JP2005058945A - Set tool for cleaning device, device for cleaning functional liquid ejection head, liquid ejection device, method for manufacturing electro-optic device, electro-optic device, and electronic apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a set tool for a cleaning device, capable of appropriately positioning a plural number of types of head units for a cleaning device, the cleaning device for a functional liquid ejection head, the liquid ejection device, a method for manufacturing an electro-optic device, the electro-optic device, and an electronic apparatus. <P>SOLUTION: The set tool is used for the device for cleaning the functional liquid ejection head, which is provided with a head set part for setting a 1st head unit and in which a 2nd head unit is set so that it can be cleaned instead of the 1st head unit. The set tool is characterized in that it has a direct set part in the same form as that of a 1st head plate and an indirect set part for indirectly positioning and setting the 2nd head unit to a cap unit so that each functional liquid ejection head of the 2nd head unit is closely attached to the cap unit. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a cleaning device setting jig for setting a head unit in a cleaning device for a functional droplet discharge head, a cleaning device for a functional droplet discharge head, a droplet discharge device, a method for manufacturing an electro-optical device, The present invention relates to an optical device and an electronic device.

  The liquid droplet ejection apparatus includes a head unit in which a plurality of functional liquid droplet ejection heads are mounted on a carriage plate in accordance with a predetermined arrangement pattern, and the functional liquid droplet ejection head while scanning the head unit relative to the workpiece. Is selectively driven to draw a predetermined pattern on the workpiece. The functional liquid droplet ejection head mounted on the liquid droplet ejection apparatus has a functional liquid introduction section that introduces a functional liquid and a head body that has a large number of ejection nozzles and ejects the introduced functional liquid in a dot shape. doing. Since the discharge nozzle is very small, there is a possibility that the discharge nozzle is clogged with the introduced functional liquid as time passes. In addition, the functional liquid droplet ejection head is stored by filling the head with a storage liquid. However, as time elapses, impurities in the storage liquid precipitate and cause clogging.

  Therefore, in order to prevent clogging of the functional droplet discharge head, a cleaning device for the functional droplet discharge head has been considered. This cleaning device includes a plurality of inlet connection attachments (introduction portion connection joints) connected to each functional liquid introduction portion, and the same number of caps as the functional droplet discharge heads mounted on the head unit. A nozzle connection attachment (cap unit) arranged in the same pattern as the arrangement pattern, and a cleaning liquid passing means for passing the cleaning liquid into the flow path in the head via a plurality of inlet connection attachments and nozzle connection attachments. In addition, the cleaning liquid is allowed to flow in a state where each functional liquid droplet ejection head is in close contact with each cap.

The cleaning device includes an attachment support member that positions and supports the nozzle connection attachment, and a carriage support member that is positioned in advance with respect to the nozzle connection attachment and that positions and supports the head unit via the carriage plate. . When the head unit is supported by the carriage support member, the respective functional liquid droplet ejection heads are aligned with the respective caps, and the respective caps are brought into close contact with the nozzle surfaces of the respective functional liquid droplet ejection heads.
JP 2003-182095 A

  By the way, it is assumed that a variety of functional liquids are introduced according to the purpose in a droplet discharge apparatus for industrial application. The droplet discharge apparatus has the same arrangement pattern and a different number of functional droplets. A plurality of types of head units in which the discharge head is mounted on carriage plates of different sizes can be mounted. However, in the cleaning apparatus as described above, since the head unit is positioned via the carriage plate on the assumption that one type of head unit is set on the carriage support member, a plurality of carriage plates having different sizes are used. It becomes difficult to properly position the type of head unit with respect to the nozzle connection attachment.

  In view of the above problems, the present invention provides a cleaning device setting jig capable of appropriately positioning a plurality of types of head units with respect to a functional droplet discharge head cleaning device configured to be capable of setting a predetermined head unit. It is an object of the present invention to provide a functional droplet discharge head cleaning device, a droplet discharge device, an electro-optical device manufacturing method, an electro-optical device, and an electronic apparatus.

  The present invention relates to a head set unit for setting a first head unit having a plurality of functional liquid droplet ejection heads mounted on a first head plate in a predetermined arrangement pattern via the first head plate, and the set first head. A joint unit having a plurality of introduction part connection joints connected to each functional liquid introduction part of a plurality of functional liquid droplet ejection heads of the unit, and a plurality of functional liquids of the first head unit arranged and set in an arrangement pattern A cleaning unit that has a plurality of caps that are in close contact with the nozzle surface of the droplet discharge head, and a cleaning liquid flow that passes the cleaning liquid through the joint unit and the cap unit to the flow path in the head from the functional liquid introduction unit to the discharge nozzle And a first head unit instead of the first head unit. In the setting jig of the cleaning apparatus for setting the second head unit having the same pattern and a smaller number of functional liquid droplet ejection heads mounted on the second head plate than the first head unit so that it can be cleaned, The second head unit is indirectly positioned and set with respect to the cap unit so that the direct setting portion having the same form as the first head plate and each functional liquid droplet ejection head of the second head unit are in close contact with the cap. And an indirect set portion.

  According to this configuration, the second head unit can be positioned on the cap unit simply by fixing the direct setting portion having the same mounting form as the first head unit to the head setting portion, and is mounted on the second head unit. The all-function liquid droplet ejection head thus made can be brought into close contact with the cap. That is, by using the setting jig, the second head unit can be easily and surely set on the cleaning device so that it can be cleaned.

  The present invention relates to a cleaning apparatus for a functional liquid droplet ejection head for cleaning a flow path in a head by passing a cleaning liquid through a flow path in the head from a functional liquid introduction part of the functional liquid droplet ejection head to an ejection nozzle. Connected to the head set unit for setting the first head unit having the functional liquid droplet ejection heads mounted on the first head plate in a predetermined arrangement pattern, and to each functional liquid introducing unit of the first head unit set in the head set unit A plurality of arrangement units arranged on the cap plate in close contact with the nozzle surface of each functional liquid droplet ejection head of the first head unit set in the head set unit. A cap unit having a plurality of caps and a joint unit and a cap unit to the functional droplet discharge head. A cleaning liquid flow-through means for passing liquid a cleaning liquid to the de flow passage, characterized by comprising a setting jig described above, and control means for controlling the cleaning liquid liquid passing means.

  According to this configuration, since the above setting jig is provided, the second head unit can be easily and surely set on the head setting portion via the setting jig. For this reason, the functional liquid droplet ejection head mounted on the second head unit can be efficiently and easily cleaned.

  In this case, the cleaning liquid passing means includes a cleaning liquid tank that supplies the cleaning liquid to be passed, a cleaning liquid recovery unit that recovers the cleaning liquid that has passed through the flow path in the head, and the cleaning liquid from the cleaning liquid tank through the joint unit and the cap unit. It is preferable to have a cleaning liquid channel leading to the cleaning liquid recovery unit and a pump interposed in the cleaning liquid channel.

  According to this configuration, the flow path in the head of the functional liquid droplet ejection head mounted on the first head unit or the second head unit set in the head set unit via the cleaning liquid flow path by driving the pump. The cleaning liquid can be passed through the filter. A pump may be provided on the upstream side of the joint unit, and the cleaning liquid may be passed through the flow path in the head by pumping. Alternatively, the pump may be provided on the downstream side of the joint unit, and the cleaning liquid may be provided in the flow path in the head by the suction action of the pump. You may make it let liquid flow.

  In this case, it is preferable that the pump is interposed downstream of the cap unit. According to this configuration, the cleaning liquid can be passed through the flow path in the head by sucking the functional liquid droplet ejection head through the cap.

In this case, it is preferable that the cleaning liquid tank also serves as a cleaning liquid recovery unit. According to this configuration, since the cleaning liquid that has been passed through the in-head flow path is returned to the cleaning liquid tank, the cleaning liquid can be efficiently used by circulating the cleaning liquid.

  In this case, the upstream side of the cleaning liquid flow path connected to the joint unit branches from the cleaning liquid common supply flow path connected to the cleaning liquid tank, and the number of joint joint introduction joints from the cleaning liquid common supply flow path, A plurality of cleaning liquid individual supply passages connected to each inlet joint, and the cleaning liquid flow means includes a plurality of supply flow path opening / closing valves that open and close each cleaning liquid individual supply flow path, and a plurality of cleaning liquids. A liquid flow path selecting means for selecting and setting a cleaning liquid individual supply flow path for allowing the cleaning liquid to flow from the individual supply flow path, and the liquid flow path selecting means is provided on the functional liquid droplet ejection head that is in close contact with the cap. It is preferable that the cleaning liquid individual supply flow path to be connected is selected and set, and the control means opens only the supply flow path opening / closing valve of the cleaning liquid individual supply flow path selected and set by the liquid flow path selection means.

  According to this configuration, only the cleaning liquid individual supply channel connected to the functional liquid droplet ejection head with which the cap is in close contact is opened. That is, the cleaning liquid can be appropriately passed through the cleaning liquid channel without passing the cleaning liquid through the cleaning liquid individual supply channel that is not connected to the functional liquid droplet ejection head.

  In this case, the cleaning liquid passing means further includes a head selecting means for selecting and setting a functional liquid droplet discharging head that passes the cleaning liquid from a plurality of functional liquid droplet discharging heads that are in close contact with the cap, and the control means is a head selecting means. It is preferable to open only the supply flow path opening / closing valve of the cleaning liquid individual supply flow path connected to the selected functional liquid droplet ejection head.

  According to this configuration, only the cleaning liquid individual supply channel connected to the selected functional droplet discharge head is opened, so that the cleaning liquid can be supplied only to the selected functional droplet discharge head.

  In this case, the downstream side of the cleaning liquid flow path is a cleaning liquid that joins the plurality of cleaning liquid individual recovery flow paths connected to each cap of the cap unit and the plurality of cleaning liquid individual recovery flow paths into one, and connects to the cleaning liquid recovery section. The cleaning liquid flow means is connected to the cleaning liquid common supply flow path and the cleaning liquid supply recovery flow path and to the control means, and is interposed in the bypass flow path. And a bypass opening / closing valve. The control means preferably opens the bypass opening / closing valve when the number of opened liquid passage opening / closing valves is equal to or less than a predetermined number.

  According to this configuration, when the number of functional liquid droplet ejection heads to be cleaned is smaller than a predetermined number, the bypass opening / closing valve is opened and the cleaning liquid can be passed through the bypass flow path. For this reason, even if the number of functional droplet discharge heads to be cleaned is small, it is possible to ensure a sufficient flow rate of the cleaning liquid and to prevent the pump from being overloaded.

  In this case, the bypass channel is preferably provided with a throttle valve connected to the control means and capable of adjusting the flow rate of the cleaning liquid flowing through the bypass channel.

  According to this configuration, the flow rate per unit time of the cleaning liquid flowing through the bypass channel can be adjusted by the throttle valve. Therefore, the flow rate of the cleaning liquid when the number of functional liquid droplet ejection heads to be cleaned is large and when the number of functional liquid droplet ejection heads to be cleaned is small can be made substantially constant. Can be reduced.

  The present invention relates to a functional liquid droplet ejection apparatus for ejecting a functional liquid onto a workpiece while moving a head unit mounted with a functional liquid droplet ejection head that ejects the functional liquid relative to the workpiece. The head is set and cleaned in the functional droplet discharge head cleaning device described above via a head unit.

  According to this configuration, the functional liquid droplet ejection head can be set and cleaned in the cleaning apparatus via the head unit. Therefore, even when the functional liquid droplet ejection heads are arranged in the same pattern and have a plurality of types of head units having different numbers of functional liquid droplet ejection heads, the head unit (functional liquid droplet ejection head) can be easily and quickly performed. Therefore, the time required for setting the head unit can be shortened, and the functional liquid droplet ejection head can be efficiently cleaned.

  The electro-optical device manufacturing method of the present invention is characterized by using the above-described droplet discharge device to form a film-forming portion using functional droplets discharged from a functional droplet discharge head on a workpiece. In addition, an electro-optical device according to the present invention is characterized in that the above-described droplet discharge device is used to form a film forming portion using functional droplets discharged from a functional droplet discharge head on a workpiece.

According to this configuration, since the head unit can be easily set on the cleaning device and the functional droplet discharge head can be cleaned, the droplet discharge device with good maintainability is used. It can be manufactured. Examples of the electro-optical device (device) include a liquid crystal display device, an organic EL (Electro-Luminescence) device, an electron emission device, a PDP (Plasma Display Panel) device, and an electrophoretic display device. The electron emission device is a so-called FED (Field
It is a concept that includes an Emission Display) and an SED (Surface-Conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to the present invention includes the above-described electro-optical device.

  In this case, the electronic apparatus corresponds to various electric products in addition to a mobile phone and a personal computer equipped with a so-called flat panel display.

  As described above, the setting jig of the present invention can be set on the head setting portion in the same manner as the first head unit, and the second head unit can be positioned on the cap unit. Therefore, a plurality of different types of head units can be easily and quickly set on the headset unit. Since the droplet discharge device of the present invention can set the second head unit to the cleaning device easily and appropriately like the first head unit by using the setting jig of the present invention, the second head unit The time required for setting can be reduced. Therefore, the time required for cleaning the functional liquid droplet ejection head can be reduced, and the functional liquid droplet ejection head can be efficiently cleaned. In addition, since the method for manufacturing an electro-optical device, the electro-optical device, and the electronic apparatus according to the present invention use the above-described droplet discharge device, it is possible to manufacture them efficiently.

  A functional droplet discharge head cleaning apparatus to which the present invention is applied will be described below with reference to the accompanying drawings. Since the cleaning apparatus of this embodiment is for cleaning the functional liquid droplet ejection head mounted on the liquid droplet ejection apparatus via the head unit, here, the liquid droplet ejection apparatus is first described, and then the functional liquid droplet A discharge head cleaning apparatus will be described.

  The droplet discharge device is incorporated into a so-called flat display production line, and is a light emitting element that becomes each pixel of a color filter of a liquid crystal display device or an organic EL device by a droplet discharge method using a functional droplet discharge head. And so on. FIG. 1 is a schematic plan view of a droplet discharge device. As shown in the figure, the droplet discharge device A has a machine base 1 and a functional liquid droplet discharge head 31, and has a drawing means 2 widely placed on the entire area of the machine base 1, and a drawing means 2. And a head function recovery means 3 placed on the machine base 1 so as to be attached. The drawing means 2 is used to perform drawing with functional droplets on the work W, and the head function recovery means 3 The function recovery process (maintenance) of the drawing unit 2 (functional droplet discharge head 31) is appropriately performed.

  As shown in FIG. 1, the drawing means 2 includes an X / Y moving mechanism 4 comprising an X axis table 11 for moving the workpiece W in the main scan (moving in the X axis direction) and a Y axis table 12 orthogonal to the X axis table 11. The main carriage 5 is movably attached to the Y-axis table 12, and the head unit 6 is mounted on the main carriage 5 and has the functional liquid droplet ejection head 31 mounted thereon.

  The X-axis table 11 has an X-axis slider 13 driven by an X-axis motor (not shown) constituting a drive system in the X-axis direction, and a set table 16 including a suction table 14 and a θ table 15 can be moved freely on the X-axis table 13. It is configured on board. Similarly, the Y-axis table 12 has a Y-axis slider 17 for driving a Y-axis motor (not shown) constituting a drive system in the Y-axis direction, and supports the head unit 6 via a θ rotation mechanism 22. The main carriage 5 is mounted movably.

  The X-axis table 11 is disposed in parallel with the head function recovery means 3 in the X-axis direction and is directly supported on the machine base 1. On the other hand, the Y-axis table 12 is supported by left and right support columns 21 erected on the machine base 1 and extends in the Y-axis direction so as to straddle the X-axis table 11 and the head function recovery means 3 ( (See FIG. 1). In the droplet discharge device A, the area where the Y-axis table 12 and the X-axis table 11 intersect is the drawing area D where the workpiece W is drawn, and the area where the Y-axis table 12 and the head function recovery means 3 intersect is the function recovery process. The Y-axis table 12 faces the drawing area D when drawing on the work W, and the function recovery area M when performing the recovery process. It has become.

  The head unit 6 includes a head plate 32 on which the functional liquid droplet ejection head 31 is mounted via a head holding member (not shown), and a head support member 33 configured to be detachable from the main carriage 5. The main carriage 5 is attached with a θ rotation mechanism 22 that slightly rotates the head unit 6 in the θ direction. The head unit 6 is connected to the main carriage via a head plate 32 supported by the θ rotation mechanism 22. 5 is supported. The head plate 32 is provided with a joint unit 51 having a pipe joint 51. One end of the piping joint 51 is connected to a head side piping member (not shown) from the functional liquid droplet ejection head 31 (piping adapter 53), and the other end is a functional liquid supply that supplies the functional liquid to the functional liquid droplet ejection head 31. A device-side piping member (not shown) from a mechanism (not shown) is connected.

  As shown in FIG. 2, the functional liquid droplet ejection head 31 has a so-called double structure, a functional liquid introduction portion 41 having two connection needles 42, and a double head substrate that is continuous with the functional liquid introduction portion 41. 43, and a head main body 43 which is connected to the lower side of the functional liquid introduction portion 41 and has an in-head flow path filled with the functional liquid therein. Each connection needle 42 is connected to a head side piping member via a piping adapter 53, and the functional liquid droplet ejection head 31 is supplied with a functional liquid from each connection needle 42. The head main body 43 includes a cavity 45 (piezoelectric element) and a nozzle plate 46 having a nozzle surface 47. On the lower surface of the nozzle surface 47, two rows of nozzle rows composed of a large number (180) of discharge nozzles 48 are formed. In the functional liquid droplet ejection head 31, the functional liquid is ejected from the ejection nozzle 48 by the pump action of the cavity 45.

  The drawing means 2 performs the main scanning (reciprocating movement of the workpiece W) by the X-axis table 11 and the drive driving (selective discharge of functional liquid droplets) of the functional liquid droplet ejection head 31 in synchronism with the Y-axis. Drawing on the workpiece W is performed by appropriately performing sub-scanning (movement of the head unit 6 in the Y-axis direction) by the table 12.

  The head function recovery means 3 includes a moving table 61 placed on the machine base 1, and a suction unit 62 and a wiping unit 63 placed on the moving table 61. The suction unit 62 has a suction cap 64 that is in close contact with a nozzle surface 47 (described later) of the functional liquid droplet ejection head 31, and the functional liquid droplet ejection head 31 has a suction cap 64 that is in close contact with the nozzle surface 47. By forcibly sucking the functional liquid, the discharge nozzle 48 is prevented from being clogged. Note that the suction cap 64 has a function of a flushing box that receives the discharge (preliminary discharge) of functional liquid from all the discharge nozzles 48 of the functional liquid droplet discharge head 31. The wiping unit 63 is mainly used after performing the functional liquid suction, and is attached to the nozzle surface 47 of the functional liquid droplet ejection head 31 by wiping the nozzle surface 47 of the functional liquid droplet ejection head 31. The functional fluid is removed to prevent flight bends, etc. when the functional fluid is discharged.

  As the head function recovery means 3, in addition to the above units, a discharge inspection unit for inspecting the flight state of the functional liquid droplets discharged from the functional liquid droplet discharge head 31, or a discharge liquid from the functional liquid droplet discharge head 31. It is preferable to mount a weight measuring unit or the like for measuring the weight of the functional droplet. Further, although not shown in the figure, the liquid droplet ejection apparatus A includes a functional liquid supply mechanism for supplying a functional liquid to each functional liquid droplet ejection head 31, the drawing unit 2, the head function recovery unit 3, and the like. A control means (not shown) for comprehensively controlling each constituent means is incorporated.

  By the way, a plurality of types of head units 6 are prepared, and the head unit 6 can be appropriately selected according to the application. Specifically, a first head unit 71 on which twelve functional liquid droplet ejection heads 31 are mounted in a predetermined arrangement pattern, and two functional liquid droplet ejection heads 31 with the same arrangement pattern as the first head unit 71 are arranged. A mounted second head unit smaller than the first head unit 71 is prepared.

  As shown in FIG. 3, the first head unit 71 has a first head plate 72 in which twelve functional liquid droplet ejection heads 31 are divided into six halves, which are inclined at a predetermined angle θ. A pair of left and right first head support members 73 for setting the first head unit 71 on the main carriage 5 (θ rotation mechanism 22) are screwed to both sides of the first head plate 72 in the X-axis direction. Yes. In addition, the first head plate 72 is provided with a joint unit 51 corresponding to the twelve functional liquid droplet ejection heads 31 in which twelve pipe joints 51 are vertically divided into two. Handles 74 are erected at the ends of the pair of first head support members 73 so that the first head unit 71 can be carried in and out using the pair of handles 74 as a hand-held part. It has become.

  As shown in FIG. 4, the second head unit 81 has the two functional liquid droplet ejection heads 31 disposed at the same angle θ as the first head unit 71 and the two pipe joints 51 are fixed. The second head plate 82 and a head holder 83 that supports the second head plate 82 are configured. The second head plate 82 is formed smaller than the first head plate 72 in accordance with the number of functional droplet discharge heads 31 to be mounted. The head holder 83 suspends the holder main body 86 via a holder main body 86 for holding the head plate 32 and a tilt adjusting mechanism 84 for adjusting the support posture (tilting: rolling and pitching) of the second head plate 82. And a holder plate 82. Two pipe joints 51 connected to the functional liquid droplet ejection head 31 are fixed to the holder plate 82 via a joint support plate 88 bent in an L shape. A pair of left and right second head support members 87 for attaching and detaching the second head unit 81 to and from the main carriage 5 (θ rotation mechanism 22) are screwed to both sides of the holder plate 82 in the X-axis direction. The tilt adjustment mechanism 84 is not necessarily provided in the second head unit 81, and may be provided according to the actual situation in consideration of the assembly accuracy of the functional liquid droplet ejection head 31 with respect to the second head plate 82. Good.

The first head unit 71 and the second head unit 81 are detachably supported by the θ rotation mechanism 22 with the same attachment form, and the first head support member 73 and the second head support member 87 have the same form. The attachment part is formed.
That is, the first head unit 71 and the second head unit 81 are configured to be exchangeable on the lower side of the θ rotation mechanism 22.

  The number of functional liquid droplet ejection heads 31 mounted on the first head unit 71 is not limited to 12 and can be arbitrarily set. The functional liquid droplet ejection heads 31 mounted on the second head unit 81 are not limited. Can be arbitrarily set as long as it is smaller than the first head unit 71. In addition, the arrangement pattern of the functional liquid droplet ejection heads 31 in the second head unit 81 is not limited to the above-described one, but corresponds to the arrangement position of the functional liquid droplet ejection heads 31 in the first head unit 71. I just need it. Furthermore, a plurality of types of second head units 81 may be prepared according to the purpose.

  Next, the cleaning apparatus of the present invention will be described. FIG. 5 is an external perspective view of the cleaning device, and FIG. 6 is a plan view of the cleaning device. As shown in both drawings, the cleaning apparatus B includes a tank unit cabinet 101 on the left side as viewed from the front and a cleaning unit cabinet 102 on the right side. These cabinets 101 and 102 are housed in a draft chamber 103 as a unit. Yes. The tank cabinet 101 is composed of a short front housing part 111 and a tall rear housing part 112. Although details will be described later, tanks are housed in the front housing part 111, and the rear housing part 112 contains Pumps are accommodated (see FIGS. 7 and 8).

  The cleaning unit cabinet 102 has a liquid-proof pan 122 so as to be a raised bottom on an internal stand 121, and a head-set unit 123 (described later) for setting the head unit 6 on the liquid-proof pan 122. And a cap unit 161 (to be described later) on which a plurality of caps 164 are mounted. (See FIGS. 5 and 6 etc.). A slide-type opening / closing lid 113 that slides in the front-rear direction is provided on the upper surface of the cleaning unit cabinet 102. When the opening / closing lid 113 is opened, a headset unit 123 appears. In addition, a pair of left and right support stands 126 and two struts 127 and 128 are erected on the liquid-proof pan 122 so as to surround three sides of the headset unit 123.

  The cleaning device B has a cap 164 in close contact with the nozzle surface 47 of the functional liquid droplet ejection head 31 mounted on the head unit 6 set in the head set unit 123, and the pipe joint 51 and the cap 164 described above. The cleaning liquid from the cleaning liquid tank 231 is passed through the head internal flow path from the functional liquid introducing portion 41 (connecting needle 42) of the functional liquid droplet discharge head 31 to the discharge nozzle 48 to clean the internal flow path of the head. is there. Further, the cleaning apparatus B is provided with a data setting means 131 for performing various settings, and is further provided with a control means 132 so that the entire cleaning apparatus B is controlled in an integrated manner.

  As shown in FIG. 9, the head set portion 123 is disposed to be separated from the left and right, and a pair of set stands 141 for setting the head unit 6, and a pair of set guide members 151 fixed to the set stands 141. ,have. On the upper surface of each set stand 141, a head positioning convex portion 142 for positioning the head unit 6 to be set and a screw hole 143 formed so as to sandwich the head positioning convex portion 142 are formed. Each set guide member 151 fixes an L-shaped guide plate 152 to a leg portion of the set stand 141 and regulates the position (width) of the head unit 6 in the X-axis direction on the guide plate 152. An axis regulating member 153 and a Y axis regulating member 154 that regulates the position (depth) of the head unit 6 in the Y axis direction are arranged.

  The head setting unit 123 corresponds to the first head unit 71 described above, and can position and set the first head unit 71. Each first head support member 73 of the first head unit 71 has one head positioning hole 75 and a pair of through holes 76 formed before and after the head positioning hole 75. When the first head unit 71 is set in the cleaning device B, the end of the first head unit 71 (first head support member 73) in the X-axis direction and the Y-axis direction is placed on the X-axis regulating member 153 and the Y-axis regulating member 154. After roughly positioning the head positioning holes 75 and fitting the pair of head positioning holes 75 to the pair of head positioning projections 142, the through holes 76 and the screw holes 143 are fixed with screws (urea screws). The head unit 71 is set on each set stand 141.

  As shown in FIGS. 9 and 10, the cap unit 161 is attached upward to a cap stand 162 disposed between a pair of set stands 141, and a cap base 163 fixed to the cap stand 162 is attached to the cap base 163. Twelve caps 164 are mounted. As shown in the figure, the twelve caps 164 are arranged on the cap base 163 in the same arrangement pattern as the twelve functional liquid droplet ejection heads 31 mounted on the first head unit 71. In other words, the twelve caps 164 are divided into six halves, and are arranged on the cap base 163 in a state inclined by a predetermined angle θ. The cap base 163 has a pair of front and rear cap positioning holes 171 for positioning on the cap stand 162 and a pair of front and rear fixing holes 172 for screwing against the cap positioning holes 171.

  Each cap 164 includes a cap body 181 and a cap holder 182, and the cap body is urged upward by two springs (not shown) and is held by the cap holder 182 so as to be slightly movable up and down. Yes. On the upper surface of the cap main body 181, recesses 184 including two rows of ejection nozzle groups of the functional liquid droplet ejection head 31 are formed, and a seal packing 185 is attached to the peripheral edge of the recess 184. Further, an L-shaped joint (elbow pipe: not shown) communicating with a small hole 186 formed in the bottom of the recess 184 is fixed to the lower end of the cap body 181. In addition, although the cap 164 of the present embodiment is a diversion of the suction cap 164 of the droplet discharge device A, a dedicated one may be used.

  The cap stand 162 is formed to be lower than the pair of set stands 141 by a predetermined height, and is positioned on the liquid-proof pan 122 while being positioned with respect to the pair of set stands 141. Further, a pair of front and rear cap positioning pins 191 that fit into the pair of cap positioning holes 171 protrude from the cap stand 162, and a pair of front and rear screw holes 192 at positions facing the pair of front and rear cap positioning pins 191. Is formed. Then, the cap positioning pins 191 are fitted into the pair of right and left front and rear cap positioning holes 171 formed in the cap base 163, and the fixing holes 172 of the cap base 163 and the pair of screw holes 192 are aligned and screwed. Thus, the cap base 163 is positioned on the cap stand 162. Accordingly, since the first head unit 71 is positioned on the cap unit 161 via the head set portion 123, when the first head unit 71 is set on the head set portion 123, the first head unit 71 overlaps the cap unit 161. Then, the seal packing 185 of each cap 164 is pressed against the nozzle surface 47 of each functional liquid droplet ejection head 31, and the nozzle surface 47 is sealed by the cap 164 so as to include two ejection nozzle rows. That is, the twelve functional liquid droplet ejection heads 31 are in close contact with the twelve caps 164.

  As described above, the head setting unit 123 and the cap unit 161 correspond to the first head unit 71, but the cleaning device B includes a setting jig 201 for setting the second head unit 81. Is provided. Therefore, by setting the second head unit 81 via the setting jig 201, even the second head unit 81 smaller than the first head unit 71 can be easily and appropriately set on the head setting portion 123. ing.

  As shown in FIG. 11, the setting jig 201 includes a set plate 202 that is set on the head setting portion 123 and a pair of head fixing members 203 that are erected on the set plate 202. The set plate 202 is formed by cutting out a pair of left and right rear corners of a square thick plate so as to have a substantially “convex” shape in plan view.

  The set plate 202 is formed with a square opening 204 at the center right side thereof, and the pair of head fixing members 203 are erected on the left and right sides with the opening 204 interposed therebetween. A positioning convex portion 205 is formed on the upper end surfaces of the pair of head fixing members 203, and a pair of jig head positioning holes 89 are formed in the pair of second head support members 87 (indirect set portions). The second head unit 81 is positioned with respect to the set plate 202 by fitting them. In this state, when the second head unit 81 is screwed (a urea screw) to the upper ends of the pair of head fixing members 203, the functional liquid droplet ejection head 31 of the second head unit 81 is opened from the opening 204 (the lower surface of the set plate 202). (Nozzle surface 47) is slightly protruded downward.

  In this case, in the pair of head fixing members 203, the amount of protrusion of the functional liquid droplet ejection head 31 from the opening 204 is the above-described first level from the nozzle surface 47 of the functional liquid droplet ejection head 31 mounted on the first head unit 71. The height is adjusted to be equal to the distance l to the lower surface of the head support member 73. That is, since the height of the second head unit 81 is adjusted by the first head support member 73, the first head unit 71 and the second head unit 81 are the same as the first head unit 71 and the second head unit 81 of this embodiment. Even when the thickness (height) of the two head units 81 is different, when the set plate 202 is set on the head setting portion 123, the functional liquid droplet ejection head 31 of the second head unit 81 The functional liquid droplet ejection head 31 is brought into close contact with the cap 164 with the same pressing force.

  In addition, the set plate 202 is arranged so that the caps 164 of the cap unit 161 are in close contact with the functional liquid droplet ejection heads 31 of the second head unit 81 fixed via the head fixing member 203. 123 has a pair of set portions 211 (direct set portions) to be positioned and supported. That is, the pair of set portions 211 and the pair of head fixing members 203 are positioned with respect to each other. When the set portion 211 is positioned with respect to the head set portion 123, the second head unit 81 is also connected via the pair of head fixing members 203. The cap 164 is brought into close contact with each functional liquid droplet ejection head 31 of the second head unit 81 after being positioned by the head set portion 123. In this case, in the present embodiment, two caps 164 on the right side and front side of the cap unit 161 are in close contact with the two functional liquid droplet ejection heads 31 of the second head unit 81.

  The pair of set portions 211 are attached to the head set portion 123 in exactly the same manner as the first head unit 71, and are positioned and fixed in exactly the same manner as the first head unit. Each set portion 211 is formed with a jig positioning hole 212 and two pairs of through holes 213 formed on the front and rear sides of the jig positioning hole 212, and these are the head positioning holes formed in each first head support member 73. 75 and the pair of through-holes 76 have the same shape and the same arrangement (see FIGS. 3, 9, and 11). Therefore, when the jig positioning hole 212 is fitted to the head positioning convex portion 142 of the set stand 141, the four screw holes 143 of the set stand 141 and the four through holes 213 of the set portion 211 are aligned and screwed. It can be done. The X-axis regulating member 153 serves as a guide for setting the setting jig 201 to the head setting portion 123. When the setting jig 201 is set, the notch 215 of the set plate 202 is set to the X-axis. By causing the front end surface 153a of the regulating member 153 to come in contact, the setting jig 201 can be roughly positioned.

  Thus, since the cleaning apparatus B is provided with the setting jig 201 for setting the second head unit 81, the first head is compared with the head setting portion 123 corresponding to the first head unit 71. The second head unit 81 having a shape different from that of the unit 71 can be set appropriately and quickly. In addition, when multiple types of 2nd head units 81 are prepared, it is preferable to provide the multiple types of setting jig 201 corresponding to each.

  Next, the cleaning liquid supply / recovery system 221 will be described with reference to FIGS. As shown in the figure, the cleaning liquid supply / recovery system 221 includes a cleaning liquid supply unit 222 that supplies the cleaning liquid to the functional liquid droplet ejection head 31 (the functional liquid introduction unit 41 thereof) via the pipe joint 51 and a cap 164. A cleaning liquid recovery unit 223 that recovers the cleaning liquid that has passed through the flow path in the head, and a cleaning liquid flow path formed by connecting the cleaning liquid supply unit 222 and the cleaning liquid recovery unit 223 to the functional liquid droplet ejection head 31. A cleaning liquid passing means 224 for passing the cleaning liquid and an air supply means 225 for supplying compressed air (inert gas or dry air) are provided.

  The cleaning liquid supply unit 222 includes five cleaning liquid tanks 231 that store the cleaning liquid, and a supply tube unit 240 that connects the cleaning liquid tank 231 and the piping joint 51. As shown in FIGS. 7 and 8, the five cleaning liquid tanks 231 are disposed on the oil pan 232 installed in the front housing part 111 of the tank part cabinet 101 and store pure water from the right side in the figure. The pure water tank 231a, the alcohol tank 231b for storing alcohol such as ethanol, and the three solvent tanks 231c, 231d, and 231e for storing the functional liquid solvent discharged from the functional droplet discharge head 31 are arranged in this order. In addition to the five cleaning liquid tanks 231, the oil pan 232 is provided with five waste liquid tanks 262 (described later) of the cleaning liquid recovery unit 223 and a liquid detection sensor 233. Cleaning liquid leakage and waste liquid leakage can be detected.

  Since the three solvent tanks 231c, 231d, and 231e may store various solvents in accordance with the functional liquid introduced into the functional droplet discharge head 31 to be cleaned, the entire cleaning apparatus B of the present embodiment Is housed in a draft chamber 103 equipped with an air curtain. The inside of the draft chamber 103 is kept at a slightly negative pressure, thereby preventing the air in the cleaning device B (including the solvent evaporated from the solvent) from leaking outside (see FIG. 5 and the like). . Then, most of the operations such as the setting operation of the head unit 6 with respect to the head setting unit 123 and the replacement operation of the cleaning liquid tank 231 are performed in the draft chamber 103.

  As shown in FIG. 12, the supply tube unit 240 includes five individual supply tubes 241a, 241b, 241c, 241d, 241e connected to each cleaning liquid tank 231, and five individual supply tubes 241a, 241b, 241c, It has a supply manifold 242 that joins 241d and 241e, and one common supply tube 243 connected to the supply manifold 242. The five individual supply tubes 241a, 241b, 241c, 241d, and 241e are provided with individual supply valves 244a, 244b, 244c, 244d, and 244e, respectively. The cleaning liquid can be selectively supplied from the tank 231 one by one. The individual supply valves 244a, 244b, 244c, 244d, 244e and the supply manifold 242 are supported by the above-mentioned support column 127 (see FIGS. 13 to 15).

  The common supply tube 243 is bifurcated left and right via a branch manifold 245 and is connected to a pair of left and right head side manifolds 251 respectively supported by the pair of left and right support stands 126 described above. A first atmosphere release valve 246 is interposed at the upstream end of the supply manifold 242, and the pressure sensor 247 and the second atmosphere release are provided between the supply manifold 242 and the branch manifold 245 of the common supply tube 243. A valve 248 is interposed.

  The supply tube unit 240 has twelve head connection tubes 251 that can be connected to the respective pipe joints 51 corresponding to the twelve pipe joints 51 mounted on the first head unit 71. Each of the 12 head connection tubes 251 is divided into six halves, and the six head connection tubes 251 divided on the right side are respectively connected to the right side head side manifold 251R and divided on the left side. The head connection tubes 251 are respectively connected to the left head side manifold 251L. Each head connection tube 251 is provided with a head side opening / closing valve 253. By opening and closing (clamping) the head side opening / closing valve 253 when the cleaning liquid is passed, the flow rate of the cleaning liquid can be reduced and the flow path in the head can be efficiently cleaned.

  As shown in FIGS. 12 to 15, the cleaning liquid recovery unit 223 includes five waste liquid tanks 262 that store the cleaning liquid to be discarded, a recovery tube unit 263 that connects the waste liquid tank 262 and the cap 164, and is forced into the cleaning liquid flow path. Forcibly ventilating means 264 for recovering the cleaning liquid from the cleaning liquid flow path after the end of the liquid flow. The five waste liquid tanks 262 include a pure water waste liquid tank 262a for collecting pure water, an alcohol waste liquid tank 262b for recovering alcohol, three solvent tanks 231c, 231d, and solvent waste liquid tanks 262c, 262d for recovering the solvents of 231e, respectively. And 262e, which are installed on the oil pan 232 in the front accommodating portion 111 described above.

  The collection tube unit 263 has twelve cap connection tubes 271 respectively connected to twelve caps 164 (L-shaped joints) of the cap unit 161. Each of the twelve cap connection tubes 271 is provided with a cap side opening / closing valve 272. The pair of support stands 126 are positioned below the head side manifold 251 to support the cap side manifolds 273, respectively. The twelve cap connection tubes 271 are bifurcated to the left and right like the head side connection tubes 251. Then, six caps are connected to each cap-side manifold 273R, L. Each cap side manifold 273 is connected to a common collection tube 274 that merges into one via a merge manifold 275 supported by the above-mentioned support column 127. Although details will be described later, the head side manifold 251 and the cap side manifold 273 supported by the right support stand 126 are provided with a bypass tube 281 that directly communicates these. The bypass tube 281 is provided with a bypass opening / closing valve 282 and a bypass throttle valve 283 (see FIG. 12).

  The merged common recovery tube 274 is connected to the five individual recovery tubes 293a, 293b, 293c, 293d, and 293e via a valve unit 291 for switching the flow path to which the three-way valve 292 is connected and connected. . Each individual recovery tube 293a, 293b, 293c, 293d, 293e is provided with a flow path switching valve 294 (three-way valve), and each individual recovery tube 293 is bifurcated into each waste liquid tank 262 and each cleaning liquid tank. 231. By switching the flow path switching valve 294, the collection destination of the passed cleaning liquid can be selected as the waste liquid tank 262 or the cleaning liquid tank 231. Further, a regeneration filter 295 is interposed between the flow path switching valve 294 and the cleaning liquid tank 231 from the upstream side. The valve unit 291, the flow path switching valve 294, and the regeneration filter 295 are supported by the slide table 301 in the rear housing portion 112 described above, and these components can be pulled forward by the slide table 301. The valve unit 291 is fixed to a valve support member 302 disposed on the back side of the slide table 301 (see FIG. 7).

  The cleaning liquid flow path of the cleaning device B is disposed in a descending gradient from the upstream side (cleaning liquid tank side) in order to efficiently supply the cleaning liquid to the flow path in the head and to collect the supplied cleaning liquid efficiently. ing. As shown in FIGS. 13 to 15, specifically, the cleaning liquid flow path from the supply manifold 242 to the merge manifold 275 including the pipe joint 52 and the cap 164 has a downward slope. That is, in the cleaning liquid flow path from the supply manifold 242 to the merge manifold 275, the supply manifold 242 is disposed at the highest position, and the supply manifold 242, the branch manifold 245, the head side manifold 251, the pipe joint 51, and the cap side manifold. 273 and the merge manifold 275 are arranged in the lower order.

  The supply manifold 242 and the pair of left and right head side manifolds 251 and the cap side manifold 273 are disposed so as to be inclined (in a slope shape) so that the cleaning liquid flow path has a downward slope. In this case, the supply manifold 242 is supported on the support column 127 by being inclined downstream via a pipe support member 303 attached to the pair of support columns 127. The supply manifold 242 is attached in advance to the pipe support member 303 so that when the pipe support member 303 is attached to the support column 127, the supply manifold 242 is inclined to the support column 127 through the pipe support member 303. Supported.

  The head-side manifold 251 is placed on a first support plate 304 that is attached to each support stand 126 in advance so that the head-side manifold 251 is inclined toward the downstream side. Each support stand 126 is inclined and supported. Similarly, each cap-side manifold 273 is also placed on the second support plate 305 below the first support plate 304 and attached to the support stand 126 in advance, and is supported by the support stand 126 in an inclined state. ing. The inclination angle (gradient) of these manifolds is preferably about 1 ° to 3 °. In addition, a drain tube 307 provided with a drain opening / closing valve 308 is connected to a confluence manifold 275 that is disposed at the lowest position and in which the cleaning liquid tends to remain, so that the remaining cleaning liquid in the confluence manifold 275 can be drained. It is like that.

  In addition, as shown in FIG. 7, the valve unit 291 is also installed at a downward slope with respect to the downstream side through a valve support member 302 that is pre-tilted on the slide table 301 of the tank section cabinet 101. Thus, the cleaning liquid is configured not to remain in the three-way valve 292 as much as possible.

  The forced ventilation means 264 includes a plurality of air introduction holes (actually, T-joint branch ports provided in the washing liquid flow path) 312 formed in the washing liquid flow path, and an air tube unit communicating with each air introduction hole. 313, and the compressed air of the air supply means 225 described above is introduced into the cleaning liquid flow path, and air is forced to flow through the cleaning liquid flow path. The plurality of air introduction holes 312 are formed at three locations of the uppermost stream portion (the highest position) of the supply manifold 242, the common supply tube 243 between the supply manifold 242 and the branch manifold 245, and the merge manifold 275. Yes. The air tube unit 313 is composed of three individual air tubes 314 that are connected to the air introduction holes 312 via joints and the three individual air tubes 314, and one common air that is connected to the air supply unit 225. A tube 315. Each individual air tube 314 is provided with an air opening / closing valve 316.

  The cleaning liquid passing means 224 is constituted by a diaphragm pump driven by air pressure, and is accommodated in the rear accommodating portion 112 of the tank unit cabinet 101, and a common recovery tube 274 between the junction manifold 275 and the valve unit 291. (See FIG. 12). That is, the cleaning liquid passing means 224 is disposed on the downstream side of the cap 164, and the functional liquid droplet discharge head 31 is sucked through the cap 164, thereby allowing the cleaning liquid to flow into the head flow path. . In consideration of the explosion-proof property of the cleaning liquid, the individual supply valve 244, the head side opening / closing valve 253, the cap side opening / closing valve 272, the bypass opening / closing valve 282, the valve unit 291 (three-way valve 292), the flow path switching valve 294, The drain opening / closing valve 308 and the air opening / closing valve 316 are configured to be opened / closed by air pressure by the control means 132.

  Although not shown, the air supply means 225 includes an air pump (compressor), a regulator that maintains the compressed air from the air pump at a constant pressure according to the supply destination, and the like. Control air is supplied to the valve. In addition, this cleaning device B uses air supply means 225 to generate bubbles (compressed air) in the cleaning liquid flowing through the head internal flow path in order to suppress a staying layer that is generated near the wall surface of the internal flow path. It can be mixed.

  Specifically, the air supply means 225 is connected to the 12 head-side air tubes 321 connected to the above-described 12 head-connecting tubes 251 via a pair of head-side manifolds 251. The compressed air is supplied through the air tube 321. Each head-side air tube 321 is provided with a throttle valve 322 for manually adjusting the air flow rate and a bubble mixing valve 323 for air pressure control. The twelve head-side air tubes 321 are also divided into left and right parts and connected to the air manifold 324 supported by the pair of support stands 126 described above. In order to uniformly disperse the bubbles in the head side manifold 251, each head side air tube 321 is connected to the lower side of the head side manifold 251 and compressed air is blown into the head side manifold 251 from below. ing.

  Although not shown, the data setting unit 131 includes various input keys, a monitor, and the like, and sets the type of the head unit 6 to be cleaned. Further, the data setting means 131 can select and set the functional liquid droplet ejection heads 31 to be cleaned individually when the plurality of functional liquid droplet ejection heads 31 are mounted on the head unit 6 to be set. One cleaning mode can be selected from a plurality of cleaning modes in accordance with the droplet discharge head 31 (functional liquid to be discharged, etc.). In the cleaning mode, after passing through pure water and alcohol in this order, the normal cleaning mode in which 1 to 3 types of cleaning liquids are sequentially passed, and the cleaning liquid to be passed are arbitrarily selected from the five cleaning liquids, and the cleaning liquid And a selective cleaning mode for arbitrarily setting the liquid passing sequence. As described above, in the cleaning apparatus B, bubbles can be mixed or clamped when the cleaning liquid is passed, and whether or not to perform these is set in the selection setting mode. . Further, in the selection setting mode, the liquid passing time (or the liquid passing amount) can be arbitrarily set for each cleaning liquid to be passed.

  The control means 132 is composed of a personal computer or the like, and although not shown, has a storage area that can be temporarily stored, a RAM that is used as a work area for control processing, and various storage areas. And a hard disk for storing the control program and various data, and a CPU for calculating various data based on the program stored in the hard disk, and these are connected to each other by a bus.

  Here, a series of operations at the time of cleaning will be described by taking as an example the case of cleaning the functional liquid droplet ejection head 31 of the first head unit 71. First, twelve head connection tubes 251 are connected to the twelve pipe joints 51 mounted on the first head unit 71, and then the first head unit 71 is set in the head set unit 123. Next, the data setting means 131 is used to set the type of the head unit 6 (the first head unit is selected), the functional liquid droplet ejection head 31 to be cleaned, and the cleaning mode. Here, a case where the normal cleaning mode is selected and the all-function liquid droplet ejection head 31 of the first head unit 71 is cleaned will be described.

  The control unit 132 performs the above-described opening / closing control of each valve based on the setting by the data setting unit 131, and appropriately selects and switches the cleaning liquid flow path. For example, when the type of the head unit 6 is set, the head side opening / closing valve 253 is opened / closed based on this. Specifically, the head side opening / closing valve 253 of the head connection tube 251 that is not connected to the functional liquid droplet ejection head 31 is closed, and only the head side opening / closing valve 253 of the head connection tube 251 communicating with the cap 164 is opened. Like that. Further, only the cap-side opening / closing valve 272 of the cap connection tube 271 connected to the cap 164 that is in close contact with the functional liquid droplet ejection head 31 is opened, so that the functional liquid droplet ejection head 31 is not in close contact with the cleaning liquid. The cap 164 is not sucked.

  In a similar manner, when the functional droplet discharge head 31 to be cleaned is selected and set, and all the droplet discharge heads 31 of the set head unit 6 are not cleaned, the head side opening / closing valve 253 and Opening / closing control of the cap side opening / closing valve 272 is performed. In this case, the control means 132 opens only the head-side opening / closing valve 253 of the head connection tube 251 connected to the functional droplet ejection head 31 that is selected and set to perform the cleaning process, and also selects the selected functional droplet ejection. Only the cap-side open / close valve 272 of the cap connection tube 271 connected to the cap 164 that is in close contact with the head 31 is opened.

  When the setting is completed, the passage of pure water is started in accordance with the selected normal cleaning mode. First, the individual water supply valve 244a for pure water is opened, and the cleaning liquid passing means 224 is driven. At this time, the control means 132 detects the pressure sensor 247 of the common supply tube 243 and confirms whether the cap 164 and the functional liquid droplet ejection head 31 are connected or not. If it is determined that there is no abnormality, the driving of the cleaning liquid passing means 224 is continued, and the pure water from the pure water tank 231a is passed through the piping joint 51 to the in-head flow paths of the twelve functional liquid droplet ejection heads 31. In addition, the cleaning liquid that has passed through the cap 164 is collected while the three-way valve 292 of the valve unit 291 is switched.

  At this time, the flow path switching valve 294a is initially opened to the waste liquid tank 262 side, and after a predetermined time has passed since starting the flow of pure water (or a predetermined amount of cleaning liquid has passed. After), it can be switched to the cleaning liquid tank 231 side. Accordingly, a certain amount of cleaning liquid recovered immediately after the start of liquid flow is recovered in the waste liquid tank 262a, while the subsequent cleaning liquid is recovered in the pure water tank 231a via the regeneration filter 295 and is used in a circulating manner. As described above, the pure water tank 231a has a high purity by draining the cleaning liquid (pure water) immediately after passing through the waste liquid tank 262a, the purity of which decreases due to dirt or the like attached to the cleaning liquid flow path. Only the cleaning solution can be returned.

  When terminating the flow of pure water, the individual supply valve 244a for pure water is closed while the flow path switching valve 294a is opened to the cleaning liquid tank 231 side, and the first atmospheric release valve described above is used. The valve 246 is opened, and the cleaning liquid in the cleaning liquid channel is discharged. Further, almost simultaneously with the opening of the first atmosphere release valve 246, the three air opening / closing valves 316 are simultaneously opened, and compressed air (0.03 MPa) is introduced into the cleaning liquid flow path. As a result, it is possible to reduce the time required for the replacement of the cleaning liquid channel to the atmosphere, and the compressed air blows off water droplets adhering to the cleaning liquid channel, so that the cleaning liquid remaining in the cleaning liquid channel can be quickly discharged. it can. Further, as described above, in this cleaning apparatus B, the cleaning liquid flow path from the supply manifold 242 to the merge manifold 275 is installed in a downward slope, so that the cleaning liquid remaining in the cleaning liquid flow path after the end of the flow is extremely small. It is possible to suppress it.

  Next, alcohol is passed through the cleaning liquid channel. After closing the first air release valve 246 and the three air opening / closing valves 316, the three-way valve 292 of the valve unit 291 is switched to allow the individual recovery tube 293b of the alcohol tank 231b to communicate with the cleaning liquid flow path (common recovery tube 274). . Then, the individual supply valve 244a for alcohol is opened to allow alcohol to flow through the cleaning liquid flow path, and the flow path in the head is cleaned with alcohol. In this case, the flow path is switched by the flow path switching valve 294b as in the case of passing pure water, the cleaning liquid immediately after the start of liquid flow is collected in the waste liquid tank 262b, and the subsequent cleaning liquid passes through the regeneration filter 295. And collected in the alcohol tank 231b. Then, the individual supply valve 244b is closed, the first atmosphere release valve 246 is opened to end the alcohol passage, and the three air opening / closing valves 316 are simultaneously opened, so that the inside of the cleaning liquid channel is opened. Drain the alcohol. Thereafter, the solvent is passed and discharged (one type at a time) in the same procedure as the alcohol passage, and the cleaning of the functional liquid droplet ejection head 31 is completed. The cleaning liquid passing means 224 continues to be driven from the passage of pure water to the solvent, and stops driving when a series of cleaning operations are completed.

  When bubbles are mixed into the cleaning liquid, the bubble mixing valve 323 of the head side air tube 321 is opened to introduce compressed air (bubbles) into the air manifold. Thereby, the cleaning liquid in which bubbles are mixed into the flow path in the head is passed through each head connection tube 251. When clamping, the cap side opening / closing valve 272 of each head connection tube 251 is once closed and then opened again, thereby causing a pressure fluctuation in the cleaning liquid flowing through each head connection tube 251. Let

  Incidentally, as described above, the cleaning apparatus B of the present embodiment can set both the first head unit 71 and the second head unit 81 on which a smaller number of functional liquid droplet ejection heads 31 are mounted. Thus, the functional liquid droplet ejection head 31 mounted thereon can be cleaned. In addition, since the functional liquid droplet ejection head 31 to be cleaned can be selected from the plurality of functional liquid droplet ejection heads 31 mounted on the set head unit, the functional liquid droplet ejection to be subjected to the cleaning process according to the situation. The number of heads 31 varies. When the number of the functional liquid droplet ejection heads 31 to be cleaned is small, the head side connection tube closed by the head side opening / closing valve 253 is increased, so that the cleaning liquid flow path is narrowed and the cleaning liquid flow means 224 is excessive. There is a concern that a load is applied and sufficient liquid cannot be passed. Therefore, in this cleaning apparatus B, the above-described bypass tube 281 is provided so that a sufficient flow rate can be secured even when the number of functional droplet discharge heads 31 to be cleaned is small (see FIG. 12).

  Specifically, when the number of functional droplet ejection heads 31 to be cleaned is 7 or less, the bypass opening / closing valve 282 provided in the bypass tube 281 is opened, and the head side manifold 251 and the cap side manifold 273 The cleaning liquid is passed through the cleaning liquid passing means 224 so as not to be overloaded. In this embodiment, the flow rate of the cleaning liquid flowing through the bypass tube 281 can be adjusted by a manual bypass throttle valve 283, but the bypass opening / closing valve 282 is configured by an automatic flow rate adjustment valve. It is also possible. In this case, it is preferable to appropriately adjust the flow rate according to the number of functional droplet discharge heads 31 to be cleaned. In other words, the flow rate of the cleaning liquid flowing through the bypass tube 281 is increased as the number of the functional liquid droplet ejection heads 31 to be cleaned is smaller so that the flow rate of the cleaning liquid as a whole becomes substantially constant. Thereby, the flow path in the head of the functional liquid droplet ejection head 31 having a small flow channel area does not become extremely high pressure, and unnecessary damage to the functional liquid droplet ejection head can be prevented.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device A equipped with the functional droplet discharge head 31 cleaned by the cleaning device B of this embodiment, a color filter, a liquid crystal display device, The structure and the manufacturing method thereof will be described by taking an organic EL device, a PDP device, an electron emission device (FED device, SED device) and the like as examples.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 16 is a flowchart showing the manufacturing process of the color filter, and FIG. 17 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S11), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S12), the bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 17B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 17C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 therebelow serve as a partition wall portion 507b that partitions each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material of the bank 503, a resin material whose coating film surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. The landing position accuracy is improved.

  Next, in the colored layer forming step (S13), as shown in FIG. 13 (d), functional droplets are ejected by the functional droplet ejection head 31, and each pixel region 507a surrounded by the partition wall portion 507b is placed. Let it land. In this case, the functional liquid droplet ejection head 31 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. Once the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S14), and as shown in FIG. 17E, the substrate 501, the partition wall portion 507b, and the colored layers 508R, 508G, and 508B A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 18 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 17, the corresponding parts are denoted by the same reference numerals and description thereof is omitted.

The liquid crystal device 520 is roughly composed of a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 18 are formed at predetermined intervals. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device A according to the embodiment applies, for example, the spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. In addition, the above-described sealing material 529 can be printed by the functional liquid droplet ejection head 31. Furthermore, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 31.

FIG. 19 is a cross-sectional view of an essential part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 20 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also.

  Next, FIG. 21 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 stacked on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 602 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2 and the} like, and is laminated on the inorganic bank layer 618a. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. In addition, you may further form the other functional layer which has another function adjacent to this light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 22, the display device 600 includes a bank portion forming step (S21), a surface treatment step (S22), a hole injection / transport layer forming step (S23), a light emitting layer forming step (S24), It is manufactured through an electrode formation step (S25). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S21), as shown in FIG. 23, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, the organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S22), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using oxygen as a processing gas, for example. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane. )
By performing this surface treatment process, when the functional layer 617 is formed using the functional liquid droplet ejection head 31, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 16 of the droplet discharge device A shown in FIG. 1, and the following hole injection / transport layer forming step (S23) and light emitting layer forming step (S24) are performed. .

  As shown in FIG. 25, in the hole injection / transport layer forming step (S23), the first composition containing the hole injection / transport layer forming material is removed from the functional liquid droplet ejection head 31 into each opening 619 that is a pixel region. Discharge inside. Thereafter, as shown in FIG. 26, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S24) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform a surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Next, as shown in FIG. 27, the pixel composition (second liquid composition containing a light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 27)) is used as a functional droplet. A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, and the nonpolar solvent contained in the second composition is evaporated. As shown in FIG. 28, the hole injection / transport layer 617a is dried. A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 31, as shown in FIG. 29, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order of forming the light emitting layers 120b is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. Further, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S25).

In the counter electrode forming step (S25), as shown in FIG. 30, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 31 is an exploded perspective view of a main part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701 and a second substrate 702 that are disposed to face each other, and a discharge display portion 703 that is formed therebetween. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence. The red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed using the droplet discharge device A shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 16 of the droplet discharge apparatus A.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 31. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 31, and it corresponds. Land in the color discharge chamber 705.

Next, FIG. 32 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 includes a first substrate 801, a second substrate 802, and a field emission display unit 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A lattice-shaped bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in a predetermined pattern.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device A and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device A.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 33A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device A), and the solvent was dried to form a film. After that, a conductive film 807 is formed (inkjet method using the droplet discharge device A). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the above-described droplet discharge apparatus A for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

  The present invention can appropriately and easily set a plurality of types of head units equipped with different numbers of functional liquid droplet ejection heads, and uses a liquid droplet ejection apparatus equipped with a functional liquid droplet ejection head. It is applicable to the manufacture of electro-optical devices and electronic equipment.

It is a plane schematic diagram of a droplet discharge device. 4A and 4B are explanatory views of a functional liquid droplet ejection head, in which FIG. 3A is an external perspective view of the functional liquid droplet ejection head, and FIG. 2B is a cross-sectional view when the functional liquid droplet ejection head is attached to a head plate. It is an external appearance perspective view of a 1st head unit. It is explanatory drawing of a 2nd head unit, (a) is an external appearance perspective view when the 2nd head unit is seen from upper direction, (b) is an external appearance perspective view when the 2nd head unit is seen from the downward direction. . It is an external appearance perspective view of the washing | cleaning apparatus of this embodiment. It is a top view of the washing | cleaning apparatus of this embodiment. It is a front view of a tank part cabinet. It is a top view of a tank part cabinet. It is explanatory drawing around a headset part. It is a top view of a cap unit. It is explanatory drawing of a setting jig | tool, (a) is the figure which showed the relationship between a setting jig | tool and a 2nd head unit, (b) is a plane when a setting jig | tool is set to a head set part. FIG. It is the figure which showed the circuit structure of the washing | cleaning liquid supply collection system. It is an external appearance perspective view around a liquid-proof pan, and is an explanatory view of a cleaning liquid supply and recovery system. It is a front view around a liquid-proof pan, and is an explanatory view of a cleaning liquid supply and recovery system. It is a right view around the liquid-proof pan, and is an explanatory view of a cleaning liquid supply and recovery system. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 31 Functional droplet discharge head 41 Functional liquid introduction part 47 Nozzle surface 48 Discharge nozzle 51 Joint unit 52 Piping joint 53 Piping adapter 71 1st head unit 72 1st head plate 73 1st head support member 81 2nd head unit 82 2nd Head plate 87 Second head support member A Droplet discharge device 123 Head set unit 131 Data setting unit 132 Control unit 161 Cap unit 164 Cap 201 Set jig 203 Head fixing member 211 Set unit 224 Cleaning liquid passing unit 225 Air supply unit 231 Cleaning liquid tank 241 Individual supply tube 242 Supply manifold 243 Common supply tube 244 Individual supply valve 251 Head connection tube 252 Head side manifold 253 Head side opening / closing valve 262 Waste liquid tank 264 Forced ventilation means 271 Cap connection tube 272 Cap side opening / closing valve 273 Cap side manifold 274 Common recovery tube 281 Bypass tube 282 Bypass opening / closing valve 283 Bypass throttle valve 291 Valve unit 293 Individual recovery tube 294 Channel switching valve 302 Valve support Member 303 Pipe support member 304 First support plate 305 Second support plate 312 Air introduction hole 313 Air tube unit 316 Air on-off valve B Cleaning device

Claims (13)

A head set unit for setting a first head unit having a plurality of functional liquid droplet ejection heads mounted on the first head plate in a predetermined arrangement pattern via the first head plate, and the set of the first head unit A joint unit having a plurality of introduction portion connection joints connected to each of the functional liquid introduction portions of the plurality of functional liquid droplet ejection heads; and the plurality of the first head units arranged and set in the arrangement pattern. A cap unit having a plurality of caps that are in close contact with the nozzle surface of the functional liquid droplet ejection head, and the cleaning liquid is passed through the joint unit and the cap unit through the flow path in the head from the functional liquid introduction unit to the ejection nozzle. And a cleaning liquid passage means for cleaning the functional liquid droplet discharge head. A cleaning device for setting a second head unit having the same pattern as the first head unit and having a smaller number of functional liquid droplet ejection heads than the first head unit mounted on the second head plate in a washable manner. In the setting jig,
Direct set part of the same form as the first head plate with respect to the head set part,
An indirect setting unit for indirectly positioning and setting the second head unit with respect to the cap unit such that each functional liquid droplet ejection head of the second head unit is in close contact with the cap. A cleaning device setting jig. In the functional droplet discharge head cleaning device for cleaning the flow path in the head by passing the cleaning liquid through the flow path in the head from the functional liquid introduction part of the functional liquid droplet discharge head to the discharge nozzle,
A head set unit for setting a first head unit in which a plurality of functional liquid droplet ejection heads are mounted on a first head plate in a predetermined arrangement pattern;
A joint unit having a plurality of introduction part connection joints connected to each functional liquid introduction part of the first head unit set in the headset part;
A cap unit having a plurality of caps arranged on the cap plate in the arrangement pattern so as to be in close contact with the nozzle surface of each functional liquid droplet ejection head of the first head unit set in the head set unit;
Cleaning liquid flow means for passing a cleaning liquid through the joint unit and the cap unit to the flow path in the head of the functional liquid droplet ejection head;
A set jig according to claim 1;
And a control means for controlling the cleaning liquid passing means. The cleaning liquid passing means includes a cleaning liquid tank for supplying the cleaning liquid to be passed therethrough,
A cleaning liquid recovery unit that recovers the cleaning liquid that has passed through the flow path in the head;
A cleaning liquid flow path for guiding the cleaning liquid from the cleaning liquid tank to the cleaning liquid recovery unit via the joint unit and the cap unit;
3. The functional liquid droplet ejection head cleaning apparatus according to claim 2, further comprising a pump interposed in the cleaning liquid flow path.   4. The functional droplet discharge head cleaning device according to claim 3, wherein the pump is interposed downstream of the cap unit.   The apparatus for cleaning a functional liquid droplet ejection head according to claim 3 or 4, wherein the cleaning liquid tank also serves as the cleaning liquid recovery unit. The upstream side of the cleaning liquid flow path connected to the joint unit is connected to the cleaning liquid common supply flow path connected to the cleaning liquid tank and the number of the joint connecting joints of the joint unit from the cleaning liquid common supply flow path. A plurality of cleaning liquid individual supply channels that branch and connect to the respective inlet connection joints,
The cleaning liquid flow means includes a plurality of supply flow path opening / closing valves that open and close each cleaning liquid individual supply flow path,
A flow passage selection means for selecting and setting the cleaning liquid individual supply passage for allowing the cleaning liquid to flow from the plurality of cleaning liquid individual supply passages;
The liquid flow path selecting means selects and sets the cleaning liquid individual supply flow path connected to the functional liquid droplet ejection head that is in close contact with the cap,
6. The control unit according to claim 2, wherein the control unit opens only the supply channel opening / closing valve of the cleaning liquid individual supply channel selected and set by the liquid flow channel selection unit. Functional droplet discharge head cleaning device. The cleaning liquid passing means further includes a head selecting means for selecting and setting the functional liquid droplet ejection heads through which the cleaning liquid is passed from a plurality of the functional liquid droplet ejection heads in close contact with the cap,
The control unit opens only the supply channel opening / closing valve of the cleaning liquid individual supply channel connected to the functional liquid droplet ejection head selected by the head selection unit. Functional droplet discharge head cleaning device. On the downstream side of the cleaning liquid channel, the plurality of cleaning liquid individual recovery channels connected to each cap of the cap unit and the plurality of cleaning liquid individual recovery channels are merged into one and connected to the cleaning liquid recovery unit. Cleaning liquid common recovery flow path,
The cleaning liquid flow means includes a bypass flow path connecting the cleaning liquid common supply flow path and the cleaning liquid supply recovery flow path,
A bypass opening / closing valve connected to the control means and interposed in the bypass flow path;
8. The functional liquid droplet ejection head according to claim 6, wherein the control means opens the bypass opening / closing valve when the number of opened liquid passage opening / closing valves is a predetermined number or less. Cleaning equipment.   9. The function according to claim 8, wherein the bypass channel is provided with a throttle valve connected to the control means and capable of adjusting a flow rate of the cleaning liquid flowing through the bypass channel. Liquid droplet discharge head cleaning device. In a droplet discharge device that discharges a functional liquid onto the workpiece while relatively moving a head unit equipped with a functional droplet discharge head that discharges the functional liquid with respect to the workpiece,
10. The liquid droplet ejection apparatus, wherein the functional liquid droplet ejection head is set and washed in the functional liquid droplet ejection head cleaning device according to claim 2 through the head unit. .   11. A method for manufacturing an electro-optical device, wherein the droplet discharge device according to claim 10 is used to form a film forming portion with functional droplets on the workpiece.   An electro-optical device using the droplet discharge device according to claim 10, wherein a film forming portion using functional droplets is formed on the workpiece. An electronic apparatus comprising the electro-optical device according to claim 12.

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