JP2004502535A - マイクロエレクトロニックデバイスへの組込みに好適な低誘電率誘電体膜を形成する熱処理システムおよび方法 - Google Patents
マイクロエレクトロニックデバイスへの組込みに好適な低誘電率誘電体膜を形成する熱処理システムおよび方法 Download PDFInfo
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- JP2004502535A JP2004502535A JP2002508580A JP2002508580A JP2004502535A JP 2004502535 A JP2004502535 A JP 2004502535A JP 2002508580 A JP2002508580 A JP 2002508580A JP 2002508580 A JP2002508580 A JP 2002508580A JP 2004502535 A JP2004502535 A JP 2004502535A
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Images
Landscapes
- Formation Of Insulating Films (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US61474600A | 2000-07-12 | 2000-07-12 | |
| PCT/US2001/021927 WO2002004134A1 (en) | 2000-07-12 | 2001-07-11 | Thermal processing system and methods for forming low-k dielectric films suitable for incorporation into microelectronic devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004502535A true JP2004502535A (ja) | 2004-01-29 |
| JP2004502535A5 JP2004502535A5 (https=) | 2005-02-03 |
Family
ID=24462539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002508580A Pending JP2004502535A (ja) | 2000-07-12 | 2001-07-11 | マイクロエレクトロニックデバイスへの組込みに好適な低誘電率誘電体膜を形成する熱処理システムおよび方法 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2004502535A (https=) |
| AU (1) | AU2001270314A1 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011520283A (ja) * | 2008-05-09 | 2011-07-14 | エフエスアイ インターナショナル インコーポレイテッド | 操作において開モードと閉モードとの切り替えを簡単に行う加工チェンバ設計を用いてマイクロ電子加工品を加工するための道具および方法 |
| JP2023011522A (ja) * | 2021-07-12 | 2023-01-24 | 芝浦メカトロニクス株式会社 | 有機膜形成装置、および有機膜の製造方法 |
-
2001
- 2001-07-11 AU AU2001270314A patent/AU2001270314A1/en not_active Abandoned
- 2001-07-11 JP JP2002508580A patent/JP2004502535A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011520283A (ja) * | 2008-05-09 | 2011-07-14 | エフエスアイ インターナショナル インコーポレイテッド | 操作において開モードと閉モードとの切り替えを簡単に行う加工チェンバ設計を用いてマイクロ電子加工品を加工するための道具および方法 |
| JP2023011522A (ja) * | 2021-07-12 | 2023-01-24 | 芝浦メカトロニクス株式会社 | 有機膜形成装置、および有機膜の製造方法 |
| JP7429490B2 (ja) | 2021-07-12 | 2024-02-08 | 芝浦メカトロニクス株式会社 | 有機膜形成装置、および有機膜の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| AU2001270314A1 (en) | 2002-01-21 |
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