JP2005062094A - Lengthy low-energy electron beam irradiation equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide lengthy low-energy electron beam irradiation equipment equipped with a maintenance mechanism of an outgoing window for facilitating maintenance inspection of the outgoing window for the lengthening of the irradiation width. <P>SOLUTION: This lengthy low-energy electron beam irradiation equipment 1 is characterized by being equipped with a vacuum container 2 storing inside an electron beam generation part and having on one face the outgoing window 6 for irradiating an electron beam generated from the electron beam generation part, a movable frame 10 having a holding mechanism 12 for holding the vacuum container 2 rotatably around the axis and a moving means 51 movable in the longitudinal direction, and a rotating mechanism 14, 16 for rotating the vacuum container 2 relative to the frame 10. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a structure of a long low energy electron beam irradiation device used for printing ink drying treatment, resin surface modification treatment, building material surface processing treatment, food container surface sterilization treatment, etc. It is related with the maintenance mechanism of the exit window for releasing the electron beam produced | generated by (1) in air | atmosphere.

  The low energy electron beam irradiation device is a device that irradiates a substance in the atmosphere with a low energy electron beam accelerated to 80 keV to 300 keV in a vacuum through an emission window. When an electron beam is irradiated onto the surface of a substance, as a substance to be irradiated, a polymer material causes a polymerization reaction or a crosslinking reaction, and a cell or the like causes cell activation (destruction). Utilizing this, the low energy electron beam irradiation device is used for printing ink drying and curing, resin surface modification, building material surface processing, food container surface sterilization, and the like.

  The outline of the configuration of a conventional low energy electron beam irradiation apparatus will be described with reference to FIG. 13. FIG. 13 is a basic configuration diagram showing the structure of a conventionally used low energy electron beam irradiation apparatus 100, and FIG. FIG. 6 is an enlarged view of the arrow GG and shows the structure of the exit window 102. A low energy electron beam irradiation apparatus 100 shown in FIG. 13 has an electron beam generator 101, a vacuum vessel 103 for holding the electron beam generator 101 in a vacuum, and an atmosphere in the vacuum vessel 103. A vacuum pumping device 104, a power supply tank 105 connected to a vacuum vessel 103 via an insulating tank 106 for accelerating the generated electron beam, and an emission for emitting the accelerated electron beam 107 into the atmosphere. The window 102 is configured. Note that the principle of electron beam generation is omitted. The object to be processed 108 is disposed below the emission window 102 and is configured such that the surface is irradiated with an electron beam emitted from the emission window 102.

  Referring to FIG. 14, the exit window 102 is disposed on the lower surface or side surface of the vacuum vessel 103, and is a thin film made of Ti or a material having an equivalent function that transmits the electron beam 107 and functions as a vacuum partition. 109, a crosspiece 110 in which the thin film 109 is disposed so as not to be damaged by the differential pressure between the internal pressure and the atmospheric pressure, and cooling for removing the heat generated by the irradiation of the electron beam 107 The apparatus 111 is comprised, and these are unitized.

In this way, with respect to the unitized exit window, a slide guide for guiding the exit window is attached along a direction perpendicular to the longitudinal direction of the conveyance path of the irradiated object, and a stopper is provided at a predetermined position in the back of the slide guide. Slide the window frame of the exit window along the slide guide, push it in until the tip of the window frame comes into contact with the stopper, press the clamp plate from below with the pressure bar, and attach and detach the exit window to the lower surface of the vacuum vessel Some are freely attached (see, for example, Patent Document 1).
In addition, the exit chamber provided with the exit window is divided into a fixed side and a movable side, and the movable part side is moved up and down by an elevating mechanism so that the exit window thin film can be easily replaced. (For example, refer to Patent Document 2).
In addition, there is a type in which a part below the scanning tube and a part of the exit window including the thin film are integrated as an exit window unit so that the exit window unit can be detached and attached from the other part of the scan tube and the housing (for example, , See Patent Document 3).

Japanese Patent Laid-Open No. 5-87793 (Summary) JP-A-8-62397 (Summary) JP 11-38196 A (summary)

  Conventionally, in the low energy electron beam irradiation apparatus described above, the irradiation width is long, and apparatuses of 1 m to 1.5 m have been mainstream. However, in recent years, the object to be processed has become larger and the irradiation width is longer. Scaling (2m or more) is required. Further, since a low energy electron beam is used, heating of the exit window becomes a problem, and it is necessary to incorporate a cooling mechanism. Therefore, the emission window, the electron beam generator, the vacuum vessel, and the like are increased in weight and there are problems that it is difficult to secure a work area at the time of replacement and inspection of maintenance parts, and in terms of workability. In particular, since the exit window is disposed on the lower surface or side surface of the vacuum vessel as described above, for example, without removing the exit window together with the unit, the cooling device attached to the exit window can be removed, the Ti thin film can be replaced, etc. When work cannot be performed, or when it is necessary to remove and install the exit window as a unit, it is often difficult to perform maintenance work, such as it is difficult to perform maintenance work using a crane or other transport equipment. .

  Accordingly, the present invention has been made to solve the above-described problems of the prior art, and includes an exit window maintenance mechanism for facilitating maintenance and inspection of the exit window with respect to an increase in irradiation width. The main purpose is to provide a long low energy electron beam irradiation apparatus.

  In order to achieve the above-mentioned object, the long low energy electron beam irradiation apparatus according to the present invention has an electron beam generator inside and an emission window for irradiating the electron beam generated by the electron beam generator on one side. A movable container having a vacuum container, a holding mechanism that rotatably holds the vacuum container about an axis, and a moving means that can move in a longitudinal direction, and a rotation that rotates the vacuum container relative to the frame And a mechanism.

  According to the present invention, by supporting the vacuum container via the holding mechanism so that the vacuum container can be rotated about the axis, the emission window disposed on the lower surface or the side surface of the vacuum container can be attached to the vacuum container. It can be moved to a position (for example, the upper side) where maintenance work is easy in the attached state, and the removal of the cooling device and the replacement of the Ti thin film are facilitated.

  Next, preferred embodiments of the present invention will be described with reference to the accompanying drawings. In the drawings, the same reference numerals denote the same or corresponding parts.

  FIG. 1 is a basic configuration diagram of a long low-energy electron beam irradiation apparatus 1 according to the present invention and a perspective view when a vacuum vessel is moved. FIG. 2 is a cross-sectional view taken along the line A-A shown in FIG. It is BB sectional drawing shown in 1. FIG. A long low energy electron beam irradiation apparatus 1 includes a vacuum container 2 for storing an electron beam generation unit (not shown) therein and maintaining the electron beam generation unit in a vacuum, and an atmosphere in the vacuum container 2 A vacuum evacuation device 3 for evacuating, a power supply tank 4 connected to the vacuum vessel 2 via an insulating tank 5 for accelerating the generated electron beam, and releasing the accelerated electron beam into the atmosphere It is comprised from the output window 6 for making it do. Note that the principle of electron beam generation is omitted. The workpiece 8 is arranged below the exit window 6 and is configured such that the surface is irradiated with an electron beam emitted from the exit window 6. A predetermined process, for example, a drying and curing process for printing ink, Resin surface modification treatment, building material surface treatment, food container surface sterilization treatment, etc.

  The vacuum container 2 is divided into a cylindrical vacuum container main body 20 that accommodates an electron beam generator inside and a vacuum exhaust container 21 connected to the vacuum exhaust device 3. A flange 22 having a large-diameter portion 22a having an outer diameter larger than the outer diameter of the flange 24 of the vacuum exhaust container 21 is joined to the vacuum exhaust container 21 side of the vacuum container main body 20, and vacuum is provided via both flanges. The container main body 20 and the vacuum exhaust container 21 are combined. As shown in FIG. 13, in the conventional structure, since the vacuum exhaust device 104 is connected to the vacuum container 103, the vacuum container 103 and the insulating tank 106 (there may be no insulating tank provided) and the vacuum container 103 and the vacuum Each of the exhaust devices 104 is separated and maintenance work is performed on the contents of the vacuum container. However, according to the present invention, the vacuum container 2 is divided into the vacuum container main body 20 and the vacuum exhaust container 21 so that the vacuum container In addition, it is possible to make one separation point necessary for maintenance work of the vacuum container internal structure. On the other hand, on the maintenance door 9 side of the vacuum vessel main body 20, a flange 23 including a large diameter portion 23 a having an outer diameter larger than the outer diameter of the vacuum vessel main body 21 is joined. Casters 17 to be described later are in contact with the large diameter portions 22a and 23a of the flanges 22 and 23, respectively. The exit window 2 is detachably attached to the lower surface of the vacuum vessel body 20 by a known method.

  The long low energy electron beam irradiation apparatus 1 according to the present invention further includes a gantry 10. The gantry 10 has a structure having a length in the longitudinal direction so that both ends of the vacuum vessel body 20 in the axial direction can be supported from below, and a linear guide 51 is attached to the lower end of the foot 11. It is configured to be able to move on the linear rail 50 laid on the base. Therefore, the linear guide 51 and the linear rail 50 constitute a moving means. The moving means is not limited to this, and any means may be used such as a rail and wheels, a self-propelled carriage equipped with driving wheels, and traction as long as the gantry 10 can move on the base. A square-shaped rectangular frame 12 is formed on the upper side of the gantry 10, that is, on the upper side of the foot portion 11, and casters 13 are attached to four corners inside the rectangular frame 12. The vacuum vessel main body 20 of the vacuum vessel 2 is rotatably held by the gantry 10 via 13. These casters 13 constitute a holding mechanism. The holding mechanism is not limited to this, and any structure such as a roller, a bearing, or a gear may be used as long as the structure can hold the vacuum vessel main body 20 relative to the gantry 10.

  A motor 14 is fixed outside the rectangular frame 12 on the one side, in this embodiment, outside the rectangular frame 12 on the maintenance door 9 side. A pulley 15 is attached to the vacuum vessel main body 20 so that the vacuum vessel main body 20 can be rotated via a belt 16. The motor 14, the pulley 15, and the belt 16 constitute a rotation mechanism. The rotation mechanism is not limited to this, and any configuration can be adopted, for example, a gear can be fitted to the outside of the vacuum vessel body 20 as long as the power of the motor 14 can be transmitted to rotate the vacuum vessel body 20. Also good. Although not shown, it goes without saying that one detection and control of the rotation angle can be performed using a detector such as an encoder.

  A caster 17 is attached above the gantry 10, for example, at the upper end of the rectangular frame 12, in a direction protruding outward from each of the pair of opposed rectangular frames 12. This caster is in contact with the large-diameter portions 22a and 23a of the flanges 22 and 23 of the vacuum vessel body 20, and is a caster having flanges 22 and flanges 23 provided at both ends of the vacuum vessel body 20 on the gantry 10. 17 has a structure for positioning. Accordingly, the flanges 22 and 23 of the vacuum vessel main body 20 and the casters 17 attached to the gantry constitute positioning means. With this positioning means, even when the gantry 10 is moved by the moving means, the axial displacement of the vacuum vessel main body 20 does not occur. Also, when the vacuum vessel main body 20 is rotated by the rotation mechanism, the caster 17 serves as a guide, and the rotation stability is improved. The positioning means can prevent relative movement in the longitudinal direction between the vacuum vessel main body 20 and the gantry 10 and can allow rotational movement around the axis center of the vacuum vessel main body 20 with respect to the gantry 10. Any structure may be used. For example, a groove is cut in the outer diameter of the vacuum vessel main body 20, and an engagement pin that engages with the groove is attached to the gantry 10, thereby preventing axial movement and allowing rotational movement. it can.

  The maintenance and inspection work of the long low energy electron beam irradiation apparatus 1 having the above-described configuration will be briefly described. First, the vacuum vessel 2 is connected to the evacuation vessel 21 and the vacuum vessel main body 20 at the connecting portions (flanges 22 and 24). The gantry 10 is moved in the axial direction (longitudinal direction) along the linear rail 50 to the dotted line portion in FIG. At this time, the vacuum vessel main body 20 held by the gantry 10 is positioned with respect to the gantry 10 by the casters 17 attached to the gantry 10, so that no positional deviation occurs in the axial direction. Thereafter, by driving the motor 14 of the rotation mechanism, the vacuum vessel body 20 that is rotatably held by the caster 12 is rotated about the axis via the belt 16 and the pulley 15, and the lower surface of the vacuum vessel body 20, Alternatively, the exit window 6 disposed on the side surface is moved to a position where it can be easily maintained and inspected. After the maintenance inspection is completed, the procedure is reversed, and the vacuum container body 20 is first rotated so that the exit window 6 faces the lower surface, and then the gantry 10 is moved in the axial direction to The operation is completed by aligning the flanges of the main body 20 and the vacuum exhaust vessel 21 and assembling both flanges.

As described above, since the low-energy electron beam irradiation apparatus elongated according to the present invention is configured as described above, the following operations and effects are achieved.
(1) By supporting the vacuum vessel main body 20 of the vacuum vessel 2 of the long low energy electron beam irradiation apparatus 1 by the caster 13 installed on the movable mount 10 and providing the rotation mechanism (14, 15, 16). For example, the vacuum vessel body 20 of the vacuum vessel 2 is rotated so that the emission window 6 is arranged on the upper side, and the cooling device attached to the emission window is removed and the Ti thin film is removed without removing the electron beam emission window 6 together with the unit. Can be easily performed. In addition, when the exit window 6 needs to be attached and detached as a unit, maintenance work using a transport device such as a crane can be easily performed.
(2) By attaching a motor 14 to the gantry 10 and a pulley 15 to the vacuum vessel body 20 of the vacuum vessel 2 and providing a mechanism for transmitting power via the belt 16, rotation of the vacuum vessel body 20 and arbitrary rotation Holding at an angle is possible.
(3) The portion where the vacuum evacuation device 3 is disposed is a vacuum evacuation vessel 21 and has a separate structure from the vacuum vessel main body 20 of the vacuum vessel 2, so that the emission window 6 and the vacuum vessel internal structure (electron beam generation unit) In the maintenance of the above, the above-described emission window, electron beam generating portion, etc. can be obtained simply by separating the connection flanges 22 and 24 between the vacuum exhaust vessel 6 and the vacuum vessel main body 20 without removing and moving the vacuum exhaust device 3. Maintenance work becomes possible.
(4) By providing positioning means for positioning the flanges 22 and 23 attached to both ends of the vacuum vessel main body 20 of the vacuum vessel 2 with the casters 17 provided on the gantry 10, the vacuum vessel by moving the gantry during maintenance work is provided. It was possible to prevent the positional deviation between the vacuum vessel main body and the gantry.

  The second embodiment shows another rotating mechanism for rotating the vacuum container main body 20 of the vacuum container 2 with respect to the gantry 10, and is an example in which a caster 13 that supports the vacuum container main body 20 is used as a drive transmission device. 4 is an external view showing another rotating mechanism for rotating the vacuum vessel main body 20 of the vacuum vessel 2, FIG. 5 is an enlarged view of a portion J in FIG. 4, and FIG. 6 is an arrow in FIG. It is view CC sectional drawing.

  In the second embodiment, one or two of the lower casters 13 disposed at the inner four corners of the rectangular frame 12 in the first embodiment are used as the rollers 19, and the driving force of the motor 9 is transmitted via the gear 18 and the chain 25. It is set as the structure to transmit. With such a configuration, when the motor 9 is driven, the vacuum vessel main body 20 rotates. In this embodiment, the chain 25 is used for transmitting the driving force. However, the present invention is not limited to this, and the gear may be meshed directly, or the roller 19 itself is driven by a motor. Also good. As described above, in the second embodiment, the caster 13 disposed on the gantry 10 and receiving the load of the vacuum container 2 is used as a driving force transmitter, so that the vacuum container main body 20 of the vacuum container 2 as in the first embodiment. The vacuum vessel main body 20 of the vacuum vessel 2 can be rotated without requiring a process of attaching the pulley 15 to the vacuum vessel 2. In other words, the holding mechanism that rotatably holds the vacuum vessel body 20 is also provided with a rotation mechanism that transmits a rotational driving force to the vacuum vessel body 20.

  In the third embodiment, the vacuum vessel body 20 of the vacuum vessel 2 is directly fixed to the gantry 30 during normal operation. However, during maintenance work, the vacuum vessel is separated from the gantry 30 and a maintenance vacuum vessel holding / rotating jig is attached. The present invention relates to a structure capable of holding and rotating the vacuum vessel main body of the vacuum vessel. Here, FIG. 7 is an external view showing another embodiment of the holding mechanism and the rotation mechanism, FIG. 8 is an enlarged view of the DD arrow view of FIG. 7, and FIG. 9 is an EE view of FIG. It is an enlarged view of an arrow figure.

  A pair of support pillars 32 that can directly support the vacuum vessel body 20 of the vacuum vessel 2 during normal operation are attached to the gantry 30 of the third embodiment one pair above the legs 31 that are spaced apart in the longitudinal direction. The support pillar 32 is composed of a base portion 32a and a receiving portion 32b. The support jig 33 is configured to be detachably attached to the gantry 30 via the support base 34 and includes a jack mechanism (not shown). A bearing plate 33a is attached to the upper end of the support jig 33 so as to rotatably hold a rotation shaft of a flange described later. A geared motor 38 that can mesh with a gear 37 attached to the shaft of the flange held by the support jig 33 is attached to the support base 34 on the maintenance door side (the right side in FIG. 7).

  As shown in FIG. 7, the flange 22 on the side of the vacuum exhaust container 21 of the vacuum container main body 20 has a rotation shaft 35 a that can be attached after the connection portion between the vacuum container main body 20 and the vacuum exhaust container 21 is disconnected. A flange 35 is attached. On the other hand, a flange 36 having a rotating shaft 36a that can be attached after the maintenance door is removed is also attached to the maintenance door side.

  According to the above configuration, at the time of maintenance work, first, after disconnecting the connecting portion between the vacuum vessel body 20 and the vacuum exhaust vessel 21, the flange 35 is attached to the flange 22, and the maintenance door is removed to remove the flange. 36 is attached. Then, the support jig 33 having a jack mechanism for supporting the flange 35 and the flange 36 is attached to the gantry 30 via the support base 34. At this time, the gear 37 is attached to the shaft 36 a of the flange 36. Then, the vacuum vessel body 20 is lifted by the jack mechanism of the support jig 33 to separate the vacuum vessel body 20 from the support column 32, and the gear 37 attached to the shaft 36a of the flange 36 is driven by the motor 38 to rotate the vacuum vessel body 20. Let According to the third embodiment having such a configuration, even in a case where a space for installing the rotary structure of the vacuum vessel cannot be secured in the normal operation state, the flange having the shaft for rotation, and those By attaching a support jig for supporting the vacuum vessel to the vacuum vessel or the like at the time of maintenance, the vacuum vessel can be rotated, and the same effect as in the first embodiment can be obtained.

  According to the third embodiment, the flanges 35 and 36 having the rotary shafts 35a and 36a attached to the flange surfaces at both ends of the vacuum vessel 20 and the jack mechanism that supports the shafts 35a and 36a and is attached to the gantry 30 are provided. Since the vacuum jig can be rotatably held around the axis by the support jig 33, the flange 35 and 36 and the support jig 33 constitute a holding mechanism. Further, since the vacuum vessel can be rotated with respect to the gantry 30 by the gear 37 and the motor 38 attached to the shaft 36a, the gear 37 and the motor 38 constitute a rotation mechanism. As described above, the holding mechanism is formed separately from the gantry, and the rotation mechanism is formed separately from the gantry and the vacuum container, and is attached to the gantry and the vacuum container during maintenance work. .

  The shaft holding structure of the bearing plate 33a is configured such that the shaft 35a is inserted into a hole drilled in the bearing plate 33a. Can be configured to be held from below. In this case, the gear 37 on the maintenance door side can be attached to the shaft 36a of the flange 36 from the beginning. In addition, a jack mechanism is incorporated in the support column 32 and the vacuum vessel body 20 is held by the support jig 33, and then the support column is lowered to separate the vacuum vessel body 20 and the gantry 30 and rotate the vacuum vessel body 20. It can also be made to do.

  In the fourth embodiment, the alignment of the vacuum vessel main body 20 and the gantry 40 and the support during rotation of the vacuum vessel main body 20 are performed by using a large-diameter portion 22a of the enlarged flange 22 on the vacuum exhaust vessel 21 side as a pair of casters. 44 is configured to be performed by being sandwiched by 44. From another viewpoint, another example of the positioning means constituted by the caster 17 attached to the gantry 10 in Example 1 and the flanges 22 and 23 with which the caster abuts is shown. Here, FIG. 10 is an external view of a structure in which alignment and support of the vacuum vessel is performed by sandwiching a large flange on the vacuum vessel side with casters, FIG. 11 is an enlarged view of a portion K in FIG. 10, and FIG. It is an enlarged view of the F-F arrow figure of FIG.

  The basic structure of the gantry 40 of the fourth embodiment is substantially the same as that of the gantry 10 of the first embodiment, but the rectangular frame 42 attached to the upper side of the foot 41 is a connection portion with the vacuum exhaust container 21. It is formed only on the foot 41 that supports the flange 22 side. On the lower side of the vacuum vessel body 20 of the foot portion 41, a caster base 43 protrudes outward in the horizontal direction, and a pair of the large diameter portion 22a of the flange 22 is sandwiched above the caster base 43. The caster 44 is provided.

As described above, by sandwiching the large-diameter portion 22a of the flange 22 between the pair of casters 44, alignment of the vacuum vessel body 20 of the vacuum vessel 2 and support during rotation of the vacuum vessel body 20 are easy. Even when the gantry 40 is moved by the moving means, the axial displacement of the vacuum vessel body 20 does not occur. By adopting such simple positioning means, the structure of the gantry 40 of the vacuum vessel 2 can be greatly simplified. That is, in the fourth embodiment, since the positioning means is configured by sandwiching the flange 22 on one side between the pair of casters 44, the large-diameter flange 23 on the maintenance door side in the first embodiment and the large-diameter flange 23 side The rectangular frame 12 and the like for supporting can also be omitted. The positioning means can be arranged on the maintenance door side, but if it is arranged on the vacuum exhaust container side as in Example 4, it is not necessary to provide a flange on the maintenance door side. It is only necessary to attach a disk-shaped maintenance door 45 that matches the outer diameter of the cylindrical vacuum vessel main body 20, and the structure can be further simplified.
Thus, the positioning means increases the diameter of the flange on at least one side of the vacuum vessel larger than the outer diameter of the flange connected to the flange, and the caster attached to the gantry to the surplus portion (large diameter portion). In particular, the fourth embodiment has a structure in which the surplus portion of the flange is sandwiched between a pair of casters.

It is a figure which shows the basic composition of the long low energy electron beam irradiation apparatus by this invention. It is AA sectional drawing shown in FIG. It is BB sectional drawing shown in FIG. It is an external view which shows another rotation mechanism which rotates the vacuum vessel main body of a vacuum vessel. It is an enlarged view of the J section of FIG. FIG. 5 is a cross-sectional view taken along the line CC in FIG. 4. It is an external view which shows another Example of a holding mechanism and a rotation mechanism. It is an enlarged view of the DD arrow figure of FIG. It is an enlarged view of the EE arrow figure of FIG. It is an external view which shows another Example of a positioning device. It is an enlarged view of the K section of FIG. It is an enlarged view of the F-F arrow figure of FIG. It is a basic block diagram which shows the structure of the low energy electron beam irradiation apparatus used conventionally. It is an enlarged view of arrow GG of FIG. 13, and is a figure which shows the structure of an emission window.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Long low energy electron beam irradiation apparatus 2 Vacuum container 3 Vacuum exhaust apparatus 4 Power supply tank 5 Insulation tank 6 Outgoing window 8 To-be-processed object 10 Mount 11 Foot 12 Rectangular frame 13 Caster 14 Motor 15 Pulley 16 Belt 17 Caster 18 Gear 19 Roller 20 Vacuum vessel body 21 Vacuum exhaust vessel 22, 23 Flange 22a, 23a Large diameter portion 24 Flange 25 Chain 30 Mounting base 31 Foot portion 32 Support pillar 33 Support jig 33a Bearing portion 34 Support stand 35, 36 Flange 35a, 36a Shaft 37 Gear 38 Motor 40 Base 41 Foot 42 Rectangular frame 43 Caster base 44 Caster

Claims (7)

A vacuum vessel having an exit window for irradiating the electron beam generated by the electron beam generator on one side, containing the electron beam generator inside,
A holding mechanism that rotatably holds the vacuum vessel about its axis, and a movable gantry having moving means that can move in the longitudinal direction;
A long low energy electron beam irradiation apparatus comprising: a rotation mechanism that rotates the vacuum vessel relative to the gantry.   The vacuum container is constituted by a separate body of a vacuum exhaust container connected to a vacuum exhaust apparatus and a vacuum container main body having the exit window, and the vacuum container main body is held by the gantry. The long low energy electron beam irradiation apparatus described in 1.   The long holding | maintenance low energy electron beam irradiation apparatus of Claim 1 which has the rotation mechanism in which the said holding mechanism transmits a rotational drive force to the said vacuum vessel. The holding mechanism is formed separately from the gantry,
The rotating mechanism is formed separately from the gantry and the vacuum vessel,
The long low energy electron beam irradiation apparatus according to any one of claims 1 to 3, wherein the holding mechanism and the rotation mechanism are attached to the gantry and the vacuum vessel during maintenance work. The holding mechanism includes a pair of flanges having a rotation shaft attached to both ends of the vacuum vessel, and a support jig having a jack mechanism that supports the rotation shaft and is attached to the gantry.
The rotating mechanism includes a driving force transmitting means attached to a rotating shaft of one of the pair of flanges, and a driving source attached to a gantry,
The long low energy electron beam irradiation apparatus according to claim 4, wherein the jack mechanism is operated to lift the vacuum container from the mount so that the vacuum container can be rotated to an arbitrary position.   The positioning device according to claim 1, further comprising positioning means that allows rotational movement about the axis of the vacuum vessel relative to the gantry and prevents relative movement in the axial direction between the vacuum vessel and the gantry. The long low energy electron beam irradiation apparatus of any one of Claims.   The positioning means is configured to make a flange on at least one side of the vacuum vessel larger than an outer diameter of a flange connected to the flange, and a caster attached to the gantry is brought into contact with an excess portion thereof. The long low energy electron beam irradiation apparatus according to claim 6.

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