detect the distribution of environmental changes including pressure changes over a wide area range, and the configuration is simple. In addition, the manufacturing cost is low, and it is possible to flexibly follow changes in the surface shape of a wide area range to be applied.

  The pressure sensor according to the present invention, which is configured as described above, is suitable for use in the surface acoustic wave element array.

[First Embodiment]
First, a surface acoustic wave element array 10 according to a first embodiment of the present invention will be described in detail with reference to FIG. FIG. 1 is a perspective view schematically showing a configuration of a surface acoustic wave element array 10 according to a first embodiment of the present invention.

  As shown in FIG. 1, the surface acoustic wave element array 10 includes a plurality of surface acoustic wave elements 12a, 12b, and 12c. The plurality of surface acoustic wave elements 12a, 12b, and 12c have a base material 16 having a propagation surface 14 through which surface acoustic waves x, y, and z propagate. The base materials 16 of the plurality of surface acoustic wave elements 12a, 12b, and 12c have the same size and shape, and have the same structure. The plurality of surface acoustic wave elements 12a, 12b, and 12c excite and propagate the surface acoustic waves x, y, and z on the propagation surface 14 and receive the propagated surface acoustic waves x, y, and z to receive electrical signals. Each has surface acoustic wave excitation conversion means 18a, 18b, and 18c for converting to.

  The substrate 16 has at least a portion along the surface having piezoelectricity so that the surface acoustic waves x, y, and z can be excited and propagated. Such a substrate 16 can be constituted by, for example, a piezoelectric material film that is entirely formed of a piezoelectric material or a piezoelectric material film that covers the surface of a non-piezoelectric material substrate. In the case of the latter combination, the piezoelectric material film does not need to cover the entire surface of the non-piezoelectric material substrate, and covers only the portion used as the propagation surface 14 on which the surface acoustic waves x, y, and z propagate. It is sufficient that at least the surface of the base material 16 covers the place where the surface acoustic wave excitation conversion means 18a, 18b, and 18c are provided.

  As used herein, the term “propagation surface” 14 is excited by the surface acoustic wave excitation conversion means 18a, 18b, and 18c on the outer surface of the substrate 16 of the plurality of surface acoustic wave elements 12a, 12b, and 12c, and is elastic. It means only a portion where surface acoustic waves x, y and z which are received by the surface wave excitation conversion means 18a, 18b and 18c and then converted into electric signals propagate. That is, the portions where the surface acoustic waves x, y, and z are not excited and propagated by the surface acoustic wave excitation conversion means 18a, 18b, and 18c on the outer surface of the plurality of surface acoustic wave elements 12a, 12b, and 12c. Or even if the surface acoustic waves x, y, and z are excited and propagated, the surface acoustic waves propagated there are converted into electrical signals by the surface acoustic wave excitation conversion means 18a, 18b, and 18c. In this case, the part that cannot be referred to is not the “propagation surface” 14.

  The substrate 16 of the plurality of surface acoustic wave elements 12a, 12b, and 12c includes a propagation surface 14 including at least a part of an annular curved surface. Further, in this embodiment, the propagation surface 14 of the base material 16 is at least a continuous annular curved surface, and the surface acoustic wave propagating on the propagation surface 14 circulates along the surface of the base material 16.

  In FIG. 1, the propagation surface 14 has a predetermined width on the surface of the base material 16 and is drawn as a band-like portion extending in an annular shape in a predetermined direction on the surface of the base material 16. It is only drawn that way to make it easier. The actual propagation surface 14 is formed on the surface of the substrate 16 while the surface acoustic waves x, y, and z that are excited and propagated on the surface of the substrate 16 propagate in a predetermined direction on the surface of the substrate 16. It should be taken into account that it often diffuses or shrinks in the direction that intersects its propagation direction.

  Needless to say, the “predetermined direction” described here may be the direction opposite to the direction indicated by the arrow in FIG. 1 (that is, the downward direction in FIG. 1). Various types of interdigital electrodes have been proposed. Although there is a form in which the surface acoustic wave can be excited only in one desired direction (for example, the upward direction indicated by the arrow in FIG. 1), it is simple as shown in FIG. In the interdigital electrode, surface acoustic waves are excited in two directions in FIG. In this specification, only the case where the surface acoustic wave is excited only in one direction is described for the sake of simplicity. However, according to the gist of the present invention, the interdigital electrode is formed in a desired direction. Any one that excites a surface acoustic wave only or one that excites a surface acoustic wave in two directions may function in the same manner, and any of them may be used. It is also possible to weight the terminals of the interdigital electrodes or pattern the terminals into a spherical meridian shape.

  In this embodiment, the propagation surface 14 of the base material 16 is constituted by at least a part of a spherical surface, but portions other than the propagation surface 14 on the surface of the base material 16 are excited by surface acoustic waves x, y, and z. Any shape is possible because it is irrelevant to propagation. In the substrate 16 of the plurality of surface acoustic wave elements 12a, 12b, and 12c of this embodiment, portions other than the propagation surface 14 are connected to each other by a support column 20 so that they can be bent between each other. The surface acoustic wave elements 12a, 12b, and 12c of the substrate 16 are prevented from coming into contact with other than the target object, for example, directly on the support surface such as the body surface of a humanoid robot or It is attached via a flexible film material (not shown).

  The surface acoustic wave frequencies converted by the plurality of surface acoustic wave excitation converters 18a, 18b, and 18c to be propagated to the propagation surfaces 14 of the surface acoustic wave elements 12a, 12b, and 12c (that is, these elastic surfaces) The frequency of the electric signals converted from the waves by the plurality of surface acoustic wave excitation conversion means 18a, 18b and 18c) is classified into at least two different groups. This means that the plurality of surface acoustic wave elements 12a, 12b, and 12c are excited by the plurality of surface acoustic wave excitation conversion means 18a, 18b, and 18c on the respective propagation surfaces 14 and propagated to the frequency ( In other words, it means that the frequency of electric signals converted from these surface acoustic waves by the plurality of surface acoustic wave excitation conversion means 18a, 18b, and 18c) is classified into at least two different groups.

  This surface acoustic wave element array 10 includes a plurality of surface acoustic wave elements 12a, 12b, and 12c, and a plurality of surface acoustic wave excitation conversion means 18a, 18b, and 18c. Frequency analysis means 22 for analyzing the surface acoustic wave, and further, surface acoustic waves x, on the propagation surfaces 14 of the surface acoustic wave elements 12a, 12b and 12c of the at least two groups from each of the plurality of frequency components. Surface acoustic wave propagation state analysis means 24 for analyzing the propagation states of y and z is also provided.

  Such frequency analysis means 22 includes a device that obtains the intensity for each frequency by performing spectrum analysis on the input signal, or separates and analyzes the signal input for each frequency. This includes analyzers and devices that perform frequency analysis by Fourier transforming time waveform data obtained from a digital oscilloscope.

  The plurality of surface acoustic wave excitation conversion means 18a, 18b, and 18c of the plurality of surface acoustic wave elements 12a, 12b, and 12c are connected to the surface acoustic wave excitation conversion means 18a, 18b, and 18c by surface acoustic waves x, y. , And z are connected to a common input means 26 for simultaneously inputting electrical signals of different frequencies for excitation of z. The plurality of surface acoustic wave excitation conversion means 18a, 18b, and 18c of the plurality of surface acoustic wave elements 12a, 12b, and 12c are further subjected to surface acoustic waves received by the surface acoustic wave excitation conversion means 18a, 18b, and 18c. It is also connected to a common receiving means 28 that receives electrical signals converted from x, y, and z, and is connected to the frequency analyzing means 22 via the common receiving means 28.

  In the embodiment of FIG. 1, one of each of the two terminals of the plurality of surface acoustic wave excitation converters 18a, 18b, and 18c is connected to the ground wire, and the other is connected to the frequency via the common receiver 28. The analyzing means 22 and the input means 26 are connected. However, it is also possible to employ a connection method that can obtain the same electrical effect as the connection method in the embodiment shown in FIG. In this connection method, the input means 26 is separated from the common receiving means 28 and is instead arranged in the middle of the wiring connected to the ground in FIG.

  The present invention does not exclude other connection methods that can obtain the same electrical effects as the connection method in the embodiment of FIG. 1, and ground wires other than those described above, unless departing from the spirit of the present invention. However, there is no exclusion or restriction on the method of connecting the interdigital electrodes or the means for transmitting electrical signals. In particular, it is known that high frequency electrical signals of several tens of megahertz or more can transmit signals and energy even when the wiring is not physically connected, and this is used to perform the various connections and transmissions described above. This is the same throughout the present invention.

  Furthermore, in this embodiment, the common receiving means 28 connects the common input means 26 to the plurality of surface acoustic wave excitation conversion means 18a, 18b, and 18c of the plurality of surface acoustic wave elements 12a, 12b, and 12c. It is also used. Such a receiving means 28 can be constituted by, for example, a single conducting wire.

  The common input means 26 generates the electric signal including the plurality of frequency components at the same time. In this embodiment, the common input means 26 is constituted by a pulse generator.

  The plurality of surface acoustic wave excitation conversion means 18a, 18b, and 18c of the plurality of surface acoustic wave elements 12a, 12b, and 12c have at least a piezoelectric property along the surface within the range of the propagation surface 14 of each substrate 16. Interdigital transducer formed in contact with a part, more specifically, a piezoelectric material film covering the surface of a piezoelectric material or the surface of a non-piezoelectric material substrate, or facing each other with a predetermined gap therebetween Includes electrodes. Arrangement periods P1, P2, and P3 of the plurality of terminals of the interdigital electrodes included in the plurality of surface acoustic wave excitation conversion means 18a, 18b, and 18c of the plurality of surface acoustic wave elements 12a, 12b, and 12c Are different from each other in order to generate surface acoustic waves x, y, and z having a plurality of different frequencies classified into at least two groups.

  When each of the plurality of surface acoustic wave excitation conversion means 18a, 18b, and 18c is composed of interdigital electrodes, the surface acoustic waves x, y, or z that are excited by the interdigital electrodes and propagate through the propagation surface 14 are obtained. The lengths W1, W2, or W3 at which a plurality of terminals of each interdigital electrode overlap each other in the propagation direction of (in order to avoid complication of the drawing, the interdigital electrodes of the surface acoustic wave excitation conversion means 18a are overlapped in FIG. (Only the length W1 is shown) is preferably equal to or less than the radius of curvature of the corresponding propagation surface 14, and surface acoustic waves x, y, or It has been found that the wavelength of z (corresponding to the arrangement period P1, P2, or P3 of the plurality of terminals of each interdigital electrode) is preferably 1/5 or less of the radius of curvature.

  In this embodiment, the base material 16 used for each of the plurality of surface acoustic wave elements 12a, 12b, and 12c is constituted by a crystal sphere having a diameter of, for example, 1 cm. When each of the plurality of surface acoustic wave excitation conversion means 18a, 18b, and 18c is constituted by interdigital electrodes, the terminals of the interdigital electrodes of the typical surface acoustic wave excitation conversion means 18a overlap each other. The length W1 is set to 1.1 mm, and the arrangement period P1 is set to 70 μm. Each of the plurality of surface acoustic wave excitation conversion means 18a, 18b, and 18c is arranged at a position defined by a crystal axis called a Z-axis cylinder of the quartz crystal of the corresponding base material 16, and the plurality of surface acoustic wave excitation conversion means The surface acoustic waves excited on the corresponding base material 16 by 18a, 18b, and 18c are propagated and circulated in the direction of rotation about the Z axis of the crystal of the corresponding base material 16.

As the base material 16, a piezoelectric crystal such as LiNbO ₃ may be used instead of the crystal sphere. It has been found that when LiNbO ₃ is used as the substrate 16, three or more surface acoustic wave propagation paths can be set.

  Unless the dimensions of each interdigital electrode are defined as described above, particularly when a piezoelectric crystal is used for the substrate 16, each interdigital electrode always ensures that the desired surface acoustic wave x on the corresponding propagation surface 14. , Y, or z are excited and propagated, and it becomes difficult to output an electric signal from the propagated surface acoustic wave x, y, or z, and the interdigital electrode has a complicated shape in accordance with the crystal anisotropy. You will have to design.

  The surface acoustic wave element array 10 according to the first embodiment configured as described above has surface acoustic wave excitation conversion means 18a, 18a, 12c on the propagation surfaces 14 of the plurality of surface acoustic wave elements 12a, 12b, and 12c. When the external environment in contact with a position away from 18b or 18c changes, the propagation state such as the propagation speed and attenuation amount of the surface acoustic wave x, y, or z on the propagation surface 14 is different from that before the external environment changes. Changes. The change in the external environment can be known from the change in the propagation state. In addition, the change in the external environment can be known independently of each of the plurality of surface acoustic wave elements 12a, 12b, and 12c of the surface acoustic wave element array 10.

  That is, the external environment in contact with the propagation surfaces 14 of the plurality of surface acoustic wave elements 12a, 12b, and 12c corresponding to the array distribution of the plurality of surface acoustic wave elements 12a, 12b, and 12c of the surface acoustic wave element array 10. It is possible to know the sequence distribution of changes.

  When the surface acoustic wave element array 10 is used as a pressure distribution sensor (that is, a tactile sensor) for detecting the distribution of the magnitude of pressure loaded on the surface of a humanoid robot, for example, a plurality of elasticity The support pillars 20 of the surface wave elements 12a, 12b, and 12c are attached directly on the body surface of the humanoid robot or via a flexible film material (not shown). Each of the plurality of surface acoustic wave elements 12a, 12b, and 12c that are located on the opposite side of the body surface of the humanoid robot and are separated from the surface acoustic wave excitation conversion means 18a, 18b, and 18c. A part including the propagation surface 14 of the material 16 is used as a contact part T where an object (not shown) contacts. A plurality of surface acoustic wave propagation state analyzing means 24 are provided when an object (not shown) comes into contact with the contact portion T of the base material 16 of each of the plurality of surface acoustic wave elements 12a, 12b, and 12c and pressure is applied. Various states including the propagation speed and attenuation amount of the surface acoustic wave x, y, or z propagating on the propagation surface 14 of the base material 16 of each of the surface acoustic wave elements 12a, 12b, and 12c of FIG. It can be used as a pressure detection means for detecting the magnitude of the pressure from the change of the electrical signal converted from the surface acoustic wave x, y, or z received by the surface wave excitation conversion means 18a, 18b, or 18c.

  Here, since the surface acoustic wave excitation conversion means 18a, 18b, and 18c are separated from the contact portion T on the outer surface of the substrate 16, the surface acoustic wave excitation conversion means 18a, 18b, and 18c are located at the contact portion T. It is not damaged by the applied external force.

  That is, each of the plurality of surface acoustic wave elements 12a, 12b, and 12c of the surface acoustic wave element array 10 can be used as a pressure sensor.

  Furthermore, from the distribution of the pressure magnitude detected by each of the plurality of surface acoustic wave elements 12a, 12b, and 12c in the surface acoustic wave element array 10, for example, the pressure applied to the surface of the surface of the humanoid robot The size distribution can be detected.

  Further, in this embodiment, the contact portions T of the plurality of surface acoustic wave elements 12a, 12b and 12c of the surface acoustic wave element array 10 in the surface acoustic wave element array 10 can be covered with a common cover (not shown). The common cover (not shown) contacts the contact sites T of the plurality of base materials 16 even when the degree of contact with the cover is small and the pressure applied thereto is small. The propagation of the surface acoustic wave x, y, or z on the propagation surface 14 is not significantly reduced. Then, an object (not shown) is indirectly applied to the contact portions T of the plurality of surface acoustic wave elements 12a, 12b and 12c of the surface acoustic wave element array 10 via the common cover (not shown). Contact and indirectly apply pressure.

  In this embodiment, the substrate 16 corresponding to the plurality of surface acoustic wave excitation conversion units 18a, 18b, and 18c of the plurality of surface acoustic wave elements 12a, 12b, and 12c by only one common input unit 26 is used. Pulse signals including a plurality of different frequency components necessary to generate the surface acoustic wave x, y, or z corresponding to the corresponding propagation surface 14 can be input simultaneously. At the same time, the corresponding elastic surface of the corresponding propagation surface 14 of the corresponding substrate 16 received by the plurality of surface acoustic wave excitation conversion means 18a, 18b, and 18c of the plurality of surface acoustic wave elements 12a, 12b, and 12c. Electric signals with a plurality of different frequency components converted from the waves x, y, or z are received by the common receiving means 28, and the commonly received electric signals are received by the frequency analyzing means 22. The frequency elements peculiar to the plurality of surface acoustic wave excitation conversion means 18a, 18b, and 18c of the wave elements 12a, 12b, and 12c are analyzed, and the characteristic frequency components are further analyzed by the surface acoustic wave propagation state analysis means 24. The propagation of surface acoustic waves x, y, or z on the propagation surface 14 of the substrate 16 of each of the plurality of surface acoustic wave elements 12a, 12b, and 12c. It is possible to analyze the state. From these propagation states, it is possible to detect the magnitude of the pressure applied by the object in contact with the contact portion T of the base material 16 of each of the plurality of surface acoustic wave elements 12a, 12b, and 12c.

[Second Embodiment]
Next, a surface acoustic wave element array 30 according to a second embodiment of the present invention will be described in detail with reference to FIG. FIG. 2 is a plan view schematically showing a configuration of a surface acoustic wave element array 30 according to the second embodiment of the present invention.

  In the structural members of the surface acoustic wave element array 30 of this embodiment, the same structural members as those of the surface acoustic wave element array 10 according to the first embodiment described above with reference to FIG. The same reference numerals as the reference numerals indicating the same constituent members of the surface acoustic wave element array 10 according to the embodiment are attached, and detailed description of the constituent members is omitted.

  This embodiment differs from the first embodiment described above with reference to FIG. 1 in that each of the plurality of surface acoustic wave elements 12a, 12b, and 12c includes a plurality of surface acoustic wave excitation conversion means 18a. And 18'a, 18b and 18'b, and 18c and 18'c. One of the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, and 18c and 18'c in each of the plurality of surface acoustic wave elements 12a, 12b and 12c is shown in FIG. The surface acoustic wave excitation conversion means 18a, 18b, and 18c used in the first embodiment described above with reference to the drawings, and the remaining number is arbitrary, but FIG. 2 showing this embodiment is a drawing. For the sake of simplicity, the remaining number is shown as one.

  The remaining surface acoustic wave excitation conversion means 18'a, 18'b, and 18'c in each of the plurality of surface acoustic wave elements 12a, 12b, and 12c are connected to the corresponding surface acoustic wave elements 12a, 12b, and 12c. On the surface of each substrate 16, the surface acoustic wave excitation conversion means 18 a, 18 b, and 18 c are arranged at positions away from the propagation surface 14 of the surface acoustic wave that is excited and propagated by the one surface acoustic wave excitation conversion means 18 a, 18 b.

  The plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, and 18c and 18'c in each of the plurality of surface acoustic wave elements 12a, 12b and 12c have mutually different frequency characteristics. In addition, the frequency characteristics of the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or 18c and 18'c in the other surface acoustic wave elements 12a, 12b, or 12c are different. ing.

  That is, in this embodiment, the remaining one surface acoustic wave excitation conversion means 18'a, 18'b, and 18'c are provided on the respective base materials 16 of the corresponding surface acoustic wave elements 12a, 12b, and 12c. Surface characteristics of the surface acoustic wave elements 12a, 12b, or 12c that do not correspond to the surface acoustic waves that are excited and propagated by the surface acoustic wave excitation conversion means 18a, 18b, and 18c on the surface are different. The frequency characteristics are different from the surface acoustic waves excited and propagated by the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or 18c and 18'c on the surface of the material 16.

  The remaining one surface acoustic wave excitation conversion means 18'a, 18'b and 18'c also includes a comb-like electrode in the same manner as the one surface acoustic wave excitation conversion means 18a, 18b and 18c. I can do it.

  In this case, each of the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or each of 18c and 18'c in each of the plurality of surface acoustic wave elements 12a, 12b, and 12c. The electrode has an arrangement period of a plurality of terminals (only the arrangement period of the terminals of the interdigital electrodes of the one surface acoustic wave excitation conversion means 18a, 18b, and 18c is shown in FIG. Or a plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18 in each of the other surface acoustic wave elements 12a, 12b, or 12c. It is also different from the arrangement period of a plurality of terminals of each interdigital electrode of 'b, or 18c and 18'c.

  Furthermore, the remaining surface acoustic wave excitation conversion means 18'a, 18'b and 18'c are applied to the surface acoustic waves used in the first embodiment described above with reference to FIG. Similar to the case where electric signals of a plurality of different frequency components for surface acoustic wave excitation are simultaneously input to the excitation conversion means 18a, 18b and 18c by the common input means 26, the remaining one elasticity The surface wave excitation conversion means 18'a, 18'b, and 18'c are connected to a common input means 26 'for simultaneously inputting electric signals having a plurality of different frequency components for surface acoustic wave excitation. ing.

  The remaining surface acoustic wave excitation conversion means 18′a, 18′b, or 18′c of each of the plurality of surface acoustic wave elements 12a, 12b, and 12c is further connected to the first surface acoustic wave element described above with reference to FIG. The surface acoustic wave excitation conversion means 18a, 18b and 18c used in the embodiment are converted from the surface acoustic wave x, y and z received in the surface acoustic wave excitation conversion means 18a, 18b and 18c. In the same manner as that connected to the common receiving means 28 for receiving the electrical signal, the remaining surface acoustic wave excitation conversion means 18'a, 18'b, and 18'c are converted from the received surface acoustic waves. It is also connected to a common receiving means 28 'for receiving the generated electrical signal, and is connected to the frequency analyzing means 22' via the common receiving means 28 '.

  Further, in this embodiment, the common receiving means 28 'is replaced with the common input means 26' by the remaining surface acoustic wave excitation conversion means 18'a, 18 of each of the plurality of surface acoustic wave elements 12a, 12b and 12c. It is also used to connect to 'b or 18'c. Such receiving means 28 'can be constituted by, for example, a single conducting wire.

  The common input means 26 ′ is used to excite surface acoustic waves having different frequency components with respect to the remaining surface acoustic wave excitation conversion means 18′a, 18′b, and 18′c. In this embodiment, the common input means 26 'is composed of a pulse generator.

  A part of the propagation surface 14 'of the remaining surface acoustic wave excitation conversion means 18'a, 18'b, or 18'c of each of the plurality of surface acoustic wave elements 12a, 12b, and 12c is the above-described base material. The surface acoustic wave excitation conversion means 18'a, 18'b, or 18'c is included in the contact portion T on the outer surface 16 and is out of the contact portion T.

  The surface acoustic wave excitation conversion means 18'a, 18'b, or 18'c is disengaged from the contact portion T on the outer surface of the substrate 16, so that the surface acoustic wave excitation conversion means 18'a, 18'b, Or 18'c is not damaged by the external force loaded on the contact part T from the outside.

  When the remaining surface acoustic wave excitation conversion means 18'a, 18'b, and 18'c are composed of interdigital electrodes, surface acoustic waves that are excited by the interdigital electrodes and propagate through the propagation surface 14 '. The length of the plurality of interdigital electrodes overlapped with each other in the propagation direction (W1, W2, or W3 is described in the first embodiment with reference to FIG. 1 (to avoid the complexity of the drawing). 1 shows only the overlapping length W1 of the interdigital electrodes of the surface acoustic wave excitation conversion means 18a). However, one surface acoustic wave excitation conversion means 18a, 18b described above with reference to FIG. As in the case of the interdigital electrode 18c, it is preferable that the radius of curvature of the corresponding propagation surface 14 'is equal to or smaller than that, and the wavelength of the surface acoustic wave excited on the corresponding propagation surface 14' by each interdigital electrode. (each It is preferred arrangement period of the plurality of terminals of whom shaped electrodes or equivalent) is less than 1/5 of the radius of curvature.

  If the size of each interdigital electrode is not defined in this way, especially when a piezoelectric crystal is used for the substrate 16, each interdigital electrode always ensures that the desired surface acoustic wave is applied to the corresponding propagation surface 14 ′. It becomes difficult to output an electric signal from the surface acoustic wave that has been excited and propagated, and it is necessary to design a comb-shaped electrode having a complicated shape in accordance with the anisotropy of the crystal.

  The surface acoustic wave element array 30 according to the second embodiment configured as described above has the same effect as the surface acoustic wave element array 10 according to the first embodiment described above with reference to FIG. Of course you can get. In addition, each of the plurality of surface acoustic wave elements 12a, 12b, and 12c includes a plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, and 18c and 18'c. In addition, the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or 18c and 18'c of the surface acoustic wave elements 12a, 12b, or 12c have mutually different frequency characteristics. Therefore, in each of the plurality of surface acoustic wave elements 12a, 12b and 12c, the propagation surfaces of the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or 18c and 18'c, respectively. 14 can be known in more detail and in a wide range.

  As is clear from the above description, each of the plurality of surface acoustic wave elements 12a, 12b, and 12c of the surface acoustic wave element array 30 of this embodiment can also be used as a pressure sensor.

[Third Embodiment]
3A to 3C show a plurality of surface acoustic wave elements used in a surface acoustic wave element array that can also be used as a pressure sensor array according to the third embodiment of the present invention. 12A, 12B, and 12C are shown. In this embodiment, the same constituent members as those of the surface acoustic wave elements 12a, 12b, and 12c of the first embodiment described above with reference to FIG. The detailed description about is omitted.

  3 (A) to 3 (C), the interdigital electrodes on the same base material 16 are different from each other only in the length in which the plurality of terminals overlap each other, and the arrangement period of the plurality of terminals is the same. Three types of surface acoustic wave elements 12A, 12B, and 12C having surface acoustic wave excitation conversion means 18A, 18B, and 18C configured by the above are shown. Further, these three types of surface acoustic wave elements 12A, 12B are shown. , And 12C, as the surface acoustic waves excited by the surface acoustic wave excitation conversion means 18A, 18B and 18C propagate through the propagation paths 14A, 14B, and 14C, the propagation paths 14A, 14B, and 14C, respectively. It is schematically shown how the shape in the width direction (that is, the amplitude of the surface acoustic wave) changes.

  In FIG. 3A, the surface acoustic wave that is excited and propagated on the peripheral surface of the base material 16 by the surface acoustic wave excitation conversion means 18A having the smallest length in which a plurality of terminals overlap each other is: The propagation path 14A (that is, the amplitude) is gradually widened to reach a position 90 ° away from the surface acoustic wave excitation conversion means 18A along the line, and is widened most at a position 90 ° away; The propagation path 14A is gradually contracted to a position 180 ° away from the surface and becomes equal to the overlapping length of the surface acoustic wave excitation conversion means 18A at a position 180 ° away; The propagation path 14A is gradually widened to reach the widest position at the position separated by 270 °, similarly to the position separated by 90 °, and then the position separated by 360 ° from the position separated by 270 ° (ie, the elastic surface) To the wave excitation conversion means 18A) Equal to the length of the overlap of the surface acoustic wave excited converter 18A in 搬路 14A was slowly apart 360 ° deflating position. In other words, the lengths of the plurality of terminals of the interdigital electrode of the surface acoustic wave excitation conversion means 18A disposed on the base material 16 of a predetermined outer diameter of a predetermined material so as to be in this way overlap each other. However, the arrangement period is selected while being the same as the arrangement period of the plurality of terminals of the interdigital electrodes of the other surface acoustic wave excitation conversion means 18B and 18C.

  In FIG. 3B, the surface acoustic wave that is excited and propagated on the peripheral surface of the base material 16 by the surface acoustic wave excitation conversion means 18B having an intermediate length in which a plurality of terminals overlap each other is: surface acoustic wave A propagation path 14B having a width equal to the overlapping length of the excitation converter 18A (ie, amplitude) is rotated 360 ° from the surface acoustic wave excitation converter 18B along the circumferential surface. In other words, the overlapping lengths of the terminals of the interdigital electrodes of the surface acoustic wave excitation conversion means 18B arranged on the base material 16 of a predetermined outer diameter of a predetermined material so as to be like this. However, the arrangement period is selected while being the same as the arrangement period of the plurality of terminals of the interdigital electrodes of the other surface acoustic wave excitation conversion means 18A and 18C.

  In FIG. 3C, the surface acoustic wave that is excited and propagated on the peripheral surface of the base material 16 by the surface acoustic wave excitation conversion means 18C having the longest overlapping length of the plurality of terminals is: The propagation path 14C (that is, the amplitude) is gradually contracted to reach the position 90 ° away from the surface acoustic wave excitation conversion means 18C along the line, and is minimized at the position 90 ° away; The propagation path 14C is gradually widened to a position 180 ° away from the surface, and becomes equal to the overlapping length of the surface acoustic wave excitation conversion means 18C at a position 180 ° away; The propagation path 14C is gradually contracted to reach the smallest position at a position 270 ° apart from the position 90 ° away from above; next, a position 360 ° away from the position 270 ° away (ie, the elastic surface) Wave excitation conversion means 18C) Equal to the length of the overlap of the surface acoustic wave excited conversion unit 18C in gradually widened so by 360 ° away the channel 14C until the. In other words, the overlapping lengths of the terminals of the interdigital electrode of the surface acoustic wave excitation conversion means 18C disposed on the base material 16 of a predetermined outer diameter of a predetermined material so as to be configured in this way. However, the arrangement period is selected while being the same as the arrangement period of the plurality of terminals of the interdigital electrodes of the other surface acoustic wave excitation conversion means 18A and 18B.

  4 shows the three types of surface acoustic wave elements 12A, 12B, and 12C shown in FIGS. 3A to 3C, and the propagation paths 14A, 14B, and 14C on the substrate 16 are respectively elastic surfaces. A position 90 ° away from the wave excitation conversion means 18A, 18B, and 18C in the traveling direction of the surface acoustic wave is defined as a contact position TP, and the magnitude of the pressure applied to the contact position TP via the pressure load plate PP and the accompanying pressure. Attenuation of the surface acoustic wave amplitude is indicated by the lines indicated by reference numerals a, b, and c.

  From the lines indicated by reference signs a, b, and c, the smaller the width of the propagation paths 14A, 14B, and 14C at the contact position TP (that is, the amplitude of the surface acoustic wave), the greater the pressure received at the contact position TP. It can be seen that the substrate 16 is easily affected by the deformation of the surface of the substrate 16 (that is, the sensitivity is high).

  These three types of surface acoustic wave elements 12A, 12B, and 12C are subjected to surface acoustic wave excitation conversion means 18A, 18B, and 18C by means of three input / output means (not shown) corresponding to each other. Signals are input, and the surface acoustic wave excitation conversion means 18A, 18B, and 18C to which the signals correspond respectively receive electrical signals converted from the surface acoustic waves received. Further, based on the electrical signals converted from the surface acoustic waves received as described above by the surface acoustic wave propagation state analyzing means (not shown) connected to the corresponding three input / output means (not shown) corresponding to each as described above, The state of pressure applied to each of the three types of surface acoustic wave elements 12A, 12B, and 12C can be detected.

  Further, in FIG. 3D, the same surface acoustic wave element 12C as shown in FIG. 3C is used, and the contact position TP is moved along the propagation path 14C on the base material 16 through the surface acoustic wave. A case is shown in which the excitation converter 18C is separated from the position 90 ° away from the direction of travel of the surface acoustic wave in the direction perpendicular to the travel direction.

  In this case, the magnitude of the pressure applied to the contact position TP via the pressure load plate PP and the attenuation state of the amplitude of the surface acoustic wave associated therewith are indicated by the line indicated by the reference symbol d in FIG. Yes. From the line indicated by the reference symbol d, the amplitude of the surface acoustic wave is attenuated by the pressure until the pressure becomes large enough to cause deformation of the surface of the substrate 16 due to the pressure. First, after the magnitude of the pressure is increased to such an extent that the surface of the substrate 16 is deformed by the pressure, the amplitude of the surface acoustic wave is attenuated as the magnitude of the pressure is further increased as shown in FIG. It can be seen that the attenuation is abruptly the same as in the case of the surface acoustic wave element 12C.

  As shown by FIGS. 3A to 3D and FIGS. 4A to 4D, surface acoustic wave excitation by interdigital electrodes using the same substrate 16 and having a plurality of terminals having the same arrangement period. It can be seen that the surface acoustic wave elements 12A to 12C having various pressure sensitivities can be provided even when the surface acoustic wave elements 12A to 12C using the conversion means 18A to 18C are used. Then, it can be seen that by combining these surface acoustic wave elements 12A to 12C having various pressure sensitivities, it is possible to provide a surface acoustic wave element array having a wide range of pressure sensitivities, that is, a pressure sensor array. .

[Fourth Embodiment]
FIG. 5 shows one of a plurality of surface acoustic wave elements 12D used in a surface acoustic wave element array that can also be used as a pressure sensor array, according to a fourth embodiment of the present invention. . Also in this embodiment, the same constituent members as those of the surface acoustic wave elements 12a, 12b, and 12c of the first embodiment described above with reference to FIG. 1 and the third component described above with reference to FIGS. The same constituent members as those of the surface acoustic wave elements 12A, 12B, and 12C of the embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

  The surface acoustic wave element 12D according to this embodiment has a plurality of arrangements arranged in a plurality of arrangement periods as shown in FIG. 5, for example, so that surface acoustic waves in a plurality of frequency bands can be excited simultaneously. The surface acoustic wave excitation conversion means 18 </ b> D constituted by the interdigital electrode having the terminals is provided on the base material 16. Even if only one surface acoustic wave element 12D used in this embodiment is used, a plurality of elements arranged at different arrangement periods as shown in FIGS. 3A to 3C are used. Surface acoustic wave element array as described above in which a plurality of surface acoustic wave elements 12A, 12B, and 12C each using surface acoustic wave excitation conversion means 18A, 18B, and 18C constituted by interdigital electrodes having terminals are combined. That is, it can have a wide range of pressure sensitivity as well as a pressure sensor array.

  This is because the surface width of a surface acoustic wave having a higher frequency has a narrower beam width at the contact position TP of the base material 16, and the elastic surface shown in FIG. The surface acoustic wave is excited in the wave element 12 </ b> C; and the surface width of the surface acoustic wave having a lower frequency increases the beam width at the contact position TP of the base material 16. This is because the surface acoustic wave is excited in the surface acoustic wave element 12A shown in FIG.

[Fifth Embodiment]
Next, a surface acoustic wave element array 40 according to a fifth embodiment of the present invention will be described in detail with reference to FIGS. 6 (A) and 6 (B). FIG. 6A is a plan view schematically showing a configuration of a surface acoustic wave element array 40 according to the fifth embodiment of the present invention.

  The constituent members of the surface acoustic wave element array 40 of this embodiment have the same configurations as those of the surface acoustic wave element arrays 10 and 30 according to the first and second embodiments described above with reference to FIGS. The same reference numerals as those used to indicate the same constituent members of the surface acoustic wave element arrays 10 and 30 according to the first and second embodiments are attached to the members, and a detailed description of the constituent members is given. Is omitted.

  This embodiment differs from the first embodiment described above with reference to FIG. 1 in that each of the plurality of surface acoustic wave elements 12a, 12b, and 12c includes a plurality of surface acoustic wave excitation conversion means 18a. And 18'a, 18b and 18'b, and 18c and 18'c. One of the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, and 18c and 18'c in each of the plurality of surface acoustic wave elements 12a, 12b and 12c is shown in FIG. The surface acoustic wave excitation conversion means 18a, 18b, and 18c used in the first embodiment described above with reference to FIG. 6 showing the present embodiment, although the remaining number is arbitrary. In A), the remaining number is shown as one for simplification of the drawing.

  This embodiment differs from the second embodiment described above with reference to FIG. 2 in that a plurality of surface acoustic wave excitation conversion means 18a for each of the plurality of surface acoustic wave elements 12a, 12b, and 12c. And 18'a, 18b and 18'b, or 18c and 18'c, respectively, generate surface acoustic waves (one of each of the plurality of surface acoustic wave elements 12a, 12b, and 12c) on the corresponding propagation surface 14 or 14 '. Only the surface acoustic waves that are excited and propagated by the two surface acoustic wave excitation conversion means 18a, 18b, and 18c on the corresponding propagation surface 14 are indicated by x, y, or z in FIG. Parts S and S ′, and receiving parts J and J ′ that receive the surface acoustic waves propagated through the corresponding propagation surfaces 14 or 14 ′ by the transmitting parts S and S ′ and convert them into electrical signals. That is.

  Each of the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or each of the transmission units S or S 'and corresponding reception units J or J' of 18c and 18'c has a corresponding propagation surface. 14 or 14 ′ are separated from each other in the direction in which the surface acoustic waves propagate.

  A plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or each transmission part S or S 'and corresponding reception part J or J' of 18c and 18'c are between them. It can be an interdigital electrode having a plurality of terminals having an array period corresponding to the frequency of the surface acoustic wave propagating.

  A plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or a respective transmission section S or S 'of 18c and 18'c and a plurality of terminals of a corresponding reception section J or J' (Only the arrangement period of a plurality of terminals of each interdigital electrode of the one surface acoustic wave excitation conversion means 18a, 18b, and 18c is indicated by reference numeral P1, P2, or P3 in FIG. The surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or 18c and 18 'of the first and second embodiments described above with reference to FIGS. As in the case of each interdigital electrode of c, the plurality of surface acoustic wave excitation conversion means 18a and 18'a are different from each other and in each of the other surface acoustic wave elements 12a, 12b, or 12c. , 18 And 18'B, or also differs from the arrangement period of the plurality of terminals of interdigital electrodes 18c and the transmission section S or S of each of 18'C 'and the corresponding receiving portion J or J'.

  Incidentally, in each of the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or 18c and 18'c, the corresponding transmitting unit S or S 'and the corresponding receiving unit J or J' Needless to say, the arrangement period of the plurality of terminals of the electrode is preferably the same.

  In this embodiment, each of the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or 18c and 18'c, respectively, of each of the plurality of surface acoustic wave elements 12a, 12b, and 12c. Are connected to a common input means 26 '', and each of the receiving sections J and J 'is connected to a frequency analysis means 22' 'via a common receiving means 28' '. And a surface acoustic wave propagation state analyzing means 24 ''.

  The common input means 26 '' includes a plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or 18c and 18'c of each of the plurality of surface acoustic wave elements 12a, 12b and 12c. For each of the transmission units S and S ′, a plurality of transmission units S and S ′ are required to excite and propagate the surface acoustic waves of the corresponding frequency components to the propagation surfaces 14 and 14 ′ to which the transmission units S and S ′ correspond. Electric signals including all frequency components are input simultaneously.

  Further, the common receiving unit 28 '' includes a plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or 18c and 18 of each of the plurality of surface acoustic wave elements 12a, 12b and 12c. The electric signals including all the corresponding frequency components received by the respective receiving units J and J of “c” are sent to the common frequency analysis means 22 ″ and the common surface acoustic wave propagation state analysis means 24 ″. .

  A plurality of commonly received electrical signals are frequency analysis means 22 '' by a plurality of surface acoustic wave elements 12a, 12b and a plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b of 12c, or 18c and 18′c are analyzed into electric signals having specific frequency components, and the electric signals having specific frequency components are analyzed by the surface acoustic wave propagation state analyzing means 24 ″. Then, it is possible to analyze the propagation state of the surface acoustic wave on the propagation surface 14 or 14 'of each substrate 16 of 12c. From these propagation states, it is possible to detect a change in the external environment including the magnitude of the pressure applied by the object that contacts the contact portion T of the base material 16 of each of the plurality of surface acoustic wave elements 12a, 12b, and 12c. I can do it.

  That is, each of the plurality of surface acoustic wave elements 12a, 12b, and 12c of the surface acoustic wave element array 40 of this embodiment can be used as a pressure sensor.

  In this embodiment, the plurality of surface acoustic wave elements 12a, 12b and 12c of the first and second embodiments shown in FIG. 1 and FIG. For example, it is mounted directly on a support surface such as the body surface of a humanoid robot or via a flexible film material (not shown). However, a plurality of surface acoustic wave elements 12a, 12b, and a substrate 16 of 12c are respectively provided. A part B opposite to the contact part T is embedded and supported in a flexible film material 42 attached on a support surface such as a body surface of a humanoid robot.

  The surface acoustic wave element array 40 shown in FIGS. 6A and 6B without using the support pillar 20 is the first and second embodiments shown in FIGS. 1 and 2. Compared to the surface acoustic wave element arrays 10 and 30, the structure is simpler and the manufacture is facilitated. In addition, the plurality of surface acoustic wave excitation conversion means 18a and 18a ′, 18b and 18′b, or the transmission parts S and S ′ of 18c and 18′c are constituted by interdigital electrodes, and the corresponding propagation. When surface acoustic waves x, y, and z are excited and propagated in both directions from the interdigital electrodes on the surfaces 14 and 14 ', the surface acoustic waves x, y, and z propagated toward the film material 42 are It is absorbed by the film material 42 and does not reach the corresponding receivers J and J ′.

  Furthermore, in this embodiment, the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or 18c and 18'c of the plurality of surface acoustic wave elements 12a, 12b and 12c, respectively. Respective transmitters S and S ′ and receiving means J and J ′ are disposed on the surface of the corresponding substrate 16 so as to be exposed from the film material 42 and away from the contact site T. Accordingly, the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or the respective transmitting units S and 18c and 18'c of the plurality of surface acoustic wave elements 12a, 12b and 12c, and The film material 42 does not affect the propagation of the surface acoustic wave between S ′ and the receiving means J and J ′. A plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or transmission parts S and S 'of 18c and 18'c, and reception means J and J' By being separated from each other, a plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or transmission units S of 18c and 18'c, due to an external force applied to the contact site T from the outside, and S ′ and the receiving means J and J ′ are not damaged.

  The surface acoustic wave element array 40 according to the fifth embodiment configured as described above is the surface acoustic wave element according to the first and second embodiments described above with reference to FIGS. 1 and 2. Naturally, the same effects as those of the arrays 10 and 30 can be obtained. In addition, each of the plurality of surface acoustic wave elements 12a, 12b, and 12c includes a plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, and 18c and 18'c. Moreover, each of the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or 18c and 18'c of each surface acoustic wave element 12a, 12b or 12c is a transmitter S or S '. And receiving section J or J ′, each of the plurality of surface acoustic wave elements 12a, 12b, and 12c has a plurality of surface acoustic wave excitation conversion means 18a and 18′a, 18b and 18′b. , Or changes in the characteristics of the surface acoustic waves propagating through the propagation surfaces 14 and 14 ′ due to changes in the external environment in contact with the propagation surfaces 14 and 14 ′ of 18 c and 18 ′ c, for example, changes in temperature. (E.g., change in the propagation speed) can be known more precisely.

[Modification of Fifth Embodiment]
FIG. 6C is a schematic side view of a modified example 40 ′ of the surface acoustic wave element array 40 according to the fifth embodiment of the present invention with reference to FIGS. 6A and 6B. Has been shown.

  The surface acoustic wave element array of the modification 40 ′ is different from the surface acoustic wave element array 40 according to the fifth embodiment of the present invention with reference to FIGS. 6 (A) and 6 (B). In the surface acoustic wave element array 40 according to the fifth embodiment, the portion B embedded in the film material 42 in each of the base materials 16 of the plurality of surface acoustic wave elements 12a, 12b, and 12c is deleted and is substantially hemispherical. The flat surface of the portion after the embedded portion B is deleted is fixed to the surface of the flexible film material 42 ′ by a known fixing means such as an adhesive. It is that. The surface of each of the plurality of surface acoustic wave elements 12a, 12b and 12c of the surface acoustic wave element array of the modification 40 ′ is not embedded in the film material 42 ′ of the modification 40 ′. The thickness of the film material 42 ′ of this modification can be made much thinner than the thickness of the film material 42 of the surface acoustic wave element array 40 according to the fifth embodiment described above. The membrane material 42 ′ of the modified example 40 ′ is more closely and accurately attached to the support surface such as the body surface of a humanoid robot, compared to the membrane material 42 of the fifth embodiment, which is thicker than that. It is possible to attach according to.

  The surface acoustic wave element array of the modification 40 ′ of FIG. 6C is the same as that of FIGS. 6A and 6B except for the above-described substantially hemispherical base material 16 ′ and thin film material 42 ′. Compared with the surface acoustic wave element array 40 according to the fifth embodiment of the present invention with reference to FIG. Accordingly, the surface acoustic wave element array according to the modified example 40 ′ of FIG. 6C is the surface acoustic wave element according to the fifth embodiment of the present invention with reference to FIGS. 6A and 6B. The same effect as the array 40 can be obtained.

[Sixth Embodiment]
Next, a surface acoustic wave element array 50 according to a sixth embodiment of the present invention will be described in detail with reference to FIG. FIG. 7 is a plan view schematically showing a configuration of a surface acoustic wave element array 50 according to the sixth embodiment of the present invention.

  The constituent members of the surface acoustic wave element array 50 of this embodiment have the same configurations as those of the surface acoustic wave element arrays 10 and 30 according to the first and second embodiments described above with reference to FIGS. The same reference numerals as those used to indicate the same constituent members of the surface acoustic wave element arrays 10 and 30 according to the first and second embodiments are attached to the members, and a detailed description of the constituent members is given. Is omitted.

  This embodiment differs from the first and second embodiments described above with reference to FIGS. 1 and 2 in that each of the plurality of surface acoustic wave elements 12a, 12b, and 12c has a plurality of elasticity. Surface wave excitation conversion means 18a and 18'a, 18b and 18'b, and 18c and 18'c are provided. One of the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, and 18c and 18'c in each of the plurality of surface acoustic wave elements 12a, 12b and 12c is shown in FIG. The surface acoustic wave excitation conversion means 18a, 18b, and 18c used in the first embodiment described above with reference to FIG. 7 showing the present embodiment are shown in FIG. For the sake of simplicity, the remaining number is shown as one.

  Furthermore, in this embodiment, the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or 18c and 18'c, respectively, of the plurality of surface acoustic wave elements 12a, 12b, and 12c. The surface acoustic wave to be excited and propagated on the corresponding propagation surface 14 or 14 '(one surface acoustic wave excitation conversion means 18a, 18b and 18c of each of the plurality of surface acoustic wave elements 12a, 12b and 12c corresponds). A plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b corresponding to the surface acoustic wave excited and propagated on the propagation surface 14 are indicated by x, y or z in FIG. , Or 18 c and 18 ′ c, respectively, are provided on the corresponding propagation surface 14 or 14 ′.

  The plurality of surface acoustic wave excitation conversion means 18a and 18′a, 18b and 18′b, or the reflectors H and H ′ corresponding to 18c and 18′c are surface acoustic waves on the corresponding propagation surface 14 or 14 ′. Are separated from each other in the propagation direction.

  The plurality of surface acoustic wave excitation conversion means 18a and 18′a, 18b and 18′b, or 18c and 18′c and the corresponding reflectors H and H ′ have the frequency of the surface acoustic wave propagating between them. Although it can be formed in a ladder pattern in which both poles of interdigital electrodes having a plurality of terminals having a corresponding arrangement period are combined, this detailed structure is known and will not be described further here. The reflectors H and H ′ may be grooves formed on the propagation surfaces 14 and 14 ′ of the base material 16 by etching using, for example, photolithography.

  The reflector H or H ′ corresponding to each of the plurality of surface acoustic wave excitation conversion means 18a and 18′a, 18b and 18′b, or 18c and 18′c forms a ladder-type conductive pattern. However, what can be realized is known in elasticity and is not limited to this. In short, any structure that functions as an elastic reflector H or H ′ may be used.

  In this embodiment, each of the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or 18c and 18'c, respectively, of each of the plurality of surface acoustic wave elements 12a, 12b, and 12c. Are connected to a common input means 26 and also connected to a frequency analysis means 22 and a surface acoustic wave propagation state analysis means 24 via a common reception means 28.

  The common input means 26 includes a plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or 18c and 18'c, respectively, of the plurality of surface acoustic wave elements 12a, 12b and 12c. On the other hand, electric signals including all of a plurality of frequency components necessary for exciting and propagating the surface acoustic wave of the corresponding frequency component to the corresponding propagation surfaces 14 and 14 'are input simultaneously.

  The reflectors H and H ′ are formed of the plurality of surface acoustic wave excitation conversion means 18a and 18′a, 18b and 18′b, or 18c and 18′c of the plurality of surface acoustic wave elements 12a, 12b and 12c, respectively. The surface acoustic waves excited respectively corresponding to the propagation surfaces 14 and 14 'and propagating toward the corresponding reflectors H and H' are subjected to the corresponding surface acoustic wave excitation via the corresponding propagation surfaces 14 and 14 '. Reflects towards the conversion means 18a and 18'a, 18b and 18'b, or 18c and 18'c.

  The common receiving unit 28 includes a plurality of surface acoustic wave excitation conversion units 18a and 18'a, 18b and 18'b, or 18c and 18'c, respectively. The electric signals including all the corresponding frequency components reflected and received from the corresponding reflectors H and H ′ are sent to the common frequency analysis means 22 and the common surface acoustic wave propagation state analysis means 24.

  A plurality of commonly received electrical signals are generated by the frequency analysis means 22 and a plurality of surface acoustic wave elements 12a, 12b, and a plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or 18c of 12c and The electrical signals of the frequency components peculiar to each of 18'c are analyzed, and further, the electrical signals of the peculiar frequency components are analyzed by the surface acoustic wave propagation state analyzing means 24, and each of the plurality of surface acoustic wave elements 12a, 12b, and 12c. The propagation state of the surface acoustic wave on the propagation surface 14 or 14 ′ of the substrate 16 can be analyzed. From these propagation states, a change in the external environment including the magnitude of the pressure applied by the object in contact with the contact portion T of the base material 16 of each of the plurality of surface acoustic wave elements 12a, 12b, and 12c is detected. I can do it.

  That is, each of the plurality of surface acoustic wave elements 12a, 12b, and 12c of the surface acoustic wave element array 50 of this embodiment can be used as a pressure sensor.

  In this embodiment, the plurality of surface acoustic wave elements 12a, 12b and 12c of the first and second embodiments shown in FIG. 1 and FIG. For example, it is attached to a support surface such as the body surface of a humanoid robot directly or via a flexible film material (not shown). However, the fifth embodiment described above with reference to FIGS. As in the case of the embodiment, the base material 16 of the plurality of surface acoustic wave elements 12a, 12b, and 12c has a part B on the outer surface opposite to the contact part T, for example, on the body surface of the humanoid robot. It is embedded and supported in a flexible membrane material 42 (see FIG. 6B) attached on such a support surface.

  Similar to the surface acoustic wave element array 40 of the fifth embodiment shown in FIGS. 6A and 6B in which the support pillar 20 is not used, it is shown in FIG. 7 in which the support pillar 20 is not used. The surface acoustic wave element array 50 according to the sixth embodiment is also compared with the surface acoustic wave element arrays 10 and 30 according to the first and second embodiments shown in FIGS. The structure becomes simpler and the manufacture becomes easier. Moreover, each of the plurality of surface acoustic wave excitation conversion means 18a and 18a ′, 18b and 18′b, or each of the transmitters S and S ′ of 18c and 18′c is constituted by an interdigital electrode, and the corresponding propagation surface 14 When the surface acoustic waves x, y, and z are excited and propagated in both directions from the interdigital electrodes on 14 and 14 ', the surface acoustic waves x, y, and z propagated toward the film material 42 are the film material. It is absorbed by 42 and does not reach the corresponding reflectors H and H ′.

  Furthermore, in this embodiment, the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or 18c and 18'c, respectively, of the plurality of surface acoustic wave elements 12a, 12b, and 12c; Corresponding reflectors H and H ′ are exposed from the film material 42 (see FIG. 6B) on the surface of the corresponding substrate 16 and are arranged at positions away from the contact site T. Accordingly, the plurality of surface acoustic wave elements 12a, 12b, and 12c, the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or the reflectors H corresponding to 18c and 18'c, and The film material 42 (see FIG. 6B) does not affect the propagation of the surface acoustic wave with H ′. Further, since the plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or the reflectors H and H 'corresponding to 18c and 18'c are separated from the contact site T, the contact site A plurality of surface acoustic wave excitation conversion means 18a and 18'a, 18b and 18'b, or 18c and 18'c and corresponding reflectors H and H 'may be damaged by an external force applied to T from the outside. Absent.

  The surface acoustic wave element array 50 according to the sixth embodiment configured as described above includes the surface acoustic wave elements according to the first and second embodiments described above with reference to FIGS. 1 and 2. Naturally, the same effects as those of the arrays 10 and 30 can be obtained. In addition to this, the surface acoustic wave element array 30 according to the second embodiment described above with reference to FIG. 2 and the fifth embodiment described above with reference to FIGS. The configuration can be made simpler than the surface acoustic wave element array 40 according to the embodiment.

  The surface acoustic wave element array 50 according to the sixth embodiment configured as described above is further provided with an elastic surface according to the modification of the fifth embodiment described above with reference to FIG. Similarly to the wave element array 40 ′, the portion B (FIG. 6) embedded in the film material 42 (see FIG. 6B) in each of the base materials 16 of the plurality of surface acoustic wave elements 12a, 12b, and 12c. (See (B)) to form a substantially hemispherical base material 16 ', and the flat surface remaining after the portion B (see (B) in FIG. 6) is removed is made of a flexible film material 42' (see FIG. 6 (see (C)) can be fixed by a known fixing means such as an adhesive.

  Even if it is modified in this way, the same effect as the surface acoustic wave element array 50 according to the sixth embodiment described above with reference to FIG. 7 can be obtained. Further, FIG. The following effects specific to the surface acoustic wave element array 40 ′ according to the modification of the fifth embodiment described above can also be obtained with reference to the above.

  That is, the film material 42 ′ (see FIG. 6C) has the portion B (FIG. 6 (see (B)) is not buried, so that the film material 42 ′ of the modified example of the sixth embodiment described above with reference to FIG. 7 (see (C) in FIG. 6). Is made much thinner than the thickness of the film material 42 (see FIG. 6B) of the surface acoustic wave element array 50 according to the sixth embodiment described above with reference to FIG. I can do it. The film material 42 ′ (see FIG. 6C) of this modification is, for example, human compared to the film material 42 of the sixth embodiment (see FIG. 6B), which is thicker than that. It can be attached more closely and accurately to a support surface such as the body surface of a type robot.

[Seventh Embodiment]
Next, a surface acoustic wave element array 60 according to a seventh embodiment of the present invention will be described in detail with reference to FIG. FIG. 8A is a side view schematically showing a configuration of a surface acoustic wave element array 60 according to the seventh embodiment of the present invention.

  The surface acoustic wave element array 60 includes a plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and 62f as shown in FIG. The plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and 62f are classified into at least two groups having different propagation times of the surface acoustic waves that are excited and propagated on the propagation surface of the base material. ing. The difference in the propagation time is, for example, the difference in the frequency components of the surface acoustic wave excited and propagated on each propagation surface, the difference in the structure of each propagation surface, and the length of the propagation path of the surface acoustic wave in each propagation surface. It can be caused by the difference in height.

  In this embodiment, the plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and 62f are different in the frequency components of the surface acoustic waves that are excited and propagated in the respective propagation planes and in the respective propagation planes. It is classified into six groups according to the difference in the length of the propagation path of the surface acoustic wave.

  More specifically, the three surface acoustic wave elements 62a, 62b, and 62c have propagation surfaces 64 having the same structure in which the same surface acoustic wave α propagates, and have the same structure. The substrates 66a, 66b, and 66c have different diameters. That is, the three surface acoustic wave elements 62a, 62b, and 62c have the propagation surfaces 64 having the same structure in which the same surface acoustic wave α is propagated, and have the same structure. The lengths of the propagation paths through which the surface acoustic waves α propagate in the substrates 66a, 66b and 66c having different diameters are different from each other.

  The surface acoustic waves propagated while exciting and propagating the same surface acoustic wave α to the propagation surface 64 on the propagation surfaces 64 of the base materials 66a, 66b, and 66c of the three surface acoustic wave elements 62a, 62b, and 62c. Surface acoustic wave excitation conversion means 68a, 68b, and 68c for receiving α and converting it into corresponding electric signals are provided.

  Further, the remaining three surface acoustic wave elements 62d, 62e, and 62f have propagation surfaces 64 'having the same structure in which the same surface acoustic wave β propagates and have the same structure. The substrates 66d, 66e, and 66f have different diameters. That is, the remaining three surface acoustic wave elements 62d, 62e, and 62f are provided with propagation surfaces 64 ′ having the same structure in which the same surface acoustic wave β propagates, and have the same structure. However, the lengths of the propagation paths through which the surface acoustic wave β propagates in the substrates 66d, 66e, and 66f having different diameters are different from each other.

  The same surface acoustic wave β is excited on the propagation surface 64 ′ and propagated to the propagation surfaces 64 ′ of the remaining three surface acoustic wave elements 62d, 62e, and 62f of the base materials 66d, 66e, and 66f. Surface acoustic wave excitation conversion means 68d, 68e, and 68f for receiving the surface acoustic wave β and converting it into corresponding electrical signals are provided.

  Each of the substrates 66a, 66b, 66c, 66d, 66e, and 66f has at least a portion having piezoelectric properties along the surface so that the surface acoustic waves α or β can be excited and propagated. More specifically, it can be constituted by a combination of a non-piezoelectric material substrate and a piezoelectric material film covering the surface of the substrate, specifically formed entirely of a piezoelectric material. In the case of the latter combination, the piezoelectric material film does not need to cover the entire surface of the non-piezoelectric substrate, and at least the surfaces of the substrates 66a, 66b, 66c, 66d, 66e, and 66f. The surface acoustic wave excitation conversion means 68a, 68b, 68c, 68d, 68e, and 68f need only be covered.

  As used herein, the term “propagating surface” 64 refers to a plurality of surface acoustic wave elements 62a, 62b, 62c, 66d, 66e, and 66f base materials 66a, 66b, 66c, 66d, 66e, and 66f. It means only a portion on the surface where surface acoustic wave α or β is excited and propagated by surface acoustic wave excitation conversion means 68a, 68b, 68c, 68d, 68e, or 68f. That is, the surface acoustic wave excitation conversion means 68a, 68b on the outer surfaces of the base materials 66a, 66b, 66c, 66d, 66e, and 66f of the plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and 62f. , 68c, 68d, 68e, or 68f, the surface acoustic wave α or β is not excited and propagated, or the surface acoustic wave α or β is propagated even if the surface acoustic wave α or β is excited and propagated. The portion where the surface acoustic wave excitation conversion means 68a, 68b, 68c, 68d, 68e, or 68f cannot output an electrical signal is not referred to as the “propagation surface” 64 here.

  The plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and 62f are made of base materials 66a, 66b, 66c, 66d, 66e, and 66f. Is included. Furthermore, in this embodiment, the propagation surfaces 64 or 64 ′ of the base materials 66a, 66b, 66c, 66d, 66e, and 66f are at least a continuous annular curved surface, and propagate through the propagation surfaces 64 or 64 ′. A surface acoustic wave α or β circulates along the outer surfaces of the substrates 66a, 66b, 66c, 66d, 66e, and 66f.

  In FIG. 8A, the propagation surface 64 or 64 ′ has a predetermined width on the outer surface of each of the base materials 66a, 66b, 66c, 66d, 66e, and 66f, and the base materials 66a, 66b, 66c, 66d, 66e, and 66f are depicted as a band-like portion extending in an annular shape in a predetermined direction on the outer surface, but this is only drawn as such for ease of explanation. is there. In the actual propagation surface 64 or 64 ', the surface acoustic waves α or β that are excited and propagated on the outer surfaces of the substrates 66a, 66b, 66c, 66d, 66e, and 66f, respectively, are propagated on the substrates 66a, 66b, 66c. , 66d, 66e, and 66f, while propagating in a predetermined direction on the outer surface of each of the base materials 66a, 66b, 66c, 66d, 66e, and 66f, crossing the propagation direction along the outer surface of each of the substrates 66a, 66b, 66c, 66d, 66e, and 66f. It should be taken into account that they often diffuse or shrink in the direction.

  In this embodiment, each of the propagation surfaces 64 or 64 ′ of the base materials 66a, 66b, 66c, 66d, 66e, and 66f is constituted by at least a part of a spherical surface, but the base materials 66a, 66b, 66c, Since portions other than the propagation surface 64 or 64 ′ on the outer surfaces of 66d, 66e, and 66f are irrelevant to the excitation and propagation of the surface acoustic wave α or β, they may have any shape. Each of the plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and 62f of the surface acoustic wave elements 62a, 66b, 66c, 66d, 66e, and 66f of this embodiment is other than the propagation surface 64 or 64 ′. The portions are connected to each other by a support column 70 so as to be foldable between the plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e and 62f, and the base materials 66a, 66b, 66c, 66d, 62f. Each of the propagation surfaces 64 or 64 'of 66e and 66f is prevented from coming into contact with anything other than the target object, and is a flexible film material (not shown) directly or on a support surface such as the body surface of a humanoid robot. It is attached via.

  The plurality of surface acoustic wave elements 62a, 62b, and 62c of the plurality of surface acoustic wave elements 62a, 66b, and 66c of this embodiment further has a difference in the length of the propagation path of the surface acoustic wave α on the propagation surface 64 in at least two groups. In order to classify them, the outer diameters of the propagation surfaces 64 constituted by at least a part of the spherical surface are different from each other, and the remaining plurality of surface acoustic wave elements 62d and 62e, and the base materials 66d and 66e of 62f , And 66f, in order to classify the difference in the length of the propagation path of the surface acoustic wave β on the propagation surface 64 ′ into at least two groups, the outside of the propagation surface 64 ′ constituted by at least a part of a spherical surface. The diameters are different from each other. In FIG. 8A, the difference in the length of the propagation path of the surface acoustic wave α on the propagation surface 64 in the base materials 66a, 66b, and 66c of the plurality of surface acoustic wave elements 62a, 62b, and 62c is clearly shown. For the sake of illustration, the difference in the outer diameter of the propagation surface 64 is exaggerated, but the difference in the outer diameter of the propagation surface 64 is practically indistinguishable. The same can be said for the difference in outer diameter of the propagation surfaces 64 ′ of the base materials 66 d and 66 e and 66 f of the remaining surface acoustic wave elements 62 d and 62 e and 62 f.

  In this embodiment, the plurality of surface acoustic wave excitation conversion means 68a, 68b, 68c, 68d, 68e, and 68f further propagate the respective surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and 62f. The frequencies of the surface acoustic waves α and β that are excited and propagated on the surface 64 or 64 ′ are classified into at least two different groups.

  The surface acoustic wave element array 60 is converted by a plurality of surface acoustic wave excitation conversion means 68a, 68b, 68c, 68d, 68e, and 68f of a plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and 62f. Time waveform dividing means 72 that divides the electric signal thus generated based on a difference in propagation time (that is, a difference in arrival time), and frequency analysis that analyzes the electric signal divided by the time waveform dividing means 72 into a plurality of frequency components And means 74 for analyzing the change of the propagation time (that is, the difference in arrival time) from the change of the time component of each of the plurality of frequency components, and analyzing each elastic surface of the at least two groups. Propagation state of surface acoustic wave α or β on propagation surface 64 or 64 ′ of wave elements 62a, 62b, 62c, 62d, 62e, and 62f Surface acoustic wave propagation state analyzing means 76 for analyzing the above is also provided.

  Note that a gate circuit can be used as the time waveform dividing means 72. For example, after the electric signal is replaced with a numerical value using a digital oscilloscope or the like, the numerical value is further divided by software. Can also be used.

  A plurality of surface acoustic wave excitation conversion means 68a, 68b, 68c, 68d, 68e, and 68f of the plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and 62f are these surface acoustic wave excitation conversion means 68a. , 68b, 68c, 68d, 68e, and 68f are connected to a common input means 78 for simultaneously inputting electrical signals including mutually different frequency components for exciting the surface acoustic waves α or β. A plurality of surface acoustic wave excitation conversion means 68a, 68b, 68c, 68d, 68e, and 68f of the plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and 62f are further included in these surface acoustic wave excitation conversion means. 68a, 68b, 68c, 68d, 68e, and 68f are also connected to the common receiving means 79 for receiving the electric signals converted from the surface acoustic waves α or β received through the common receiving means 79. The time waveform dividing means 72 is connected.

  In this embodiment, the electric signals from the surface acoustic wave excitation conversion means 68a, 68b, 68c, 68d, 68e, and 68f are first input to the time waveform dividing means 72 and then input to the frequency analysis means 74. However, in contrast to this, it is obvious from the signal processing science that the same result can be obtained even if it is first input to the frequency analysis means 74 and then input to the time waveform division means 72. The present invention does not exclude this.

  Further, in this embodiment, the common receiving means 79 replaces the common input means 78 with a plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and a plurality of 62 surface acoustic wave excitation conversion means 68a, 68b, It is also used to connect to 68c, 68d, 68e, and 68f. Such a receiving means 79 can be constituted by a single conducting wire, for example.

  As shown in FIG. 8B, the common input means 79 has a time element t in the envelope shorter than the difference D in propagation time of the surface acoustic waves α and β of the at least two groups. The pulse or burst electric signal ES having the half widths HW1 and HW2 is simultaneously generated. In this embodiment, the common input means 78 is constituted by a pulse generator.

  As described above, the surface acoustic wave excitation conversion means (interdigital electrodes) 68a, 68b, 68c, 68d, 68e, and 68f in FIG. 8A are supplied with electrical signals for surface acoustic wave excitation. If the wiring is assembled, other grounding methods and surface acoustic wave excitation conversion means (interdigital electrodes) 68a, 68b, 68c, 68d, 68e, and 68f are connected without departing from the spirit of the present invention. The surface acoustic wave excitation conversion means (interdigital electrodes) 68a, 68b, 68c, 68d, 68e, and 68f are not subject to any exclusion or restriction.

  In this embodiment, a plurality of surface acoustic wave excitation conversion means 68a, 68b, 68c, 68d, 68e, and 68f of the plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and 62f are formed of the base material 66a, 66b, 66c, 66d, 66e, and 66f at least part of the piezoelectric material along the surface, specifically, the surface of the piezoelectric material constituting the substrates 66a, 66b, 66c, 66d, 66e, and 66f Alternatively, it includes an interdigital electrode formed so as to be in contact with a piezoelectric material film covering the surface of a non-piezoelectric material substrate, or to face each other with a predetermined gap interposed therebetween. The array period K1 of the terminals of the interdigital electrodes included in the surface acoustic wave excitation conversion means 68a, 68b and 68c of the surface acoustic wave elements 62a, 62b and 62c, and the remaining plurality The arrangement periods K2 of the plurality of terminals of the interdigital electrodes included in the plurality of surface acoustic wave excitation conversion means 68d, 68e, and 68f of the surface acoustic wave elements 62d, 62e, and 62f are at least two. In order to generate surface acoustic waves α and β having a plurality of different frequencies classified into groups, they are different from each other.

  As described above, when the plurality of surface acoustic wave excitation conversion means 68a, 68b, 68c, 68d, 68e, and 68f include interdigital electrodes, the elasticity that is excited by each interdigital electrode and propagates through the propagation surface 64 or 64 ′. It is preferable that the length C1 or C2 at which the plurality of terminals of each interdigital electrode overlap with each other in the propagation direction of the surface wave α or β is equal to or less than the radius of curvature of the corresponding propagation surface 64 or 64 ′. The wavelength of the surface acoustic wave α or β excited by the electrode on the corresponding propagation surface 64 or 64 ′ (corresponding to the arrangement period K1 or K2 of a plurality of terminals of each interdigital electrode) is 1/5 or less of the radius of curvature. It turns out to be preferable.

  If the dimensions of each interdigital electrode are not defined in this manner, each interdigital electrode will have a corresponding propagation surface 64 or 66, particularly when piezoelectric crystals are used for the substrates 66a, 66b, 66c, 66d, 66e, and 66f. It is difficult to output the electric signal from the received surface acoustic wave α or β by surely exciting and propagating the desired surface acoustic wave α or β on 64 ′, and it is complicated according to the crystal anisotropy. The interdigital electrode must be designed.

  The surface acoustic wave element array 60 according to the seventh embodiment configured as described above includes a plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and 62f. When the external environment in contact with the surface changes, the propagation state including the propagation speed, propagation attenuation amount, etc. of the surface acoustic wave α or β on the propagation surface 64 or 64 ′ changes from before the external environment changes. The change in the external environment can be known from the change in the propagation state. In addition, the change in the external environment can be known independently of each of the plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and 62f of the surface acoustic wave element array 60.

  That is, a plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, corresponding to the array distribution of the plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and 62f of the surface acoustic wave element array 60. Then, it is possible to know the array distribution of changes in the external environment in contact with the propagation surface 64 or 64 'of 62f.

  In this embodiment, as described above, the diameters of the propagation surfaces 64 of the base materials 66a, 66b, and 66c of the plurality of surface acoustic wave elements 62a, 62b, and 62c are different from each other, and the remaining plurality of elasticity is provided. The diameters of the propagation surfaces 64 ′ of the base materials 66 d, 66 e and 66 f of the surface wave elements 62 d and 62 e and 62 f are also different from each other, and the propagation paths of the surface acoustic waves α and β on the propagation surfaces 64 and 64 ′, respectively. For example, when the diameter increases by 5%, the plurality of surface acoustic wave excitation converters 68a, 68b, and 68c and the remaining plurality of surface acoustic wave excitation converters 68d and 68e are increased. , And 68f, a plurality of surface acoustic wave excitation conversions are performed after electric signals for exciting and propagating the surface acoustic waves α and β to the propagation surfaces 64 and 64 ′ are input. Elapsed time required for the stages 68a, 68b and 68c and the plurality of surface acoustic wave excitation conversion means 68d, 68e and 68f to receive the propagated surface acoustic waves α and β from the corresponding propagation surfaces 64 and 64 ′. Increase by about 5%.

  Accordingly, an electric signal including a frequency component common to the plurality of surface acoustic wave excitation conversion means 68a, 68b and 68c of the plurality of surface acoustic wave elements 62a, 62b and 62c is simultaneously input by the common input means 78. Even so, the common receiving means 79 includes a plurality of surface acoustic wave excitation conversion means 68a, 68b from a plurality of surface acoustic wave excitation conversion means 68a, 68b and 68c of the plurality of surface acoustic wave elements 62a, 62b and 62c. , And 68c have different times (i.e., propagation times) required to receive an electrical signal converted from the propagated surface acoustic wave α received from the corresponding propagation surface 64, so that a plurality of surface acoustic wave excitations are generated. A plurality of electrical signals including common frequency components received by the conversion means 68a, 68b, and 68c are mutually converted by the time waveform dividing means 72. It becomes possible to divide clearly into three.

  The same applies to the remaining plurality of surface acoustic wave elements 62d, 62e, and 62f, and the remaining plurality of surface acoustic wave excitation conversion means 68d, 68e, and 68f convert the common surface wave β received from the received surface acoustic wave β. A plurality of electric signals including frequency components can be clearly divided into three by the time waveform dividing means 72.

  When the surface acoustic wave element array 60 is used as, for example, a pressure distribution sensor (that is, a tactile sensor) for detecting the distribution of the magnitude of pressure loaded on the surface of a humanoid robot, a plurality of elasticity is used. The support pillars 70 of the surface wave elements 62a, 62b, 62c, 62d, 62e, and 62f are attached directly on the body surface of the humanoid robot or via a flexible film material (not shown). A plurality of surface acoustic wave elements 62a, 62b, which are located on the opposite side of the body surface of the humanoid robot and are separated from the surface acoustic wave excitation conversion means 68a, 68b, 68c, 68d, 68e, and 68f, The part including the propagation surfaces 64 or 64 ′ of the base materials 66a, 66b, 66c, 66d, 66e, and 66f of 62c, 62d, 62e, and 62f is used as a contact part T where an object (not shown) contacts. Then, the surface acoustic wave propagation state analyzing means 76 is connected to the contact portions of the plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and the base materials 66a, 66b, 66c, 66d, 66e, and 66f of the 62f. When an object (not shown) is brought into contact with T and pressure is applied thereto, a plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and 62f base materials 66a, 66b, 66c, 66d, 66e, and 66f Various states including the attenuation factor of the surface acoustic wave α or β propagating on the propagation surface 64 or 64 ′ are changed, and the surface acoustic wave excitation conversion means 68a, 68b, 68c, 68d, 68e, and 68f are received. It can be used as a pressure detection means for detecting the magnitude of the pressure from the change in the electrical signal converted from the surface acoustic wave α or β.

  That is, each of the plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and 62f of the surface acoustic wave element array 60 can be used as a pressure sensor.

  Further, in the surface acoustic wave element array 60, from the distribution of the pressure magnitude detected by each of the plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and 62f, for example, the surface on the surface of the humanoid robot. It is possible to detect the distribution of the magnitude of the pressure applied to the.

  Furthermore, in this embodiment, the plurality of surface acoustic wave elements 62a, 62b, 62c, 62d, 62e, and 62f of the surface acoustic wave element array 60 have a plurality of base materials 66a, 66b, 66c, 66d, 66e, and 66f. Can be covered with a common cover (not shown). In this case, when an external object comes into contact with any one of the contact sites T of the plurality of base materials 66a, 66b, 66c, 66d, 66e, and 66f through the common cover (not shown), the plurality of base materials 66a, Propagation of the surface acoustic wave α or β on any of the propagation surfaces 64 or 64 ′ of 66b, 66c, 66d, 66e, and 66f is reduced, and the above-described illustration is made with respect to any of the contact sites T to the extent of the reduction. It is possible to quantitatively determine the pressure applied by the external object through the common cover that is not.

  In this embodiment, the surface acoustic wave element array 60 excites and propagates two types of surface acoustic waves α and β, and two types of surface acoustic wave excitation conversion means 68a, 68b, and 68c, 68d, Two types of surface acoustic wave elements 62a, 62b, and 62c, and 62d, 62e, and 62f having 68e and 68f are provided, but for exciting and propagating one type of surface acoustic wave α or β. Only one type of surface acoustic wave elements 62a, 62b and 62c, or 62d, 62e and 62f provided with one type of surface acoustic wave excitation conversion means 68a, 68b and 68c, or 68d, 68e and 68f are used. In this case, one type of surface acoustic wave elements 62a, 62b and 62c, or substrates 66a and 66 in 62d, 62e and 62f are used. , And 66c, or 66d, 66e, and 66f, the propagation surface 64 or 64 'diameter difference (ie, the propagation distance of the surface acoustic wave α or β in the propagation surface 64 or 64'). Alternatively, only one type of surface acoustic wave element 62a, 62b, and 62c, or 62d is generated due to the difference in propagation time required for one round of surface acoustic wave α or β at 64 ′ (ie, the difference in arrival time required for one round). , 62e, and 62f, one of the surface acoustic wave excitation conversion means 68a, 68b, and 68c, or 68d, 68e, and 68f, three mutually identical frequencies converted from the propagated surface acoustic waves α or β received. An electric signal having a component can be easily classified by using only the time waveform dividing means 72 without using the frequency analyzing means 74.

[Eighth Embodiment]
Next, a surface acoustic wave element array 80 according to an eighth embodiment of the present invention will be described in detail with reference to FIG. FIG. 9 is a plan view schematically showing a configuration of a surface acoustic wave element array 80 according to the eighth embodiment of the present invention.

  Note that the constituent members of the surface acoustic wave element array 80 of the present embodiment are the same as those of the surface acoustic wave element array 60 according to the seventh embodiment described above with reference to FIG. The same reference numerals as those used to indicate the same constituent members of the surface acoustic wave element array 60 according to the seventh embodiment are given the same reference numerals, and detailed descriptions thereof are omitted.

  This embodiment differs from the seventh embodiment described above with reference to FIG. 8A in that each of the plurality of surface acoustic wave elements 62a, 62b and 62c has a plurality of surface acoustic waves. Excitation conversion means 68a and 68d, 68b and 68e, and 68c and 68f are provided. One of the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f in each of the plurality of surface acoustic wave elements 62a, 62b and 62c is shown in FIG. The surface acoustic wave excitation conversion means 68a, 68b, or 68c used in the seventh embodiment described above with reference to the drawings, and the remaining number is arbitrary, but FIG. 9 showing this embodiment is a drawing. For the sake of simplicity, the remaining number is shown as one. The remaining one in this embodiment is the surface acoustic wave excitation conversion means 68d, 68e, or 68f used in the seventh embodiment described above with reference to FIG.

  The surface acoustic waves α and β excited by the plurality of surface acoustic wave excitation converters 68a and 68d in the surface acoustic wave element 62a have different frequency characteristics, and a plurality of surface acoustic wave excitations in another surface acoustic wave element 62b. The surface acoustic waves α and β excited by the converting means 68b and 68e have mutually different frequency characteristics, and the surface acoustic waves excited by a plurality of surface acoustic wave excitation converting means 68c and 68f in another surface acoustic wave element 62c. α and β also have different frequency characteristics.

  In this embodiment, in order to make the frequency characteristics different from each other in this embodiment, one surface acoustic wave excitation conversion means 68a, 68b, or 68c in each of the plurality of surface acoustic wave elements 62a, 62b, and 62c is: As shown in FIG. 8A, it can be constituted by interdigital electrodes having a plurality of terminals having the same arrangement period K1, and a plurality of surface acoustic wave elements 62a, 62b, and 62c. The other surface acoustic wave excitation conversion means 68d, 68e, or 68f in each of the plurality of the plurality of the plurality of elements having the same arrangement period K2 different from the arrangement period K1 as shown in FIG. It can be comprised by the interdigital electrode which has a terminal.

  Alternatively, the surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f installed on the outer surfaces of the substrates 66a, 66b and 66c of the plurality of surface acoustic wave elements 62a, 62b and 62c, respectively. Even if the respective configurations and dimensions are the same, the hardness of the two portions where the surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f are installed on the outer surface is different from each other. Also, the frequency characteristics can be made different from each other as described above.

  The plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, and 68c and 68f of the plurality of surface acoustic wave elements 62a, 62b, and 62c are connected to a common input means 78 via a common receiving means 79. In addition, it is also connected to a time waveform dividing means 72 through a common receiving means 79.

  The common input means 78 includes a plurality of predetermined frequency components for the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, and 68c and 68f of the plurality of surface acoustic wave elements 62a, 62b, and 62c. Electric signals including a plurality of predetermined frequency components for exciting the surface acoustic wave α or β are simultaneously input. In this embodiment, the common input means 78 is constituted by a pulse generator.

  The plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, and 68c and 68f of the plurality of surface acoustic wave elements 62a, 62b, and 62c are the plurality of surface acoustic wave elements 62a, 62b, and A plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, and 68c and 68f are associated with the propagation surfaces 64 and 64, which are out of contact sites T of the substrates 66a, 66b and 66c of 62c. A part of each of 'is included in each contact portion T of the base materials 66a, 66b, and 66c of the plurality of surface acoustic wave elements 62a, 62b, and 62c to which they correspond.

  The fact that the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, and 68c and 68f are separated from the contact portion T means that the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, and 68c and 68f are preferable because there is no possibility of breakage.

  Also in this embodiment, as in the case of the seventh embodiment described above with reference to FIG. 8, one surface acoustic wave excitation conversion means for each of the plurality of surface acoustic wave elements 62a, 62b, and 62c. A length C1 (see FIG. 8A) in which a plurality of terminals of the interdigital electrodes constituting 68a, 68b, or 68c overlap each other and another surface acoustic wave excitation conversion means 68d, 68e, or The length C2 (see FIG. 8A) where the terminals of the interdigital electrodes constituting 68f overlap each other is the surface acoustic wave excitation conversion means in each of the substrates 66a, 66b, or 66c. 68a and 68d, 68b and 68e, or 68c and 68f are preferably equal to or less than the radius of curvature of the corresponding propagation surface 64 or 64 ′, and each interdigital electrode causes the corresponding propagation surface 64 or 6 Wavelength of the surface acoustic wave α or β is excited '(corresponding to the arrangement period K1 or K2 in each IDT) also is preferably not more than 1/5 of the radius of curvature.

  If the dimensions of each interdigital electrode are not defined in this way, each interdigital electrode is always reliably on the corresponding propagation surface 64 or 64 ', particularly when piezoelectric crystals are used for the substrates 66a, 66b, and 66c. It is difficult to excite and propagate the desired surface acoustic wave and output an electrical signal from the propagated surface acoustic wave, and it is necessary to design an interdigital electrode with a complicated shape that matches the crystal anisotropy. No longer.

  The surface acoustic wave element array 80 according to the eighth embodiment configured as described above is the surface acoustic wave element array according to the seventh embodiment described above with reference to FIG. Similarly to 60, the electric signals output from all the surface acoustic wave excitation conversion means 68a, 68b, 68c, 68d, 68e, and 68f can be evaluated independently of each other.

  More specifically, the surface acoustic wave elements 62a, 62b, and 62c of the plurality of surface acoustic wave elements 62a, 68b, and 68c are mutually converted from the surface acoustic waves α having the same frequency components. A plurality of electrical signals having the same frequency component are output with a time difference based on a difference in diameter of the propagation surface 64 in the substrates 66a, 66b, and 66c, and the same plurality of surface acoustic wave elements 62a, 62b, and 62c. The plurality of electric surfaces having the same frequency components converted from the surface acoustic waves β having the same frequency components different from the surface acoustic waves α from the plurality of surface acoustic wave excitation conversion means 68d, 68e, and 68f. Since the signal is output with a time difference based on the difference in diameter of the propagation surface 64 at the substrates 66a, 66b, and 66c, the elastic surface The former of the plurality of electrical signals converted from α is divided to each other by a time waveform dividing means 72 is divided to each other by a plurality of electrical signals in the latter converted from SAW β the time waveform dividing means 72.

  Further, each of the former plurality of electric signals converted from the surface acoustic wave α divided from each other by the time difference and the latter plurality of electric signals converted from the surface acoustic wave β are respectively converted into frequency analysis means 74. After being separated from each other by the surface acoustic wave propagation state analyzing means (pressure detecting means) 76, the surface acoustic wave α or β propagating on the propagation surface 64 or 64 ′ of the corresponding surface acoustic wave element 62a, 62b or 62c is obtained. And the pressure loaded from an object (not shown) that contacts the contact portion T of the corresponding surface acoustic wave element 62a, 62b, or 62c from the outside can be evaluated independently of each other.

  As is apparent from the above description, each of the plurality of surface acoustic wave elements 62a, 62b, and 62c of the surface acoustic wave element array 80 of this embodiment can be used as a pressure sensor.

  Moreover, when a plurality of surface acoustic wave excitation conversion means are installed on the outer surface of the substrate of the surface acoustic wave element as in this embodiment, various advantages can be obtained. For example, as shown in FIGS. 3A to 3B, the shapes and dimensions of the propagation paths of the surface acoustic waves that are excited and propagated by each of the plurality of surface acoustic wave excitation conversion means are different from each other. By making it, it is possible to give the surface acoustic wave element a wide pressure sensitivity. In addition, one of a plurality of surface acoustic wave excitation conversion means has various effects that affect the propagation of surface acoustic waves, such as changes in the dimensions of the substrate of the surface acoustic wave element, accompanying the temperature change of the external environment. The measurement results of the contact pressure measured by the remaining surface acoustic wave excitation conversion means are used in consideration of the influence of the various factors accompanying the temperature change of the external environment based on the measurement results. Accuracy can be achieved.

[Ninth Embodiment]
Next, a surface acoustic wave element array 90 according to a ninth embodiment of the present invention will be described in detail with reference to FIGS. 10 (A) and 10 (B). FIG. 10A is a plan view schematically showing a configuration of a surface acoustic wave element array 90 according to the ninth embodiment of the present invention.

  Note that the surface acoustic wave element array 60 according to the seventh and eighth embodiments described above with reference to FIGS. 8A and 9 in the constituent members of the surface acoustic wave element array 90 of this embodiment and The same reference numerals as those used to indicate the same constituent members of the surface acoustic wave element arrays 60 and 80 according to the seventh and eighth embodiments are attached to the same constituent members as those in 80. The detailed description of is omitted.

  This embodiment differs from the seventh embodiment described above with reference to FIG. 8A in that each of the plurality of surface acoustic wave elements 62a, 62b and 62c has a plurality of surface acoustic waves. Excitation conversion means 68a and 68d, 68b and 68e, and 68c and 68f are provided. One of the combinations of the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68d in each of the plurality of surface acoustic wave elements 62a, 62b, and 62c is shown in FIG. The surface acoustic wave excitation conversion means 68a, 68b, or 68c used in the seventh embodiment described above with reference to FIG. 10, and the remaining number is arbitrary, but this embodiment is shown in FIG. In (A), the remaining number is shown as one for simplification of the drawing. The remaining one in this embodiment is the surface acoustic wave excitation conversion means 68d, 68e, or 68f used in the seventh embodiment described above with reference to FIG.

  This embodiment differs from the eighth embodiment described above with reference to FIG. 9 in that a plurality of surface acoustic wave excitation conversion means 68a of the plurality of surface acoustic wave elements 62a, 62b, and 62c. , 68d, 68b and 68e, or 68c and 68f, respectively, transmit the surface acoustic wave α or β to the corresponding propagation surface 64 or 64 ′ and transmit them by the transmitting units S and S ′ and the transmitting units S and S ′. And receiving portions J and J ′ that receive the surface acoustic wave α or β propagated through the corresponding propagation surface 64 or 64 ′ and convert it into an electrical signal.

  Each of the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f has a transmitting section S or S ′ and a corresponding receiving section J or J ′ that are elastic at the corresponding propagation surface 64 or 64 ′. The surface waves α or β are separated from each other in the propagation direction.

  A plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f, each of the transmitting section S or S 'and the corresponding receiving section J or J' are propagated between them. Alternatively, it may be an interdigital electrode having a plurality of terminals having an arrangement period corresponding to the frequency of β.

  In each combination of the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f, the arrangement period K1 of the plurality of terminals of each of the transmission unit S and the corresponding reception unit J ((( A)) and the arrangement period K2 (see FIG. 8A) of the plurality of terminals of each of the transmitting unit S ′ and the corresponding receiving unit J ′, refer to FIG. 8A and FIG. As in the case of the interdigital electrodes of the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f in the seventh and eighth embodiments described above, Is different.

  However, in each combination of the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f, the plurality of terminals of the interdigital electrodes of the transmitter S and the receiver J corresponding to each other. The array period K1 (see FIG. 8A) is the same as each other, and the array period K2 of the plurality of interdigital electrodes of the transmitter S and the receiver J corresponding to each other (see FIG. It goes without saying that it is preferable that they are the same as each other.

  In this embodiment, the plurality of surface acoustic wave elements 62a, 62b, and 62c, and the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f, respectively. 'Is connected to the common input means 78, and each of the receiving portions J and J' is connected to the time waveform dividing means 72, the frequency analyzing means 74 and the surface acoustic wave propagation state via the respective common receiving means 79. It is connected to analysis means 76.

  The common input means 78 includes a plurality of surface acoustic wave elements 62a, 62b, and 62c, a plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f, respectively. In contrast, each of the transmission units S and S ′ includes all of a plurality of frequency components necessary for exciting and propagating the surface acoustic waves α and β of the corresponding frequency components to the corresponding propagation surfaces 64 and 64 ′. Input electrical signals simultaneously.

  The common receiving means 79 includes a plurality of surface acoustic wave elements 62a and 62b and a plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f. And a common time waveform dividing means 72 with a difference in propagation time for a plurality of electric signals including a plurality of corresponding frequency components converted from the surface acoustic waves α and β of the corresponding frequency components received by J ′. The signal is sent to the common frequency analysis means 74 and the common surface acoustic wave propagation state analysis means 76.

  A plurality of electric signals received in common with a difference in propagation time are clearly divided from each other by the time waveform dividing means 72, and then a plurality of surface acoustic wave elements 62a, 62b, and 62c by the frequency analyzing means 74. Each of the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f is divided into electric signals having frequency components peculiar to each. Next, the surface acoustic wave propagation state analyzing means 76 generates the surface acoustic wave elements 62a and 62b and the base materials 66a and 66b of the plurality of surface acoustic wave elements 62a from the electrical signals divided by the time components and divided by the frequency components. , And the propagation state of the surface acoustic wave α or β on the propagation surface 64 or 64 ′ of 66c. From these propagation states, the pressure applied to the contact portion T by an object (not shown) that contacts the contact portions T of the base materials 66a, 66b, and 66c of the plurality of surface acoustic wave elements 62a, 62b and 62c from the outside. Changes in the external environment including size can be detected.

  That is, each of the plurality of surface acoustic wave elements 62a, 62b, and 62c of the surface acoustic wave element array 90 of this embodiment can be used as a pressure sensor.

  In this embodiment, the plurality of surface acoustic wave elements 62a and 62b and the base materials 66a and 66b of 62c of the seventh and eighth embodiments shown in FIG. 8A and FIG. 9 are further provided. , And 66c are mounted directly on the support surface such as the body surface of a humanoid robot via the support column 70 or via a flexible film material (not shown), but a plurality of surface acoustic wave elements 62a and 62b. , And each of the base materials 66a, 66b, and 66c of 62c is flexible such that a portion B of the outer surface opposite to the contact portion T is mounted on a support surface such as a body surface of a humanoid robot. The film material 92 is embedded and supported.

  The surface acoustic wave element array 90 shown in FIGS. 10 (A) and 10 (B) without using the support pillar 70 is the same as that in FIGS. 8 (A) and 9. Compared to the surface acoustic wave element arrays 60 and 80 of the embodiment, the configuration is simpler and the manufacture is facilitated. In addition, each of the transmitting portions S and S ′ of the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f is composed of a comb-like electrode, and the corresponding propagation surfaces 64 and 64 ′. When surface acoustic waves α and β are excited and propagated in both directions from the interdigital electrode, the surface acoustic waves α and β propagated toward the film material 92 are absorbed by the film material 92 and the corresponding receiving unit J and J 'are never reached.

  Furthermore, in this embodiment, the plurality of surface acoustic wave elements 62a, 62b, and 62c, the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or the transmission units S of 68c and 68f, respectively. S ′, and the receiving portions J and J ′ are exposed from the film material 92 on the outer surfaces of the corresponding base materials 66a, 66b, and 66c, and are disposed away from the contact portion T. Accordingly, the transmission units S and S ′ and the reception in the respective combinations of the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f of the plurality of surface acoustic wave elements 62a, 62b and 62c, respectively. The film material 92 does not affect the propagation of the surface acoustic waves α and β between the portions J and J ′. In addition, the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f, which are separated from the contact portion T, are respectively connected to the contact portions S and S ′ and the reception portions J and J ′. It is not damaged by the external force applied to T.

  The surface acoustic wave element array 90 according to the ninth embodiment configured as described above complies with the seventh and eighth embodiments described above with reference to FIGS. 8A and 9. Naturally, the same effects as those of the surface acoustic wave element arrays 60 and 80 can be obtained. In addition to this, each of the plurality of surface acoustic wave elements 62a, 62b, and 62c includes a combination of a plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, and 68c and 68f. Each of the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f of the surface acoustic wave element 62a, 62b, or 62c has a transmission unit S or S ′ and a reception unit J or J ′. Therefore, the surface acoustic wave elements 62a, 62b, and 62c are in contact with the propagation surfaces 64 and 64 'of the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68d, respectively. Of the surface acoustic waves α and β propagating on the propagation surfaces 64 and 64 ′ due to a change in the external environment, for example, a change in the magnitude of pressure. Changes in characteristics (for example, changes in propagation speed and intensity) can be known more precisely.

[Modification of Ninth Embodiment]
FIG. 10C is a schematic side view of a modification 90 ′ of the surface acoustic wave element array 90 according to the ninth embodiment of the present invention with reference to FIGS. 10A and 10B. Has been shown.

  The surface acoustic wave element array of this modification 90 ′ is different from the surface acoustic wave element array 90 according to the ninth embodiment of the present invention with reference to FIGS. 10 (A) and 10 (B). A portion B embedded in the film material 92 in each of the plurality of surface acoustic wave elements 62a and 62b and the base materials 66a and 66b and 66c of the surface acoustic wave element array 90 of the ninth embodiment is provided. The substantially semi-spherical base materials 66′a, 66′b, and 66′c are deleted, and the flat surface remaining after the portion B is deleted is bonded to the surface of the flexible film material 92 ′, for example. It is being fixed by well-known fixing means, such as an agent. The film material 92 ′ of this modification includes a plurality of surface acoustic wave elements 62 ′ a, 62 ′ b and 62 ′ c of the surface acoustic wave element array of the modification 90 ′. Since the outer surfaces of b and 66'c are not buried, the thickness of the film material 92 'of this modification 90' is the same as that of the surface acoustic wave element array 90 according to the ninth embodiment. It can be made much thinner than the thickness of the film material 92. The membrane material 92 ′ of this modification is attached more closely and accurately to a support surface such as the body surface of a humanoid robot than the membrane material 92 of the ninth embodiment, which is thicker than the membrane material 92 ′. It is possible.

  The surface acoustic wave element array of the modified example 90 ′ of FIG. 10C is the same as that of FIGS. 10A and 10B except for the above-described substantially hemispherical base material 66 ′ and thin film material 92 ′. Compared with the surface acoustic wave element array 90 according to the ninth embodiment of the present invention with reference to FIG. Accordingly, the surface acoustic wave element array of the modification 90 ′ of FIG. 10C is the surface acoustic wave element according to the ninth embodiment of the present invention with reference to FIGS. 10A and 10B. The same effect as the array 90 can be obtained.

  In the modification of the ninth embodiment described above with reference to FIGS. 10A and 10B and the ninth embodiment described above with reference to FIG. A plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, and 68c and 68f, and time waveform dividing means from the surface acoustic wave elements 62a, 62b and 62c, or 62'a, 62'b and 62'c. The electric signals received by the 72 are the surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, and the difference in the frequency of the surface acoustic waves α and β which are excited and propagated by 68c and 68f, and a plurality of surface acoustic wave elements. 62a, 62b, and 62c, a plurality of substrates 66a, 66b, and 66c, or a plurality of surface acoustic wave elements 62'a, 62'b, and 62'c, a plurality of substrates 66 '. A plurality of substrates 66a, 66b, and 66c, or 66'a, 66'b, and 66'c, each propagation surface 64 or 64 ', based on the difference in diameter of a, 66'b, and 66'c. , The surface acoustic waves α or β can be separated from each other according to the difference in time (arrival time) required for propagation from the transmitter S or S ′ to the receiver J or J ′.

  Therefore, the difference in the diameters of the plurality of surface acoustic wave elements 62a, 62b, and 62c and the plurality of substrates 66a, 66b, and 66c is eliminated (that is, the diameters of the plurality of substrates 66a, 66b, and 66c are equal to each other). However, it also eliminates the difference in diameter between the plurality of surface acoustic wave elements 62'a, 62'b and 62'c and the plurality of substrates 66'a, 66'b and 66'c (ie, Even if the diameters of the plurality of substrates 66′a, 66′b, and 66′c are equal to each other), the surface acoustic wave excitation conversion disposed on the propagation surface 64 of each of the substrates 66a and 66′a. The distance between the transmission means S and the reception means J of the means 68a and the distance between the transmission means S ′ and the reception means J ′ of the surface acoustic wave excitation conversion means 68d installed on the respective propagation surfaces 64 ′. , Base materials 66b and 66'b The distance between the transmitting means S and the receiving means J of the surface acoustic wave excitation converting means 68b installed on the surface 64 and the transmitting means of the surface acoustic wave excitation converting means 68e installed on the respective propagation surfaces 64 ′. The distance between S ′ and the receiving means J ′, and between the transmitting means S and the receiving means J of the surface acoustic wave excitation converting means 68c installed on the respective propagation surfaces 64 of the substrates 66c and 66′c. And the distance between the transmission means S ′ and the reception means J ′ of the surface acoustic wave excitation conversion means 68f installed on the respective propagation surfaces 64 ′ can also be made different from each other. Time waveforms from the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, and 68c and 68f of the wave elements 62a, 62b and 62c, and 62'a, 62'b and 62'c As described above, the electric signal received by the splitting means 72 is converted into the plurality of surface acoustic wave elements 62a, 62b and 62c, the plurality of base materials 66a, 66b and 66c, and the plurality of surface acoustic wave elements 62'a and 62. The surface acoustic wave α or β is received from the transmitter S or S ′ as in the case where there is a difference in diameter between the plurality of base materials 66′a, 66′b and 66′c of “b” and “62′c”. They can be separated from each other by the difference in time (arrival time) required for propagation to the part J or J ′.

[Tenth embodiment]
Next, a surface acoustic wave element array 100 according to a tenth embodiment of the present invention will be described in detail with reference to FIG. FIG. 11 is a plan view schematically showing a configuration of a surface acoustic wave element array 100 according to the tenth embodiment of the present invention.

  Note that the constituent members of the surface acoustic wave element array 100 of this embodiment are the same as those of the surface acoustic wave element array 80 according to the eighth embodiment described above with reference to FIG. The same reference numerals as those used to indicate the same constituent members of the surface acoustic wave element array 80 according to the embodiment are attached, and detailed description of the constituent members is omitted.

  This embodiment differs from the eighth embodiment described above with reference to FIG. 9 in that a plurality of surface acoustic wave excitation conversion means 68a of the plurality of surface acoustic wave elements 62a, 62b, and 62c. And 68d, 68b and 68e, or 68c and 68f are excited by the corresponding propagation surface 64 or 64 ′ and propagate the surface acoustic wave α or β to propagate the corresponding surface acoustic wave excitation conversion means 68a and 68d, 68b and Reflectors H and H ′ that reflect toward 68e or 68c and 68f, respectively, are provided on the corresponding propagation surfaces 64 or 64 ′.

  The plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f and the corresponding reflectors H and H ′ are mutually connected in the direction in which the surface acoustic waves propagate on the corresponding propagation surface 64 or 64 ′. Are separated.

  The plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f and the corresponding reflectors H and H 'are arranged corresponding to the frequencies of the surface acoustic waves α or β propagating between them. Although it can be formed in a ladder-type pattern in which both poles of a comb-like electrode having a plurality of terminals having a period K1 or K2 (see FIG. 8A) are coupled, this detailed structure is well known, and therefore, it is more than that here. I do not explain. The reflectors H and H 'can also be grooves formed by etching using, for example, photolithography on the propagation surfaces 64 and 64' of the base materials 66a, 66b, and 66c.

  The plurality of surface acoustic wave elements 62a, 62b, and 62c has a plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f, respectively. The surface acoustic wave elements 62a, 62b, and 62c have a plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f, respectively. On the other hand, an electric signal including all of a plurality of frequency components necessary for exciting and propagating the surface acoustic wave α or β having a corresponding frequency component is input simultaneously.

  The reflectors H and H ′ are propagation surfaces to which the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f respectively correspond to the plurality of surface acoustic wave elements 62a and 62b and 62c. The surface acoustic wave α or β excited with respect to 64 and 64 ′ and propagating toward the corresponding reflectors H and H ′ is converted into the corresponding surface acoustic wave excitation conversion means 68a via the corresponding propagation surfaces 64 and 64 ′. And 68d, 68b and 68e, or 68c and 68f.

  The plurality of surface acoustic wave elements 62a, 62b, and 62c have a plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f. The plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f of each of the surface acoustic wave elements 62a, 62b and 62c are reflected from the corresponding reflectors H and H ′. A plurality of electric signals including a plurality of corresponding frequency components converted from the received surface acoustic waves α and β are received with a difference in propagation time, and a common time waveform dividing unit 72 and a common frequency analyzing unit are received. 74 to the common surface acoustic wave propagation state analyzing means 76.

  A plurality of electric signals received in common with a difference in propagation time are clearly divided from each other by the time waveform dividing means 72, and then a plurality of surface acoustic wave elements 62a, 62b, and 62c by the frequency analyzing means 74. Each of the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f is divided into electric signals having frequency components peculiar to each. Next, the surface acoustic wave propagation state analyzing means 76 generates the surface acoustic wave elements 62a and 62b and the base materials 66a and 66b of the plurality of surface acoustic wave elements 62a from the electrical signals divided by the time components and divided by the frequency components. , And the propagation state of the surface acoustic wave α or β on the propagation surface 64 or 64 ′ of 66c. From these propagation states, the pressure applied to the contact portion T by an object (not shown) that contacts the contact portions T of the base materials 66a, 66b, and 66c of the plurality of surface acoustic wave elements 62a, 62b and 62c from the outside. Changes in the external environment including size can be detected.

  That is, each of the plurality of surface acoustic wave elements 62a, 62b, and 62c of the surface acoustic wave element array 100 of this embodiment can be used as a pressure sensor.

  In the tenth embodiment described above with reference to FIG. 11, a plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, and 68c of the plurality of surface acoustic wave elements 62a, 62b and 62c, and The electric signal received by the time waveform dividing means 72 from 68f is the difference in the frequency of the surface acoustic waves α and β that are excited and propagated by the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, and 68c and 68f. On the respective propagation surfaces 64 or 64 'of the plurality of substrates 66a, 66b, and 66c based on the difference in diameter of the plurality of substrates 66a, 66b, and 66c of the plurality of surface acoustic wave elements 62a, 62b, and 62c. The surface acoustic wave α or β is generated from the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f. Dividing each other by the difference in time (arrival time) required to propagate to the plurality of original surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f via the projectile H or H ′ I can do it.

  Therefore, the difference in the diameters of the plurality of surface acoustic wave elements 62a, 62b, and 62c and the plurality of substrates 66a, 66b, and 66c is eliminated (that is, the diameters of the plurality of substrates 66a, 66b, and 66c are equal to each other). However, the distance between the surface acoustic wave excitation conversion means 68a installed on the propagation surface 64 of the substrate 66a and the reflector H and the surface acoustic wave excitation conversion means 68d installed on the propagation surface 64 '. The distance between the reflector H ′, the distance between the surface acoustic wave excitation conversion means 68b installed on the propagation surface 64 of the base material 66b and the reflector H, and the elasticity installed on the propagation surface 64 ′. The distance between the surface wave excitation conversion means 68e and the reflector H ′, the distance between the surface acoustic wave excitation conversion means 68c installed on the propagation surface 64 of the substrate 66 and the reflector H, and the propagation surface 64 'Installed on The plurality of surface acoustic wave excitation conversion means of the plurality of surface acoustic wave elements 62a, 62b and 62c can also be obtained by making the distances between the surface acoustic wave excitation conversion means 68f and the reflector H 'different from each other. The electrical signals received by the time waveform dividing means 72 from 68a and 68d, 68b and 68e, and 68c and 68f are converted into a plurality of surface acoustic wave elements 62a and 62b and a plurality of substrates 66a and 66b of 62c, as described above. Similarly to the case where there is a difference in diameter in 66c, the surface acoustic wave α or β is generated from the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f via the reflector H or H ′. Time required for propagation to the original plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f (arrival time) It can be divided from each other by differences.

  In this embodiment, the plurality of surface acoustic wave elements 62a and 62b and the base materials 66a, 66b, and 66c of the eighth embodiment shown in FIG. For example, it is attached on a support surface such as the body surface of a humanoid robot directly or via a flexible film material (not shown), but the above-described ninth embodiment is described with reference to FIGS. 10 (A) and 10 (B). As in the case of the embodiment, the base materials 66a, 66b, and 66c of the plurality of surface acoustic wave elements 62a, 62b, and 62c are portions B on the outer surfaces opposite to the contact portions T (FIG. B)) is embedded and supported in a flexible membrane 92 (see FIG. 10B) that is mounted on a support surface such as the body surface of a humanoid robot.

  Similar to the surface acoustic wave element array 90 of the ninth embodiment shown in FIGS. 10A and 10B in which the support pillar 70 is not used, it is shown in FIG. 11 in which the support pillar 70 is not used. The surface acoustic wave element array 100 according to the tenth embodiment is also simpler and manufactured than the surface acoustic wave element array 80 according to the eighth embodiment shown in FIG. Is also easier. Moreover, the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f are composed of interdigital electrodes, and elastically extend in both directions from the interdigital electrodes on the corresponding propagation surfaces 64 and 64 ′. When the surface waves α and β are excited and propagated, the surface acoustic waves α and β propagated toward the film material 92 are absorbed by the film material 92 and reach the corresponding reflectors H and H ′. No.

  Furthermore, in this embodiment, the plurality of surface acoustic wave elements 62a, 62b, and 62c, the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or the reflectors H corresponding to 68c and 68f and H ′ is exposed from the film material 92 (see FIG. 10B) on the surface of the corresponding base material 66a, 66b, or 66c, and is disposed at a position away from the contact site T. Accordingly, the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f of the plurality of surface acoustic wave elements 62a, 62b and 62c, respectively, and the corresponding reflectors H and H ′. The film material 92 (see FIG. 10B) does not affect the propagation of the surface acoustic waves α and β. In addition, the plurality of surface acoustic wave excitation conversion means 68a and 68d, 68b and 68e, or 68c and 68f and the reflectors H and H ′ corresponding to the surface acoustic wave excitation converters remote from the contact site T are damaged by the external force applied to the contact site T. Not receive.

  The surface acoustic wave element array 100 according to the tenth embodiment configured as described above has the same effects as the surface acoustic wave element array 80 according to the eighth embodiment described above with reference to FIG. Of course you can get. In addition to this, the surface acoustic wave element array 80 according to the eighth embodiment described above with reference to FIG. 9 and the ninth embodiment described above with reference to FIGS. The configuration can be made simpler than the surface acoustic wave element array 90 according to the embodiment.

  The surface acoustic wave element array 100 according to the tenth embodiment configured as described above is further provided with an elastic surface according to the modification of the ninth embodiment described above with reference to FIG. Similarly to the wave element array 90 ′, the plurality of surface acoustic wave elements 62a, 62b, and 62c were embedded in the film material 92 (see FIG. 10B) in each of the base materials 66a, 66b, and 66c. The part B (see FIG. 10B) is deleted to form substantially hemispherical base materials 66′a, 66′b, and 66′c (see FIG. 10C), and the part B is deleted. The remaining flat surface can be fixed to the surface of the flexible film material 92 ′ (see FIG. 10C) by a known fixing means such as an adhesive.

  Even if it is modified in this way, the same effect as that of the surface acoustic wave element array 100 according to the tenth embodiment described above with reference to FIG. 11 can be obtained, and further, FIG. The following effects peculiar to the surface acoustic wave element array 90 ′ according to the modification of the ninth embodiment described above can also be obtained with reference.

  That is, the outer surface of each of the base materials 66a, 66b, and 66c of the plurality of surface acoustic wave elements 62a and 62b and 62c of the surface acoustic wave element array 100 is provided on the film material 92 ′ (see FIG. 10C). The above-mentioned part B (see FIG. 10B) is not buried, so that the film material 92 ′ of such a modification of the tenth embodiment described above with reference to FIG. 11 (FIG. 10). The thickness of the film material 92 (see FIG. 10B) of the surface acoustic wave element array 100 according to the tenth embodiment described above with reference to FIG. It can be made much thinner. The film material 92 ′ (see FIG. 10C) of this modification is, for example, a human being compared with the film material 92 of the tenth embodiment (see FIG. 10B), which is thicker than that. It can be attached more closely and accurately to a support surface such as the body surface of a type robot.

[First modified example common to the fifth, sixth, ninth, and tenth embodiments and the modified examples of the fifth and ninth embodiments]
Next, referring to FIG. 12, the fifth, sixth, ninth, and tenth embodiments and the fifth and ninth embodiments described above with reference to FIGS. A first modification common to the modification of the embodiment will be described in detail. FIG. 12 is a schematic side view of the common first modified example.

  In the common first modification, the fifth, sixth, ninth, and tenth embodiments and the fifth and ninth embodiments described above with reference to FIGS. The same constituent members as those of the modification of the embodiment include the fifth, sixth, ninth, and tenth embodiments and the tenth embodiment described above with reference to FIGS. The same reference numerals as those used to point out the constituent members of the modified examples of the fifth and ninth embodiments are given, and the detailed description of these constituent members is omitted.

  A plurality of surface acoustic wave elements 12a, 12b and 12c, or a plurality of surface acoustic wave excitation conversion means 18a of 62a, 62b and 62c used in these embodiments and modifications of these embodiments; 18b, 18c, 18′a, 18′b, 18′c, 68a, 68b, 68c, 68d, 68e, or 68f, a transmitting unit S or S ′, a receiving unit J or J ′, and a reflector H or H ′. As described above, in the case of being constituted by the interdigital electrode, as shown in FIG. 12, one contact of the interdigital electrode is connected to the common input means 26 ″, 26, 78 and the common reception. Connected to a corresponding one of the means 28 '', 28, 79, and the other contact of the interdigital electrode was placed at the contact site T of the corresponding substrate 16, 16 ', 66a, 66b, 66c It can be connected to the grounding member E of conductive material.

  Furthermore, the plurality of surface acoustic wave elements 12a, 12b and 12c, or the base materials 16, 16 'and 66a of 62a, 62b and 62c used in these embodiments and modifications of these embodiments. , 66b, 66c are covered with a flexible conductive film FM, and the conductive film FM is grounded.

  A plurality of surface acoustic wave elements 12a, 12b and 12c, or 62a, 62b and 62c, which are used in these embodiments and modifications of these embodiments, are made of base materials 16, 16 'and 66a. , 66b, 66c is subjected to pressure from an external object via the conductive film FM.

[Second Modification Common to First to Tenth Embodiments and Modifications]
Next, referring to FIG. 13, a second modification common to the first to tenth embodiments described above with reference to FIGS. 1 to 3 and FIGS. 5 to 11 and these modifications. Will be described in detail. FIG. 13 is a schematic perspective view of the common third modification.

  In this common second modification, the same members as those of the first to tenth embodiments and these modifications described above with reference to FIGS. 1 to 3 and FIGS. 5 to 11. 1 to 3 and FIGS. 5 to 11 are denoted by the same reference numerals as those in the first to tenth embodiments described above and the components of these modifications. Detailed descriptions of these components will be omitted.

  In this common second modification, the first to tenth embodiments described above with reference to FIGS. 1 to 3 and FIGS. 5 to 11 and the surface acoustic wave element arrays 10 and 30 of these modifications. , 40, 40 ′, 50, 60, 80, 90, 90 ′, 100, surface acoustic wave elements 12a, 12b, 12c,..., Or 12A, 12B, 12C, 12D,. , 12′b, 12′c,..., Or 62a, 62b, 62c, 62d, 62e, 62f,..., Or 62′a, 62′b, 62′c,. A temperature measuring element TM is interposed. The temperature measuring element TM is used to measure the temperature of the environment where the surface acoustic wave element array 10, 30, 40, 40 ', 50, 60, 80, 90, 90' or 100 is disposed. The temperature measuring element TM can have any conventionally known configuration, and is included in each of the surface acoustic wave element arrays 10, 30, 40, 40 ′, 50, 60, 80, 90, 90 ′, 100. Surface acoustic wave elements 12a, 12b, 12c, ..., or 12A, 12B, 12C, 12D, ..., or 12'a, 12'b, 12'c, ..., or 62a, 62b, 62c, ..., or 62d, 62e, 62f,..., Or 62′a, 62′b, 62′c,..., And the surface acoustic wave elements 12a, 12b, 12c,. 12A, 12B, 12C, 12D, ..., or 12'a, 12'b, 12'c, ..., or 62a, 62b, 62c, ..., or 62d, 62e, 62f, ..., or 62'a, 62 ' b, 62'c, ... It can be provided with an electric or electronic circuit to detect changes in the surface acoustic wave propagation conditions.

  With such a configuration, the surface acoustic wave elements 12a, 12b, 12c,... Included in the surface acoustic wave element arrays 10, 30, 40, 40 ′, 50, 60, 80, 90, 90 ′, 100, respectively. , Or 12A, 12B, 12C, 12D, ..., or 12'a, 12'b, 12'c, ..., or 62a, 62b, 62c, ..., or 62d, 62e, 62f, ..., or 62'a, From the change of the surface acoustic wave propagation state that changes according to the magnitude of the contact pressure with respect to those detected in 62'b, 62'c,. Since the influence of the change can be removed, it becomes possible to know a more accurate absolute value of the magnitude of the contact pressure with respect to those detected.

  FIG. 13 shows surface acoustic wave elements 12a, 12b, 12c,... Included in the surface acoustic wave element arrays 10, 30, 40, 40 ′, 50, 60, 80, 90, 90 ′, 100, respectively. 12A, 12B, 12C, 12D, ..., or 12'a, 12'b, 12'c, ..., or 62a, 62b, 62c, ..., or 62d, 62e, 62f, ..., or 62'a, 62 ' Also shown is a flexible cover FR that commonly covers the contact sites T of b, 62'c,.

[Third Modification Common to First to Tenth Embodiments and Modifications]
Next, a third modification common to the first to tenth embodiments described above with reference to FIGS. 1 to 3 and FIGS. 5 to 11 and these modifications, with reference to FIG. Will be described in detail. 14A is a schematic perspective view of the common third modification; and FIG. 14B is an enlarged view of a part of the common third modification. FIG.

  In this common third modification, the same components as those of the first to tenth embodiments and these modifications described above with reference to FIGS. 1 to 3 and 5 to 11. 1 to 3 and FIGS. 5 to 11 are denoted by the same reference numerals as those in the first to tenth embodiments described above and the components of these modifications. Detailed descriptions of these components will be omitted.

  As shown in FIG. 14A, in the common third modification, the first to tenth embodiments described above with reference to FIGS. 1 to 3 and FIGS. 5 to 11 are performed. Surface acoustic wave element 12a, 12b, 12c, ... included in each of the surface acoustic wave element arrays 10, 30, 40, 40 ', 50, 60, 80, 90, 90', 100 of the forms and these modifications Or 12A, 12B, 12C, 12D, ..., or 12'a, 12'b, 12'c, ..., or 62a, 62b, 62c, ..., or 62d, 62e, 62f, ..., or 62'a, 62 The base materials 16, 16 ', 66a, 66b, 66c, or 66d of' b, 62'c,... are connected to each other by a flexible thread-shaped coupling member, and the thread-shaped coupling member is, for example, a common input For means 26, 26 ', 26 "or 78 Lead wires and the common receiving means 28, 28 ', 28' ', or can include a lead wire for 79.

  The thread-like connecting member is inserted into a through-hole Q formed so as to avoid the propagation surfaces 14, 14 ', 64, or 64' in the base material 16, 16 ', 66a, 66b, 66c, or 66d, for example. Can be. In this way, the surface acoustic wave elements 12a, 12b, 12c,..., Or 12A, 12B, 12C in which the base materials 16, 16 ′, 66a, 66b, 66c, or 66d are mutually connected by the thread-like connecting member. , 12D, ..., or 12'a, 12'b, 12'c, ..., or 62a, 62b, 62c, ..., or 62d, 62e, 62f, ..., or 62'a, 62'b, 62'c The surface acoustic wave element arrays 10, 30, 40, 40 ′, 50, 60, 80, 90, 90 ′, 100 including,... Can be handled like so-called bead knitting. It can be configured as part of a garment that can be easily and closely fitted to a desired portion of the surface and is easy to remove.

  Further, the surface acoustic wave elements 12a, 12b, 12c,..., Or 12A, 12B, in which the base materials 16, 16 ′, 66a, 66b, 66c, or 66d are connected to each other by the thread-like connecting member as described above. 12C, 12D, ..., or 12'a, 12'b, 12'c, ..., or 62a, 62b, 62c, ..., or 62d, 62e, 62f, ..., or 62'a, 62'b, 62 ' Surface acoustic wave element arrays 10, 30, 40, 40 ′, 50, 60, 80, 90, 90 ′, 100 including c,... are shown in FIG. In this way, the contact portion T on the surface of the base material 16, 16 ′, 66a, 66b, 66c, or 66d, and the portion B on the opposite side of the contact portion T can be covered with a common flexible cover FR. The common flexible cover FR does not have to be a single film, and can be a multilayer film, a woven fabric, or a non-woven fabric as long as a desired function can be achieved.

1 is a perspective view schematically showing a configuration of a surface acoustic wave element array according to a first embodiment of the present invention. FIG. It is a top view which shows roughly the structure of the surface acoustic wave element array according to 2nd Embodiment of this invention. (A) thru | or (C) is rough of the several surface acoustic wave element used in the surface acoustic wave element array which can be used also as a pressure sensor array according to 3rd Embodiment of this invention. And (D) uses the same surface acoustic wave element as shown in (C) of FIG. 3, and the surface acoustic wave excitation conversion means is a propagation path on the substrate using the same surface acoustic wave element as shown in FIG. It is a side view which shows the case where it separated in the direction orthogonal to the said advancing direction from the position 90 degrees away from the advancing direction of the surface acoustic wave from. In the three types of surface acoustic wave elements shown in FIGS. 3A to 3C, a position 90 degrees away from each surface acoustic wave excitation conversion means in the propagation direction on the base material is contacted on the propagation path on the substrate. The magnitude of the pressure applied to the contact position via the pressure load plate and the attenuation state of the output of the surface acoustic wave device associated therewith are shown. It is a side view which shows roughly one of the several surface acoustic wave elements used in the surface acoustic wave element array which can be used also as a pressure sensor array according to 4th Embodiment of this invention. (A) is a top view which shows roughly the structure of the surface acoustic wave element array according to 5th Embodiment of this invention; (B) is according to 5th Embodiment of this invention. FIG. 6C is a side view schematically showing a part of the configuration of the surface acoustic wave element array; and (C) is a configuration of a modification of the surface acoustic wave element array according to the fifth embodiment of the invention. It is a side view which shows a part of. It is a top view which shows roughly the structure of the surface acoustic wave element array according to 6th Embodiment of this invention. (A) is a side view schematically showing a configuration of a surface acoustic wave element array according to a seventh embodiment of the present invention; and (B) is a seventh embodiment of the present invention. FIG. 6 is a diagram showing a part of an electric signal generated by the input means of the surface acoustic wave element array according to FIG. It is a top view which shows roughly the structure of the surface acoustic wave element array according to 8th Embodiment of this invention. (A) is a top view which shows roughly the structure of the surface acoustic wave element array according to 9th Embodiment of this invention; (B) is according to 9th Embodiment of this invention. FIG. 10C is a side view schematically showing a part of the configuration of the surface acoustic wave element array; and (C) is a configuration of a modification of the surface acoustic wave element array according to the ninth embodiment of the invention. It is a side view which shows a part of. It is a top view which shows roughly the structure of the surface acoustic wave element array according to 10th Embodiment of this invention. It is a side view which shows roughly the 1st modification common to 5th, 6th, 9th, 10th embodiment of this invention and the modification of 5th and 9th embodiment. . It is a perspective view which shows roughly the 2nd modification common to 1st thru | or 10th Embodiment of this invention and these modifications. (A) is a schematic perspective view of a third modification common to the first to tenth embodiments and these modifications; and (B) is a common third described above. It is a side view which expands and schematically shows a part of modification.

Explanation of symbols

  10, 30, 40, 40 '. 50, 60, 80, 90, 90 ', 100 ... surface acoustic wave element array, 12a, 12b, 12c, 12A, 12B, 12C, 12D, 12'a, 12'b, 12'c, 62a, 62b, 62c , 62d, 62e, 62f, 62′a, 62′b, 62′c, surface acoustic wave elements, 14, 14 ′, 14A, 14B, 14C, 64, 64 ′, propagation surfaces, 16, 16 ′, 66a, 66b, 66c, 66d ... base material, 18a, 18b, 18c, 18'a, 18'b, 18'c, 18A, 18B, 18C, 18D, 68a, 68b, 68c, 68d, 68e, 68f, 68'a , 68'b, 68'c ... surface acoustic wave excitation conversion means, 22, 22 ', 22 ", 74 ... frequency analysis means, 24, 24', 24", 76 ... surface acoustic wave propagation state analysis means ( Pressure detecting means), 26 26 ', 26 ", 78 ... input means, 28, 28', 28", 79 ... receiving means, S, S '... transmitting section, T ... contact area, J, J' ... receiving section, H, H '... reflector, x, y, z, α, β ... surface acoustic wave, P1, P2, P3, K1, K2 ... array period, W1, C1, C2 ... overlapping length

Claims (35)

A base material provided with a propagation surface through which surface acoustic waves propagate, and a surface acoustic wave excitation conversion means for exciting and propagating surface acoustic waves on the propagation surface and receiving the propagated surface acoustic waves and converting them into electrical signals; And a plurality of surface acoustic wave elements that are classified into at least two groups having different frequencies of electrical signals converted by each of them;
Frequency analysis means for analyzing the electrical signal converted by the surface acoustic wave excitation conversion means into a plurality of frequency components; and
Surface acoustic wave propagation state analyzing means for analyzing the propagation state of surface acoustic waves on the propagation surface of each of the at least two groups of surface acoustic wave elements from each of the plurality of frequency components;
A surface acoustic wave element array comprising:   The plurality of surface acoustic wave elements include a common input unit that inputs an electric signal for surface acoustic wave excitation to each surface acoustic wave excitation conversion unit, and an electric signal converted from the surface acoustic wave by the surface acoustic wave excitation conversion unit. The surface acoustic wave element array according to claim 1, wherein the surface acoustic wave element array is connected to a common receiving means for receiving a signal.   The surface acoustic wave element array according to claim 2, wherein the common input unit generates an electric signal including the plurality of frequency components. The substrate of the surface acoustic wave element has at least a portion having piezoelectricity along the surface,
The surface acoustic wave excitation conversion means includes interdigital electrodes formed so as to be in contact with at least a part having the piezoelectricity or facing each other with a predetermined gap interposed between at least a part having the piezoelectricity. The surface acoustic wave element array according to claim 1, wherein the surface acoustic wave element array is included.   5. The surface acoustic wave according to claim 4, wherein an arrangement period of a plurality of terminals of the interdigital electrode of the plurality of surface acoustic wave elements distinguished into the at least two groups is different from each other in each group. Element array. Each of the plurality of surface acoustic wave elements has a plurality of surface acoustic wave excitation conversion means,
The plurality of surface acoustic wave excitation conversion means have different frequency characteristics from each other and also differ from the frequency characteristics of the plurality of surface acoustic wave excitation conversion means of each of the plurality of surface acoustic wave elements of the other group.
The surface acoustic wave element array according to claim 1, wherein the surface acoustic wave element array is provided.   2. The reflector according to claim 1, wherein the propagation surface is provided with a reflector that reflects the surface acoustic wave propagated from the surface acoustic wave excitation conversion means toward the surface acoustic wave excitation conversion means. The surface acoustic wave element array according to any one of 6.   The surface acoustic wave excitation conversion means includes a transmission unit that excites and propagates a surface acoustic wave on the propagation surface, and a reception unit that receives the surface acoustic wave propagated on the propagation surface by the transmission unit and converts the surface acoustic wave into an electrical signal. The transmitter and the receiver are spaced apart from each other in a direction in which surface acoustic waves propagate along the propagation plane. The surface acoustic wave element array according to Item.   The surface acoustic wave element array according to any one of claims 1 to 8, wherein the propagation surface of the base material includes at least an annular curved surface.   The propagation surface of the base material is at least a continuous annular curved surface, and a surface acoustic wave propagating along the propagation surface circulates along the surface of the base material. Surface acoustic wave element array.   The surface acoustic wave element array according to claim 10, wherein the propagation surface of the base material is constituted by at least a part of a spherical surface. The surface acoustic wave excitation conversion means includes an interdigital electrode, and the length at which the terminals of the interdigital electrode overlap each other is equal to or less than the radius of curvature of the propagation surface,
The wavelength of the surface acoustic wave is 1/5 or less of the radius of curvature.
The surface acoustic wave element array according to claim 9, wherein the surface acoustic wave element array is provided. The propagation surface has a contact portion with which an object contacts,
Pressure detection for detecting the magnitude of the pressure from the electrical signal converted from the surface acoustic wave received by the surface acoustic wave excitation conversion means when pressure is applied to the contact site from the object in contact with the contact site Equipped with means,
The surface acoustic wave element array according to claim 1, wherein the surface acoustic wave element array is provided. A base material provided with a propagation surface through which surface acoustic waves propagate, and a surface acoustic wave excitation conversion means for exciting and propagating surface acoustic waves on the propagation surface and receiving the propagated surface acoustic waves and converting them into electrical signals; A plurality of surface acoustic wave elements that are classified into at least two groups having different propagation times of the surface acoustic waves excited and propagated on the respective propagation planes; and
The electric signals are distinguished from the outputs of the surface acoustic wave elements of the at least two groups from the difference in arrival time of the electric signals converted from the surface acoustic waves in the surface acoustic wave excitation conversion means, and the elastic surfaces on the respective propagation surfaces Surface acoustic wave propagation state analysis means for analyzing wave propagation states independently of each other;
A surface acoustic wave element array comprising:   The plurality of surface acoustic wave elements are converted from the surface acoustic waves received by the surface acoustic wave excitation conversion means and the common input means for inputting the surface acoustic wave excitation electrical signal to each surface acoustic wave excitation conversion means. The surface acoustic wave element array according to claim 14, wherein the surface acoustic wave element array is connected to a common receiving means for receiving an electrical signal.   The common input means generates a pulse or burst-like electric signal having a half-value width of a time element in an envelope shorter than a difference in arrival times of the electric signals of the at least two groups. The surface acoustic wave element array according to claim 15.   The difference in arrival time of the electric signal in the plurality of surface acoustic wave elements distinguished into the at least two groups is due to a difference in length of a propagation path of the surface acoustic wave on the propagation surface. The surface acoustic wave element array according to any one of 14 to 16. The substrate of the surface acoustic wave element has at least a portion having piezoelectricity along the surface,
The surface acoustic wave excitation conversion means includes interdigital electrodes formed so as to be in contact with at least a part having the piezoelectricity or facing each other with a predetermined gap interposed between at least a part having the piezoelectricity. The surface acoustic wave element array according to claim 14, wherein the surface acoustic wave element array is included. Each of the plurality of surface acoustic wave elements has a plurality of surface acoustic wave excitation conversion means,
The plurality of surface acoustic wave excitation conversion means have different frequency characteristics from each other.
The surface acoustic wave element array according to claim 14, wherein the surface acoustic wave element array is provided.   15. The propagation surface is provided with a reflector that reflects the surface acoustic wave propagated from the surface acoustic wave excitation conversion means toward the surface acoustic wave excitation conversion means. 20. The surface acoustic wave element array according to any one of 19 above.   The surface acoustic wave excitation conversion means includes a transmission unit that excites and propagates a surface acoustic wave on the propagation surface, and a reception unit that receives the surface acoustic wave propagated on the propagation surface by the transmission unit and converts the surface acoustic wave into an electrical signal. The transmitter and the receiver are spaced apart from each other in a direction in which surface acoustic waves propagate along the propagation plane. The surface acoustic wave element array according to Item.   The surface acoustic wave element array according to any one of claims 14 to 21, wherein the propagation surface of the substrate includes at least an annular curved surface.   The propagation surface of the base material is at least a continuous annular curved surface, and a surface acoustic wave propagating along the propagation surface circulates along the surface of the base material. Surface acoustic wave element array.   24. The surface acoustic wave element array according to claim 23, wherein the propagation surface of the substrate is constituted by at least a part of a spherical surface. The surface acoustic wave excitation conversion means includes an interdigital electrode, and the length at which the terminals of the interdigital electrode overlap each other is equal to or less than the radius of curvature of the propagation surface,
The wavelength of the surface acoustic wave is 1/5 or less of the radius of curvature.
The surface acoustic wave element array according to any one of claims 22 to 24, wherein: The propagation surface has a contact portion with which an object contacts,
The magnitude of the pressure is detected from the electrical signal converted from the surface acoustic wave received by the surface acoustic wave excitation conversion means based on the change in the propagation state of the surface acoustic wave according to the contact of the object with the contact portion. Provided with pressure detecting means,
The surface acoustic wave element array according to any one of claims 14 to 25, wherein A base material provided with a propagation surface through which surface acoustic waves propagate, and a surface acoustic wave excitation conversion means for exciting and propagating surface acoustic waves on the propagation surface and receiving the propagated surface acoustic waves and converting them into electrical signals; Have
The substrate has at least a portion along the surface having piezoelectricity,
The surface acoustic wave excitation conversion means is formed so as to be in contact with at least a part having the piezoelectricity or to face at least a part having the piezoelectricity with a predetermined gap interposed therebetween,
The propagation surface has a contact portion with which an object contacts,
The magnitude of the pressure is detected from the electrical signal converted from the surface acoustic wave received by the surface acoustic wave excitation conversion means based on the change in the propagation state of the surface acoustic wave according to the contact of the object with the contact portion. Provided with pressure detecting means,
A pressure sensor characterized by that. It has a plurality of surface acoustic wave excitation conversion means having different frequency characteristics from each other,
Performing frequency analysis on the electrical signals converted by the plurality of surface acoustic wave excitation conversion means to identify the surface acoustic wave excitation conversion means corresponding to each frequency component;
The pressure sensor according to claim 27.   29. The pressure sensor according to claim 28, wherein the plurality of surface acoustic wave excitation conversion means have a plurality of interdigital electrodes whose arrangement periods of the plurality of terminals are different from each other. The surface acoustic wave excitation conversion means has interdigital electrodes having a frequency characteristic of a plurality of bands instead of a constant electrode period,
The pressure detecting means performs frequency analysis of an electric signal having a plurality of bands of frequency characteristics from the plurality of bands of surface acoustic waves received by the interdigital electrode, and generates a surface acoustic wave component corresponding to each frequency component. Detecting the magnitude of the pressure based on a change in the propagation state in the propagation path;
The pressure sensor according to claim 27.   28. The reflector is provided with a reflector that reflects the surface acoustic wave propagated from the surface acoustic wave excitation conversion means toward the surface acoustic wave excitation conversion means. 30. The pressure sensor according to any one of 30 above.   The surface acoustic wave excitation conversion means includes a transmission unit that excites and propagates a surface acoustic wave on the propagation surface, and a reception unit that receives the surface acoustic wave propagated on the propagation surface by the transmission unit and converts the surface acoustic wave into an electrical signal. The transmitter and the receiver are spaced apart from each other in the direction in which the surface acoustic wave propagates along the propagation plane. The pressure sensor according to item.   The pressure sensor according to any one of claims 27 to 32, wherein the propagation surface of the base material includes at least an annular curved surface.   The propagation surface of the substrate is at least a continuous annular curved surface, and the surface acoustic wave propagating on the propagation surface circulates along the surface of the substrate. Pressure sensor.   35. The pressure sensor according to claim 34, wherein the propagation surface of the substrate is constituted by at least a part of a spherical surface.

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