JP2005020037A5 - - Google Patents

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Publication number
JP2005020037A5
JP2005020037A5 JP2004303592A JP2004303592A JP2005020037A5 JP 2005020037 A5 JP2005020037 A5 JP 2005020037A5 JP 2004303592 A JP2004303592 A JP 2004303592A JP 2004303592 A JP2004303592 A JP 2004303592A JP 2005020037 A5 JP2005020037 A5 JP 2005020037A5
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JP
Japan
Prior art keywords
laser device
semiconductor laser
waveguide
separation groove
stripe
Prior art date
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Application number
JP2004303592A
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English (en)
Japanese (ja)
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JP3849876B2 (ja
JP2005020037A (ja
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Priority to JP2004303592A priority Critical patent/JP3849876B2/ja
Priority claimed from JP2004303592A external-priority patent/JP3849876B2/ja
Publication of JP2005020037A publication Critical patent/JP2005020037A/ja
Publication of JP2005020037A5 publication Critical patent/JP2005020037A5/ja
Application granted granted Critical
Publication of JP3849876B2 publication Critical patent/JP3849876B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004303592A 2000-06-08 2004-10-18 半導体レーザ素子及びその製造方法 Expired - Lifetime JP3849876B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004303592A JP3849876B2 (ja) 2000-06-08 2004-10-18 半導体レーザ素子及びその製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000172797 2000-06-08
JP2001116197 2001-04-13
JP2004303592A JP3849876B2 (ja) 2000-06-08 2004-10-18 半導体レーザ素子及びその製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001125215A Division JP3716974B2 (ja) 2000-06-08 2001-04-24 半導体レーザ素子及びその製造方法

Publications (3)

Publication Number Publication Date
JP2005020037A JP2005020037A (ja) 2005-01-20
JP2005020037A5 true JP2005020037A5 (enrdf_load_stackoverflow) 2005-07-21
JP3849876B2 JP3849876B2 (ja) 2006-11-22

Family

ID=34198642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004303592A Expired - Lifetime JP3849876B2 (ja) 2000-06-08 2004-10-18 半導体レーザ素子及びその製造方法

Country Status (1)

Country Link
JP (1) JP3849876B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4952376B2 (ja) 2006-08-10 2012-06-13 三菱電機株式会社 光導波路と半導体光集積素子の製造方法
JP7573837B2 (ja) 2020-01-08 2024-10-28 旭化成株式会社 光学装置の製造方法及び光学装置

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