JP2005043306A5 - - Google Patents

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Publication number
JP2005043306A5
JP2005043306A5 JP2003279937A JP2003279937A JP2005043306A5 JP 2005043306 A5 JP2005043306 A5 JP 2005043306A5 JP 2003279937 A JP2003279937 A JP 2003279937A JP 2003279937 A JP2003279937 A JP 2003279937A JP 2005043306 A5 JP2005043306 A5 JP 2005043306A5
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JP
Japan
Prior art keywords
support
arms
sensor according
piezoelectric vibrator
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2003279937A
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English (en)
Japanese (ja)
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JP2005043306A (ja
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Publication date
Application filed filed Critical
Priority to JP2003279937A priority Critical patent/JP2005043306A/ja
Priority claimed from JP2003279937A external-priority patent/JP2005043306A/ja
Publication of JP2005043306A publication Critical patent/JP2005043306A/ja
Publication of JP2005043306A5 publication Critical patent/JP2005043306A5/ja
Withdrawn legal-status Critical Current

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JP2003279937A 2003-07-25 2003-07-25 振動ジャイロセンサ Withdrawn JP2005043306A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003279937A JP2005043306A (ja) 2003-07-25 2003-07-25 振動ジャイロセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003279937A JP2005043306A (ja) 2003-07-25 2003-07-25 振動ジャイロセンサ

Publications (2)

Publication Number Publication Date
JP2005043306A JP2005043306A (ja) 2005-02-17
JP2005043306A5 true JP2005043306A5 (https=) 2006-08-17

Family

ID=34265906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003279937A Withdrawn JP2005043306A (ja) 2003-07-25 2003-07-25 振動ジャイロセンサ

Country Status (1)

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JP (1) JP2005043306A (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4569209B2 (ja) * 2004-07-30 2010-10-27 エプソントヨコム株式会社 双音さ型振動ジャイロセンサ及びその製造方法
WO2012081457A1 (ja) * 2010-12-15 2012-06-21 株式会社村田製作所 振動ジャイロ
JP6517553B2 (ja) * 2015-03-19 2019-05-22 京セラ株式会社 角速度センサ
CN113790715B (zh) * 2021-11-16 2022-03-15 北京晨晶电子有限公司 表贴石英音叉陀螺及其加工方法

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