JP2002061638A - Dynamic pressure type bearing device and manufacturing method thereof - Google Patents
Dynamic pressure type bearing device and manufacturing method thereofInfo
- Publication number
- JP2002061638A JP2002061638A JP2000252944A JP2000252944A JP2002061638A JP 2002061638 A JP2002061638 A JP 2002061638A JP 2000252944 A JP2000252944 A JP 2000252944A JP 2000252944 A JP2000252944 A JP 2000252944A JP 2002061638 A JP2002061638 A JP 2002061638A
- Authority
- JP
- Japan
- Prior art keywords
- dynamic pressure
- shaft portion
- thrust
- bearing
- thrust plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Sliding-Contact Bearings (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、動圧型軸受装置に
関する。この軸受装置は、特に情報機器、例えばHD
D、FDD等の磁気ディスク装置、CD−ROM、DV
D−ROM等の光ディスク装置、MD、MO等の光磁気
ディスク装置などのスピンドルモータ、あるいはレーザ
ビームプリンタ(LBP)のポリゴンスキャナモータな
どのスピンドル支持用として好適である。The present invention relates to a dynamic pressure bearing device. This bearing device is particularly suitable for information equipment such as HD
D, FDD, etc., magnetic disk drive, CD-ROM, DV
It is suitable for supporting a spindle motor such as an optical disk device such as a D-ROM, a magneto-optical disk device such as an MD or MO, or a polygon scanner motor of a laser beam printer (LBP).
【0002】[0002]
【従来の技術】上記各種情報機器のスピンドルモータに
は、高回転精度の他、高速化、低コスト化、低騒音化な
どが求められている。これらの要求性能を決定づける構
成要素の一つに当該モータのスピンドルを支持する軸受
があり、近年では、この種の軸受として、上記要求性能
に優れた特性を有する動圧型軸受の使用が検討され、あ
るいは実際に使用されている。2. Description of the Related Art Spindle motors for various information devices are required to have high rotational accuracy, high speed, low cost, low noise, and the like. One of the components that determine these required performances is a bearing that supports the spindle of the motor.In recent years, as this type of bearing, the use of a dynamic pressure bearing having characteristics excellent in the required performance has been studied. Or they are actually used.
【0003】例えば、HDD等のディスク装置のスピン
ドルモータに組込まれる動圧型軸受装置では、軸部材を
ラジアル方向に回転自在に非接触支持するラジアル軸受
部と、軸部材をスラスト方向に回転自在に非接触支持す
るスラスト軸受部とが設けられ、これら軸受部として、
軸受面に動圧発生用の溝(動圧溝)を有する動圧型軸受
が用いられる。ラジアル軸受部の動圧溝は、ハウジング
や軸受部材の内周面(ラジアル軸受面)又は軸部材の外
周面に形成され、スラスト軸受部の動圧溝は、軸部材に
設けられたスラスト板の両端面、又は、これに対向する
面(スラスト軸受面)にそれぞれ形成される。For example, in a dynamic pressure type bearing device incorporated in a spindle motor of a disk device such as an HDD, a radial bearing portion that rotatably supports a shaft member in a radial direction in a non-contact manner, and a non-rotatable shaft member rotatably in a thrust direction. Thrust bearings for contact and support are provided, and as these bearings,
A dynamic pressure bearing having a groove (dynamic pressure groove) for generating dynamic pressure on a bearing surface is used. The dynamic pressure groove of the radial bearing portion is formed on the inner peripheral surface (radial bearing surface) of the housing or the bearing member or the outer peripheral surface of the shaft member, and the dynamic pressure groove of the thrust bearing portion is formed on the thrust plate provided on the shaft member. It is formed on both end surfaces or on a surface (thrust bearing surface) opposed thereto.
【0004】[0004]
【発明が解決しようとする課題】本発明の目的は、上述
したような動圧型軸受装置において、ラジアル軸受面や
スラスト軸受面の摩耗を抑制し、この種の動圧型軸受装
置の優れた軸受性能を長期にわたって維持させることに
ある。SUMMARY OF THE INVENTION An object of the present invention is to provide a dynamic pressure bearing device as described above in which the radial bearing surface and the thrust bearing surface are prevented from being worn, and this type of dynamic pressure bearing device has excellent bearing performance. Is to be maintained for a long time.
【0005】[0005]
【課題を解決するための手段】上記目的を達成するた
め、本発明は、有底筒状のハウジングと、ハウジングに
挿入され、軸部および、該軸部に設けられたスラスト板
を有する軸部材と、ラジアル軸受隙間に生じる流体の動
圧作用で軸部をラジアル方向に非接触支持するラジアル
軸受部と、スラスト軸受隙間に生じる流体の動圧作用で
スラスト板をスラスト方向に非接触支持するスラスト軸
受部とを備えた動圧型軸受装置を製造する方法であっ
て、軸部の外周面を研削加工した後、軸部の外周面を該
表面よりも大きな表面硬さを有する支持部材で支持しな
がら、スラスト板の端面を研削加工する工程を含む構成
を提供する。To achieve the above object, the present invention provides a shaft member having a bottomed cylindrical housing, a shaft portion inserted into the housing, and a thrust plate provided on the shaft portion. And a radial bearing portion for supporting the shaft portion in a non-contact manner in the radial direction by the dynamic pressure action of the fluid generated in the radial bearing gap, and a thrust for supporting the thrust plate in the thrust direction by the dynamic pressure action of the fluid generated in the thrust bearing gap. A method of manufacturing a dynamic pressure bearing device having a bearing portion, wherein after grinding an outer peripheral surface of a shaft portion, the outer peripheral surface of the shaft portion is supported by a support member having a surface hardness greater than the surface. The present invention also provides a configuration including a step of grinding the end face of the thrust plate.
【0006】上記構成において、軸部を回転させること
によって、軸部の外周面と支持部材との間に摺動を生じ
させる構成とすることができる。In the above configuration, it is possible to provide a configuration in which the shaft is rotated to cause sliding between the outer peripheral surface of the shaft and the support member.
【0007】また、本発明は、有底筒状のハウジング
と、ハウジングに挿入され、軸部および、該軸部に設け
られたスラスト板を有する軸部材と、ラジアル軸受隙間
に生じる流体の動圧作用で軸部をラジアル方向に非接触
支持するラジアル軸受部と、スラスト軸受隙間に生じる
流体の動圧作用でスラスト板をスラスト方向に非接触支
持するスラスト軸受部とを備えた動圧型軸受装置であっ
て、軸部の外周面は、円周方向の研削目を有し、かつ、
該表面の粗さを構成する微小突起が平滑化され、スラス
ト板の端面は、交差状の研削目を有する構成を提供す
る。Further, the present invention provides a cylindrical housing with a bottom, a shaft member inserted into the housing and having a shaft and a thrust plate provided on the shaft, and a dynamic pressure of a fluid generated in a radial bearing gap. A dynamic pressure bearing device comprising: a radial bearing portion that supports a shaft portion in a non-contact manner in a radial direction by an action; and a thrust bearing portion that supports a thrust plate in a non-contact manner in a thrust direction by a dynamic pressure action of a fluid generated in a thrust bearing gap. Then, the outer peripheral surface of the shaft portion has a circumferential grinding stitch, and
The micro projections constituting the surface roughness are smoothed, and the end face of the thrust plate has a cross-shaped grinding line.
【0008】以上の構成において、軸部の外周面の軸方
向表面粗さはISO4287/1に規定された算術平均
偏差Raで0.04μm以下、スラスト板の端面の円周
方向表面粗さは算術平均偏差Raで0.04μm以下、
好ましくは0.01μm以下とするのが好ましい。In the above configuration, the axial surface roughness of the outer peripheral surface of the shaft portion is 0.04 μm or less as an arithmetic mean deviation Ra specified in ISO4287 / 1, and the circumferential surface roughness of the end face of the thrust plate is arithmetic. 0.04 μm or less in average deviation Ra,
Preferably, it is 0.01 μm or less.
【0009】[0009]
【発明の実施の形態】以下、本発明の実施形態について
説明する。Embodiments of the present invention will be described below.
【0010】図1は、この実施形態に係る動圧型軸受装
置1を組み込んだ情報機器用スピンドルモータの一構成
例を示している。このスピンドルモータは、HDD等の
ディスク駆動装置に用いられるもので、軸部材2を回転
自在に非接触支持する動圧型軸受装置1と、軸部材2に
装着されたディスクハブ3と、半径方向のギャップを介
して対向させたモータステータ4およびモータロータ5
とを備えている。ステータ4はケーシング6の外周に取
付けられ、ロータ5はディスクハブ3の内周に取付けら
れる。動圧型軸受装置1のハウジング7は、ケーシング
6の内周に装着される。ディスクハブ3には、磁気ディ
スク等のディスクDが一又は複数枚保持される。ステー
タ4に通電すると、ステータ4とロータ5との間の励磁
力でロータ5が回転し、それによって、ディスクハブ3
および軸部材2が一体となって回転する。FIG. 1 shows an example of the configuration of a spindle motor for information equipment incorporating a dynamic pressure bearing device 1 according to this embodiment. The spindle motor is used in a disk drive device such as an HDD, and includes a dynamic pressure bearing device 1 that rotatably supports a shaft member 2 in a non-contact manner, a disk hub 3 mounted on the shaft member 2, Motor stator 4 and motor rotor 5 opposed to each other via a gap
And The stator 4 is mounted on the outer circumference of the casing 6, and the rotor 5 is mounted on the inner circumference of the disk hub 3. The housing 7 of the dynamic pressure bearing device 1 is mounted on the inner periphery of the casing 6. The disk hub 3 holds one or more disks D such as magnetic disks. When the stator 4 is energized, the rotor 5 is rotated by the exciting force between the stator 4 and the rotor 5, whereby the disk hub 3 is rotated.
And the shaft member 2 rotates integrally.
【0011】図2は、動圧型軸受装置1を示している。
動圧型軸受装置1は、円筒状の内周面7aを有する有底
筒状のハウジング7と、ハウジング7の内周面7aに固
定された円筒状の軸受部材8と、軸部材2と、軸受部材
8の上端面側(ハウジング7の開口側)を密封するシー
ル部材10とを主要な構成要素とする。FIG. 2 shows the dynamic pressure type bearing device 1.
The dynamic pressure type bearing device 1 includes a cylindrical housing 7 having a cylindrical inner peripheral surface 7 a, a cylindrical bearing member 8 fixed to the inner peripheral surface 7 a of the housing 7, the shaft member 2, and a bearing. A main component is a seal member 10 for sealing the upper end surface side of the member 8 (opening side of the housing 7).
【0012】ハウジング7は、例えば真ちゅう等で形成
され、円筒状の側部7bと、底部7cとで構成される。
尚、この実施形態では、ハウジング7の側部7bと底部
7cとを一体構造にしているが、両者を別体構造として
も良い。The housing 7 is formed of, for example, brass, and has a cylindrical side portion 7b and a bottom portion 7c.
In addition, in this embodiment, the side part 7b and the bottom part 7c of the housing 7 are made into an integral structure, but they may be made into separate structures.
【0013】軸部材2は、例えば、ステンレス鋼(SU
S420J2)等で形成され、軸部2aと、軸部2aに
一体又は別体に設けられたスラスト板2bとを備えてい
る。軸部2aは、軸受部材8の内周面8aに所定のラジ
アル軸受隙間S5をもって挿入され、スラスト板2b
は、軸受部材8の下端面8bとハウジング7の底面7c
1との間の空間部に収容される。スラスト板2bの上端
面2b1と軸受部材8の下端面8bとの間、および、ス
ラスト板2bの下端面2b2とハウジング7の底面7c
1との間には、それぞれ、所定のスラスト軸受隙間S
3、S4が設けられる。The shaft member 2 is made of, for example, stainless steel (SU
S420J2) and the like, and includes a shaft portion 2a and a thrust plate 2b integrally or separately provided on the shaft portion 2a. The shaft portion 2a is inserted into the inner peripheral surface 8a of the bearing member 8 with a predetermined radial bearing gap S5, and the thrust plate 2b
Are the lower end surface 8b of the bearing member 8 and the bottom surface 7c of the housing 7.
1 is accommodated in the space between the two. Between the upper end surface 2b1 of the thrust plate 2b and the lower end surface 8b of the bearing member 8, and between the lower end surface 2b2 of the thrust plate 2b and the bottom surface 7c of the housing 7.
1 respectively, a predetermined thrust bearing clearance S
3, S4 is provided.
【0014】軸受部材8は、例えば多孔質材、特に銅−
鉄系の燒結金属で形成され、その内部の気孔に潤滑油又
は潤滑グリースが含浸されて含油軸受とされる。軸受部
材8の内周面8aの、ラジアル軸受面となる領域には動
圧溝が形成される。軸部材2が回転すると、ラジアル軸
受隙間S5に動圧作用が発生し、軸部材2の軸部2aが
ラジアル軸受隙間S5内に形成される潤滑油の油膜によ
ってラジアル方向に回転自在に非接触支持される。これ
により、軸部材2をラジアル方向に回転自在に非接触支
持するラジアル軸受部11が構成される。尚、動圧溝
は、軸部材2の軸部2aの外周面に形成しても良い。The bearing member 8 is made of, for example, a porous material,
It is made of an iron-based sintered metal, and its pores are impregnated with lubricating oil or lubricating grease to form an oil-impregnated bearing. A dynamic pressure groove is formed in a region of the inner peripheral surface 8a of the bearing member 8 to be a radial bearing surface. When the shaft member 2 rotates, a dynamic pressure action is generated in the radial bearing gap S5, and the shaft portion 2a of the shaft member 2 is rotatably and non-contactly supported in the radial direction by a lubricating oil film formed in the radial bearing gap S5. Is done. As a result, a radial bearing 11 that rotatably supports the shaft member 2 in the radial direction in a non-contact manner is configured. The dynamic pressure groove may be formed on the outer peripheral surface of the shaft portion 2a of the shaft member 2.
【0015】スラスト板2bの上端面2b1又は軸受部
材8の下端面8b、および、スラスト板2bの下端面2
b2又はハウジング7の底面7c1のスラスト軸受面と
なる領域には、それぞれ動圧溝が形成される。軸部材2
が回転すると、スラスト軸受隙間S3およびS4に動圧
作用が発生し、軸部材2のスラスト板2bがスラスト軸
受隙間S3、S4内に形成される潤滑油の油膜によって
スラスト方向に回転自在に非接触支持される。これによ
り、軸部材2をスラスト方向に回転自在に非接触支持す
るスラスト軸受部12が構成される。The upper end surface 2b1 of the thrust plate 2b or the lower end surface 8b of the bearing member 8, and the lower end surface 2b of the thrust plate 2b
A dynamic pressure groove is formed in each of the regions b2 and the thrust bearing surface of the bottom surface 7c1 of the housing 7. Shaft member 2
Rotates, a dynamic pressure action is generated in the thrust bearing gaps S3 and S4, and the thrust plate 2b of the shaft member 2 is rotatably non-contacted in the thrust direction by the oil film of the lubricating oil formed in the thrust bearing gaps S3 and S4. Supported. As a result, a thrust bearing portion 12 that rotatably supports the shaft member 2 in the thrust direction in a non-contact manner is configured.
【0016】ラジアル軸受面およびスラスト軸受面の動
圧溝形状は任意に選択することができ、公知のへリング
ボーン型、スパイラル型、ステップ型、多円弧型等の何
れかを選択し、あるいはこれらを適宜組合わせて使用す
ることができる。The shape of the hydrodynamic grooves on the radial bearing surface and the thrust bearing surface can be arbitrarily selected, and any of the well-known herringbone type, spiral type, step type, multi-arc type, or the like can be selected. Can be used in appropriate combination.
【0017】上記構成において、軸部2aの外周面の表
面硬さは軸受部材8の内周面8aよりも大きく、スラス
ト板2bの両端面2b1、2b2の表面硬さは、軸受部
材8の下端面8bおよびハウジング7の底面7c1より
も大きい。例えば、軸部材2は、メッキ処理、浸炭、窒
化、浸炭窒化、その他の熱処理等の表面硬化処理が施さ
れて、軸部2aの外周面およびスラスト板2bの両端面
2b1、2b2の表面硬さがビッカース硬さでHV50
0以上、好ましくはHV500〜550程度に調整され
ている。In the above configuration, the surface hardness of the outer peripheral surface of the shaft portion 2a is larger than that of the inner peripheral surface 8a of the bearing member 8, and the surface hardness of both end surfaces 2b1, 2b2 of the thrust plate 2b is lower than that of the bearing member 8. It is larger than the end face 8b and the bottom face 7c1 of the housing 7. For example, the shaft member 2 is subjected to a surface hardening treatment such as plating, carburizing, nitriding, carbonitriding, and other heat treatments, and the surface hardness of the outer peripheral surface of the shaft portion 2a and the both end surfaces 2b1 and 2b2 of the thrust plate 2b. Is Vickers hardness and HV50
It is adjusted to 0 or more, preferably about HV 500 to 550.
【0018】また、軸部2aの外周面の表面粗さは軸受
部材8の内周面8aよりも小さく、スラスト板2bの両
端面2b1、2b2の表面粗さは、軸受部材8の下端面
8bおよびハウジング7の底面7c1よりも小さい。The surface roughness of the outer peripheral surface of the shaft portion 2a is smaller than that of the inner peripheral surface 8a of the bearing member 8, and the surface roughness of both end surfaces 2b1 and 2b2 of the thrust plate 2b is smaller than the lower surface 8b of the bearing member 8. And smaller than the bottom surface 7c1 of the housing 7.
【0019】軸部材2は、例えば、以下に説明する態様
で製造される。The shaft member 2 is manufactured, for example, in the mode described below.
【0020】まず、鋼材から軸部2aとスラスト板2b
とを一体に有する軸部材2を成形し、この軸部材2に表
面硬化処理を施した後、軸部2aの外周面を研削加工す
る。First, the shaft 2a and the thrust plate 2b are made of steel.
After shaping the shaft member 2 integrally having the shaft member 2 and subjecting the shaft member 2 to a surface hardening treatment, the outer peripheral surface of the shaft portion 2a is ground.
【0021】つぎに、図3に概念的に示すように、軸部
2aの外周面をシュー20で支持しながら、ドライビン
グプレート21によって軸部材2を回転させる。尚、シ
ュー20は、例えば超硬合金、コンバックス等の硬質材
料で形成され、その支持面の表面硬さは軸部2aの外周
面よりも大きい。そして、回転する軸部材2のスラスト
板2bの端面(同図に示す例では上端面2b1)に回転
する砥石22を加圧して、スラスト板2bの端面の研削
加工を行う。Next, as shown conceptually in FIG. 3, the driving member 21 rotates the shaft member 2 while supporting the outer peripheral surface of the shaft portion 2a with the shoe 20. Note that the shoe 20 is formed of a hard material such as a cemented carbide or a CONVAX, and the surface hardness of the support surface is larger than the outer peripheral surface of the shaft portion 2a. Then, the rotating grindstone 22 is pressed against the end surface (the upper end surface 2b1 in the example shown in the figure) of the thrust plate 2b of the rotating shaft member 2, and the end surface of the thrust plate 2b is ground.
【0022】図4に模式的に示すように、上記の製造工
程を経た軸部材2の軸部2aの外周面は、円周方向の研
削目を有し、かつ、該表面の粗さを構成する微小突起が
シュー20の支持面との摺動によって平滑化される。軸
部2aの外周面の軸方向表面粗さは、ISO4287/
1に規定された算出平均偏差Raで0.04μm以下で
あり、また、ISO4287/1に規定された二乗平均
傾斜角Δqは2.0以下である。スラスト板2bの上端
面2b1および下端面2b2は、軸部材2の回転と砥石
22の回転とが複合されて形成された交差状の研削目を
有する(クロスハッチ加工面)。スラスト板2bの上端
面2b1および下端面2b2の円周方向表面粗さは、I
SO4287/1に規定された算出平均偏差Raで0.
04μm以下、好ましくは0.01μm以下である。As schematically shown in FIG. 4, the outer peripheral surface of the shaft portion 2a of the shaft member 2 that has undergone the above-described manufacturing process has a circumferential grinding line and has a roughness of the surface. The minute projections are smoothed by sliding on the support surface of the shoe 20. The axial surface roughness of the outer peripheral surface of the shaft portion 2a is ISO4287 /
The calculated average deviation Ra specified in 1 is not more than 0.04 μm, and the root mean square angle Δq specified in ISO4287 / 1 is not more than 2.0. The upper end surface 2b1 and the lower end surface 2b2 of the thrust plate 2b have cross-shaped grinding stitches formed by combining rotation of the shaft member 2 and rotation of the grindstone 22 (cross hatched surface). The circumferential surface roughness of the upper end surface 2b1 and the lower end surface 2b2 of the thrust plate 2b is I
The calculated average deviation Ra defined in SO4287 / 1 is 0.
It is 0.4 μm or less, preferably 0.01 μm or less.
【0023】[0023]
【発明の効果】本発明によれば、ラジアル軸受部を構成
するラジアル軸受面、スラスト軸受部を構成するスラス
ト軸受面の摩耗が抑制され、この種の動圧型軸受装置の
優れた軸受性能を長期間にわたって維持することができ
る。According to the present invention, the wear of the radial bearing surface constituting the radial bearing portion and the thrust bearing surface constituting the thrust bearing portion is suppressed, and the excellent bearing performance of this type of dynamic pressure type bearing device is extended. Can be maintained over time.
【図1】本発明の実施形態に係る動圧型軸受装置を有す
るスピンドルモータの断面図である。FIG. 1 is a sectional view of a spindle motor having a hydrodynamic bearing device according to an embodiment of the present invention.
【図2】本発明の実施形態に係る動圧型軸受装置を示す
断面図である。FIG. 2 is a sectional view showing a dynamic pressure bearing device according to an embodiment of the present invention.
【図3】軸部材の製造工程を示す概念図である。FIG. 3 is a conceptual diagram illustrating a manufacturing process of a shaft member.
【図4】図3に示す製造工程で製造された軸部を模式的
に示す図である。FIG. 4 is a view schematically showing a shaft manufactured in the manufacturing process shown in FIG. 3;
1 動圧型軸受装置 2 軸部材 2a 軸部 2b スラスト板 2b1 上端面 2b2 下端面 7 ハウジング 8 軸受部材 11 ラジアル軸受部 12 スラスト軸受部 Reference Signs List 1 dynamic pressure bearing device 2 shaft member 2a shaft portion 2b thrust plate 2b1 upper end surface 2b2 lower end surface 7 housing 8 bearing member 11 radial bearing portion 12 thrust bearing portion
Claims (6)
に挿入され、軸部および、該軸部に設けられたスラスト
板を有する軸部材と、ラジアル軸受隙間に生じる流体の
動圧作用で前記軸部をラジアル方向に非接触支持するラ
ジアル軸受部と、スラスト軸受隙間に生じる流体の動圧
作用で前記スラスト板をスラスト方向に非接触支持する
スラスト軸受部とを備えた動圧型軸受装置を製造する方
法であって、 前記軸部の外周面を研削加工した後、前記軸部の外周面
を該表面よりも大きな表面硬さを有する支持部材で支持
しながら、前記スラスト板の端面を研削加工する工程を
含む動圧型軸受装置の製造方法。A bottomed cylindrical housing, a shaft member inserted into the housing and having a shaft portion and a thrust plate provided on the shaft portion, and a dynamic pressure action of a fluid generated in a radial bearing gap. Manufactures a dynamic pressure bearing device including a radial bearing portion that supports a shaft portion in a non-contact manner in a radial direction and a thrust bearing portion that supports the thrust plate in a non-contact manner in a thrust direction by a dynamic pressure action of a fluid generated in a thrust bearing gap. After grinding the outer peripheral surface of the shaft portion, grinding the end surface of the thrust plate while supporting the outer peripheral surface of the shaft portion with a support member having a surface hardness greater than the surface. A method of manufacturing a dynamic pressure bearing device including a step of performing.
記軸部の外周面と支持部材との間に摺動を生じさせる請
求項1記載の動圧型軸受装置の製造方法。2. The method of manufacturing a dynamic pressure bearing device according to claim 1, wherein the rotation of the shaft portion causes sliding between an outer peripheral surface of the shaft portion and a support member.
術平均偏差Raで0.04μm以下とし、前記スラスト
板の端面の円周方向表面粗さを算術平均偏差Raで0.
04μm以下とする請求項1又は2記載の動圧型軸受装
置の製造方法。3. The axial surface roughness of the outer peripheral surface of the shaft portion is 0.04 μm or less in arithmetic mean deviation Ra, and the circumferential surface roughness of the end face of the thrust plate is 0.1 in arithmetic mean deviation Ra.
The method for manufacturing a dynamic pressure bearing device according to claim 1 or 2, wherein the thickness is not more than 04 µm.
法によって製造された動圧型軸受装置。4. A dynamic pressure bearing device manufactured by the manufacturing method according to claim 1.
に挿入され、軸部および、該軸部に設けられたスラスト
板を有する軸部材と、ラジアル軸受隙間に生じる流体の
動圧作用で前記軸部をラジアル方向に非接触支持するラ
ジアル軸受部と、スラスト軸受隙間に生じる流体の動圧
作用で前記スラスト板をスラスト方向に非接触支持する
スラスト軸受部とを備えた動圧型軸受装置であって、 前記軸部の外周面は、円周方向の研削目を有し、かつ、
該表面の粗さを構成する微小突起が平滑化され、前記ス
ラスト板の端面は、交差状の研削目を有する動圧型軸受
装置。5. A housing having a bottomed cylindrical shape, a shaft member inserted into the housing and having a shaft portion and a thrust plate provided on the shaft portion, and a dynamic pressure effect of a fluid generated in a radial bearing gap. A dynamic pressure bearing device comprising: a radial bearing portion for supporting a shaft portion in a non-contact manner in a radial direction; and a thrust bearing portion for supporting the thrust plate in a non-contact manner in a thrust direction by a dynamic pressure action of a fluid generated in a thrust bearing gap. The outer peripheral surface of the shaft portion has a circumferential grinding stitch, and
A dynamic pressure bearing device, wherein minute projections constituting the surface roughness are smoothed, and an end face of the thrust plate has a cross-shaped grinding line.
術平均偏差Raで0.04μm以下であり、前記スラス
ト板の端面の円周方向表面粗さが算術平均偏差Raで
0.04μm以下である請求項5記載の動圧型軸受装
置。6. The axial surface roughness of the outer peripheral surface of the shaft portion is not more than 0.04 μm in arithmetic mean deviation Ra, and the circumferential surface roughness of the end face of the thrust plate is 0.1 in arithmetic mean deviation Ra. The dynamic pressure type bearing device according to claim 5, wherein the diameter is not more than 04 µm.
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JP2000252944A JP3936527B2 (en) | 2000-08-23 | 2000-08-23 | Manufacturing method of hydrodynamic bearing device |
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JP2000252944A JP3936527B2 (en) | 2000-08-23 | 2000-08-23 | Manufacturing method of hydrodynamic bearing device |
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JP3936527B2 JP3936527B2 (en) | 2007-06-27 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007210095A (en) * | 2007-03-14 | 2007-08-23 | Ntn Corp | Method for manufacturing dynamic pressure-type bearing device |
JP2008082414A (en) * | 2006-09-27 | 2008-04-10 | Nippon Densan Corp | Fluid dynamic bearing device, magnetic disk device and portable electronic equipment |
KR100952627B1 (en) * | 2002-04-15 | 2010-04-15 | 엔티엔 가부시키가이샤 | Method for manufacturing hydro dynamic bearing device |
-
2000
- 2000-08-23 JP JP2000252944A patent/JP3936527B2/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100952627B1 (en) * | 2002-04-15 | 2010-04-15 | 엔티엔 가부시키가이샤 | Method for manufacturing hydro dynamic bearing device |
JP2008082414A (en) * | 2006-09-27 | 2008-04-10 | Nippon Densan Corp | Fluid dynamic bearing device, magnetic disk device and portable electronic equipment |
JP2007210095A (en) * | 2007-03-14 | 2007-08-23 | Ntn Corp | Method for manufacturing dynamic pressure-type bearing device |
JP4504391B2 (en) * | 2007-03-14 | 2010-07-14 | Ntn株式会社 | Manufacturing method of hydrodynamic bearing device |
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