JP2005039264A5 - - Google Patents

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JP2005039264A5
JP2005039264A5 JP2004195074A JP2004195074A JP2005039264A5 JP 2005039264 A5 JP2005039264 A5 JP 2005039264A5 JP 2004195074 A JP2004195074 A JP 2004195074A JP 2004195074 A JP2004195074 A JP 2004195074A JP 2005039264 A5 JP2005039264 A5 JP 2005039264A5
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electrode
light emitting
extending
lower electrode
layer
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JP2005039264A (en
JP4572604B2 (en
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Claims (12)

発光層とそれを挟む第１，２導電型層に、それぞれ設けられた第１電極、第２電極を同一面側に有する発光素子において、
前記電極形成面内において、
前記第１導電型層が露出された第１電極形成部に第１電極、下方に第１，２導電型層に挟まれた発光層を有する発光構造部の第２導電型層に第２電極が設けられ、
前記第２電極が、開口部を有する下部電極と、その上に設けられ台座部を有する上部電極と有し、
前記上部電極が、互いに異なる２方向に延伸する延伸部を有し、
前記下部電極面内において、前記開口部が２次元周期構造を有して、該周期構造が互いに直角方向から傾斜した２つの軸でもって２次元配列されており、
前記周期構造の軸方向と、前記延伸方向が異なることを特徴とする発光素子。 In the light emitting element having the first electrode and the second electrode provided on the same surface side in the light emitting layer and the first and second conductivity type layers sandwiching the light emitting layer,
In the electrode formation surface,
The first electrode is formed on the first electrode forming portion where the first conductive type layer is exposed, and the second electrode is formed on the second conductive type layer of the light emitting structure portion having the light emitting layer sandwiched between the first and second conductive type layers below. Is provided,
The second electrode has a lower electrode having an opening, and an upper electrode provided on the lower electrode,
The upper electrode has an extending portion extending in two different directions,
In the lower electrode surface, the opening has a two-dimensional periodic structure, and the periodic structure is two-dimensionally arranged with two axes inclined from each other at right angles,
The light emitting element characterized by the axial direction of the periodic structure being different from the extending direction. 発光層とそれを挟む第１，２導電型層に、それぞれ設けられた第１電極、第２電極を同一面側に有する発光素子において、
前記電極形成面内において、
前記第１導電型層が露出された第１電極形成部に第１電極、下方に第１，２導電型層に挟まれた発光層を有する発光構造部の第２導電型層に第２電極が設けられ、
前記第２電極が、複数の開口部を有する下部電極と、その上に設けられ台座部を有する上部電極と有し、
前記第１電極に対向する上部電極の端部が、該対向する方向に傾斜した方向に延伸する延伸端部を有し、
前記下部電極面内において、前記開口部が２次元周期構造を有して、該周期構造が互いに直角方向から傾斜した２つの軸でもって２次元配列されており、
前記周期構造の軸方向と、前記対向する方向が異なることを特徴とする発光素子。 In the light emitting element having the first electrode and the second electrode provided on the same surface side in the light emitting layer and the first and second conductivity type layers sandwiching the light emitting layer,
In the electrode formation surface,
The first electrode is formed on the first electrode forming portion where the first conductive type layer is exposed, and the second electrode is formed on the second conductive type layer of the light emitting structure portion having the light emitting layer sandwiched between the first and second conductive type layers below. Is provided,
The second electrode has a lower electrode having a plurality of openings, and an upper electrode provided on the lower electrode,
An end of the upper electrode facing the first electrode has an extending end extending in a direction inclined in the facing direction;
In the lower electrode surface, the opening has a two-dimensional periodic structure, and the periodic structure is two-dimensionally arranged with two axes inclined from each other at right angles,
A light-emitting element, wherein an axial direction of the periodic structure is different from the facing direction. 前記延伸端部が、互いに異なる２方向に延伸していることを特徴とする請求項２記載の発光素子。 The light emitting device according to claim 2, wherein the extending end extends in two different directions. 前記第１電極が、前記第２電極の延伸端部に対向して延伸する電極延伸部を有し、いずれか一方の電極が、他方の電極延伸部の端部を囲む周縁電極部を有することを特徴とする請求項２記載の発光素子。 The first electrode has an electrode extension portion extending opposite to the extension end portion of the second electrode, and any one of the electrodes has a peripheral electrode portion surrounding the end portion of the other electrode extension portion. The light emitting device according to claim 2. 前記下部電極が、電極形成面内において、第１電極と、上部電極延伸部若しくは延伸端部との間の発光構造部の上に設けられていることを特徴とする請求項１乃至４記載の発光素子。 The said lower electrode is provided on the light emission structure part between a 1st electrode and an upper electrode extending | stretching part or an extending | stretching edge part in an electrode formation surface, The Claim 1 thru | or 4 characterized by the above-mentioned. Light emitting element. 前記下部電極が、前記開口部と、開口部を囲む電極形成部とを有し、該電極形成部が前記２つの軸方向に形成された格子状であることを特徴とする請求項１乃至５記載の発光素子。 The said lower electrode has the said opening part and the electrode formation part surrounding an opening part, This electrode formation part is the grid | lattice form formed in the said two axial directions, The 1st thru | or 5 characterized by the above-mentioned. The light emitting element of description. 前記下部電極の開口部に対応して、前記第２導電型層にも凹部が設けられていることを特徴とする請求項１乃至６記載の発光素子。7. The light emitting device according to claim 1, wherein a recess is provided in the second conductivity type layer corresponding to the opening of the lower electrode. 前記発光素子が、電極形成面内において、発光構造部の側面に沿って、発光構造部の一部が分離して形成された凹凸部を有する請求項１乃至７記載の発光素子。 The light emitting element, the electrode formation plane, along the side of the light emitting structure, the light emitting device of claims 1 to 7, wherein a portion of the light emitting structure portion has a concavo-convex portion which is formed separately. 前記凹凸部は、素子動作部内で、発光構造部、若しくは発光構造部と第１電極とに挟まれた領域に設けられている請求項８記載の発光素子。 The light emitting device according to claim 8 , wherein the uneven portion is provided in a light emitting structure portion or a region sandwiched between the light emitting structure portion and the first electrode in the element operation portion. 前記凹凸部は、発光構造部内に切り込む拡張部を有する請求項８又は９記載の発光素子。 The light emitting device according to claim 8 or 9 , wherein the concavo-convex part has an extended part cut into the light emitting structure part. 発光層とそれを挟む第１，２導電型層に、それぞれ設けられた第１電極、第２電極を同一面側に有する発光素子の製造方法において、
前記電極形成面内において、
下方に第１，２導電型層に挟まれた発光層を有する発光構造部の第２導電型層に第２電極として、下部電極と上部電極が設けられ、
前記第１導電型層が露出された第１電極形成部に第１電極を形成する工程、
下部電極を形成した後、マスクを形成して、化学的エッチングにより該下部電極層の一部を除去して、互いに直角方向から傾斜した２つの軸でもって２次元配列させた２次元周期構造の開口部を形成する工程と、
下部電極の上に、互いに異なる２方向であって、前記周期構造の軸方向と異なる方向に延伸する延伸部と、台座部とを有する上部電極を形成する工程と、
を具備してなることを特徴とする発光素子の製造方法。 In the method of manufacturing a light emitting element having a light emitting layer and first and second conductivity type layers sandwiched between the first electrode and the second electrode provided on the same surface side,
In the electrode formation surface,
A lower electrode and an upper electrode are provided as a second electrode on the second conductive type layer of the light emitting structure having a light emitting layer sandwiched between the first and second conductive type layers below,
Forming a first electrode on the first electrode forming portion where the first conductivity type layer is exposed;
After forming the lower electrode, a mask is formed, a part of the lower electrode layer is removed by chemical etching, and the two-dimensional periodic structure is arranged two-dimensionally with two axes inclined from each other at right angles. Forming an opening;
Forming an upper electrode on the lower electrode, the extending portion extending in two directions different from the axial direction of the periodic structure, and a pedestal portion;
A method for manufacturing a light-emitting element, comprising: 請求項１乃至１０記載の発光素子が載置される載置部を有する発光装置であって、前記載置部に、発光素子が支持基板上に実装されて、載置されていることを特徴とする発光装置。 Characterized in that a light-emitting device according to claim 1 to 10, wherein a light-emitting device having a mounting portion that is mounted to the mounting section, the light emitting element is mounted on a support substrate, is placed A light emitting device .
JP2004195074A 2003-06-30 2004-06-30 Semiconductor light emitting element and light emitting device using the same Active JP4572604B2 (en)

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