JP2005119934A - Silicon nitride porous body and method of manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a porous silicon nitride ceramic having high porosity and high strength. <P>SOLUTION: In the method of manufacturing the silicon nitride porous body having high porosity and high strength, the silicon nitride porous body having 40-75% porosity and 20-40 MPa strength is manufactured by molding mixed powder prepared by incorporating 1-10 wt.% silicon nitride seed crystal in mixed powder of silicon dioxide powder with carbon powder, heating the molding at a prescribed temperature rising rate in a nitrogen atmosphere or an inert gas atmosphere containing nitrogen to pre-heat the molding and heating further at a prescribed temperature rising rate to sinter the molding. The silicon nitride porous body manufactured by the method and having 60-75% porosity and 20-40 MPa strength and a structural member comprising the porous body are provided. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

The present invention relates to a silicon nitride porous body and a method for producing the same, and more particularly to a method for producing a silicon nitride porous body having both high porosity and high strength.
The present invention has excellent mechanical properties, for example, a filter for gas separation in a high temperature atmosphere or a corrosive atmosphere, a gas turbine for power generation, a heat exchanger, an engine, and a filler (reinforcing material) of a heat resistant material. High-porosity / high-strength nitriding that has both a high porosity of 40% or more and a high strength of 20 MPa or more in the technical field of silicon nitride ceramics, where development of new materials with higher performance is strongly demanded The present invention is useful as a technique for producing a novel silicon nitride porous body that enables the production of a silicon porous body and a product thereof.
The silicon nitride porous body produced by the present invention has a high nitriding rate, high porosity, high strength, etc., for example, in a dust collection / purification filter for high-temperature combustion gas, a gas turbine for power generation, a space transportation device, etc. Application as a filler (reinforcing material) of a heat-resistant material to be used or a reinforcing material of a metal matrix composite material is expected.

  The silicon nitride porous body has excellent mechanical properties due to the developed structure of the columnar particles, such as a filter for gas separation in a high temperature atmosphere or a corrosive atmosphere, its base material, or metal. It is an important ceramic material expected as a reinforcing material for matrix composite materials. So far, several methods for producing this silicon nitride porous body have been proposed.

  As a typical example, for example, in the prior art, a ceramic porous body and a silicon nitride particle as a manufacturing method thereof and a silicone oligomer capable of generating silicon carbide or silicon nitride by firing are used and sintered in a non-oxidizing atmosphere. A method of linking is proposed (Patent Document 1). In another document, an amorphous powder containing silicon nitride is used as a starting material, and a molded body is heated in nitrogen to produce a silicon nitride-based fibrous structure ceramic porous body having a uniform fibrous structure. A method has been proposed (Patent Document 2).

  In another document, a silicon nitride ceramic is prepared by heating a molded body composed of a mixed powder having silicon nitride particles and an oxide-based binder phase in nitrogen, and adjusting the sintering temperature and the amount of the sintering aid added. A method for producing a porous body has been proposed (Patent Document 3). However, the method using these silicon nitride particles and amorphous powder as a starting material has the problem that the starting material for silicon nitride is relatively expensive and the cost is increased. Also, the control of porosity is limited.

In the direct nitridation method for producing a silicon nitride sintered body by directly reacting nitrogen with metal silicon, a method of nitriding the metal silicon powder as it is, and molding the metal silicon powder to obtain a molded product, this metal silicon molded product However, it is known that it is difficult to produce a dense sintered body. On the other hand, there is a problem in the production of porous silicon nitride ceramics by this method. The reaction represented by the reaction formula: 3Si + 2N ₂ → Si ₃ N ₄ has an increase in weight and volume, and it is particularly difficult to produce a porous body having a high porosity. As a method of using metal silicon powder, another literature proposes a method of obtaining a porous body having a metal silicon powder with a nitriding rate of 50% or less using a mixed powder of metal silicon powder and silicon nitride powder as a starting material. (Patent Document 4). However, in this method, since the nitriding rate of the metal silicon powder is 50% or less, there are many metal silicon powders that remain without being nitrided, and there is a problem that the excellent heat resistance and corrosion resistance of silicon nitride are impaired. Metal silicon powder is expensive.

Carbon nitridation of silicon dioxide at high temperature: Silicon nitride is obtained by the reaction of 3SiO ₂ + 6C + 2N ₂ → Si ₃ N ₄ + 6CO. This reaction can be used to produce silicon nitride powder, but there are several problems in this case. At 1470 ° C. or higher, there is a risk of forming silicon carbide, and at 1400 ° C. or lower, there is a risk of producing a product containing a large amount of oxygen and poor crystallization, so the reaction temperature must be strictly controlled. Also, since the reaction is carried out under a stream of nitrogen, material carryover often occurs.

  As an attempt to produce porous silicon nitride ceramics using the above reaction, other literatures include heat treatment of nitrogen-containing compacts containing silicon dioxide powder, carbon powder and metal silicon powder having an average particle diameter of 5 μm or less in nitrogen. Thus, a method for obtaining silicon nitride has been proposed (Patent Document 5). However, in this method, since the total amount of the silicon dioxide powder and the carbon powder is only 1 to 20% by weight in the molded body, the porosity is 20 to 40%, and it is difficult to obtain a high porosity.

Japanese Patent Laid-Open No. 7-187845 JP-A-10-67562 JP 2000-335985 A JP-A-1-188479 JP 2001-206775 A

Under such circumstances, the present inventors have conducted intensive research with the goal of developing a technology for producing high-porosity / high-strength silicon nitride having both high porosity and high strength in view of the above prior art. As a result of using the silicon nitride seed crystal as a starting material in a mixed powder containing silicon dioxide powder, carbon powder and oxide of a sintering aid, these are blended at a specific molar ratio, It has been found that the intended purpose can be achieved by pre-heating and sintering the molded body under specific conditions, and further research has been made to complete the present invention.
The present invention provides a method for producing a silicon nitride porous body having a high nitridation rate, a high porosity, and a high strength by adding a silicon nitride seed crystal to a silicon dioxide and carbon powder as a starting material and carbon nitriding. It is the purpose.

The present invention for solving the above-described problems comprises the following technical means.
(1) A method for producing a silicon nitride porous body having both high porosity and high strength, wherein a mixed powder containing 1 to 10% by weight of silicon nitride seed crystals in a mixed powder of silicon dioxide powder and carbon powder After molding, the molded body is heated at a predetermined temperature increase rate in a nitrogen atmosphere or an inert atmosphere containing nitrogen and subjected to preliminary heat treatment, and further heated at a predetermined temperature increase rate and sintered. A method for producing a porous silicon nitride material having a porosity of 40 to 75% and a strength of 20 to 40 MPa.
(2) The method for producing a porous body according to (1) above, wherein the molar ratio of SiO ₂ / C in the mixed powder of silicon dioxide powder and carbon powder is 0.4 to 0.6.
(3) The method for producing a porous body according to (1) above, wherein the compact has 1 to 20% by weight of a sintering aid.
(4) The method for producing a porous body according to (1), wherein the compact is sintered in a nitrogen atmosphere at a temperature of 1700 to 1900 ° C. for 1 to 8 hours.
(5) The method for producing a porous body according to any one of (1) to (4) above, wherein the porosity is 60% or more and the strength is 20 MPa or more.
(6) The method for producing a porous body according to (1) above, wherein the average particle diameter of the silicon dioxide powder and the carbon powder is 0.1 to 10 μm.
(7) The method for producing a porous body according to (1), wherein an organic binder is added in an amount of 0.1 to 30% by weight to the molded body.
(8) As silicon dioxide, silicon dioxide, silicon alkoxide, alkyl or alkyl halide compound, fluorosilicic acid, quartz, or metal (Al, Ca, Mg, Ba, Fe, Ti, etc.) silicate is used. The method for producing a porous body according to (1) above, wherein
(9) The porous body according to (1), wherein carbon black, acetylene black, thermal black, lamp black, graphite, coke, or a coke substance that is a precursor of carbon is used as carbon. Manufacturing method.
(10) The porous body according to (1), wherein the silicon nitride seed crystal is in the form of α-type, β-type, or amorphous, and is a fine powder having an average particle size of 1 μm or less. Manufacturing method.
(11) A mixed powder containing silicon dioxide particles, carbon powder, oxide particles of a sintering aid and silicon nitride seed crystal particles is formed by press molding, extrusion molding, cast molding, or sheet molding. The method for producing a porous body according to (1) above.
(12) The method for producing a porous body according to (1) above, wherein the compact is preheated at a temperature of 1100 to 1600 ° C.
(13) The method for producing a porous body according to (1) above, wherein a temperature increase rate during the heat treatment is in a range of 60 to 600 ° C./h.
(14) The method for producing a porous body according to (1) above, wherein a temperature increase rate to a sintering temperature after the heat treatment is in a range of 60 to 200 ° C./h.
(15) High porosity and high produced by the method according to any one of (1) to (13) above, having a porosity of about 60 to 75% and a strength of about 20 to 40 MPa. Strength silicon nitride porous body.
(16) A heat-resistant and anti-corrosive structural member comprising the high porosity / high-strength silicon nitride porous material according to (14) as a constituent element.

Next, the present invention will be described in more detail.
The present invention provides a porous body made of silicon nitride by heat-treating a molded body made of a mixed powder containing silicon dioxide powder, carbon powder, silicon nitride seed crystals and an oxide of a sintering aid in a nitrogen atmosphere. This is a method for producing a silicon nitride porous body and its product.

In the present invention, a silicon nitride porous body is obtained by performing a reaction of 3SiO ₂ + 6C + 2N ₂ → Si ₃ N ₄ + 6CO by carbon nitriding silicon dioxide at a high temperature. The advantages are (1) the starting material is inexpensive, and (2) there is no product released other than CO, so there are few residues in the resulting porous body, and the components of the porous body are controlled. (3) There is a 44% weight loss due to the reaction, and a porous body having a high porosity can be obtained.

  The addition of silicon nitride seed crystals is expected to improve the mechanical properties of the material because the silicon nitride serves as a nucleus during the reaction, promoting the reaction and phase transition, and the development of silicon nitride columnar particles. it can.

  In the method for producing a silicon nitride porous body of the present invention, a molded body made of a mixed powder obtained by adding a silicon nitride seed crystal to a mixed powder containing silicon dioxide powder, carbon powder and an oxide of a sintering aid is used.

  When the average particle diameter of the silicon dioxide powder and the carbon powder is less than 0.1 μm, the particles tend to aggregate and are difficult to handle. On the other hand, if the average particle diameter exceeds 10 μm, some of the pores of the formed porous body become too large, which is not preferable. Therefore, the average particle diameter of the silicon dioxide powder and the carbon powder is preferably 0.1 to 10 μm. There is no restriction | limiting in particular as purity of a silicon dioxide powder and a carbon powder, According to a use, it selects suitably, respectively. In the present invention, it is considered that the silicon dioxide powder and the carbon powder also act as pore forming agents during the production of the silicon nitride porous body.

The molar ratio of SiO ₂ / C in the mixed powder of silicon dioxide powder and carbon powder is preferably 0.4 to 0.6. When the molar ratio is less than 0.4, silicon dioxide remains in the sintered body, and the corrosion resistance and heat resistance of the resulting porous body are lowered, which is not preferable. On the other hand, when the molar ratio exceeds 0.6, carbon remains in the sintered body, which inhibits the growth of silicon nitride columnar particles and is inferior in mechanical properties, which is not preferable.

  As content of a sintering auxiliary agent, it is preferable that it is 1 to 20 weight% in a molded object. If the amount is less than 1% by weight, the molded body cannot be sintered. Since it remains in a grain boundary, it is not preferable.

  In the production method of the present invention, as a method for producing a molded body containing silicon dioxide particles, carbon powder, oxide particles of sintering aid and silicon nitride seed crystal particles, press molding, extrusion molding, cast molding, sheet Ordinary ceramic forming methods such as forming are appropriately employed. In the present invention, an organic binder may be added to the mixed powder at the time of molding. Examples of such an organic binder include polyvinyl alcohol or a modified product thereof, starch or a modified product thereof, carboxyl methyl cellulose, hydroxyl methyl cellulose, polyvinyl pyrrolidone, an acrylic resin or an acrylic copolymer, a vinyl acetate resin or a vinyl acetate copolymer, Etc. are exemplified. The addition amount of such an organic binder is preferably 0.1 to 30% by weight with respect to the molded body. In the present invention, the pore forming agent may also serve as a binder of the molded body.

  As used herein, “silicon dioxide” refers to silicon dioxide itself or a precursor of silicon dioxide. The precursors are, for example, silicon alkoxides, alkyl or alkyl halide compounds, fluorosilicic acid, quartz, and the aforementioned metal silicates. This “silicon dioxide” also includes a mixture of silicon dioxide and a precursor. Of these, the form of silicon dioxide itself is preferred.

  The “carbon” used in the present invention represents any form of carbon. As this carbon, for example, carbon black, acetylene black, thermal black, lamp black, graphite, coke and the like selected from a wide range of charcoal such as pine smoke are used. The “carbon” also includes a coke substance that is a precursor of carbon. Examples of such coke substances include thermosetting binders such as phenol resins (particularly phenol-formaldehyde resins), epoxy resins, polyimides, polyureas, and polycarbonates. Mixtures with carbon black and / or precursors of carbon can also be used. Of these, the carbon black form is preferred.

  The “sintering aid” used in the present invention represents a metal oxide that changes to a glass state in a high temperature region of sintering. These include mixtures that react with one or more components of the oxide to form a glass phase. Examples of such metal oxides include yttria, alumina, or a mixture thereof.

  The “silicon nitride seed crystal” used in the present invention represents an arbitrary form of silicon nitride. This seed crystal may be, for example, α-type, β-type, or amorphous. As these, it is preferable to use fine powder having an average particle size of 1 μm or less.

  As conditions for pre-heat treatment of the molded body, it is preferable to heat-treat at a temperature of 1100 to 1600 ° C. When the temperature is 1100 ° C. or lower, the nitriding of the silicon dioxide particles is insufficient, or the reaction rate is slow, which is not preferable. On the other hand, when the temperature exceeds 1600 ° C., the reaction rate is too high, which is not preferable.

  The heating rate during the heat treatment is appropriately selected depending on the size, shape and the like of the molded body, but is preferably in the range of 60 to 600 ° C./h. If the rate of temperature increase is 60 ° C./h or less, the treatment time becomes long, which is not preferable. On the other hand, if it exceeds 600 ° C./h, gas is generated abruptly by the reaction between the silicon dioxide powder and the carbon powder in the heat treatment process, and the porous body is damaged.

  As a condition for sintering the preheated shaped body, heat treatment is preferably performed at a temperature of 1700 to 1900 ° C. in a nitrogen atmosphere for 1 to 8 hours. When the temperature is 1700 ° C. or lower, the nitridation of silicon dioxide particles is slow or the grain growth becomes insufficient, which is not preferable. Further, if the temperature exceeds 1900 ° C., the grain growth is too large, which is not preferable. When the temperature holding time is 1 hour or less, the sintering becomes insufficient, which is not preferable, and when it exceeds 8 hours, the grain growth is too large, which is not preferable.

  The heating rate after the heat treatment up to the sintering temperature is appropriately selected depending on the size, shape, etc. of the molded body, but is preferably in the range of 60 to 200 ° C./h. If the rate of temperature rise is 60 ° C./h or less, the time for producing the porous body becomes longer, which is not preferable. On the other hand, if the rate of temperature rise exceeds 200 ° C./h, gas is rapidly generated by the reaction between the silicon dioxide powder and the carbon powder during the heating process, and the porous body is damaged, which is not preferable.

In the present specification, the reaction rate of silicon dioxide is calculated from a change in weight. That is, the formation reaction of silicon nitride by nitridation of a mixture of silicon dioxide and carbon: 3SiO ₂ + 6C + 2N ₂ → Si ₃ N ₄ + 6CO is 1 mol in which 3 mol of silicon dioxide reacts with 6 mol of carbon and 2 mol of nitrogen. It becomes silicon nitride.

  From this reaction formula, the weight change of the mixture of silicon dioxide and carbon is (3 × Si + 4 × N) / (3 × Si + 6 × O + 6 × C) = 140/252 = 0.56. That is, the mixture of silicon dioxide and carbon whose molar ratio conforms to this reaction formula has a weight increase rate Δwideal of −0.44, assuming that silicon dioxide is all silicon nitride.

The nitriding rate is obtained by dividing the actual weight increase rate Δw by Δwideal. If the actual weight increase rate Δw is −0.4, the nitriding rate = 0.4 / 0.44, which is calculated as 91%. However, when a silicon nitride seed crystal, a sintering aid, or more carbon or silicon dioxide is added, the weight increase rate Δwideal is −0.44 × [weight ratio of (SiO ₂ + C) capable of reaction] and Become.

  According to the present invention, (1) a silicon nitride porous body having both high porosity (for example, 61 to 75%) and high strength (for example, 20 to 28 MPa) can be produced. (2) By the method of the present invention High porosity and high strength silicon nitride porous body having a uniform structure of fine columnar particles can be obtained. (3) Silicon nitride seed crystals are added to silicon dioxide and carbon powder as a starting material, carbon Nitriding can provide a process for producing a high porosity and high strength porous silicon nitride body at a low cost by nitriding, and (4) a heat resistant structure suitably used in a high temperature atmosphere or a corrosive atmosphere It is possible to provide a high-porosity and high-strength silicon nitride porous body that is useful as a member material, and (5) to provide a heat-resistant structural member made of the silicon nitride porous body.

  EXAMPLES Next, although this invention is demonstrated concretely based on an Example, this invention is not limited at all by the following examples.

Examples 1-8
(1) Production of sintered body Carbon powder was added to silicon dioxide raw material powder having an average particle diameter of 0.8 μm so that the molar ratio of SiO ₂ / C was 0.45-0.5, and 5 % By weight of yttria and 5% by weight of α-type silicon nitride seed crystal particles were added as starting materials. The average particle size of the carbon powder was 30 nm, and the average particle size of the silicon nitride particles was 0.5 μm.

  This starting material was mixed and ground for 24 hours by a ball mill using methanol as a dispersion medium. About these mixtures, methanol was removed using the vacuum evaporator, and also after vacuum-drying at 120 degreeC, it let the 250 mesh sieve pass, and mixed powder was obtained.

  This mixed powder was filled in a 5 mm × 50 mm press mold and uniaxially pressed at a molding pressure of 9.8 MPa to obtain a molded body of 5 mm × 5 mm × 50 mm. The molded body was heated to 1500 ° C. at a temperature rising rate of 10 ° C./min in a nitrogen atmosphere, and further heated to 1750-1800 ° C. at a temperature rising rate of 3 ° C./min. Sintering was performed for 2 hours to obtain a sintered body.

(2) Characteristics of Sintered Body With respect to the obtained sintered body, specific gravity and porosity were measured by Archimedes method, and room temperature 4-point bending strength was measured by JIS R1601. Further, the crystal phase was identified using X-rays, and the microstructure of the fracture cross section of the sintered body was observed. In each sample, the pore diameter was measured with a mercury porosimeter. Table 1 shows the measurement results of density, porosity, pore diameter, strength, and crystal phase. Moreover, the scanning electron microscope (SEM) photograph (x5000) of the fracture surface of the said sintered compact is shown in FIG.

  For comparison, a sintered body to which no silicon nitride seed crystal was added was produced by the same process. The results of evaluating the obtained sintered bodies (Comparative Examples 1 to 3) are shown in Table 1. Moreover, the SEM photograph (x5000) of the fracture surface of this sintered compact is shown in FIG.

  As is clear from FIG. 1 and FIG. 2, in the sample to which the seed crystal was added, fine columnar particles that were uniformly developed were obtained, whereas in the sample to which no seed crystal was added, the obtained particles were coarse, Columnar particles are not developed.

  Further, as is apparent from Table 1, it was confirmed that a porous silicon nitride sintered body having both high porosity and high strength can be obtained in this example.

  As described above in detail, the present invention relates to a silicon nitride porous body and a method for producing the same, and according to the present invention, a mixed powder of silicon dioxide and carbon to which a silicon nitride seed crystal is added is used as a starting material and a nitrogen atmosphere. By the reaction inside, porous silicon nitride ceramics having high porosity and high strength having fine columnar particles can be produced. The method for producing a silicon nitride porous body of the present invention is excellent in economic efficiency, and the silicon nitride porous body includes a gas separation filter in a high temperature atmosphere or a corrosive atmosphere, a base material thereof, and a power generation gas. A wide range of applications are expected as fillers (reinforcing materials) of heat-resistant materials used for turbines, heat exchangers, engines, spacecrafts, etc., or reinforcing materials for metal matrix composite materials.

The SEM photograph (1750 degreeC, 2 hours sintering) of the fracture surface of the sample which added 5 weight% silicon nitride seed crystal is shown. The SEM photograph (1750 degreeC, 2 hours sintering) of the fracture surface of the sample which has not added the silicon nitride seed | species is shown.

Claims (16)

  A method for producing a silicon nitride porous body having both high porosity and high strength, after forming a mixed powder containing 1-10 wt% silicon nitride seed crystals in a mixed powder of silicon dioxide powder and carbon powder The molded body is heated in a nitrogen atmosphere or in an inert atmosphere containing nitrogen at a predetermined heating rate and preheated, and further heated at a predetermined heating rate and sintered. A method for producing a porous silicon nitride body having a porosity of 40 to 75% and a strength of 20 to 40 MPa. The method for producing a porous body according to claim 1, wherein the molar ratio of SiO ₂ / C in the mixed powder of silicon dioxide powder and carbon powder is 0.4 to 0.6.   The method for producing a porous body according to claim 1, wherein the molded body has 1 to 20% by weight of a sintering aid.   The method for producing a porous body according to claim 1, wherein the molded body is sintered in a nitrogen atmosphere at a temperature of 1700 to 1900 ° C. for 1 to 8 hours.   The method for producing a porous body according to any one of claims 1 to 4, wherein the porosity is 60% or more and the strength is 20 MPa or more.   The average particle diameter of silicon dioxide powder and carbon powder is 0.1-10 micrometers, The manufacturing method of the porous body of Claim 1 characterized by the above-mentioned.   The method for producing a porous body according to claim 1, wherein an organic binder is added in an amount of 0.1 to 30% by weight to the molded body.   As silicon dioxide, silicon dioxide, silicon alkoxide, alkyl or alkyl halide compound, fluorosilicic acid, quartz, or metal (Al, Ca, Mg, Ba, Fe, Ti, etc.) silicate is used. The method for producing a porous body according to claim 1.   The method for producing a porous body according to claim 1, wherein carbon, carbon black, acetylene black, thermal black, lamp black, graphite, coke, or a coke substance which is a precursor of carbon is used.   2. The method for producing a porous body according to claim 1, wherein the silicon nitride seed crystal is in the α-type, β-type, or amorphous form and is a fine powder having an average particle size of 1 μm or less.   A mixed powder containing silicon dioxide particles, carbon powder, oxide particles of a sintering aid and silicon nitride seed crystal particles is formed by press molding, extrusion molding, cast molding, or sheet molding, Item 2. A method for producing a porous body according to Item 1.   The method for producing a porous body according to claim 1, wherein the formed body is preheated at a temperature of 1100 to 1600 ° C.   The method for producing a porous body according to claim 1, wherein the heating rate during the heat treatment is in the range of 60 to 600 ° C./h.   2. The method for producing a porous body according to claim 1, wherein the heating rate after the heat treatment to the sintering temperature is in the range of 60 to 200 ° C./h.   A high-porosity / high-strength silicon nitride porous body produced by the method according to any one of claims 1 to 13 and having a porosity of about 60 to 75% and a strength of about 20 to 40 MPa. A heat-resistant and anti-corrosive structural member comprising the high-porosity / high-strength silicon nitride porous body according to claim 14 as a constituent element.