JP2005062394A - Optical waveguide and its manufacturing method, and optical information processor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical waveguide having a lens shape, which can easily be formed with high precision, atop, a method of easily manufacturing it at a low cost, and an optical information processor using the optical waveguide. <P>SOLUTION: Disclosed are optical waveguides 23 and 73 which are composed of a joined body of a core 21 and clads 22 and 32 and have a core material 21A patterned through exposure, using an exposure mask 42, to ultraviolet rays 43 so that end parts of the core 21 on a light projection side and/or a light incidence end are a convex lens part 28 and a concave lens part 78. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an optical waveguide composed of a joined body of a core and a clad, suitable for a light source module, optical interconnection, optical communication, and the like, a manufacturing method thereof, and an optical information processing apparatus such as a display.

  Until now, information transmission between relatively short distances, such as between boards in electronic equipment or between chips in boards, has been mainly performed by electrical signals, but in order to further improve the performance of integrated circuits, It is necessary to increase the signal speed and the signal wiring density. However, in the electric signal wiring, it is difficult to increase the speed of the electric signal and increase the density of the electric signal wiring due to problems such as signal delay due to the time constant of the wiring and generation of noise.

  Optical wiring (optical interconnection) that solves these problems is drawing attention. Optical wiring can be applied to various locations such as between electronic devices, between boards in electronic devices, or between chips in a board. For example, chips are mounted for transmission of signals over a short distance such as between chips. It is possible to construct an optical transmission / communication system in which an optical waveguide is formed on a substrate that is used as a transmission path for signal-modulated laser light or the like.

  The angle of the emitted light from the optical waveguide is limited by the shape of the waveguide end face, NA (numerical aperture), and the like. For this reason, in order to obtain a desired light beam shape, it was necessary to attach a micro lens or the like. In addition, a technique for processing the end face of an optical waveguide to give a lens effect is also known. For example, a method of spheronizing with a solvent (Patent Document 1: Japanese Patent Laid-Open No. 10-239538 described later), a method of spheroidizing by penetrating an organic solvent and drying (Patent Document 2: Japanese Patent Laid-Open No. 11-326689 described later) Gazette), a method of penetrating a photosensitive resin (Patent Document 3: Japanese Patent Laid-Open No. 5-107427 described later), a method of pressing a lens forming die to make the tip spherical (Patent Document 4: Japanese Patent Laid-Open No. 8-75935 described later). No. 3), a method of heating and softening the tip (spherical patent document 5: Japanese Patent No. 312572), and a method of pressing a heated spherical mold on the fiber tip (patent document 6: Japanese Patent Laid-open No. 2001-350037).

  On the other hand, it is also known to use an optical waveguide as a light source module of a display. For example, the development of a head mounted display (HMD) that allows you to enjoy video software, games, computer screens, movies, etc. on your own large screen has been developed. There is a personal display that can be easily felt anytime and anywhere (see US Pat. No. 5,467,104).

  Red, green, and blue light emitting diodes (LEDs) are used as the light source for this head mounted display, but the LED light is not coherent, has a wide radiation angle, and is condensed to combine the three colors. It is difficult. Therefore, a technique is known in which three colors of LED light are combined through an optical waveguide to generate signal light such as uniform white (non-patent document 1: Nikkei Electronics 2003.3.31 described later, P 127).

Japanese Patent Application Laid-Open No. 10-239538 (claims on the second page, page 4, column 6, line 15 to page 5, column 8, line 13) JP 11-326689 A (2nd page claims, page 4, column 5, line 39 to column 6, line 42) Japanese Patent Application Laid-Open No. 5-107427 (claim 2nd page, second page, second column, 48th line to third page, third column, 29th line, FIG. 2) JP-A-8-75935 (claims on page 2, claims 3, page 3, column 3, line 18 to column 4, line 17, FIG. 1) Japanese Patent No. 3112572 (claims on page 1, claims 2, page 2, column 7, line 11 to page 2, column 9, line 39) JP 2001-350037 A (pages 2 to 3 claims, page 6, column 9, line 32 to column 10, line 19, FIGS. 1 to 3) Nikkei Electronics 2003.3.31, P127

  In any of the above-mentioned Patent Documents 1 to 6, since the lens portion is formed by post-processing the end face after the optical waveguide is manufactured, it is difficult to accurately manufacture the lens portion due to variations in processing thereafter. is there.

  Explaining this by taking Patent Document 6 as an example, as shown in FIG. 11A, after forming an optical fiber 3 composed of a joined body of a core 1 and a clad 2 covering the core 1, the end face is cut, Thereafter, the heated convex spherical mold 5 is pressed against the cut surface 4 or the end surface 4 is dissolved with a solvent. As a result, a spherical concave structure 6 is formed as shown in FIG.

  Next, as shown in FIG. 11 (c), the spherical concave structure 6 is filled with a refractive index matching material 7 having a high refractive index and cured to form a lens portion 8.

  After molding the optical fiber with the lens portion thus produced, its end face is cut, and then the heated convex spherical mold 5 is pressed against the cut face 4, or the end face 4 is dissolved with a solvent. As a result, a spherical concave structure 6 is formed as shown in FIG.

  Next, as shown in FIG. 11C, the spherical concave structure 6 is filled with a refractive index matching agent 7 having a high refractive index and cured to form a lens portion 8.

  The optical fiber 3 with a lens portion manufactured in this way has the signal light 10 from the light source 9 such as an LED as the core 1 as shown in FIG. Then, it is guided to the lens unit 8 on the exit side while being reflected at the interface with the grad 2, and is focused on a predetermined beam diameter, and the resulting emitted light 11 can be guided to the next stage optical system. In Patent Document 6 described above, signal light from an optical fiber (not shown) having a small core diameter is condensed on the lens unit 8 and is incident on the core 1, and the lens unit 8 is formed from the end surface on the reflection side. Although an example of emission is described, it is considered possible to use the optical fiber 3 as shown in FIG.

  However, the optical fiber shown in FIGS. 11C and 11D has the convex spherical mold 5 heated at the tip of the fiber as shown in FIGS. 11A and 11B to form the lens portion 8. Since the spherical concave structure 6 is formed by pressing the fiber tip, it is difficult to accurately process the fiber tip due to variations in the pressing pressure and position of the mold 5, and to post-process individual fibers. Poor mass productivity.

  Also, in Patent Document 4 described above, the tip of the optical fiber is made spherical by a lens mold as in Patent Document 6, and in Patent Documents 1 to 3 and 5, the end surface is made of a solvent or resin after the optical fiber is manufactured. Since the lens portion is formed by post-processing by, for example, it is difficult to form the lens portion with high accuracy due to variations in post-processing as in the case of Patent Document 6 described above.

  Further, the light source module according to Non-Patent Document 1 can extract white light in a plane, but cannot create an arbitrary spot shape. In order to apply to a head mounted display, a focused point light source is required, but in order to convert planar white light into a spot, a lens system having a complicated configuration is added to the optical waveguide. In order to manufacture a light source module including such a lens system, advanced technology is required, and the cost is likely to increase. Such a prior art is not preferable because cost reduction is required for applications such as game machines and personal computers.

  Therefore, the present invention has been made in view of such a situation, and an object of the present invention is to manufacture an optical waveguide having a lens shape that can be easily and accurately formed at the tip, and to manufacture this easily and at low cost. And an optical information processing apparatus using an optical waveguide.

  That is, according to the present invention, in an optical waveguide composed of a joined body of a core and a clad, the core material is subjected to an exposure process so that the end of the core on the light emitting side and / or the light incident side has a lens shape. The present invention relates to an optical waveguide characterized by being patterned.

  Further, the present invention provides a method of manufacturing an optical waveguide comprising a joined body of a core and a clad, wherein the core material is patterned through an exposure process, and the end of the core on the light emitting side and / or the light incident side is formed. The present invention relates to a method for manufacturing an optical waveguide, characterized by being formed into a lens shape.

  The present invention also provides an optical information processing apparatus having the optical waveguide according to the present invention, an incident means for entering signal light into the optical waveguide, and a light receiving means for receiving light emitted from the optical waveguide. is there.

  According to the optical waveguide and the manufacturing method thereof of the present invention, the core material is patterned through the exposure process so that the end of the core has a lens shape. Beam-shaped light can be efficiently collected and emitted, or incident light can be efficiently collected.

  Moreover, unlike the conventional technique in which the optical waveguide is manufactured and then post-processed, the lens shape can be easily manufactured with high accuracy and high productivity by using an exposure process in the optical waveguide manufacturing process. .

  And by the optical waveguide of the present invention, the incident means of the signal light to the optical waveguide, and the light receiving means of the emitted light from the optical waveguide, the optical waveguide is efficiently condensed into a predetermined light beam and emitted, Alternatively, it is possible to effectively perform optical information processing by causing the signal light emitted after efficiently entering the optical waveguide to enter the light receiving means.

In the present invention, in order to obtain the lens shape with high accuracy and ease, it is desirable to perform any of the following (1) to (3).
(1) The core material is exposed to a predetermined pattern, and the non-exposed portion is dissolved and removed to form a core having the lens shape consisting of a convex surface or a concave surface at an end portion.
(2) The core material is exposed to a predetermined pattern, and the non-exposed portion is a core having the lens shape consisting of a convex surface or a concave surface at the end, the exposed portion is left as a clad, and an exposed portion (cladd) Lower the refractive index of the core material than that of the non-exposed core material.
(3) The resist is patterned into a core shape by exposure and development processing, and the core material is dissolved or etched into a predetermined pattern using the obtained resist mask, and the lens shape consisting of a convex surface or a concave surface is formed at the end. Forming a core having.

  In addition, as a structure of the optical waveguide, a core having the lens shape having a convex surface or a concave surface at the end may be formed on the lower clad, but the upper clad is formed on the lower clad from the core. Can be formed. However, in order to prevent light incident on the optical waveguide from leaking from the core to the clad and spreading the luminous flux of the emitted light or increasing light loss, it is desirable not to provide the upper clad.

  Further, the end surface of the joined body in which the lens shape formed of a convex surface or a concave surface exists may expose the lens-shaped core tip, but a flat surface substantially made of a clad so as to surround the lens-shaped portion. It is good to be.

  The core material may be made of a photocurable resin. This is because it is easy to pattern the core corresponding to the exposure pattern by irradiation with light (particularly ultraviolet rays), and it is also advantageous as a clad material. Examples of such a photocurable resin include high molecular organic materials such as oxetane resins described in JP 2000-356720 A. Such a polymer organic material preferably transmits 90% or more of visible light having a wavelength of 390 nm or more and 850 nm or less. As the core material and the clad material, an inorganic material may be used in addition to the photocurable resin.

  As the optical waveguide material, the above-mentioned oxetane resin composed of an oxetane compound having the following oxetane ring, or polysilane composed of the following oxirane compound having an oxirane ring can be used. A composition containing a cationic polymerization initiator capable of initiating polymerization by reaction is preferably used.

  Then, the present invention provides a display configured so that a signal beam that is efficiently condensed into a predetermined light flux by an optical waveguide and emitted, or signal light emitted after being efficiently incident on the optical waveguide is scanned and projected by a scanning unit. The signal light can be effectively used for optical information processing such as optical communication configured to make the signal light incident on a light receiving element (such as an optical wiring or a photodetector) of the next stage circuit.

  Next, a preferred embodiment of the present invention will be described in detail with reference to the drawings.

First Embodiment FIGS. 1 to 4 show a first embodiment of the present invention.

  As shown in FIGS. 1 and 2, the optical waveguide 23 according to the present embodiment includes a bonded body of a core 21 having a high refractive index, a lower clad 22 and an upper clad 32 having a low refractive index provided on a substrate 20. (The relative refractive index difference between the core and the clad is 0.1 to 4.0%), and the light emission side end portion of the core 21 which is the tip portion of the optical waveguide is the exposure described later. The lens portion 28 is formed into a convex surface by the processing. The lens portion 28 may be exposed at the top portion as the tip portion of the core 21, but is covered with the upper layer clad 32 (and further the lower layer clad 22), so that the light emitting surface 24 of the optical waveguide is substantially separated from the clad. It has become a flat surface.

  Specifically, in the optical waveguide 23, the core 21 is 40 μm thick × 50 μm wide, and the relative refractive index difference between the core 21 and the clads 22 and 32 is 1.7%.

  Moreover, these cores and clads can be formed of a photocurable resin. For example, it is preferable to use an oxetane resin (for example, manufactured by Sony Chemical Corporation), which is a polymer organic waveguide material disclosed in Japanese Patent Application Laid-Open No. 2000-356720. Polysilane (for example, trade name Gracia, manufactured by Nippon Paint Co., Ltd.) may also be used. There are polymer materials each having a refractive index suitable for the core and the cladding, and these can be obtained from the above manufacturers.

  Thus, since the convex lens part (convex lens part) 28 is formed at the tip of the core 21, as shown in FIG. 1B in which the cross-sectional hatching in FIG. The signal light 30 incident on the core 21 from a light source (for example, LED) 29 disposed on the light incident surface 25 side of 23 is totally reflected at the interface with the upper clad 32 (and further the lower clad 22), and the lens portion of the core 21 28, where the luminous flux is narrowed down to obtain a desired beam diameter or collimated outgoing light 31. As the light source 29, not only a single color but also three light sources of R (red), G (green), and B (blue) can be used, and the beam shape of the emitted light of each color or white is changed by the lens unit 28. Can be controlled.

  Therefore, in the optical waveguide 23, by making the tip of the core 21 itself into a lens shape, it is not necessary to separately arrange a convex lens facing the light emitting side of the core, and the positional accuracy is improved.

  In general, when an LED is used as the light source 29, the emitted light of the LED is not coherent and has a wide radiation angle, so that it is difficult to narrow down to a desired beam diameter. Since the light from the LED is introduced into the core 21 of the optical waveguide 23 and then converged to a desired beam diameter by the convex lens portion 28 at the end thereof, the optical waveguide 23 can be used as a point light source (hereinafter, referred to as “light source”). The same).

  The manufacturing process of the optical waveguide 23 having a lens shape in the core is shown in FIGS. Here, a case where an oxetane resin manufactured by Sony Chemical Co., Ltd. is used as an optical waveguide material is illustrated, and each process step is shown by a cross section and a plane.

  First, as shown in FIG. 3A, a lower clad material is spin-coated on a substrate 20 such as glass or plastic, and then cured by ultraviolet irradiation to form a lower clad 22 having a thickness of, for example, 30 μm.

Next, as shown in FIG. 3B, the material 21A having a high refractive index for the core is applied to a thickness of, for example, 40 μm by a spin coating method, and then the convex shape 40 is formed as shown in FIG. For example, ultraviolet rays 43 of 10 mW / cm ² are irradiated through a negative pattern exposure mask 42 having a structure having an opening 41.

  Next, as shown in FIG. 4D, the core material in a portion not irradiated with ultraviolet rays, for example, with acetone is removed and cured by ultraviolet irradiation to form an optical waveguide core 21 having a convex lens portion 28. .

  Next, as shown in FIG. 4E, the upper layer clad 32 is applied to complete the optical waveguide 23.

  According to the present embodiment, since the core material 21A is patterned through the exposure process shown in FIG. 3C so that the end of the core 21 has the convex lens shape 28, the optical waveguide is conventionally used. Unlike the method of post-processing after manufacturing, the convex lens shape of the core can be easily manufactured with high accuracy and high productivity in the optical waveguide manufacturing process.

  Since the collimated light and the light having an arbitrary beam shape can be efficiently condensed and emitted by the convex lens shape 28 at the end of the core, the optical waveguide 23 is suitable as a point light source.

Second Embodiment In the present embodiment, as shown in FIG. 5A, after forming the lower cladding 22 on the substrate 20 as in the first embodiment, the core material 21A is applied. In addition, the photoresist is applied, exposed and developed by a normal photolithography technique to form a resist mask 52 having a core pattern on the core material 21A.

  Next, as shown in FIG. 5B, the core material 21 </ b> A in the region other than the resist mask 52 is dissolved and removed to form the core 21 having the convex lens portion 28 at the end.

  Next, as shown in FIG. 5C, the upper clad 32 is formed in the same manner as in the first embodiment described above, and the optical waveguide 23 is completed.

  According to the present embodiment, the core material 21A is used using the resist mask 52 of the core pattern obtained by the exposure and development processing shown in FIG. 5A so that the end of the core 21 has the convex lens shape 28. Therefore, instead of post-processing after manufacturing the optical waveguide as in the prior art, the convex lens shape of the core can be easily manufactured with high accuracy and high productivity in the optical waveguide manufacturing process.

  Then, the convex lens shape 28 at the end of the core can efficiently collect and emit collimated light or light having an arbitrary beam shape.

Third Embodiment In the present embodiment, as shown in FIG. 6A, after the lower clad 22 is formed on the substrate 20 as in the first embodiment, the polysilane (for example, Using a core pattern exposure mask 62 obtained by laminating a core material 21A made of Nippon Paint's Gracia) by coating, and further applying, exposing and developing a photoresist by a normal photolithography technique The core material 21A is exposed to ultraviolet rays.

  As a result, as shown in FIG. 6B, the refractive index of the exposed portion of the core material 21A other than the exposure mask 62 is lowered, and the core material 21A is closely attached around the high refractive index core 21 having the convex lens portion 28 at the end. Thus, the clad 62 having a low refractive index is formed. Thereafter, as shown in FIG. 6C, if necessary, the upper clad 32 is formed in the same manner as in the first embodiment described above, and the optical waveguide 63 is completed.

  According to the present embodiment, the core material 21A is selectively reduced in refractive index by the exposure process shown in FIG. 6A so that the end of the core 21 has the convex lens shape 28, and the core 21 having a predetermined pattern is formed. Since the optical waveguide and the clad 62 are formed, the convex lens shape of the core is simply manufactured with high accuracy and high mass productivity in the optical waveguide manufacturing process, instead of post-processing after manufacturing the optical waveguide as in the prior art. be able to. In addition, since unnecessary portions of the core material 21A are not removed but are closely adhered around the core 21 and left as the clad 62, the core 21 can be sufficiently protected even in this state and can be used as an optical waveguide.

  Then, the convex lens shape 28 at the end of the core can efficiently collect and emit collimated light or light having an arbitrary beam shape.

Fourth Embodiment In each of the above-described embodiments, the convex lens portion 28 is formed at the end of the core 21, but in this embodiment, as shown in FIG. 7A, the light incident surface 25 of the optical waveguide. A concave lens portion 78 is formed on the side, and the optical waveguide 73 is manufactured by covering the concave lens portion 78 with the upper clad 32 so as to surround the concave lens portion 78.

  In order to form such a concave lens portion 78, for example, in the first embodiment described above, a concave surface shape corresponding to the concave lens portion 78 at the opening end portion of the mask 42 shown in FIG. After that, ultraviolet irradiation, removal of the non-irradiated portion, and formation of the upper clad may be sequentially performed in the same manner.

  According to the present embodiment, as shown in FIG. 7B, by arranging the concave lens portion 78 of the core 21 on the light source 29 side (light incident surface 25 side), a wide range of signals from the light source 29 is obtained. The light 30 can be efficiently condensed into the core 21 by the concave lens action. In addition, the fact that the concave lens shape of the core can be easily produced with high accuracy and high mass productivity is the same as in the first embodiment described above.

で表せる。このＮＡが大きいほど、発光素子からの光は光導波路に入りやすい。 In the above description, the numerical aperture (NA) is determined from the difference in refractive index between the core and the clad for the incident angle at the waveguide exit end face that is not processed. Refractive index n ₁ of the core, and the refractive index n ₂ of the cladding, NA is

It can be expressed as The larger the NA, the easier the light from the light emitting element enters the optical waveguide.

  Therefore, when the concave lens portion 78 is provided on the end face of the optical waveguide as described above, light from the light emitting element is refracted when entering the optically dense optical waveguide core. As shown in FIG. 7, the end face of the optical waveguide having the function of the concave lens portion has a larger NA than that of the unprocessed optical waveguide. Therefore, the optical waveguide easily receives light from the light emitting element by the action of the concave lens portion.

Fifth Embodiment In this embodiment, as shown in FIG. 8A, the convex lens portion 28 of the core 21 in the above-described first embodiment and the core 21 in the above-described fourth embodiment. The concave lens portion 78 is formed on the light emitting surface 24 side and the light incident surface 25 side, respectively, and is covered with the upper clad 32 so as to surround the lens portions 28 and 78, thereby producing the optical waveguide 83.

  In order to form such lens portions 28 and 78, for example, in the first embodiment described above, a convex surface having a shape corresponding to the convex lens portion 28 is formed at the opening end portion of the mask 42 shown in FIG. A shape and a concave shape corresponding to the concave lens portion 78 are provided, and thereafter, ultraviolet irradiation, removal of a non-irradiation portion, and formation of an upper clad may be sequentially performed in the same manner.

  According to the present embodiment, as shown in FIG. 8B, by arranging the concave lens portion 78 of the core 21 on the light source 29 side (light incident surface 25 side), a wide range of signals from the light source 29 is obtained. The light 30 can be efficiently condensed into the core 21 by the concave lens action, and at the same time, collimated light and light having an arbitrary beam shape can be efficiently condensed and emitted by the convex lens portion 28 of the core 21. In addition, the convex lens shape and concave lens shape of the core can be easily manufactured with high accuracy and high productivity, as in the first embodiment.

Sixth Embodiment FIG. 9 shows a sixth embodiment, which is an optical waveguide 93 from which the upper layer clad 32 is removed in the first embodiment described above.

  Accordingly, when the signal light incident from the light incident surface 25 enters the upper clad or leaks from the core 21 to the upper clad, the light flux of the emitted light from the light exit surface 24 is apparently expanded (that is, the core 21). It is possible to prevent the light other than the narrowed light flux from being emitted). In other respects, the same effects as those of the first embodiment described above can be obtained.

Seventh Embodiment In each of the above-described embodiments, the optical waveguide is suitable as a point light source, and the emitted light is suitable as signal light to the next stage with a narrowed beam diameter. The present embodiment is an example in which such an optical waveguide as a point light source is applied to an optical information processing apparatus such as a display.

  According to the optical waveguide 103 shown in FIG. 10A, the core is divided into three types of red light core 21R, green light core 21G, and blue light core 21B. A red light source 29R, a green light source 29G, and a blue light source 29B are arranged, and a convex lens portion 28 similar to that described above is provided at the end of the linear green light core 21G on the light emission side. At the front position, the red light core 21R and the blue light core 21B are joined to the green light core 21G and guided to the convex lens portion 28 through the common core 21. As a result, the signal lights 30R, 30G, and 30B of the respective colors are combined and condensed to a desired beam diameter by the convex lens portion 28 and emitted as described above.

  Then, by controlling the intensity and color balance of the signal light of each color, the emitted light 31 (R, G, B) is projected onto the next stage, for example, a screen as signal light having target color information, and a full-color image is obtained. Can be obtained.

  FIG. 10B shows an example in which such a display is applied to a head mounted display (HMD) 105. The optical waveguide 103 having the structure shown in FIG. A plurality of light beams arranged in a line in the vertical direction and having a reduced beam diameter from each optical waveguide 103 are passed through a scanned image plane 100 and then optically conjugate with this scanning plate. A focus (spot) is formed on the retina 102 of a human eyeball 101 by an optical lens 104 or the like. This imaging point is formed on the retina 102 for one line, and this is scanned by the scanning plate 100 in the direction perpendicular to the line on the retina, so that a realistic image can be experienced personally. Can do.

  In such a display, in general, the light emitted from the LEDs 29R, 29G, and 29B as the light source has no coherent property and has a wide radiation angle, so that it is difficult to combine the three colors. Thus, after the light from the LED is introduced into the core of the optical waveguide 103, it can be condensed to a desired beam diameter by the convex lens portion 28 at the end thereof, so that the optical waveguide 103 is very advantageous for a display as a point light source. Become.

  The head mounted display 105 can be provided in a compact video apparatus by being incorporated in a projector, a camera, a computer, a game machine or the like while being mounted like sunglasses.

  The embodiment described above can be variously modified based on the technical idea of the present invention.

  For example, if the convex lens portion 28 of the core described above is provided not only on the light exit side of the optical waveguide but also on the light incident side, light from a light source having a wide radiation angle can be effectively incident on the core. Further, the shape and type of each lens unit including the convex lens unit 28 may be various.

  In addition, the constituent material and the layer configuration of the optical waveguide described above may be variously changed. For example, in the second embodiment described above, an inorganic material such as lithium niobate is used, and this is formed by CVD (chemical vapor phase). A core equivalent to the core 21 described above can be formed by forming a film on the substrate as a core material by a growth method and etching into a predetermined pattern using a resist mask.

  In addition, the configuration of the optical system including the above-described optical waveguide may be changed as appropriate. For example, a micromirror device or a polygon mirror may be employed as a scanning unit, or projection may be performed on a screen.

  In the present invention, for example, a display using an optical waveguide using an LED or a laser as a light source, for example, signal light from the optical waveguide using a laser is incident on a light receiving element (optical wiring, photodetector, etc.) of the next stage circuit. It can be widely applied to various optical information processing such as optical communication.

  The present invention relates to a display configured to scan and project the signal light emitted after being efficiently condensed into a predetermined light beam and emitted from the optical waveguide, or after being efficiently incident on the optical waveguide, The present invention can be effectively used for optical information processing such as optical communication configured to cause signal light to be incident on a light receiving element (such as an optical wiring or a photodetector) of the next stage circuit.

1A is a cross-sectional view (A) of the optical waveguide according to the first embodiment of the present invention (cross-sectional view taken along the line IA-IA in FIG. 2A), and a similar cross-sectional view for explaining the light collection state (FIG. B). FIG. 1A is a longitudinal sectional view of the optical waveguide (A) (a sectional view taken along the line IIA-IIA in FIG. 1A), a side view of the light emitting side thereof, and a longitudinal sectional view thereof (C) (FIG. 1A). IIC-IIC line sectional view). FIG. 6 is a longitudinal sectional view and a plan view sequentially showing the optical waveguide manufacturing process. FIG. 6 is a longitudinal sectional view and a plan view sequentially showing the optical waveguide manufacturing process. It is the longitudinal cross-sectional view which shows sequentially the manufacturing process of the optical waveguide by the 2nd Embodiment of this invention, and its top view. It is the longitudinal cross-sectional view which shows sequentially the manufacturing process of the optical waveguide by the 3rd Embodiment of this invention, and its top view. It is the cross-sectional view (A) of the optical waveguide of the 4th Embodiment of this invention, and the same cross-sectional view (B) for demonstrating the condensing state. It is the cross-sectional view (A) of the optical waveguide by embodiment of the subject 5 of this invention, and the same cross-sectional view (B) for demonstrating the condensing state. It is the longitudinal cross-sectional view and its top view of the optical waveguide by the 6th Embodiment of this invention. It is the top view (A) of the optical waveguide by the 7th Embodiment of this invention, and the schematic (B) of the display using the optical waveguide. It is a longitudinal cross-sectional view which shows the preparation processes of the conventional optical waveguide sequentially.

Explanation of symbols

20 ... Substrate, 21, 21R, 21G, 21B ... Core, 21A ... Core material,
22 ... lower cladding, 23, 63, 73, 83, 93, 103 ... optical waveguide,
24 ... light exit surface, 25 ... light entrance surface, 28 ... convex lens portion,
29, 29R, 29G, 29B ... light source, 30, 30R, 30G, 30B ... signal light,
31 ... outgoing light, 32 ... upper cladding, 42, 62 ... exposure mask, 43 ... ultraviolet light,
52 ... resist mask, 62 ... cladding, 78 ... concave lens part, 100 ... scanning plate,
102 ... Retina, 104 ... Lens, 105 ... Head mounted display

Claims (18)

  In an optical waveguide composed of a joined body of a core and a clad, the core material is patterned through an exposure process so that the end of the core on the light emitting side and / or the light incident side has a lens shape. An optical waveguide characterized by   2. The optical waveguide according to claim 1, wherein a core having the lens shape having a convex surface or a concave surface at an end portion is formed by dissolving and removing a non-exposed portion of the core material.   2. The optical waveguide according to claim 1, wherein the non-exposed portion of the core material is a core having the lens shape having a convex surface or a concave surface at an end portion, and the exposed portion is a clad.   The core material is etched by using a resist mask patterned into a core shape by exposure and development processing, thereby forming a core having the convex lens shape or the concave lens shape at an end. Optical waveguide.   The optical waveguide according to claim 1, wherein a core having an end portion having the lens shape formed of a convex surface or a concave surface is formed on a lower clad.   The optical waveguide according to claim 5, wherein an upper clad is formed from the core to the lower clad.   The optical waveguide according to claim 1, wherein an end surface of the joined body in which the lens shape including a convex surface or a concave surface exists is a flat surface substantially including a clad.   The optical waveguide according to claim 1, wherein the core material is made of a photocurable resin.   In a method of manufacturing an optical waveguide comprising a joined body of a core and a clad, patterning a core material through an exposure process, and forming an end of the core on the light exit side and / or the light entrance side into a lens shape A method of manufacturing an optical waveguide, characterized by:   The method for manufacturing an optical waveguide according to claim 9, wherein the core material is exposed to a predetermined pattern, and the non-exposed portion is dissolved and removed to form a core having the convex or concave lens shape at the end. The optical waveguide manufacturing method according to claim 9, wherein the core material is exposed in a predetermined pattern, the non-exposed portion is a core having the convex or concave surface at the end, and the exposed portion is left as a clad. Method.   The resist is patterned into a core shape by exposure and development processing, and the core material is dissolved or etched into a predetermined pattern using the obtained resist mask to form a core having the lens shape consisting of a convex surface or a concave surface at the end. The method for manufacturing an optical waveguide according to claim 9.   The manufacturing method of the optical waveguide as described in the manufacturing method 9 which forms the core which has the said lens shape which consists of a convex surface or a concave surface in a lower layer clad.   The method for manufacturing an optical waveguide according to claim 13, wherein an upper clad is formed from the core to the lower clad.   The method for manufacturing an optical waveguide according to claim 9, wherein an end surface of the joined body having the lens shape formed of a convex surface or a concave surface is formed on a flat surface substantially formed of a clad.   The method for manufacturing an optical waveguide according to claim 9, wherein a photocurable resin is used as the core material.   An optical information processing apparatus comprising: the optical waveguide according to any one of claims 1 to 8; an incident means for inputting signal light into the optical waveguide; and a light receiving means for receiving light emitted from the optical waveguide. The optical information processing apparatus according to claim 17, configured as a display on which the emitted light is projected by being scanned by a scanning unit.

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