JP2005074547A - Vertical barrel polishing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vertical barrel polishing device improved in machining efficiency by enhancing agitating capacity. <P>SOLUTION: This vertical barrel polishing device is provided with: a revolving plate fixed to a revolving shaft provided vertically to a device installation surface; a rotating shaft provided at the revolving plate and vertical to the device installation surface or having a fixed tilt angle on the revolving shaft side; a container holder fixed to the rotating shaft and rotated; a polishing container fixedly held to the container holder and formed with a projection on an internal wall curved surface reaching a sidewall from a bottom part; and a driving motor and a driving rotation mechanism for rotating the revolving shaft and the rotating shaft individually or interlockingly and controlling the rotating direction, rotating speed and rotating time. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a barrel polishing apparatus used when beveling a piezoelectric element plate such as a quartz plate, and more particularly to a vertical barrel polishing apparatus provided with a revolution axis in a direction perpendicular to the apparatus installation surface.

  As electronic parts such as piezoelectric vibrators and oscillators are downsized, the piezoelectric element plate constituting the piezoelectric diaphragm mounted inside must be downsized at the same time as the oscillation frequency is increased. Therefore, it is necessary to reduce the thickness of the piezoelectric element plate.

  For example, a crystal element plate, which is one of piezoelectric materials, has a higher crystal impedance (hereinafter referred to as “CI”) as its size has been reduced, causing problems in starting vibration of the crystal element plate. Therefore, by beveling the outer shape of a piezoelectric element plate such as a crystal element plate, the “energy confinement” effect due to an electrode film to be formed on the main surface of the crystal plate later can be increased, and this processing reduces the CI. It becomes easy to start the vibration of the crystal plate.

  As described above, as a device for performing the beveling process on the piezoelectric element plate, a plurality of cylindrical polishing containers having a length longer than the diameter of which both ends are closed are arranged, and a crystal piece and an abrasive are placed in the drum. The polishing container is revolved with a revolving axis parallel to the ground contact surface, and the polishing container itself has a central axis that penetrates the center of the cross section at both ends or an axis that obliquely penetrates both end sections in parallel with the revolving axis. A horizontal barrel device is used in which a piezoelectric element plate placed inside the polishing container is beveled by frictional movement between the inner wall of the polishing container, a crystal piece, and an abrasive by rotating.

  The following literature is disclosed about the barrel apparatus as described above.

JP 2000-354947 A JP 2002-120141 A

  In addition, the applicant has not found any prior art documents related to the present invention by the time of filing of the present application other than the prior art documents specified by the above prior art document information.

  In a barrel apparatus that performs a beveling process when a spherical or cylindrical polishing container rotates and revolves, the abrasive and the piezoelectric element plate are placed in the polishing container to perform the beveling process. Further, in order to increase the processing efficiency, a medium having a mass larger than that of the piezoelectric element plate is added to the polishing container to increase the processing pressure. However, with conventional barrel devices that use media, there is a limit to the effective loading of the media on the piezoelectric element plate in the beveling process of the piezoelectric element plate, which has recently become smaller and higher in frequency. Further improvement in efficiency is becoming difficult.

  Further, in the conventional barrel apparatus, even if a large motor is used, the revolution speed of the polishing container can only be obtained up to about several hundreds of rpm at the fastest. The rotational movement of the polishing container is generated in order to maintain the state of the polishing container as it is along with the revolution movement, and is rotated at the same speed in the direction opposite to the revolution speed. In other words, since the rotation speed depends on the revolution speed, it is difficult to further improve the machining efficiency in the conventional barrel apparatus in which the revolution speed is limited. Currently, the beveling process takes several tens of hours.

  Further, when the polishing process is performed under a condition where the revolution speed of the polishing container is slowed down, the work is not processed uniformly because the stirring force of the workpiece in the polishing container is weak. Especially when polishing a strip-shaped workpiece like a piezoelectric element plate, if the stirring force is weak, the main surface contacting the inner wall of the polishing container of the piezoelectric element plate cannot be reversed between the front and back sides. There is a possibility that only one main surface side of the material is polished.

  The present invention has been made in view of the above-described conventional technical problems. A revolution plate fixed to a revolution shaft provided in a direction perpendicular to the device installation surface, and a device installation surface provided on the revolution plate. A rotating shaft having a fixed inclination angle on the vertical or revolving shaft side, a container holder that is fixed to the rotating shaft and rotates, and a convex portion is formed on an inner wall curved surface that is fixedly held by the container holder and extends from the bottom to the side wall. A vertical barrel polishing comprising: a polished processing container; a drive motor that rotates the revolution shaft and the rotation shaft independently or in conjunction with each other and that controls a rotation direction, a rotation speed, and a rotation time; Device.

  Moreover, the convex part formed in the grinding | polishing processing container mentioned above is also a barrel grinding | polishing apparatus characterized by being integrally formed with the structure of the grinding | polishing processing container.

  By using a vertical barrel polishing apparatus using a polishing container of such a shape, the acceleration generated from the revolving motion is applied in the direction of the curved surface part from the bottom part of the polishing container to the side wall part. The thickness of the wall portion of the polishing container other than the above can be made as thin as possible, and further, by making the processing container substantially vertical, the location where the piezoelectric element plate is beveled can be limited to the periphery of the bottom of the processing container Therefore, the length of the processing container can be shortened, and the weight of the polishing container can be greatly reduced. Therefore, the polishing container can be rotated and revolved at high speed, and the polishing time can be shortened.

  In addition, when polishing is performed under the condition where the rotation speed of the polishing container is slowed, by using a polishing container having a convex portion formed on the curved inner wall from the bottom to the side wall, The workpiece can be sufficiently stirred, and each surface of the workpiece can be processed uniformly.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram showing an example of a schematic of a vertical barrel polishing apparatus according to the present invention. Note that the dotted line frame is a schematic cross-sectional view for clarifying the form of the parts constituting the device in the frame. FIG. 2 is a cross-sectional view showing an embodiment of the polishing container shown in FIG. 3 and 4 are cross-sectional views showing other forms of the polishing container shown in FIG. Note that in FIGS. 1 to 4, a part of the structure is not shown, and some dimensions are exaggerated for the sake of clarity.

  That is, the revolution plate 13 constituting the vertical barrel polishing apparatus 11 housed in the case 12 rotates around the revolution axis 14 formed in a direction perpendicular to the installation surface of the barrel polishing apparatus 11, and the revolution plate 13. The container holder 15 mounted on the revolving plate 13 in the vicinity of both ends of the revolving plate 13 rotates around the rotation axis 16 which is parallel to the revolving axis or inclined toward the revolving axis. The barrel polishing apparatus formed in such a manner that the revolution axis is directed in the vertical direction with respect to the apparatus installation surface is referred to as a vertical barrel polishing apparatus.

  The container holder 15 and the polishing container 17 fixedly held by the container holder 15 are thrown into the polishing container 17 by rotating around the rotation axis 16 while revolving around the rotation axis 14. A piezoelectric element plate that is a material to be polished is polished. Note that the rotation direction of the revolution shaft and the rotation direction of the rotation shaft may be either forward or reverse.

  In this embodiment, the rotation axis 16 is inclined about 30 ° toward the revolution axis with respect to the revolution axis 14. As a result, the acceleration generated from the revolving motion is applied only in the bottom direction of the polishing container 17, so that the thickness of the wall of the polishing container can be reduced, and further, the polishing container 17 is moved to the container by the centrifugal force of revolution. This prevents the workpiece 15 from detaching from the holder 15 or spilling the workpiece 19 such as the piezoelectric element plate in the polishing container 17. In the embodiment, a single revolution plate 13 has a structure in which a pair of polishing containers are mounted. However, a plurality of revolution plates may be formed and a polishing container may be mounted on each revolution plate. Moreover, you may make it the structure which removes one of the two grinding | polishing processing containers mounted in one revolution board, and mounts a balancer instead, and makes one grinding | polishing processing container in one revolution board.

  As a specific mechanism for rotating the polishing container 17 around the revolution axis 14 while revolving around the revolution axis 14, a revolution drive motor and a rotation drive motor are provided separately, and each is driven independently. It is also possible to use a mechanism that does this. Further, a drive motor that is commonly used for revolution and rotation may be used to provide a mechanism that divides the rotational movement of the motor into revolution and rotation by a belt and pulley or a planetary gear device. Furthermore, a control mechanism for controlling the start and stop of these drive motors, the number of rotations, the rotation time, and the like is also provided. This control mechanism can be accessed from a control panel provided outside the case 12 and automatically controlled by a program or the like. It can also be controlled. In FIG. 1, the revolution drive motor and its control mechanism are built in a structure 18.

  Examples of the structure of the polishing container 17 used in the vertical barrel polishing apparatus shown in FIG. 1 are shown in FIGS. A common configuration of these polishing containers 17 is a bottomed cylindrical container body and a lid, and the container body is made of metal. Further, the lid portion is structured so as not to be detached from the container body during the revolution and rotation of the polishing container 17. The lid is used so that the piezoelectric element plate in the polishing container 17 does not scatter to the outside. If the workpiece does not scatter due to the movement of the polishing container, the lid is not necessarily required. Not what you want.

  In the vertical barrel apparatus as shown in FIG. 1, since the shape of the polishing container can be made smaller and very light compared to the conventional horizontal barrel polishing apparatus, the self-revolving motion capability of the polishing container can be remarkably improved, and the processing time can be increased. Can be greatly shortened.

  2 shows an embodiment of the polishing container 17 disclosed in FIG. 1, (a) is a structural view seen from the opening side of the polishing container 17, and (b) is a cutting line described in (a). It was disclosed in a cross-sectional view when cut at A1-A2. That is, on the inner wall curved surface extending from the inner bottom portion to the inner side wall of the metal container body 21 constituting the polishing container 17, the outer shape in the length direction is substantially bow-shaped, and the inclination angle gradually increases as the cross-sectional shape becomes the top portion. Two convex portions 22 made of the same material as the container body 21 are formed at opposing positions. The convex portion 22 is separate from the container body 21, and there is no gap on the curved inner wall surface of the container body 21 by a screw (not shown) arranged in a screw hole 23 communicating from the outer surface of the container body 21. The inner wall curved surface of the convex portion 22 and the side edge portion of the surface of the convex portion 22 in contact with the curved surface inside the container body are closely fixed so that there is no step. In addition, since this convex part 22 is worn out at any time due to friction at the time of polishing, it is used by appropriately replacing it.

  In this embodiment, the convex portion 22 is made of the same material as that of the container body 21, but a metal material, a ceramic material, a resin material, or a plastic material different from the container body forming material may be used. As long as it is made of a material that can apply an appropriate stirring motion to the piezoelectric element plate that is put on the substrate and that does not increase the cost for frequent replacement of the protrusions 22 due to wear of the protrusions 22 themselves, the protrusions The material of 22 is not limited. Note that the number of convex portions 22 is at least one, and if a large number of convex portions are formed, there is a concern that the polishing efficiency is lowered. Therefore, the number of convex portions having a shape as in this embodiment is 10 or less. It is preferable. In addition, the outer shape of the convex portion 22 is not limited to the substantially arcuate shape disclosed as long as the same effects as the disclosed embodiment can be obtained.

  The polishing conditions using the polishing container having such convex portions 22 are, for example, the case where the polishing container can be rotated only at a low speed, such as a piezoelectric base plate put into the polishing container 17 to be polished. It is desirable to use when it is not possible to apply sufficient stirring force to the material. In the case where the rotation of the polishing container is slow, the material to be polished in the polishing container 17 passes through the surface of the convex portion 22 while being in contact with the surface, and an uncertain force is applied to the material to be polished. The material to be polished can be sufficiently stirred. For example, when a rectangular piezoelectric element plate is inserted as a material to be polished and the surface of the piezoelectric element plate is beveled, the piezoelectric element plate easily passes through the surface of the convex portion, so that the front and back surfaces of the main surface of the piezoelectric element plate can be easily Is reversed. Thereby, the front and back of the main surface of the piezoelectric element plate can be uniformly polished.

  In addition, since the convex portion action appears remarkably in the case where the rotation of the polishing container is low, Example 1 is described as an example, but the action of the convex portion which is the gist of the present invention is that the polishing container rotates at high speed. In this case, it works effectively and is effective in further shortening the polishing time.

  FIG. 3 shows a cross-sectional view when the polishing container 17 disclosed in FIG. 1 is cut at the same position as the cutting position shown in FIG. That is, on the inner wall curved surface extending from the inner bottom portion to the inner side wall of the metallic container body 31 constituting the polishing container 17, the outer shape in the length direction is substantially bow-shaped, and the inclination angle gradually increases as the cross-sectional shape becomes the top portion. Two ridge-shaped convex portions 32 that are larger than each other are formed at opposing positions. The convex portion 32 is formed integrally with the container body 31, and there is no step between the curved inner wall surface of the container body 31 and the convex portion 32. By setting it as such a shape, the operation | work which fixes a convex part to a container body can be eliminated, and polishing workability | operativity improves.

  FIG. 4 shows another embodiment of the polishing container 17 disclosed in FIG. 1, (a) is a structural view seen from the opening side of the polishing container 17, and (b) is the cutting described in (a). It was disclosed in a sectional view taken along line B1-B2. That is, on the inner wall curved surface extending from the inner bottom to the inner wall of the metal container body 41 constituting the polishing container 17, the outer shape in the length direction is substantially bow-shaped, and the inclination angle gradually increases as the cross section becomes the top. The container body 21 and four convex portions 42 made of the same material as the container body 21 are formed at positions facing each other. The convex portion 42 is integral with the container body 41, and is formed by denting a curved surface portion from the outer bottom portion of the container body 41 to the outer wall toward the inner space side of the container body 41. By forming the convex portion in this way, the container weight can be further reduced.

FIG. 1 is a structural diagram (partially sectional view) showing an outline of a barrel polishing apparatus according to the present invention. FIG. 2 illustrates one embodiment of the polishing container shown in FIG. 1, (a) is an external view seen from the opening side of the polishing container, and (b) is a cut according to (a). It is sectional drawing when cut | disconnecting by line A1-A2. FIG. 3 is a cross-sectional view of another form of the polishing container shown in FIG. FIG. 4 illustrates another form of the polishing container shown in FIG. 1, (a) is an external view seen from the opening side of the polishing container, and (b) is described in (a). It is sectional drawing when cut | disconnecting by cutting line B1-B2.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11, Barrel grinding | polishing apparatus 13, Revolving board 14, Revolving shaft center 15, Container holder 16, Rotating shaft center 17, Polishing processing container 18, Structure 21, 31, 41 Container body 22, 32, 42 Convex part

Claims (2)

  A revolution plate fixed to a revolution shaft provided in a direction perpendicular to the device installation surface, a rotation shaft provided on the revolution plate and having a certain inclination angle perpendicular to or on the revolution axis side with respect to the device installation surface, and the rotation A container holder that is fixed to a shaft and rotates, a polishing container that is fixedly held by the container holder and that has a convex portion formed on an inner wall curved surface extending from the bottom to the side wall, and the revolution shaft and the rotation shaft are independent or linked. A vertical barrel polishing apparatus comprising a drive motor and a drive rotation mechanism that rotate and rotate, and control a rotation direction, a rotation speed, and a rotation time.   2. The barrel polishing apparatus according to claim 1, wherein the convex portion formed by the polishing container is formed integrally with the structure of the polishing container.

Images