JP2005127525A - Hydrodynamic bearing device - Google Patents

Hydrodynamic bearing device Download PDF

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Publication number
JP2005127525A
JP2005127525A JP2005020058A JP2005020058A JP2005127525A JP 2005127525 A JP2005127525 A JP 2005127525A JP 2005020058 A JP2005020058 A JP 2005020058A JP 2005020058 A JP2005020058 A JP 2005020058A JP 2005127525 A JP2005127525 A JP 2005127525A
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shaft
outer peripheral
peripheral surface
shaft member
end surface
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Akiyuki Minami
章行 皆見
Hidekazu Hirano
秀和 平野
Norimasa Marui
則雅 圓井
Kuniharu Kokubu
邦玄 國分
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NTN Corp
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NTN Corp
NTN Toyo Bearing Co Ltd
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Priority to JP2005020058A priority Critical patent/JP2005127525A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a hydrodynamic bearing device to be assembled in a spindle motor, having improved rotating accuracy. <P>SOLUTION: The hydrodynamic bearing device 1 comprises a shaft member 2 having a flange portion 2b at one end of a shaft portion 2a, radial bearing portions R1, R2 for supporting the shaft portion 2a in non-contact therewith in the radial direction with the hydrodynamic operation of fluid caused in a gap between the radial bearing portions, and a thrust bearing portion for supporting the flange portion 2b in non-contact therewith in the thrusting direction with the hydrodynamic operation of the fluid caused in the gap between the thrust bearing portions. The shaft portion 2a has an outer peripheral face region facing the gap between the radial bearing portions and an outer peripheral face region in which a disc hub for a disc device is mounted. The outer peripheral face region facing the gap between the radial bearing portions and the outer peripheral face region in which the disc hub is mounted are ground at the same time at a circularity of 0.5μm or less. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、例えばHDD、FDD等の磁気ディスク装置、CD−ROM、CD−R/RW、DVD−ROM/RAM等の光ディスク装置、MD、MO等の光磁気ディスク装置などのスピンドルモータに組み込まれる動圧軸受装置に関する。   The present invention is incorporated in a spindle motor such as a magnetic disk device such as HDD or FDD, an optical disk device such as CD-ROM, CD-R / RW, or DVD-ROM / RAM, or a magneto-optical disk device such as MD or MO. The present invention relates to a hydrodynamic bearing device.

周知のように、上記列挙した各種モータは、高回転精度の他、高速化、低コスト化、低騒音化などが推進されるに至っている。これらの要求性能を決定づける要素の一つとして、当該モータのスピンドルを支持する軸受が重要視されており、近年においては、この種の軸受として、上記要求性能に優れた特性を有する動圧型軸受の使用が検討され、あるいは実用化が図られている。   As is well known, the various motors listed above have been promoted to increase speed, reduce costs, reduce noise, etc. in addition to high rotational accuracy. As one of the factors that determine the required performance, a bearing that supports the spindle of the motor has been regarded as important. In recent years, as a bearing of this type, a hydrodynamic bearing having characteristics excellent in the required performance has been considered. The use is being studied or put into practical use.

例えば、HDD等のディスク装置のスピンドルモータに組み込まれる動圧型軸受装置では、軸部材をラジアル方向に回転自在に非接触支持するラジアル軸受部と、軸部材をスラスト方向に回転自在に非接触支持するスラスト軸受部とが設けられ、これらの軸受部として、軸受面に動圧発生用の溝(動圧溝)を有する動圧型軸受が用いられる。   For example, in a hydrodynamic bearing device incorporated in a spindle motor of a disk device such as an HDD, a radial bearing that rotatably supports a shaft member in a radial direction and a non-contact support that rotatably supports a shaft member in a thrust direction. A thrust bearing portion is provided. As these bearing portions, a dynamic pressure type bearing having a dynamic pressure generating groove (dynamic pressure groove) on the bearing surface is used.

この場合、ラジアル軸受部の動圧溝は、ハウジングや軸受部材の内周面または軸部材の外周面に形成され、スラスト軸受部の動圧溝は、フランジ部を備えた軸部材を用いる場合、そのフランジ部の両端面、あるいは、これに対向する面(軸受部材の端面やハウジングの底面等)にそれぞれ形成される。   In this case, the dynamic pressure groove of the radial bearing portion is formed on the inner peripheral surface of the housing or the bearing member or the outer peripheral surface of the shaft member, and the dynamic pressure groove of the thrust bearing portion uses a shaft member having a flange portion. It is formed on both end surfaces of the flange portion or on the opposite surfaces (end surface of the bearing member, bottom surface of the housing, etc.).

また、近年におけるこの種のスピンドルモータでは、情報記録密度の増大や高速回転化を図るべく、高回転精度がより一層強く求められており、この要請に応じるために、スピンドルモータに組み込まれる動圧型軸受についても更なる高回転精度が求められている。   Further, in recent years, this type of spindle motor is required to have higher rotational accuracy in order to increase the information recording density and increase the rotational speed. To meet this demand, a dynamic pressure type incorporated in the spindle motor is required. Higher rotational accuracy is also required for bearings.

ところで、動圧型軸受の回転精度を高めるには、動圧が生じるラジアル軸受隙間やスラスト軸受隙間での隙間管理が重要となる。この隙間管理を適正化するには、各軸受隙間に関与する動圧型軸受の構成部品、特に軸受部材との間に各軸受隙間を形成する軸部材を精度良く加工する必要がある。したがって、この軸部材の加工時ないし製造時には、軸部材の各軸受隙間を形成する部位に、仕上げ加工として所要の研削加工が施される。   By the way, in order to increase the rotation accuracy of the dynamic pressure type bearing, it is important to manage the clearance in the radial bearing gap and the thrust bearing gap in which the dynamic pressure is generated. In order to optimize this clearance management, it is necessary to accurately process the components of the hydrodynamic bearing involved in each bearing clearance, particularly the shaft member that forms each bearing clearance with the bearing member. Therefore, at the time of processing or manufacturing of the shaft member, a required grinding process is applied as a finishing process to a portion where each bearing gap of the shaft member is formed.

詳述すると、図10に示すように、軸部材2は、軸部2aの一端にフランジ部2bを一体形成したものであって、その外周側には軸受部材(図示略)が配置される。そして、軸部2aの外周面と軸受部材との間にラジアル軸受隙間が形成され、フランジ部2bの先端面(軸部2a側の端面)2b1と軸受部材との間、およびフランジ部2bの基端面(反軸部2a側の端面)2b2とハウジングの内底面(図示略)との間にそれぞれスラスト軸受隙間が形成される。   More specifically, as shown in FIG. 10, the shaft member 2 is formed by integrally forming a flange portion 2b at one end of the shaft portion 2a, and a bearing member (not shown) is disposed on the outer peripheral side thereof. Then, a radial bearing gap is formed between the outer peripheral surface of the shaft portion 2a and the bearing member, and between the front end surface (end surface on the shaft portion 2a side) 2b1 of the flange portion 2b and the bearing member, and the base of the flange portion 2b. Thrust bearing gaps are respectively formed between the end surface (end surface on the opposite shaft portion 2a side) 2b2 and the inner bottom surface (not shown) of the housing.

この場合、軸部材2の製造過程においては、軸受部材との間にラジアル軸受隙間を形成する軸部2aの外周面に研削加工が施されるが、この外周面を研削するに際しては、従来より以下に示すような手法が一例として採用されている。   In this case, in the manufacturing process of the shaft member 2, the outer peripheral surface of the shaft portion 2a that forms a radial bearing gap with the bearing member is ground. However, this outer peripheral surface is conventionally ground. The following method is adopted as an example.

すなわち、図11に示すように、軸部材2における軸部2aの先端面2a4の中心、およびフランジ部の基端面2b2の中心に、センタ穴2bcをそれぞれ穿設し、先端が縮径する一対のセンタリング部材41を前記両センタ穴2bcに嵌入して、軸部材2を両センタリング部材41により挟み込み支持する。   That is, as shown in FIG. 11, a pair of center holes 2bc are formed in the center of the tip end surface 2a4 of the shaft portion 2a and the base end surface 2b2 of the flange portion in the shaft member 2, respectively, and the tips are reduced in diameter. The centering member 41 is fitted into the center holes 2bc, and the shaft member 2 is sandwiched and supported by the centering members 41.

このような状態の下で、センタリング部材41から軸部材2に軸心廻りの回転を付与しつつ、その外周面に砥石43を押し当てることにより、研削加工が実行される。   Under such a state, grinding is performed by pressing the grindstone 43 against the outer peripheral surface of the shaft member 2 while applying rotation around the shaft center from the centering member 41 to the shaft member 2.

しかしながら、このセンタ支持による研削加工では、センタ位置に狂いが生じていると、回転時に軸部材が振れ回ることになり、これに起因して軸部材の軸部外周面が傾斜状に研削され或いはその真円度や同軸度に狂いが生じ、動圧軸受装置の回転精度の低下を招くおそれもある。   However, in this center-supported grinding process, if the center position is out of order, the shaft member swings around during rotation, resulting in the shaft member outer peripheral surface being ground in an inclined manner or There is also a possibility that the roundness or the coaxiality is deviated, and the rotational accuracy of the hydrodynamic bearing device is lowered.

本発明は、上記事情に鑑みてなされたものであり、動圧軸受装置の回転精度の向上を図ることを技術的課題とする。   This invention is made | formed in view of the said situation, and makes it a technical subject to aim at the improvement of the rotation precision of a hydrodynamic bearing apparatus.

上記技術的課題を解決するため、本発明は、軸部の一端にフランジ部を有する軸部材と、ラジアル軸受隙間に生じる流体の動圧作用で軸部をラジアル方向に非接触支持するラジアル軸受部と、スラスト軸受隙間に生じる流体の動圧作用でフランジ部をスラスト方向に非接触支持するスラスト軸受部とを備えた動圧型軸受装置において、軸部材の軸部は、ラジアル軸受隙間に臨む外周面領域と、ディスク装置のディスクハブが装着される外周面領域とを有し、かつ、ラジアル軸受隙間に臨む外周面領域とディスクハブが装着される外周面領域とが同時研削され、真円度が0.5μm以下である構成を提供する。   In order to solve the above technical problem, the present invention provides a shaft member having a flange portion at one end of the shaft portion, and a radial bearing portion that supports the shaft portion in a radial direction in a radial direction by a dynamic pressure action of fluid generated in the radial bearing gap. And a thrust bearing portion that supports the flange portion in the thrust direction in a non-contact manner by the dynamic pressure action of fluid generated in the thrust bearing gap, the shaft portion of the shaft member has an outer peripheral surface facing the radial bearing gap And an outer peripheral surface region to which the disk hub of the disk device is mounted, and the outer peripheral surface region facing the radial bearing gap and the outer peripheral surface region to which the disk hub is mounted are simultaneously ground, and the roundness is increased. A configuration of 0.5 μm or less is provided.

軸部材の軸部は、ラジアル軸受隙間に臨む外周面領域とディスクハブが装着される外周面領域とが同時研削されることにより、両外周面領域の同軸度が高められる。しかも、両外周面領域の真円度が0.5μm以下に規制されている。そのため、本発明の動圧軸受装置は、ディスク装置のスピンドルモータに組み込まれたときに、ディスクハブを高い回転精度で回転支持することができる。   In the shaft portion of the shaft member, the outer peripheral surface region facing the radial bearing gap and the outer peripheral surface region to which the disk hub is mounted are ground simultaneously, so that the coaxiality of both outer peripheral surface regions is increased. In addition, the roundness of both outer peripheral surface regions is regulated to 0.5 μm or less. Therefore, the dynamic pressure bearing device of the present invention can rotatably support the disc hub with high rotational accuracy when incorporated in the spindle motor of the disc device.

本発明の動圧軸受装置における軸部材は、例えば、軸部材を一対のプレート部材により軸方向両端で平面接触支持して、軸心廻りに回転させつつ、軸部材の軸部外周面を支持部材で支持しながら該外周面を砥石で研削することにより製造することができる。   The shaft member in the hydrodynamic bearing device of the present invention is, for example, a support member that supports the shaft outer peripheral surface of the shaft member while rotating the shaft member around the shaft center by supporting the shaft member in a plane contact at both axial ends by a pair of plate members. It can manufacture by grinding this outer peripheral surface with a grindstone, supporting by.

ここで、「軸部材を一対のプレート部材により軸方向両端で平面接触支持」するとは、軸部材におけるフランジ部の基端面(フランジ部の反軸部側の端面)を、一方のプレート部材、例えばバッキングプレートにより平面接触支持し、また軸部材における軸部の先端面を、他方のプレート部材、例えばプレッシャプレートにより平面接触支持して、軸部材を両プレート部材の相互間に適度な挟持力で挟み込むことを意味する。   Here, “planar contact support of the shaft member at both axial ends by a pair of plate members” means that the base end surface of the flange portion of the shaft member (the end surface on the side opposite to the shaft portion of the flange portion) is connected to one plate member, for example, A flat plate is supported by the backing plate, and the tip surface of the shaft portion of the shaft member is supported by a flat surface by the other plate member, for example, a pressure plate, and the shaft member is sandwiched between the two plate members with an appropriate clamping force. Means that.

このような構成によれば、軸部材の両端面が一対のプレート部材によりそれぞれ平面接触支持されていることから、従来のセンタ支持による場合と比較して、各端面と各プレート部材との接触面積が広くなると共に、各端面と各プレート部材との間に滑りが生じ難くなり、大きな挟持力を得る上で好ましい接触状態となる。したがって、軸部材が軸心廻りに回転する場合の周速度を充分に高めることができ、これにより研削効率ひいては作業能率が向上する。しかも、軸部材の軸方向両端が、従来のようにセンタ支持されるのではなく、平面接触支持されることから、軸部材の回転時に振れ回りが発生し難くなり、軸部外周面を高品位に研削する上で有利となる。なお、軸部材の軸部外周面を支持する支持部材を、軸部材の軸方向略中央部に配置させれば、軸部外周面の軸方向略全長に亘って砥石を押し当てる形式の研削加工を安定して行う上で有利となり、また支持部材の個数は、特に限定されるわけではないが、砥石と対向する位置(砥石からの押し当て力を受け得る位置)に1個または2個配設することが好ましい。   According to such a configuration, since both end surfaces of the shaft member are supported in plane contact by the pair of plate members, the contact area between each end surface and each plate member as compared with the case of the conventional center support. Becomes wider, and slippage hardly occurs between each end face and each plate member, and a favorable contact state is obtained in order to obtain a large clamping force. Therefore, the peripheral speed when the shaft member rotates around the shaft center can be sufficiently increased, thereby improving the grinding efficiency and the work efficiency. Moreover, since both ends of the shaft member in the axial direction are not center-supported as in the prior art but are supported in a plane contact, the shaft member is less likely to sway during rotation, and the shaft outer peripheral surface is of high quality. This is advantageous for grinding. In addition, if the support member that supports the outer peripheral surface of the shaft member is disposed at the substantially central portion in the axial direction of the shaft member, a grinding process that presses the grindstone over the entire axial length of the outer peripheral surface of the shaft member. The number of support members is not particularly limited, but one or two support members are arranged at positions facing the grindstone (positions where the pressing force from the grindstone can be received). It is preferable to install.

この場合、少なくとも軸部材のフランジ部(詳しくは、フランジ部の反軸部側の端面)に平面接触するプレート部材は、その接触面の回転中心部所定領域に逃げ部を有していることが好適である。すなわち、研削加工に先立って、軸部材の端面の切削加工を行う場合には、軸部材の回転時にその端面の外周部については周速度が相対的に高いため、切削工具で適切な切削を行うことができるが、その端面の回転中心部については周速度が相対的に低いため、充分な切削を行うことができない。このため、切削加工を終えた軸部材の端面(特に、フランジ部の端面)における回転中心部近傍には、凸状部が存在するという事態を招く。そこで、上述のように、少なくともフランジ部の端面と平面接触するプレート部材の接触面の回転中心部所定領域に、逃げ部を形成しておけば、切削時にその端面に形成された凸状部がプレート部材に接触することを回避でき、適切な平面接触状態を確保することができる。   In this case, at least the plate member that is in plane contact with the flange portion of the shaft member (specifically, the end surface on the side opposite to the shaft portion of the flange portion) may have a relief portion in a predetermined region of the rotation center portion of the contact surface. Is preferred. That is, when cutting the end face of the shaft member prior to grinding, the peripheral speed of the outer peripheral portion of the end face is relatively high when the shaft member is rotated, and therefore appropriate cutting is performed with a cutting tool. However, since the peripheral speed of the rotation center portion of the end face is relatively low, sufficient cutting cannot be performed. For this reason, the situation where a convex part exists in the rotation center part vicinity in the end surface (especially end surface of a flange part) of the shaft member which finished the cutting process is caused. Therefore, as described above, if a relief portion is formed in a predetermined region of the rotation center portion of the contact surface of the plate member that is in flat contact with the end surface of the flange portion, the convex portion formed on the end surface during cutting is formed. Contact with the plate member can be avoided, and an appropriate plane contact state can be ensured.

また、フランジ部の外径Dに比して、該フランジ部に平面接触するプレート部材の接触面の外径dが小さく設定されていることが好適である。このようにすれば、プレート部材の接触面をフランジ径と同径程度にした場合と比較して、接触面の単位面積当りに作用する挟持圧力が大きくなる等の理由により、接触面に滑りが生じ難くなると共に、軸部側の端面の支持状態との差異が少なくなるため、バランス良く安定して軸部材をその両端で支持することが可能となる。   In addition, it is preferable that the outer diameter d of the contact surface of the plate member that is in flat contact with the flange portion is set smaller than the outer diameter D of the flange portion. In this way, compared to the case where the contact surface of the plate member is about the same diameter as the flange diameter, the contact surface slips due to the increased clamping pressure acting per unit area of the contact surface. It becomes difficult to occur, and the difference from the support state of the end surface on the shaft portion side is reduced, so that the shaft member can be supported at both ends stably in a balanced manner.

以上の構成において、プレート部材のフランジ部への接触部分は、弾性部材により弾性支持されていることが好ましい。この場合、プレート部材のフランジ部への接触部分は、剛性の高い例えば金属製のプレートで構成することが好適である。このようにすれば、弾性部材が適宜弾性変形することにより、プレート部材の前記接触部分は、フランジ部の当該接触部全域に亘って隙間なく平面接触できることになり、フランジ部に対する平面接触支持の状態が安定することから、精度良く軸部の外周面を研削することが可能となる。   In the above configuration, the contact portion of the plate member with the flange portion is preferably elastically supported by the elastic member. In this case, it is preferable that the contact portion of the plate member with the flange portion is composed of, for example, a metal plate having high rigidity. In this way, the elastic member is appropriately elastically deformed, so that the contact portion of the plate member can be brought into flat contact with no gap over the entire contact portion of the flange portion, and is in a state of planar contact support with respect to the flange portion. Therefore, the outer peripheral surface of the shaft portion can be ground with high accuracy.

また、支持部材は、軸部材の軸部外周面をその軸心方向の2/3以上の範囲に亘って支持していることが好ましい。このようにすれば、砥石からの押圧力を軸心方向の広範囲に亘って支持部材で均一に支持できることになり、軸部材の軸部にガタツキ或いは振れを生じさせることなく、高精度にその外周面を研削することが可能となる。   Moreover, it is preferable that the supporting member is supporting the axial part outer peripheral surface of a shaft member over the range of 2/3 or more of the axial center direction. In this way, the pressing force from the grindstone can be uniformly supported by the support member over a wide range in the axial direction, and the outer periphery of the shaft member can be accurately reproduced without causing rattling or vibration in the shaft portion of the shaft member. It becomes possible to grind the surface.

この場合、上述のように、軸部材の外周面の研削を行う工程に加えて、フランジ部の軸部側の端面と反軸部側の端面とをそれぞれ研削する工程を含む場合には、反軸部側の端面の研削を、軸部側の端面の研削に先立って行うことが好適である。このようにすれば、先ずフランジ部の反軸部側の端面を研削してその端面を高精度に仕上げた後、その仕上げられた端面を支持部材で支持しながらフランジ部の軸部側の端面を研削できることになるため、フランジ部の反軸部側および軸部側の両端面を高精度に研削できることになる。一方、これとは逆に、仮にフランジ部の軸部側の端面を先に研削しても、この端面がフランジ部の反軸部側の端面の研削に関与するわけではないため、研削により高精度に仕上げられたフランジ部の軸部側の端面を有効利用できなくなる。したがって、上述のように、フランジ部の反軸部側の端面を先に研削すれば、この端面を有効利用でき、研削加工順序が適切なものとなる。   In this case, as described above, in addition to the step of grinding the outer peripheral surface of the shaft member, when including the step of grinding the end surface on the shaft portion side and the end surface on the opposite shaft portion side of the flange portion, It is preferable that the end surface on the shaft side is ground before the end surface on the shaft portion side is ground. In this way, the end surface of the flange portion on the side opposite to the shaft portion is first ground to finish the end surface with high accuracy, and then the end surface on the shaft portion side of the flange portion is supported while the finished end surface is supported by the support member. Therefore, both end surfaces of the flange portion on the opposite shaft side and the shaft portion side can be ground with high accuracy. On the other hand, if the end surface on the shaft side of the flange portion is ground first, this end surface does not participate in the grinding of the end surface on the opposite shaft portion side of the flange portion. The end face on the shaft part side of the flange part finished with precision cannot be used effectively. Therefore, as described above, if the end surface of the flange portion on the side opposite to the shaft portion is ground first, this end surface can be used effectively, and the grinding processing sequence becomes appropriate.

本発明によれば、ディスク装置のスピンドルモータに組み込まれたときに、ディスクハブを高い回転精度で回転支持可能な動圧軸受装置を提供することができる。   According to the present invention, it is possible to provide a hydrodynamic bearing device capable of rotating and supporting a disk hub with high rotational accuracy when incorporated in a spindle motor of the disk device.

以下、本発明の実施形態について説明する。図1〜図6は、本発明に係る動圧型軸受装置の軸部材における研削工程の実施状況を示す概略図、図8は、動圧型軸受装置の内部構造を示す拡大縦断正面図である。   Hereinafter, embodiments of the present invention will be described. 1 to 6 are schematic views showing an implementation state of a grinding process in a shaft member of a hydrodynamic bearing device according to the present invention, and FIG. 8 is an enlarged longitudinal front view showing an internal structure of the hydrodynamic bearing device.

説明の便宜上、前記製造方法における研削工程の実施状況の説明に先立って、先ず動圧型軸受装置について詳細に説明する。   For the convenience of explanation, the dynamic pressure type bearing device will be described in detail before explaining the implementation status of the grinding step in the manufacturing method.

この動圧型軸受装置1は、図8に示すように、一端に開口部7aを有する有底円筒状のハウジング7と、該ハウジング7の内周に固定された円筒状の軸受スリーブ8と、該軸受スリーブ8の内周に配設された軸部材2と、ハウジング7の開口部7aに固定されたシール部材10とを主たる構成要素とする。   As shown in FIG. 8, the hydrodynamic bearing device 1 includes a bottomed cylindrical housing 7 having an opening 7a at one end, a cylindrical bearing sleeve 8 fixed to the inner periphery of the housing 7, The main component is the shaft member 2 disposed on the inner periphery of the bearing sleeve 8 and the seal member 10 fixed to the opening 7a of the housing 7.

前記ハウジング7は、例えば真ちゅう等の軟質金属材料で形成され、円筒状の側部7bと底部7cとを備えると共に、底部7cの内底面7c1のスラスト軸受面となる領域には、例えば図外のスパイラル形状の動圧溝が形成される。なお、この実施形態において、ハウジング7は、側部7bと底部7cとを別体構造とし、底部7cとなる蓋状部材を側部7bの他端開口部に加締めて接着等の手段で固定しているが、側部7bと底部7cとを一体構造としてもよい。   The housing 7 is made of, for example, a soft metal material such as brass, and includes a cylindrical side portion 7b and a bottom portion 7c. A spiral-shaped dynamic pressure groove is formed. In this embodiment, the housing 7 has a side part 7b and a bottom part 7c separated from each other, and a lid-like member to be the bottom part 7c is fastened to the other end opening of the side part 7b and fixed by means such as adhesion. However, the side portion 7b and the bottom portion 7c may be integrated.

前記軸部材2は、例えばステンレス鋼等の金属材料で形成され、軸部2aと、該軸部2aの下端に一体または別体に設けられたフランジ部2bとを備え、軸部2aの外周面に、ぬすみ溝2a1とテーパ面2a2とが形成されている。このテーパ面2a2は、上方に向かって漸次縮径する所定のテーパ角を有すると共に、このテーパ面2a2の直上方には、円筒面2a3が連続して形成されている。   The shaft member 2 is formed of a metal material such as stainless steel, for example, and includes a shaft portion 2a and a flange portion 2b provided integrally or separately at the lower end of the shaft portion 2a, and an outer peripheral surface of the shaft portion 2a. Further, a relief groove 2a1 and a tapered surface 2a2 are formed. The tapered surface 2a2 has a predetermined taper angle that gradually decreases toward the upper side, and a cylindrical surface 2a3 is continuously formed immediately above the tapered surface 2a2.

前記軸受部材8は、例えば多孔質体、特に銅を主成分とする焼結金属で形成され、その内部の気孔に潤滑油が含浸されて含油軸受とされている。そして、軸受部材8の内周面8aには、上下二つのラジアル軸受面R1、R2が形成され、これらのラジアル軸受面R1、R2は間隔部R3を挟んで軸方向に離隔しており、何れの軸受面R1、R2も図外のヘリングボ−ン形状の動圧溝を備えている。また、間隔部R3は、軸部2aのぬすみ溝2a1と対向し、両者の間の隙間はラジアル軸受隙間よりも大きくなるように設定されている。なお、この軸受部材8の底面8cのスラスト軸受面となる領域にも、例えば図外のスパイラル形状の動圧溝が形成されている。   The bearing member 8 is made of, for example, a porous body, particularly a sintered metal containing copper as a main component, and the internal pores are impregnated with lubricating oil to form an oil-impregnated bearing. The inner peripheral surface 8a of the bearing member 8 is formed with two upper and lower radial bearing surfaces R1 and R2, and these radial bearing surfaces R1 and R2 are separated in the axial direction with a spacing R3 interposed therebetween. The bearing surfaces R1 and R2 are also provided with herringbone-shaped dynamic pressure grooves not shown in the drawing. Further, the spacing portion R3 is set so as to face the thin groove 2a1 of the shaft portion 2a, and the gap between them is set to be larger than the radial bearing gap. In addition, a spiral-shaped dynamic pressure groove (not shown), for example, is also formed in the region that becomes the thrust bearing surface of the bottom surface 8c of the bearing member 8.

前記シール部材10は、環状に形成されたものであって、ハウジング7の開口部7aの内周面に圧入および/または接着等の手段で固定されると共に、この実施形態では、シール部材10の内周面10aが円筒状に形成され、シール部材10の下側端面10bが軸受部材8の上側端面8bに当接している。そして、シール部材10の内周面10aは、軸部2aのテーパ面2a2と所定の隙間を介して対向しており、この対向両者間に、ハウジング7の上方に向かって漸次拡大するテーパ形状のシール空間Sが形成されている。   The seal member 10 is formed in an annular shape, and is fixed to the inner peripheral surface of the opening 7a of the housing 7 by means such as press-fitting and / or adhesion. In this embodiment, the seal member 10 The inner peripheral surface 10 a is formed in a cylindrical shape, and the lower end surface 10 b of the seal member 10 is in contact with the upper end surface 8 b of the bearing member 8. The inner peripheral surface 10a of the seal member 10 is opposed to the tapered surface 2a2 of the shaft portion 2a via a predetermined gap, and a tapered shape that gradually expands upward from the housing 7 is provided between the opposed surfaces. A seal space S is formed.

次に、上述の動圧型軸受装置1の製造方法、詳しくは、該動圧型軸受装置1の構成要素である軸部材2の研削工程の一実施状況について説明する。   Next, a manufacturing method of the above-described dynamic pressure type bearing device 1, specifically, an implementation status of the grinding process of the shaft member 2 that is a component of the dynamic pressure type bearing device 1 will be described.

図1に示すように、軸部材2におけるフランジ部2bの基端面(反軸部2a側の端面)2b2は、一方のプレート部材であるバッキングプレート11の先端面(以下、第一先端面という)11aに平面接触し、また軸部材2における軸部2aの先端面2a4は、他方のプレート部材であるプレッシャプレート12の先端面(以下、第二先端面という)12aに平面接触している。この場合、前記バッキングプレート11は、円柱状体であって、その第一先端面11aは、円形の輪郭を有する平面として形成され、また前記プレッシャプレート12も同様に、円柱状体であって、その第二先端面12aは、円形の輪郭を有する平面として形成されている。   As shown in FIG. 1, the base end surface (end surface on the side opposite to the shaft 2a) 2b2 of the flange portion 2b of the shaft member 2 is a front end surface (hereinafter referred to as a first front end surface) of the backing plate 11 which is one plate member. The tip surface 2a4 of the shaft portion 2a of the shaft member 2 is in planar contact with the tip surface (hereinafter referred to as the second tip surface) 12a of the pressure plate 12 which is the other plate member. In this case, the backing plate 11 is a cylindrical body, the first tip surface 11a is formed as a plane having a circular outline, and the pressure plate 12 is also a cylindrical body, The second tip surface 12a is formed as a flat surface having a circular contour.

そして、研削加工時には、バッキングプレート11とプレッシャプレート12との相互間に軸部材2が挟み込まれた状態で、両プレート11,12と共に軸部材2が矢印Aで示すように軸心Z廻りに回転する。この場合、軸部材2に対しては、バッキングプレート11および/またはプレッシャプレート12から軸心Z廻りの回転駆動力が付与され、且つプレッシャプレート12から軸心Z方向に沿う挟持力(押圧力)が付与される。   During grinding, the shaft member 2 rotates around the axis Z as indicated by the arrow A together with the plates 11 and 12 with the shaft member 2 being sandwiched between the backing plate 11 and the pressure plate 12. To do. In this case, a rotational driving force around the axis Z is applied to the shaft member 2 from the backing plate 11 and / or the pressure plate 12, and a clamping force (pressing force) along the axis Z direction from the pressure plate 12 is applied. Is granted.

このような状態の下で、軸部材2における軸部2aの外周面、詳しくは軸部2aの軸方向略中央部にぬすみ溝2a1に隣接して形成されている大径非テーパ部2axの外周面が、支持部材(シュー)13によって支持され、この支持部材13の軸心Zを挟んで反対側から、軸部2aの軸方向略全長に亘る砥面形状を有する砥石14が軸部2aの外周面略全長に亘って押し当てられる。   Under such a state, the outer periphery of the shaft portion 2a of the shaft member 2, more specifically, the outer periphery of the large-diameter non-tapered portion 2ax formed adjacent to the thin groove 2a1 at the substantially central portion in the axial direction of the shaft portion 2a. The surface is supported by a support member (shoe) 13, and a grindstone 14 having a grinding surface shape extending substantially along the axial length of the shaft portion 2a from the opposite side across the axis Z of the support member 13 is formed on the shaft portion 2a. It is pressed over substantially the entire outer peripheral surface.

これにより、軸部材2は、充分な周速度(例えば1500rpm程度)の回転を付与されつつ、その軸部2aの外周面が支持部材13により支持されながら、不当な振れ回りを生じることなく、該外周面が砥石14により高効率で研削される。   As a result, the shaft member 2 is rotated at a sufficient peripheral speed (for example, about 1500 rpm), and the outer peripheral surface of the shaft portion 2a is supported by the support member 13, so that the shaft member 2 does not cause unfair swinging. The outer peripheral surface is ground with high efficiency by the grindstone 14.

この場合、図2に示すように、バッキングプレート11における第一先端面11aの外径dは、軸部材2におけるフランジ部2bの基端面2b2の外径Dよりも小径とされていると共に、この第一先端面11aの回転中心部所定領域には、円形の逃げ部(凹部)11bが形成されている。   In this case, as shown in FIG. 2, the outer diameter d of the first distal end surface 11a of the backing plate 11 is smaller than the outer diameter D of the base end surface 2b2 of the flange portion 2b of the shaft member 2. A circular relief portion (concave portion) 11b is formed in a predetermined region of the rotation center portion of the first tip surface 11a.

したがって、この研削加工に先立つ軸部材2の切削加工時に、フランジ部2bの基端面2b2における回転中心部の周速度が低いことに起因して、図3に示すように該基端面2b2の中心部に凸状部2bxが形成されていても、この凸状部2bxは、逃げ部11bの内部空間に収容されることになるため、フランジ部2bの基端面2b2とバッキングプレート11の第一先端面11aとの適切な平面接触状態を確保できる。なお、プレッシャプレート12における第二先端面12aについても、上記と同様にして逃げ部を形成してもよい。   Therefore, at the time of cutting of the shaft member 2 prior to this grinding, the central portion of the base end surface 2b2 as shown in FIG. 3 is caused by the low peripheral speed of the rotation center portion of the base end surface 2b2 of the flange portion 2b. Even if the convex portion 2bx is formed, the convex portion 2bx is accommodated in the internal space of the escape portion 11b, so the base end surface 2b2 of the flange portion 2b and the first front end surface of the backing plate 11 Appropriate planar contact with 11a can be ensured. Note that an escape portion may be formed on the second tip surface 12a of the pressure plate 12 in the same manner as described above.

図4は、研削工程の実施に使用される研削装置の支持部材13とバッキングプレート11とが上記と相違する場合の研削実施状況を示す概略図である。なお、同図において、既述の図1〜図3に示す構成要素と共通のものについては同一符号を付し、以下においてはその詳細な説明を省略する。   FIG. 4 is a schematic view showing a grinding state when the support member 13 and the backing plate 11 of the grinding apparatus used for carrying out the grinding step are different from the above. In the figure, the same components as those shown in FIGS. 1 to 3 are denoted by the same reference numerals, and detailed description thereof will be omitted below.

図4に示すように、支持部材13は、その軸心Zに平行な長さが、軸部材2の軸部2aの軸心方向長さに対して、2/3以上、例えば3/4程度とされており、したがって支持部材13は軸部2aの外周面に対し、その軸心方向の2/3以上の範囲に亘って接触している。この場合、支持部材13の軸部2a外周面に対する接触状態は、必ずしも図示のように支持部材13の先端全域が軸部2a外周面に接触している必要はなく、支持部材13の先端が部分的に複数箇所で接触していてもよい。但し、この場合は、支持部材13の一端の接触部から他端の接触部までの接触範囲が、軸部2a外周面の軸心方向の2/3以上であることが要求される。   As shown in FIG. 4, the support member 13 has a length parallel to the axial center Z of 2/3 or more, for example, about 3/4, with respect to the axial length of the shaft portion 2a of the shaft member 2. Accordingly, the support member 13 is in contact with the outer peripheral surface of the shaft portion 2a over a range of 2/3 or more in the axial direction. In this case, the contact state of the support member 13 with respect to the outer peripheral surface of the shaft portion 2a does not necessarily require that the entire tip end of the support member 13 is in contact with the outer peripheral surface of the shaft portion 2a as shown in the figure. It may be in contact at multiple locations. However, in this case, the contact range from the contact portion at one end of the support member 13 to the contact portion at the other end is required to be 2/3 or more in the axial direction of the outer peripheral surface of the shaft portion 2a.

更に、同図に示すように、バッキングプレート11は、フランジ部2bの基端面2b2に平面接触する接触部分である金属製のプレート11xが、ゴムや樹脂等でなる弾性部材11yを介してバッキングプレート11の基部に弾性支持されている。したがって、弾性部材11yが適宜弾性変形することにより、プレート11xはフランジ部2bの基端面2b2に常に密接した状態を維持でき、安定した平面接触支持状態が得られる。   Further, as shown in the figure, the backing plate 11 has a metal plate 11x, which is a contact portion that makes a flat contact with the base end surface 2b2 of the flange portion 2b, and a backing plate 11 via an elastic member 11y made of rubber, resin, or the like. 11 is elastically supported at the base. Accordingly, when the elastic member 11y is appropriately elastically deformed, the plate 11x can always be kept in close contact with the base end surface 2b2 of the flange portion 2b, and a stable planar contact support state can be obtained.

図7は、フランジ部2bの基端面2b2における平面度(μm)の狂いに対する研削加工後の軸部2a外周面の真円度(μm)を、既述の図1示す状況での研削加工によるものと、図4に示す状況での研削加工によるものとについて、比較した結果を示すグラフである。なお、この試験に際しては、試験ワーク(軸部材2)として、材質がステンレス(HV580)、全長が18mm、軸部径が4.5mm、フランジ部径が7mm、フランジ部厚みが1.5mmのものを使用し、砥石としてはアルミナ系砥石を使用した。このグラフにおいて、×印および符号A1で示す特性線は、既述の図1に示す研削状況による結果であり、また○印および符号A2で示す特性線は、図4に示す研削状況による結果である。この場合、「平面度」とは、測定表面における最も突出した部分と最も窪んだ部分との間の高低差を意味する。また、「真円度」とは、軸部2a外周面の幾何学真円からの狂いの大きさを意味する。   FIG. 7 shows the roundness (μm) of the outer peripheral surface of the shaft portion 2a after grinding with respect to the flatness (μm) of the base end surface 2b2 of the flange portion 2b. It is a graph which shows the result compared with what was by the grinding process in the condition shown in FIG. In this test, the test workpiece (shaft member 2) is made of stainless steel (HV580), the total length is 18 mm, the shaft diameter is 4.5 mm, the flange diameter is 7 mm, and the flange thickness is 1.5 mm. And an alumina-based grindstone was used as the grindstone. In this graph, the characteristic line indicated by x and symbol A1 is the result of the grinding situation shown in FIG. 1, and the characteristic line indicated by ○ and symbol A2 is the result of the grinding situation shown in FIG. is there. In this case, “flatness” means a difference in height between the most protruding part and the most depressed part on the measurement surface. Further, “roundness” means the magnitude of deviation from the geometric perfect circle of the outer peripheral surface of the shaft portion 2a.

このグラフによれば、図4に示すようにバッキングプレート11に弾性部材11yを付設し、且つ支持部材13により軸部2a外周面を軸心方向の2/3以上で支持することにより、フランジ部2bの基端面2b2の平面度の影響を受け難くなって、径方向のガタツキ(振れ)が殆ど生じなくなることから、軸部2a外周面が高精度に研削されることが把握できる。詳しくは、この手法では、フランジ部2bの基端面2b2の平面度が3μm以下であれば、軸部2aの真円度を少なくとも0.5μm以下とすることが可能である。これに対して、図1に示すように弾性部材を配設せず、且つ支持部材13により軸部2a外周面を軸心方向の1/5以下で支持すれば、フランジ部2bの基端面2b2の平面度が2.5μm以上となった場合に、軸部2a外周面の真円度が1μm程度以上となる。この場合に、高精度な真円度を得るには、フランジ部2bの基端面2b2の平面度を1.0μm以下としておく必要がある。   According to this graph, as shown in FIG. 4, an elastic member 11y is attached to the backing plate 11, and the outer peripheral surface of the shaft portion 2a is supported by the support member 13 at 2/3 or more in the axial direction. Since it becomes difficult to be affected by the flatness of the base end surface 2b2 of 2b and almost no radial backlash (vibration) occurs, it can be understood that the outer peripheral surface of the shaft portion 2a is ground with high accuracy. Specifically, in this method, if the flatness of the base end surface 2b2 of the flange portion 2b is 3 μm or less, the roundness of the shaft portion 2a can be at least 0.5 μm or less. On the other hand, as shown in FIG. 1, if the elastic member is not provided and the outer peripheral surface of the shaft portion 2a is supported by the support member 13 at 1/5 or less of the axial direction, the base end surface 2b2 of the flange portion 2b. When the flatness is 2.5 μm or more, the roundness of the outer peripheral surface of the shaft portion 2a is about 1 μm or more. In this case, in order to obtain highly accurate roundness, the flatness of the base end surface 2b2 of the flange portion 2b needs to be 1.0 μm or less.

一方、この軸部材2におけるフランジ部2bの先端面(軸部2a側の端面)2b1と基端面2b2との研削加工は、以下のようにして行われる。   On the other hand, grinding of the distal end surface (end surface on the shaft portion 2a side) 2b1 and the base end surface 2b2 of the flange portion 2b in the shaft member 2 is performed as follows.

先ず、図5に示すように、軸部材2における軸部2aの先端面2a4を先端支持プレート15により支持すると共に、軸部2aの外周面に接触する回転ロール(図示略)に連動して軸部材2を回転させる。そして、軸部2aの外周面、詳しくは、ぬすみ溝2a1の両側に隣接して形成されている大径非テーパ部2ax,2axの外周面を、支持部材(シュー)16で支持しながら、フランジ部2bの基端面2b2に砥石17を押し当てることにより研削加工を施す。   First, as shown in FIG. 5, the tip surface 2a4 of the shaft portion 2a of the shaft member 2 is supported by the tip support plate 15, and the shaft is linked to a rotating roll (not shown) contacting the outer peripheral surface of the shaft portion 2a. The member 2 is rotated. Then, while supporting the outer peripheral surface of the shaft portion 2a, more specifically, the outer peripheral surfaces of the large-diameter non-tapered portions 2ax and 2ax formed adjacent to both sides of the thinning groove 2a1, the support member (shoe) 16 supports the flange. Grinding is performed by pressing the grindstone 17 against the base end face 2b2 of the portion 2b.

このようにして、フランジ部2bの基端面2b2の研削を終えた後、図6に示すように、軸部材2におけるフランジ部2bの基端面2b2を基端支持プレート18により支持すると共に、上記と同様に軸部2aの外周面に接触する回転ロール(図示略)に連動して軸部材2を回転させる。そして、上記と同様にして軸部2aの外周面を支持部材(シュー)19で支持しながら、フランジ部2bの先端面2b1に砥石20を押し当てることにより研削加工を施す。   After the grinding of the base end surface 2b2 of the flange portion 2b in this way, the base end surface 2b2 of the flange portion 2b in the shaft member 2 is supported by the base end support plate 18 as shown in FIG. Similarly, the shaft member 2 is rotated in conjunction with a rotating roll (not shown) contacting the outer peripheral surface of the shaft portion 2a. Then, grinding is performed by pressing the grindstone 20 against the tip end surface 2b1 of the flange portion 2b while supporting the outer peripheral surface of the shaft portion 2a with a support member (shoe) 19 in the same manner as described above.

以上のような各処理を行った後は、軸部材2についての仕上げ処理を行い、他の構成部品と共に組み立てた後、注油処理や拭き取り処理等の所定の各処理を行うことにより、既に図8に基づいて説明した動圧型軸受装置1の完成品が得られる。そして、この完成品としての動圧型軸受装置1は、以下に示すようにして、モータの一構成要素として使用される。   After performing the above-described processes, the finishing process for the shaft member 2 is performed, and after assembling together with other components, predetermined processes such as an oiling process and a wiping process are performed, and thus, FIG. A finished product of the hydrodynamic bearing device 1 described based on the above is obtained. The hydrodynamic bearing device 1 as a finished product is used as one component of the motor as described below.

すなわち、図9に例示する情報機器用のスピンドルモータ30は、HDD等のディスク駆動装置に用いられるもので、上述の動圧型軸受装置1の軸部材2に装着されたディスクハブ31と、例えば半径方向のギャップを介して対向させたモータステータ32およびモータロータ33とを備えている。ステータ32はケーシング34の外周に取付けられ、ロータ33はディスクハブ31の内周に取付けられる。動圧型軸受装置1のハウジング7は、ケーシング34の内周に装着される。ディスクハブ31には磁気ディスク等のディスクD1が一又は複数枚保持される。そして、ステータ32に通電することにより、ステータ32とロータ33との間の励磁力でロータ33が回転し、これによりディスクハブ31および軸部材2が一体となって回転するようになっている。   That is, the spindle motor 30 for information equipment illustrated in FIG. 9 is used for a disk drive device such as an HDD, and the disk hub 31 mounted on the shaft member 2 of the dynamic pressure type bearing device 1 described above, for example, a radius A motor stator 32 and a motor rotor 33 are provided to face each other with a gap in the direction. The stator 32 is attached to the outer periphery of the casing 34, and the rotor 33 is attached to the inner periphery of the disk hub 31. The housing 7 of the hydrodynamic bearing device 1 is mounted on the inner periphery of the casing 34. The disk hub 31 holds one or more disks D1 such as magnetic disks. When the stator 32 is energized, the rotor 33 is rotated by the exciting force between the stator 32 and the rotor 33, whereby the disk hub 31 and the shaft member 2 are rotated together.

本発明の実施形態に係る動圧型軸受装置の製造方法の一実施状況を示す概略正面図である。It is a schematic front view which shows one implementation condition of the manufacturing method of the dynamic pressure type bearing device which concerns on embodiment of this invention. 本発明の実施形態に係る動圧型軸受装置の製造方法の第一実施状況を示す部品配列斜視図である。It is a components arrangement | sequence perspective view which shows the 1st implementation condition of the manufacturing method of the dynamic pressure type bearing device which concerns on embodiment of this invention. 本発明の実施形態に係る動圧型軸受装置の製造方法の第一実施状況を示す要部拡大正面図である。It is a principal part enlarged front view which shows the 1st implementation condition of the manufacturing method of the dynamic pressure type bearing device which concerns on embodiment of this invention. 本発明の実施形態に係る動圧型軸受装置の製造方法の第二実施状況を示す概略正面図である。It is a schematic front view which shows the 2nd implementation condition of the manufacturing method of the dynamic pressure type bearing device which concerns on embodiment of this invention. 本発明の実施形態に係る動圧型軸受装置の製造方法の第三実施状況を示す概略正面図である。It is a schematic front view which shows the 3rd implementation condition of the manufacturing method of the dynamic pressure type bearing device which concerns on embodiment of this invention. 本発明の実施形態に係る動圧型軸受装置の製造方法の第四実施状況を示す概略正面図である。It is a schematic front view which shows the 4th implementation condition of the manufacturing method of the dynamic pressure type bearing device which concerns on embodiment of this invention. 本発明の実施形態に係る製造方法により製作された軸部材の精度を示すグラフである。It is a graph which shows the precision of the shaft member manufactured by the manufacturing method concerning the embodiment of the present invention. 本発明の実施形態に係る製造方法により製作された動圧型軸受装置を示す縦断正面図である。It is a vertical front view which shows the dynamic pressure type bearing apparatus manufactured by the manufacturing method which concerns on embodiment of this invention. 本発明の実施形態に係る製造方法により製作された動圧型軸受装置がスピンドルモータに組み込まれた状態を示す概略縦断正面図である。It is a schematic longitudinal cross-sectional front view which shows the state in which the dynamic pressure type bearing apparatus manufactured by the manufacturing method which concerns on embodiment of this invention was integrated in the spindle motor. 本発明の実施形態に係る製造方法により製作される軸部材の単体を示す正面図である。It is a front view which shows the single-piece | unit of the shaft member manufactured by the manufacturing method which concerns on embodiment of this invention. 従来における動圧型軸受装置の製造方法の一実施状況を示す概略正面図である。It is a schematic front view which shows one implementation of the manufacturing method of the conventional dynamic pressure type bearing apparatus.

符号の説明Explanation of symbols

1 動圧型軸受装置
2 軸部材
2a 軸部
2b フランジ部
2b1 フランジ部の先端面(フランジ部の軸部側の端面)
2b2 フランジ部の基端面(フランジ部の反軸部側の端面)
7 ハウジング
11 バッキングプレート(プレート部材)
11a 第一先端面(接触面)
11b 逃げ部
11y 弾性部材
12 プレッシャプレート(プレート部材)
13 支持部材(シュー)
14 砥石
1 Hydrodynamic bearing device 2 Shaft member
2a Shaft
2b Flange
2b1 Flange end surface (end surface on the shaft side of the flange)
2b2 Base end surface of the flange (end surface on the opposite side of the flange)
7 Housing
11 Backing plate (plate member)
11a First tip surface (contact surface)
11b Relief
11y elastic member
12 Pressure plate (plate member)
13 Support member (shoe)
14 Whetstone

Claims (1)

軸部の一端にフランジ部を有する軸部材と、ラジアル軸受隙間に生じる流体の動圧作用で前記軸部をラジアル方向に非接触支持するラジアル軸受部と、スラスト軸受隙間に生じる流体の動圧作用で前記フランジ部をスラスト方向に非接触支持するスラスト軸受部とを備えた動圧軸受装置において、
前記軸部材の軸部は、前記ラジアル軸受隙間に臨む外周面領域と、ディスク装置のディスクハブが装着される外周面領域とを有し、かつ、前記ラジアル軸受隙間に臨む外周面領域と前記ディスクハブが装着される外周面領域とが同時研削され、真円度が0.5μm以下であることを特徴とする動圧軸受装置。
A shaft member having a flange portion at one end of the shaft portion, a radial bearing portion that supports the shaft portion in a non-contact manner in the radial direction by a fluid dynamic pressure effect generated in the radial bearing clearance, and a fluid dynamic pressure effect generated in the thrust bearing clearance In the hydrodynamic bearing device comprising a thrust bearing portion that supports the flange portion in the thrust direction in a non-contact manner,
The shaft portion of the shaft member has an outer peripheral surface region facing the radial bearing gap and an outer peripheral surface region to which a disk hub of a disk device is mounted, and the outer peripheral surface region facing the radial bearing gap and the disc A hydrodynamic bearing device, wherein the outer peripheral surface region to which the hub is mounted is simultaneously ground and the roundness is 0.5 μm or less.
JP2005020058A 2005-01-27 2005-01-27 Hydrodynamic bearing device Pending JP2005127525A (en)

Priority Applications (1)

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JP2005020058A JP2005127525A (en) 2005-01-27 2005-01-27 Hydrodynamic bearing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005020058A JP2005127525A (en) 2005-01-27 2005-01-27 Hydrodynamic bearing device

Related Parent Applications (1)

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JP2002112083A Division JP3990181B2 (en) 2002-04-15 2002-04-15 Manufacturing method of hydrodynamic bearing device

Publications (1)

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Family Applications (1)

Application Number Title Priority Date Filing Date
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130336604A1 (en) * 2011-03-09 2013-12-19 Ntn Corporation Fluid dynamic bearing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130336604A1 (en) * 2011-03-09 2013-12-19 Ntn Corporation Fluid dynamic bearing device
US8926183B2 (en) * 2011-03-09 2015-01-06 Ntn Corporation Fluid dynamic bearing device

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