JP2005148354A - Photomask, aligner, liquid crystal panel member, device and method for manufacturing liquid crystal panel member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid crystal panel member with which a throughput, quality, an yield etc. related to manufacture of a web shaped liquid crystal panel member etc. are improved, a device and a method for manufacturing the same, or the like. <P>SOLUTION: An aligner 101 carries out ultraviolet rays irradiation via a photomask 104 and forms a pattern on a web substrate 107. In this case, the pattern is formed so as to form an angle of 45° with a conveyance direction 108 of the web substrate 107 based on a mask pattern of the photomask 104. A liquid crystal dropping device 1208 drops a liquid crystal 1301 from directly above a laminate nip roller 1204. The laminate nip roller 1204 encloses the liquid crystal 1301 dropped between a color filter substrate 1107 and a TFT substrate 1210 and conveys a liquid crystal panel substrate 1501 (a color filter substrate 1211 on which the TFT substrate has been laminated) in a vertical downward direction. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a liquid crystal panel member related to a color filter and the like, a manufacturing apparatus and a manufacturing method of a liquid crystal panel member related to a color filter and the like. More specifically, the present invention relates to a web-like liquid crystal panel member, a manufacturing apparatus thereof, a manufacturing method thereof, and the like.

  Conventionally, as a method for forming a color filter pattern on a plastic substrate, there are various methods such as a photolithography method, a printing method, an electrodeposition method, an ink jet method, and a transfer method. Among these methods, a photolithographic method manufactured using a photomask is currently widely used (see, for example, [Patent Document 1]).

JP 2000-284303 A

  However, in the conventional manufacturing method, when laminating the polarizing film, the color filter pattern direction and the polarization direction are set to a predetermined angle (for example, 45 degrees), and therefore, it is necessary to bond with a single wafer, and the processing speed There is a problem that there is a limit.

In addition, when air (bubbles) generated at the time of liquid crystal sealing cannot be released and remains in the liquid crystal panel, there is a problem in that a display defect of the liquid crystal panel is caused.
For this reason, generally, a method is adopted in which the cell is placed under reduced pressure and the liquid crystal is sucked into the cell when the reduced pressure is gradually released. When the liquid crystal display panel becomes large, the decompression time of the vacuum chamber becomes the rate-determining process time.

  The present invention has been made in view of the above problems, a liquid crystal panel member capable of improving processing capacity, quality, yield, and the like related to the production of a web-like liquid crystal panel member, a manufacturing apparatus thereof, It aims at providing the manufacturing method etc.

  In order to achieve the above-mentioned object, a first invention is a liquid crystal panel member in which a color filter pattern is formed on a web substrate, wherein the longitudinal direction of the web substrate intersects with the color filter pattern direction. It is the liquid crystal panel member characterized by the above-mentioned.

In addition, the liquid crystal panel member may be obtained by further bonding a web-shaped polarizing film, a web-shaped TFT substrate, or the like to a web substrate.
In this case, the web-like polarizing film can be used as it is with a polarizing direction perpendicular or parallel to the longitudinal direction (conveying direction) of the web substrate.
Moreover, the web-shaped TFT substrate can be used in correspondence with the color filter pattern, in which the longitudinal direction (conveying direction) of the web substrate and the TFT pattern direction intersect.

  The second invention is a photomask characterized in that the edge direction of the photomask and the mask pattern direction intersect, and an exposure apparatus comprising the photomask.

  The second invention relates to an exposure apparatus and a photomask for forming a color filter pattern according to the liquid crystal panel member of the first invention.

The “web substrate” is a substrate that can be wound and unwound in the form of a web, and is, for example, a strip-shaped plastic substrate having flexibility.
“Liquid crystal panel member” refers to a liquid crystal panel and various members and materials constituting the liquid crystal panel. For example, a color filter base material, a TFT base material, a polarizing film, It is a liquid crystal panel base material in which at least one of them is bonded.

The “color filter pattern direction” indicates the direction of the pixel row or pixel column of the color filter pattern region on the web substrate, and usually coincides with the direction of each side of the outer periphery of the color filter pattern region.
The “TFT pattern direction” indicates the direction of the pixel row or pixel column of the TFT region on the web substrate, and usually coincides with the direction of each side of the outer periphery of the TFT region.
The “mask pattern direction” indicates the direction of a pixel row or a pixel column in a mask pattern area in a photomask.

  In the first invention and the second invention, a photomask in which the longitudinal direction (conveying direction) of the web substrate intersects the mask pattern direction (for example, intersects at an angle of 45 degrees) is used. By forming the color filter pattern on the web substrate, the color filter substrate, the polarizing film, and the TFT substrate can all be bonded in the form of a web, so that the processing ability is dramatically improved.

  3rd invention laminates | stacks the 1st unwinding means which unwinds a web-like color filter base material, the 2nd unwinding means which unwinds a web-like polarizing film, and the said color filter base material and the said polarizing film. A liquid crystal panel member manufacturing apparatus comprising: a stacking unit that winds up and a winding unit that winds up the color filter substrate on which the polarizing film is stacked.

3rd invention is a manufacturing apparatus of the liquid crystal panel member by which the polarizing film was bonded to the color filter base material of 1st invention.
As the laminating means, for example, a laminate nip roll or the like can be used.
In 3rd invention, since a color filter base material and a polarizing film can be bonded with a web form as mentioned above, processing capacity improves dramatically.

  4th invention is the 1st unwinding means which unwinds a web-like color filter base material, the 2nd unwinding means which unwinds a web-like TFT base material, the said color filter base material, and the said TFT base material, Laminating means for laminating the liquid crystal, liquid crystal dropping means for dripping liquid crystal directly above the laminating means, and winding means for winding the color filter substrate on which the TFT substrate is laminated. It is a liquid crystal panel member manufacturing apparatus.

The stacking means encloses the liquid crystal between the TFT base material and the color filter base material transported from the upper left and right, and stacks both base materials and transports them downward.
In addition, a sealing agent application unit that applies the sealing agent, a drying unit that dries the sealing agent, and a curing unit that cures the sealing agent are provided.

4th invention is a manufacturing apparatus of the liquid crystal panel member by which the TFT base material was bonded by the color filter base material of 1st invention.
As in the third invention, for example, a laminating nip roll or the like can be used as the laminating means.
As the curing means, for example, an ultraviolet curing device (UV curing device) or the like can be used.

In 4th invention, since a color filter base material and a TFT base material can be bonded with a web form as mentioned above, processing capacity improves dramatically.
Moreover, since a bonding process and a liquid-crystal enclosure process can be performed simultaneously, processing capacity improves dramatically.
In addition, even if air (bubbles) is generated during liquid crystal encapsulation, air will escape from the corners of the color filter pattern, so air will not remain in the liquid crystal and the empty cell will be evacuated. Occurrence can be suppressed, and display quality and yield can be improved.

  5th invention laminates | stacks the 1st unwinding process which unwinds a web-like color filter base material, the 2nd unwinding process which unwinds a web-like polarizing film, and the said color filter base material and the said polarizing film. And a winding process for winding the color filter substrate on which the polarizing film is laminated.

  5th invention is invention regarding the manufacturing method of the liquid crystal panel member by which the polarizing film of 2nd invention was bonded.

  The sixth invention includes a first unwinding step of unwinding the web-shaped color filter substrate, a second unwinding step of unwinding the web-shaped TFT substrate, the color filter substrate, and the TFT substrate. A laminating step for laminating a liquid crystal, a liquid crystal dropping step for dripping a liquid crystal directly from above the laminating portion, and a winding step for winding the color filter substrate on which the TFT substrate is laminated. It is a liquid crystal panel member manufacturing method.

  6th invention is invention regarding the manufacturing method of the liquid crystal panel member by which the TFT base material of 2nd invention was bonded.

  ADVANTAGE OF THE INVENTION According to this invention, the liquid crystal panel member, its manufacturing apparatus, its manufacturing method, etc. which enable improvement of the processing capability, quality, yield, etc. which concern on manufacture of a web-like liquid crystal panel member, etc. can be provided.

  Hereinafter, preferred embodiments of a liquid crystal panel member, a manufacturing apparatus thereof, a manufacturing method thereof, and the like according to the present invention will be described in detail with reference to the accompanying drawings. In the following description and the accompanying drawings, the same reference numerals are given to the constituent elements having the same functional configuration, and redundant description will be omitted.

First, the configuration of the exposure apparatus 101 according to the embodiment of the present invention will be described with reference to FIGS. 1 and 2.
FIG. 1 is a schematic block diagram of an exposure apparatus 101 according to an embodiment of the present invention.
FIG. 2 is a view of the exposure apparatus 101 as viewed from above.

  The exposure apparatus 101 includes an irradiation head 102, an alignment mark detection camera 103, a photomask 104, a photomask holder 105, a suction plate 106, and the like.

The exposure apparatus 101 irradiates the Cr layer formed on the web substrate 107, the applied colored light-sensitive material layer, and the like with ultraviolet rays and the like, and generates a black matrix pattern (BM), a colored layer pattern (R, G, B), column spacers (CS) and the like are formed.
The irradiation head 102 performs exposure by irradiating ultraviolet rays (UV) or the like from the web substrate 107.

  The alignment mark detection camera 103 detects an alignment mark formed on the web substrate and positions the web substrate 107 conveyed. The alignment mark detection camera 103 is, for example, an image sensor such as a CCD (CHARGE COUPLED DEVICE) camera.

The photomask 104 is supported by the photomask holder 105. The exposure apparatus 101 irradiates the web substrate 107 with a pattern of ultraviolet rays by using the photomask 104.
The photomask 104 is desirably prepared individually for the black matrix (BM), the colored layer Red (R), the colored layer Green (G), the colored layer Blue (B), and the column spacer (CS).

  The suction plate 106 sucks and fixes the web substrate 107 during exposure. The suction plate 106 is a porous plate such as a sintered metal plate or a sintered ceramic plate.

Next, the outline of the manufacturing process of the color filter substrate 1001 (see FIG. 10) will be described with reference to FIG.
FIG. 3 is a flowchart showing a manufacturing process of the color filter substrate 1001.

A black matrix (BM) is formed on the web substrate 107 through processes such as cleaning, Cr film formation, positive resist coating, pre-baking, exposure by the exposure apparatus 101, development, etching, resist peeling, and cleaning (step 301). ).
A colored layer is formed on the web substrate through processes such as application of a color sensitive material, pre-baking, exposure, development, post-baking, and washing. The formation of the colored layer is repeated for three colors (Red, Green, and Blue) (step 302).

A transparent electrode film is formed on the substrate through processes such as ITO (Indium-Tin Oxide, transparent electrode) film formation and cleaning (step 303).
A column spacer (CS) is formed on the web substrate 107 through processes such as application of a transparent photosensitive material, pre-baking, exposure, development, post-baking, and washing (step 304).

  Next, pattern formation and the like by the exposure apparatus 101 will be described with reference to FIGS.

<Pattern (Black Matrix (BM)) Formation (FIG. 3: Step 301)>
FIG. 4 is a diagram showing a photomask (BM) 401 (FIG. 1: 104) for forming a black matrix (BM).
FIG. 5 is a diagram showing the web base material 107 after the black matrix (BM) is formed.

  The photomask (BM) 401 includes a mask pattern (BM) 402 and a mask pattern (alignment mark) 403.

  The mask pattern (BM) 402 is for forming a black matrix pattern (BM) 501 on the web substrate 107. The area and direction of one surface of the mask pattern (BM) 402 make an angle of 45 degrees with respect to the edge of the photomask 401.

The mask pattern (alignment mark) 403 is for forming the alignment mark 502 on the web substrate 107.
The alignment mark 502 is used for positioning the photomask for each color and the web substrate 107. The alignment mark 502 may be formed for the colored layer Red pattern (R), the colored layer Green pattern (G), the colored layer Blue pattern (B), and the column spacer (CS). .

  The exposure apparatus 101 performs ultraviolet irradiation through a photomask (BM) 401 to form a pattern (BM) 501 and an alignment mark 502 on the web substrate 107. In this case, the pattern (BM) 501 is formed based on the mask pattern (BM) 402 of the photomask (BM) 401 so as to form an angle of 45 degrees with respect to the conveyance direction 108 of the web base material 107.

<Pattern (Colored Layer Red (R)) Formation (FIG. 3: Red at Step 302)>
FIG. 6 is a view showing a photomask (R) 601 for forming a colored layer red (R).
FIG. 7 is a view showing the web base material 107 after the colored layer red (R) is formed.

  The photomask (R) 601 has a mask pattern (R) 602 and an alignment mark detection hole (R) 603.

  The mask pattern (R) 602 is for forming the pattern (R) 701 on the web substrate 107. The area and direction of one surface of the mask pattern (R) 602 make an angle of 45 degrees with respect to the edge of the photomask 601.

  The alignment mark detection hole (R) 603 is for detecting (R) 702 in the alignment mark 502 on the web substrate 107 and positioning the web substrate 107 and the photomask (R) 601. . The alignment mark (R) 702 is detected by the alignment mark detection camera 103.

  The exposure apparatus 101 detects the alignment mark (R) 702 from the alignment mark detection hole (R) 603 using the alignment mark detection camera 103, positions the web base material 107 and the photomask (R) 601, and then uses the photomask ( R) irradiates ultraviolet rays through 601 and then develops to form pattern (R) 701 on web substrate 107. In this case, the pattern (R) 701 is formed at an angle of 45 degrees with respect to the conveyance direction 108 of the web substrate 107 based on the mask pattern (R) 602 of the photomask (R) 601.

  Similar to the formation of the colored layer red (R), the colored layer green (G) and the colored layer blue (B) are also formed with a predetermined pattern by the same exposure / development process. Also in this case, the area and direction of one surface of the mask pattern of the photomask form an angle of 45 degrees with respect to the edge of the photomask.

<Column spacer formation (FIG. 3: Step 304)>
FIG. 8 is a view showing a photomask (CS) 801 for forming a column spacer (CS).
FIG. 9 is a view showing the web substrate 107 after the column spacer (CS) is formed.

  The photomask (CS) 801 has a mask pattern (CS) 802 and an alignment mark detection hole (CS) 803.

  The mask pattern (CS) 802 is for forming the column spacer (CS) 901 on the web substrate 107. The column spacer 901 is desirably formed on the black matrix position.

  The alignment mark detection hole (CS) 803 is for detecting the alignment mark (CS) 902 on the web base material 107 and positioning the web base material 107 and the photomask (CS) 801. The alignment mark (CS) 902 is detected by the alignment mark detection camera 103.

  The exposure apparatus 101 detects the alignment mark (CS) 902 from the alignment mark detection hole (CS) 803 by the alignment mark detection camera 103, positions the web base material 107 and the photomask (CS) 801, and performs a photomask ( The column spacers 901 are formed on the web base material 107 by performing ultraviolet irradiation via CS) 801 and then developing.

FIG. 10 is a view (FIG. 9: AA ′ cross-sectional view) showing the color filter substrate 1001 after the pattern formation.
The color filter substrate 1001 is configured by forming a black matrix layer (BM) 1002, a colored layer (R, G, B) 1003, a transparent electrode film 1004, a column spacer 1005, and the like on a web substrate 107.

  Next, the manufacturing process of the liquid crystal panel substrate 1501 (see FIG. 15) will be described with reference to FIGS.

FIG. 11 is a view showing a polarizing film laminating apparatus 1101.
A polarizing film laminating apparatus 1101 includes an unwinding roll 1102, an unwinding roll 1103, a laminating nip roll 1104, a winding roll 1105, and the like.
The polarizing film laminating apparatus 1101 bonds the web-shaped color filter substrate 1001 and the web-shaped polarizing film 1106.

  The color filter substrate 1001 is unwound from the unwinding roll 1102, and the polarizing film 1106 is unwound from the unwinding roll 1103. The color filter substrate 1001 and the polarizing film 1106 are laminated and nipped by a laminate nip roll 1104 continuously for the winding length. The color filter base material 1107 on which the polarizing film is laminated is collected by a winding roll 1105.

FIG. 16 is a view showing a conventional color filter substrate 1601.
A color filter pattern 1602 is formed on the conventional color filter substrate 1601 so as to form an angle of 0 degrees or 90 degrees with respect to the conveyance direction 108 of the web substrate 107.

17 and 18 are diagrams showing web-like polarizing films 1701 and 1801.
FIG. 19 is a diagram showing a single-wafer polarizing plate 1901.

In general, for reasons such as suppressing deterioration in display quality from an oblique direction, the polarizing film has a polarization direction that makes a predetermined angle (for example, 45 degrees) with the pattern direction of the color filter (each side direction around the pattern region). The liquid crystal panel substrate 1501 is attached to the upper and lower surfaces.
As shown in FIGS. 17 and 18, the polarization directions 1702 and 1802 of the web-like polarizing films 1701 and 1801 are generally parallel or perpendicular to the transport direction 108.

  Therefore, these polarizing films 1701 and 1801 cannot be attached to the conventional color filter substrate 1601 in a web shape. For the conventional color filter substrate 1601, it is necessary to prepare a single-wafer polarizing plate 1901 in advance and affix the polarizing plates 1901 one by one. In this case, the angle between the polarization direction 1902 of the polarizing plate 1901 and the color filter pattern direction is 45 degrees.

  On the other hand, as shown in FIGS. 4 to 9, the color filter substrate 1001 according to the embodiment of the present invention has a color filter pattern so as to form an angle of 45 degrees with respect to the conveyance direction 108 of the web substrate 107. Therefore, the polarizing films 1701 and 1801 can be pasted in a web shape. That is, by using the polarizing film laminating apparatus 1101, both the color filter base material 1001 and the polarizing film 1106 can be stuck in a web shape. Even in this case, the angle formed by the color filter pattern direction and the polarization direction is 45 degrees.

FIG. 12 is a view showing a TFT base material laminating apparatus 1201.
FIG. 13 is a diagram showing details of operations of the liquid crystal dropping device 1208 and the laminate nip roll 1204.
FIG. 14 is a view of the laminate nip roll 1204 as viewed from above.

The TFT substrate laminating apparatus 1201 includes an unwinding roll 1202, an unwinding roll 1203, a laminating nip roll 1204, a winding roll 1205, a sealant coating apparatus 1206, a drying apparatus 1207, a liquid crystal dropping apparatus 1208, a sealant curing apparatus 1209, and the like. Is done.
A TFT substrate laminating apparatus 1201 encloses and laminates a liquid crystal panel substrate 1501 (1211) between a color filter substrate 1107 (polarized film laminated) and a TFT (Thin Film Transistor) substrate 1210 to laminate the liquid crystal. To manufacture.

  The liquid crystal dropping device 1208 is provided immediately above the laminate nip roll 1204. The laminate nip roll 1204 is disposed so that the liquid crystal dropped from the liquid crystal dropping device 1208 can be sealed between the TFT base material 1210 and the color filter base material 1211. For example, the laminating nip roll 1204 encloses the liquid crystal between the color filter base material 1107 and the TFT base material 1210 transported from the upper left and right, and laminates and nips and transports it vertically downward.

The color filter substrate 1107 is unwound from the unwinding roll 1202, and the TFT substrate 1210 is unwound from the unwinding roll 1203.
The sealant application device 1206 applies the sealant 1502 (see FIG. 15) in a rib shape to the outer peripheral portion 1402 (see FIG. 14) of the pattern region of the color filter substrate 1107.
The drying device 1207 performs heat drying of the sealing agent 1502.

  Through alignment film processing steps such as alignment film formation and rubbing treatment, the color filter substrate 1107 and the TFT substrate 1210 are laminated and nipped by the laminate nip roll 1204 continuously for the winding length. At this time, the liquid crystal dropping device 1208 drops the liquid crystal 1301 (see FIG. 13) between the color filter base material 1107 and the TFT base material 1210. The dropped liquid crystal 1301 is sealed between the color filter substrate 1107 and the TFT substrate 1210.

The sealing agent curing device 1209 cures the sealing agent 1502 by irradiating ultraviolet rays (UV).
When the color filter base material 1107 and the TFT base material 1210 are bonded and liquid crystal is sealed, the color filter base material 1211 (TFT base material laminated) is collected by the winding roll 1205.

  Thus, the liquid crystal panel base material 1501 (color filter base material 1211 with the TFT base material laminated) is manufactured by pasting the color filter base material 1107 and the TFT base material 1210 and enclosing the liquid crystal.

  As shown in FIG. 13, the liquid crystal dropping device 1208 drops the liquid crystal 1301 from directly above the laminate nip roll 1204, and the laminate nip roll 1204 drops the liquid crystal 1301 dropped between the color filter base material 1107 and the TFT base material 1210. The liquid crystal panel substrate 1501 (the color filter substrate 1211 on which the TFT substrate is laminated) is transported vertically downward. In addition, as described above, the pattern area and direction for one surface form an angle of 45 degrees with respect to the conveyance direction 108.

Therefore, even when air (bubbles) is generated during liquid crystal encapsulation, the air escapes from one point of the corner portion 1401 (see FIG. 14). Thus, after the color filter base material 1107 and the TFT base material 1210 are pasted together by the TFT base material laminating apparatus 1201, air does not remain in the liquid crystal, and the empty cell is evacuated. Can be suppressed.
In the conventional method, since a cell is put in a vacuum apparatus and the liquid crystal is sucked up, it takes time to enclose the liquid crystal and batch processing is performed. However, the present invention can encapsulate liquid crystal continuously in the atmosphere. This has the advantage that productivity is greatly improved and the base size is not affected.

  As described above, according to the embodiment of the present invention, a color filter pattern is formed on a web substrate using a photomask whose angle between the edge direction of the photomask and the mask pattern direction is 45 degrees. By doing this, the color filter substrate, polarizing film, and TFT substrate can all be bonded in a web-like form, and the bonding process and the liquid crystal encapsulation process can be performed simultaneously, greatly improving processing capacity. To do.

  In addition, even if air (bubbles) is generated during liquid crystal encapsulation, air will escape from the corners of the color filter pattern, so air will not remain in the liquid crystal and the empty cell will be evacuated. Occurrence can be suppressed, and display quality and yield can be improved.

  Although the exposure apparatus, the polarizing film laminating apparatus, the TFT substrate laminating apparatus, and the like have been described as independent apparatuses, at least one of them may be configured as an integrated apparatus.

The angle between the mask pattern direction, the color filter pattern direction, and the web substrate conveyance direction is preferably 45 degrees as described above, but depending on the type of liquid crystal, the alignment characteristics of the liquid crystal, and the like. For example, it is technically possible to change the angle in the range of 5 to 85 degrees.
Furthermore, although exposure is performed using a mask having a mask pattern provided obliquely, a mask that is normally used can be used by making the mask itself oblique to the web.

  In the above-described embodiment, a mask pattern corresponding to one surface of the liquid crystal panel is provided on one photomask, and the web substrate is described as forming a pattern region in one row along the conveyance direction. However, it is not limited to this. For example, a plurality of mask patterns may be provided on one photomask, a plurality of liquid crystal panel surfaces may be exposed at a time, and a plurality of rows of pattern areas may be formed on the web substrate along the conveyance direction. Good.

  The preferred embodiments of the liquid crystal panel member, the manufacturing apparatus, the manufacturing method, and the like according to the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It will be apparent to those skilled in the art that various changes or modifications can be conceived within the scope of the technical idea disclosed in the present application, and these are naturally within the technical scope of the present invention. Understood.

1 is a schematic block diagram of an exposure apparatus 101 according to an embodiment of the present invention. View of exposure apparatus 101 as viewed from above The flowchart which shows the manufacturing process of the color filter base material 1001 The figure which shows the photomask (BM) 401 for black matrix (BM) formation The figure which shows the web base material 107 after black matrix (BM) formation. The figure which shows the photomask (R) 601 for coloring layer red (R) formation The figure which shows the web base material 107 after colored layer red (R) formation The figure which shows the photomask (CS) 801 for column spacer (CS) formation The figure which shows the web base material 107 after column spacer (CS) formation. The figure which shows the color filter base material 1001 (FIG. 9: A-A 'sectional drawing) The figure which shows the polarizing film laminating apparatus 1101 The figure which shows the TFT base-material laminating apparatus 1201 The figure which shows the detail of operation | movement of the liquid crystal dropping apparatus 1208 and the lamination nip roll 1204. View of laminate nip roll 1204 as seen from above The figure which shows the liquid crystal panel base material 1501 The figure which shows the conventional color filter base material 1601 The figure which shows the web-like polarizing film 1701 The figure which shows the web-like polarizing film 1801 The figure which shows the sheet polarizing film 1901

Explanation of symbols

DESCRIPTION OF SYMBOLS 101 ......... Exposure apparatus 102 ......... Irradiation head 103 ......... Alignment mark detection camera 104 ......... Photomask 105 ......... Photomask holder 106 ......... Suction plate 107 ......... Web base material 108 ......... Transport direction 401, 601, 801 ... Photomask 402, 602, 802 ... Mask pattern 501, 701 ... Pattern 901 ... Column spacer 1001 ... Color filter substrate 1101 ... Polarizing film laminate Equipment 1102, 1103 ...... Unwinding roll 1104 ... Laminating nip roll 1105 ... Winding roll 1106 ... Polarizing film 1107 ... Color filter substrate (polarizing film laminated)
1201 ... TFT substrate laminating apparatus 1202, 1203 ... Unwinding roll 1204 ... Laminating nip roll 1205 ... Unwinding roll 1208 ... Liquid crystal dropping apparatus 1211 ... Color filter with TFT substrate laminated Base material (liquid crystal panel base material 1501)
1301 ……… Liquid crystal 1302 ……… Air (bubbles)
1401 ......... Corner part 1402 ... ... Peripheral part

Claims (15)

A liquid crystal panel member having a color filter pattern formed on a web substrate, wherein a longitudinal direction of the web substrate and a color filter pattern direction intersect each other. The liquid crystal panel member according to claim 1, wherein a web-like polarizing film is bonded. 3. The liquid crystal panel according to claim 1, wherein a web-like TFT base material is bonded to the web base material by crossing a long direction of the web base material and a TFT pattern direction. Element. A photomask, wherein an edge direction of the photomask and a mask pattern direction intersect each other. An exposure apparatus comprising a photomask in which a web substrate conveyance direction and a mask pattern direction intersect each other. The liquid crystal panel member according to any one of claims 1 to 3, wherein the intersecting angle is 45 degrees. The photomask according to claim 4, wherein the intersecting angle is 45 degrees. 6. The exposure apparatus according to claim 5, wherein the intersecting angle is 45 degrees. First unwinding means for unwinding the web-shaped color filter substrate;
A second unwinding means for unwinding the web-shaped polarizing film;
Lamination means for laminating the color filter substrate and the polarizing film;
Winding means for winding the color filter substrate on which the polarizing film is laminated;
An apparatus for producing a liquid crystal panel member, comprising: First unwinding means for unwinding the web-shaped color filter substrate;
A second unwinding means for unwinding the web-shaped TFT substrate;
Lamination means for laminating the color filter substrate and the TFT substrate;
Liquid crystal dropping means for dropping liquid crystal from directly above the laminating means;
Winding means for winding the color filter substrate on which the TFT substrate is laminated;
An apparatus for producing a liquid crystal panel member, comprising: The laminating means encloses the liquid crystal between the TFT base material and the color filter base material transported from above and from the left and right, stacks both base materials, and transports them downward. The liquid crystal panel member manufacturing apparatus according to 10. Sealing agent application means for applying the sealing agent;
A drying means for drying the sealant;
A curing means for curing the sealant;
The liquid crystal panel member manufacturing apparatus according to claim 10, comprising: A first unwinding step of unwinding the web-shaped color filter substrate;
A second unwinding step of unwinding the web-shaped polarizing film;
A laminating step of laminating the color filter substrate and the polarizing film;
A winding step of winding the color filter substrate on which the polarizing film is laminated;
A method for producing a liquid crystal panel member, comprising: A first unwinding step of unwinding the web-shaped color filter substrate;
A second unwinding step of unwinding the web-shaped TFT substrate;
A lamination step of laminating the color filter substrate and the TFT substrate;
A liquid crystal dropping step of dropping liquid crystal from directly above the laminated portion;
A winding step of winding the color filter substrate on which the TFT substrate is laminated;
A method for producing a liquid crystal panel member, comprising: The laminating step is characterized in that the liquid crystal is sealed between the TFT base material and the color filter base material transported from the upper left and right, and the both base materials are stacked and transported downward. 14. The method for producing a liquid crystal panel member according to 14.

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