JP2005108910A - Pulse power supply - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a pulsating current having the same energy as that obtained before a magnetic compression unit is replaced even if a reactor varies in value or a capacitor varies in capacitance with the replacement of the magnetic compression unit or the like. <P>SOLUTION: An input interface IF<SB>C</SB>is provided to a charging device unit, an energy change in a pulsating current attendant on the replacement of the magnetic compression unit or the charging device unit is compensated with the input set value change of a circuit constant by the interface. An interface where a circuit constant is previously input and set up is provided on the magnetic compression unit, and when the unit is replaced, the set value is taken into a new unit. When control constants, such as a pulse generation repetition frequency, charging energy per cycle, and a pulse voltage are changed, the control constants are changed to the input set values, and when the charging device units are connected in parallel, the number of device units connected in parallel is changed and inputted. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a pulse power source that uses a capacitor as a DC power source to generate high voltage and large current pulses, and more particularly to a charging device that repeatedly charges a capacitor to a set voltage.

A pulse power source used as a power source for an excimer laser, an ozonizer, or the like is configured as shown in FIG. 6, for example. The capacitor C ₀ is initially charged by the charging device HDC, and the voltage of the capacitor C ₀ is applied to the primary side of the pulse transformer PT through the saturable reactor SI ₀ by turning on the semiconductor switch SW, and the saturation operation of the saturable reactor SI ₀ The discharge current pulse-compressed by (magnetic switch operation) is supplied to the transformer PT as a primary current, and a boosted pulse current is generated on the secondary side of the transformer PT. The capacitor C ₁ is charged with this pulse current, the capacitor C ₂ in the next stage is charged with the discharge current pulse-compressed by the saturation operation of the saturable reactor SI ₁ , and further pulse-compressed with the saturation operation of the saturable reactor SI ₂ , By repeating the pulse compression, the capacitor Cn (peaking capacitor) in the final stage is charged with a high voltage, and an ultrashort pulse is generated in a load LH such as a laser oscillator as a load by the saturation operation of the saturable reactor SIn in the final stage (for example, Patent Document 1).

In the above pulse generation, the capacitor C ₀ is repeatedly charged to repeatedly generate a pulse current, and this pulse current is magnetically compressed and supplied repeatedly to the load. Charging device HDC repeatedly causes a half-cycle oscillating current to flow through a reactor that forms a series resonance circuit with capacitor C _0, and repeatedly charges the capacitor to a voltage given by a charging voltage command with the energy stored in the reactor. This operation is repeated 4000 times per second, for example.

The circuit configuration and control of the charging device HDC for this purpose will be described with reference to FIGS. 7a to 7d. First, the circuit operation of FIG. 7a will be described. When the switches S1 and S1 in the inverter 2 are turned on, a current flows through the path of the arrows A1 and A2 through the step-up transformer 3 and the rectifier circuit 4, and a half-cycle oscillating current begins to flow in the series resonant circuit of the reactor 5 and the capacitor 6 The capacitor 6 (capacitor C _{0 in} FIG. 6) is charged while storing energy in the reactor 5. Next, when S1 and S1 are turned off, the energy stored in the reactor 5 causes a current to flow through the path indicated by the arrow A3, transfers all of the energy to the capacitor 6, and further charges the capacitor 6. Similarly, the capacitor 6 is charged when the switches S2 and S2 are turned on and thereafter turned off. It should be noted that the switches S1 and S2 perform switching operations alternately for each charging command in order to prevent the step-up transformer 3 from being saturated.

In these charging operations, the reactor value of the reactor 5 is L, the capacitor capacity of the capacitor 6 is C, the current when the switch S is off is I, the charging voltage of the capacitor 6 is V ₀ , and the voltage of the capacitor 6 after the switch is off is V Then, from the law of conservation of energy,

Holds.

  The charging device charges the capacitor 6 to the charging voltage command V based on the above equation. That is, the following calculation is performed in real time at the same time that the charging current i and the capacitor voltage Vc are always detected.

  When this equation is established, the switch is turned off (see FIG. 8A for the waveform). FIG. 7b shows equivalently a step-down chopper type charging circuit excluding the step-up transformer 3 in the circuit of FIG. 7a, and its operating principle is equivalent to the circuit of FIG. 7a.

7c is a circuit of FIG. 7a, which is a step-up chopper type charging circuit in which a switch 7 and a diode 8 are added to the path from the reactor 5 to the capacitor 6, and the switch S1 in the inverter 2 (S2 at the next charging) and the switch 7 are The structure which turns on and off simultaneously is shown. Although the waveforms of the current i and the voltage Vc at this time are different, the control method is the same as the method described in the circuit of FIG. 7a (see FIG. 8B for the waveform). FIG. 7d shows an equivalent circuit obtained by removing the step-up transformer 3 from the circuit of FIG. 7c, and its operation principle is the same as that of FIG. 7c.
JP-A-8-130870

  The pulse power source is divided into three units of a charging device unit, a magnetic compression unit, and a load unit due to size and weight restrictions, and each unit is housed in a separate frame. For example, the main circuit configuration of each unit is as shown in FIG.

  Here, each unit has a device life, and each unit needs to be replaced after being used for a certain period. For example, when only the magnetic compression unit is replaced, the charging voltage is slightly changed due to a change in the capacitance of the capacitor C0 of the magnetic compression unit in FIG. Similarly, when only the charging device unit is replaced, a change in the reactor value of the reactor L1 causes a slight change in the charging voltage.

  As described above, when the circuit constant changes due to the replacement of the unit, the charging energy changes for the reason described in the following (1) and (2) while the charging device is kept at the same charging voltage command. If the charging energy changes before and after the unit replacement, the characteristics of the entire apparatus also change, which is not preferable. Therefore, there is a problem that the charger must be readjusted or the program must be changed every time the unit is replaced.

The charging energy after the unit replacement is expressed by the above formulas 1 and 2 when the charging energy before the unit replacement is (1/2) CV ² .
(1) When the reactor value of the reactor 5 changes from L to L ′ When the charging voltage is V ′, the amount of energy charged in the capacitor 6 is

And compared to before replacement,

Energy error occurs.

  (2) When the capacitance of the capacitor 6 changes from C → C ′ When the charging voltage is V ′, the amount of energy charged in the capacitor 6 is

And compared to before the replacement,

Energy error occurs.

  In addition to the above problems, the conventional charging apparatus has the following problems.

  -Even if charging devices have the same device capacity, the charge control circuit must be redesigned each time the number of repetitions, charging voltage range, and capacity of the capacitor C0 are different.

  -If the energy required for the load increases by 2 or 3 times, a charging device having a device capacity of 2 or 3 times must be developed each time, so that device development takes time and cost.

  An object of the present invention is to provide a pulse power supply that solves the above-described problems.

  In order to solve the above-mentioned problems, the present invention provides an input interface in the charging device unit, and further provides an input interface in the magnetic compression unit, which is accompanied by replacement of the magnetic compression unit or replacement of circuit elements of the charging device unit. The change of the pulse current energy due to the change of the circuit constant can be compensated by the change of the input set value of the circuit constant by the input interface. Further, the input interface has the same unit configuration, and can change the control constants such as the pulse generation repetition frequency, the charging energy per cycle, and the pulse voltage by changing the input set value. Further, the input interface is configured to be able to cope with a change in the number of units connected in parallel in a pulse power source that connects the charging device units in parallel to charge the capacitor of the magnetic compression unit by changing the input setting value. From the above, the present invention is characterized by the following configurations.

(1) A magnetic compression unit that generates a pulse current using a charged capacitor as a DC power supply, compresses the pulse current to a load and supplies the load to a load, and a half-cycle vibration from a reactor that forms a series resonance circuit with the capacitor In a pulse power supply configured to supply current to the capacitor and to be separated from a charging device unit that charges the capacitor with stored energy of the reactor,
The charging device unit is provided with an input interface in a charging control circuit, and the interface is configured to detect a change in pulse current energy due to a change in a circuit constant accompanying replacement of the magnetic compression unit or replacement of a circuit element of the charging device unit. Means is provided for compensating by changing a constant input set value.

  (2) The magnetic compression unit is provided with an input interface in which circuit constants of the circuit configuration are set in advance, and the charging device unit has a set value of the input interface when the magnetic compression unit is replaced. According to the present invention, means for controlling charging is provided.

  (3) The input interface provided in the charging device unit or the magnetic compression unit is configured to change control constants such as a repetition frequency of pulse generation in the magnetic compression unit and the charging device unit, charging energy per cycle, and pulse voltage. And a means for changing the input set value.

  (4) The input interface of the charging device unit is a means for changing the number of units connected in parallel in a pulsed power supply that connects the charging device units in parallel and charges the capacitors of the magnetic compression unit with the input set value. It is provided with.

  (5) The input interface of the charging device unit includes means for inputting and setting the period of one cycle in order to change the repetition frequency of pulse generation and the charging energy per cycle within the maximum device capacity of the pulse power supply. It is characterized by that.

  (6) The input interface of the charging device unit includes means for inputting and setting a maximum charging voltage value from the outside in order to always keep the resolution of the charging voltage command constant.

  As described above, according to the present invention, an input interface is provided in the charging device unit, and a change in pulse current energy due to a change in circuit constant due to replacement of a magnetic compression unit or replacement of a circuit element of the charging device unit is input. Since the compensation was made by changing the circuit constant input setting value by the interface, even if the reactor value or the capacitor capacity changed due to the replacement of the magnetic compression unit or charging device unit, the charge control circuit was changed by inputting the value from the outside It is possible to generate the same pulse current energy as before replacement.

  In addition, the magnetic compression unit is provided with an input interface in which circuit constants of the circuit configuration are set in advance, and the charging device unit takes in the set value of the input interface when the magnetic compression unit is replaced, Eliminates the need to re-enter the settings when replacing the magnetic compression unit.

  In addition, the input interface can be prevented from being input by the user by making the change impossible.

  Further, the input interface has the same unit configuration, and can respond to changes in control constants such as a pulse generation repetition frequency, charge energy per cycle, and pulse voltage by changing the input set value.

  Furthermore, the input interface can cope with a change in the number of units connected in parallel in a pulse power source that connects the charging device units in parallel and charges the capacitor of the magnetic compression unit by changing the input setting value. In this case, if the period of one cycle is extended, charging that has been performed by one switching until now can be performed a plurality of times. As a result, charging energy per cycle can be increased while suppressing the maximum current flowing through the reactor.

(Embodiment 1)
As shown in FIG. 1, the housing surface or the external charging device, providing an input interface IF _C. The interface IF _C, to the charge control circuit CPU of a computer configuration or hardware configuration, to allow setting and changing the circuit constant and the charge control constant of the charging device.

For example, the interface IF _C is required for the operation of the equation by the charging control circuit CPU, a reactor value of the reactor 5 and the capacitance of the capacitor 6, to be externally set.

The interface IF _C is such that the charging voltage of the capacitor 6 can be externally set.

The interface IF _C makes it possible to set change the date of one cycle from the outside.

Incidentally, the interface IF _C is programmable display device, a digital switch, stores the input values, analog trimmer, to use those that can be changed. Further, the value set in the interface IF _C is to prevent change by the user.

In the charging device provided with such an interface IF _C , the charging control circuit CPU reads various setting values of the interface IF _C when the power is turned on or when the setting is changed, and performs calculation for charging control based on these setting values. Do.

According to the above configuration, for example, when the capacitor 6 of the charging device has been replaced, without changing the content of operation of the charge control circuit CPU by inputting the value from the interface IF _C, with the same energy as before the replacement The capacitor 6 can be charged.

In addition, in the pulse power supply having the unit configuration shown in FIG. 9, the constant of a circuit element incorporated in the magnetic compression unit is changed, and the charging voltage required for the capacitor 6 of the charging device is changed accordingly. If, it may be dealt with by changing the setting charging voltage of the capacitor 6 from the interface IF _C. The charging voltage command can be set as a relative value with respect to the maximum charging voltage. In this case, the maximum charge voltage required for each use application is set to a relative value for a different charge voltage command, and the maximum charge voltage required for each use application can be input from the outside. The resolution can always be kept constant.

Further, by the value set in the interface IF _C to prevent users from changing, it can be prevented from entering the user incorrect values.

Moreover, by enabling the charging period changes for one cycle by the interface IF _C, can be charged which has been performed in one switching up to now multiple switching. As a result, the charging energy per cycle can be increased while suppressing the maximum current flowing through the reactor 5. FIG. 2 is a simulation waveform in the circuit of FIG. 7c or FIG. 7d. FIG. 2 (a) shows a case where the period of one cycle is short and the charging energy is small, and FIG. This is the case when the charging energy is large. When the period of one cycle can be changed from the outside in this way, the repetition frequency can be freely set within the range of the maximum output capacity (the maximum charge energy per one is small at the time of high repetition, and at the time of low repetition. Will be more).

  In addition, if the period of one cycle is extended, the switching period per one time can be extended and the charging energy per one time can be increased. However, in this case, since the maximum current flowing through the circuit increases, the switching element becomes the rated current. If a core is used for the reactor 5, the core will be saturated (or a larger core that will not saturate must be used). It is preferable to change the period in consideration of these.

(Embodiment 2)
This embodiment, as shown in FIG. 3, the housing surface of the magnetic compression unit or within, provided an equivalent interface IF _M apparatus as the embodiment 1. Charging device, at power start-up or reconfigured, reads the set value of the interface IF _C and IF _M to the charging control circuit CPU, controls charging based on these settings.

In this case, the interface IF _M, the circuit constants with the magnetic compression unit (e.g., a capacitor C _0, such as step-up ratio of the volume and the pulse transformer PT of the capacitor C1, C2) previously entered in advance. As a result, the amount of energy supplied to the load unit changes before and after replacing the magnetic compression unit, and the energy change is automatically performed without the user inputting a value and without changing the charging control circuit of the charging device. Note it is possible to prevent the interface IF _M is preferably a value that is input to prevent users from changing.

Therefore, according to this embodiment, in addition to the effects of Embodiment 1, when replacing the magnetic compression unit, the change setting value of the circuit element to be mounted, need to re-enter the interface IF _C of the charging device eliminates thereto .

(Embodiment 3)
This embodiment is a case where the present invention is applied to a charging device in which a plurality of charging circuits are connected in parallel to one capacitor 6 as shown in FIG.

In this charging apparatus, in the present embodiment, a similar interface IF _C first and second embodiments, the reactor value, in addition to such configuration changes capacitance to allow input and set parallel number from the outside.

Conventionally, when a charging energy required for a load is changed to 2 times or 3 times, a charging device has been developed in which the output capacity is doubled or tripled each time. In this regard, in the present embodiment, and connected to the charging control circuit of the charging device, the plurality of parallel of the same type of the charging device by providing one of the information the charging device from the interface IF _C is connected to any number parallel outputs The capacity can be increased by a factor of two or three.

  FIG. 5 (a) shows a simulation waveform when one charging device is used and FIG.

The circuit block diagram which shows Embodiment 1 of this invention. The simulation waveform in Embodiment 1. FIG. The circuit block diagram which shows Embodiment 2 of this invention. The circuit block diagram which shows Embodiment 3 of this invention. 10 is a simulation waveform according to the third embodiment. Configuration example of a pulse power supply. The circuit configuration of the charging device. An equivalent circuit of a charging device. The circuit configuration of the charging device. An equivalent circuit of a charging device. Simulation waveform. Unit configuration example of pulse power supply.

Explanation of symbols

1 DC power source 2 inverter 3 step-up transformer 4 rectifier circuit 5 reactor 6 capacitor CPU charging control circuit IF _C, IF _M interface

Claims (6)

A pulse current is generated by using a capacitor to be charged as a DC power source, the pulse current is magnetically compressed and supplied to a load, and a half cycle oscillation current is generated from a reactor that forms a series resonance circuit with the capacitor. In the pulse power supply configured to be separated from the charging device unit that supplies the capacitor and charges the capacitor with the stored energy of the reactor,
The charging device unit is provided with an input interface in a charging control circuit, and the interface is configured to detect a change in pulse current energy due to a change in a circuit constant accompanying replacement of the magnetic compression unit or replacement of a circuit element of the charging device unit. A pulse power supply comprising means for compensating by changing a constant input set value.   The magnetic compression unit is provided with an input interface in which circuit constants of the circuit configuration are set in advance, and the charging device unit is charged according to a set value of the input interface when the magnetic compression unit is replaced. The pulse power supply according to claim 1, further comprising means for performing the operation.   The input interface provided in the charging device unit or the magnetic compression unit is used to change the control constant such as the repetition frequency of pulse generation in the magnetic compression unit and the charging device unit, the charging energy per cycle, and the pulse voltage. The pulse power supply according to claim 1 or 2, further comprising means for changing the input set value.   The input interface of the charging device unit includes means for changing the number of units connected in parallel in a pulse power source that connects the charging device units in parallel and charges the capacitor of the magnetic compression unit, using the input set value. The pulse power supply according to any one of claims 1 to 3.   The input interface of the charging device unit includes means for inputting and setting the period of one cycle in order to change the repetition frequency of pulse generation and the charging energy per cycle within the maximum device capacity of the pulse power supply. The pulse power supply according to any one of claims 1 to 4, wherein   The input interface of the charging device unit includes means for inputting and setting a maximum charging voltage value from the outside in order to keep the resolution of the charging voltage command constant at all times. The pulse power supply described in the section.

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