JP2004090113A - Rotation and revolution type barrel polishing device and machining container for use in device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a rotation and revolution type barrel polishing device and a machining container for use in the device, coping with shortening of beveling machining time and small amount lot machining and having high efficiency. <P>SOLUTION: This rotation and revolution type barrel polishing device includes: a revolution plate 13 fixed to a revolution shaft; a rotation shaft mounted on the revolution plate; a container holder 15 fixed to the rotation shaft and adapted to rotate; the machining container 17 fixed and held on the container holder; and a driving motor and driving rotation mechanism for rotating the rotation shaft and the revolution shaft independently or interlocking with each other and controlling the rotating direction, the rotational frequency and the rotation time. In this device, the revolution shaft is provided in the vertical direction to the installation surface of the device. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a self-revolving barrel polishing apparatus used for beveling a piezoelectric element such as a quartz plate and a processing vessel used therefor. The present invention relates to a revolving barrel polishing apparatus capable of coping with a small lot processing and a processing container used for the apparatus.
[0002]
2. Description of the Related Art As electronic components such as a piezoelectric vibrator and an oscillator have been miniaturized, the size of a piezoelectric element constituting a piezoelectric vibrator to be mounted inside the electronic device must be reduced. Because of the progress of thinning, it has become necessary to reduce the thickness of the piezoelectric element plate.
[0003]
For example, in a quartz plate, which is one of piezoelectric materials, the crystal impedance (hereinafter, referred to as CI) is increased as the size of the quartz plate is reduced, and a problem occurs in starting the oscillation of the quartz plate. Therefore, by performing beveling on the outer shape of the piezoelectric element, the “energy trapping” effect of the electrode film formed later on the main surface of the crystal plate can be increased, thereby lowering the CI and reducing the vibration of the crystal plate. Startup is easy.
[0004]
As an apparatus for performing beveling processing on a piezoelectric element such as a quartz plate as described above, as disclosed in JP-A-2000-354947 and JP-A-2002-120141, a device having a length longer than a diameter having both ends closed is disclosed. A plurality of cylindrical processing vessels having a long dimension are arranged, and a piezoelectric element and an abrasive are charged in the drum. The processing vessel is revolved around a revolving axis parallel to the ground plane. By rotating a central axis that passes through the center of the cross section of both ends or an axis that penetrates both ends diagonally in parallel with the revolving axis, the piezoelectric element loaded into the processing container makes frictional motion with the inner wall of the processing container. Therefore, a centrifugal barrel device for beveling the outer shape of the piezoelectric element plate is used.
[0005]
The processing efficiency of beveling in a barrel device generally depends on the load applied to the processing point. That is, the mass of the piezoelectric element plate whose thickness has been reduced due to the miniaturization of the external shape and the increase in the frequency has been greatly reduced, and the processing efficiency has been remarkably reduced.
[0006]
In order to compensate for this, in a so-called rotation type barrel device in which a spherical or cylindrical processing container performs beveling processing only by rotating motion, only a polishing material and a piezoelectric element plate are conventionally placed in a processing container and beveling processing is performed. However, a decrease in the processing efficiency was suppressed by increasing the processing pressure by adding a medium or the like having a larger mass than the piezoelectric element plate into the processing container. However, in a rotating barrel device using a medium, in the conventional beveling of a piezoelectric element, although the processing efficiency is improved by adding an appropriate medium, the beveling of the piezoelectric element, which has recently been downsized and increased in frequency, has been advanced. In processing, there is a limit to the media that effectively applies a load to the piezoelectric element plate, and it is difficult to further improve the processing efficiency.
[0007]
For this reason, the centrifugal barrel device, which has a higher processing efficiency than the rotary barrel device by increasing the processing pressure by using the centrifugal force, has been developed. A metal processing container having an inner diameter of about 50 to 200 mm and a length of about 300 to 600 mm is used. In order to ensure the strength of the processing container, the weight is increased by increasing the wall thickness of the processing container. It will be heavy. Therefore, the strength of the centrifugal barrel device itself incorporating the processing container needs to be very high, and the weight is generally about 1 t or more and large, so that the installation space of the device is large and the weight can withstand the weight. I need to get it.
[0008]
In addition, due to such weight, even if a large motor is used, the revolving speed of the processing container can be obtained only up to about one hundred and several tens rpm at the highest speed. Furthermore, the rotation motion of the processing vessel in the centrifugal barrel device occurs because the processing vessel tries to maintain the state as it is along with the revolving motion, and the rotation is at the same speed in the opposite direction to the revolving speed. In other words, since the rotation speed depends on the revolution speed, it is difficult to further improve the machining efficiency of the centrifugal barrel device having a limit in the revolution speed, and at present, it takes several tens of hours for beveling.
[0009]
Further, the outer shape of the rectangular piezoelectric element plate that has been beveled by the centrifugal barrel device is formed into an elliptical shape in which the central portion is high on both main surfaces of the piezoelectric element plate as shown in FIG. This is because friction grinding is performed on the inner wall of the cylindrical portion of the cylindrical processing container, and the long side of the crystal piece tends to be aligned in parallel with the rotation axis of the processing container during processing. When mounted on a package, the thickness of the short side portion of the piezoelectric element, which is the part holding the piezoelectric element, is not thin, and the energy trapping effect is not sufficient. Therefore, there is a possibility that the improvement of the piezoelectric element characteristics by the beveling process in the centrifugal barrel device is insufficient.
[0010]
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the related art, and has a revolving plate fixed to a revolving shaft, a revolving shaft provided on the revolving plate, and a revolving shaft. A container holder that is fixed to and rotates and a processing container that is fixed and held by the container holder, and a drive motor that rotates the revolving shaft and the rotating shaft independently or in conjunction with each other and controls the rotation direction, the number of rotations and the rotation time, and A self-revolving barrel polishing apparatus provided with a drive rotation mechanism, wherein a revolving shaft is provided in a direction perpendicular to an installation surface of the apparatus.
[0011]
Further, there is also provided a self-revolving barrel polishing apparatus as described above, wherein the inclination of the axis of the revolving shaft is inclined in the range of 0 ° to 45 ° toward the revolving axis with respect to the axis of the revolving shaft.
[0012]
Next, a revolving plate fixed to a revolving shaft provided in a direction perpendicular to the device installation surface, a revolving shaft provided on the revolving plate, a container holder fixed to the revolving shaft and revolving, a revolving shaft and the revolving shaft A processing container fixed to and held by the container holder used in a self-revolving barrel polishing apparatus provided with a drive motor and a drive rotation mechanism for rotating a shaft and controlling the rotation direction, the number of rotations and the rotation time, the processing container Is a substantially cylindrical shape, and one end of the processing container is closed by a bottom having a predetermined curvature or a bottom formed by a predetermined curvature portion and a flat portion.
[0013]
A revolving plate fixed to a revolving shaft provided in a direction perpendicular to the apparatus installation surface; a revolving shaft provided on the revolving plate; a container holder fixed to the revolving shaft and revolving; A processing vessel fixed to and held by the container holder used in a rotation-revolving barrel polishing apparatus provided with a drive motor and a drive rotation mechanism for rotating a rotation shaft and controlling a rotation direction, the number of rotations and a rotation time; The shape of the container is substantially cylindrical, one end of the processing container is closed to form a container bottom, the center of the container bottom is raised inside the container with a predetermined curvature, and the outer edge of the container bottom is also predetermined. A processing container characterized by being formed with a curvature of.
[0014]
By using such a self-revolving barrel polishing apparatus, the acceleration generated from the revolving motion is applied from the bottom of the processing container to the lower part of the container cylindrical wall, so that the thickness of the container wall other than the bottom peripheral portion is possible. It can be made as thin as possible, and furthermore, by making the processing container substantially vertical, it is possible to limit the location where the piezoelectric plate is beveled to the vicinity of the bottom of the processing container, so that the length of the processing container can be reduced. Therefore, an effect that the size of the self-revolving barrel polishing apparatus itself can be reduced is obtained.
[0015]
In addition, by using such a self-revolving barrel polishing apparatus and a processing container used for the same, the polishing shape by beveling processing on the piezoelectric element plate becomes a short elliptical shape in which the central portion is high on both main surfaces of the piezoelectric element plate. It has the effect of being processed.
[0016]
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a view schematically showing an example of a self-revolving barrel polishing apparatus according to the present invention. Note that the dotted frame is a cross-sectional view for clarifying the form of the components constituting the device in the frame. 2 to 4 are cross-sectional views showing one type of the processing container shown in FIG. FIG. 5 is a perspective view (contour display) of a piezoelectric element plate which has been beveled by the self-revolving barrel polishing apparatus according to the present invention. In FIGS. 1 to 5, a part of the structure is not shown and the dimensions are partially exaggerated for clarity.
[0017]
That is, in FIG. 1, a revolution plate 13 constituting a self-revolving type barrel polishing device 11 housed in a case 12 includes a revolving shaft center 14 formed in a direction perpendicular to the installation surface of the self-revolving type barrel polishing device 11. The container holder 15 is rotated around the axis of rotation of the revolving plate 13, and the container holder 15 mounted near both ends of the revolving plate 13 rotates about the axis of rotation 16.
[0018]
Thus, the container holder 15 and the processing container 17 fixed and held by the container holder 15 revolve around the rotation axis 16 while revolving around the rotation axis 14. The rotation direction of the revolving shaft and the rotation direction of the rotation shaft may be either forward or reverse.
[0019]
Further, the rotation axis 16 is inclined at 45 ° to the revolution axis side with respect to the revolution axis 14. As a result, the acceleration generated from the revolving motion is applied from the bottom of the processing container 17 to the lower portion of the container cylindrical wall, so that the thickness of the upper portion of the wall of the processing container can be reduced, and the processing container 17 can be reduced by the centrifugal force of the revolving motion. Is prevented from coming off the container holder 15 and the contents of the processing container 17 being spilled. In the embodiment, the revolving plate 13 has a structure in which one processing vessel is mounted on one, but a structure in which a plurality of revolving plates are formed and the processing vessel is mounted on each revolving plate may be adopted. Alternatively, one of the two processing containers mounted on one revolving plate may be removed, and a balancer (weight) may be mounted instead, so that one revolving plate may be configured as one processing container.
[0020]
As a specific mechanism for rotating the processing container 17 around the rotation axis 16 while revolving around the rotation axis 14, a rotation drive motor and a rotation drive motor are separately provided, and each of them drives independently. It may be a mechanism. Further, a mechanism may be used in which a drive motor that is commonly used for revolving and rotating is used, and the rotational motion of the motor is divided into revolving and revolving by a belt and a pulley or a planetary gear device. Further, a control mechanism for controlling the start / stop of these drive motors, the number of rotations, the rotation time, and the like is also provided. This control mechanism can be accessed from a control panel or the like provided outside the case 12, and can be automatically controlled by a program or the like. You can also control. In FIG. 1, the driving motor for revolution and its control mechanism are built in a structure 18.
[0021]
A material to be polished, such as a strip-shaped piezoelectric element, an abrasive, and an additive such as an aqueous solution or an oil agent for dispersing the abrasive in order to secure free movement of the piezoelectric element in the processing container are placed in the processing container 17. The processing container 17 is fixedly supported on the container holder 15, the lid of the case 12 is closed, and each drive motor is rotated at an arbitrary number of rotations according to various commands from the control mechanism. 17 revolutions and rotation start.
[0022]
By revolving the processing container 17, the contents in the processing container 17 are pressed by the centrifugal force from the inner bottom surface of the processing container 17 to the container wall located opposite to the revolving axis with respect to the rotation axis 16. As a result, a pressure sufficient for processing is obtained even in a piezoelectric element that has been miniaturized and the frequency has been increased.Furthermore, friction occurs between the bottom surface and the contents due to rotation, so that the beveling processing on the piezoelectric element is extremely short. Applied on time. In addition, the interaction between revolution and rotation, and changing the number of revolutions of revolution and rotation during processing (including rotation stop), promotes the contents to freely move and mix in the processing container, Beveling can be uniformly applied to the entire piezoelectric element placed in the container, so that the time for beveling can be reduced from several minutes to tens of minutes.
[0023]
FIGS. 2 to 4 are cross-sectional views each showing one shape of a processing container 17 which is fixedly supported in a detachable manner on the container holder 15. The processing vessel 17 includes a bottomed cylindrical main body 21 and a lid 22, and the main body 21 is formed of metal. The lid 22 is structured so as not to come off the main body 21 when the processing container 17 revolves and rotates. The lid 22 may not be used depending on the amount of the contents to be put into the container.
[0024]
In the beveling processing of a strip-shaped piezoelectric element plate or the like, the processing shape is obtained by transferring the shape of the inner surface of the processing container. In the beveling process performed by the processing container as disclosed in FIGS. 2 to 4, a piezoelectric element plate having a beveled shape as shown in FIG. 6 is obtained. In the piezoelectric element having this shape, the thickness in the short side direction can be reduced, so that the energy trapping effect can be sufficiently obtained, and the characteristics of the piezoelectric element can be significantly improved.
[0025]
Further, as shown in FIG. 4, the bottom shape of the processing container 17 is such that the center of the inner bottom of the main body 21 is raised inside the container at a predetermined curvature, so that the revolving motion radius passing through the center portion of the processing container bottom surface. , The area of the processing region of the processing container outside the processing container can be increased, and the processing efficiency is further improved. Furthermore, when the container contents move due to a change in the revolution speed during the beveling process, the contents hit the protruding portion and make a random movement motion due to the protruding portion at the bottom center. This makes it possible to more uniformly bevel the entire piezoelectric element put into the container.
[0026]
In the self-revolving barrel polishing apparatus of the present invention and the processing container used for the same, it is possible to efficiently and efficiently bevel the piezoelectric element plate which has been miniaturized and increased in frequency, in a short time. It is possible to provide an electronic component such as a piezoelectric vibrator using a piezoelectric element plate at low cost in a short time.
[Brief description of the drawings]
FIG. 1 is a structural view (a partial cross-sectional view) schematically illustrating a self-revolving barrel polishing apparatus according to the present invention.
FIG. 2 is a cross-sectional view of one embodiment of the processing container shown in FIG.
FIG. 3 is a sectional view of another embodiment of the processing container shown in FIG. 1;
FIG. 4 is a sectional view of another embodiment of the processing container shown in FIG. 1;
FIG. 5 is a perspective view of a piezoelectric element plate that has been subjected to beveling processing by using a self-revolving barrel polishing apparatus according to the present invention (a change in height is indicated by a contour line).
FIG. 6 is a perspective view of a piezoelectric element plate that has been subjected to beveling processing using a conventional centrifugal barrel device (a change in height is indicated by a contour line).
[Explanation of symbols]
11, revolving barrel polishing device 13, revolving plate 14, revolving axis 15, vessel holder 16, revolving axis 17, processing vessel 18, structure

Claims (4)

A revolving plate fixed to the revolving shaft, a revolving shaft provided on the revolving plate, a container holder fixed to the revolving shaft and revolving, a processing container fixed and held by the container holder, the revolving shaft and the In a self-revolving type barrel polishing machine equipped with a drive motor and a drive rotation mechanism for rotating the rotation axis independently or in conjunction with each other and controlling the rotation direction, the number of rotations and the rotation time, the rotation axis is perpendicular to the installation surface of the apparatus. A self-revolving barrel polishing machine, characterized in that it is provided in a barrel. 2. The self-revolving barrel polishing apparatus according to claim 1, wherein the inclination of the axis of the revolving shaft is inclined in the range of 0 ° to 45 ° toward the revolving axis with respect to the axis of the revolving shaft. A revolving plate fixed to a revolving shaft provided in a direction perpendicular to the apparatus installation surface, a revolving shaft provided on the revolving plate, a container holder fixed to the revolving shaft and revolving, the revolving shaft and the revolving shaft A processing container fixed to and held by the container holder used in a self-revolving type barrel polishing apparatus having a drive motor and a drive rotation mechanism for controlling the rotation direction, the number of rotations and the rotation time. A processing container, wherein the processing container has a substantially cylindrical shape, and one end of the processing container is closed by a bottom having a predetermined curvature or a bottom formed by a predetermined curvature and a flat portion. A revolving plate fixed to a revolving shaft provided in a direction perpendicular to the apparatus installation surface, a revolving shaft provided on the revolving plate, a container holder fixed to the revolving shaft and revolving, the revolving shaft and the revolving shaft A processing container fixed to and held by the container holder used in a self-revolving type barrel polishing apparatus having a drive motor and a drive rotation mechanism for controlling the rotation direction, the number of rotations and the rotation time. The shape of the container is substantially cylindrical, one end of the processing container is closed to form a container bottom, the center of the container bottom is raised inside the container with a predetermined curvature, and the outer edge of the container bottom is also a predetermined curvature. A processing container characterized by being formed of:

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