JP2005135931A5 - - Google Patents

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Publication number
JP2005135931A5
JP2005135931A5 JP2003366806A JP2003366806A JP2005135931A5 JP 2005135931 A5 JP2005135931 A5 JP 2005135931A5 JP 2003366806 A JP2003366806 A JP 2003366806A JP 2003366806 A JP2003366806 A JP 2003366806A JP 2005135931 A5 JP2005135931 A5 JP 2005135931A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003366806A
Other languages
Japanese (ja)
Other versions
JP4221271B2 (en
JP2005135931A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2003366806A priority Critical patent/JP4221271B2/en
Priority claimed from JP2003366806A external-priority patent/JP4221271B2/en
Publication of JP2005135931A publication Critical patent/JP2005135931A/en
Publication of JP2005135931A5 publication Critical patent/JP2005135931A5/ja
Application granted granted Critical
Publication of JP4221271B2 publication Critical patent/JP4221271B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2003366806A 2003-10-28 2003-10-28 Tape applicator Expired - Lifetime JP4221271B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003366806A JP4221271B2 (en) 2003-10-28 2003-10-28 Tape applicator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003366806A JP4221271B2 (en) 2003-10-28 2003-10-28 Tape applicator

Publications (3)

Publication Number Publication Date
JP2005135931A JP2005135931A (en) 2005-05-26
JP2005135931A5 true JP2005135931A5 (en) 2008-04-10
JP4221271B2 JP4221271B2 (en) 2009-02-12

Family

ID=34644990

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003366806A Expired - Lifetime JP4221271B2 (en) 2003-10-28 2003-10-28 Tape applicator

Country Status (1)

Country Link
JP (1) JP4221271B2 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4841355B2 (en) * 2006-08-08 2011-12-21 日東電工株式会社 Method for holding semiconductor wafer
JP5151104B2 (en) * 2006-09-22 2013-02-27 パナソニック株式会社 Manufacturing method of electronic parts
JP2008153597A (en) * 2006-12-20 2008-07-03 Hitachi Setsubi Eng Co Ltd Dicing-tape sticking method and device for semiconductor wafer
JP2009071145A (en) * 2007-09-14 2009-04-02 Hitachi Setsubi Eng Co Ltd Method and device for sticking dicing tape on plate type member such as semiconductor wafer
JP4840333B2 (en) * 2007-11-12 2011-12-21 株式会社デンソー Tape sticking device and tape sticking method
JP4773419B2 (en) * 2007-12-20 2011-09-14 リンテック株式会社 Sheet sticking device and sticking method
KR101006216B1 (en) * 2008-04-10 2011-01-07 히다치 세츠비 엔지니어링 가부시키가이샤 Semiconductor wafer dicing tape attaching method and apparatus
JP4812131B2 (en) * 2008-04-18 2011-11-09 Necエンジニアリング株式会社 Substrate bonding equipment
JP4814284B2 (en) * 2008-06-12 2011-11-16 三菱電機株式会社 Tape applicator
JP2010016147A (en) * 2008-07-03 2010-01-21 Disco Abrasive Syst Ltd Adhesive tape attaching method
JP5287273B2 (en) * 2009-01-13 2013-09-11 株式会社東京精密 Wafer mounting method and wafer mounting apparatus
JP5201511B2 (en) * 2009-01-19 2013-06-05 株式会社タカトリ Wafer holding table
JP5607965B2 (en) * 2010-03-23 2014-10-15 日東電工株式会社 Semiconductor wafer mounting method and semiconductor wafer mounting apparatus
JP5957330B2 (en) * 2012-08-01 2016-07-27 株式会社ディスコ Wafer sticking device
JP7132198B2 (en) * 2019-09-27 2022-09-06 芝浦メカトロニクス株式会社 Deposition equipment and embedding processing equipment

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