JP2000014124A - Component connecting structure for vacuum section - Google Patents

Abstract

PROBLEM TO BE SOLVED: To permit quick removal of residual gas by forming a gas discharging passage in one of fastening members and two components constituting a vacuum chamber, and discharging the residual gas into the vacuum chamber when evacuating. SOLUTION: At least two components 2 which are housed in a vacuum chamber 1 and have flanges 11 respectively are fastened by a fastening member. In each component 2, a plurality of through-holes 4 or tapped holes are formed for fitting a fastening member. A jointing surface can be divided into an external peripheral side and an internal peripheral side by forming circular gas bleeding grooves 3, i.e., gas discharging passages between a plurality of bolt- inserting through-holes 4 formed in a flange 22. These gas bleeding grooves 3 lead to the vacuum chamber 1 of the external atmosphere of the flange 22 through the through-holes 4. Accordingly, it becomes possible to shorten a long distance from a point on the jointing surface up to the vacuum chamber 1, and to quickly remove residual gases in component connecting parts, tapped holes, etc., inside the vacuum chamber.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of components forming a vacuum portion of a superconducting rotary electric machine, and a component coupling structure of a vacuum portion such as a coupling structure of components in a vacuum chamber.

[0002]

2. Description of the Related Art In order to make a vacuum chamber a high vacuum, a gas generating gas is prevented from being installed in the vacuum chamber as much as possible, and the apparatus itself is heated to a high temperature by baking to activate the gas. In addition, measures have been taken to make it easier for residual gas to escape.

[0003]

In a device having a coupling part in a high vacuum section, it is necessary to take a very long time for evacuation in order to remove residual gas from a part joint surface or a screw hole. However, since the residual gas has not been sufficiently removed, the degree of vacuum in the vacuum chamber may be deteriorated even after evacuation.

[0004] It is an object of the present invention to be able to quickly remove residual gas from the joint surfaces of components in a vacuum chamber and screw holes and the like, and to prevent gas from remaining on joint surfaces and screw holes after vacuum evacuation. An object of the present invention is to provide a component coupling structure of a vacuum section.

[0005]

SUMMARY OF THE INVENTION To achieve the above object, an invention according to claim 1 comprises at least two parts constituting a vacuum chamber or at least two parts housed in the vacuum chamber.
One of a combination of a bolt and a nut, a combination of a bolt and a nut and a washer, a screw and a combination of a screw and a washer, or a fastening member made of these combinations. Has a joint surface, and a through hole and a screw hole are formed in each part so that the fastening member can be provided. In this case, gas flows out to at least one of the part and the fastening member. When forming a path and evacuating the vacuum chamber,
It is a component coupling structure of a vacuum part in which gas remaining on the joining surface and the fastening member flows out into the vacuum chamber through the gas outflow passage.

According to the first aspect of the present invention, since the gas outflow passage is formed, the residual gas in the joint surface of the components in the vacuum chamber, the through hole or the screw hole can be quickly removed, In addition, since a residual gas hardly remains on the joining surface or the through hole or the screw hole after evacuation, it is possible to provide a component coupling structure of a vacuum part in which the degree of vacuum in the vacuum chamber is hardly deteriorated for a long time even after evacuation. it can.

According to a second aspect of the present invention, there is provided a gas outlet groove formed in at least one of the component, the bolt or the screw, and the washer as the gas outlet path. 2. The vacuum part according to claim 1, wherein the vacuum part is one of a gas outflow hole formed in at least one of the component, the bolt or the screw, and the washer, and a combination of the gas outflow groove and the gas outflow hole. This is the component coupling structure.

According to the invention corresponding to claim 2, the same operation and effect as in claim 1 can be obtained. In order to achieve the above object, the invention according to claim 3 is characterized in that the gas outflow passage is formed on at least one joint surface of the component and communicates with the through hole or the screw hole. 2. The component coupling structure for a vacuum part according to claim 1, wherein the gas outflow groove is a gas outflow groove or a gas outflow groove formed between the through holes or the screw holes.

According to the third aspect of the present invention, since the gas outflow groove is formed in the joint surface of the component in the vacuum chamber, the contact area of the joint surface can be reduced. As a result, the gas is less likely to remain on the bonding surface, and the remaining gas easily moves to the vacuum chamber. Therefore, a vacuum state is quickly obtained when the vacuum chamber is evacuated, and the residual gas is removed. Since it does not easily remain, a structure in which vacuum deterioration after evacuation hardly occurs can be achieved.

According to a fourth aspect of the present invention, as the above-mentioned object, at least one of the parts is provided as the gas outflow passage, and the gas outflow path is opposite to the opening end of the through hole or the screw hole. 2. A component coupling structure for a vacuum section according to claim 1, wherein said bottom section is a gas outlet hole formed so as to communicate with said vacuum chamber.

According to the fourth aspect of the present invention, since the gas outlet hole communicating with the vacuum chamber is formed in the component, the residual gas remaining in the through hole or the screw hole is easily released. Since the gas inside becomes easy to move to the vacuum chamber, a vacuum state can be quickly obtained when the vacuum chamber is evacuated. can do.

In order to achieve the above object, the invention according to claim 5 is characterized in that, as the gas outflow passage, at least one of the parts is provided on an inner peripheral surface of the through hole or the screw hole in an axial direction. 2. The component coupling structure for a vacuum section according to claim 1, wherein said gas outflow groove is formed in said component.

According to the fifth aspect of the present invention, since the gas outflow groove is formed in the through hole or the screw hole, the residual gas remaining in the bolt or the screw is easily discharged, and the bolt or the screw is divided by the vacuum chamber. The gas of the bolt or screw is easily moved to the vacuum chamber, and a vacuum state is quickly obtained when the vacuum chamber is evacuated, and the residual gas hardly remains, so that the vacuum deterioration after the evacuation hardly occurs. It can be structured.

According to a sixth aspect of the present invention, there is provided a through hole formed in the screw itself or the bolt itself substantially in the center of the shaft and along the axial direction. 2. The component coupling structure for a vacuum section according to claim 1, wherein:

According to the sixth aspect of the present invention, since the center through hole is formed in the screw or the bolt, it is possible to easily remove the residual gas remaining in the screw hole or the through hole of the component.

In order to achieve the above object, the invention according to claim 7 is the gas outflow passage, wherein the gas outflow passage is a screw portion of the bolt or the screw, and is a gas outflow groove formed along an axial direction. It is a component coupling structure for a vacuum section according to claim 1.

According to the seventh aspect of the present invention, since the gas outflow groove is formed, the residual gas remaining in the screw portion of the bolt or screw can easily escape. In order to achieve the above object, an invention corresponding to claim 8 is a radial gas outflow groove formed in the head of the bolt or the screw in a direction perpendicular to an axial direction as the gas outflow passage. Item 2 is a component coupling structure for a vacuum section according to Item 1.

According to the eighth aspect of the present invention, since the gas outflow groove is formed, the residual gas remaining on the fastening surface of the bolt or screw is easily released. In order to achieve the above object, an invention according to claim 9 is directed to a radial gas formed as a gas outflow passage on a fastening surface on a component side of a surface where the head of the bolt or the screw contacts the component. 2. The component coupling structure for a vacuum section according to claim 1, wherein said component is an outflow groove.

According to the ninth aspect of the present invention, since the gas outflow groove is formed, the residual gas remaining on the fastening surface of the part that comes into contact with the head of the bolt or screw is easily released. In order to achieve the above object, the invention according to claim 10 is characterized in that, as the gas outflow passage, a surface of the washer against which the bolt or the screw contacts, or a surface in contact with the component, or the bolt or the screw of the washer. 2. The component coupling structure for a vacuum section according to claim 1, wherein radial gas outflow grooves are respectively formed on a surface contacting the component and a surface contacting the component.

According to the tenth aspect of the present invention, since the gas outflow groove is formed, the residual gas remaining on the contact surface between the bolt or the screw and the washer or the contact surface between the washer and the component is easily released.

In order to achieve the above object, the invention corresponding to claim 11 is the one in which at least two of claims 3 to 9 are combined as the gas outflow passage. It is a component coupling structure of the described vacuum part.

According to the eleventh aspect of the present invention, since several gas outflow paths are combined, the residual gas remaining in the portion where the gas outflow path is formed is further reduced as compared with the case of one gas outflow path. It can be easily pulled out, and can be brought into a vacuum state more quickly when the vacuum chamber is evacuated.

[0023]

DESCRIPTION OF THE PREFERRED EMBODIMENTS <First Embodiment (Claim 1,
(Corresponding to claims 2, 3, and 11)> FIGS.
FIG. 3 is a diagram for explaining the first embodiment. FIG.
FIG. 1A is a front view for explaining the general outline of a component coupling structure of a vacuum section according to the present invention, and FIG.
FIG. 1A is a view cut along the line OO in FIG. 1A and viewed in the direction of the arrow, and FIG. 1B is a cross-sectional view of the part of FIG.

As shown in FIG. 1, at least two parts (shown here as tubular members) 2 housed in a vacuum chamber 1 and each having a flange 22 comprise a bolt and nut combination, a bolt and a nut. Any of a combination of a nut and a washer, a screw, and a combination of a screw and a washer, or a fastening member (not shown) made of these combinations, is fastened to the flange 22 of each component 2 by a bonding surface ( Each of the parts 2 has a plurality of through holes 4 or a plurality of screw holes 5 described below so that a fastening member can be provided. Is formed. A gas outflow path, for example, a gas outflow groove such as the annular air vent groove 3 is formed between the through holes 4 on the joint surface of the flange 22.

Here, in the following description, the screw and the bolt are common in that both have a columnar cross-section and have a threaded portion having a constant thickness at the front and rear ends. The part in which the nut is screwed is called a bolt, and the part in which the nut is not screwed to the tip of the screw part is called a screw. The combination with a washer described below is used when distinguishing a bolt from a screw. Shall not be considered at all. In the following description, when it is not necessary to distinguish a screw or a bolt, it is referred to as a screw or the like.

As shown in FIG. 1, between the through holes 4 through which a plurality of bolts formed in the flange 22 are inserted, an annular air vent groove 3 is formed on the joint surface of the flange 22. The joining surface can be divided into an outer peripheral side and an inner peripheral side. Further, the vent groove 3 is formed through the through hole 4 and the flange 22.
By providing the vent groove 3, the long distance from the point on the joining surface to the vacuum chamber 1 can be shortened by providing the vent groove 3 as compared to before the vent groove 3 is provided. .

As a result, the joining surfaces of the components in the vacuum chamber 1 and
The residual gas in the through hole 4 can be quickly removed, and the residual gas hardly remains on the joint surface and the through hole after evacuation. Therefore, even after evacuation, the degree of vacuum in the vacuum chamber deteriorates for a long period of time. It is possible to provide a component coupling structure of a vacuum part which is difficult.

FIG. 2 is different from FIG. 1 in that a gas outflow groove such as a radial vent groove 6 is formed between the through holes 4 at the joint surface of the flange 22, and both ends of the vent groove 6 are formed. Are connected to the vacuum chamber 1. FIG. 2A shows FIG. 1C.
FIG. 2B is a side view showing only one surface of the flange 22 similarly to FIG. 2, and FIG. 2B is a cross-sectional view taken along the line AA in FIG.

In the case of FIG. 2 as well, the joint surface can be divided into a plurality of parts by providing the radial vent groove 6, and since both ends of the vent groove 6 communicate with the vacuum chamber 1, the joint is formed after evacuation. Since residual gas remaining on the surface is unlikely to remain, even after evacuation,
Deterioration of the degree of vacuum in the vacuum chamber hardly occurs over a long period of time.

FIG. 3 shows the air vent groove 3 shown in FIG. 1 and the air vent groove 6 shown in FIG. FIG. 3A is a side view showing only one surface of the flange 22 similarly to FIG. 1C, and FIG. 3B is cut along the line BB in FIG. FIG. In the case of FIG. 3, the through hole 4 of FIG. 1 or FIG.
Instead, a screw hole (female screw hole) 5 having a predetermined depth is formed in the joint surface of the flange 22, but it goes without saying that the screw hole 5 may be the through hole 4.

As shown in FIG. 3, the vent groove 3 of FIG.
By combining both of the air vent grooves 6, the joining surface can be further finely divided than in FIGS. Further, even when the screw hole 5 that does not penetrate the joint surface is provided, the effect that the residual gas remaining in the screw hole 5 can be easily released can be obtained.

FIG. 4 shows a lattice-shaped air vent groove 7 formed on the joint surface of the flange 22. FIG. 4A is a side view showing only one surface of the flange 22 similarly to FIG. 1C, and FIG. 4B is a sectional view taken along the line CC of FIG. FIG.

By forming the lattice-shaped air vent grooves 7 as shown in FIG. 4, the joining surface can be divided more finely than in FIGS. 1 to 3, and in order to reduce the contact area of the joining surface, FIG. Is best. In the case of FIG.
The present invention can be applied not only to a component having a planar coupling structure but also to a component having a curved surface structure, and can be used not only for coupling such as screws, but also for a component having a mating structure. Further, in the case of FIG. 4, as shown in FIG. 1 (a), not only one side of the joining surface of the flange 22 but also a venting groove of the same form or a venting groove of a different form is formed on the flanges 22 on both sides. Alternatively, a structure combining these vent grooves may be used.

According to the first embodiment described above, the distance between each point on the bonding surface and the vacuum chamber 1 can be shortened, the residual gas on the bonding surface can be easily released, and the air on the bonding surface can be reduced. By forming the cutout groove, the area of the joint surface can be reduced, so that a structure in which gas hardly remains can be obtained.

<Second Embodiment (Corresponding to Claims 1, 2, 4, and 11)> FIGS. 5 to 8 are views for explaining the second embodiment. is there. FIG. 5 is a cross-sectional view of the vicinity of the screw hole of the flange of FIG. 1C as in FIG. 1B. 5 is at least one of the flanges 22 of the part 2 of FIG. 1 (a), and is formed in a vertical shape so as to communicate with the bottom of the screw hole 5 opposite to the open end and the vacuum chamber 1. A gas outflow hole made up of the vent hole 8 is formed.

As shown in FIG. 5, a vent hole 8 is formed at the tip of the screw hole 5, and the vent hole 8 is formed so as to communicate with the vacuum chamber 1, so that residual gas remaining in the screw hole 5 is formed. Can be easily removed.

The embodiment of FIG. 5 is effective for a part in which the wall of the flange 22 from the screw hole 5 to the vacuum chamber 1 is thin in the depth direction of the screw hole 5. FIG. 6 is similar to FIG.
It is the figure which carried out section near the screw hole of the flange of (c). 6 is at least one of the flanges 22 of the component 2 in FIG. 1 (a), and has a vacuum perpendicular to the screw hole 5 at the bottom opposite to the open end of the screw hole 5. A gas outflow hole formed of a horizontal vent hole 9 is formed so as to communicate with the chamber 1.

As shown in FIG. 6, the vent hole 8 is formed at right angles to the screw hole 5 so as to communicate with the vacuum chamber 1, so that the residual gas remaining in the screw hole 5 can be easily released. . The embodiment of FIG. 6 is effective for a component 2 in which the wall of the flange 22 perpendicular to the screw hole 5 is thin.

FIG. 7 shows a case in which the flange 22 of the component 2 has a plurality of screw holes 5. The horizontal communication holes 10 communicate between the screw holes 5 and the ends of the horizontal communication holes 10. This is an example in which the screw hole 5 is formed so as to communicate with the vacuum chamber 1 through a horizontal vent hole 9. The embodiment of FIG. 7 is effective when the screw holes 5 of the component 2 are provided relatively close to each other. In the embodiment of FIG. 7, the horizontal vent hole 9 may be replaced with the vertical vent hole 8.

FIG. 8 shows a case in which the flange 22 of the component 2 has a plurality of screw holes 5 on the joint surfaces facing each other. The screw holes 5 are connected to each other by the vertical communication holes 11.
In this embodiment, the vertical communication holes 11 are connected to each other by a horizontal communication hole 10, and the vertical communication holes 11 at the ends of the component 2 are connected to a horizontal vent hole 9.

The embodiment shown in FIG. 8 is effective when the tip ends of the screw holes 5 are close to each other and the screw holes 5 are relatively close to each other. According to the second embodiment described above, the residual gas remaining in the screw hole can be easily released, so that the gas in the screw hole can easily move to the vacuum chamber 1 and the vacuum chamber 1 is evacuated. A vacuum state can be quickly obtained at the time of evacuation, and the residual gas is less likely to remain, so that a structure in which vacuum deterioration after evacuation hardly occurs can be achieved.

<Third Embodiment (Corresponding to Claims 1, 2, 5, and 11)> FIG. 9 is a diagram for explaining a third embodiment. 9 (a) is FIG.
FIG. 9B is a cross-sectional view of the vicinity of the screw hole of the flange in FIG. 1C as in FIG. 1B, and FIG. 9B is a side view as viewed from the left side in FIG. 9A.

FIG. 9 shows a gas outflow path as shown in FIG.
At least one of the flanges 22 of the component 2 is provided on the inner peripheral surface of the screw hole 5 along the axial direction with a plurality of (here, six) vent grooves (grooves deeper than the screw portion) 12 and the like. A gas outflow groove is formed.

According to the third embodiment described above, the screw hole 5 is divided by the vacuum chamber 1 and the screw hole 5 is divided.
Is easily moved to the vacuum chamber 1, and a vacuum state can be quickly obtained when the vacuum chamber 1 is evacuated. Further, since the residual gas hardly remains, a structure in which the vacuum deterioration after the evacuation hardly occurs is obtained.

<Fourth Embodiment (Corresponding to Claims 1, 2, 6, and 11)> FIG. 10 is a diagram for explaining a fourth embodiment. 10 (a) is a sectional view of the vicinity of the screw hole of the flange of FIG. 1 (c) as in FIG. 1 (b), and FIG. 10 (b) is a side view as viewed from the left side of FIG. 10 (a). is there.

FIG. 10 shows that the gas outflow path includes a screw 1 or the like.
3 itself has a through hole 1 substantially at the center of the shaft and along the axial direction.
4 is formed. In this case, the screw 13 does not use a nut as described above, and a screw hole (internally threaded on the inner peripheral surface of the hole) 5 is formed in each of the two flanges 22 joined to each other. The screw portion of the screw 13 is screwed into the screw hole 5, thereby connecting the two flanges 22.

According to the fourth embodiment, since the residual gas remaining in the screw hole 5 can be easily released by providing the through hole 14 in the screw 13, the gas in the screw hole 5 is evacuated. It is easy to move to the chamber 1 and a vacuum state can be quickly obtained when the vacuum chamber 1 is evacuated. In addition, since a residual gas hardly remains, a structure in which vacuum deterioration after evacuation hardly occurs can be achieved.

When used in combination with the third embodiment, the residual gas remaining around the screw or bolt can be more effectively removed. <Fifth Embodiment (Claim 1, Claim 2, Claim 7,
FIG. 11 is a view for explaining a fifth embodiment, and FIG. 11 (a) shows a screw or a bolt (both a head and a bolt) used in a vacuum chamber in the present embodiment. FIG. 11B is a right side view of the screw or the like in FIG. 11A, in which a screw portion is integrally formed: a screw or the like. FIG. 11 shows an example in which a gas outflow groove formed of an air vent groove 15 formed along the axial direction, which is a screw portion of a screw 13 or the like, is formed deeper than the screw portion as a gas outflow passage.

According to the fifth embodiment, the screw portion is divided by the vent groove 15, so that the gas in the screw portion easily moves to the vacuum chamber 1, and the vacuum chamber 1 is evacuated. In this case, a vacuum state is quickly obtained. In addition, since a residual gas hardly remains, a structure in which vacuum deterioration after evacuation hardly occurs can be achieved.

Also in this embodiment, by using the third and fourth embodiments in combination, it is possible to more effectively remove the residual gas remaining around the screws and the like. <Sixth Embodiment (Claim 1, Claim 2, Claim 8,
FIG. 12 is a view for explaining a sixth embodiment, and FIG. 12A is a front view of screws and the like used in a vacuum chamber in the present embodiment. 12 (b)
FIG. 13 is a right side view of the screw and the like in FIG. FIG.
As a gas outflow path, a gas outflow groove formed of a radial air vent groove 16 is formed in the head of a screw 13 or the like in a direction perpendicular to the axial direction.

According to the sixth embodiment, the residual gas remaining on the fastening surface such as a screw can be easily released, and the residual gas on the fastening surface can easily move to the vacuum chamber. A vacuum state can be quickly obtained at the time of evacuation, and a residual gas is hardly left, so that a structure in which vacuum deterioration after evacuation hardly occurs can be achieved.

<Seventh Embodiment (Corresponding to Claims 1, 2, 9, and 11)> FIG. 13 is a diagram for explaining an eighth embodiment. 13 (a) is a front sectional view of a screw or the like used in a vacuum chamber in the present embodiment, and FIG. 13 (b) is a right side view of FIG. 13 (a).

FIG. 13 shows a screw 13 as a gas outflow path.
A gas outflow groove composed of a radial vent groove 19 is formed on the fastening surface 17 on the part side of the part where the flange 22 of the part 2 comes into contact with the flange 22 of the part 2.

According to the seventh embodiment, the residual gas remaining on the fastening surface 17 such as a screw can be easily released, and the residual gas on the fastening surface 17 can easily move to the vacuum chamber 1. When the chamber 1 is evacuated, a vacuum state is quickly obtained. In addition, since a residual gas hardly remains, a structure in which vacuum deterioration after evacuation hardly occurs can be achieved.

By using this embodiment in combination with the third, fourth, and fifth embodiments, the residual gas remaining around the screws or bolts can be more effectively removed.

<Eighth Embodiment (Corresponding to Claims 1, 2, and 10)> FIG. 14 is a diagram for explaining the eighth embodiment, and FIG. FIG. 14B is a cross-sectional view of a screw or the like used in a vacuum chamber, a washer, and the flange 22 of the component 2, FIG. 14B is a side view seen from the left side of FIG. 14A, and FIG. FIG. 14 is a front view showing only the washer 20 of FIG.

As the gas outflow passage of the eighth embodiment, the surface of the washer 20 to which the screw 13 contacts, and the surface of the washer 20 to be in contact with the flange 22 of the component 2 are as follows.
The gas outflow grooves formed by the radial air release grooves 21 are formed.

According to the eighth embodiment described above, since the radial vent groove 21 is formed in the washer 20, the residual gas remaining on the contact surface between the head of the screw 13 or the like and the flange 22 of the component 2. And the residual gas is easily moved to the vacuum chamber 1, so that a vacuum state can be quickly obtained when the vacuum chamber 1 is evacuated. In addition, since the residual gas hardly remains, a structure in which the vacuum deterioration after the evacuation hardly occurs is obtained.

By using this embodiment in combination with the third, fourth and fifth embodiments, it is possible to more effectively remove the residual gas remaining around the screws and the like. <Modifications> The present invention is not limited to the above-described embodiment, but can be modified as follows, for example. As part 2
Either at least two parts constituting the vacuum chamber or at least two parts housed in the vacuum chamber may be used.

The fastening member for fastening at least two parts includes a combination of a bolt and a nut, a combination of a bolt and a nut and a washer, a screw and a combination of a screw and a washer, or a combination thereof. It may be.

Further, a through hole or a screw hole may be formed in the part corresponding to the fastening member, or a combination of the through hole and the screw hole may be used. Also, the gas outflow passage may include at least one gas outflow groove formed in at least one of the part, the bolt or the screw and the washer, and at least one of the part, the bolt or the screw and the washer. It may be any one of the gas outflow hole formed in one and a combination of the gas outflow groove and the gas outflow hole. Further, the gas outflow path may be a combination of at least two embodiments of the third to ninth embodiments.

[0062]

According to the present invention, the residual gas in the connection surface of the components in the vacuum chamber and the screw holes can be quickly removed. Vacuum can be performed in a shorter time than before, and since residual gas is less likely to remain on the connection surface of the components in the vacuum chamber and screw holes, etc., it is difficult for the vacuum degree of the vacuum chamber to deteriorate over a long period even after evacuation. A part coupling structure can be provided.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration example of a joint surface of a joint component in a vacuum chamber according to a first embodiment of the present invention.

FIG. 2 is a diagram showing a configuration example of a joint surface of a joint component in a vacuum chamber according to the first embodiment of the present invention.

FIG. 3 is a diagram showing a configuration example of a joint surface of a joint component in a vacuum chamber according to the first embodiment of the present invention.

FIG. 4 is a diagram showing a configuration example of a joint surface of a joint component in a vacuum chamber according to the first embodiment of the present invention.

FIG. 5 is a diagram showing a configuration example of a screw hole in a vacuum chamber according to a second embodiment of the present invention.

FIG. 6 is a diagram showing a configuration example of a screw hole in a vacuum chamber according to a second embodiment of the present invention.

FIG. 7 is a diagram showing a configuration example of a screw hole in a vacuum chamber according to a second embodiment of the present invention.

FIG. 8 is a diagram showing a configuration example of a screw hole in a vacuum chamber according to a second embodiment of the present invention.

FIG. 9 is a diagram showing a configuration example of a screw hole in a vacuum chamber according to a third embodiment of the present invention.

FIG. 10 is a diagram showing a configuration example of a bolt used in a vacuum chamber according to a fourth embodiment of the present invention.

FIG. 11 is a diagram showing a configuration example of a bolt used in a vacuum chamber according to a fifth embodiment of the present invention.

FIG. 12 is a diagram showing a configuration example of a bolt used in a vacuum chamber according to a sixth embodiment of the present invention.

FIG. 13 is a diagram showing a configuration example of a bolt fastening part in a vacuum chamber according to a seventh embodiment of the present invention.

FIG. 14 is a diagram showing a configuration example of bolts and washers used in a vacuum chamber according to an eighth embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Vacuum chamber 2 ... Parts 3 ... Circular vent groove 4 ... Through hole 5 ... Screw hole 6 ... Radial vent groove 7 ... Grid-shaped vent groove 8 ... Vertical vent hole 9 ... Horizontal air Drilling hole 10 Horizontal communication hole 11 Vertical communication hole 12 Vent groove for screw hole 13 Screws (screw or bolt) 14 Central through hole 15 Vent groove 16 Radial vent groove (screw or bolt) 17: fastening surface 19: radial vent groove (parts) 20: washer 21: radial vent groove (washer) 22: flange

Continuation of the front page (72) Inventor Yasuhisa Neda 2-4, Suehirocho, Tsurumi-ku, Yokohama-shi, Kanagawa Prefecture F-term in Toshiba Keihin Works (reference) 5H655 AA00 AA20 CC37

Claims (11)

[Claims] At least two parts constituting a vacuum chamber or at least two parts housed in the vacuum chamber are a combination of a bolt and a nut, a combination of a bolt and a nut and a washer, a screw, a screw and a washer. Wherein each of the parts has a joining surface, and each of the parts has a through-hole so that the fastening member can be arranged. hole,
In the component coupling structure in which the screw hole is formed, a gas outflow passage is formed in at least one of the component and the fastening member, and when the vacuum chamber is evacuated, gas remaining on the joining surface and the fastening member is removed. A component connecting structure for a vacuum section, wherein the component flows out into the vacuum chamber through the gas outflow path. 2. The gas outflow path may include a gas outflow groove formed in at least one of the component, the bolt or the screw, and the washer, the gas outflow channel, the component, the bolt or the screw, and the washer. 2. The component coupling structure for a vacuum section according to claim 1, wherein the gas outflow hole is formed in at least one of a combination of the gas outflow groove and the gas outflow hole. 3. The gas outflow path is at least one joining surface of the component, and is a gas outflow groove formed so as to communicate between the through holes or the screw holes, or the through hole or the screw. 2. The component connecting structure for a vacuum part according to claim 1, wherein the gas outlet grooves are formed between the holes. 4. The gas outflow passage is formed so as to communicate with the vacuum chamber and at least one of the components, the bottom being on the opposite side to the opening end of the through hole or the screw hole. The component coupling structure for a vacuum section according to claim 1, wherein the component is a gas outlet hole. 5. The gas outflow path according to claim 1, wherein the gas outflow path is at least one of the components, and is a gas outflow groove formed in an inner peripheral surface of the through hole or the screw hole in an axial direction. Parts connection structure of vacuum section. 6. The component coupling structure for a vacuum section according to claim 1, wherein the gas outflow passage is a through hole formed in the screw itself or the bolt itself substantially in the center of the shaft and formed in the axial direction. 7. The component coupling structure for a vacuum section according to claim 1, wherein the gas outflow path is a screw portion of the bolt or the screw, and is a gas outflow groove formed along an axial direction. 8. The component coupling structure for a vacuum section according to claim 1, wherein the gas outflow passage is a radial gas outflow groove formed in a head of the bolt or the screw in a direction perpendicular to an axial direction. 9. The vacuum part according to claim 1, wherein the gas outflow passage is a radial gas outflow groove formed on a fastening surface on a component side of a surface where the head of the bolt or the screw contacts the component. Parts coupling structure. The gas outflow passage may be provided on a surface of the washer that the bolt or the screw contacts, or a surface of the washer that contacts the component, or a surface of the washer that the bolt or screw contacts and the surface that contacts the component. 2. The component coupling structure for a vacuum section according to claim 1, wherein each of the radial gas outflow grooves is formed. 11. The component coupling structure for a vacuum section according to claim 1, wherein said gas outflow path is a combination of at least two of the third to ninth aspects.