JP2005012635A - Piezoelectric device - Google Patents

Piezoelectric device Download PDF

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Publication number
JP2005012635A
JP2005012635A JP2003176430A JP2003176430A JP2005012635A JP 2005012635 A JP2005012635 A JP 2005012635A JP 2003176430 A JP2003176430 A JP 2003176430A JP 2003176430 A JP2003176430 A JP 2003176430A JP 2005012635 A JP2005012635 A JP 2005012635A
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Japan
Prior art keywords
piezoelectric device
piezoelectric
conductive adhesive
recessed portion
crystal
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JP2003176430A
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Japanese (ja)
Inventor
Ippei Hakozaki
一平 箱崎
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Toyo Communication Equipment Co Ltd
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Toyo Communication Equipment Co Ltd
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Priority to JP2003176430A priority Critical patent/JP2005012635A/en
Publication of JP2005012635A publication Critical patent/JP2005012635A/en
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface-mounted piezoelectric device which is enabled in miniaturization and enhances the strength of bonding with a conductive adhesive used as a means for connecting a piezoelectric vibrating element into a package. <P>SOLUTION: The piezoelectric device is characterized by comprising a crystal oscillator element 1 equipped with a crystal oscillator element body (AT cut crystal substrate) 1a which has the same notched portion 1d in each of both corners in one terminal (on one short side) in the lengthwise direction and becomes shorter and smaller than the other short side, an exciting electrode 1b which is disposed approximately in the center of each of both principal surfaces of the crystal substrate 1a, and a lead electrode 1c extending from the exciting electrode 1b to the edge of the notched portion 1d, a ceramic package (printed wiring board) 2 equipped with a recessed portion 3 for housing the crystal oscillator element 1 on its upper surface, and a metal lid member 4 for sealing an opening of the recessed portion 3. The piezoelectric device is also characterized by having a structure for air-tightly sealing the recessed portion 3 with the lid member 4 after cantilever support and electrical connection using one terminal of the crystal oscillator element 1 in the lengthwise direction with the conductive adhesive 6 to a pad electrode 5 which is formed on an inner bottom face of the recessed portion 3. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

【0001】
【発明の属する技術分野】
本発明は、振動子やフィルタ等として使用される表面実装型圧電デバイスに関し、特に圧電振動素子をパッケージ内に接続する手段として導電性接着剤を用いた場合に発生する種々の不具合を解決した表面実装型圧電デバイスに関する。
【0002】
【従来の技術】
携帯電話機等の移動体通信機器の普及に伴う低価格化及び小型化の急激な進展により、これらの通信機器において周波数制御デバイスとして用いられる水晶共振子(振動子、フィルタ)に対しても低価格化及び小型化の要求が高まっている。
【0003】
以下、従来の圧電デバイスについて説明する。
従来の電子部品用パッケージには、
例えば特開2001−77656号公報で提案されたようなものがあり、
発振子を用いて説明する。
図3(a)は従来の圧電デバイスである水晶振動子の構成を示す縦断面図、図3(b)は水晶振動素子の接合部分を示す斜視図である。
この圧電デバイスは、表面実装用にパッケージ化された水晶振動子である。この水晶振動子100は、両主面に配設する励振電極と該励振電極夫々から長手方向の一方端部(一方の短辺)に延出する引出し電極101aとを備える略矩形状の水晶振動素子101と、上面に該水晶振動素子101を収容するためのキャビティー部103を備えるセラミックパッケージ102と、該キャビティー部103の開口を封止するための蓋体104と、から構成されている。前記キャビティー部103の内底面に配設した電極パッド105上に導電性接着剤106を介して水晶振動素子101を片持ち状態で固着接続した上で、キャビティー部103の開口を蓋体104により気密封止する。
【0004】
前記導電性接着剤106は、一般的に可撓性に優れ被着体(前記水晶振動素子101)への歪み(硬化歪み)を最小限に押さえることができるシリコーン系導電性接着剤が用いられる。しかし、シリコーン系導電性接着剤を用いた場合、接着強度が弱いので衝撃等のショックにより剥離が発生し易く、衝撃に対する仕様が厳しい移動体通信機器に使用される水晶振動子にあっては、接着強度の弱い軟質の接着剤は不向きである。そこで従来では、導電性接着剤106を水晶振動素子101の一方端部(一方の短辺)の幅方向及び長辺側の長手方向のそれぞれ外方位置になるように前記電極パッド105に塗布し、前記引出し電極101aが当接するように水晶振動素子101を載置する。その際、水晶振動素子101の一方の短辺の両端の角部が導電性接着剤106の中心部(盛り上がりの頂点部分)より短辺側及び長辺側ともに外方位置するように載置している。その結果、この導電性接着部材が圧電振動子の一方側短辺の両角部となる端面、即ち、短辺側端面及び長辺側端面に夫々導電性接着部材が塗布されることになる。これにより、前記セラミックパッケージ102と水晶振動素子101との接合が該水晶振動素子101の一方の短辺側端面と、2つの長辺側端面と、で行なわれ、合計3つの端面で接合固定されることになる。従って、その接合強度が向上し、落下等により外部から衝撃が加わった場合、この接合部分で剥離が発生しにくくなり、発振周波数が大きく変化したり、発振不良を発生してしまうことがない。
【0005】
【特許文献】
特開2001−77656号公報。
【0006】
【発明が解決しようとする課題】
図4は水晶振動素子とキャビティー部との位置関係による接合部分の差異を示す模式図である。
しかしながら、近年の圧電デバイスの更なる小型化の要求を満足するために、前記セラミックパッケージ102の小型化、即ち前記キャビティー部103の内壁面と前記水晶振動素子101の端面とのクリアランスを狭小化しなければならない。この狭小なクリアランスでは水晶振動素子101と前記導電性接着剤106との前述する配置関係を確保することができず、前記フィレット107を形成することができない。この狭小なクリアランス内にフィレット107を形成した場合、図4(a)に示すように、水晶振動素子101の上面側に実質的に導電性接着剤106が付着しない。しかし、図4(b)に示すように、導電性接着剤106が近接するキャビティー部103の内壁面によって導電性接着剤106が水晶振動素子101の(平面)外方向に拡がらず上方向に展開し、その結果、導電性接着剤106が水晶振動素子101の上面に付着(符号110)し発振特性が変動することがある。
【0007】
そこで、特許文献の従来例として開示されている手段として、前記電極パッド上に前記導電性接着剤を塗布しておき、前記水晶振動素子を載置し、さらに、その後、水晶振動素子の上面側から、先に塗布した導電性接着剤と導通するように再度、導電性接着剤を塗布する手段がある。この手段では、後塗布(2回目)の導電性接着剤を意図した位置に塗布することができるため、該後塗布の導電性接着剤が水晶振動素子の発振特性に影響を及ぼすことはないが、前述する2つの長辺側の端面のフィレット107が形成することができないため、接合強度の向上が望めない。
【0008】
本発明は、上記の課題を解決するためになされたものであり、小型化に対応し、且つ、圧電振動素子をパッケージ内に接続する手段として用いた導電性接着剤との接合強度を向上させた表面実装型圧電デバイスを提供することを目的とする。
【0009】
【課題を解決するための手段】
上記課題を解決するために本発明に係わる請求項1記載の発明は、両主面に配設する励振電極と該励振電極のそれぞれから延出するリード電極とを備える圧電振動素子と、上面に該圧電振動素子を収容するための凹陥部を備える第1のプリント配線基板と、該凹陥部の開口を閉止するための金属製の蓋部材と、を備え、前記凹陥部の内底面に形成したパッド電極に導電性接着剤を介して前記圧電振動素子を機械的及び電気的に接続した上で前記蓋部材により凹陥部を気密封止した圧電振動素子であって、前記圧電振動子の外周縁に切り欠き部を形成し該切り欠き部の周縁に前記リード電極の終端を配設したことを特徴とする。
【0010】
また請求項2記載の発明は、請求項1において、前記切り欠き部を前記圧電振動素子の角部に形成したことを特徴とする。
【0011】
また請求項3記載の発明は、請求項1又は2において、前記切り欠き部を前記圧電振動素子の辺部に形成したことを特徴とする。
【0012】
また請求項4記載の発明は、請求項1乃至3のいずれかにおいて、前記圧電振動素子の一方の主面に凹部を形成したことを特徴とする。
【0013】
また請求項5記載の発明は、請求項1乃至4のいずれかにおいて、前記導電性接着剤を2度塗布したことを特徴とする。
【0014】
また請求項6記載の発明は、請求項1乃至5のいずれかにおいて、前記凹陥部に発振回路及び温度補償回路を構成する回路素子を収容したことを特徴とする。
【0015】
また請求項7記載の発明は、請求項1乃至5のいずれかにおいて、前記第1のプリント配線基板の下面に第2の凹陥部を形成し、該第2の凹陥部に前記回路素子を実装したことを特徴とする。
【0016】
また請求項8記載の発明は、請求項1乃至5のいずれかに記載の圧電デバイスと、前記回路素子と、該回路素子を実装するための第2のプリント配線基板と、を備え、前記圧電デバイスの下方に前記回路素子を実装した前記第2のプリント配線基板を機械的及び電気的に接続したことを特徴とする。
【0017】
【発明の実施の形態】
以下、図示した本発明の実施の形態に基づいて、本発明を詳細に説明する。
【0018】
図1(a)は本発明の第1の実施形態の圧電デバイスとして水晶振動子の蓋部材を省略した状態の上面図、図1(b)はその縦断面図、図1(c)は本発明実施形態に係わる水晶振動素子の接合部分の斜視図である。
第1の実施形態の水晶振動子は、平板状の水晶振動素子1と、上面に該水晶振動素子1を収容するための凹陥部3を備えるセラミックパッケージ(第1のプリント配線基板)2と、前記凹陥部3の開口を閉止する金属製の蓋部材4と、を備えている。該凹陥部3の内底面に形成したパッド電極5に導電性接着剤6を介して前記水晶振動素子1の長手方向の一方端部で片持ち支持すると共に電気的な接続をした上で蓋部材4により該凹陥部3を気密封止する構造を有する。
【0019】
前記水晶振動素子1は、長手方向の一方端部(一方の短辺)の両角部にそれぞれ同一(位置、形状、大きさ等)の切り欠き部1dを有し他方の短辺より短小となる、即ち平面外形が略凸状になっている水晶振動素子本体(ATカット水晶基板)1aと、該水晶基板1aの両主面の略中央に配設する励振電極1bと、該励振電極1bからそれぞれ切り欠き部1dの周縁へ延出するリード電極1cと、を備えたものである。
【0020】
前記導電性接着剤6はシリコーン系導電性接着剤であって、該導電性接着剤6の中心部(盛り上がりの頂点部分)が前記切り欠き部1dの内側、例えば導電性接着剤6の中心部と切り欠き部1dの(平面)中心とが略一致する前記パッド電極5上の位置に塗布し、前記リード電極1cが当接するように前記水晶振動素子1を載置する。これにより、切り欠き部1dの下面周縁とパッド電極5との間隙及び切り欠き部1dの内端面に導電性接着剤6が配設される(内端面にはフィレット7が形成される。)ことになる。これにより、その接合強度が向上し、落下等により外部から衝撃が加わった場合、この接合部分で剥離が発生しにくくなる。
【0021】
更なる前記接合強度の向上のためには、前記導電性接着剤を介して前記パッド電極上に載置した前記水晶振動素子(前記リード電極)の上面側から、先に塗布した導電性接着剤と導通するように再度、導電性接着剤を塗布する(2度塗布)するのが望ましい。
【0022】
第1の実施形態、即ち一方の短辺の両角部にそれぞれ前記切り欠き部1d(及び前記リード電極1c)を備えた前記水晶振動素子1を用いて本発明を説明したが、その他の水晶振動素子の支持方法、例えば4点支持(水晶振動素子の一方の短辺の両角部で機械的及び電気的に接合し、他方の短辺の両角部で機械的に接合する方法を示す。)の場合は、切り欠き部(及びリード電極)を水晶振動素子の四隅に形成する(水晶振動素子の平面形状が略十字状となる。)と共に、前述する前記導電性接着剤と水晶振動素子との位置関係を維持することで、本発明の第2の実施形態の圧電デバイスとしての水晶振動子となる。
【0023】
第1及び2の実施形態、即ち一方の短辺の両角部に及び四隅に前記切り欠き部(及びリード電極)を備えた前記水晶振動素子を用いて本発明を説明したが、水晶振動素子の支持方法、例えば両端支持(水晶振動素子の対向する短辺夫々の略中央で機械的及び電気的に接合する方法を示す。)の場合は、切り欠き部(及びリード電極)を水晶振動素子の対向する短辺夫々の略中央に形成する(水晶振動素子の平面形状が略H字状となる。)と共に、前述する前記導電性接着剤と水晶振動素子との位置関係を維持することで、本発明の第3の実施形態の圧電デバイスとしての水晶振動子となる。
【0024】
第1乃至3の実施形態、即ち角部に若しくは辺部にのみ前記切り欠き部(及び前記リード電極)を備えた前記水晶振動素子を用いて本発明を説明したが、例えば、水晶振動素子の一方の短辺の両角部で機械的及び電気的に接合し、他方の短辺の略中央で機械的に接合する(3点支持)と共に、前述する前記導電性接着剤と水晶振動素子との位置関係を維持することで、本発明の第4の実施形態の圧電デバイスとしての水晶振動子となる。
【0025】
図2(a)は本発明の第5の実施形態の圧電デバイスとして水晶振動子の蓋部材を省略した状態の上面図、図2(b)はその縦断面図である。
第5の実施形態の水晶振動子が第1乃至4の実施形態と異なる点は、前記水晶素板1aの一方主面の一部に凹部を形成した点にある。図2に示すように、第4の実施形態に係わる水晶振動素子21(水晶基板21a)は、その一方主面の略中央を化学エッチングやイオンエッチング加工などの手法により任意の形状に凹部21bを形成し、該凹部21bの内底面に薄板領域(振動部)21cを形成し、該薄板領域21cを囲繞する外周部を厚肉の補強部21dとしている。凹部21bの形成と同時に、水晶素板21aの所望の位置、例えば長手方向の一方端部の両隅部に切り欠き部21eを形成する。薄板領域21cの両主面には夫々任意の形状で励振電極22を形成し該励振電極22のそれぞれから切り欠き部21eの周縁へ引き出されたリード電極23を形成すると共に、前述する前記導電性接着剤と水晶振動素子との位置関係を維持することで、本発明の第4の実施形態の圧電デバイスとしての水晶振動子となる。
また、薄板領域(振動部)21cに部分電極を配設する多重モード水晶フィルタにも本発明を適用することも可能である。
【0026】
第1乃至5の実施形態、即ち水晶振動子を用いて本発明を説明したが、前記凹陥部3の内底面に第2の凹陥部を形成し該第2の凹陥部の内底面に発振回路及び温度補償回路を構成する回路素子、例えばICチップを実装すると共に、凹陥部3に前記水晶振動素子を収容する、所謂シングルシール型水晶発振器(本発明の第6の実施形態)でも構わない。
【0027】
第6の実施形態、即ちシングルシール型水晶発振器を用いて本発明を説明したが、第7の実施形態の水晶発振器は前記ICチップを実装したセラミック容器(第2のプリント配線基板)を第1乃至4の実施形態である水晶振動子の下面に実装したことを特徴とする。前記セラミック容器はその上面に前記ICチップを収容するための凹所を備え、該凹所の内底面にICチップをフリップチップ実装し、前記水晶振動子により凹所の開口を閉止すると共に電気的及び機械的に接続する、所謂ダブルシール型水晶発振器でも構わない。
【0028】
第8の実施形態の水晶発振器は、前記セラミックパッケージの下面に第2の凹陥部を一体形成し該第2の凹陥部の内底面に前記ICチップを実装すると共に、前記凹陥部に前記水晶振動素子を収容する、所謂H型水晶発振器でも構わない。
【0029】
前記回路素子は前記ICチップのみならず、発振回路および温度補償回路を構成するディスクリート部品であっても構わない。またICチップに供給される電源電圧に重畳される高周波ノイズを除去するためのコンデンサ等の電子部品を前記凹陥部又は第2の凹陥部に収容しても構わない。
【0030】
TCXOを用いて本発明を説明したが、基本波若しくはオーバートーンの水晶発振子、VC−TCXO、VCXO、OCXO、SAW発振器等のデバイスに適用できることは云うまでもない。
【0031】
ATカット水晶基板を用いて本発明を説明したが、本発明はATカットに限定するものではなくBTカット、CTカット、DTカット、SCカット、GTカット等のカットアングルの水晶基板に適用できることは云うまでもない。
【0032】
また本発明は、水晶基板のみに限定するものではなくランガサイト、四方酸リチウム、タンタル酸リチウム、ニオブ酸リチウム等の圧電振動素子に適用できることは云うまでもない。
【0033】
【発明の効果】
本発明によれば、小型化に対応し、且つ、圧電振動素子をパッケージ内に接続する手段として用いた導電性接着剤との接合強度を向上させた表面実装型圧電デバイスが得られるという効果を有する。
【図面の簡単な説明】
【図1】本発明の第1の実施形態としての水晶振動子の構成図。
(a)蓋部材を省略した状態の上面図。
(b)A−A縦断面図。
(c)本発明実施形態に係わる水晶振動素子の接合部分の斜視図。
【図2】本発明の第5の実施形態としての水晶振動子の構成図。
(a)蓋部材を省略した状態の上面図。
(b)A−A縦断面図。
【図3】従来の水晶振動子の構成図。
(a)縦断面図。
(b)水晶振動素子の接合部分を示す斜視図。
【図4】従来の水晶振動素子の接合部分の差異を示す模式図。
【符号の説明】
1…水晶振動素子 1a…水晶振動素子本体(ATカット水晶基板)
1b…励振電極 1c…リード電極 1d…切り欠き部
2…セラミックパッケージ(プリント配線基板) 3…凹陥部 4…蓋部材
5…パッド電極 6…導電性接着剤 7…フィレット
21…水晶振動素子 21a…水晶基板 21b…凹部
21c…薄板領域(振動部) 21d…補強部 21e…切り欠き部
22…励振電極 23…リード電極 100…水晶振動子
101…水晶振動素子 101a…引出し電極
102…セラミックパッケージ 103…キャビティー部 104…蓋体
105…電極パッド 106…導電性接着剤 107…フィレット
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a surface-mounted piezoelectric device used as a vibrator, a filter, or the like, and in particular, a surface that solves various problems that occur when a conductive adhesive is used as a means for connecting a piezoelectric vibration element in a package. The present invention relates to a mounting type piezoelectric device.
[0002]
[Prior art]
Due to the rapid progress in price reduction and miniaturization accompanying the popularization of mobile communication devices such as mobile phones, the cost of crystal resonators (vibrators, filters) used as frequency control devices in these communication devices is also low. There is a growing demand for downsizing and downsizing.
[0003]
Hereinafter, a conventional piezoelectric device will be described.
Conventional electronic component packages include
For example, there is something proposed in Japanese Patent Application Laid-Open No. 2001-77656,
This will be described using an oscillator.
FIG. 3A is a longitudinal sectional view showing a configuration of a crystal resonator which is a conventional piezoelectric device, and FIG. 3B is a perspective view showing a joint portion of the crystal resonator element.
This piezoelectric device is a crystal resonator packaged for surface mounting. The quartz crystal resonator 100 includes a substantially rectangular quartz crystal vibration including excitation electrodes disposed on both main surfaces and an extraction electrode 101a extending from one of the excitation electrodes to one end (one short side) in the longitudinal direction. It is composed of an element 101, a ceramic package 102 having a cavity 103 for accommodating the crystal resonator element 101 on the upper surface, and a lid 104 for sealing the opening of the cavity 103. . The crystal resonator element 101 is fixedly connected in a cantilever manner to the electrode pad 105 disposed on the inner bottom surface of the cavity portion 103 via a conductive adhesive 106, and the opening of the cavity portion 103 is opened to the lid 104. Airtightly sealed.
[0004]
The conductive adhesive 106 is generally a silicone-based conductive adhesive that is excellent in flexibility and can minimize distortion (curing strain) to the adherend (the quartz crystal vibration element 101). . However, when a silicone-based conductive adhesive is used, the adhesive strength is weak, so peeling easily occurs due to shock such as impact, and in a crystal resonator used in mobile communication equipment with strict specifications for impact, Soft adhesives with weak adhesive strength are not suitable. Therefore, conventionally, the conductive adhesive 106 is applied to the electrode pad 105 so as to be at the outer positions in the width direction of the one end portion (one short side) and the long side of the long side. The crystal resonator element 101 is placed so that the extraction electrode 101a comes into contact therewith. At that time, the quartz vibrating element 101 is placed so that the corners at both ends of one short side are located outward from both the short side and the long side with respect to the central part of the conductive adhesive 106 (the peak portion of the bulge). ing. As a result, the conductive adhesive member is applied to the end surfaces that are both corners of one short side of the piezoelectric vibrator, that is, the short side end surface and the long side end surface, respectively. As a result, the ceramic package 102 and the crystal resonator element 101 are bonded to each other at one short side end surface and two long side end surfaces of the crystal resonator element 101, and are bonded and fixed at a total of three end surfaces. Will be. Accordingly, the bonding strength is improved, and when an impact is applied from the outside due to dropping or the like, peeling does not easily occur at the bonded portion, and the oscillation frequency does not change greatly or an oscillation failure does not occur.
[0005]
[Patent Literature]
JP 2001-77656 A.
[0006]
[Problems to be solved by the invention]
FIG. 4 is a schematic diagram showing the difference in the joint portion depending on the positional relationship between the crystal resonator element and the cavity portion.
However, in order to satisfy the demand for further miniaturization of the piezoelectric device in recent years, the ceramic package 102 is miniaturized, that is, the clearance between the inner wall surface of the cavity portion 103 and the end surface of the crystal resonator element 101 is narrowed. There must be. With this narrow clearance, the above-described positional relationship between the crystal resonator element 101 and the conductive adhesive 106 cannot be ensured, and the fillet 107 cannot be formed. When the fillet 107 is formed within this narrow clearance, the conductive adhesive 106 does not substantially adhere to the upper surface side of the crystal resonator element 101 as shown in FIG. However, as shown in FIG. 4B, the conductive adhesive 106 does not spread in the (planar) outward direction of the crystal resonator element 101 by the inner wall surface of the cavity portion 103 to which the conductive adhesive 106 is adjacent, and the upward direction. As a result, the conductive adhesive 106 may adhere to the upper surface of the crystal resonator element 101 (reference numeral 110) and the oscillation characteristics may vary.
[0007]
Therefore, as a means disclosed as a conventional example of the patent document, the conductive adhesive is applied on the electrode pad, the crystal resonator element is mounted, and then the upper surface side of the crystal resonator element Therefore, there is a means for applying the conductive adhesive again so as to be electrically connected to the previously applied conductive adhesive. With this means, the post-applied (second time) conductive adhesive can be applied to the intended position, so that the post-applied conductive adhesive does not affect the oscillation characteristics of the crystal resonator element. Since the above-described fillets 107 on the two long sides cannot be formed, it is not possible to improve the bonding strength.
[0008]
The present invention has been made in order to solve the above-described problems, and is capable of reducing the size and improving the bonding strength with a conductive adhesive used as a means for connecting a piezoelectric vibration element in a package. Another object is to provide a surface-mounted piezoelectric device.
[0009]
[Means for Solving the Problems]
In order to solve the above-mentioned problem, the invention according to claim 1 according to the present invention includes a piezoelectric vibration element including excitation electrodes disposed on both main surfaces and lead electrodes extending from the excitation electrodes, and an upper surface. A first printed wiring board having a recessed portion for accommodating the piezoelectric vibration element; and a metal lid member for closing the opening of the recessed portion, and formed on the inner bottom surface of the recessed portion. A piezoelectric vibration element in which the piezoelectric vibration element is mechanically and electrically connected to a pad electrode via a conductive adhesive, and the concave portion is hermetically sealed by the lid member, and the outer peripheral edge of the piezoelectric vibrator A notch is formed in the notch, and the end of the lead electrode is disposed on the periphery of the notch.
[0010]
According to a second aspect of the present invention, in the first aspect, the notch is formed at a corner of the piezoelectric vibration element.
[0011]
According to a third aspect of the present invention, in the first or second aspect, the notch portion is formed in a side portion of the piezoelectric vibration element.
[0012]
According to a fourth aspect of the present invention, in any one of the first to third aspects, a concave portion is formed on one main surface of the piezoelectric vibration element.
[0013]
A fifth aspect of the invention is characterized in that in any one of the first to fourth aspects, the conductive adhesive is applied twice.
[0014]
According to a sixth aspect of the present invention, in any one of the first to fifth aspects, a circuit element constituting an oscillation circuit and a temperature compensation circuit is accommodated in the recessed portion.
[0015]
According to a seventh aspect of the present invention, in any one of the first to fifth aspects, a second recessed portion is formed on a lower surface of the first printed wiring board, and the circuit element is mounted on the second recessed portion. It is characterized by that.
[0016]
According to an eighth aspect of the present invention, the piezoelectric device according to any one of the first to fifth aspects, the circuit element, and a second printed wiring board for mounting the circuit element are provided, and the piezoelectric element is provided. The second printed wiring board on which the circuit element is mounted is mechanically and electrically connected below the device.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in detail based on illustrated embodiments of the present invention.
[0018]
FIG. 1A is a top view of the piezoelectric device according to the first embodiment of the present invention in a state where the lid member of the crystal resonator is omitted, FIG. 1B is a longitudinal sectional view thereof, and FIG. It is a perspective view of the junction part of the crystal oscillation element concerning invention embodiment.
The crystal resonator according to the first embodiment includes a plate-shaped crystal resonator element 1 and a ceramic package (first printed wiring board) 2 including a concave portion 3 for accommodating the crystal resonator element 1 on the upper surface, And a metal lid member 4 that closes the opening of the recessed portion 3. The pad electrode 5 formed on the inner bottom surface of the recessed portion 3 is cantilevered at one end in the longitudinal direction of the quartz crystal vibration element 1 via the conductive adhesive 6 and electrically connected to the lid member. 4 has a structure in which the recess 3 is hermetically sealed.
[0019]
The crystal resonator element 1 has notches 1d having the same (position, shape, size, etc.) at both corners of one end (one short side) in the longitudinal direction, and is shorter than the other short side. In other words, the crystal resonator element main body (AT-cut crystal substrate) 1a having a substantially convex planar outer shape, the excitation electrode 1b disposed substantially at the center of both main surfaces of the crystal substrate 1a, and the excitation electrode 1b And a lead electrode 1c extending to the periphery of the notch 1d.
[0020]
The conductive adhesive 6 is a silicone-based conductive adhesive, and the central portion of the conductive adhesive 6 (the peak portion of the bulge) is inside the notch 1d, for example, the central portion of the conductive adhesive 6 Is applied to a position on the pad electrode 5 where the (planar) center of the notch 1d substantially coincides, and the crystal resonator element 1 is placed so that the lead electrode 1c contacts. Thereby, the conductive adhesive 6 is disposed on the gap between the lower surface periphery of the notch 1d and the pad electrode 5 and the inner end face of the notch 1d (fillet 7 is formed on the inner end face). become. As a result, the bonding strength is improved, and when an impact is applied from the outside due to dropping or the like, peeling is unlikely to occur at the bonded portion.
[0021]
In order to further improve the bonding strength, the conductive adhesive previously applied from the upper surface side of the quartz crystal vibration element (the lead electrode) placed on the pad electrode via the conductive adhesive. It is desirable to apply the conductive adhesive again (apply twice) so as to be conductive.
[0022]
Although the present invention has been described using the first embodiment, that is, the crystal resonator element 1 provided with the notches 1d (and the lead electrode 1c) at both corners of one short side, the other crystal vibrations have been described. A method of supporting the element, for example, four-point support (showing a method of mechanically and electrically joining at both corners of one short side of the crystal vibrating element and mechanically joining at both corners of the other short side). In this case, notches (and lead electrodes) are formed at the four corners of the crystal resonator element (the planar shape of the crystal resonator element is substantially cross-shaped), and the conductive adhesive and the crystal resonator element described above are used. By maintaining the positional relationship, the crystal resonator as the piezoelectric device of the second embodiment of the present invention is obtained.
[0023]
Although the present invention has been described using the first and second embodiments, that is, the crystal resonator element provided with the notches (and lead electrodes) at both corners of one short side and at the four corners, In the case of a support method, for example, both-end support (showing a method of mechanically and electrically joining at approximately the center of each of the opposing short sides of the crystal resonator element), the notch (and the lead electrode) is connected to the crystal resonator element. By forming at the approximate center of each of the opposing short sides (the planar shape of the crystal resonator element is substantially H-shaped), and maintaining the positional relationship between the conductive adhesive and the crystal resonator element described above, A crystal resonator is provided as the piezoelectric device according to the third embodiment of the present invention.
[0024]
Although the present invention has been described using the first to third embodiments, that is, the crystal resonator element including the notch portion (and the lead electrode) only at the corner portion or the side portion, for example, It is mechanically and electrically joined at both corners of one short side and mechanically joined at the approximate center of the other short side (three-point support), and the conductive adhesive and the crystal resonator element described above By maintaining the positional relationship, the crystal resonator as the piezoelectric device of the fourth embodiment of the present invention is obtained.
[0025]
FIG. 2A is a top view of the piezoelectric device according to the fifth embodiment of the present invention with the lid member of the crystal resonator omitted, and FIG. 2B is a longitudinal sectional view thereof.
The crystal resonator of the fifth embodiment is different from the first to fourth embodiments in that a concave portion is formed on a part of one main surface of the crystal base plate 1a. As shown in FIG. 2, the quartz resonator element 21 (quartz substrate 21a) according to the fourth embodiment has a concave portion 21b formed in an arbitrary shape by using a technique such as chemical etching or ion etching at the center of one main surface. The thin plate region (vibrating portion) 21c is formed on the inner bottom surface of the recess 21b, and the outer peripheral portion surrounding the thin plate region 21c is a thick reinforcing portion 21d. Simultaneously with the formation of the recess 21b, notches 21e are formed at desired positions of the quartz base plate 21a, for example, at both corners at one end in the longitudinal direction. Excitation electrodes 22 are formed in arbitrary shapes on both main surfaces of the thin plate region 21c, and lead electrodes 23 are formed from the excitation electrodes 22 to the periphery of the cutout portion 21e. By maintaining the positional relationship between the adhesive and the crystal resonator element, a crystal resonator as a piezoelectric device according to the fourth embodiment of the present invention is obtained.
The present invention can also be applied to a multimode crystal filter in which a partial electrode is disposed in the thin plate region (vibrating portion) 21c.
[0026]
Although the present invention has been described using the first to fifth embodiments, that is, the crystal resonator, the second concave portion is formed on the inner bottom surface of the concave portion 3, and the oscillation circuit is formed on the inner bottom surface of the second concave portion. In addition, a so-called single-seal crystal oscillator (sixth embodiment of the present invention) in which a circuit element, such as an IC chip, constituting a temperature compensation circuit is mounted and the crystal resonator element is accommodated in the recess 3 may be used.
[0027]
Although the present invention has been described using the sixth embodiment, that is, a single seal type crystal oscillator, the crystal oscillator according to the seventh embodiment uses a ceramic container (second printed wiring board) mounted with the IC chip as a first. It is characterized by being mounted on the lower surface of the crystal unit according to any of the fourth to fourth embodiments. The ceramic container is provided with a recess for accommodating the IC chip on the upper surface thereof, the IC chip is flip-chip mounted on the inner bottom surface of the recess, the opening of the recess is closed by the crystal resonator, and electrical Also, a so-called double seal crystal oscillator that is mechanically connected may be used.
[0028]
In the crystal oscillator according to the eighth embodiment, a second recessed portion is integrally formed on the lower surface of the ceramic package, the IC chip is mounted on the inner bottom surface of the second recessed portion, and the crystal vibration is mounted on the recessed portion. A so-called H-type crystal oscillator that accommodates the element may be used.
[0029]
The circuit element may be not only the IC chip but also a discrete part constituting an oscillation circuit and a temperature compensation circuit. Further, an electronic component such as a capacitor for removing high frequency noise superimposed on the power supply voltage supplied to the IC chip may be accommodated in the recessed portion or the second recessed portion.
[0030]
Although the present invention has been described using TCXO, it goes without saying that it can be applied to devices such as fundamental or overtone crystal oscillators, VC-TCXO, VCXO, OCXO, and SAW oscillators.
[0031]
Although the present invention has been described using an AT-cut quartz substrate, the present invention is not limited to an AT-cut, but can be applied to a quartz substrate having a cut angle such as a BT cut, CT cut, DT cut, SC cut, or GT cut. Needless to say.
[0032]
Needless to say, the present invention is not limited to a quartz substrate, but can be applied to piezoelectric vibration elements such as langasite, lithium tetragonate, lithium tantalate, lithium niobate, and the like.
[0033]
【The invention's effect】
According to the present invention, it is possible to obtain a surface-mount type piezoelectric device that can be miniaturized and that has improved bonding strength with a conductive adhesive used as a means for connecting a piezoelectric vibration element in a package. Have.
[Brief description of the drawings]
FIG. 1 is a configuration diagram of a crystal resonator according to a first embodiment of the invention.
(A) The top view of the state which omitted the cover member.
(B) AA longitudinal cross-sectional view.
(C) The perspective view of the junction part of the crystal oscillation element concerning embodiment of this invention.
FIG. 2 is a configuration diagram of a crystal resonator as a fifth embodiment of the invention.
(A) The top view of the state which omitted the cover member.
(B) AA longitudinal cross-sectional view.
FIG. 3 is a configuration diagram of a conventional crystal unit.
(A) Longitudinal sectional view.
(B) The perspective view which shows the junction part of a crystal oscillation element.
FIG. 4 is a schematic diagram showing a difference in a joint portion of a conventional crystal resonator element.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Crystal oscillation element 1a ... Crystal oscillation element main body (AT cut crystal substrate)
DESCRIPTION OF SYMBOLS 1b ... Excitation electrode 1c ... Lead electrode 1d ... Notch part 2 ... Ceramic package (printed wiring board) 3 ... Recessed part 4 ... Lid member 5 ... Pad electrode 6 ... Conductive adhesive 7 ... Fillet 21 ... Quartz vibration element 21a ... Quartz substrate 21b ... Recess 21c ... Thin plate region (vibration part) 21d ... Reinforcement part 21e ... Notch part 22 ... Excitation electrode 23 ... Lead electrode 100 ... Crystal oscillator 101 ... Crystal oscillation element 101a ... Lead electrode 102 ... Ceramic package 103 ... Cavity part 104 ... Lid 105 ... Electrode pad 106 ... Conductive adhesive 107 ... Fillet

Claims (8)

両主面に配設する励振電極と該励振電極のそれぞれから延出するリード電極とを備える圧電振動素子と、
上面に該圧電振動素子を収容するための凹陥部を備える第1のプリント配線基板と、
該凹陥部の開口を閉止するための金属製の蓋部材と、
を備え、
前記凹陥部の内底面に形成したパッド電極に導電性接着剤を介して前記圧電振動素子を機械的及び電気的に接続した上で前記蓋部材により凹陥部を気密封止した圧電振動素子であって、
前記圧電振動子の外周縁に切り欠き部を形成し該切り欠き部の周縁に前記リード電極の終端を配設したことを特徴とする圧電デバイス。
A piezoelectric vibration element comprising an excitation electrode disposed on both main surfaces and a lead electrode extending from each of the excitation electrodes;
A first printed wiring board having a recessed portion for accommodating the piezoelectric vibration element on the upper surface;
A metal lid member for closing the opening of the recess,
With
The piezoelectric vibration element is formed by mechanically and electrically connecting the piezoelectric vibration element to a pad electrode formed on the inner bottom surface of the depression through a conductive adhesive and hermetically sealing the depression by the lid member. And
A piezoelectric device comprising a cutout portion formed on an outer peripheral edge of the piezoelectric vibrator, and a terminal end of the lead electrode disposed on the peripheral edge of the cutout portion.
前記切り欠き部を前記圧電振動素子の角部に形成したことを特徴とする請求項1に記載の圧電デバイス。The piezoelectric device according to claim 1, wherein the notch is formed at a corner of the piezoelectric vibration element. 前記切り欠き部を前記圧電振動素子の辺部に形成したことを特徴とする請求項1又は2に記載の圧電デバイス。The piezoelectric device according to claim 1, wherein the notch is formed in a side portion of the piezoelectric vibration element. 前記圧電振動素子の一方の主面に凹部を形成したことを特徴とする請求項1乃至3のいずれかに記載の圧電デバイス。The piezoelectric device according to claim 1, wherein a concave portion is formed on one main surface of the piezoelectric vibration element. 前記導電性接着剤を2度塗布したことを特徴とする請求項1乃至4のいずれかに記載の圧電デバイス。The piezoelectric device according to claim 1, wherein the conductive adhesive is applied twice. 前記凹陥部に発振回路及び温度補償回路を構成する回路素子を収容したことを特徴とする請求項1乃至5のいずれかに記載の圧電デバイス。6. The piezoelectric device according to claim 1, wherein circuit elements constituting an oscillation circuit and a temperature compensation circuit are accommodated in the recess. 前記第1のプリント配線基板の下面に第2の凹陥部を形成し、該第2の凹陥部に前記回路素子を実装したことを特徴とする請求項1乃至5のいずれかに記載の圧電デバイス。6. The piezoelectric device according to claim 1, wherein a second recessed portion is formed on a lower surface of the first printed wiring board, and the circuit element is mounted on the second recessed portion. . 請求項1乃至5のいずれかに記載の圧電デバイスと、前記回路素子と、該回路素子を実装するための第2のプリント配線基板と、を備え、
前記圧電デバイスの下方に前記回路素子を実装した前記第2のプリント配線基板を機械的及び電気的に接続した圧電デバイス。
A piezoelectric device according to any one of claims 1 to 5, the circuit element, and a second printed wiring board for mounting the circuit element,
A piezoelectric device in which the second printed wiring board on which the circuit element is mounted is mechanically and electrically connected below the piezoelectric device.
JP2003176430A 2003-06-20 2003-06-20 Piezoelectric device Pending JP2005012635A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007158566A (en) * 2005-12-02 2007-06-21 Epson Toyocom Corp Piezoelectric vibration chip and piezoelectric device
JP2013042425A (en) * 2011-08-18 2013-02-28 Seiko Epson Corp Piezoelectric vibration piece and piezoelectric module
CN106849900A (en) * 2016-12-15 2017-06-13 北京无线电计量测试研究所 A kind of pedestal for installing quartz wafer
JP2019009619A (en) * 2017-06-23 2019-01-17 セイコーエプソン株式会社 Vibration element, vibrator, generator, electronic apparatus, and mobile body

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007158566A (en) * 2005-12-02 2007-06-21 Epson Toyocom Corp Piezoelectric vibration chip and piezoelectric device
JP2013042425A (en) * 2011-08-18 2013-02-28 Seiko Epson Corp Piezoelectric vibration piece and piezoelectric module
CN106849900A (en) * 2016-12-15 2017-06-13 北京无线电计量测试研究所 A kind of pedestal for installing quartz wafer
JP2019009619A (en) * 2017-06-23 2019-01-17 セイコーエプソン株式会社 Vibration element, vibrator, generator, electronic apparatus, and mobile body
US11177429B2 (en) 2017-06-23 2021-11-16 Seiko Epson Corporation Vibrator element, vibrator, oscillator, electronic apparatus, and vehicle
JP7077539B2 (en) 2017-06-23 2022-05-31 セイコーエプソン株式会社 Vibrating elements, oscillators, oscillators, electronic devices and moving objects

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