JP2005111644A - Compliance device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a compliance device which eliminates occurrence of dust and can be downsized. <P>SOLUTION: According to the compliance device having a base 2 and a slider 15 which are relatively displaceable upon application of external force thereto, static pressure is generated between the base 2 and the slider 15 by jetting pressurized gas from a porous body 8, and both the base 2 and the slider 15 are attracted to each other by a magnet 10, whereby both the elements are borne in a non-contact manner. By virtue of this arrangement, the static pressure generation and the magnetic attraction are simultaneously implemented between the base 2 and the slider 15, and therefore bearing of both the elements in the non-contact manner is stably achieved. By virtue of the non-contact bearing, even if the base 2 and the slider 15 are relatively displaced with respect to each other due to application of external force thereto, occurrence of dust at the time of the displacement can be prevented. Further, unlike a conventional device, a constitution for removing dust is eliminated, and therefore the device can be downsized by the elimination. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a compliance device.

  In general, an automatic assembly machine or the like is provided with a transfer device for transferring a work necessary for the assembly. In recent years, the transfer device is provided with a compliance device that corrects a positional deviation that inevitably occurs when the workpiece is transferred.

  The compliance device includes, for example, a slider configured to be movable on a two-dimensional plane with respect to the main body, and a workpiece is held by a workpiece holding portion provided on the slider. When an external force is applied to the workpiece or the like during assembly due to the positional deviation that occurs during conveyance, the slider is displaced according to the external force, thereby correcting the positional deviation of the workpiece.

  By the way, in the conventional compliance apparatus, the slider described above is configured to move on a two-dimensional plane by using a ball bearing. For this reason, when a slider displaces, there exists a problem that dust and dust will generate | occur | produce by sliding of a ball bearing. And since it has such a problem, the compliance apparatus using the conventional ball bearing is unsuitable for the automatic assembly machine for recent precision instruments which dislikes dust. Although a technique in which a configuration for sucking dust is added is also disclosed, another problem arises that such a configuration would increase the size of the apparatus (see Patent Document 1).

In general, the compliance apparatus has a configuration for returning a slider displaced by the action of an external force to the original initial position when the action of the external force ceases. In a conventional compliance device, as a configuration for that purpose, a device that uses a force when a ball biased by a spring returns to its original position is known (see Patent Document 1). However, even with such a configuration, when the ball returns to its original position, it comes into contact with the surroundings, so dust generation is inevitable. In addition, there is also a problem that the apparatus is increased in size, such as requiring a space for providing balls and springs.
JP 2002-307366 A

  An object of this invention is to provide the compliance apparatus which can reduce in size without generating dust.

  Hereinafter, effective means for solving the above-described problems will be described while showing effects and the like as necessary. In the following, in order to facilitate understanding, the corresponding configuration in the embodiment of the invention is appropriately shown in parentheses, but is not limited to the specific configuration shown in parentheses.

Means 1. In a compliance device having a fixed part (base 2) and a movable part (slider 15) that are relatively displaced by the action of an external force,
A static pressure generating portion (porous body 8, spherical porous body 38) that relatively non-contact-supports the fixed portion and the movable portion by jetting pressurized gas is provided, and the fixed portion and the movable portion A compliance device configured to attract both of them by magnetism.

  According to the means 1, the static pressure is generated between the fixed part and the movable part by the pressurized gas ejected from the static pressure generating part. As a result, the fixed portion and the movable portion can be supported in a relatively non-contact state. Furthermore, when both the fixed part and the movable part are attracted by magnetism, static pressure is generated and attracted simultaneously between the fixed part and the movable part. Thereby, relative non-contact support of both can be performed in a stable state. That is, the fixed portion and the movable portion can be relatively non-contact-supported while maintaining a predetermined flying height determined by the relationship between the static pressure and the magnetic force due to the ejection of the pressurized gas. Since the fixed portion and the movable portion are supported in a relatively non-contact manner as described above, even when the fixed portion and the movable portion are relatively displaced by the action of external force, dust is generated at the time of the displacement. Can be prevented. For this reason, the structure for removing dust like the conventional one is unnecessary, and the apparatus can be reduced in size accordingly.

  Mean 2. The compliance device according to claim 1, wherein the static pressure generation by the static pressure generation unit and the magnetic attraction are performed between opposing planes of the fixed unit and the movable unit.

  According to the means 2, a static pressure is generated by the static pressure generating portion between the opposing planes of the fixed portion and the movable portion, and both are attracted by magnetism, whereby the fixed portion and the movable portion face each other. It will be supported relatively non-contact on the plane. According to such a configuration, it is possible to secure a region where an attractive force due to static pressure or magnetism acts, and it is possible to reliably perform stable non-contact support.

  Means 3. The compliance device according to means 1 or 2, wherein the magnet is used to attract the magnet.

  According to the means 3, the structure for attracting both the fixed portion and the movable portion to stabilize the non-contact support can be provided by providing the magnet. Since the magnet itself can be sufficiently downsized, the entire compliance device can be used in addition to the fact that a configuration for removing dust is not necessary as described above, and that a downsized member can be used. Can be further reduced in size.

Means 4. A return that has a fixed part (base 2) and a movable part (slider 15) that are relatively displaced by the action of an external force, and that automatically returns the fixed part and the movable part that have been relatively displaced when the external force is removed. A compliance device provided with means,
A static pressure generating portion (porous body 8, spherical porous body 38) that relatively non-contact-supports the fixed portion and the movable portion by jetting pressurized gas is provided, and the fixed portion and the movable portion A compliance device in which both of them are attracted by a magnet and the return means is configured by using the magnet.

  According to the means 4, a static pressure is generated between the fixed part and the movable part by the pressurized gas ejected from the static pressure generating part. As a result, the fixed portion and the movable portion can be supported in a relatively non-contact state. Furthermore, when the fixed part and the movable part are attracted by the magnetism, static pressure is generated and attracted simultaneously between the fixed part and the movable part. Thereby, relative non-contact support of both can be performed in a stable state. In other words, the fixed portion and the movable portion can be supported relatively non-contactingly while maintaining a predetermined flying height determined by the relationship between the static pressure due to the injection of the pressurized gas and the magnetic force of the magnet. Since the fixed portion and the movable portion are supported in a relatively non-contact manner as described above, even when the fixed portion and the movable portion are relatively displaced by the action of external force, dust is generated at the time of the displacement. Can be prevented. For this reason, the structure for removing dust like the conventional one is unnecessary, and the apparatus can be reduced in size accordingly.

  Further, since the return means is configured by using the magnet used for stable non-contact support in the means 4, the means for returning the fixed portion and the movable portion to the initial state from the relative displacement positions is conventionally used. The members are not in contact with each other. For this reason, it is possible to prevent dust from being generated when returning to the initial state. Moreover, it is not necessary to provide a configuration for returning to the initial state separately from the configuration for enabling the relative displacement between the fixed portion and the movable portion, which greatly contributes to the downsizing of the apparatus.

  Means 5. One of the fixed portion and the movable portion is formed of a non-magnetic material, and the magnet is provided on the non-contact support surface, and the other non-contact support surface is formed of a magnetic material and faces the magnet. The compliance device according to means 4, wherein a magnetized portion having the same shape as the opposing surface of the magnet is provided, and an annular groove is provided around the magnetized portion, thereby constituting the return means.

  According to the means 5, the magnetized part formed on the other is magnetized by the single magnet provided on one of the fixed part and the movable part. Thereby, both a fixed part and a movable part are drawn near, and the relative non-contact support of both is stabilized. In a state where no external force is applied, the fixed portion and the movable portion are not in contact with each other in a state where the opposing surfaces of the magnet and the magnetized portion are substantially coincident with each other on the two-dimensional plane or the spherical surface. Will be supported. This is because the opposing surfaces of the magnet and the magnetized portion are configured to have the same shape, so that there is no positional shift in such a state that the attracting magnet and the magnetized portion are stable. Because there is. Such a state is an initial state in the means 5. Then, although the fixed portion and the movable portion are relatively displaced by the action of the external force, when the external force is removed, the fixed portion and the movable portion are automatically returned to the initial state in a non-contact state by the action of the magnet. Thus, it is only necessary to provide a magnet as a configuration for automatically returning, and since the magnet is also used to stabilize the non-contact support in the first place, an extra configuration is not required and the device. Can be significantly reduced in size. Furthermore, since the magnet only needs to be provided on one of the fixed part and the movable part, it leads to a reduction in manufacturing cost.

  Means 6. The fixed part and the movable part are formed of a non-magnetic material, the magnets are provided on both non-contact support surfaces (support surface 2a, supported surface 15a), and the shapes of the surfaces of the magnets facing each other are provided. 5. The compliance device according to means 4, which is configured to have the same shape and thereby constitutes the return means.

  According to the means 6, both are attracted by the magnets provided on the non-contact support surfaces of the fixed part and the movable part, and the relative non-contact support of both is stabilized. In a state where no external force is applied, the fixed portion and the movable portion are not in a position where the opposing surfaces of the magnets provided on the fixed portion and the movable portion substantially coincide with each other at a position on the two-dimensional plane or the spherical surface. It will be supported by contact. This is because the opposing surfaces of the two magnets are configured to have the same shape, so that a state without such positional deviation is in a stable state as a magnet attracting each other. Such a state is an initial state in the means 6. Then, although the fixed portion and the movable portion are relatively displaced by the action of the external force, when the external force is removed, the fixed portion and the movable portion are automatically returned to the initial state in a non-contact state by the action of the magnet. Thus, it is only necessary to provide a magnet as a configuration for automatically returning, and since the magnet is also used to stabilize the non-contact support in the first place, an extra configuration is not required and the device. Can be significantly reduced in size. Furthermore, since the magnets are provided on both non-contact support surfaces, for example, when a plurality of magnets are provided, manufacturing is easier and cost reduction is possible than the configuration of the means 5. This is because it is not necessary to provide an annular groove around each magnetized portion corresponding to a plurality of magnets.

  Mean 7 A plurality of magnets are provided for each non-contact support surface of the fixed portion and the movable portion, and the magnets are arranged separately from each other, and the arrangement of the plurality of magnets on each non-contact support surface is the same. The compliance device described.

  According to the means 7, in the state where no external force is applied, the fixed portion and the movable portion are arranged such that the opposing surfaces of the plurality of magnets provided on each of the fixed portions and the movable portions are arranged on the two-dimensional plane or the spherical surface. In this case, non-contact support is performed at a position in a substantially matched state without any positional deviation. In addition, since the plurality of magnets are arranged apart from each other, unlike in the case where only one circular magnet is provided on each non-contact support surface, in which direction on the two-dimensional plane or the spherical surface. The direction of whether or not is specified. Such a state is an initial state in the means 7. For this reason, it is very useful when it is necessary to give a specific direction to the initial state of the fixed part and the movable part. In addition, the arrangement in which a plurality of magnets are separated from each other makes it possible to devise various arrangements of magnets compared to the case where only one magnet is provided. For this reason, it is possible to deal with a wide range of cases where there is a restriction in the installation situation of the magnet, such as when it is necessary to provide another member around the magnet, or when the shape of the static pressure generating portion is specified.

  Means 8. The compliance device according to means 7, wherein the plurality of magnets are arranged such that the center of the shape formed by connecting the magnets in order with a straight line and the center of the non-contact support surface substantially coincide with each other.

  According to the means 8, since the center when the fixed part and the movable part are attracted becomes the center of the non-contact support surface, the both can be attracted on the non-contact support surface without deviation.

  Means 9. A compliance device in which means 5 is provided with a magnet and a magnetized portion, and means 6 is provided with two magnets on a non-contact support surface, and the shape of the surfaces facing each other is non-circular.

  According to the means 9, by making each shape of the magnet etc. non-circular, the non-contact support of the fixed part and the movable part is at a position on the two-dimensional plane or the spherical surface, unlike the case where it is circular. It is performed not only at a position in a substantially coincident state without positional deviation but also in a state in which the directionality indicating which direction is directed on the two-dimensional plane or the spherical surface is specified. This state is the initial state. For this reason, after the fixed part and the movable part are relatively displaced by the action of the external force, when the external force is removed, the initial state specified up to the directionality is automatically restored. Therefore, it is extremely useful when it is necessary to give a specific direction to the initial state of the fixed part and the movable part. However, although it is a non-circular shape, a polygonal shape with many corners is close to a circular shape, so that it becomes difficult to specify the directionality as the number of corners increases. For this reason, in the case of a polygonal shape, a shape with relatively few corners such as a triangular shape, a quadrangular shape, a pentagonal shape, and a hexagonal shape is preferable in terms of specifying the directionality.

  Means 10. The structure in which both the fixed portion and the movable portion are attracted by the magnetism or the static pressure generating portion is disposed outside the magnet, and the static pressure generating portion is annularly formed along the circumferential direction of the non-contact support surface of the movable portion. 9. A compliance device according to any one of means 1 to 8.

  According to the means 10, the fixed part and the movable part can be moved by the structure in which both the fixed part and the movable part are attracted by the magnetism or the static pressure generating part provided annularly along the circumferential direction of the non-contact support surface outside the magnet. Static pressure is generated between the two parts. And a fixed part and a movable part are pulled near by a magnetism or a magnet inside a static pressure generating part. As a result, the generation of static pressure is not limited to a part of the region, but is performed in a wide region along the non-contact support surface of the movable part, thereby enabling stable non-contact support.

  Means 11. The compliance apparatus according to any one of the means 1 to 10, wherein the magnet is provided at a substantially central part of the non-contact support surface of the fixed part and the movable part, or the magnet is attracted to both the fixed part and the movable part.

  According to the means 11, since both the fixed portion and the movable portion are attracted at the substantially central portion of the non-contact support surface, the both can be attracted on the non-contact support surface without deviation.

  Means 12. The compliance device according to any one of means 1 to 11, wherein the static pressure generating portion is formed of a porous body.

  According to the means 12, since the static pressure generating part is composed of the porous body, the static pressure can be suitably generated by the gas being throttled when passing through the porous body, and the squeezing passage is simple. The static pressure can be generated more evenly. As a result, the fixed portion and the movable portion can be supported in a non-contact manner in a stable state.

  Hereinafter, an embodiment of a compliance device will be described in detail based on the drawings. 1 is a sectional view of the compliance device, FIG. 2 is a plan view thereof, FIG. 3 is a plan view of the base as seen from the slider side, and FIG. 4 is a plan view of the slider as seen from the base side. 1 is a cross-sectional view taken along line AA in FIG.

  As shown in FIGS. 1 and 2, the compliance device 1 includes a base 2 having a substantially square shape in plan view. The base 2 is made of a nonmagnetic material such as stainless steel, and a port 3 is provided at an arbitrary position on the outer surface thereof. For example, the port 3 may be formed as a female screw hole in which a female screw for connecting a pipe is formed, or may be provided with a one-touch joint. When the compliance device 1 is used, a pipe from a pressure supply device (not shown) is connected to the port 3. The shape of the base 2 is not limited to the illustrated shape such as a substantially circular shape.

  A flat surface different from the surface on which the port 3 of the base 2 is provided is a support surface 2a, and the support surface 2a is a flat surface and is subjected to high-precision finishing. An accommodation groove 5 formed in an annular shape is formed in the support surface 2a. A circulation groove 6 is further formed in an annular shape on the bottom surface of the accommodation groove 5, similarly to the accommodation groove 5. A gas passage 7 that opens into the flow groove 6 is formed inside the base 2, and the flow groove 6 communicates with the port 3 through the gas passage 7.

  A porous body 8 formed in an annular shape is densely accommodated in the accommodation groove 5 in a state protruding from the support surface 2a of the base 2, and is fixed in that state. The porous body 8 has a projecting flat surface 8a (hereinafter referred to as a projecting surface 8a) that has been finished with high precision and has improved flatness. Pressurized gas supplied to the port 3 from a pressure supply device (not shown) is supplied to the porous body 8 through the gas passage 7 and the flow groove 6. Since the outer periphery of the porous body 8 protruding from the support surface 2a of the base 2 is sealed (not shown), the pressurized gas supplied to the porous body 8 is ejected from the protruding surface 8a. To do. The porous body 8 can be made of a metal material such as sintered aluminum, sintered copper, or sintered stainless steel, but other than that, a sintered trifluoride resin or a sintered tetrafluoride resin can be used. Further, it may be composed of a synthetic resin material such as sintered nylon resin or sintered polyacetal resin, sintered carbon, sintered ceramics, or the like.

  In the base 2, an accommodation recess 9 having a quadrangular shape in plan view is formed in a substantially central portion of the support surface 2 a inside the porous body 8. As shown in FIG. 3, the accommodating recess 9 accommodates a magnet 10 (permanent magnet) having the same outer shape as the accommodating recess 9 and is fixed in that state. The surface of the magnet 10 constitutes a part of the support surface 2 a of the base 2. In the base 2, a line passing through a substantially central portion of the support surface 2a, that is, a substantially central portion of the exposed surface of the magnet 10 (a line passing through a substantially central portion of the support surface 2a and orthogonal to the paper surface in FIG. 3) is a base center line. And The base 2 and the magnet 10 are formed with a base through-hole 11 penetrating from the support surface 2a to the opposite surface 2b with the base center line as the center.

  Further, a mounting protrusion 12 protruding from the surface 2b is provided on the surface 2b of the base 2 opposite to the support surface 2a. The mounting projection 12 is provided so that the center thereof coincides with the base center line, and the base through-hole 11 is also extended to the mounting projection 12. And the external thread part 12a is formed in the outer peripheral part of the protrusion 12 for attachment, and it is comprised so that the base 2 may be attached to another member via this protrusion 12 for attachment. Note that the mounting configuration of the base 2 and the other members is not limited to the configuration in which the male threaded portion 12a is formed on the outer peripheral portion of the mounting projection 12, and for example, it is configured to be mounted using a fixing tool such as a screw. May be.

  A slider 15 is provided on the support surface 2 a side of the base 2. The slider 15 is made of a magnetic material such as magnetic stainless steel, and has a substantially circular shape in plan view. And the diameter is formed so that it may become larger than the outer diameter of the porous body 8 provided in the support surface 2a of the base 2 in the annular | circular shape. For this reason, the slider 15 is supported in a non-contact manner by the pressurized gas ejected from the protruding surface 8a of the porous body 8 on the surface 15a on the base 2 side (hereinafter referred to as a supported surface 15a). That is, a pressure air layer is formed between the protruding surface 8 a of the porous body 8 and the supported surface 15 a of the slider 15, and static pressure is brought about. Accordingly, the slider 15 is supported in a non-contact manner on the support surface 2a of the base 2 (more specifically, the protruding surface 8a of the porous body 8).

  Note that the supported surface 15a of the slider 15 is a flat surface and is subjected to high-precision finishing. Further, as will be described later, the slider 15 is supported in a non-contact manner with its center axis substantially coincident with the base center line. However, even if the slider 15 deviates from that state due to the action of an external force, it is assumed. If the displacement is within the range, exposure of the porous body 8 is avoided.

  Here, if the slider 15 is simply supported in a non-contact manner by static pressure, the support of the slider 15 by the base 2 becomes unstable. For this reason, the compliance device 1 supports the slider 15 in a non-contact manner in a stable state by adopting the following configuration in addition to providing the magnet 10.

  As shown in FIG. 4, the supported surface 15 a of the slider 15 is provided with an annular groove 16 formed in an annular shape having a substantially square shape with the central axis as the center in plan view. As a result, a magnetized portion 17 that is convex with respect to the bottom of the annular groove 16 is formed inside the annular groove 16. Strictly speaking, as long as the slider 15 is formed of a magnetic material, the entire slider 15 is not considered to be a magnetized portion. However, in this embodiment, the inner side and the outer side are divided by the annular groove 16 formed in the supported surface 15a. For this reason, the inside of the annular groove 16 is referred to as a magnetized portion 17 in the sense that the magnetizing by the magnet 10 is stronger than the outside inside the annular groove 16. The shape when the magnetized portion 17 is viewed in plan, that is, the shape formed by the inner side of the annular groove 16 when the supported surface 15 a of the slider 15 is viewed in plan is provided on the support surface 2 a of the base 2. The magnet 10 is formed so as to have the same shape as viewed in plan. The magnetized portion 17 of the slider 15 and the magnet 10 on the base 2 side are opposed to each other, and the slider 15 is formed of a magnetic material as described above. The suction force attracted by the action acts.

  Here, general properties of the magnet will be described with reference to FIG. In FIG. 5, it is assumed that the magnet M is in a fixed state. In addition, the magnetic member J is supposed to be brought into contact with the magnet M when the magnetic member J is attracted to the magnet M. However, for convenience of explanation, it is assumed that the separated state is maintained. The pole of the magnet M may be the reverse of that shown.

  When the magnet M and the magnetic member J have parallel opposing planes Ma and Ja having the same planar shape, as shown in FIG. 5 (a), the opposing planes Ma and Ja are viewed in plan. In some cases, they are held in an overlapping state. This is because the magnetic force of the magnet M acting on the magnetic member J is most stable in this state. Therefore, as shown in FIG. 5B, when the position of the magnetic member J is shifted with respect to the magnet M, the magnetic member J is stabilized by the magnetic force of the magnet M as shown in FIG. Try to return to the state naturally. If the magnetic force is greater than a force that prevents the return (for example, an external force acting on the magnetic member J), the magnetic member J returns to the state shown in FIG.

  In the present embodiment, such a property of the magnet is utilized. That is, since the magnetized portion 17 is formed on the supported surface 15a of the slider 15 in accordance with the shape of the magnet 10 provided on the support surface 2a of the base 2, the two are opposed to each other without being displaced from each other. In this state, the slider 15 is drawn toward the base 2 side. The slider 15 that is in a non-contact supported state by the static pressure is supported in a non-contact state in a stable state at a position where the magnet 10 and the magnetized portion 17 face each other without any positional displacement. Since the center axis of the slider 15 passes through the center of the magnetized portion 17 and the base center line of the base 2 also passes through the substantially center portion of the magnet 10, the center axis of the slider 15 is substantially the same as the base center line. It will be supported in a non-contact manner in a matched state. Since the slider 15 is formed with a slider through hole 18 centered on the central axis thereof, the slider through hole 18 is connected to the base through hole 11. Note that the minute gap formed between the protruding surface 8a of the porous body 8 and the supported surface 15a of the slider 15 is determined by the magnetic force of the magnet 10 and the amount of the pressurized gas ejected. Therefore, it is possible to obtain a desired gap by adjusting the magnetic force and the ejection amount. Further, since the compliance device 1 may be arranged with the slider 15 facing down, in such a case, the magnet 10 that causes the slider 15 to exert an attractive force that does not cause the slider 15 to fall from the base 2 is required.

  Further, since the shape of the magnet 10 and the magnetized portion 17 is substantially rectangular, the position of the slider 15 supported in a non-contact manner with respect to the base 2 is a specified position. That is, the position where the magnet 10 and the magnetized portion 17 having a substantially square shape face each other without positional deviation, more specifically, the vertical and horizontal positions when the slider 15 is viewed in plan, and the orientation (directivity) at the position. ) Is specified as the initial state of the slider 15. For this reason, even if some external force acts on the slider 15 and the position of the slider 15 deviates from the initial state, the slider 15 returns to the original initial state if the external force is no longer applied. . On the other hand, if the shape of the magnet 10 and the magnetized portion 17 is circular, the slider 15 is supported in a non-contact manner at a position where the magnet 10 and the magnetized portion 17 are opposed to each other without positional displacement, but the position is specified by the vertical and horizontal positions. It is not possible to specify the direction only by being done. For this reason, even if the position of the slider 15 is displaced due to the action of the external force, even if the action of the external force disappears and returns, the state does not return to the same state as the initial state before the external force is applied.

  The slider 15 is provided with a protruding portion 19 that protrudes in the direction of the central axis from the flat surface at a substantially central portion opposite to the supported surface 15a. An attachment portion (not shown) is formed on the protrusion 19, and a suction pad and other various parts are attached to the tip of the protrusion 19 via the attachment portion. The slider through hole 18 is also formed in the protrusion 19.

  Here, an example of specific dimensions of the compliance device 1 configured as described above will be shown. In a plan view as shown in FIG. 2, the base 2 has a side of 11 mm, and the slider 15 has a diameter of 10.2 mm. The maximum amount of displacement when the slider 15 moves on a two-dimensional plane and a positional displacement with respect to the base 2 occurs is assumed to be 0.5 mm. The height between the support surface 2a of the base 2 and the flat surface of the projecting portion 19 of the slider 15 is 11 mm, and the gap between the base 2 and the slider 15 is 0.4 mm. The porous body 8 has an outer diameter of 9 mm and an inner diameter of 6.8 mm. One side of the portion of the magnet 10 that appears on the support surface 2a is 4 mm, and the width of the annular groove 16 is 0.6 mm. As described above, the compliance device 1 is very miniaturized, and the assumed displacement of the slider 15 is in a very small range of 0.5 mm or less.

  Next, a case where the compliance device 1 configured as described above is applied to a workpiece suction and conveyance device will be described as an application example of the compliance device.

  As shown in FIG. 6, the suction conveyance device 21 includes a device main body 22. The apparatus main body 22 is connected to a conveying device such as an actuator (not shown) and is configured to move to a predetermined position by the conveying device. A rod insertion hole 23 is formed in the apparatus main body 22, and a rod 24 is inserted into the rod insertion hole 23. A suction hole 25 is formed in the rod 24 along the longitudinal direction thereof. The compliance device 1 is attached to the tip of the rod 24. Specifically, it is attached by screwing the male screw portion 12a formed on the mounting projection 12 of the base 2 into the female screw portion 24a formed on the tip portion of the rod 24. By this attachment, the suction hole 25 of the rod 24 communicates with the base through hole 11 and the slider through hole 18 of the compliance device 1. Further, a suction pad 26 is attached to the protruding portion 19 of the slider 15 of the compliance device 1 via an attachment portion (not shown). A buffer function (not shown) is provided between the rod 24 and the apparatus main body 22.

  On the other hand, a pipe from a suction device (not shown) is connected to the proximal end portion of the rod 24. The suction force of the suction device acts on the proximal end portion of the rod 24, so that the suction force is adsorbed through the suction hole 25 of the rod 24, the base through hole 11 and the slider through hole 18 of the compliance device 1. It acts on the inside of the pad 26. As a result, the work is attracted to the suction pad 26.

  Next, the operation of the suction conveyance device 21 configured as described above will be described with reference to FIG. In FIG. 7, the positional deviation of the workpiece W and the displacement of the slider 15 with respect to the base 2 are emphasized for easy understanding.

  First, as illustrated in FIG. 7A, the suction conveyance device 21 performs an operation of causing a suction pad 26 to suck a work W (for example, a lens or a semiconductor chip) placed in the work storage unit 27. In this case, a transport device (not shown) places the suction transport device 21 above the work W and then lowers it toward the work W. Then, the suction pad 26 comes into contact with the workpiece W. At this time, the impact when the suction pad 26 abuts against the workpiece W is mitigated by the function of a shock absorber (not shown) provided in the suction device. When a suction device (not shown) is driven to apply a suction force to the suction pad 26, the workpiece W is sucked to the suction pad 26.

  Next, the transport device is driven to move the sucked workpiece W to the next step. In the transfer device, the suction transfer device 21 is disposed above another work storage unit 28 (see FIG. 7B), and is further lowered toward the work storage unit 28. If any external force is applied to the workpiece W during this time, the position of the slider 15 with respect to the base 2 deviates from the initial initial state. However, if the external force is no longer applied, the slider 10 is attached to the magnet 10 provided on the base 2. Due to the relationship with the magnetic part 17, the initial state is automatically restored.

  Here, when the conveyance device arranges the suction conveyance device 21 above the workpiece storage unit 28, it is difficult to completely match the position of the adsorption conveyance device 21 and the position of the workpiece storage unit 28. It is inevitable that a slight misalignment occurs. For this reason, as shown in FIG. 7B, when the suction conveyance device 21 is lowered toward the workpiece accommodating portion 28, the workpiece W is placed on a tapered portion (copying surface) 29 formed on the periphery of the workpiece accommodating portion 28. Will come into contact. When the suction conveyance device 21 is further lowered after the contact, the slider 15 of the compliance device 1 is automatically displaced along the taper portion 29. This is because, as described above, since the slider 15 is attracted by the magnet 10 provided on the base 2 and is supported in a non-contact manner by static pressure, it can move on the two-dimensional plane with respect to the base 2. It is because it is in a state. Then, the external force acting on the workpiece W acts on the slider 15 by descending while contacting the tapered portion 29, and the slider 15 is automatically displaced by the external force, and the displacement is absorbed. As a result, when the suction conveyance device 21 continues to descend, the workpiece W is finally disposed in the workpiece accommodating portion 28 as shown in FIG.

  Even when the workpiece W comes into contact with the tapered portion 29 and continues to descend thereafter, the impact generated at that time is alleviated by the shock absorber provided in the suction conveyance device 21, and the workpiece W is damaged. Is prevented. Further, the positional deviation amount of the slider 15 assumed by the compliance apparatus 1 (within 0.5 mm in the above-described specific dimensions) takes into account the positional deviation that occurs when the workpiece W is conveyed by the suction conveyance apparatus 21. Accordingly, it is assumed that the amount of positional deviation when the workpiece W is transported is very small.

  Thereafter, when the action of the suction force on the suction pad 26 is stopped and the suction transport device 21 is raised by the transport device, the suction pad 26 and the work W are separated from each other, and the work W is placed in the work storage portion 28. Only the suction conveyance device 21 is lifted. At this time, since the external force acting on the slider 15 is lost, the slider 15 automatically returns to the initial state from the relationship between the magnet 10 provided on the base 2 and the magnetized portion 17 of the slider 15.

  According to the compliance device 1 of the present embodiment described in detail above, static pressure is generated between the base 2 and the slider 15 due to the generation of static pressure by the porous body 8 and the action of the magnet 10 and the magnetized portion 17. Generation and attraction occur simultaneously. Thereby, relative non-contact support of both can be performed in a stable state. With such a configuration, even when the base 2 and the slider 15 are relatively displaced by the action of an external force, it is possible to prevent dust from being generated during the displacement. For this reason, the structure for removing dust like the conventional one is unnecessary, and the apparatus can be reduced in size accordingly. Moreover, since it is a non-contact support, there is no wear between the base 2 and the slider 15, and the device 1 can be used semi-permanently. Furthermore, because of non-contact support, vibration due to stick-slip or the like can be eliminated, and it is not necessary to consider the influence of such vibration on the workpiece.

  Further, when the slider 15 is displaced with respect to the base 2 by the action of an external force, the return from the displaced position to the initial state is performed by the action of the magnet 10 and the magnetized portion 17, so that the return is performed. In this means, the members do not contact each other as in the conventional configuration. For this reason, dust can be prevented from being generated even when the slider 15 returns to the initial state. In addition, since the magnet 10 and the magnetized portion 17 also serve as a non-contact supporting and displaceable structure, it can greatly contribute to the downsizing of the compliance device 1.

  Furthermore, since the supported surface 15a of the slider 15 is circular and the porous body 8 is formed in an annular shape, both of which have the same shape as a circular shape, the porous body 8 is supported by the supported surface 15a of the slider 15. Are provided along the circumferential direction. For this reason, the generation of static pressure on the supported surface 15a of the slider 15 is not limited to a part of the region, but is performed in a wide region along the circumferential direction of the supported surface 15a. For this reason, the non-contact support of the slider 15 can be performed in a stable state.

  Furthermore, the magnet 10 and the magnetized portion 17 for attracting the base 2 and the slider 15 and determining the initial state of the slider 15 are provided at substantially the center of the support surface 2a of the base 2 and the supported surface 15a of the slider 15, respectively. ing. For this reason, both of the base 2 and the slider 15 are attracted at a substantially central portion, and the both can be attracted without any bias.

  The embodiment is not limited to the above contents, and may be implemented as follows, for example.

  (A) In the embodiment described above, the magnet 10 whose shape appears on the support surface 2a of the base 2 is a substantially square shape is provided, but the shape of the magnet 10 is not limited to this shape. For example, it may be a polygonal shape such as a circular shape or a triangular shape. In this case, the shape of the magnetized portion 17 formed on the supported surface 15 a of the slider 15 is also formed in accordance with the shape of the magnet 10. However, as described above, in the case of a circular shape, the slider 15 that has been displaced can be automatically returned to a position where there is no displacement, but it is difficult to return to the position that has been specified to the direction. For this reason, there exists a fault that it is unsuitable for the workpiece | work W in which directionality is specified. In that sense, a non-circular shape is preferable to a circular shape.

  (B) In the above embodiment, only one substantially quadrangular magnet 10 is provided on the support surface 2a of the base 2, but a plurality of magnets may be arranged apart from each other. For example, as shown in FIG. 8, the structure which has arrange | positioned so that the shape which tied the several magnet 32 in order with the straight line may become a substantially square shape can be considered. In this case, the slider 15 may be formed with a magnetized portion 17 corresponding to each magnet 32, but the slider 15 is made of a non-magnetic material and corresponds to the base 2 side magnet 32 of the supported surface 15 a of the slider 15. It is good also as a structure which newly provided the magnet in the position to perform. According to such a configuration, the arrangement of the magnets can be variously devised compared to the case where only one magnet is provided, so that it is necessary to provide another member around the magnet 32, or the porous body. There is an advantage that a wide range of cases can be dealt with even when there is a restriction in the installation status of the magnet 32, such as when the shape of 8 is specified.

  Each of the plurality of magnets 32 on the support surface 2a of the base 2 and the supported surface 15a of the slider 15 has a center formed by connecting the magnets 32 in a straight line, and the support surface 2a and the supported surface 15a. It is preferable to arrange so that the center substantially coincides. As a result, the center when the base 2 and the slider 15 are attracted is the center of the support surface 2a and the supported surface 15a, so that both are attracted on the support surface 2a and the supported surface 15a without deviation. Can do.

(C) In the above-described embodiment, the slider 15 is supported on the base 2 in a non-contact manner by utilizing the action of the magnet 10 in a configuration in which the slider 15 moves on a two-dimensional plane, that is, so-called plane copying. However, a configuration in which the slider is supported in a non-contact manner using a magnet can also be adopted in the configuration in which spherical copying is performed. In this case, for example, a configuration as shown in FIG. 9 is considered as an example. In FIG. 9, the main body 34 of the spherical copying apparatus 33 includes a spherical porous body 38 to which a pressurized gas is supplied from a port 35 through a passage 36 and a flow groove 37. By ejecting from the surface, the slider 39 is supported in a non-contact manner. Magnets 40a and 40b are provided on the opposing surfaces of the spherical porous body 38 and the slider 39, respectively.
When the external force acting on the slider 39 is eliminated by the action of the magnets 40a and 40b, the slider 39 is positioned so that the magnet 40a on the slider 39 side and the magnet 40b on the main body 34 face each other without being displaced. Return to. For this reason, the effect similar to this Embodiment can be acquired.

  (D) In the above embodiment, the base 2 is made of a non-magnetic material and the magnet 10 is provided, and the slider 15 is made of a magnetic material and the magnetized portion 17 is formed. Good. That is, the magnet 10 is provided at a location where the slider 15 is made of a nonmagnetic material and the magnetized portion 17 is formed, and the magnetized portion 17 is formed at a location where the base 2 is made of a magnetic material and the magnet 10 is provided. It is also possible to adopt a configuration.

  (E) In the above embodiment, the slider 15 itself is made of a magnetic material, and the magnetized portion 17 is formed in accordance with the shape of the magnet 10. However, the slider 15 is made of a non-magnetic material, It is also possible to adopt a configuration in which a magnet that matches the shape of the magnet 10 is provided on the support surface 15a instead of the magnetized portion 17. Moreover, it is also possible not to provide a magnet but to configure only the magnetized portion 17 with a magnetic material.

  (F) In the above embodiment, the magnetized portion 17 is provided by forming the annular groove 16 on the supported surface 15a of the slider 15, but the magnetized portion 17 may be provided so as to protrude from the supported surface 15a. Is possible.

  (G) In the above embodiment, only the configuration in which the pressurized gas is supplied to the porous body 8 to support the slider 15 in a non-contact manner is shown, but the slider 15 can be sucked and held. That is, when a pipe from the suction device is connected to the port 3 and a negative pressure is applied to the porous body 8 via the gas passage 7 and the flow groove 6, the gas existing around the protruding surface 8 a of the porous body 8. Will be sucked. Along with this, the supported surface 15a of the slider 15 is attracted to the supporting surface 2a of the base 2 (more specifically, the protruding surface 8a of the porous body 8) and fixed at that position. For this reason, not only can the slider be fixed in the initial state, but it can also be fixed at a position deviated from the initial state due to the action of an external force. Can be spread.

  (H) In the above embodiment, the porous body 8 is formed in an annular shape, but may be formed in a substantially quadrangular ring shape or a plurality of independent porous bodies 8. However, in view of ease of manufacturing and cost, it is most preferable to form an annular shape.

  (I) In the above embodiment, the suction conveyance device 21 described as one application example of the compliance device 1 conveys the workpiece W while maintaining the state when the workpiece W is sucked. After that, a turning function of turning the workpiece W in a predetermined direction to change the direction may be provided. The application of the compliance device 1 is not limited to the suction conveyance device 21, and for example, it can be used as a stage for performing various operations on the workpiece W while the workpiece W is sucked to the slider 15 side. is there.

  (J) In the above-described embodiment, the base 2 and the slider 15 are attracted using the magnetism of the magnet 10. However, as a means for generating magnetism, an electromagnet or the like can be used in addition to the magnet 10. is there. However, it can be said that it is preferable to use a magnet in view of a demand for miniaturization of the apparatus and operability.

Sectional drawing which shows the compliance apparatus of this Embodiment (AA sectional view taken on the line of FIG. 2). The top view of FIG. The top view which shows the state which looked at the base from the slider side. The top view which shows the state which looked at the slider from the base side. Explanatory drawing for demonstrating the property of a magnet. FIG. 4 is a partial cross-sectional view illustrating a workpiece suction and conveyance device using a compliance device. Schematic which shows the conveyance process of the workpiece | work by a suction conveyance apparatus. The top view which shows the state which looked at the base from the slider side as another example of this embodiment. FIG. 7 is a partial cross-sectional view showing a spherical copying apparatus as another example of the present embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Compliance apparatus, 2 ... Base, 8 ... Porous body, 10 ... Magnet, 15 ... Slider, 17 ... Magnetization part.

Claims (12)

In a compliance device having a fixed part and a movable part that are relatively displaced by the action of an external force,
A compliance device configured to provide a static pressure generating portion that relatively non-contact-supports the fixed portion and the movable portion by jetting pressurized gas, and to draw both the fixed portion and the movable portion magnetically .   The compliance apparatus according to claim 1, wherein the static pressure generation by the static pressure generation unit and the magnetic attraction are performed between opposing planes of the fixed unit and the movable unit.   The compliance device according to claim 1 or 2, wherein a magnet is used to attract the magnet. A compliance device having a fixed portion and a movable portion that are relatively displaced by the action of an external force, and provided with a return means that automatically returns the fixed portion and the movable portion that have been relatively displaced when the external force is removed to an initial state. And
A static pressure generating part that relatively non-contact-supports the fixed part and the movable part by jetting pressurized gas is provided, and the fixed part and the movable part are configured to be attracted by a magnet. A compliance device in which the return means is configured using a magnet.   One of the fixed portion and the movable portion is formed of a non-magnetic material, and the magnet is provided on the non-contact support surface, and the other non-contact support surface is formed of a magnetic material and faces the magnet. 5. The compliance device according to claim 4, wherein a magnetized portion having the same shape as the opposing surface of the magnet is provided, and an annular groove is provided around the magnetized portion, thereby constituting the return means.   The fixed part and the movable part are formed of a non-magnetic material, the magnets are provided on both non-contact support surfaces, and the two magnets are configured so that the surfaces facing each other have the same shape. The compliance device according to claim 4, wherein the return means is configured as described above.   A plurality of the magnets are provided for each of the non-contact support surfaces of the fixed portion and the movable portion, the magnets are arranged separately from each other, and the arrangement of the plurality of magnets on each non-contact support surface is the same. The compliance device described in 1.   The compliance device according to claim 7, wherein the plurality of magnets are arranged such that a center of a shape formed by connecting the magnets in order with a straight line and a center of the non-contact support surface substantially coincide with each other.   6. A compliance device according to claim 5, wherein a magnet and a magnetized portion are provided on a non-contact support surface in claim 6, and the surfaces of the magnets facing each other are non-circular.   The structure in which both the fixed portion and the movable portion are attracted by the magnetism or the static pressure generating portion is disposed outside the magnet, and the static pressure generating portion is annularly formed along the circumferential direction of the non-contact support surface of the movable portion. The compliance device according to claim 1, which is provided.   The compliance device according to claim 1, wherein the magnet is provided at a central part of a non-contact support surface of the fixed part and the movable part.   The compliance device according to any one of claims 1 to 11, wherein the static pressure generating portion is formed of a porous body.

Images