JP2005095831A - Slit nozzle - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a slit nozzle in which it is suppressed to make an apparatus large-sized and to increase the weight even when a flow passage width adjusting mechanism is provided. <P>SOLUTION: The slit nozzle 50 is provided with a slit like flow passage 6 having a U-shaped cross-section. The slit like flow passage 6 is formed between the inside walls of pieces 1 and 2 opposed to each other. A through-hole 8 penetrating from the outside wall to the inside wall is formed in the piece 1. A female screw 9 is formed on the inside surface of the through hole 8. A male screw 10 engaged with the female screw 9 and for adjusting the width of the slit like flow passage 6 by moving back and forth through the through-hole 8 toward the piece 2 to push or pull the piece 2 is provided in the slit nozzle 50. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an adjustment mechanism for adjusting the width of a slit-like channel in a slit nozzle used for spraying a liquid onto a substrate transported by a transport means.

  In general, a substrate manufacturing process such as a liquid crystal panel includes an application process for applying a chemical on a substrate, a cleaning process for processing the substrate in a cleaning tank by a conveying means, a pure water replacement process for replacing the processing liquid with pure water, and finally There is a drying process in which air is blown onto a substrate wet with water to dry the substrate.

  In recent years, in order to improve productivity, a tool with speedy and powerful processing capability is required in each of the above processes. In particular, in the processing of a substrate that is increasing in size to m square size, a flat-flow type device that injects a fluid (liquid or gas) to the substrate by a slit nozzle such as an aqua knife or an air knife is generally used. .

  The channel width (also referred to as slit width or slit gap) of such a slit nozzle is usually set to several tens to several hundreds of μm. However, when the long side of the slit nozzle exceeds 1 m, it is difficult to achieve a flow path width of several tens to several hundreds μm over the entire width only with the processing accuracy of the machine tool. Further, in order to make the flow path width variable, it is necessary to provide a separate adjustment mechanism for the flow path width.

  Therefore, Patent Document 1 proposes a mechanism for pushing and pulling the outer wall surface of the slit nozzle with a screw as a mechanism for adjusting the flow path width. In addition, the said screw is attached to the flow-path width adjusting plate attached to the slit nozzle in the rotatable state. Hereinafter, the mechanism will be described with reference to FIG.

  FIG. 17 is a cross-sectional view showing an extrusion type coating apparatus as a slit nozzle. The coating apparatus 100 includes an integrated die 103 having a paint reservoir 101 and a slit-like channel 102 connected to the paint reservoir 101 therein. And the coating device 100 is arrange | positioned so that the opening part 102A of a slit-shaped flow path and the application | coating target object (not shown) of the nonmagnetic support body which are not shown in figure may oppose.

  Furthermore, out of the side wall constituent parts 103A and 103B forming the slit-like flow path 102, the outer wall of one side wall constituent part 103A (the outer wall of the coating device 100) has a longitudinal direction parallel to the flow direction of the flow path. An auxiliary plate 104 is provided. Through holes 104A and 104B are formed in the auxiliary plate 104 toward the outer wall of the side wall constituting portion 103A. A female screw portion 104C is formed on the inner surface of the through hole 104A. Furthermore, a female screw hole 103C is formed on the outer wall of the side wall constituting portion 103A, which is coaxial with the through hole 104B.

  Here, a passage width reducing screw 105 is inserted into the through hole 104A, and a passage width increasing screw 106 is supported in the through hole 104B. The flow path width reducing screw 105 and the flow path width increasing screw 106 constitute a flow path width adjusting mechanism 107.

  The flow path width reduction screw 105 includes a head portion 105A, a cylindrical portion 105B, and a male screw portion 105C. The male screw portion 105C is screwed with the female screw portion 104C. Furthermore, the front end portion of the male screw portion 105C is in contact with the outer wall surface of the side wall constituting portion 103A.

  In the above configuration, when the passage width reducing screw 105 is rotated with respect to the female screw portion 104C, the passage width reducing screw 105 is moved to the side wall constituting portion 103A side. As a result, the channel width reducing screw 105 presses the outer wall of the side wall constituting portion 103A, and the side wall constituting portion 103A can be displaced toward the slit-like channel 102, and the width of the slit-like channel 102 can be reduced and adjusted. .

  The channel width expanding screw 106 is composed of a head portion 106A, a cylindrical portion 106B, and a male screw portion 106C. The passage width increasing screw 106 passes through the through hole 104B so that the male screw portion 106C is positioned on the side wall constituting portion 103A side. Furthermore, the male screw portion 106C is screwed into the female screw hole 103C.

  In the above configuration, when the passage width increasing screw 106 is rotated with respect to the female screw hole 103C, the position of the passage width increasing screw 106 does not move, and the side wall constituting portion 103A is moved to the auxiliary plate 104. It is designed to be drawn to the side. As a result, the side wall constituting portion 103A can be displaced toward the auxiliary plate 104, and the width of the slit-shaped channel 102 can be enlarged and adjusted.

That is, in the coating apparatus 100 as described above, the width of the slit-shaped channel 102 does not change and the side wall is not changed in a state where the side wall constituting portion 103A is not displaced by the channel width reducing screw 105 and the channel width increasing screw 106. The inner wall of the component 103A is at the reference position. From this state, by tightening the channel width reduction screw 105, the inner wall of the side wall constituting portion 103A is displaced from the reference position toward the side wall constituting portion 103B, thereby reducing the channel width of the slit-like channel 102. Can be adjusted. Further, by tightening the passage width increasing screw 106, the inner wall of the side wall constituting portion 103A can be displaced from the reference position toward the auxiliary plate 104, and the passage width of the slit-like passage 102 can be enlarged and adjusted.
JP 10-15461 A (published January 20, 1998)

  Here, according to the coating apparatus 100 having the above-described configuration, as is apparent from FIG. 17, the flow path width adjusting mechanism 107 is configured to press or draw the outer wall of the die 103 (the outer wall of the side wall constituting portion 103 </ b> A). Therefore, the auxiliary plate 104 for supporting the flow path width adjusting mechanism 107 is necessary.

  However, in order to support the flow path width reduction screw 105 and the flow path width expansion by the auxiliary plate 104, it is necessary to configure the auxiliary plate 104 having a thickness approximately equal to the thickness of the side wall constituting portion. When such an auxiliary plate 104 is provided together with the die 103, the thickness of the auxiliary plate 104 is added to the entire apparatus, which causes a problem of an increase in size and weight of the entire apparatus. In particular, when the length of the die 103 in the flow path direction is close to 2 m, the weight of the entire apparatus becomes several tens of kg. Such an increase in the size and weight of the entire apparatus has caused a problem of directly affecting workability such as installation of slit nozzles and flow path width adjustment.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a slit nozzle that can suppress an increase in size and weight of the apparatus even if a flow path width adjusting mechanism is provided.

  In order to solve the above problems, the slit nozzle of the present invention is a slit nozzle provided with a slit-shaped flow path having a U-shaped cross section, wherein the slit-shaped flow path includes an inner wall and a second piece of a first piece facing each other. A through-hole is formed between the outer wall of the first piece and the inner wall from the outer wall of the first piece, and the second piece is moved forward and backward along the direction of the second piece by moving the through-hole along the direction of the second piece. A channel width adjusting means for adjusting the width of the slit channel by pressing or drawing is provided.

  In the slit nozzle of the present invention, in addition to the above configuration, a first female screw is formed on the inner surface of the through hole, the flow path width adjusting means is screwed to the first female screw, and the tip is the second screw. It may be a first male screw that contacts the inner wall of the piece.

  In the slit nozzle of the present invention, in addition to the above configuration, the opening of the through hole in the outer wall of the first piece may be covered with an elastic member for preventing leakage.

  In the slit nozzle of the present invention, in addition to the above configuration, the first male screw is smoother than the first screw thread region, which is screwed with the first female screw, from the tip side toward the head. The structure in which the elastic member close_contact | adherence area | region is formed at least may be sufficient.

  In the slit nozzle of the present invention, in addition to the above configuration, the outer diameter of the first thread formation region may be equal to or smaller than the outer diameter of the elastic member adhesion region.

  In the slit nozzle of the present invention, in addition to the above-described configuration, a spot facing may be formed on the outer wall of the first piece, and an opening of the through hole may be formed on the bottom face of the spot facing.

  In addition to the above configuration, the slit nozzle of the present invention further includes a second female screw formed on the side surface portion of the counterbore, the opening is covered with a leakage preventing elastic member, and the second female screw is A second male screw for pressing the leakage preventing elastic member may be screwed into the opening of the first female screw.

  The slit nozzle of the present invention is provided with a plurality of the through holes and the first male screws and a plurality of the spot facings in addition to the above configuration, and a flow path that connects the spot facings adjacent to each other. May be formed.

  In addition to the above-described configuration, the slit nozzle of the present invention is substantially coaxial with the through hole, and has a third female screw formed on the inner wall of the second piece. It may be a third male screw that is supported by and screwed into the third female screw.

  In the slit nozzle of the present invention, in addition to the above configuration, the opening of the through hole in the outer wall of the first piece may be covered with an elastic member for preventing leakage.

  In the slit nozzle of the present invention, in addition to the above-described configuration, the third male screw is a second screw thread region that is screwed with the third female screw from the tip side, and an elastic member adhesion region that is smoother than the screw thread. May be formed at least.

  In the slit nozzle of the present invention, in addition to the above configuration, the outer diameter of the second thread formation region may be equal to or smaller than the outer diameter of the elastic member adhesion region.

  In the slit nozzle of the present invention, in addition to the above configuration, a spot facing may be formed on the outer wall of the first piece, and an opening of the through hole may be formed on the bottom face of the spot facing.

  In addition to the above configuration, the slit nozzle of the present invention further includes a fourth female screw formed on a side surface portion of the counterbore, the opening is covered with an elastic member for leakage prevention, A third male screw for pressing the leakage preventing elastic member may be screwed into the opening of the through hole.

  The slit nozzle of the present invention is provided with a plurality of the through holes and the third male screws and a plurality of the spot facings in addition to the above configuration, and a flow path that connects the spot facings adjacent to each other. May be formed.

  In the slit nozzle of the present invention, as described above, the slit-shaped flow path is formed between the inner wall of the first piece and the inner wall of the second piece facing each other, and penetrates the inner wall from the outer wall of the first piece. Channel width adjusting means for adjusting the width of the slit channel by pressing or pulling the second piece by forming a through hole and moving the through hole forward and backward along the direction of the second piece. Is provided.

  As a result, the flow path width adjusting means moves the through hole penetrating the inner wall from the outer wall of the first piece to press or pull the second piece, so that the second piece relative to the first piece The relative position can be adjusted. Therefore, the width of the slit-shaped channel formed between the inner wall of the first piece and the inner wall of the second piece that are U-shaped in cross section and are opposed to each other can be adjusted.

  Here, the channel width adjusting means is configured to penetrate the inner wall from the outer wall of the first piece. Therefore, the flow path width adjusting means can be supported by the slit nozzle itself. As a result, there is no need to provide an auxiliary plate or jig for supporting the flow path width adjusting means along with the slit nozzle, compared to a conventional slit nozzle that requires the auxiliary plate or jig to be provided along with the slit nozzle. As a result, an increase in weight and size of the entire apparatus can be suppressed.

  In the slit nozzle of the present invention, as described above, the first female screw is further formed on the inner surface of the through hole, the flow path width adjusting means is screwed to the first female screw, and the tip is the second screw. Since the first male screw is in contact with the inner wall of the piece, the first male screw can be displaced in the direction of the second piece by tightening the first male screw in the direction of the second piece. As a result, a pressing force is applied to the second piece by the tip of the first male screw, and the second piece is displaced away from the first piece, so that the width of the slit channel can be enlarged and adjusted. .

  That is, the slit nozzle can be provided with the channel width adjusting means simply by forming the male screw and the female screw, and the auxiliary plate and jig for the channel width adjusting means need not be provided in the slit nozzle. Play.

  In the slit nozzle of the present invention, as described above, since the opening portion of the through hole in the outer wall of the first piece is covered with the leakage preventing elastic member, the slit hole from the slit channel Even if a liquid flows into the liquid, it can be suppressed that the liquid leaks from the through hole.

  In the slit nozzle of the present invention, as described above, the first male screw is smoother than the first screw thread region, which is screwed with the first female screw, from the tip side toward the head. A flexible elastic member adhesion region is formed at least. As a result, even if the head of the first male screw protrudes from the opening, the first male screw and the first female screw can be screwed together. The elastic member for leakage prevention can be brought into close contact with the elastic member close contact region. Here, the elastic member contact area is an area smoother than the thread.

  Therefore, it is possible to suppress the formation of a clearance between the first male screw and the opening, and it is possible to suppress the liquid from leaking from the through hole. The elastic member contact area may be in any shape that allows the elastic member to be in close contact, and for example, a cylindrical shape is preferable.

  In the slit nozzle of the present invention, as described above, the outer diameter of the first thread formation region is not more than the outer diameter of the elastic member contact region. If the outer diameter of the first thread formation region is equal to or larger than the outer diameter of the elastic member contact region, the leakage prevention can be achieved by displacing the first male screw in a direction opposite to the direction toward the second piece. There is a possibility that the elastic member for engagement engages with the first thread forming region and the elastic member for leakage prevention is damaged. In this regard, according to the above configuration, the outer diameter of the first thread formation region is set to be equal to or smaller than the outer diameter of the elastic member contact region. Thereby, it can suppress that the said elastic member for leak prevention engages with the said 1st thread formation area, and there exists an effect that the damage of the said elastic member for leak prevention can be suppressed.

  In the slit nozzle of the present invention, as described above, a counterbore is formed on the outer wall of the first piece, and an opening of the through hole is formed on the bottom surface of the counterbore. The first male screw is inserted into the through-hole formed in the bottom surface portion.

  Therefore, even when the head of the first male screw is configured to protrude from the opening, the head of the first male screw is configured not to protrude from the wall surface of the first piece. it can. Thereby, there exists an effect that it can suppress that the said 1st external thread is damaged at the time of conveyance of a slit nozzle, for example.

  In the slit nozzle of the present invention, as described above, the second female screw is further formed on the side surface portion of the counterbore, the opening is covered with the leakage preventing elastic member, and the second female screw is connected to the second female screw. A second male screw for pressing the leakage preventing elastic member is screwed into the opening of one female screw. Therefore, when the second male screw is tightened to the opening side of the through hole, the second male screw presses the leakage preventing elastic member. By the action of the pressing force, the leakage preventing elastic member can be brought into close contact with the bottom surface portion of the spot facing while the leakage preventing elastic member covers the opening.

  That is, according to the above configuration, the leakage preventing elastic member is supported by the second male screw which is a mechanism different from the first male screw and the second female screw on the side surface portion of the counterbore. become. Therefore, when the first male screw is moved forward and backward, it can be moved forward and backward without loosening the adhesion of the leakage preventing elastic member acting on the first male screw. Accordingly, the first male screw can be tightened independently of the liquid leakage preventing action of the leakage preventing elastic member.

  As described above, the slit nozzle of the present invention is further provided with a plurality of the through holes and the first male threads, and a plurality of the spot facings, so as to connect the spot facings adjacent to each other. A road is formed. Accordingly, even when a plurality of the through holes and the first male screws are provided and a plurality of the spot facings are also provided, a flow path that connects the spot facings adjacent to each other is formed. Therefore, even if liquid leaks from the opening, it is possible to prevent mixing with the liquid ejected from the slit nozzle.

  As described above, the slit nozzle of the present invention is further substantially coaxial with the through hole, and has a third female screw formed on the inner wall of the second piece. A third male screw supported in the hole and screwed into the third female screw. Accordingly, when the third male screw is rotated so as to be tightened with respect to the third female screw, the third female screw and the second piece can be drawn toward the first piece. Thereby, since the second piece is displaced so as to approach the first piece, the width of the slit channel can be reduced and adjusted.

  That is, the slit nozzle can be provided with the channel width adjusting means simply by forming the male screw and the female screw, and the auxiliary plate and jig for the channel width adjusting means need not be provided in the slit nozzle. Play.

  In the slit nozzle of the present invention, as described above, since the opening portion of the through hole in the outer wall of the first piece is covered with the leakage preventing elastic member, the slit hole from the slit channel Even if a liquid flows in, the effect that it can suppress that the fluid leaks from the said through hole is produced.

  In the slit nozzle of the present invention, as described above, the third male screw is further in contact with the elastic member smoother than the second screw thread region, which is screwed with the third female screw, from the tip side. Since the region is formed at least, the third male screw and the third female screw can be screwed together even if the head of the third male screw protrudes from the opening. The leakage preventing elastic member can be brought into close contact with the elastic member close contact region of the third male screw. Here, the elastic member contact area is an area smoother than the thread.

  Therefore, it is possible to suppress the formation of a clearance between the male screw and the opening, and it is possible to suppress the leakage of liquid from the through hole.

  As described above, in the slit nozzle of the present invention, the outer diameter of the second thread formation region is not more than the outer diameter of the elastic member contact region.

  If the outer diameter of the second thread formation region is equal to or larger than the outer diameter of the elastic member contact region, the leakage prevention can be achieved by displacing the third male screw in a direction opposite to the direction toward the second piece. There is a risk that the elastic member for engagement engages with the second thread formation region and the elastic member for leakage prevention is damaged. So, according to the said structure, the outer diameter of the said 2nd thread formation area is made below into the outer diameter of the said elastic member contact | adherence area | region. Thereby, it can suppress that the said elastic member for leak prevention engages with the said 2nd thread formation area, and there exists an effect that the failure | damage of the said elastic member for leak prevention can be suppressed.

  As described above, the slit nozzle of the present invention is further provided with a spot facing on the outer wall of the first piece, and an opening of the through hole is formed on the bottom face of the spot facing. The third male screw is inserted into the through hole formed in the bottom surface of the grease. Therefore, even when the head of the third male screw is configured to protrude from the opening, the head of the third male screw is configured not to protrude from the wall surface of the first piece. it can. Thereby, there exists an effect that it can suppress that the said 1st external thread is damaged at the time of conveyance of a slit nozzle.

  As described above, in the slit nozzle of the present invention, the fourth female screw is formed on the side surface portion of the counterbore, the opening is covered with the leakage preventing elastic member, and the fourth female screw is A third male screw for pressing the leakage preventing elastic member is screwed into the opening of the through hole. Thereby, when the fourth male screw is tightened to the opening side of the through hole, the fourth male screw presses the leakage preventing elastic member. By the action of the pressing force, the leakage preventing elastic member can be sealed against the bottom surface portion of the spot facing while the leakage preventing elastic member covers the opening.

  That is, according to the above configuration, the leakage preventing elastic member is fixed to the bottom surface of the counterbore by the fourth male screw which is a mechanism different from the third male screw and the fourth female screw on the side surface of the counterbore. It will adhere to the part. Therefore, when the third male screw is moved forward and backward, it can be moved forward and backward without loosening the adhesion of the leakage preventing elastic member acting on the third male screw. Thus, the third male screw can be tightened independently of the liquid leakage preventing action of the leakage preventing elastic member.

  As described above, the slit nozzle according to the present invention is further provided with a plurality of the through holes and the third male screws, and a plurality of the spot facings, so as to connect the spot facings adjacent to each other. A road is formed. Thereby, even if it is a case where a plurality of the above-mentioned penetration holes and the above-mentioned 3rd male screw are provided, and a plurality of the above-mentioned counterbore are also provided, a channel which connects the counterbore adjacent to each other is formed. Therefore, even if liquid leaks from the opening, it is possible to prevent mixing with the liquid ejected from the slit nozzle.

[Embodiment 1]
An embodiment of the present invention will be described below with reference to FIGS. FIG. 2 is a perspective view showing the slit nozzle 50 of the present embodiment. The slit nozzle 50 is used in a manufacturing process of a substrate such as a liquid crystal panel, and is for ejecting a liquid to the substrate.

  Here, examples of the liquid include a cleaning liquid for cleaning the panel substrate, pure water for replacing the panel substrate with pure water, and the like.

  As shown in FIG. 2, the slit nozzle 50 is a nozzle for ejecting the liquid stored in the liquid reservoir provided inside from the jet outlet 6 </ b> A through the internal slit-like channel. Here, the slit-like channel is a channel cut between the jet port 6A and the liquid reservoir.

  1 is a cross-sectional view of the slit nozzle 50 shown in FIG. Hereinafter, the direction in which the liquid is ejected is defined as the A direction, and the direction opposite to the direction in which the fluid is ejected is defined as the B direction.

  As shown in FIG. 1, the slit nozzle 50 has a configuration in which a piece 1 (first piece) and a piece 2 (second piece) are opposed to each other at a predetermined interval and integrated. In addition, the jet nozzle 6A for ejecting a liquid is formed in the A direction side edge part of the slit nozzle 50, and in order to arrange | position the piece 1 and the piece 2 in the B direction side edge part of the slit nozzle 50 facing each other. The oppositely arranged bolts 5 (opposing arrangement means) are provided. In the following, the direction in which the piece 1 and the piece 2 face each other is defined as the CD direction, the direction in which the piece 1 is provided with respect to the piece 2 is the C direction, and the piece 2 with respect to the piece 1 is provided. This direction is defined as the D direction.

  Note that the outer wall of the slit nozzle 50, the portion corresponding to the wall surface of the piece 1 is the outer wall of the piece 1, and the portion corresponding to the wall surface of the piece 2 is the outer wall of the piece 2. In addition, an inner wall (flow channel wall) of the slit nozzle 50, a portion corresponding to the wall surface of the piece 1 is an inner wall of the piece 1, and a portion corresponding to the wall surface of the piece 2 is an inner wall of the piece 2.

  The inner wall of the piece 2 is formed in parallel with the AB direction. In addition, the inner wall of the piece 1 is mostly formed in parallel along the AB direction, but a concave portion is formed along the CD direction in the central portion.

  Then, as shown in FIG. 6, the spacer 4 is sandwiched between the inner wall of the piece 1 and the inner wall of the piece 2. The spacer 4 is U-shaped and is sandwiched so that the U-shaped opening 4a is positioned on the A direction side. The spacer 4 is made of an elastic material or a material that can be plastically deformed by a load, and also functions as a leakage preventing member.

  Furthermore, the piece 1, the spacer 4, and the piece 2 are fixed in close contact with each other by the opposing arrangement bolt 5. Thereby, the inner wall of the piece 1 and the inner wall of the piece 2 can be opposed to each other with an interval corresponding to the size of the spacer 4 in the CD direction.

  By integrating the piece 1 and the piece 2 in this way, the inner wall of the piece 1 and the inner wall of the piece 2 are arranged in parallel with each other along the B direction from the A direction side. Thereby, the slit-like flow path 6 having a U-shaped cross section is formed by the inner wall of the piece 1, the inner wall of the piece 2, and the spacer 4. In addition, 6 A of jet nozzles are formed in the A direction side edge part of the slit nozzle 50. As shown in FIG. In the central portion of the slit nozzle 50, the liquid reservoir 6B is formed by the inner wall of the piece 2 and the concave portion.

  With the above configuration, the liquid stored in the liquid reservoir 6B can be poured into the slit-like flow path 6 and ejected through the ejection port 6A.

  In the above configuration, the piece 1 and the piece 2 are used as separate and independent members. If the piece 1 and the piece 2 are the same member, the slit nozzle must be manufactured by hollowing out the inside of the long material (nozzle body), which requires complicated work. According to the embodiment, it is not necessary to perform such a complicated operation.

  Further, when the slit nozzle is manufactured by hollowing out the inside, a complicated work of removing burrs generated inside by tapping is required, but according to the present embodiment, this work is easy.

  Furthermore, in a slit nozzle manufactured by hollowing out the inside of a long material, it is impossible to perform surface treatment such as buffing on the flow path (inner wall portion). Further, when a foreign object is caught in the slit, the slit nozzle manufactured by hollowing out the inside of the long material cannot be disassembled. However, according to the structure of this Embodiment, since the piece 1 and the piece 2 are comprised by the mutually independent member, the slit nozzle 50 can be disassembled easily. Accordingly, the surface treatment can be easily performed, and disassembly maintenance can be easily performed even when a foreign object is caught in the slit.

  As described above, in manufacturing the slit nozzle 50, it is ideal that the piece 1 and the piece 2 are formed of separate members. However, unlike the present embodiment, the nozzle bodies are not necessarily formed of separate members. Even if the slit nozzle is manufactured by hollowing out the interior of the long material (nozzle body), the effects of the present invention can be obtained. Is possible.

  Next, the flow path width adjusting means which is an embodiment of the present invention will be described. As shown in FIG. 1, a through hole 8 is formed in the piece 1 from the inner wall to the outer wall, and a female screw 9 (first female screw) is formed on the inner surface of the through hole 8. .

  A male screw 10 (first male screw) as a flow path width adjusting means is screwed to the female screw 9. Here, the male screw 10 is supported by the through-hole 8 with its tip abutting on the inner wall of the piece 2 (also referred to as joining) and with its head protruding from the outer wall of the piece 1.

  According to the above configuration, when the male screw 10 is rotated so as to be tightened with respect to the female screw 9, the male screw 10 can be displaced in the D direction, and a pressing force is applied to the piece 2 by the tip of the male screw 10. Let Thereby, since the piece 2 is displaced away from the piece 1, the width of the slit-shaped flow path in the CD direction can be enlarged and adjusted. On the other hand, when the male screw 10 that has been tightened is loosened to the original position, the piece 2 is restored and displaced so that the piece 2 approaches the piece 1 by the urging action within the range in which the urging force works, and the width of the slit channel in the CD direction is increased. Reduction adjustment is possible. Note that when the flow path width is adjusted to be reduced beyond the range in which the urging force is applied, another flow path width adjusting unit in the second embodiment described later is used.

  Even if the flow path width of the slit nozzle 50 is adjusted by the male screw 10, the liquid does not leak from between the piece 1 and the spacer 4 or between the piece 2 and the spacer 4. This is because the spacer 4 is a member for preventing leakage, and even if the flow path width of the slit nozzle 50 is adjusted, the displacement of the piece 2 due to the flow path width adjustment is not reduced as long as the opposing arrangement bolt 5 is not loosened. This is because it does not reach the seal portion. That is, if the sealing action of the spacer 4 is maintained, no liquid leakage occurs between the piece 1 and the spacer 4 or between the piece 2 and the spacer 4.

  Next, a specific configuration of the male screw 10 will be described as follows. FIG. 3 is a cross-sectional view showing a specific configuration of the male screw 10 of FIG. As shown in FIG. 3, the male screw 10 includes a thread region 10A (first thread region), a columnar region 10B (elastic member adhesion region), a thread region 10C, and a head portion 10D in this order from the tip side. It is configured. In addition, the outer periphery of the head 10D is configured to be larger than the outer periphery of the thread region 10A, the columnar region 10B, and the thread region 10C.

  Then, the nut 11, the support ring 12, and the sealing material 13 (leakage preventing elastic member) are attached to the male screw 10 in this order from the tip side to the head side.

  The nut 11 is formed with a female screw hole that is screwed into the screw thread region 10C. Further, the support ring 12 is formed with a through hole having a diameter larger than that of the thread region 10A, the columnar region 10B, and the thread region 10C and smaller than the head portion 10D. Moreover, the sealing material 13 is formed so as to be in close contact with the columnar region 10B.

  That is, the thread region 10C of the male screw 10 and the female screw hole of the nut 11 are screwed together, the male screw 10 is inserted into the inner periphery of the support ring 12, and the sealing material 13 is placed in the cylindrical region 10B of the male screw 10. It will be fitted.

  When the male screw 10 is inserted into the through hole 8 with the tip directed in the D direction, as shown in FIG. 4, the thread region 10A is screwed with the female screw 9, and the sealing material 13 is formed in the cylindrical region 10B. It is inserted. The sealing material 13 covers the opening of the through hole 8 in the outer wall of the piece 1.

  Further, the thread region 10 </ b> C is screwed with the nut 11. A support ring 12 surrounding the male screw 10 is provided between the nut 11 and the sealing material 13. That is, the sealing material 13, the support ring 12, and the nut 11 are arranged adjacent to each other in this order from the outer wall of the piece 1 toward the C direction.

  Here, after adjusting the width of the slit-shaped flow path 6 with the male screw 10 as the flow path width adjusting means, the nut 11 is tightened in the D direction. Thereby, the pressing force from the nut 11 is applied to the support ring 12. Further, by the pressing force of the support ring 12, the sealing material 13 is in close contact with the cylindrical region 10 </ b> B and the outer wall of the piece 1, and seals the opening of the through hole 8 in the outer wall of the piece 1. The nut 11 is tightened against the thread region 10C so that the support ring 12 and the seal material 13 are not loosened.

  Thereby, the sealing material 13 covers the opening of the through hole 8 in the outer wall of the piece 1. Therefore, even if a liquid flows into the through-hole 8 from the slit-shaped flow path 6, it can suppress that this liquid leaks from the said opening part.

  Usually, in the slit nozzle 50, since a high pressure of several MPa is applied to the liquid in the slit-shaped flow path 6, it is effective to prevent leakage of the liquid with the sealing material 13 as described above.

  In the configuration of FIG. 4, even if the support ring 12 is not provided, the sealing material 13 is sealed to the outer wall of the piece 1 and the cylindrical region 10 </ b> B by directly applying the pressing force from the nut 11 to the sealing material 13. be able to.

  Further, the elastic member contact region may not be the columnar region 10B, and may have any configuration as long as the surface is smoother than the thread. That is, since it is difficult for the sealing material to be in close contact with the screw thread, the male screw 10 may be configured with an elastic member contact region that is a smoother surface than the screw thread. However, it is possible to adjust the width of the slit-shaped flow path 6 without forming the elastic member contact area in the male screw 10.

  Further, the channel width adjusting means is not limited to the structure of the male screw 10 shown in FIG. The flow path width adjusting means can be changed in design in any manner as long as it is supported by the piece 1 and moves or retracts the through-hole 8 in the direction of the piece 2 to press or pull the piece 2.

  For example, the male thread 14 (first male thread) as shown in FIG. 5 may be used as the channel width adjusting means. The male screw 14 has a structure in which a thread region 14A (first thread region), a columnar region 14B (elastic member contact region), a thread region 14C, and a head portion 14D are formed in this order from the tip side. The diameter of the head 14D is configured to be larger than the diameters of the thread region 14A, the columnar region 14B, and the thread region 14C.

  Further, a lock nut 15, a support ring nut 16, and a seal material 13 are attached to the male screw 14 shown in FIG. 5 in this order from the tip side to the head side.

  The support ring nut 16 is formed with a female screw hole to be screwed with the thread region 14C and a region in close contact with the sealing material. Further, the lock nut 15 is formed with a female screw hole that is screwed into the screw thread region 14C.

  That is, in the male screw 14, the screw thread region 14 </ b> A is screwed with the female screw 9, the sealing material 13 is fitted in the columnar region 14 </ b> B, and the screw thread region 14 </ b> C is the female screw hole of the support ring nut 16 and the lock nut 15. Screwed into the female screw hole. Hereinafter, the difference between the male screw 14 of FIG. 5 and the male screw 10 shown in FIG. 4 will be described.

  The male screw 10 shown in FIG. 4 has an outer diameter of the thread region 10A equal to or larger than the outer diameter of the cylindrical region 10B, but the male screw 14 shown in FIG. 5 has an outer diameter of the thread region 14A that is cylindrical. It is below the outer diameter of the region 14B.

  In the case of the male screw 10 shown in FIG. 4, when the male screw 10 is displaced toward the C direction side by loosening the male screw 10, the sealing material 13 engages with the thread region 10A, and the sealing material 13 becomes the thread region. There is a risk of being damaged by 10A. Further, when assembling the slit nozzle 50 and attaching the sealing material 13 to the male screw 10, there is a similar concern.

  However, in the case of the male screw 14 shown in FIG. 5, even if the male screw 14 is displaced toward the C direction side by loosening the male screw 14, a clearance is generated between the sealing material 13 and the thread region 14A. Thereby, it can suppress that the sealing material 13 engages with 14 A of thread areas, and can suppress the failure | damage of the sealing material 13. FIG.

  Further, according to the configuration of the male screw 14 shown in FIG. 5, the support ring nut 16 is in close contact with the sealing material 13 and is screwed with the thread region 14 </ b> C. That is, when the support ring nut 16 is tightened, a pressing force is applied to the sealing material 13.

  Further, the support ring nut 16 is tightened against the thread region 14C so that the sealing material 13 does not loosen. That is, the support ring nut 16 in FIG. 5 fulfills the function of preventing the sealing material 13 from loosening and the support ring. In this respect, the nut 11 in FIG. 4 functions to prevent the sealing material 13 from loosening, but does not function as a support ring.

[Embodiment 2]
Another embodiment according to the present invention will be described with reference to FIGS. For convenience of explanation, members having the same functions as those described in the first embodiment are given the same reference numerals, and descriptions thereof are omitted.

  First, the channel width adjusting means of the present embodiment will be described. FIG. 7 is a cross-sectional view when the slit nozzle 50 shown in FIG. 1 includes different flow path width adjusting means. As shown in FIG. 7, the piece 1 is formed with a through hole 30 penetrating from the inner wall to the outer wall. Further, a female screw 31 (third female screw) is provided on the inner wall of the piece 2, which is substantially coaxial with the through hole 30.

  Further, a male screw 32 (third male screw) as a flow path width adjusting means penetrates the through hole 30 and is screwed (joined) to the female screw 31. Specifically, the male screw 32 is supported by the through hole 30 in a state in which the screw thread on the tip side is screwed into the female screw 31 and the head protrudes from the outer wall of the piece 2.

  According to the above configuration, when the male screw 32 is rotated so as to be tightened with respect to the female screw 31, the female screw 31 and the piece 2 can be drawn toward the C direction. Thereby, since the piece 2 is displaced so as to approach the piece 1, the width of the slit channel can be reduced and adjusted. Moreover, when the male screw 32 once tightened is loosened to the original position, the piece 2 is restored and displaced so as to move away from the piece 1 within the range in which the urging force is applied, and the width of the slit-like channel in the CD direction can be adjusted to be enlarged. When the width of the flow path is enlarged and adjusted beyond the range where the urging force works, the mechanism of the first embodiment described above is applied.

  Here, the configuration of the male screw 32 as the channel width adjusting means in the present embodiment is shown in FIG. FIG. 8 is a cross-sectional view showing a specific configuration of the male screw 32 of FIG.

  As shown in FIG. 8, the male screw 32 includes a thread region 32A (second thread region), a columnar region 32B (elastic member adhesion region), a thread region 32C, and a head portion 32D in this order from the tip side. It is configured. The outer periphery of the head portion 32D is configured to be larger than the outer periphery of the thread region 32A, the columnar region 32B, and the thread region 32C.

  The thread region 32A is screwed with the female screw 31, and the sealing material 13 (leakage preventing elastic member) is fitted into the cylindrical region 32B. The sealing material 13 covers the opening of the through hole 8 in the outer wall of the piece 1. Further, the thread region 32C is screwed with the nut 11.

  This male screw 32 differs from the male screw 10 of the first embodiment only in that the screw thread region 32A on the front end side is screwed with the female screw 31, and the other configuration is the same as that of the male screw 10. . Therefore, the function performed by the configuration of FIG. 8 is the same as the function generated by the configuration of FIG.

  The flow path width adjusting means of the present embodiment may be a male screw 33 (third male screw) having the configuration shown in FIG. FIG. 9 is a cross-sectional view showing a specific configuration of the male screw 33. The male screw 33 has a configuration in which a thread region 33A, a columnar region 33B, a thread region 33C, and a head 33D are formed in this order from the tip side.

  Then, the thread region 33A is screwed with the female screw 31, the seal material 13 is fitted into the cylindrical region 33B, and the thread region 33C is screwed with the support ring nut 16 and the lock nut 15. The outer diameter of the thread region 33A is configured to be equal to or smaller than the outer diameter of the columnar region 33B.

  This male screw 33 differs from the male screw 14 of the first embodiment only in that the thread region 33A on the distal end side is screwed with the female screw 31, and the other configuration is the same as that of the male screw 14. . Therefore, the function performed by the configuration of FIG. 9 is the same as the function generated by the configuration of FIG.

  As described above, the channel width adjusting unit of the first embodiment is suitable for reducing the channel width, and the channel width adjusting unit of the second embodiment is suitable for increasing the channel width. Therefore, in order to freely adjust the flow path width of the slit nozzle 50, the flow width adjustment means of the first embodiment and the flow width adjustment means of the second embodiment are connected to the same slit nozzle 50. Both may be provided.

[Embodiment 3]
Another embodiment according to the present invention will be described with reference to FIGS. For convenience of explanation, members having the same functions as those described in the first and second embodiments are denoted by the same reference numerals, and the description thereof is omitted.

  In the first embodiment and the second embodiment, the male screw as the flow path width adjusting mechanism has been described. In the present embodiment, a configuration in which a spot facing is formed on the outer wall of the piece 1 of the slit nozzle 50 and the male screw is provided inside the spot facing will be described.

  FIG. 10 is a cross-sectional view showing a configuration in which the counterbore 40 is provided to the slit nozzle 50 of FIG. FIG. 11 is a cross-sectional view showing the counterbore 40 of FIG. 10 and the components provided in the counterbore 40.

  As shown in FIG. 10, spot facings 40 are formed on the outer wall surface of the piece 1 of the slit nozzle 50. Moreover, as shown in FIG. 11, the opening part of the through-hole 8 in which the internal thread 9 was formed in the bottom face part of the spot facing 40 is formed. Furthermore, the outer periphery of the spot facing 40 is configured to be equal to or greater than the outer periphery of the head of the male screw 41. A female screw 40A (second female screw, fourth female screw) is formed on the side surface of the counterbore 40.

  In addition, the male screw 41 (first male screw) in the present embodiment includes a screw thread region 41A (first screw thread region), a columnar region 41B, and a head portion 41C from the tip side. The outer diameter of the head 41C is configured to be larger than the outer diameter of the thread region 41A and the columnar region 41B.

  Here, with respect to the male screw 41, a ring-shaped male screw 43 (second male screw, fourth male screw), a support ring 42, and the sealing material 13 are sequentially attached from the front end side to the head side.

  The inner periphery of the ring-shaped male screw 43 and the support ring 42 is smaller than the outer periphery of the head portion 41C and larger than the outer periphery of the thread region 41A and the columnar region 41B. Further, on the outer periphery of the ring-shaped male screw 43 and the support ring 42, a screw thread to be screwed with the female screw 40A is formed. The outer periphery of the sealing material 13 is larger than the outer periphery of the opening, and is configured to be in close contact with the columnar region 41B. The size of the male screw 41 from the tip side to the head side is set to be shorter than the length of the piece 1 in the CD direction.

  That is, the sealing material 13 is fitted in the columnar region 41B of the male screw 41, and the columnar region 41B of the male screw 41 is inserted into the inner periphery of the ring-shaped male screw 43 and the support ring 42.

  In the above configuration, the support ring 42 and the ring-shaped male screw 43 are sequentially screwed into the female screw 40A of the counterbore 40, and the male screw 41 is screwed into the female screw 9 formed in the through hole 8 from the tip side. Then, as shown in FIG. 12, the thread region 41 </ b> A of the male screw 41 is screwed with the female screw 9. And in the bottom face part of the spot facing 40, the sealing material 13 is brought into close contact with the cylindrical region 41B and the bottom face part of the spot facing 40 so as to cover the opening part of the through hole 8.

  Here, the outer diameter of the counterbore 40 is equal to or larger than the outer diameter of the head of the male screw 41, and the length of the male screw 41 is shorter than the length of the piece 1 in the CD direction. The outer wall of the piece 1 can be configured not to protrude in the C direction. Thereby, it can suppress that the external thread 41 is damaged at the time of the conveyance at the time of installing the slit nozzle 50 in a factory, for example.

  Furthermore, the opening of the through hole 8 in the outer wall of the piece 1 is covered with the sealing material 13. Here, when the support ring 42 is tightened toward the D direction, the support ring 42 presses the sealing material 13 against the bottom surface portion of the counterbore 40. Therefore, the sealing material 13 is in close contact with the bottom portion of the spot facing and the columnar region 41B in a state of covering the opening. Therefore, when the male screw 41 inserted into the through hole 8 is moved forward and backward, the male screw 41 can move forward and backward without loosening the adhesion of the sealing material 13 acting on the male screw 41. As a result, the male screw 41 can be tightened independently of the liquid leakage prevention effect of the sealing material 13.

  Furthermore, it is possible to prevent the support ring 42 from loosening due to the elasticity of the sealing material 13 by tightening the ring-shaped male screw 43 in the C direction.

  Further, as shown in FIG. 11, the support ring 42 and the ring-shaped male screw 43 are provided with recesses 42A and 43A on the surfaces in the D direction. Then, by engaging a pin wrench (not shown) with the recesses 42A and 43A, the support ring 42 and the ring-shaped male screw 43 can be rotated and tightened.

  In the configuration shown in FIGS. 10 to 12, a male screw 41 (the first screw thread) that engages with the female screw 9 formed in the through hole 8 of the piece 1 as a flow channel width expansion adjusting mechanism (flow channel width adjusting mechanism). In the case of constituting a flow path width reduction adjusting mechanism (flow path width adjusting mechanism), as shown in FIGS. 13 to 15, it is screwed with a female screw 31 provided in the piece 2. It is necessary to use a male screw 44 (third male screw).

  13 is a cross-sectional view when a male screw 44 is provided for the counterbore of FIG. 10, and FIG. 14 is a cross-sectional view showing a specific configuration of the counterbore of FIG. FIG. 15 is a cross-sectional view showing a state in which a male screw 44 is provided inside the spot facing of FIG. 14.

  Furthermore, the structure using the male screw 44 and the mechanism using the male screw 41 may be provided along the AB direction for the piece 1 of the slit nozzle 50. FIG. 16A shows the outer wall of the piece 1 when a mechanism using the male screw 44 and a mechanism using the male screw 41 are provided along the AB direction with respect to the slit nozzle 50 of FIG. FIG. 16B is a cross-sectional view showing a male screw 44 and a male screw 41 provided side by side with respect to the slit nozzle 50 of FIG.

  In the above configuration, the male screws 41 and 44 are supported by the through holes 8 and 30 located on the bottom surface portions of the counterbore 46 and 47 corresponding to the male screws 41 and 44, respectively. Furthermore, as shown in FIG. 16A, the counterbore 46 and 47 adjacent to each other is connected by a flow path 48.

  As a result, even if liquid leaks from the opening of the through hole 8 located on the bottom surface of the counterbore 46/47, the leaked liquid is guided to the A and B direction side ends of the outer wall of the piece 1, Mixing with the liquid ejected from the outlet 6A can be prevented.

  The reason for this configuration will be described below. There is a possibility that foreign matter adhering to the sealing material 13 is mixed in the liquid leaking from the opening portions of the through holes 8 and 30 located on the bottom portions of the spot facings 46 and 47. Therefore, mixing of the liquid leaking from the opening and the liquid ejected from the ejection port 6A of the slit nozzle 50 must be prevented.

  In addition, according to the configuration of FIG. 16, the male screw 41 and the male screw 44 are provided side by side. However, the male screws 41 and 41 may be provided, or the male screws 44 and 44 may be provided. Also good.

  In addition, this invention can also be comprised as shown below. A slit nozzle having a slit-shaped channel having a U-shaped cross section, wherein the slit-shaped channel is formed between an inner wall of the first piece and an inner wall of the second piece facing each other, and the outer wall of the first piece Through-holes are formed through the inner wall, and by moving the through-holes in the width direction of the slit-shaped flow path, the second piece is pressed away from the first piece or the first piece A flow path width adjusting means for adjusting the width of the slit-shaped flow path is provided.

  Further, it can be configured as shown below. A slit nozzle having a slit-shaped channel having a U-shaped cross section, wherein the slit-shaped channel is formed between an inner wall of the first piece and an inner wall of the second piece facing each other, and the outer wall of the first piece A through hole penetrating the inner wall is formed, and the second piece is displaced relative to the first piece by moving the through hole forward and backward in the width direction of the slit-shaped flow path. A channel width adjusting means for adjusting the width of the channel is provided.

  The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope shown in the claims, and embodiments obtained by appropriately combining technical means disclosed in different embodiments. Is also included in the technical scope of the present invention.

  The slit nozzle of the present invention is used in a substrate manufacturing process such as a liquid crystal panel, and can be applied to a use for ejecting a liquid to the substrate. Moreover, it can be used also for board | substrate manufacturing processes other than a liquid crystal panel.

It is KK sectional drawing of the slit nozzle of FIG. 2, Comprising: It is sectional drawing which showed the flow-path width adjustment mechanism which concerns on embodiment of this invention. It is the perspective view which showed the slit nozzle. It is sectional drawing which showed the specific structure of the external thread shown in FIG. It is sectional drawing which showed the structure provided with the sealing material, the support ring, and the nut with respect to the external thread shown in FIG. FIG. 5 is a cross-sectional view showing a male screw according to an embodiment of the present invention, which is different from the male screw shown in FIG. 4. FIG. 3 is an exploded view of the slit nozzle of FIG. 2. It is KK sectional drawing of the slit nozzle of FIG. 2, Comprising: It is sectional drawing which showed the flow-path width adjustment mechanism which concerns on another embodiment of this invention. It is sectional drawing which showed the specific structure of the external thread shown in FIG. FIG. 9 is a cross-sectional view showing a male screw according to an embodiment of the present invention, which is different from the male screw shown in FIG. 8. It is sectional drawing which showed the structure at the time of providing a spot facing with respect to the slit nozzle of FIG. FIG. 11 is a cross-sectional view showing a specific configuration of the spot facing of FIG. It is sectional drawing which showed a mode that the external thread was provided in the spot facing of FIG. It is sectional drawing at the time of providing another male screw with respect to the spot facing of FIG. It is sectional drawing which showed the specific structure of the spot facing of FIG. It is sectional drawing which showed a mode that the external thread was provided in the spot facing of FIG. (A) is the figure which showed the outer wall of the slit nozzle with which the spot facing was attached along the AB direction, (b) is sectional drawing which showed the structure of the spot facing of FIG. 16 (a). is there. It is sectional drawing which showed the conventional slit nozzle.

Explanation of symbols

1 piece (first piece)
2 pieces (second piece)
6 Slit-shaped channel 8 Through hole 9 Female thread (first female thread)
10 Male thread (first male thread)
10A thread area (first thread area)
10B Cylindrical region (elastic member adhesion region)
10C Thread area 10D Head 11 Nut 12 Support ring 13 Sealing material (Elastic member for preventing leakage)
14 Male thread (1st male thread)
14A thread area (first thread area)
14B cylindrical region (elastic member adhesion region)
14C Thread region 14D Head 15 Lock nut 16 Support ring nut 30 Through hole 31 Female screw (third female screw)
32 Male thread (3rd male thread)
32A thread area (second thread area)
32B Cylindrical region 32C Thread region 32D Head 33 Male screw 33A Thread region 33B Cylindrical region 33C Thread region 33D Head 40 Counterbore 40A Female screw (2nd female screw, 4th female screw)
41 Male thread (first male thread)
41A Screw thread region 41B Columnar region 41C Head 42 Support ring 43 Ring-shaped male screw (second male screw, fourth male screw)
44 Male thread (3rd male thread)
48 channels 50 slit nozzles

Claims (15)

In a slit nozzle provided with a slit-shaped flow path having a U-shaped cross section,
The slit-shaped channel is formed between the inner wall of the first piece and the inner wall of the second piece facing each other,
A through-hole penetrating the inner wall from the outer wall of the first piece is formed,
There is provided a channel width adjusting means for adjusting the width of the slit channel by pressing or pulling the second piece by moving the through hole forward and backward along the direction of the second piece. A slit nozzle characterized by A first female screw is formed on the inner surface of the through hole,
2. The slit nozzle according to claim 1, wherein the flow path width adjusting means is a first male screw threadedly engaged with the first female screw and having a tip abutting against an inner wall of the second piece.   The slit nozzle according to claim 2, wherein an opening portion of the through hole in the outer wall of the first piece is covered with a leakage preventing elastic member.   The first male screw has a structure in which at least a first screw thread region screwed with the first female screw and an elastic member contact region smoother than the screw thread are formed from the front end side. The slit nozzle according to claim 3.   The slit nozzle according to claim 4, wherein an outer diameter of the first thread formation region is equal to or smaller than an outer diameter of the elastic member contact region.   The slit nozzle according to claim 2, wherein a counterbore is formed on the outer wall of the first piece, and an opening of the through hole is formed on a bottom surface of the counterbore. Furthermore, a second female screw is formed on the side surface of the counterbore, and the opening is covered with an elastic member for preventing leakage,
7. The second male screw is screwed into the second female screw to hold the leakage preventing elastic member against the opening of the first female screw. Slit nozzle. A plurality of the through holes and the first male screws are provided, and a plurality of the spot facings are provided,
The slit nozzle according to claim 6 or 7, wherein a flow path for connecting adjacent spot facings is formed.   The third female screw is formed on the inner wall of the second piece, and is substantially coaxial with the through hole. The flow path width adjusting means is supported by the through hole and screwed into the third female screw. The slit nozzle according to claim 1, wherein the slit nozzle is a third male screw.   The slit nozzle according to claim 9, wherein an opening of the through hole in the outer wall of the first piece is covered with an elastic member for preventing leakage.   The third male screw has a configuration in which at least a second screw thread region to be screwed with the third female screw and an elastic member contact region smoother than the screw thread are formed from the tip side. The slit nozzle according to claim 10.   The slit nozzle according to claim 11, wherein an outer diameter of the second thread formation region is equal to or smaller than an outer diameter of the elastic member contact region.   The slit nozzle according to claim 9, wherein a counterbore is formed on an outer wall of the first piece, and an opening of the through hole is formed on a bottom surface of the counterbore. Furthermore, a fourth female screw is formed on the side surface portion of the counterbore, and the opening is covered with an elastic member for preventing leakage,
14. The slit according to claim 13, wherein a third male screw for locking the leakage preventing elastic member to the opening of the through hole is screwed to the fourth female screw. nozzle. A plurality of the through holes and the third male screws are provided, and a plurality of the spot facings are provided,
The slit nozzle according to claim 13 or 14, wherein a flow path for connecting adjacent spot facings is formed.

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