JP2005012996A - リトグラフ装置、素子製造方法およびこの方法で製造される素子 - Google Patents

リトグラフ装置、素子製造方法およびこの方法で製造される素子 Download PDF

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Publication number
JP2005012996A
JP2005012996A JP2004156996A JP2004156996A JP2005012996A JP 2005012996 A JP2005012996 A JP 2005012996A JP 2004156996 A JP2004156996 A JP 2004156996A JP 2004156996 A JP2004156996 A JP 2004156996A JP 2005012996 A JP2005012996 A JP 2005012996A
Authority
JP
Japan
Prior art keywords
windings
coil
platen
directions
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004156996A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005012996A5 (enExample
Inventor
Sven Antoin Johan Hol
アントイン ヨハン ホル スフェン
Cornelis Compter Johan
コルネリス コムプテル ヨハン
Erik Roelof Loopstra
ロエロフ ロープシュトラ エリク
Patricia Vreugdewater
フロイクデヴァテル パトリシア
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Netherlands BV
Original Assignee
ASML Netherlands BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML Netherlands BV filed Critical ASML Netherlands BV
Publication of JP2005012996A publication Critical patent/JP2005012996A/ja
Publication of JP2005012996A5 publication Critical patent/JP2005012996A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H02K7/09—Structural association with bearings with magnetic bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/025—Asynchronous motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
    • H02N15/02—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for by Foucault currents
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Linear Motors (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Linear Motors (AREA)
JP2004156996A 2003-05-28 2004-05-27 リトグラフ装置、素子製造方法およびこの方法で製造される素子 Pending JP2005012996A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP03076645 2003-05-28

Publications (2)

Publication Number Publication Date
JP2005012996A true JP2005012996A (ja) 2005-01-13
JP2005012996A5 JP2005012996A5 (enExample) 2005-06-23

Family

ID=34089662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004156996A Pending JP2005012996A (ja) 2003-05-28 2004-05-27 リトグラフ装置、素子製造方法およびこの方法で製造される素子

Country Status (2)

Country Link
US (1) US7161267B2 (enExample)
JP (1) JP2005012996A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7288859B2 (en) * 2004-01-30 2007-10-30 Nikon Corporation Wafer stage operable in a vacuum environment
US7602087B2 (en) * 2006-10-19 2009-10-13 Asm Assembly Automation Ltd. Linear motor having dual coil configuration
WO2009083870A2 (en) * 2007-12-26 2009-07-09 Koninklijke Philips Electronics N.V. Six degrees of freedom direct drive induction motor apparatus and method
WO2019158448A1 (en) 2018-02-14 2019-08-22 Asml Netherlands B.V. Substrate positioning device and electron beam inspection tool
TW202516998A (zh) * 2020-02-20 2025-04-16 美商布魯克斯自動機械美國公司 線性電機、電磁輸送帶基板輸送裝置、及用於電磁輸送帶基板輸送裝置的方法
US12206342B2 (en) 2021-10-29 2025-01-21 Brooks Automation Us, Llc Substrate processing apparatus

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04150706A (ja) 1990-10-12 1992-05-25 Mitsubishi Heavy Ind Ltd 交流磁気浮上体の停止方法
US5180048A (en) 1990-10-12 1993-01-19 Mitsubishi Jukogyo Kabushiki Kaisha Magnetic levitating transportation system
EP0529157A1 (en) * 1991-08-22 1993-03-03 Mitsubishi Jukogyo Kabushiki Kaisha Alternating current magnetic levitation transport system
US5334892A (en) * 1992-12-22 1994-08-02 Anorad Corporation Positioning device for planar positioning
US6175169B1 (en) * 1999-05-03 2001-01-16 Ralph L. Hollis, Jr. Closed-loop planar linear motor with integral monolithic three-degree-of-freedom AC-magnetic position/orientation sensor
JP2002176761A (ja) 2000-12-08 2002-06-21 Canon Inc リニアモータ及び該リニアモータを用いた露光装置

Also Published As

Publication number Publication date
US20050061626A1 (en) 2005-03-24
US7161267B2 (en) 2007-01-09

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