JP2009170738A - Adjusting method for charger of high-voltage power source for pulse laser - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an adjusting method for a charger of a high-voltage power source for a pulse laser, by which output variations of the charger can be easily adjusted. <P>SOLUTION: The charger has at least one or more internal elements having a previously set design parameter, and a measured parameter obtained by actually measuring the internal elements is used as a new correction parameter instead of the design parameter and variations in the output of the charger are corrected. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a method for adjusting a charger, and more particularly, to a high-voltage power supply for a pulse laser that performs laser pulse oscillation by transferring energy stored in parallel-connected capacitors to a laser discharge unit via a magnetic pulse compression circuit. It is related with the adjustment method of a charger.

  In the high-voltage power supply for pulsed lasers, which is supplied to the laser discharge unit via the magnetic pulse compression circuit and performs laser pulse oscillation, the energy of the charger is transferred to a capacitor provided in the magnetic pulse compression circuit in accordance with the timing and stored. ing.

(Configuration of charger)
First, the basic configuration of the charger will be described.

  FIG. 5 is a diagram for explaining the basic configuration of the charger.

  In FIG. 5, the left side of the figure is the charger 1, and the right side of the figure is the magnetic pulse compression circuit 100 provided in the high-voltage power source for the pulse laser. The charger 1 is supplied with a three-phase AC voltage from an input power source 200. The input voltage of the input power source 200 is about 400V.

  The main circuit of the charger 1 has a configuration in which an input power supply side rectifying element 2, an electric field capacitor 3, a switching element 4 (for example, an IGBT element), a leakage transformer 5 and a high voltage power supply side rectifying element 6 are sequentially connected in parallel.

  More specifically, the input power supply side rectifying element 2 and the electric field capacitor 3 are electrically connected in parallel via the input voltage lines 7 and 8. The electric field capacitor 3 and the switching element 4 are electrically connected in parallel via the input voltage lines 7 and 8. The switching element 4 and the high voltage power supply side rectifying element 6 are magnetically connected in parallel via the leakage transformer 5. The high-voltage power supply side rectifying element 6 is electrically connected in parallel via the first storage capacitor C0 of the magnetic pulse compression circuit 100 and the output voltage lines 9 and 10.

  A first voltage dividing resistor 21 that measures the input voltage of the input power source 200 is electrically connected to the input voltage lines 7 and 8 in parallel with the electric field capacitor 3. The voltage dividing ratio of the first voltage dividing resistor 21 is set, for example, to 100: 1. Thereby, when 100 V is applied to the input voltage lines 7 and 8, 1 V is theoretically measured by the first voltage dividing resistor 21 in theory. The first voltage dividing resistor is provided with a trimmer (not shown), and the voltage dividing ratio of the first voltage dividing resistor 21 can be adjusted with the trimmer.

  A second voltage dividing resistor 22 that measures the output voltage output to the magnetic pulse compression circuit 100 is electrically connected in parallel to the output voltage lines 9 and 10 of the high-voltage power supply side rectifying element 6. The voltage dividing ratio of the second voltage dividing resistor 22 is set to 1000: 1, for example. Thus, when 1000 V is applied to the output voltage lines 9 and 10, 1 V is theoretically measured by the second voltage dividing resistor 22 in theory. The second voltage dividing resistor is provided with a trimmer (not shown), and the voltage dividing ratio of the second voltage dividing resistor 22 can be adjusted with the trimmer.

  Since the magnetic pulse compression circuit 100 is not essential in the present invention, only the capacitor C0 in which the energy transferred from the charger 1 is initially stored is shown in FIG. The high voltage power supply side rectifying element 6 of the charger 1 and the capacitor C0 of the magnetic pulse compression circuit 100 are electrically connected in parallel via the output voltage lines 9 and 10.

(Battery operation)
Next, the operation of the charger will be described.

  In FIG. 5, the voltage applied from the input power supply 200 is rectified via the input power supply side rectifying element 2, and the rectified voltage V <b> 1 is applied to the input voltage lines 7 and 8. The electric field capacitor 3 accumulates electric charges proportional to the applied voltage V1.

  The energy accumulated in the electric field capacitor 3 is transferred to the leakage transformer 5 at a predetermined timing by the switching element 4 and further converted into a higher voltage by the leakage transformer 5. The energy converted into the high voltage is rectified by the high voltage power supply side rectifying element 6 and output to the magnetic pulse compression circuit 100. The output voltage of the charger is about several tens of kV.

  The first voltage dividing resistor 21 connected to the input voltage lines 7 and 8 constantly measures the divided value of the voltage V1 of the input voltage lines 7 and 8. The measured partial pressure value is input to the control unit 15 provided in the charger 1.

  The second voltage dividing resistor 22 connected to the output voltage lines 9 and 10 constantly measures the divided value of the voltage V2 of the output voltage lines 9 and 10. The measured partial pressure value is input to the control unit 15 provided in the charger 1.

  In FIG. 5, the first voltage dividing resistor 21, the second voltage dividing resistor 22, and the leakage transformer 5 used as internal elements of the charger 1 are manufactured with preset design values. The internal elements have a manufacturing machine difference (variation) with respect to the design value, and few internal elements have the same value as the design value.

  Next, consider the case where the manufactured internal element does not have the same value as the design value.

  For example, it is assumed that the preset design voltage dividing ratio of the first voltage dividing resistor 21 is 100 to 1, and the actual voltage dividing ratio of the first voltage dividing resistor 21 is 100 to 0.9. When a voltage value of 100 V is applied to the input voltage lines 7 and 8, the first voltage dividing resistor 21 measures the divided voltage value of 0.9 V, and this divided value is input to the control unit 15. Then, the control unit 15 calculates that 100 × 0.9 V (= 90 V) is applied to the input voltage lines 7 and 8 based on the design voltage dividing ratio (here, 100 to 1). That is, a deviation of 10 V occurs in the voltage value (90 V) calculated based on the true voltage value (100 V) and the actually measured voltage division value.

  Similarly, it is assumed that the preset design voltage dividing ratio of the second voltage dividing resistor 22 is 1000: 1 and the actual voltage dividing ratio of the second voltage dividing resistor 22 is 1000: 0.9. When a voltage value of 10 kV is applied to the output voltage lines 9 and 10, the second voltage dividing resistor 22 measures the divided voltage value of 9 V, and this divided value is input to the control unit 15. Then, the control unit 15 calculates that 1000 × 9 V (= 9 kV) is applied to the output voltage lines 9 and 10 based on the design voltage dividing ratio (here, 1000 to 1). That is, a deviation of 1 kV is generated in the voltage value (9 kV) calculated based on the true voltage value (10 kV) and the actually measured divided voltage value.

  Here, for the convenience of the following description, “design parameters” and “measured parameters” are defined. The parameters of the present invention are defined by internal elements.

  A design value preset in the internal element of the charger 1, for example, a design voltage dividing ratio of the first voltage dividing resistor 21 (here, a voltage dividing ratio of 100 to 1) is referred to as a “design parameter”. An actually measured voltage dividing ratio (for example, 100 to 0.9) obtained by actually applying a voltage to the first voltage dividing resistor 21 is referred to as an “actual measurement parameter”. The same applies to the second voltage dividing resistor 22, and the description thereof is omitted. Here, the design parameter and the actual measurement parameter have a predetermined ratio.

  When the internal element is the leakage transformer 5, a preset design reactance value is referred to as a “design parameter”. The reactance value obtained by actually measuring the reactance of the leakage transformer 5 is referred to as “measured parameter”. Here, the design parameter is a predetermined physical quantity.

  As described above, for example, when the actually measured parameters of the first voltage dividing resistor 21 and the second voltage dividing resistor 22 are different from the design parameters, the voltages applied to the input voltage lines 7 and 8 and the output voltage lines 9 and 10. The value (true voltage value) cannot be obtained from the measured voltage dividing value of each voltage dividing resistor. Therefore, if there is a variation in the design parameters of the voltage dividing resistor of each charger, the output of each charger at the shipping stage will vary. The same applies to the leakage transformer 5. The variation in the output of the charger causes the performance of the pulse laser device using the high-voltage power supply for the pulse laser to deteriorate.

(Conventional charger adjustment method)
Therefore, conventionally, first, actually measured parameters are measured for each internal element, and then the measured parameters are adjusted to match the design parameters. The adjustment method will be described below. In the following description, the charger 1 shown in FIG. 5 is assumed.

  FIG. 6 is a process diagram of a conventional method for adjusting a charger of a high-voltage power supply for a pulse laser.

  The assembled charger 1 is turned on (step S1 ｀). Next, the first voltage dividing resistor 21 is selected as an adjustment item (step S2Ｓ). Next, a reference voltage (for example, 100 volts) is applied to both ends of the first voltage dividing resistor 21 (step S3 ｀), and a voltage dividing value output to the first voltage dividing resistor 21 is measured (step S4 ｀). ). Next, an actual measurement component measured by the first voltage dividing resistor 21 with respect to a design voltage division value (here, 1 V) calculated based on the reference voltage value (100 V) and the design parameter (here, a voltage division ratio of 100 to 1). The trimmer provided in the first voltage dividing resistor 21 is adjusted so that the pressure values match (step S5 ｀). More specifically, when the design voltage value calculated by the design parameter is 1V, the trimmer is adjusted so that the actually measured divided value measured by the first voltage dividing resistor 21 is 1V. Step S5 is a step of matching the actually measured parameter obtained by actual measurement with the design parameter. Steps S2 to S5 are repeated for other adjustment items (here, the second voltage dividing resistor 22) (step S6). Step S 6 ｀ is a step of matching the actually measured parameters with the design parameters for all the adjustment items to be processed. Finally, output control of the charger 1 is performed based on the design parameters of each internal element (step S7 ｀).

  In the above process, the leakage transformer is not an adjustment item. That is, in the case of the leakage transformer, the output control of the charger in step S7 is performed using the preset design parameter (design reactance value) as it is.

  As shown in the process diagram of FIG. 6, conventionally, in order to adjust the variation in the output of each charger at the shipping stage, the actual measurement parameters of the target internal elements were adjusted to match the design parameters. . Therefore, it took time and effort to adjust the output variation of the charger at the shipping stage. Further, in the case of adjusting the voltage dividing resistor by the trimmer, it is necessary to manage so that the trimmer position after shipment is not changed. In addition, after the shipment, if the trimmer position adjusted at the shipment stage moves for some reason, it is difficult to accurately return to the trimmer position at the time of shipment. If a trimmer is provided, the structure of the voltage dividing resistor becomes complicated.

  The present invention has been made in view of the above situation, and an object of the present invention is to provide a method for adjusting a charger for a high-voltage power supply for a pulse laser that can easily adjust variations in the output of the charger. It is.

In order to achieve the above object, the first invention
A control unit and at least one or more internal elements having preset design parameters, and the energy stored in the capacitors connected in parallel is transferred and supplied to the laser discharge unit via the magnetic pulse compression circuit. A method of adjusting the output of the charger, which is applied to a charger for a high-voltage power supply for a pulse laser that performs pulse oscillation,
The method of adjusting the output of the charger is as follows:
The control parameter is stored in advance in the control unit, the internal element is actually measured, the actually measured parameter obtained by the actual measurement is set as a new correction parameter, and then the correction parameter is stored in the control unit. The design parameter stored in advance is overwritten with the input correction parameter, and the output of the charger is adjusted based on the overwritten correction parameter.

  The first invention will be described with reference to FIGS.

  In FIG. 1, a charger 1 as a subject of the first invention includes a control unit 15 and at least one internal element. In FIG. 1, the internal elements include the first voltage dividing resistor 11, the second voltage dividing resistor 12, and the leakage transformer 5. However, in the first invention, the internal elements are not particularly limited to these internal elements.

  A method for adjusting the output variation of the charger by applying the charger having the above configuration as a charger for a high-voltage power supply for pulse laser is performed as follows.

  That is, in FIG. 2, the design parameter is stored in advance in the control unit (step S1), then the internal element is actually measured (step S2), and the actual measurement parameter obtained by the actual measurement is newly corrected. Next, the correction parameter is input to the control unit (step S4), the design parameter stored in advance is overwritten with the input correction parameter (step S5), and the overwritten correction is performed. Based on the parameter, the output of the charger is adjusted (step S6).

  As described above, in the first invention, the actually measured parameter obtained by actually measuring the internal element is not matched with the design parameter, and instead of the stored design parameter, the actually measured parameter obtained by actually measuring the internal element is corrected. Used as a parameter.

The second invention is the first invention,
The charger includes at least an input power supply side rectifying element, an electric field capacitor, a switching element, a leakage transformer, a high voltage power supply side rectifying element, a first voltage dividing resistor for measuring an input voltage of the input power supply, and the magnetic pulse compression circuit. A second voltage dividing resistor for measuring the output voltage output to the side,
The input power supply side rectifying element, the electric field capacitor and the switching element are sequentially connected in parallel,
The first voltage dividing resistor is connected in parallel to the electric field capacitor;
The second voltage dividing resistor is connected in parallel to the output side of the high-voltage power supply side rectifying element,
A method of adjusting a charger for a pulsed laser high voltage power supply, wherein the internal element is at least a first voltage dividing resistor, a second voltage dividing resistor, and the leakage transformer,
In the first voltage dividing resistor and the second voltage dividing resistor, each voltage dividing ratio is used as a parameter.
The leakage transformer is characterized in that a reactance value of the leakage transformer is used as a parameter.

The third invention is the first invention or the second invention,
An external computer is connected to the charger, the correction parameters are collectively input to the control unit of the charger, and then the design parameters are overwritten with the input correction parameters.

  The second and third inventions of the present application will be described together below. Hereinafter, description will be made with reference to FIGS. 1 and 3 using a second embodiment corresponding to the third invention, in which correction parameters are collectively input by an external computer.

  The charger of the third invention of the present application is directed to the configuration of FIG. 1, and is connected in such a manner that the input power supply side rectifying element 2, the electric field capacitor 3, the switching element 4, the leakage transformer 5, and the output power supply side rectifying element 6 are connected in parallel to each other. Has been. The first voltage dividing resistor 11 is connected in parallel to the electric field capacitor 3, and the second voltage dividing resistor 12 is connected in parallel to the output side of the high-voltage power supply side rectifying element. In the second invention of the present application, the leakage transformer 5, the first voltage dividing resistor 11, and the second voltage dividing resistor 12 are referred to as internal elements. In addition, the charger 1 is provided with a control unit 15, and the divided voltage values of the first voltage dividing resistor 11 and the second voltage dividing resistor 12 are input.

  A method for adjusting the output variation of the charger by applying the charger 1 having the above configuration as a charger for a pulse laser high voltage power supply is performed as follows.

  In FIG. 3, an external computer is connected to the control unit 15 of the assembled charger 1, and design parameters of the voltage dividing resistor set in advance for each internal element from the external computer are input and stored in the control unit 15 (step S10). Next, the actual measurement parameter (= actual reactance value) of the leakage transformer 5 measured by itself before assembling the charger 1 is input and stored in the control unit 15 by an external computer (step S20). Next, the assembled charger 1 is turned on (step S30). Next, the first voltage dividing resistor 11 is selected as an adjustment item (step S40), and thereafter, a reference voltage (for example, 100V) is applied to both ends of the first voltage dividing resistor 11 (step S50). The partial pressure output to the container 11 is actually measured (step S60). Next, an actual measurement parameter is calculated from the actually measured partial pressure value and the reference voltage value (step S70). Steps S40 to S70 are repeated for the second voltage dividing resistor 12 (step S80). If there are other adjustment items, step S80 is executed for the adjustment item. Next, the actual measurement parameters corresponding to the respective adjustment items calculated in steps S40 to 80 are collectively input to the control unit 15 as correction parameters by the external computer, and the previously stored design parameters are overwritten with the correction parameters (step S90). ). Next, output control of the charger 1 is performed based on the overwritten correction parameter (step S100).

  As described above, in the third invention of the present application, the actual measurement parameter obtained by actually measuring the voltage dividing resistor is not matched with the design parameter, and the actual measurement parameter obtained by actual measurement is used as a correction parameter instead of the design parameter. Yes. Further, the actually measured parameters of the leakage transformer are input and stored in the control unit 15. Further, correction parameters are input and stored in the control unit 15 by an external computer.

  According to the first invention of the present application, the actual measurement parameter is obtained by actually measuring the internal element, and then the design parameter is overwritten using the actual measurement parameter as the correction parameter, so that the adjustment time can be shortened. Further, since the correction parameter is stored in the controller of the charger, the correction parameter does not fluctuate in principle after shipment, and maintenance management after shipment becomes easy. Even if the correction parameter is deleted or fluctuated, it is only necessary to re-input the correction parameter to the control unit and store it, so that maintenance management becomes easy.

  According to the second invention, in addition to the effects of the first invention, there is no need to provide an adjustment trimmer in the voltage dividing resistor, the structure of the voltage dividing resistor is simplified and the manufacturing cost can be reduced. Further, since the design parameter of the leakage transformer can be overwritten with the actually measured parameter, the output of the charger can be controlled based on the true reactance value.

  According to the third aspect of the invention, in addition to obtaining the above effect, it is easy to adjust the charger because an external computer can be connected to the charger and correction parameters for adjusting the output of the charger can be input all at once. The effect becomes. In addition, maintenance management of the internal elements after shipment becomes easy.

  Hereinafter, an embodiment of a method for adjusting a charger for a high voltage power source for a pulse laser according to the present invention will be described with reference to the drawings.

  FIG. 1 is a diagram for explaining a charger to which the present invention is applied.

  The charger shown in FIG. 1 has the same basic configuration as the charger 1 described in FIG. Therefore, in FIG. 1 and FIG. 1 is different from FIG. 5 in that a trimmer for adjusting a voltage dividing ratio is not provided in the first voltage dividing resistor 11 and the second voltage dividing resistor 12.

  In FIG. 1, the left side of the figure is a charger 1, and the right side of the figure is a magnetic pulse compression circuit 100 provided in a high-voltage power source for pulse laser. The charger 1 is supplied with a three-phase AC voltage from an input power source 200. The input voltage of the input power source 200 is about 400V.

  The main circuit of the charger 1 has a configuration in which an input power supply side rectifying element 2, an electric field capacitor 3, a switching element 4 (for example, an IGBT element), a leakage transformer 5 and a high voltage power supply side rectifying element 6 are sequentially connected in parallel.

  More specifically, the input power supply side rectifying element 2 and the electric field capacitor 3 are electrically connected in parallel via the input voltage lines 7 and 8. The electric field capacitor 3 and the switching element 4 are electrically connected in parallel via the input voltage lines 7 and 8. The switching element 4 and the high voltage power supply side rectifying element 6 are magnetically connected in parallel via the leakage transformer 5. The high-voltage power supply side rectifying element 6 is electrically connected in parallel via the first storage capacitor C0 of the magnetic pulse compression circuit 100 and the output voltage lines 9 and 10.

  The first voltage dividing resistor 11 that measures the input voltage of the input power supply 200 is electrically connected to the input voltage lines 7 and 8 in parallel with the electric field capacitor 3. The voltage dividing ratio of the first voltage dividing resistor 11 is set, for example, to 100: 1. Thereby, when 100 V is applied to the input voltage lines 7 and 8, 1 V is theoretically actually measured by the first voltage dividing resistor 11. The voltage dividing ratio of the first voltage dividing resistor 11 is set, for example, to 100: 1. The first voltage dividing resistor 11 is not provided with a trimmer for adjusting the voltage dividing ratio.

  The second voltage dividing resistor 12 that measures the output voltage output to the magnetic pulse compression circuit 100 is electrically connected to the output voltage lines 9 and 10 in parallel with the high-voltage power supply side rectifying element 6. For example, the voltage dividing ratio of the second voltage dividing resistor 12 is set to 1000: 1. Thereby, when 1000 V is applied to the output voltage lines 9 and 10, 1 V is theoretically measured by the second voltage dividing resistor 12. Note that the second voltage dividing resistor 12 is not provided with a trimmer for adjusting the voltage dividing ratio.

  Since the magnetic pulse compression circuit 100 is not essential in the present invention, only the capacitor C0 in which the energy transferred from the charger 1 is initially stored is shown in FIG. The high voltage power supply side rectifying element 6 of the charger 1 and the capacitor C0 of the magnetic pulse compression circuit 100 are electrically connected in parallel via the output voltage lines 9 and 10.

  As described in the background art, in the conventional method for adjusting the output variation of the charger, an internal element having a preset design parameter is measured, and then the actually measured parameter is adjusted. A method of adapting to the design parameters was adopted.

However, the above adjustment method has the following two problems. That is,
It takes time to actually measure the internal elements to obtain the actually measured parameters, and then adjust the actually measured parameters to match the design parameters.

B) After adjusting the measured parameters of the internal elements to the design parameters, it is necessary to keep the adjusted state unchanged. For example, when the voltage dividing resistor is adjusted with a trimmer, it is necessary not to change the adjusted trimmer position. Also, if the trimmer position moves for some reason, it is difficult to return to the trimmer position adjusted at the time of shipment.

  In view of this, the present invention employs a method that can adjust the variation in the output of the charger without taking into account the problems (a) and (b).

  That is, the present invention does not take a method of matching the actually measured parameter with the design parameter. In the present invention, instead of using a preset design parameter, a method of adjusting the output variation of the charger 1 by using an actual measurement parameter obtained by actually measuring an internal element as a new correction parameter is adopted.

(Principle of the adjustment method of the present invention)
The principle of the adjustment method of the present invention will be described below by taking the first voltage dividing resistor 11 of the charger 1 of FIG. 1 as an example.

  In FIG. 1, it is assumed that the design parameter of the first voltage dividing resistor 11 stored in advance in the control unit 15 of the charger 1 is a voltage dividing ratio of 100: 1. It is assumed that a reference voltage of 100 V is applied to both ends of the first voltage dividing resistor 11 and the measured voltage dividing value of the first voltage dividing resistor 11 is 0.9 V (that is, the measured parameter is a voltage dividing ratio of 100 to 0.9). Is). The controller 15 calculates based on the measured partial pressure value 0.9V and the design parameters. Here, since the design parameter is 100 to 1, the calculated voltage value is 100 × 0.9 V = 90 V, which is a voltage value lower than the true voltage value (100 V).

  Therefore, in the present invention, instead of the design parameter, an actual measurement parameter obtained by actual measurement is used as a new correction parameter. For example, when the actual measurement parameter is 100 to 0.9, the correction parameter is set to 100 to 0.9. Next, this correction parameter is replaced with a design parameter. The applied voltage value is calculated based on the actually measured partial pressure value and the newly replaced correction parameter.

  According to the method using the correction parameter, when the applied reference voltage value is 100 V and the measured voltage dividing value is 0.9 V, the voltage value of the first voltage dividing resistor 11 calculated based on the correction parameter is 0. .9V × 100 / 0.9 = 100V, which matches the reference voltage value of 100V. That is, by replacing the correction parameter in place of the design parameter, a true voltage value can be obtained from the actually measured divided voltage value.

  As described above, in the present invention, when the internal element is a voltage dividing resistor, a true voltage value is obtained using an actually measured parameter that is an actually measured voltage dividing ratio instead of a design parameter, and the charger 1 is based on the voltage value. The output variation is adjusted. Similarly, when the internal element is a leakage transformer, the output variation of the charger 1 is adjusted based on the measured reactance value obtained by actual measurement instead of the design parameter.

  As described above, the present invention accepts that there are manufacturing variations in internal elements. Instead, each internal element is actually measured to obtain an actual measurement parameter, and the obtained actual measurement parameter is used as a correction parameter to adjust the variation in the output of the charger.

  The charger 1 applied to the first invention of this application includes a control unit 15 and at least one or more internal elements in FIG. In FIG. 1, the internal elements include the first voltage-dividing resistor 11, the second voltage-dividing resistor 12, and the leakage transformer 5. However, the first invention is not particularly limited to these internal elements. For example, only the second voltage dividing resistor 12 may be used as the internal element.

  A method for adjusting the output variation of the charger 1 by applying the charger 1 having the above configuration as the charger 1 of the high-voltage power supply for pulse laser is performed as follows.

  FIG. 2 is a process diagram for explaining the first embodiment of the present invention. In addition, the code | symbol of the components in the following respond | corresponds to the code | symbol of the components of FIG.

  The design parameter is stored in advance in the control unit 15 (step S1), and then the internal element is actually measured (step S2). The actually measured parameter obtained by the actual measurement is set as a new correction parameter (step S3). Then, the correction parameter is input to the control unit (step S4), the design parameter stored in advance is overwritten with the input correction parameter (step S5), and the output of the charger is based on the overwritten correction parameter. Is adjusted (step S6).

  As described above, in the first invention of this application, the actually measured parameter obtained by actually measuring the internal element is not matched with the design parameter, and the actually measured parameter obtained by actually measuring the internal element is used as a correction parameter instead of the design parameter. ing.

  As a result, the actual measurement parameter is obtained by actually measuring the internal element, and then the design parameter is overwritten using the actual measurement parameter as the correction parameter, so that the adjustment time can be shortened. Further, since the correction parameter is stored in the controller of the charger, the correction parameter does not fluctuate in principle after shipment, and maintenance management after shipment becomes easy. Even if the correction parameter is deleted or fluctuated, it is only necessary to re-input the correction parameter to the control unit and store it, so that maintenance management becomes easy.

  The charger 1 to which the second embodiment of the present invention is applied has the configuration shown in FIG. That is, the input power supply side rectifying element 2, the electric field capacitor 3, the switching element 4, the leakage transformer 5, and the output power supply side rectifying element 6 are connected to the charger 1 in a manner in which they are connected in parallel. The first voltage dividing resistor 11 is connected in parallel to the electric field capacitor 3, and the second voltage dividing resistor 12 is connected in parallel to the output side of the high-voltage power supply side rectifying element. In the second invention of the present application, the leakage transformer 5, the first voltage dividing resistor 11, and the second voltage dividing resistor 12 are internal elements. In addition, the charger 1 is provided with a control unit 15, and the divided voltage values of the first voltage dividing resistor 11 and the second voltage dividing resistor 12 are input.

  A method for adjusting the output variation of the charger by applying the charger having the above configuration as a charger for a high-voltage power supply for pulse laser is performed as follows.

  FIG. 3 is a process diagram for explaining a second embodiment of the present invention. In addition, the code | symbol of the components in the following respond | corresponds to the code | symbol of the components of FIG.

  An external computer is connected to the controller 15 of the assembled charger 1, and design parameters of the voltage dividing resistor set in advance for each internal element from the external computer are input to the controller 15 and stored (step S10). Here, the voltage dividing resistors are the first voltage dividing resistor 11 and the second voltage dividing resistor 12, and the design parameter is a voltage dividing ratio of each voltage dividing resistor. Next, the actual measurement parameter (= actual reactance value) of the leakage transformer 5 measured by itself before assembling the charger 1 is input and stored in the control unit 15 by an external computer (step S20).

Next, the assembled charger 1 is turned on (step S30).

  Next, the first voltage dividing resistor 11 is selected as an adjustment item (step S40), and thereafter, a reference voltage (for example, 100V) is applied to both ends of the first voltage dividing resistor 11 (step S50). The partial pressure output to the container 11 is actually measured (step S60). Next, an actual measurement parameter is calculated from the actually measured partial pressure value and the reference voltage value (step S70). For example, when the actually measured partial pressure value is 0.9 V, the actually measured parameter is calculated to be 100 to 0.9. Steps S40 to S70 are repeated for the second voltage dividing resistor 12 (step S80). If there are other adjustment items, step S80 is executed for the adjustment item.

  Next, the actual measurement parameters corresponding to the adjustment items calculated in steps S4 to S80 are collectively input to the control unit 15 as correction parameters by the external computer, and the previously stored design parameters are overwritten with the correction parameters (step S90). ). Next, output control of the charger 1 is performed based on the overwritten correction parameter (step S100).

  In the second embodiment, as shown in FIG. 3, design parameters are input to the control unit 15 in step S10. However, step S10 may be omitted depending on circumstances. The configuration and symbols of the charger are the same as those in the second embodiment, and the description thereof is omitted.

  FIG. 4 is a process diagram for explaining a third embodiment of the present invention.

  The assembled charger 1 is turned on (step S200). Next, the actual measurement parameter (= actual reactance value) of the leakage transformer 5 measured by itself before assembling the charger 1 is input and stored in the control unit 15 by an external computer (step 201).

  Next, the first voltage dividing resistor 11 is selected as an adjustment item (step S202), and thereafter, a reference voltage (for example, 100V) is applied to both ends of the first voltage dividing resistor 11 (step S203). The partial pressure output to the container 11 is actually measured (step S204). Next, an actual measurement parameter is calculated from the actually measured partial pressure value and the reference voltage value (step S205). For example, when the actually measured partial pressure value is 0.9 V, the actually measured parameter is calculated to be 100 to 0.9. Steps S202 to S205 are repeated for the second voltage dividing resistor 12 (step S206). If there are other adjustment items, step S206 is executed for the adjustment item.

  Next, the actual measurement parameters corresponding to the respective adjustment items calculated in steps S202 to 206 are collectively input as correction parameters to the control unit 15 by an external computer and stored in the control unit 15 (step S207). Note that the process of step S201 can also be performed in step S207. Next, output control of the charger 1 is performed based on the stored correction parameter (step S208).

  The adjustment method of the third embodiment has an advantage that the number of steps is smaller than that of the first embodiment. On the other hand, in the case of the first embodiment, design parameters are first stored in the control unit 15, and then the design parameters stored in the control unit 15 are read out by an external computer. Therefore, the read design parameter and the actually measured parameter obtained by actual measurement can be compared on the screen, the difference between the two can be confirmed, and then the correction parameter can be input. Therefore, the adjustment method according to the first embodiment has an advantage of avoiding input mistakes during adjustment.

  In the second and third embodiments, an external computer and the control unit 15 of the charger 1 are connected and communicated with each other, thereby inputting design parameters to the control unit 15 and overwriting with correction parameters.

  Instead of using an external computer, the charger 1 is provided with a display unit and an input unit, and design parameters are input and stored in the control unit 15 from the input unit while viewing the display on the display unit. The correction parameter may be input to the design parameter, and the design parameter stored in the control unit 15 may be overwritten with the correction parameter.

According to the adjustment method above,
(1) The actual measurement parameter is obtained by actually measuring the internal element, and then the design parameter is overwritten using the actual measurement parameter as a correction parameter, so that the adjustment time can be shortened.

(2) Since the correction parameter is stored in the controller of the charger, the correction parameter does not fluctuate in principle after shipment, and maintenance management after shipment becomes easy. Even if the correction parameter is deleted or fluctuated, it is only necessary to re-input the correction parameter to the control unit and store it, so that maintenance management becomes easy.

(3) It is not necessary to provide an adjustment trimmer in the voltage dividing resistor, and the structure of the voltage dividing resistor is simplified and the manufacturing cost can be reduced.

(4) Since the design parameter of the leakage transformer can be overwritten with the actually measured parameter, the output of the charger 1 can be controlled based on the true reactance value.

(5) Since the correction parameters for adjusting the output of the charger can be input at once by connecting an external computer to the charger, the adjustment of the charger is easy.

  In the present invention, the charger having the configuration shown in FIG. 1 is assumed. However, it is obvious that internal elements other than those shown in FIG. 1 may be components of the charger.

FIG. 1 is a diagram for explaining a charger to which the present invention is applied. FIG. 2 is a process diagram for explaining the first embodiment of the present invention. FIG. 3 is a process diagram for explaining a second embodiment of the present invention. FIG. 4 is a process diagram for explaining a third embodiment of the present invention. FIG. 5 is a diagram for explaining the basic configuration of the charger. FIG. 6 is a process diagram of a conventional method for adjusting a charger of a high-voltage power supply for a pulse laser.

Explanation of symbols

C0 Capacitor 1 Charger 2, 6 Rectifier element 3 Electric field capacitor 4 Switching element 5 Leakage transformer 11 First voltage divider resistor 12 Second voltage divider resistor 15 Control unit

Claims (3)

A control unit and at least one or more internal elements having preset design parameters, and the energy stored in the capacitors connected in parallel is transferred and supplied to the laser discharge unit via the magnetic pulse compression circuit. A method of adjusting the output of the charger, which is applied to a charger for a high-voltage power supply for a pulse laser that performs pulse oscillation,
The method of adjusting the output of the charger is as follows:
The control parameter is stored in advance in the control unit, the internal element is actually measured, the actually measured parameter obtained by the actual measurement is set as a new correction parameter, and then the correction parameter is stored in the control unit. Adjustment of the charger of the high-voltage power supply for pulsed laser, wherein the input is overwritten with the design parameter stored in advance with the input correction parameter, and the output of the charger is adjusted based on the overwritten correction parameter Method. The charger includes at least an input power supply side rectifying element, an electric field capacitor, a switching element, a leakage transformer, a high voltage power supply side rectifying element, a first voltage dividing resistor for measuring an input voltage of the input power supply, and the magnetic pulse compression circuit. A second voltage dividing resistor for measuring the output voltage output to the side,
The input power supply side rectifying element, the electric field capacitor and the switching element are sequentially connected in parallel,
The first voltage dividing resistor is connected in parallel to the electric field capacitor;
The second voltage dividing resistor is connected in parallel to the output side of the high-voltage power supply side rectifying element,
A method of adjusting a charger for a pulsed laser high voltage power supply, wherein the internal element is at least a first voltage dividing resistor, a second voltage dividing resistor, and the leakage transformer,
In the first voltage dividing resistor and the second voltage dividing resistor, each voltage dividing ratio is used as a parameter.
The method of adjusting a charger for a high-voltage power supply for a pulse laser according to claim 1, wherein the leakage transformer uses a reactance value of the leakage transformer as a parameter.   2. An external computer is connected to the charger, the correction parameters are collectively input to a control unit of the charger, and then the design parameters are overwritten with the input correction parameters. Or the adjustment method of the charger of the high voltage power supply for 2 pulse lasers.

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