JP2005038752A - Plasma treatment device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a plasma treatment device which protects objects disposed in the blowoff direction of a plasma blowoff means from plasma. <P>SOLUTION: A treatment gas is passed through between electrodes 33, 34 to be made into plasma and blown off downward by a plasma blowoff means 20, while an object W to be treated is transferred by a roller conveyer 10 such that it traverses underneath the plasma blowoff means 20. The roller conveyer directly under the plasma blowoff means 20 is covered with a protective cover 51 composed of glass (a plasma-resistive material). In the protective cover 51, there are formed roller through-holes 51d where upper edges of rollers 12 emerge. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a so-called remote-type plasma processing apparatus in which a processing gas is blown from between electrodes and applied to an object to be processed.

  For example, Patent Document 1 describes a remote plasma processing apparatus including a plasma processing head (plasma blowing means) and a roller conveyor (conveying means) disposed below the head. The processing head accommodates a pair of electrodes. A processing gas is passed between the electrodes to form plasma, and then blown downward. Then, the plasma surface treatment is performed on the object to be processed conveyed by the roller conveyor.

Japanese Patent Laying-Open No. 2003-166065 (FIG. 6)

  In the above-mentioned conventional apparatus, there is a possibility that the roller conveyor and the arrangement on the lower side thereof may be damaged by the plasma gas from the processing head.

In order to solve the above problems, the present invention comprises a plasma blowing means for blowing a processing gas between electrodes and generating a plasma, and a conveying means for feeding an object to be processed across the blowing direction of the plasma blowing means. In the plasma processing apparatus provided, the first feature is that a protective cover made of a plasma resistant material is provided slightly away from the position through which the workpiece passes through to the side opposite to the plasma blowing means. Further, in a plasma processing apparatus comprising a plasma blowing means for passing a processing gas between electrodes and blowing it downward, and a roller conveyor for feeding an object to be processed across the lower side of the plasma blowing means, A second feature is that the roller conveyor immediately below the plasma blowing means is covered with a protective cover made of a plasma-resistant material, and a roller through hole is formed in the protective cover to pass the upper edge of the roller of the roller conveyor.
Thereby, the roller conveyor (conveying means) and other arrangements in the blowing direction of the plasma blowing means can be protected from the plasma by the protective cover. In addition, the object to be processed can be transported without interfering with the protective cover, and the gap between the protective cover and the object to be processed can be reduced, and the atmosphere in the gap can be processed between the plasma blowing means and the object to be processed. It can prevent entering the space.

The protective cover is preferably made of glass.
Thus, it is possible to provide a protective cover that can reliably protect transport means such as a roller conveyor without being damaged even when directly exposed to plasma.

It is desirable that the protective cover is divided into a plurality of parts, and the joint of the divided covers is displaced from a position facing the blowout port of the plasma blowout means (in the second feature, directly below the blowout port).
As a result, it is possible to prevent the protective cover from being bent even if the area of the protective cover is large, and it is possible to prevent plasma from leaking to the back side from the joint of the divided covers.

It is desirable to further include a mechanism (in the second feature, a height adjustment mechanism of the protective cover) that adjusts the distance of the protective cover with respect to the position through which the workpiece is passed.
Thus, the distance between the protective cover and the object to be processed can be adjusted to be as large as set, and even if there is a manufacturing error, it can be corrected.

In the second feature, the protective cover includes a height adjusting mechanism, and the height adjusting mechanism is slidable along the inclined direction of the guide surface and fixed at an arbitrary position. It is preferable that the protective cover is supported on the receiving member so that the position of the protective cover can be adjusted in the sliding direction.
Thus, the height of the protective cover can be easily adjusted and the position of the protective cover can be adjusted so as to face the plasma blowing means.

One of the connecting portion of the protective cover to the receiving member and the receiving member is formed with a hole for screwing with the other, and this hole is preferably a long hole along the sliding direction. .
This makes it possible to adjust the position of the protective cover so as to face the plasma blowing means with a simple configuration.

The present invention is mainly applied to plasma processing at a pressure near atmospheric pressure (substantially normal pressure). In the present invention, the pressure near atmospheric pressure (substantially normal pressure) refers to a range of 1.333 × 10 ^{4 to} 10.664 × 10 ⁴ Pa. In particular, the range of 9.331 × 10 ^{4 to} 10.9797 × 10 ⁴ Pa is preferable because the pressure adjustment is easy and the apparatus configuration is simple.

  According to the present invention, an arrangement in the blowing direction of the plasma blowing means can be protected from plasma by the protective cover.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
1 to 3 show a remote atmospheric plasma processing apparatus M for using a glass substrate W having a large area as an object to be processed and performing plasma cleaning under a substantially atmospheric pressure. The remote atmospheric pressure plasma processing apparatus M includes a roller conveyor 10 (conveying means) installed horizontally on the base B, and a plasma processing head 20 (plasma blowing means) arranged above the roller conveyor 10. ing. As is well known, the roller conveyor 10 has a large number of shafts 11 and rollers 12 provided at intervals between the shafts 11. The shaft 11 extends in the left-right direction and is arranged in the front-rear direction. A glass substrate W is placed on the roller conveyor 10 and is sent in the front-rear direction (left-right direction in FIG. 2).

  As shown in FIGS. 2 and 3, the plasma processing head 20 has an outer casing 21 and three plasma blowing nozzles 30 accommodated in the outer casing 21. The outer casing 21 has a rectangular hood shape that is long in the left and right sides, and has a lower end opened. An exhaust pipe 4 a extends from the upper end of the outer casing 21, and this pipe 4 a is connected to the exhaust pump 4.

  The three plasma blowing nozzles 30 in the outer casing 21 extend in the left and right directions and are arranged at intervals in the front and rear directions. Note that the number of plasma blowing nozzles 30 is not limited to three, but may be two or four or more, and may be one without being limited to a plurality. Each plasma blowing nozzle 30 has a gas introduction part 31 and a discharge processing part 32 which are stacked one above the other. Although not shown in the figure, a gas uniformizing path is formed in the upper gas introduction part 31 by connecting chambers extending left and right and small holes dispersedly arranged on the left and right. A processing gas source 2 is connected to the upstream end of the gas homogenization path via a gas supply pipe 2a. The processing gas source 2 stores a processing gas for plasma cleaning. This processing gas is sent to the gas introduction part 31 through the pipe 2a and is made uniform in the left-right longitudinal direction by the gas uniformizing path.

The discharge processing unit 32 of the plasma blowing nozzle 30 includes a pair of electrodes 33 and 34 opposed to the front and rear, and a holder 35 that holds the electrodes 33 and 34. The electrodes 33, 34 extend to the left and right, and the processing gas from the gas introduction unit 31 is uniformly introduced into a left and right elongated space formed between them. The electric field applying power source 3 is connected to one electrode 33 via a feeder line 3a, and the other electrode 34 is grounded via a ground line 3b. The electric field applying power source 3 supplies a pulse voltage, for example. As a result, a pulse electric field is applied between the electrodes 33 and 34, and the processing gas introduced into the space between the electrodes 33 and 34 is turned into plasma. The plasma-ized processing gas is blown out below the nozzle 30. The left and right elongated openings at the lower end of the space between the electrodes 33 and 34 constitute a blowout port 30 a of the plasma blowout nozzle 30.
At least one of the electrodes 33 and 34 is provided with a solid dielectric layer for preventing arcs on the surface facing the other.

A support structure of the plasma processing head 20 will be described.
As shown in FIGS. 1, 3, and 11, the atmospheric pressure plasma processing apparatus M is provided with a pair of left and right head support bases 70. The support base 70 has a plurality of support columns 71 erected on the base B, and a pedestal 72 provided at the upper end of the support columns 71. These columns 71 and pedestals 72 can be disassembled and assembled.

Each strut 71 is disposed between adjacent shafts 11 of the roller conveyor 10, and a lower end portion is bolted to the base B and an upper end portion is positioned at substantially the same height as the shaft 11.
The pedestal 72 has a flat plate shape that is long in the front-rear direction and is disposed above the shaft 11 of the roller conveyor 10.

  As shown in FIG. 3, on the left and right pedestals 72, supported portions 22 on the lower left and right sides of the plasma processing head 20 are placed and supported. Thus, the plasma processing head 20 is stretched between the left and right head support bases 70 so as to cover the roller conveyor 10. Steps 22 a are provided in the left and right supported portions 22 of the plasma processing head 20. The left and right steps 22a are caught on the inner end surface of the pedestal 72, whereby the plasma processing head 20 is positioned in the left-right direction. The pedestal 72 and the supported portion 22 are connected by a bolt (connecting member) 23, and the plasma processing head 20 is fixed to the pedestal 72.

  A bolt 73 as a height adjusting mechanism is interposed between the pedestal 72 and the support column 71. That is, as shown in FIGS. 1, 12, and 13, the pedestal 72 is formed with a plurality of female screw holes 72a penetrating in the vertical thickness direction. These female screw holes 72 a are disposed at positions corresponding to the support columns 71. The upper part of the height adjusting bolt 73 made of a headless bolt is screwed into each female screw hole 72a. A lower side portion of the height adjusting bolt 73 protrudes below the pedestal 72 and abuts against an upper end surface of the support column 71.

  In the height adjusting bolt 73, a hexagonal hole 73a that opens to the upper end surface and a stepped hole 73b that extends from the bottom surface to the lower end surface of the hexagonal hole 73a are formed in communication along the axis. A shaft bolt 74 (shaft member) is inserted through the stepped hole 73b. The head of the shaft bolt 74 is accommodated in the large diameter part on the upper side (side connected to the hexagonal hole 73a) of the stepped hole 73b, and the screw part passes through the lower small diameter part, and the screw hole in the upper end part of the column 71 It is screwed into 71a. As a result, the height adjusting bolt 73 is connected to the support 71 via the shaft bolt 74, and can be rotated around the shaft bolt 74 when the shaft bolt 74 is loosened.

  The rotation operation of the height adjusting bolt 73 is performed by inserting a hexagon wrench into the hexagon hole 73a. As shown by the two-dot chain line in FIG. 12, when the height adjusting bolt 73 is turned in one direction, the pedestal 72 is raised, and as shown by the broken line, the pedestal 72 is lowered. By performing this for each of the plurality of height adjusting bolts 73, the pedestal 72 can be leveled while adjusting the height. Of course, the heights of the left and right pedestals 72 are aligned with each other. In this way, the plasma processing head 20 on the pedestal 72 is horizontally supported so that the height can be adjusted. As a result, the distance (working distance) between the outlet 30a of the plasma processing head 20 and the upper surface of the glass substrate W can be adjusted. The setting value of this working distance is, for example, about 5 mm.

  A hexagonal hole 74 a is formed in the head of the shaft bolt 74. After the height adjustment is completed, a hexagon wrench is inserted into the hexagon hole 74a and turned to tighten the shaft bolt 74 until the head hits the step of the stepped hole 73b. As a result, the height adjusting bolt 73 is prevented from rotating, and as a result, the height of the plasma processing head 20 is fixed.

  The height adjusting bolt 73 may be rotatably connected to the pedestal 72 and screwed into the column 71, or the shaft bolt 74 may be screwed into the pedestal 72.

The characteristic part of the present invention will be described.
As shown in FIGS. 1 to 3, the atmospheric pressure plasma processing apparatus M further includes an inert gas reservoir 50. The inert gas reservoir 50 is disposed just below the plasma blowing nozzle 30 and accommodates this portion of the roller conveyor 10 inside.

  As shown in FIGS. 4 and 5, the inert gas reservoir 50 has a bottom plate 54, front and rear side plates 52 and 53, and an upper plate 51 (protective cover). There is no. The left and right length of the container 50 is substantially the same as that of the outer casing 21 of the plasma processing head 20 and is, for example, about 1 to 3 m. The front and rear width is slightly smaller than the outer casing 21 and the electrodes 33 and 34 and the outlet 30a. Is substantially the same as the length of, for example, about 0.5 to 1 m.

As shown in FIG. 6, each plate 51-54 which comprises the inert gas reservoir 50 is assembled | attached with the screw | thread (not shown) so that decomposition | disassembly is mutually possible.
As shown in FIGS. 2 and 3, the bottom plate 54 of the inert gas reservoir 50 is disposed below the roller conveyor 10. As shown in FIGS. 2, 5, and 7, the bottom plate 54 is divided into four (plural) bottom plate portions 54a along the front-rear width direction. The bottom plate portions 54a extend to the left and right, and are arranged one after the other. A joint plate portion 54b is provided at the edge of one bottom plate portion 54a between adjacent bottom plate portions 54a, and this joint plate portion 54b is put on the upper surface of the edge of the other bottom plate portion 54a and is screwed. Has been.

  As shown in FIGS. 6 and 8, an edge plate 53 b is provided on the lower edge of the inner side surface of the front and rear side plate 53 of the inert gas reservoir container 50 so that the edge plate 53 b is screwed to the bottom plate 54. It has become. As shown in FIG. 8, a plurality of vertical ribs 53 a are provided on the inner side surface of the front and rear side plates 53 at intervals in the longitudinal direction.

  As shown in FIGS. 6 and 9, edge plates 52b and 52c are provided on the front and rear edges and the lower edge of the inner surface of the left and right side plates 52 of the inert gas reservoir container 50. These edge plates 52b and 52c are Screwed to the front and rear side plates 53 and the bottom plate 54. A plurality of (for example, six) U-shaped recesses 52a are formed at the upper edge of the left right plate 52 at intervals. As shown in FIG. 6, the shaft 11 of the roller conveyor 10 is passed through these recesses 52a. As a result, a plurality of (for example, six) shafts 11 penetrates the inside of the inert gas reservoir container 50 from side to side.

  As shown in FIGS. 1 to 3, the upper plate 51 of the inert gas reservoir 50 is arranged so as to cover the six shafts 11. As shown in FIG. 4, the upper plate 51 is formed with a plurality of roller through holes 51d having a long rectangular shape in the front-rear direction and aligned in the front-rear and left-right directions. As shown in FIGS. 1 and 2, the upper edge portions of the rollers 12 of the six shafts 11 are inserted into the through holes 51d. These rollers 12 protrude slightly from the upper plate 51. Accordingly, the glass base material W can be reliably transported at the location where the inert gas reservoir container 50 is disposed without interfering with the container 50. The amount of protrusion from the upper plate 51 of the roller 12 is set as small as possible within a range in which the glass substrate W and the upper plate 51 do not interfere even if they are bent, and are, for example, 3 to 5 mm. The lower surface of the glass substrate W and the upper plate 51 are separated from each other by the protruding amount.

  As shown in FIGS. 1 and 4, the upper plate 51 is divided into four (plural) upper plate portions 51a and 51b (divided covers). These four upper plate portions 51a and 51b are arranged in a 2 × 2 manner, and their joints are crossed. The front two upper plate portions 51a have a smaller front-rear width than the two rear upper plate portions 51b. As a result, the seam 51 c extending in the left and right direction at the boundary between the front plate portion 51 a and the rear plate portion 51 b is shifted forward from the front and rear center of the inert gas reservoir container 50. By doing so, as shown in FIG. 2, the seam 51 c is shifted from a position directly below the air outlet 30 a of the central plasma outlet nozzle 30, and the central air outlet 30 a and the front plasma outlet nozzle 30 It arrange | positions in the intermediate | middle lower part with the blower outlet 30a. As a result, the seam 51c does not face any air outlet 30a. A rear upper plate portion 51b is positioned directly below the center and the rear outlet 30a, and a front upper plate portion 51b is positioned directly below the front outlet 30a.

  The side plates 52 and 53 and the bottom plate 54 of the inert gas reservoir 50 and the upper plate support 55 described later are made of a resin such as vinyl chloride. On the other hand, the upper plate 51 is made of glass (plasma resistant material). Glass has higher plasma resistance than resins such as vinyl chloride.

A support structure of the upper plate 51 will be described.
As shown in FIG. 5, a plurality of upper plate supports 55 (support members) are arranged on the upper surface of the bottom plate 54 so as to be aligned in the front-rear and left-right directions. As shown in FIG. 6, the support 55 has a vertical L shape, and a lower end portion thereof is screwed to the bottom plate 54. As shown in FIGS. 2 and 3, the upper plate 51 is placed on the upper ends of the supports 55 and screwed. Moreover, as shown in FIG. 6, the edge part of the upper board 51 is mounted on the upper end part of the vertical rib 53a (FIG. 8) of the front-and-back side board 53, and is screwed. Further, the four corners of the upper plate 51 are placed on the upper end portions of the vertical edge plates 52c (FIG. 9) of the left and right side plates 52.

Next, a support structure for the entire inert gas reservoir 50 including the upper plate 51 will be described.
As shown in FIGS. 2 and 3, a base 61 fixed to the base B is provided below the roller conveyor 10. The upper surface (guide surface) of the base 61 is inclined upward toward the front. Four (a plurality) of container receiving members 62 are provided on the upper surface of the base 61. The receiving member 62 is formed in a rod shape and extends in the front-rear direction, and is disposed at a distance from the left and right. The lower surface of the receiving member 62 is inclined upward in accordance with the inclination angle of the upper surface of the base 61. Thereby, the upper surface of the receiving member 62 is horizontal. The inert gas reservoir 50 is horizontally installed on the upper surface of the receiving member 62, and the bottom plate 54 is screwed to the receiving member 62.

  As shown in FIG. 10, the receiving member 62 is slidable in the front-rear direction along the upper surface of the base 61 and can be fixed at an arbitrary position by a fixing means (not shown). As shown by the two-dot chain line in the figure, when the container receiving member 62 is slid forward and fixed thereto, the upper surface level of the member 62 rises, and consequently the arrangement position of the inert gas container 20 rises. . On the other hand, as shown by the broken line in the figure, when the container receiving member 62 is slid rearward and fixed thereto, the upper surface level of the member 62 is lowered, and consequently the arrangement position of the inert gas container 20 is lowered. . As a result, the height of the inert gas reservoir 50 is adjusted. As a result, the distance between the lower surface of the glass substrate W and the upper surface of the upper plate 51 can be adjusted. As shown in FIG. 6, in the bottom plate 54 of the inert gas reservoir container 50 (the connecting portion of the protective cover to the receiving member), the hole formed for screwing the receiving member 62 has its long axis facing front and rear. It is a long hole 54c. Thus, even if the receiving member 62 is shifted back and forth, the position of the inert gas reservoir 50 in the front-rear direction can be held at the normal position directly below the plasma processing head 20.

The screw may be configured to be screwed into the bottom plate 54 from the receiving member 62 side. In that case, the screw insertion hole on the receiving member side is a long hole with the long axis facing the front and rear like the long hole 54c. To do.
In FIG. 10, the inclination angle of the upper surface of the base 61 and the container receiving member 62 and the vertical movement range of the inert gas reservoir container 50 are exaggerated.

The inert gas reservoir 50 is filled with an inert gas.
More specifically, as shown in FIG. 2, the apparatus M includes an inert gas source 5 in addition to the processing gas source 2. In the inert gas source 5, for example, nitrogen is stored as an inert gas. The gas pipe 5a from the inert gas source 5 is joined to the gas pipe 2a from the processing gas source 2 via the three-way valve 2v. The three-way valve 2v selects one of the two gas sources 2 and 5 and is connected to the plasma blowing nozzle 30. If the inert gas source 5 is selected, nitrogen is blown from the plasma blowing nozzle 30. (In this case, the power supply 3 is turned off.) The nitrogen passes through the gap between the roller passage hole 51 d of the upper plate 51 and the roller 12 and enters the container 50.
Note that the inert gas may be filled in the container 50 by directly connecting the pipe 5 a from the inert gas source 5 into the inert gas reservoir container 50.

  In the remote atmospheric pressure plasma processing apparatus M having the above-described configuration, prior to passing the glass substrate W, the above-described nitrogen blowing is performed. The container 50 can be filled with nitrogen in about 3 minutes. Thereafter, the glass substrate W is conveyed to the lower side of the plasma processing head 20 by the roller conveyor 10. In addition, the three-way valve 2 v is switched to supply the cleaning processing gas from the processing gas source 2 to the nozzle 30. At the same time, the processing gas is turned into plasma by turning on the power supply 3 and applying an electric field between the electrodes 33 and 34. The glass substrate W can be subjected to a plasma cleaning process by blowing this plasma-ized processing gas downward from the blowing port 30a and applying it to the glass substrate W.

  During this plasma cleaning process, the inert gas reservoir 50 can prevent the lower atmosphere from rising into the processing space between the plasma processing head 20 and the glass substrate W. As a result, good processing can be performed. Further, nitrogen in the container 50 only rises from the roller through hole 51d of the upper plate 51, and good processing is not hindered. Furthermore, since the gap between the base material W and the upper plate 51 is made as narrow as possible, the atmosphere of this gap hardly enters the processing space, and good processing can be performed reliably.

Furthermore, the roller conveyor 10 can be protected from plasma by the upper plate 51 of the inert gas reservoir 50. Since the upper plate 51 is made of glass having excellent plasma resistance, the upper plate 51 is hardly damaged even when directly exposed to plasma.
Since the upper plate 51 is divided into a plurality of plate portions 51a and 51b, the upper plate 51 can be hardly bent even if it has a large area as a whole. Moreover, since it is supported by the support 55 in the container 50, bending can be prevented more reliably.
Since the joint 51c due to the division is shifted from the outlet 30a of the nozzle 30, it is possible to prevent the plasma from coming out from the joint 51c downward.

The inert gas reservoir 50 can be made compact, and it is not necessary to accommodate the entire roller conveyor 10 and the plasma processing head 20 in a large volume chamber filled with an inert gas, thereby preventing an increase in the size of the apparatus configuration.
Since the inert gas reservoir container 50 can be disassembled and assembled, it can be easily performed without disassembling the roller conveyor even when it is retrofitted to the existing roller conveyor 10. Removal is also easy. In particular, since the bottom plate 54 is divided into narrow bottom plate portions 54a, the bottom plate 54 can be easily inserted below the roller conveyor 10.

Since the apparatus M extends to several meters, manufacturing errors are likely to occur, and the distance between the glass substrate W and the upper plate 51 and the accuracy of several millimeters such as the working distance are likely to be affected. Therefore, the front and rear positions of the receiving member 62 at the lower part of the inert gas reservoir 50 are adjusted. Accordingly, the upper plate 51 can be adjusted to have an accurate height, and as a result, the distance between the glass substrate W and the upper plate 51 can be set to a set size, and manufacturing errors can be corrected. .
Further, the height of the plasma processing head 20 is adjusted by the height adjusting bolt 73. As a result, the working distance can be set as set and the manufacturing error can be corrected.

  By adjusting the height of the pedestal 72 of the left and right support bases 70, the horizontal inclination of the plasma processing head 20 can be corrected and the levelness can be ensured. In addition, by adjusting the plurality of height adjusting bolts 73 of each support base 70, the inclination of the plasma processing head 20 in the front-rear direction and the like can be corrected, and the levelness can be further ensured.

  Since the plasma processing head 20 is mounted so as to be bridged on the left and right support bases 70, the configuration can be simplified and the installation work can be easily performed, rather than the structure of hanging from the ceiling. And can be easily retrofitted onto existing roller conveyor lines. In addition, the support 71 and the base 72 can be disassembled and assembled, and the support 71 only needs to be inserted between adjacent shafts 11 so that the roller conveyor 10 does not interfere with it even if it is not disassembled. It can be installed easily and retrofitting can be further facilitated.

The present invention is not limited to the above-described embodiments, and various modifications can be made.
For example, the conveying means is not limited to a roller conveyor, and various types can be used.
The present invention is not limited to the cleaning treatment, and can be applied to various plasma surface treatments such as film formation, etching, surface modification, ashing, etc., and can be applied not only to a substantially normal pressure but also to a plasma surface treatment under reduced pressure.

It is a top view which shows the remote type atmospheric pressure plasma processing apparatus which concerns on one Embodiment of this invention, and follows the II line | wire of FIG. It is side surface sectional drawing of the said remote type atmospheric pressure plasma processing apparatus which follows the II-II line | wire of FIG. FIG. 3 is a rear sectional view of the remote atmospheric plasma processing apparatus taken along line III-III in FIG. 1. It is a perspective view of the inert gas reservoir container of the said remote type atmospheric pressure plasma processing apparatus. It is a top view in the state where the upper plate of the above-mentioned inert gas reservoir container was omitted. It is a disassembled perspective view of a part of the inert gas reservoir. FIG. 3 is an exploded plan view of a bottom plate of the inert gas reservoir container. (A) It is the figure which looked the front-and-back side board of the said inert gas reservoir container from the inside of a container. (B) It is a top view of the said front-and-back side board. It is the figure which looked at the right-and-left side board of the said inert gas reservoir container from the inside of a container. It is explanatory side view which shows the mode of the height adjustment of the said inert gas reservoir container. It is a front view of the head support stand of the said remote type atmospheric pressure plasma processing apparatus. It is front sectional drawing which expands and shows the height adjustment mechanism part of the said head support stand. It is a top view of the height adjustment mechanism part of the said head support stand.

Explanation of symbols

M Remote-type atmospheric pressure plasma processing equipment W Glass substrate (object to be processed)
10 Roller conveyor 12 Roller 20 Plasma processing head (plasma blowing means)
30a Air outlet 33, 34 Electrode 51 Upper plate (protective cover)
51a, 51b Upper plate part (divided cover)
51c seam 51d roller through hole 54 bottom plate (connecting part of protective cover to receiving member)
54c long hole (hole for screwing)
61 Base (component of protective cover height adjustment mechanism)
62 Receiving member (component of protective cover height adjustment mechanism)

Claims (7)

In a plasma processing apparatus comprising plasma blowing means for blowing a processing gas between electrodes and a conveying means for sending the object to be processed across the blowing direction of the plasma blowing means, from a position through which the object is passed A plasma processing apparatus, characterized in that a protective cover made of a plasma-resistant material is provided slightly away from the plasma blowing means. A plasma processing apparatus comprising: plasma blowing means for blowing a processing gas between electrodes; and a roller conveyor for feeding an object to be processed across the lower side of the plasma blowing means. A plasma processing apparatus, wherein a roller conveyor directly underneath is covered with a protective cover made of a plasma-resistant material, and a roller through hole is formed in the protective cover to pass the upper edge of the roller of the roller conveyor. The plasma processing apparatus according to claim 1, wherein the protective cover is made of glass. The plasma according to any one of claims 1 to 3, wherein the protective cover is divided into a plurality of parts, and a joint of the divided covers is shifted from a position facing the blow-out port of the plasma blow-out means. Processing equipment. The plasma processing apparatus according to claim 2, further comprising a height adjustment mechanism for the protective cover. The height adjusting mechanism includes a base having an inclined guide surface, and a receiving member that can slide along the inclined direction of the guide surface and can be fixed at an arbitrary position. The plasma processing apparatus according to claim 5, wherein the protective cover is supported so that its position can be adjusted in the sliding direction. One of the connecting portion of the protective cover to the receiving member and the receiving member is formed with a hole for screwing to the other, and this hole is a long hole along the sliding direction. The plasma processing apparatus according to claim 6.

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