JP2005032390A - Manufacturing method of glass master disk for information recording carrier - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide the manufacturing method of a glass master disk which can produce an optical disk in which spike noise is suppressed by being enabled be coated with photoresist uniformly. <P>SOLUTION: In this method, the surface of a disk-shaped glass substrate 5 having a flat surface is ground into a mirror face using abrasive particles and the abrasive particles remaining on the surface of the glass substrate 5 are wiped off and the surface of the glass substrate 5 from which the abrasive particles are wiped off is made to be oleophilic. Then, after the glass substrate 5 is arranged on a turntable 3 on whose surroundings a circle type net 6 is arranged and photoresist diluted to predetermined viscosity is dropped on the surface of the glass substrate which is made to be oleophilic, a photoresist layer having predetermined thickness is formed on the surface of the substrate which is made to be oleophilic by rotating the turntable 3 at a predetermined revolving speed. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a method for producing a glass master for an information recording carrier such as an optical disk, which is suitable for forming a fine pattern.

  Conventionally, information recording carriers are known in the form of disks, cards, and tapes. Among these information record carriers, for example, as represented by an optical disc, an information record carrier responsible for reproducing or recording / reproducing high-density information is often engraved with a fine pattern. This fine pattern includes a fine groove (groove) represented by a so-called track, a fine pit, or a hologram.

  In an optical disk as an information record carrier, for example, an energy beam sensitive resin formed on a flat glass substrate is irradiated with an energy beam to form a fine pattern. This method is a method called cutting, in which the energy beam and the glass master disk are in relative motion, and a groove can be formed when the energy beam is continuously irradiated, and a pit is formed when the energy beam is intermittently irradiated. be able to. There are various sizes of information record carriers, and the substrate size is selected at any time corresponding to this.

  Conventionally, a method shown in FIG. 6 is known as a method of forming an optical disc.

  As shown in the figure, a flat glass substrate is first prepared and polished (polishing step: FIG. 6A). Next, the abrasive is removed by washing, and the substrate is wiped off (wiping step: FIG. 6B). Next, the substrate surface is made oleophilic (an oleophilic treatment step: (c) of FIG. 6). Next, an energy ray sensitive resin layer is formed on the substrate (energy ray sensitive resin coating step: (d) of FIG. 6). At this time, a resist coating machine is used (for example, refer to Patent Document 1).

  The reason why the energy ray sensitive resin is not directly applied onto the substrate is that the energy ray sensitive resin itself is lipophilic and cannot be applied to the hydrophilic substrate surface immediately after cleaning. In order to make the substrate surface oleophilic, a silane binder or the like is generally used.

Next, the energy beam sensitive resin is cut by irradiating the energy beam modulated with information (cutting process: (e) of FIG. 6). Next, a stamper is produced from this substrate (stampering step: (f) of FIG. 6). Next, using this stamper, a resin substrate is produced by injection molding, and a predetermined recording film, protective film, etc. are formed on the resin substrate to obtain an optical disc (molding / film forming step: ( g)).
Japanese Utility Model Sho 62-35675

  By the way, in an information record carrier including these optical discs, improvement in information storage capacity and recording density is required. For this purpose, it is necessary to reduce reading errors (spike noise) occurring partially or entirely when reproducing the information record carrier.

  When the cause of this reading error was investigated, it was found that it was due to non-uniformity of the energy ray sensitive resin (photoresist) film applied on the substrate. For this reason, the photoresist material and the photoresist coating conditions were examined on the assumption that the photoresist coating was incomplete, but no effect was found. Moreover, although the chemical | medical agent used for a lipophilic process was also examined, there existed a problem that a photoresist film was still non-uniform | heterogenous and reading error could not be reduced.

  Therefore, the present invention solves the above-mentioned problem, makes it possible to uniformly apply an energy ray-sensitive resin (photoresist), and thereby information capable of producing an information record carrier in which occurrence of reading errors due to spike noise is suppressed. It is an object of the present invention to provide a method for producing a glass master for a record carrier.

As a means for achieving the above object, the method for producing a glass master for an information recording carrier according to the present invention comprises continuously flowing an aqueous solution containing abrasive particles between a disk-shaped glass substrate having a flat surface and a polishing disk. A first step of polishing the surface of the glass substrate to a mirror surface while pressing each surface of the glass substrate and the polishing disk while rotating in opposite directions of rotation;
A second step of wiping the abrasive particles remaining on the surface of the glass substrate processed into the mirror surface with a planar fine mesh while flowing an aqueous solution containing an active agent;
A third step of applying a silane-based binder having a predetermined thickness to the glass substrate surface from which the abrasive particles have been wiped off to make the glass substrate surface oleophilic;
The glass substrate is placed on a turntable having a circular net around it, and after the energy ray sensitive resin diluted to a predetermined viscosity is dropped on the lipophilic glass substrate surface, the turntable is By rotating the energy ray sensitive resin at a predetermined rotational speed and adsorbing unnecessary splashing splash generated on the circular net, the splashing splash is re-applied to the lipophilic glass substrate surface. And a fourth step of forming the energy ray-sensitive resin layer having a predetermined thickness on the surface of the oleophilic glass substrate while preventing the adhesion to the glass substrate. It is a manufacturing method.

  The method for producing a glass master for an information recording carrier of the present invention comprises a first step of polishing a glass substrate surface while applying an aqueous solution of abrasive particles, and an aqueous solution is passed through the abrasive particles remaining on the surface of the glass substrate. The glass substrate is placed on a turntable surrounded by a circular net, a second step of wiping the mesh while contacting it, a third step of oleophilicizing the surface of the glass substrate from which the abrasive particles have been wiped off. After dropping the energy ray sensitive resin on the surface, the turntable is rotated to adsorb unnecessary splashing splash generated when the energy ray sensitive resin is shaken off to the circular net. Preventing redeposition on the oleophilic glass substrate surface, energy beam sensitive tree having a predetermined thickness on the glass substrate surface And a fourth step of forming a layer, it is possible to obtain a glass master for an information record carrier on which a uniform energy ray-sensitive resin layer without any remaining residue is formed, and using this, spike noise can be obtained. There is an effect that it is possible to provide a method for producing a glass master for an information record carrier, in which an information record carrier with few reading errors due to the above can be produced.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings by way of preferred examples.

  First, the process leading to the present invention will be described.

  Spike noise is due to foreign matter remaining on the resin surface of the glass master on which the energy ray-sensitive resin is formed, and the desired groove or pit is not formed in that portion in the next stamper process. The desired information cannot be recorded, and an abnormal reproduction signal obtained therefrom is shown. This is observed as a phenomenon in which the voltage drops suddenly and recovers in a short time when the optical pickup output for signal reproduction is monitored. In other words, a sudden voltage drop portion is detected as noise. The inventor of the present application has studied in detail the conditions of the energy ray-sensitive resin coating process on the glass master in order to minimize the spike noise of the information record carrier. That is, the main parameters such as the resist flow rate, the resist type, the rotation speed of the coating machine (spinner), and the mesh size of the stainless steel circular net. As a result of examining the relationship between these parameters and spike noise (reading error) in detail, the spike noise is the energy sensitive resin layer that is formed when this resin is reattached when the energy ray sensitive resin is applied. It has been found that the thickness is caused by locally non-uniform thickness, leading to the present invention.

  FIG. 1 is a process diagram showing an embodiment of a method for producing a glass master for an information record carrier of the present invention.

  In the figure, steps from the production of the glass master to the production of the information record carrier using the glass master are shown.

  As shown in the figure, the method for producing a glass master for an information recording carrier of the present example includes a polishing process, a wiping process, a process of making the surface oleophilic, and an energy ray sensitive using a stainless steel circular net. Forming a resin. In order to produce an information record carrier, a cutting process, a stamper process, and a molding / film forming process are further required.

  First, a disk-shaped soda-lime glass (containing 70 wt% silicon oxide) having a diameter of 120 mm and a thickness of 1.2 mm was used as a substrate. The substrate is previously polished and polished to a high accuracy with a parallelism of 20 μm or less and a flatness of 20 μm or less.

  As the substrate, a metal, ceramic, or the like having a predetermined shape flattened with high accuracy can be used. For example, a metal such as silicon, aluminum, or stainless steel, or a ceramic including at least silicon oxide, silicon nitride, titanium oxide, or aluminum oxide can be used. A ceramic containing 40% or more of silicon oxide is desirable, and a ceramic containing 60% or more of silicon oxide is more desirable. The size of the substrate is selected in consideration of the outer dimensions of the information record carrier to be manufactured. For example, in the case of an information recording carrier having a diameter of 120 mm, a substrate having a diameter of about 160 to 240 mm is prepared. The thickness of the substrate is 0.1 mm to 30 mm, preferably 0.6 mm to 20 mm, and more preferably 1 mm to 10 mm. Alternatively, a base material having a predetermined thickness may be obtained by depositing the above-described metal, ceramic, or the like.

  First, the surface of the substrate is polished to make the surface mirror-like (polishing step: see FIG. 1A).

  As a polishing method, for example, a mechanical method for applying a horizontal shearing force is used.

Specifically, a device capable of applying a horizontal shearing force to the substrate surface by self-revolution while applying a vertical pressure and a dummy substrate made of a nonwoven fabric having a lower hardness than the substrate are used. Between the dummy substrate and the substrate, an aqueous solution (polishing solution) containing a large amount of fine powder made of cerium dioxide, which is a polishing agent, having a hardness higher than that of the substrate is continuously flowed. While the polishing liquid was always sandwiched between the substrate and the dummy substrate, relative motion was imparted to the substrate and the dummy substrate.
For example, when a ceramic containing 40% or more of silicon oxide is used for the substrate, an aqueous solution containing fine oxide powders such as alumina and silica can be used in addition to cerium dioxide.

  Next, fine abrasive particles that have not been removed in the polishing step are wiped off (wiping step: see FIG. 1B).

  Specifically, the surface of the substrate is wiped by bringing a planar fine mesh made of a hydrophilic polymer having a mesh of 256 μm or less into contact with the surface of the substrate while flowing a cleaning liquid. As the cleaning solution, a mixture of ultrapure water and a surfactant (trade name Mama Lemon) in a volume ratio of 1: 1 is used.

  In this wiping, a planar fine mesh made of a hydrophilic polymer is brought into contact with the substrate surface, so that there is a mechanical removal action of abrasive particles by the contact pressure, and the planar fine mesh and the abrasive trapped in this. Since the particles adhere firmly, reattachment to the glass plate is suppressed. This effect is maximized when the aqueous solution is simultaneously supplied in this wiping process, and when the mesh is made of a hydrophilic polymer such as cotton.

  As the cleaning liquid, an alkaline aqueous solution or a neutral aqueous solution can be used. Examples of the alkaline aqueous solution include a sodium hydroxide aqueous solution, a potassium hydroxide aqueous solution, a sodium hydrogen phosphate aqueous solution, and an ammonia aqueous solution. An example of the neutral aqueous solution is ultrapure water. A surfactant may be added to these.

  In addition, the mesh size of the planar fine mesh used is 256 μm or less when a substrate mainly composed of silicon or silicon oxide is used in the production of an optical information recording carrier (optical disc) as described later. Then, the maximum effect is obtained.

  Next, the substrate surface is made oleophilic (an oleophilic treatment step: see FIG. 1C).

  In order to make the substrate surface lipophilic, a silane-based binder having both a lipophilic functional group and a hydrophilic functional group in the molecule, specifically, hexamethyldisilazane was selected. Taking advantage of the high volatility of this hexamethyldisilazane, the substrate was exposed to hexamethyldisilazane vapor for 3 minutes in a sealed container. That is, a fixed amount of hexamethyldisilazane was applied to the bottom of the sealed container, and the substrate was held at a predetermined interval above it. The hexamethyldisilazane liquid surface and the wiping surface of the substrate were arranged to face each other.

  In addition to the silane-based binder, a titanate-based binder, an aluminate-based binder, an amine-based binder, and a quaternary ammonium binder can be used as the chemical solution for lipophilicity. These chemical solutions are applied to the substrate surface as they are, or diluted with an organic solvent such as alcohol or water. If the chemical solution is highly volatile, a method of applying by a steam bath may be used.

  Next, an energy sensitive resin is applied to the surface of the oleophilic substrate using a resist coater in which a stainless steel circular net is arranged to obtain a glass master for an information recording carrier (using an energy circular net). (Application process of energy ray sensitive resin: see FIG. 1 (d)).

  Here, with reference to FIGS. 2 to 4, a resist coating machine used for coating the energy sensitive resin will be described.

  FIG. 2 is a schematic configuration diagram of a resist coating machine used in the embodiment. FIG. 3 is a schematic configuration diagram of a stainless steel circular net. FIG. 4 is a partially enlarged view of a stainless steel circular net.

  As shown in FIG. 2, the resist coating machine 10 has a motor 7 fixedly disposed on an operation unit 1 (also serving as a base), and a turntable 3 having a predetermined diameter d is provided on a rotating shaft 4 of the motor 7. Is provided. The turntable 3 has a plurality of sizes and can be exchanged. The turntable 3 has a structure (vacuum suction) that can fix the substrate 5 disposed here. A stainless-steel circular net 6 is arranged outside the turntable 3. A splash prevention cover 2 is provided on the outer periphery.

  As shown in FIGS. 3 and 4, the stainless steel circular net 6 is obtained by forming a net formed by braiding wires 16 having a diameter of 1 mm into a square shape with a pitch of 3 mm in each of vertical and horizontal pitches into a cylindrical shape having a diameter D. This is hereinafter referred to as a stainless steel circular net 6 having a mesh size of 3 mm.

  Here, the diameter D of the stainless steel circular net 6 is about twice the diameter d of the turntable 3. The distance H between the upper end surface of the stainless steel circular net 6 and the upper surface of the turntable 3 is set to about 30 mm. The upper surface of the turntable 3 is lower. When the thick substrate 5 is used, the distance between the upper surface of the substrate 5 and the upper end of the stainless steel circular net 6 is adjusted to be about 25 mm.

  A substrate 5 having a lipophilic surface is disposed on the turntable 3 of the resist coating machine 10 described above, and a photoresist (hereinafter also simply referred to as a resist) that is sensitive to ultraviolet rays having a viscosity of 1 mPa · s is used as an energy ray sensitive resin. Then, the solution was continuously dropped onto the substrate 5, and then the turntable 3 was rotated at 500 to 1500 rpm to uniformly apply the photoresist onto the substrate 5. Thereafter, in order to remove the remaining solution, baking was performed at 90 ° C. for 5 minutes using a proximity hot plate.

  Here, the reason why the stainless steel circular net 6 is arranged in the resist coating machine 10 in addition to the splash prevention cover 2 is to prevent the resist from reattaching to the substrate surface due to the resist jumping during the resist coating. is there.

  As schematically shown in FIG. 4, the resist 8 that has jumped at the time of resist application adheres firmly to the mesh 9 of the stainless steel circular net 6, so that reattachment to the substrate 5 is suppressed. Defects can be reduced in the finally produced optical disk.

  Examples of the energy ray sensitive resin include organic materials sensitive to electromagnetic waves (γ rays, X rays, extreme ultraviolet rays, far ultraviolet rays, ultraviolet rays, visible light, infrared rays, etc.) having a wavelength of 10 nm to 1500 nm, and particle beams (α A representative example of the former organic material selected from organic materials sensitive to X-ray, β-ray, proton beam, neutron beam, electron beam, etc. is a photosensitive dye, and UV or far-UV sensitivity is particularly preferable. There is a type of photoresist. A typical example of the latter organic material is an electron beam (EB) resist.

  When applying these energy ray sensitive resins, these materials are diluted with an organic solvent and applied so as to have a predetermined viscosity. As organic solvents, ethyl lactate, butyl acetate, ethyl cellosolve acetate, propylene glycol monomethyl ether acetate, propylene glycol methyl ether, propylene glycol monopropyl ether, ethyl pyruvate, methyl-3-methoxypropionate, methyl-3-ethoxy Propionate, ethyl ethoxypropionate, methyl amyl ketone, 2-heptanone, cyclohexanone, etc. can be used.

  As a method for applying these energy ray sensitive resins, a knife coating method, a bar coating method, a dip pulling method, and the like can be used in addition to the spin coating method. And after apply | coating, you may give baking in order to remove the solvent for dilution.

  As described above, a glass master for an information record carrier is obtained.

  Next, the energy ray-sensitive resin is cut by irradiating the substrate coated with the energy ray-sensitive resin with an energy line whose intensity is modulated by information (cutting process: see FIG. 1E).

  Here, specifically, a pit string of a D8-15 modulated signal having a recording density equivalent to 25 GB, that is, a track pitch of 0.32 μm and a shortest pit length of 0.185 μm is obtained by a known method using a laser having a wavelength of 266 nm. Cutting.

  Next, by a known method, a predetermined thickness of nickel is sputtered on the surface of the cut energy beam sensitive resin to form a conductive film, and subsequently electroformed to a predetermined thickness to obtain a stamper ( Stamper process: see FIG. 1 (f)).

  Next, using this stamper, a polycarbonate resin is injection-molded by a known method to produce a polycarbonate resin substrate, and a reflective film is attached on the surface of the resin substrate on which the pit rows are formed, and the thickness is further increased. A polycarbonate resin having a thickness of 100 μm was pasted to produce an optical disc according to this example (molding / film formation process: see FIG. 1G).

  Next, the optical disk according to this example was measured for reproduction, and the signal waveform and the number of spike noises were examined. Specifically, in an optical disk having a diameter of 120 mm, a specific radius (hereinafter also referred to as R) 29.0 mm, 31.4 mm, 34.5 mm, 38.0 mm, 42.8 mm, 47.7 mm, 51.6 mm, 53 The number of spike noises appearing in one round of each radial position of 0.7 mm and 55.2 mm was obtained. When the intensity of light detected by irradiating an optical disk with a laser and reflecting it was 100%, there was no spike noise due to a defect (defect), and when the amount of light decreased, it was counted as a defect. Spike noise was counted as a defect when the amount of light was 50% or more and the amount of light was 50% or less, and the case where there were 10 or more in one round was determined as NG.

  The spike noise measurement results are not for R29.0mm, 3 for R31.0mm, 1 for R34.5mm, 1 for R38.0mm, 4 for R42.8mm, and 4 for R47.7mm One, a total of 3 for R51.6 mm, 2 for R53.7 mm, and 2 for R55.2 mm, satisfy the criteria.

  The results are shown in Table 1. FIG. 5A is a graph showing the relationship between the radial direction of the optical disk and spike noise. In this graph, typical spike noise is shown. In FIG. 5, the horizontal axis represents the disk radius position, and the vertical axis represents the optical attenuation of the reproduction signal. A horizontal line with a light attenuation of 0 indicates a signal without noise, and a vertical line extending downward from the horizontal line indicates spike noise and its length indicates the magnitude of noise (the magnitude of light attenuation).

  Similarly to this optical disc, nine other optical discs were produced and spike noise was measured. However, all of the optical discs passed the judgment criteria and were judged as non-defective products.

(Comparative Example 1)

  In the optical disk according to the present embodiment, in the energy ray-sensitive resin coating process using a stainless steel circular net, the mesh size is 1 mm (wire diameter 0.3 mm, pitch 1 mm) instead of the stainless steel circular net with a mesh size of 3 mm. The optical disc of Comparative Example 1 was obtained in the same manner as the optical disc according to the present example except that the stainless steel circular net was used.

  The spike noise of the optical disc of Comparative Example 1 was measured in the same manner as the optical disc according to this example.

  The spike noise measurement results are 72 for R29.0mm, 66 for R31.0mm, 60 for R34.5mm, 66 for R38.0mm, 75 for R42.8mm, and R47.7mm. Is a total of 93, R51.6 mm is a total of 110, R53.7 mm is a total of 129, and R55.2 mm is a total of 144.

The results are shown in Table 1 above. FIG. 5B is a graph showing the relationship between the radial direction of the optical disc of Comparative Example 1 and spike noise. In this graph, representative spike noise is shown, not all detected.
(Comparative Example 2)

  In the optical disk according to the present embodiment, in the energy ray-sensitive resin coating process using a stainless steel circular net, the mesh size is 10 mm (wire diameter 2 mm, pitch 10 mm) instead of the stainless steel circular net with a mesh size of 3 mm. The optical disk of Comparative Example 2 was obtained in the same manner as the optical disk according to this example except that a stainless steel circular net was used.

  The spike noise of the optical disk of Comparative Example 2 was measured in the same manner as the optical disk according to this example.

  The measurement results of spike noise are 129 in total for R29.0 mm, 134 in total for R31.0 mm, 144 in total for R34.5 mm, 116 in total for R38.0 mm, 100 in total for R42.8 mm, and R47.7 mm Is a total of 63, R51.6 mm is a total of 70, R53.7 mm is a total of 64, and R55.2 mm is a total of 56.

The results are shown in Table 1 above.
(Comparative Example 3)

  In the optical disk according to the present embodiment, in the energy ray sensitive resin coating process using the stainless steel circular net, the same procedure as that of the optical disk according to the present embodiment is performed except that the stainless circular net having a mesh size of 3 mm is not used. The optical disk of Comparative Example 3 was obtained.

  The spike noise of the optical disk of Comparative Example 3 was measured in the same manner as the optical disk according to this example.

  The measurement results of spike noise are 110 in total for R29.0 mm, 148 in total for R31.0 mm, 164 in total for R34.5 mm, 118 in total for R38.0 mm, 92 in total for R42.8 mm, and R47.7 mm Is a total of 69, R51.6 mm is a total of 71, R53.7 mm is a total of 61, and R55.2 mm is a total of 61.

  The results are shown in Table 1 above.

  In the optical disk according to the embodiment using a stainless steel circular net having a mesh size of 3 mm as a method for applying the energy ray sensitive resin, the signal waveform is not disturbed, and spike noise is suppressed to 10 or less at any measurement position. It has been.

  In the optical disk of Comparative Example 1 using a stainless steel circular net having a mesh size of 1 mm, the signal waveform was disturbed, there were many rapid voltage drops, and 100 or more spike noises could be confirmed.

  In Comparative Example 2 using a stainless steel circular net with a mesh size of 10 mm, the signal waveform was disturbed, there were many rapid voltage drops, and 100 or more spike noises could be confirmed.

  Even in Comparative Example 3 without the stainless steel circular net, the signal waveform was disturbed, there were many rapid voltage drops, and 100 or more spike noises could be confirmed.

  From the above, when applying the energy ray sensitive resin, by placing a stainless steel circular net with a mesh size of 3 mm on the outer periphery of the turntable, the spike noise in the optical disc to be finally produced can be greatly reduced, and cutting Fine patterns can be uniformly formed in the process, and finally, an optical disk having spike noise of 10 or less per round of a predetermined radius can be manufactured stably.

  The substrate has been described as having a diameter of 120 mm, but is not limited thereto, and may be 32 mm, 51 mm, 65 mm, 80 mm, 88 mm, 130 mm, 160 mm, 165 mm, 200 mm, 240 mm, and 300 mm. Moreover, although the thickness of the board | substrate was 1.2 mm, it is not restricted to this, 0.6 mm, 5 mm, 6 mm, 10 mm etc. may be sufficient. As the material of the substrate, soda lime glass is used as a substrate containing 40% or more of silicon oxide. However, the material is not limited to this, and silicon, wafer, quartz glass (silicon oxide 100%) can also be used.

It is process drawing which shows the Example of the manufacturing method of the glass original disc for information record carriers of this invention. It is a schematic block diagram of the resist coating machine used in an Example. It is a schematic block diagram of a stainless steel circular net. It is the elements on larger scale of a stainless steel circular net. It is a graph which shows the signal waveform of an optical disk. It is process drawing which shows the manufacturing method of the glass original disc for information record carriers of a prior art example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Operation part 2 Splash prevention cover 3 Turntable 4 Rotating shaft 5 Glass master 6 Stainless steel circular net 7 Motor 8 Resist 10 Resist coating machine 16 Wire

Claims (1)

While continuously flowing an aqueous solution containing abrasive particles between a disk-shaped glass substrate having a flat surface and a polishing disk, the surfaces of the glass substrate and the polishing disk are pressed against each other and rotated in opposite directions. A first step of polishing the surface of the glass substrate into a mirror surface while rotating in a direction;
A second step of wiping the abrasive particles remaining on the surface of the glass substrate processed into the mirror surface with a planar fine mesh while flowing an aqueous solution containing an active agent;
A third step of applying a silane-based binder having a predetermined thickness to the glass substrate surface from which the abrasive particles have been wiped off to make the glass substrate surface oleophilic;
The glass substrate is placed on a turntable having a circular net around it, and after the energy ray sensitive resin diluted to a predetermined viscosity is dropped on the lipophilic glass substrate surface, the turntable is By rotating the energy ray sensitive resin at a predetermined rotational speed and adsorbing unnecessary splashing splash generated on the circular net, the splashing splash is re-applied to the lipophilic glass substrate surface. And a fourth step of forming the energy ray-sensitive resin layer having a predetermined thickness on the surface of the oleophilic glass substrate while preventing the adhesion to the glass substrate. Manufacturing method.