JP2005120464A5 - - Google Patents
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- Publication number
- JP2005120464A5 JP2005120464A5 JP2004248128A JP2004248128A JP2005120464A5 JP 2005120464 A5 JP2005120464 A5 JP 2005120464A5 JP 2004248128 A JP2004248128 A JP 2004248128A JP 2004248128 A JP2004248128 A JP 2004248128A JP 2005120464 A5 JP2005120464 A5 JP 2005120464A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- workpiece
- machining
- feeding
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003754 machining Methods 0.000 claims description 19
- 239000012212 insulator Substances 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 6
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 6
- 239000012498 ultrapure water Substances 0.000 claims description 6
- 239000003792 electrolyte Substances 0.000 claims description 5
- 239000008151 electrolyte solution Substances 0.000 claims description 5
- 238000003672 processing method Methods 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 2
- 239000000463 material Substances 0.000 description 2
- 238000005342 ion exchange Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004248128A JP2005120464A (ja) | 2003-09-26 | 2004-08-27 | 電解加工装置及び電解加工方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003336327 | 2003-09-26 | ||
| JP2004248128A JP2005120464A (ja) | 2003-09-26 | 2004-08-27 | 電解加工装置及び電解加工方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005120464A JP2005120464A (ja) | 2005-05-12 |
| JP2005120464A5 true JP2005120464A5 (https=) | 2007-10-18 |
Family
ID=34622119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004248128A Pending JP2005120464A (ja) | 2003-09-26 | 2004-08-27 | 電解加工装置及び電解加工方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005120464A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7696241B2 (ja) * | 2021-07-06 | 2025-06-20 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002093761A (ja) * | 2000-09-19 | 2002-03-29 | Sony Corp | 研磨方法、研磨装置、メッキ方法およびメッキ装置 |
| CN100497748C (zh) * | 2001-11-13 | 2009-06-10 | Acm研究公司 | 电解抛光组件以及对导电层执行电解抛光的方法 |
| JP3995463B2 (ja) * | 2001-12-13 | 2007-10-24 | 株式会社荏原製作所 | 電解加工方法 |
-
2004
- 2004-08-27 JP JP2004248128A patent/JP2005120464A/ja active Pending
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