JP2005150273A - Manufacturing method of laminated wiring board - Google Patents

Manufacturing method of laminated wiring board Download PDF

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JP2005150273A
JP2005150273A JP2003383436A JP2003383436A JP2005150273A JP 2005150273 A JP2005150273 A JP 2005150273A JP 2003383436 A JP2003383436 A JP 2003383436A JP 2003383436 A JP2003383436 A JP 2003383436A JP 2005150273 A JP2005150273 A JP 2005150273A
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synthetic resin
laminated
bumps
sheet
resin sheet
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Tomoyasu Gunji
智康 郡司
Koji Sawaguchi
幸司 澤口
Takashi Oyama
貴史 尾山
Chikayasu Umamichi
慎泰 馬道
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Clover Electronics Co Ltd
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Clover Electronics Co Ltd
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  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a laminated wiring board by which bumps are securely made to pass through a synthetic resin sheet and they can sufficiently be exposed irrespective of the size of an interval size between the bumps the repetition of pressurization work is eliminated and manufacturing efficiency can be improved. <P>SOLUTION: A first lamination pressurization process is performed for making tips of the bumps 3 pass through the synthetic resin sheet 5 and exposing them by laminating and pressurizing the synthetic resin sheet 5 on a conductive support 1 having a plurality of bumps 3. Air between the conductive support 1 and the synthetic resin sheet 5 is pressurized while it is compulsorily sucked and discharged. Then, a second lamination pressurization process is performed for laminating a conductor layer on the synthetic resin sheet 5 and pressurizing it so as to press the tips of the bumps 3 exposed from the synthetic resin sheet 5 on the conductor layer. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、配線層間をバンプにより接続する積層配線基板の製造方法に関する。   The present invention relates to a method for manufacturing a laminated wiring board in which wiring layers are connected by bumps.

従来、積層配線基板を製造するときには、先ず、導電性支持体上の所定位置に複数のバンプを形成し、次いで、該バンプが形成された導電性支持体に合成樹脂系シートを積層した後、合成樹脂系シートが導電性支持体に密着するように加圧することにより該バンプを合成樹脂系シートに貫通させ、該バンプの先端を導電性支持体の反対側の合成樹脂系シート表面から露出させる。そして、合成樹脂系シートに導電体層を積層して加圧し、合成樹脂系シートから露出した前記バンプの先端を該導電体層に圧着させる。こうして、導電性支持体と導電体層とがバンプにより接続された積層配線基板が形成される(例えば、特許文献1参照)。   Conventionally, when manufacturing a laminated wiring board, first, a plurality of bumps are formed at predetermined positions on a conductive support, and then a synthetic resin-based sheet is laminated on the conductive support on which the bumps are formed. By pressing so that the synthetic resin sheet is in close contact with the conductive support, the bump penetrates the synthetic resin sheet, and the tip of the bump is exposed from the surface of the synthetic resin sheet on the opposite side of the conductive support. . And a conductor layer is laminated | stacked on a synthetic resin sheet | seat, it pressurizes, and the front-end | tip of the said bump exposed from the synthetic resin sheet | seat is crimped | bonded to this conductor layer. Thus, a laminated wiring board in which the conductive support and the conductive layer are connected by the bumps is formed (see, for example, Patent Document 1).

ところで、近年、電子部品の小型化技術及び配線基板に対する実装技術の進歩に伴い、配線基板を高密度化することが行なわれている。このため、この種の積層配線基板においては導電性支持体の単位面積当りのバンプの数量が多くなり、それに伴って各バンプ間の間隔寸法が極めて小となっている。   By the way, in recent years, with the progress of downsizing technology of electronic components and mounting technology for the wiring substrate, the wiring substrate has been increased in density. For this reason, in this type of laminated wiring board, the number of bumps per unit area of the conductive support is increased, and accordingly, the distance between the bumps is extremely small.

しかし、互いに隣り合うバンプ同士が近接していると、各バンプを合成樹脂系シートに貫通させるために加圧しても、合成樹脂系シートに当接した各バンプ同士が合成樹脂系シートへの貫通を阻止するように互いに支え合ってしまい、合成樹脂系シートへの貫通状態が不完全となるため、バンプが合成樹脂系シート表面から十分に露出しない事態が生じる。本発明者は、積層配線基板の製造に際して、特に各バンプ間の間隔寸法が0.5mm以下とされている場合に成樹脂系シートへの貫通が不十分となる頻度が高いことを知見している。このため、間隔寸法が極めて小とされた各バンプを合成樹脂系シートに確実に貫通させて露出させるには、加圧作業を複数回繰り返す必要があり、製造効率が極めて悪い不都合があった。
特開平6−342977号公報
However, if the adjacent bumps are close to each other, even if the bumps are pressed to penetrate the synthetic resin sheet, the bumps that are in contact with the synthetic resin sheet penetrate into the synthetic resin sheet. As a result, the bumps are not sufficiently exposed from the surface of the synthetic resin sheet. The present inventor has found out that when the laminated wiring board is manufactured, particularly when the distance between the bumps is 0.5 mm or less, the penetration to the synthetic resin-based sheet is frequently insufficient. Yes. For this reason, in order to reliably expose each bump having a very small interval dimension through the synthetic resin-based sheet, it is necessary to repeat the pressurizing operation a plurality of times, resulting in inconvenience that manufacturing efficiency is extremely poor.
JP-A-6-342977

かかる不都合を解消して、本発明は、各バンプ間の間隔寸法の大小にかかわらず各バンプを合成樹脂系シートに確実に貫通させて十分に露出させることができ、加圧作業の繰り返しを不要として製造効率を向上することができる積層配線基板の製造方法を提供することを目的とする。   In order to eliminate such inconvenience, the present invention can reliably expose each bump through the synthetic resin sheet regardless of the size of the distance between the bumps, and does not require repeated pressing work. An object of the present invention is to provide a method for manufacturing a laminated wiring board capable of improving the manufacturing efficiency.

かかる目的を達成するために、本発明は、所定位置に複数のバンプが形成された導電性支持体に合成樹脂系シートを積層し、導電性支持体と合成樹脂系シートとを密着させる方向に加圧することにより該合成樹脂系シートに前記バンプの先端を貫通、露出させる第1の積層加圧工程と、該合成樹脂系シートに導電体層を積層して加圧することにより該合成樹脂系シートから露出した前記バンプの先端を該導電体層に圧着して、該バンプにより導電性支持体と導電体層とを接続する第2の積層加圧工程とを備える積層配線基板の製造方法において、前記第1の積層加圧工程は、導電性支持体と合成樹脂系シートとの間のエアを強制的に吸引排出させつつ前記加圧を行うことを特徴とする。   In order to achieve such an object, the present invention provides a method in which a synthetic resin sheet is laminated on a conductive support having a plurality of bumps formed at predetermined positions, and the conductive support and the synthetic resin sheet are in close contact with each other. A first laminating and pressing step in which the tip of the bump penetrates and exposes the synthetic resin-based sheet by pressurization, and the synthetic resin-based sheet is pressed by laminating a conductor layer on the synthetic resin-based sheet. In the manufacturing method of the laminated wiring board, comprising: a second laminated pressure step for bonding the conductive support and the conductive layer with the bump by crimping the tip of the bump exposed from the conductive layer; The first lamination pressurizing step is characterized in that the pressurization is performed while forcibly sucking and discharging air between the conductive support and the synthetic resin-based sheet.

本発明の積層配線基板の製造方法においては、前記第1の積層加圧工程によって導電性支持体に合成樹脂系シートを積層して加圧する。このとき、第1の積層加圧工程においては、導電性支持体と合成樹脂系シートとの間のエアを強制的に吸引排出しながら前記加圧が行なわれるので、合成樹脂系シートがバンプの貫通する方向に引っ張られ、該バンプの先端を該合成樹脂系シートに確実に貫通させることができる。これにより、従来のように加圧作業を複数回繰り返すことなくバンプを合成樹脂系シートの表面から確実に露出させることができる。   In the method for manufacturing a laminated wiring board of the present invention, a synthetic resin-based sheet is laminated and pressed on the conductive support in the first lamination pressing step. At this time, in the first lamination pressurizing step, the pressurization is performed while forcibly sucking and discharging the air between the conductive support and the synthetic resin-based sheet. It is pulled in the penetrating direction, and the tip of the bump can be surely penetrated through the synthetic resin sheet. Thereby, a bump can be reliably exposed from the surface of a synthetic resin system sheet | seat, without repeating a pressurization operation | work several times like the past.

そして、このときに、各バンプ同士の間隔寸法が0.5mm以下といった極めて近接した状態に各バンプが設けられており、各バンプが互いに合成樹脂系シートを支え合うようにして積層されていても、導電性支持体と合成樹脂系シートとの間のエアが強制的に吸引排出されることによって各バンプ間へ合成樹脂系シートを引き込みながら前記加圧が行われるので、互いに近接するバンプを確実に合成樹脂系シートに貫通させることができる。   At this time, the bumps are provided in close proximity such that the distance between the bumps is 0.5 mm or less, and the bumps are laminated so as to support the synthetic resin sheets. Since the air between the conductive support and the synthetic resin sheet is forcibly sucked and discharged, the pressure is applied while pulling the synthetic resin sheet between the bumps. It is possible to penetrate the synthetic resin sheet.

次いで、前記第2の積層加圧工程により、前記バンプの先端が露出する合成樹脂系シートに導電体層を積層して加圧する。該バンプは、前記第1の積層加圧工程によって合成樹脂系シートの表面から確実に露出しているので、第2の積層加圧工程における加圧によってバンプの先端が確実に該導電体層に圧着され、導電性支持体と導電体層とをバンプにより良好に接続することができる。   Next, in the second laminating and pressing step, a conductor layer is laminated and pressed on the synthetic resin sheet from which the tip of the bump is exposed. Since the bump is reliably exposed from the surface of the synthetic resin-based sheet by the first laminating and pressing step, the tip of the bump is reliably attached to the conductor layer by the pressurizing in the second laminating and pressing step. The conductive support and the conductive layer can be favorably connected to each other by bumps.

なお、前記導電性支持体としては、一例としてガラスクロスにエポキシ樹脂等を含浸させたリジット表面に銅箔等による配線パターンを設けたコア基板を挙げることができる。また、前記合成樹脂系シートは絶縁体であり、熱可塑性樹脂フィルム又は硬化前の状態に保持されている熱硬化性樹脂フィルムにガラスクロスや有機合成繊維布等を組み合わせてなるプリプレグ系シートを用いることができる。プリプレグ系シートは、前記バンプの貫通を容易にするために、ガラスクロスや有機合成繊維布のクロスのピッチを前記バンプの径よりも大きく設定することが望ましい。プリプレグ系シートに用いられる熱可塑性樹脂としては、例えば、ポリカーボネート樹脂、ポリスルホン樹脂、熱可塑性ポリイミド樹脂、4フッ化ポリエチレン樹脂、6フッ化ポリプロピレン樹脂、ポリエーテルエーテルケトン樹脂、ポリフェニレンエーテル、ポリフェニレンオキサイド等を挙げることができる。また、前記硬化前の状態に保持されている熱硬化性樹脂としては、エポキシ樹脂、ビスマレイミドトリアジン樹脂、ポリイミド樹脂、フェノール樹脂、ポリエステルメラミン樹脂、フッ素樹脂、ポリエステル樹脂、ポリサルフォン樹脂、芳香族ポリエステル系液晶ポリマー、シアネート樹脂等を挙げることができる。   Examples of the conductive support include a core substrate in which a wiring pattern made of copper foil or the like is provided on a rigid surface in which a glass cloth is impregnated with an epoxy resin or the like. The synthetic resin-based sheet is an insulator, and a prepreg-based sheet formed by combining a thermoplastic resin film or a thermosetting resin film held in an uncured state with a glass cloth, an organic synthetic fiber cloth, or the like is used. be able to. In the prepreg-based sheet, in order to facilitate the penetration of the bumps, it is desirable to set the pitch of the glass cloth or the cloth of the organic synthetic fiber cloth to be larger than the diameter of the bumps. Examples of the thermoplastic resin used in the prepreg sheet include polycarbonate resin, polysulfone resin, thermoplastic polyimide resin, tetrafluoropolyethylene resin, hexafluoropolypropylene resin, polyetheretherketone resin, polyphenylene ether, polyphenylene oxide, and the like. Can be mentioned. In addition, as the thermosetting resin held in the state before curing, epoxy resin, bismaleimide triazine resin, polyimide resin, phenol resin, polyester melamine resin, fluorine resin, polyester resin, polysulfone resin, aromatic polyester series A liquid crystal polymer, cyanate resin, etc. can be mentioned.

また、本発明の第1の積層加圧工程においては、弾性的に変形自在の押圧部材により、前記合成樹脂系シートを前記導電性支持体に加圧することが好ましい。これによれば、押圧部材が合成樹脂系シートに圧接して弾性的に変形し、合成樹脂系シートの表面に確実に密着した状態で加圧することができるので、押圧部材と合成樹脂系シートとの間に余分な空間が生じることがなく、第1の積層加圧工程におけるエアの吸引時に、確実に導電性支持体と合成樹脂系シートとの間のエアを集中して排出させることができる。なお、押圧部材を形成する材料としては、例えば、天然ゴム、ウレタンゴム、シリコーンゴム、フッ素ゴム、ニトリルゴム等を挙げることができる。   Moreover, in the 1st lamination pressurization process of this invention, it is preferable to pressurize the said synthetic resin type | system | group to the said electroconductive support body by the elastically deformable press member. According to this, the pressing member is elastically deformed by being pressed against the synthetic resin-based sheet, and can be pressed in a state of being in close contact with the surface of the synthetic resin-based sheet. No extra space is created between the conductive support and the synthetic resin-based sheet, and the air can be reliably exhausted when the air is sucked in the first lamination pressurizing step. . Examples of the material for forming the pressing member include natural rubber, urethane rubber, silicone rubber, fluorine rubber, and nitrile rubber.

また、本発明の第1の積層加圧工程においては、積層された導電性支持体及び合成樹脂系シートを一対の柔軟な合成樹脂製離型フィルムに挟んだ状態で加圧することが好ましい。離型フィルムは、柔軟性があって且つ前記合成樹脂系シートに接着しない材質のものが選択的に採用されるものであり、例えば、フッ素樹脂、ポリ塩化ビニル、ポリ塩化ビニリデン、シリコーン樹脂、ポリプロピレン、ポリビニルアルコール等を挙げることができる。   Moreover, in the 1st lamination | stacking pressurization process of this invention, it is preferable to pressurize in the state which pinched | interposed the laminated electroconductive support body and the synthetic resin-type sheet | seat between a pair of flexible synthetic resin release films. As the release film, a material that is flexible and does not adhere to the synthetic resin sheet is selectively adopted. For example, fluororesin, polyvinyl chloride, polyvinylidene chloride, silicone resin, polypropylene And polyvinyl alcohol.

離型フィルムを設けることにより、導電性支持体と合成樹脂系シートとを加圧した後に、導電性支持体や合成樹脂系シートの他部(例えば加圧時に用いられる押圧部材)への貼り付きを防止することができる。   By providing a release film, after pressurizing the conductive support and the synthetic resin-based sheet, it is attached to the other part of the conductive support or the synthetic resin-based sheet (for example, a pressing member used during pressurization). Can be prevented.

このとき、離型フィルムが柔軟性を備えることにより、例えば弾性的に変形自在の押圧部材を用いて導電性支持体と合成樹脂系シートとを加圧したとき、変形された押圧部材の表面形状に沿って離型フィルムを変形させることができる。しかも、第1の積層加圧工程におけるエアの吸引時に、導電性支持体と合成樹脂系シートとの間から排出されるエアの流れに沿って離型フィルムが柔軟に変形してエアの流路を確実に確保することができ、導電性支持体と合成樹脂系シートとの間のエアを円滑に排出させることができる。   At this time, when the release film has flexibility, for example, when the conductive support and the synthetic resin sheet are pressed using an elastically deformable pressing member, the surface shape of the deformed pressing member The release film can be deformed along. In addition, when air is sucked in the first lamination pressurizing step, the release film is flexibly deformed along the flow of air discharged from between the conductive support and the synthetic resin sheet, and the air flow path. Can be ensured, and the air between the conductive support and the synthetic resin sheet can be smoothly discharged.

本発明の一実施形態を図面に基づいて説明する。図1は導電性支持体を示す説明的断面図、図2は本実施形態において採用する加圧装置の断面説明図、図3は加圧装置による加圧工程の説明図、図4は加圧工程の一部を示す説明的的断面図、図5は積層基板の一部を示す説明的断面図である。   An embodiment of the present invention will be described with reference to the drawings. 1 is an explanatory cross-sectional view showing a conductive support, FIG. 2 is a cross-sectional explanatory view of a pressurizing apparatus employed in this embodiment, FIG. 3 is an explanatory view of a pressurizing process by the pressurizing apparatus, and FIG. FIG. 5 is an explanatory sectional view showing a part of the laminated substrate, and FIG. 5 is an explanatory sectional view showing a part of the laminated substrate.

本実施形態の製造方法では、まず、図1に示すように、コア基板1を導電性支持体とし、コア基板1表面の銅箔2による配線パターンの所定位置に複数のバンプ3を形成する。バンプ3は、銅箔2に積層された所定位置に貫通孔を備えるメタルマスク等を介して銀ペーストや銅ペースト等の導電性ペーストをスクリーン印刷した後、乾燥することにより形成される。前記銀ペーストや銅ペーストは銀や銅の粉末とバインダー成分とを混合して調製されたものを用いる。また、バンプ3は、コア基板1表面の導体部をエッチングして形成したものであってもよい。   In the manufacturing method of the present embodiment, first, as shown in FIG. 1, the core substrate 1 is used as a conductive support, and a plurality of bumps 3 are formed at predetermined positions of the wiring pattern by the copper foil 2 on the surface of the core substrate 1. The bump 3 is formed by screen-printing a conductive paste such as a silver paste or a copper paste through a metal mask having a through hole at a predetermined position laminated on the copper foil 2 and then drying. The silver paste or copper paste is prepared by mixing silver or copper powder and a binder component. The bump 3 may be formed by etching a conductor portion on the surface of the core substrate 1.

尚、コア基板1はガラスクロスにエポキシ樹脂等を含浸させたリジット4と、その表面に配線パターンを形成する銅箔2とによって構成され、厚み0.03〜1.6mmとされている。また、各バンプ3は直径100〜300μm、高さ100〜300μmとされている。各バンプ3は配線パターンに応じて設けられるが、本実施例の場合には一部のバンプ3同士が比較的近接して設けられており、その間隔距離が0.5mm以下とされているものもある。   The core substrate 1 is composed of a rigid 4 in which an epoxy resin or the like is impregnated into a glass cloth, and a copper foil 2 that forms a wiring pattern on the surface thereof, and has a thickness of 0.03 to 1.6 mm. Each bump 3 has a diameter of 100 to 300 μm and a height of 100 to 300 μm. Each bump 3 is provided in accordance with the wiring pattern. In this embodiment, some bumps 3 are provided relatively close to each other, and the distance between them is 0.5 mm or less. There is also.

次に、図2に示すように、バンプ3が形成されたコア基板1の上面に、エポキシ樹脂にガラスクロスが組み合わされた厚さ30〜150μmのプリプレグ系シート5を積層し、加圧装置6(真空ラミネータ)に投入する。このとき、プリプレグ系シート5の上面側とコア基板1の下面側とに一対の剥離フィルム7を配置させ、両剥離フィルム7間にプリプレグ系シート5とコア基板1とを挟んでおく。   Next, as shown in FIG. 2, a prepreg-based sheet 5 having a thickness of 30 to 150 μm in which a glass cloth is combined with an epoxy resin is laminated on the upper surface of the core substrate 1 on which the bumps 3 are formed. (Vacuum laminator) At this time, a pair of release films 7 are arranged on the upper surface side of the prepreg-based sheet 5 and the lower surface side of the core substrate 1, and the prepreg-based sheet 5 and the core substrate 1 are sandwiched between both release films 7.

加圧装置6は、図2に示すように、昇降自在の上板8と、該上板8により気密に閉塞される収容室9とを備えている。上板8は図示しない押圧手段に連結されて押圧手段の駆動によって下降される。収容室9の側壁10には、エア排出口11が形成されている。エア排出口11には図示しない吸引手段が接続され、吸引手段の駆動により収容室9のエアが排出されるようになっている。上板8と、収容室9の底部12には、互いに対向する一対のゴム製の押圧部材13が設けられている。   As shown in FIG. 2, the pressurizing device 6 includes an upper plate 8 that can be raised and lowered, and a storage chamber 9 that is airtightly closed by the upper plate 8. The upper plate 8 is connected to pressing means (not shown) and is lowered by driving the pressing means. An air discharge port 11 is formed in the side wall 10 of the storage chamber 9. A suction means (not shown) is connected to the air discharge port 11 so that the air in the storage chamber 9 is discharged by driving the suction means. A pair of rubber pressing members 13 facing each other are provided on the upper plate 8 and the bottom 12 of the storage chamber 9.

続いて、図3に示すように、加圧装置6の上板8が下降して、両剥離フィルム7によって上下が覆われたプリプレグ系シート5とコア基板1とを加圧する(第1の積層加圧工程)。この加圧によって、プリプレグ系シート5がコア基板1に圧接される。このとき、一対の押圧部材13はゴム製であることにより弾性的に変形し、プリプレグ系シート5及びコア基板1に密着して加圧する。なお、このときの加圧に際しては同時に加熱してもよい。   Subsequently, as shown in FIG. 3, the upper plate 8 of the pressurizing device 6 is lowered to pressurize the prepreg-based sheet 5 and the core substrate 1 whose upper and lower sides are covered by the two release films 7 (first lamination). Pressure step). By this pressurization, the prepreg-based sheet 5 is pressed against the core substrate 1. At this time, the pair of pressing members 13 are elastically deformed by being made of rubber, and are brought into close contact with and pressed against the prepreg sheet 5 and the core substrate 1. In addition, you may heat simultaneously in the case of the pressurization at this time.

一方、上板8の下降に連動して吸引手段が作動し、エア排出口11から収容室9内のエアが吸引排出される。これに伴って、図4に示すように、プリプレグ系シート5とコア基板1との間のエアが強制的に排出される。また、プリプレグ系シート5とコア基板1との間からその外部にエアが流出するときには、両剥離フィルム7の端部の間を抜けるが、両剥離フィルム7が柔軟性を有しているので、エアの流路を開くようになびくので、エアの流出が円滑に行われる。こうして、一対の押圧部材13によってプリプレグ系シート5とコア基板1とが加圧されると同時に、プリプレグ系シート5とコア基板1との間のエアが強制的に排出されることによって、プリプレグ系シート5が下方に引っ張られ、バンプ3が円滑にプリプレグ系シート5を貫通する。   On the other hand, the suction means operates in conjunction with the lowering of the upper plate 8, and the air in the storage chamber 9 is sucked and discharged from the air discharge port 11. Accordingly, as shown in FIG. 4, the air between the prepreg sheet 5 and the core substrate 1 is forcibly discharged. Also, when air flows out between the prepreg-based sheet 5 and the core substrate 1, it passes through the ends of both release films 7, but both release films 7 have flexibility, Since the air flows so as to open the air flow path, the air flows out smoothly. Thus, the prepreg-based sheet 5 and the core substrate 1 are pressurized by the pair of pressing members 13 and at the same time, the air between the prepreg-based sheet 5 and the core substrate 1 is forcibly discharged, whereby the prepreg system The sheet 5 is pulled downward, and the bump 3 smoothly penetrates the prepreg sheet 5.

その後、加圧装置6の上板8が上昇して一対の押圧部材13が離反する。このとき、前記剥離フィルム7を設けたことによって、押圧部材13とプリプレグ系シート5との貼り付き等を防止することができる。   Thereafter, the upper plate 8 of the pressure device 6 rises and the pair of pressing members 13 are separated. At this time, by providing the release film 7, sticking between the pressing member 13 and the prepreg sheet 5 can be prevented.

こうしてプリプレグ系シート5とコア基板1とが積層されると、バンプ3がプリプレグ系シート5を貫通したことによってプリプレグ系シート5の上面から確実にバンプ3の先端が露出された状態となる。   When the prepreg sheet 5 and the core substrate 1 are laminated in this manner, the bumps 3 penetrate the prepreg sheet 5, so that the tips of the bumps 3 are reliably exposed from the upper surface of the prepreg sheet 5.

そして次には、図5に示すように、プリプレグ系シート5が積層されたコア基板1を、バンプ3が露出している側の面で、他のプリント配線基板14(導電体層)に積層し、図示しないが、金属製治具に挟持した状態で多層プレス機に装着し、真空中にて加熱プレスする(第2の積層加圧工程)。これによって、プリプレグ系シート5から露出したバンプ3の先端がプリント配線基板14の配線パターン15に圧着され、バンプ3により、コア基板1の銅箔2と配線パターン15とが接続される。   Then, as shown in FIG. 5, the core substrate 1 on which the prepreg sheet 5 is laminated is laminated on another printed wiring board 14 (conductor layer) on the surface where the bumps 3 are exposed. Although not shown in the figure, it is mounted on a multi-layer press while being sandwiched between metal jigs, and is heated and pressed in a vacuum (second laminating and pressing step). As a result, the tips of the bumps 3 exposed from the prepreg-based sheet 5 are pressed against the wiring pattern 15 of the printed wiring board 14, and the copper foil 2 of the core substrate 1 and the wiring pattern 15 are connected by the bumps 3.

本発明の実施形態における導電性支持体を示す説明的断面図。Explanatory sectional drawing which shows the electroconductive support body in embodiment of this invention. 本実施形態において採用する加圧装置の断面説明図。Cross-sectional explanatory drawing of the pressurization apparatus employ | adopted in this embodiment. 加圧装置による加圧工程の説明図。Explanatory drawing of the pressurization process by a pressurization apparatus. 加圧工程の一部を示す説明的的断面図。Explanatory sectional drawing which shows a part of pressurization process. 本実施形態における積層基板の一部を示す説明的断面図。Explanatory sectional drawing which shows a part of laminated substrate in this embodiment.

符号の説明Explanation of symbols

1…コア基板(導電性支持体)、3…バンプ、5…プリプレグ系シート(合成樹脂系シート)、7…離型フィルム、13…押圧部材、14…他のプリント配線基板(導電体層)。   DESCRIPTION OF SYMBOLS 1 ... Core board | substrate (electroconductive support body), 3 ... Bump, 5 ... Pre-preg system sheet | seat (synthetic resin system sheet), 7 ... Release film, 13 ... Pressing member, 14 ... Other printed wiring boards (conductor layer) .

Claims (4)

所定位置に複数のバンプが形成された導電性支持体に合成樹脂系シートを積層し、導電性支持体と合成樹脂系シートとを密着させる方向に加圧することにより該合成樹脂系シートに前記バンプの先端を貫通、露出させる第1の積層加圧工程と、
該合成樹脂系シートに導電体層を積層して加圧することにより該合成樹脂系シートから露出した前記バンプの先端を該導電体層に圧着して、該バンプにより導電性支持体と導電体層とを接続する第2の積層加圧工程とを備える積層配線基板の製造方法において、
前記第1の積層加圧工程は、導電性支持体と合成樹脂系シートとの間のエアを強制的に吸引排出させつつ前記加圧を行うことを特徴とする積層配線基板の製造方法。
A synthetic resin sheet is laminated on a conductive support having a plurality of bumps formed at predetermined positions, and the bump is applied to the synthetic resin sheet by pressurizing the conductive support and the synthetic resin sheet in close contact with each other. A first lamination pressurizing step for penetrating and exposing the tip of
The conductive resin layer is laminated on the synthetic resin sheet and pressed to press the bump tip exposed from the synthetic resin sheet to the conductive layer, and the conductive support and the conductive layer are bonded by the bump. In a method for manufacturing a laminated wiring board comprising: a second laminated pressurizing step for connecting
In the first laminated pressurizing step, the pressurization is performed while forcibly sucking and discharging air between the conductive support and the synthetic resin-based sheet.
前記第1の積層加圧工程においては、弾性的に変形自在の押圧部材により、前記合成樹脂系シートを前記導電性支持体に加圧することを特徴とする請求項1記載の積層配線基板の製造方法。   2. The production of a laminated wiring board according to claim 1, wherein in the first laminating and pressing step, the synthetic resin sheet is pressed against the conductive support by an elastically deformable pressing member. Method. 前記第1の積層加圧工程においては、積層された導電性支持体及び合成樹脂系シートを一対の柔軟な合成樹脂製離型フィルムに挟んだ状態で加圧することを特徴とする請求項1又は2記載の積層配線基板の製造方法。   In the first laminating and pressing step, the laminated conductive support and the synthetic resin-based sheet are pressed while being sandwiched between a pair of flexible synthetic resin release films. 3. A method for producing a laminated wiring board according to 2. 少なくとも一対の前記バンプは、その間隔寸法が0.5mm以下とされていることを特徴とする請求項1乃至3の何れか1項記載の積層配線基板の製造方法。   The method for manufacturing a multilayer wiring board according to any one of claims 1 to 3, wherein an interval between at least the pair of bumps is 0.5 mm or less.
JP2003383436A 2003-11-13 2003-11-13 Manufacturing method of laminated wiring board Pending JP2005150273A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9005384B2 (en) 2011-11-21 2015-04-14 Kabushiki Kaisha Meiki Seisakusho Method for forming laminate and laminating device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9005384B2 (en) 2011-11-21 2015-04-14 Kabushiki Kaisha Meiki Seisakusho Method for forming laminate and laminating device

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