JP2004355701A - Optical disk, and its manufacturing method and device - Google Patents

Optical disk, and its manufacturing method and device Download PDF

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JP2004355701A
JP2004355701A JP2003150978A JP2003150978A JP2004355701A JP 2004355701 A JP2004355701 A JP 2004355701A JP 2003150978 A JP2003150978 A JP 2003150978A JP 2003150978 A JP2003150978 A JP 2003150978A JP 2004355701 A JP2004355701 A JP 2004355701A
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substrate
film
silver
layer
optical disk
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Yasuaki Odera
泰章 大寺
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Toshiba Corp
株式会社東芝
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/2403Layers; Shape, structure or physical properties thereof
    • G11B7/24035Recording layers
    • G11B7/24038Multiple laminated recording layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B7/2578Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/258Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
    • G11B7/2585Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers based on aluminium
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25706Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing transition metal elements (Zn, Fe, Co, Ni, Pt)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2531Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising glass
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2533Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins
    • G11B7/2534Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins polycarbonates [PC]
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/256Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers improving adhesion between layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26Apparatus or processes specially adapted for the manufacture of record carriers

Abstract

<P>PROBLEM TO BE SOLVED: To manufacture a two-layer disk wherein reflectances of both layers are equal to each other for a blue laser and a small pit is not buried either. <P>SOLUTION: The read only single-sided two layer optical disk is provided with a first substrate 15 having pits showing information formed on one surface thereof and a reflection film 14 on the pit side surface and a second light transmissive substrate 11 having pits showing information formed on one surface thereof and a semitransmissive film 12 consisting of silver or a silver alloy consisting essentially of silver on the pit side surface. The reflection film 14 and the semitransmissive film 12 are provided opposite to each other and the part between the reflection film and the semitransmissive film is filled up with an intermediate layer. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

【0001】 [0001]
【発明の属する技術分野】 BACKGROUND OF THE INVENTION
本発明は情報記録層を2層有し、該情報をディスクの一方の側からレーザ光により読取る再生専用片面2層光ディスクに関する。 The present invention has an information recording layer 2 layer, a reproducing-only dual-layer optical disc read by laser beam the information from one side of the disk.
【0002】 [0002]
【従来の技術】 BACKGROUND OF THE INVENTION
光ディスク大容量化の手段の一つとして2層化がある。 There are two layers as a means of optical disk capacity. 特にDVD−ROMなど再生専用ディスクでは、その構造および製造法が簡便なことから、片面2層ディスクが一般的に生産され使用されている。 Especially in DVD-ROM, etc. read-only disc, since the structure and manufacturing method is simple, single-sided dual-layer disc are commonly produced using.
【0003】 [0003]
片面2層ディスクは、情報を再生する光ピックアップヘッド側から見て、手前の層の反射膜が半透明膜である必要があるが、現在使用されている金(Au)やシリコン(Si)はDVDの赤色レーザに対しては半透明膜として働くが、次世代DVDの青色レーザに対してはその反射率が高過ぎたり低過ぎたりして好ましくない。 Single-sided dual-layer disc, when viewed from the optical pickup head side for reproducing information, it is necessary reflection film front layer is semi-transparent film, gold is currently used (Au) or silicon (Si) is for the red laser DVD acts as a semi-transparent film, but unfavorably too low or the reflectivity is too high for a blue laser for the next generation DVD.
【0004】 [0004]
そこで下記特許文献1で示される従来技術では、1層目2層目の反射膜それぞれに金属膜に加え硫化亜鉛(ZnS)の膜を積層することで、青色レーザに対して両層からの反射光量が等しくなる2層ディスクを実現している。 Therefore, in the prior art shown in Patent Document 1, by laminating the film of zinc sulfide in addition to the metal film (ZnS), respectively the first layer a second layer of the reflective film, reflection from both layers for blue laser quantity is realized a two-layer disc equal. しかしこの構造で作られた反射膜で反射光量を調整すると、その膜厚が60〜80nm程度にもなってしまう。 However, adjusting the amount of reflected light by the reflecting film made of this structure, the film thickness becomes to about 60 to 80 nm.
【0005】 [0005]
ところが次世代ディスクのピットは、深さは70nmでピット幅は250nm程度しかないため、特にピットが凹となるL1(奥側)層側では層厚を更に薄くしないと最短ピットが埋まって再生信号特性が悪化してしまう問題がある。 However the next generation disc pit depth pit width 70nm because only about 250 nm, in particular more thinly not the reproduction signal buried shortest pit layer thickness in pits recessed become L1 (inner side) layer side there is a problem that characteristic is deteriorated.
【0006】 [0006]
【特許文献1】 [Patent Document 1]
特開平9−293270 JP-A-9-293270
【0007】 [0007]
【発明が解決しようとする課題】 [Problems that the Invention is to Solve
上記したように、青色レーザに対して両層からの反射光量が等しくなる2層ディスクを実現するために、金属膜に誘電体層を積層した反射膜を用いた場合、該反射膜はその膜厚が60〜80nm程度にもなってしまい、ピットが凹となるL1(奥側)層側ではピットが埋まって再生信号特性が悪化するという問題が生じる。 As described above, in order to realize a two-layer disc which reflected light amount is equal from both layers for blue laser, when using a reflective film formed by laminating a dielectric layer on the metal film, the reflective film is the membrane thickness becomes in the order of 60 to 80 nm, a pit is a problem that the reproduction signal characteristic buried pit is deteriorated occurs at L1 (inner side) layer side is concave.
【0008】 [0008]
従って本発明は青色レーザに対して両層の反射率が等しく、かつ小さなピットも埋まらない2層ディスクを製作するを目的とする。 Accordingly, the present invention is directed to the reflectivity of both layers with respect to the blue laser are equal, and to manufacture a two-layer disc not filled even small pits.
【0009】 [0009]
【課題を解決するための手段】 In order to solve the problems]
上記目的を達成するために本発明の一実施形態に係る光ディスクは、情報を示す第1のピットが片面に形成され、該ピット側表面に反射膜を有する第1の基板と、情報を示す第1とは異なる第2のピットが片面に形成され、該ピット側表面に銀又は銀を主成分とする銀合金からなる半透過膜を有する光透過性の第2の基板と、中間層とを具備し、前記反射膜及び半透過膜は対向して設けられ、該反射膜及び半透過膜の間は光透過性の前記中間層で充填されている。 Optical disk according to an embodiment of the present invention in order to achieve the above object, the first pit is formed on one side indicating information, first shown a first substrate having a reflective film on the pit side surface and information 1 different second pits are formed on one surface and a second substrate of optically transparent having a semi-permeable membrane made of silver alloy mainly composed of silver or silver on the pit side surface and an intermediate layer comprising, the reflective layer and the semi-permeable membrane provided opposite, between the reflective film and the semi-permeable membrane are filled with a light transmissive of the intermediate layer.
【0010】 [0010]
光ピックアップヘッドから見て手前の層(L0層)に膜厚15nm程度の銀(若しくはその合金)を半透過膜として、奥側の層(L1層)に膜厚25nm程度のアルミニウムを反射膜として使用する。 As a semi-permeable membrane thickness 15nm about silver (or its alloy) as viewed from an optical pickup head in front of the layer (L0 layer), as a reflective film thickness 25nm about aluminum back side of the layer (L1 layer) use. このように薄い膜を用いることで、青色レーザに対して両層の反射率が等しく、かつ小さなピットも埋まらない再生専用片面2層光ディスクが実現できる。 Such a thin film by using the equal reflectance of both layers with respect to blue laser, and a small pit nor bury playback-only dual-layer optical disc can be realized.
【0011】 [0011]
手前の膜に例えばアルミなどの反射率の比較的高い膜を用いるとその最適膜厚が5nm程度と薄くなりすぎてしまい、安定して成膜出来ないうえに膜の耐久性にも問題がある。 With relatively high film reflectivity, such as a membrane, for example, aluminum front becomes too thin and the optimum film thickness of about 5 nm, there is a problem in durability of the film on top can not be stably film . そのため本発明では、L0層の膜としては銀を用いて膜厚を15nm程度まで厚くして、安定して生産できるようにした。 Therefore, in the present invention, the film of the L0 layer is made thicker to 15nm about the thickness using silver were to be produced stably.
【0012】 [0012]
更に、従来例のように誘電体層を設けずに、本発明では金属層のみによりL0層及びL1層を構成するので、成膜レートが高く生産効率が上がる。 Moreover, without providing the dielectric layer as in the prior art, since the present invention constitutes the L0 layer and the L1 layer by only the metal layer, the deposition rate is high production efficiency is increased.
【0013】 [0013]
【発明の実施の形態】 DETAILED DESCRIPTION OF THE INVENTION
以下、図面を参照しながら本発明の実施の形態について詳細に説明する。 Hereinafter, with reference to the drawings, embodiments of the present invention will be described in detail.
【0014】 [0014]
図1は本発明に係る2層光ディスクの断面図、図2は本発明に係る光ディスク製造方法の流れ図、図3は本発明の構造による2層光ディスクの再生波形である。 Figure 1 is a sectional view of a two-layer optical disk according to the present invention, FIG. 2 is a flow diagram of an optical disc manufacturing method according to the present invention, FIG. 3 is a structure of the reproduction waveform of the two-layer optical disc of the present invention.
【0015】 [0015]
2層光ディスクは通常、図1のような構造を有し、光が入射する側の層(Layer0)として半透過膜12、奥側の層(Layer1)として全反射膜14が成膜されている。 2-layer optical disc typically has a structure as shown in FIG. 1, the transflective film 12 as a layer on the side (Layer0) which light is incident, the total reflection film 14 as a rear side of the layer (Layer1) is deposited . 信号パターン(情報)はポリカーボネートなどの樹脂で成形された基板11、15上にピットとして転写されており、2枚の成形基板11、15は紫外線硬化樹脂などからなる中間層13を介して貼り合わされている。 Signal pattern (information) is transferred as a pit on the substrate 11, 15 which are formed of resin such as polycarbonate, molded substrate 11 and 15 of the two sheets are bonded through the intermediate layer 13 made of an ultraviolet curable resin ing. 基板11及び15上には一般に異なる情報が記録されるので、当然、基板11上のピット配列と基板15上のピット配列は異なる。 Since generally different information is recorded on the substrate 11 and 15, of course, pit sequence on pit array and the substrate 15 on the substrate 11 are different.
【0016】 [0016]
本実施形態では、ディスクは直径120mm、厚さ1.2mm(0.6mmの基板2枚の貼り合せ)であり、かつ再生専用のROMディスクであるとする。 In the present embodiment, the disk diameter 120 mm, a thickness of 1.2 mm (combined 0.6mm adhesion of two substrates), and to a read-only ROM disc. しかし、本発明はこの実施形態に限定されるものではなく、1.1mmの基板に0.1mmの透明カバー層をつけた2層光ディスクなどでも適用できる。 However, the present invention is not limited to this embodiment can also be applied in such two-layer optical disk with a transparent cover layer of 0.1mm to 1.1mm substrate. 又、再生光については波長400nm程度の青色光で、記録パターンのピット形状は深さ70nm、幅が250nmとし、中間層の厚さは20μmとする。 Further, blue light with a wavelength of about 400nm for reproduction light, the pit shape depth 70nm recording pattern, the width is 250 nm, the thickness of the intermediate layer is set to 20 [mu] m. しかしこれについてももちろんこの形態に限られるわけではなく、赤色光もしくはその他の波長の光で情報を再生するディスクでも良く、記録パターンはもっと微細なものでも良いし、中間層は例えば15μmや25μm程度でも良い。 But this will not necessarily also of course limited to this, may be a disc for reproducing information by light in the red light or other wavelengths, the recording pattern may be one of more fine, intermediate layer, for example 15μm or 25μm approximately But good.
【0017】 [0017]
このような2層光ディスクの作成方法を図2に沿って以下に述べる。 How to create such a two-layer optical disc along 2 described below. 先ず、原盤としては表面を研磨洗浄したガラス(もしくはシリコン)基板31を用いる(ST01)。 First, a glass (or silicon) substrate 31 has a surface which is polished and cleaned as master (ST01). この原盤表面にフォトレジスト32を塗布し(ST02)、その表面をレーザー光や電子ビームで露光することで情報を記録する(ST03)。 This master surface coated with a photoresist 32 (ST02), recording information by exposing the surface with a laser beam or an electron beam (ST03). 次に露光した原盤を現像しピットの凹凸を形成する(ST04)。 Next, the exposed master to form unevenness of developed pits (ST04). その原盤をメッキ処理することでスタンパ(一般にはニッケル)33を作製する(ST05)。 Stamper by plating the master (typically nickel) 33 to produce (ST05). そのスタンパ33を型として射出成形により樹脂(一般にはポリカーボネート)成形板11を作製する(ST06)。 Resin by injection molding the stamper 33 as a mold (typically polycarbonate) to produce a molded plate 11 (ST06).
【0018】 [0018]
この際、上述の方法でLayer0とLayer1の記録パターンをもつ成形基板を2枚準備する。 At this time, preparing two pieces of molded substrate having a recording pattern of Layer0 and Layer1 in the manner described above. その成形板のLayer0の方に半透過膜12をLayer1の方に全反射膜14をマグネトロンスパッタ等の方法で成膜する(ST07)。 As a semi-permeable membrane 12 towards the Layer0 of shaped plates forming the total reflection film 14 by a method such as magnetron sputtering towards the Layer1 (ST07). その後、その2枚の成形板を所定厚の紫外線硬化型接着剤などを用いて貼り合せて(ST08)、2層光ディスクの完成となる。 Thereafter, the molded plate two that stuck by using a predetermined thickness of the ultraviolet curing adhesive (ST08), the completion of the 2-layer optical disc. 紫外線硬化型接着剤の層は中間層13となる。 A layer of ultraviolet-curing adhesive is an intermediate layer 13.
【0019】 [0019]
従来のDVDなどの赤色光で再生する光ディスクでは、工程ST07で用いる反射膜として金(Au)やシリコン(Siもしくはその化合物)が用いられていた。 In the optical disk to be reproduced by the red light, such as a conventional DVD, a gold (Au) or silicon (Si or a compound) it has been used as a reflective film used in step ST07. しかし、これらの膜は青色光に対する反射率が高すぎたり低過ぎたりするため、次世代光ディスクの半透過膜としては適していない。 However, these membranes to or too low or too high reflectance for blue light, not suitable as a translucent film of the next generation optical disc. このため、例えば上記特開平9−293270号公報などでは半透過膜および全反射膜を金属膜と誘電体膜(例えば硫化亜鉛:ZnS)の積層構造にして、青色光に対する反射率を調整している。 Thus, for example, above in such Hei 9-293270 discloses semipermeable membrane and the total reflection film of the metal film and a dielectric film (such as zinc sulfide: ZnS) in the laminated structure of, by adjusting the reflectivity for blue light there.
【0020】 [0020]
しかしその方法で反射率を調整した場合、膜の総厚は60から80nmとなるため次世代光ディスクの小さなピットに対しては適用できない。 However, adjusting the reflectance in that way, it can not be applied to small pits of next-generation optical disc for the total thickness of the film is made of a 80nm 60. なぜならば、次世代光ディスクはそのピット寸法が深さ70nm程度、幅250nm程度であるため、厚さ60から80nmの膜を成膜した場合に特にピットが凹状で膜の上から光で読むことになるLayer1側については、最小ピット等が膜で埋まってしまい大幅に再生信号が劣化するからである。 This is because the next-generation optical disc depth 70nm about its pit dimensions, since a width of about 250 nm, in reading particularly pits when depositing the 80nm film thickness from 60 with light from the top of the film in the concave for becomes Layer1 side and it is the smallest pits is deteriorated greatly reproduced signal will filled with film.
【0021】 [0021]
このため、青色光で再生する次世代の高密度光ディスクについては、Layer1側の全反射膜をなるべく薄くしたい。 Therefore, for the next generation high density optical disk to be reproduced by blue light, I would like to as thin as possible the Layer1 side of the total reflection film. 量産に使用可能な膜のなかでは例えばアルミニウム(Al)などが向いている。 Among the usable mass film is oriented are, for example, aluminum (Al). しかし、Alは半透過膜に用いる場合その最適膜厚が5nm程度とあまりに薄く、又その成膜レートも極端に高速なため安定して正確な膜厚制御を行うことが困難である。 However, Al is the optimum film thickness when using a semi-permeable membrane with too thin about 5 nm, also it is difficult to perform the film deposition rate is also extremely fast for stable and precise thickness control. 膜厚のばらつきは反射率のばらつきとなってしまい好ましくない。 Variation in thickness undesirably as variations in reflectivity. そこで半透過膜の方は、銀(Ag)を用いることにより安定した成膜を可能とした。 So towards the semi-permeable membrane, it made it possible to stably deposited by using a silver (Ag).
【0022】 [0022]
本実施形態では、Layer1の全反射膜として膜厚20から40nmのAlを、Layer0の半透過膜として膜厚10から30nmのAgを使用する。 In the present embodiment, the Al of 40nm from a thickness 20 as a total reflection film of Layer1, using the Ag of 30nm from a thickness 10 as a semi-permeable membrane Layer0. こうすれば両層からの反射光量が等しく調整され、ピットが膜に埋まることなく良好な再生波形が得られる。 Adjusted amount of reflected light is equal from both layers This arrangement pit good reproduced waveform can be obtained without buried in film. このときLayer0の青色レーザ光に対する反射率は18から32%であり、次世代DVDとして好適な値である。 Reflectivity for the blue laser light at this time Layer0 is 32% from 18, is a suitable value as a next-generation DVD. なおAgについては耐腐食性の目的で光学特性が変わらない程度の微量の添加物(例えばパナジウム(Pd)や銅(Cu))を混ぜ、銀合金にしても構わない。 Incidentally mixing a very small amount of additive to the extent that does not change the optical properties of corrosion resistance of the object (e.g., vanadium (Pd), copper (Cu)) for the Ag, may be in the silver alloy. 更に生産性等を考慮しなければLayer0として、ニッケル又はニッケル合金、クロム又はクロム合金、あるいはニッケルクロム合金を使用できる。 Still Layer0 Without considering productivity and the like, nickel or nickel alloy, chromium or chromium alloy, or a nickel-chromium alloy can be used.
【0023】 [0023]
Layer0の半透過膜として銀合金17nmを、Layer1の全反射膜としてアルミニウム25nmをそれぞれ成膜した15GB/層密度の2層光ディスクの再生波形を図3に示す。 The silver alloy 17nm as a semi-permeable membrane Layer0, shows a reproduction waveform of the two-layer optical disc of 15GB / layer density aluminum 25nm were deposited respectively as a total reflection film of Layer1 to FIG. 両層からの再生信号強度はほぼ等しく、良好な品質の再生波形が得られている。 Reproduced signal strength from both layers are approximately equal, the reproduced waveform of good quality.
【0024】 [0024]
本発明による光ディスクの構造は、従来のように反射率調整にZnS等の誘電体を用いる方法はとらず、金属膜のみを用いるために成膜レートも速く生産効率が良いという利点も持つ。 Structure of an optical disc according to the present invention, a method of using a dielectric such as ZnS in reflectivity adjustment as in the prior art has Torazu, an advantage that the film forming rate is fast production efficiency is good for the use of only the metal film.
【0025】 [0025]
【発明の効果】 【Effect of the invention】
以上説明したように本発明によれば、青色レーザに対して両層の反射率が等しく、かつ小さなピットも埋まらない2層ディスクを製作することが出来る。 Above according to the present invention, as described, equal to the reflectivity of both layers with respect to blue laser, and it is possible to manufacture a two-layer disc not filled even small pits.
【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS
【図1】2層光ディスクの断面図。 FIG. 1 is a cross-sectional view of a two-layer optical disc.
【図2】光ディスク製造方法を示す流れ図。 Figure 2 is a flow diagram showing an optical disk manufacturing method.
【図3】本発明による2層光ディスクの再生波形図。 [Figure 3] reproduced waveform diagram of a two-layer optical disc according to the present invention.
【符号の説明】 DESCRIPTION OF SYMBOLS
11、15…成形基板、12…半透過膜、13…中間層、14…全反射膜、31…ガラス基板、32…フォトレジスト、33…スタンパ 11,15 ... molding substrate, 12 ... semipermeable membrane, 13 ... middle layer, 14 ... total reflection film, 31 ... glass substrate, 32 ... photoresist, 33 ... stamper

Claims (8)

  1. 情報を示す第1のピットが片面に形成され、該ピット側表面に反射膜を有する第1の基板と、 First pits indicating information is formed on one surface, a first substrate having a reflective film on the pit side surface,
    情報を示す第1とは異なる第2のピットが片面に形成され、該ピット側表面に銀又は銀を主成分とする銀合金からなる半透過膜を有する光透過性の第2の基板と、中間層とを具備し、 The first indicating information is formed on one surface is different second pit, and a second substrate of optically transparent having a semi-permeable membrane made of silver alloy mainly composed of silver or silver on the pit side surface, comprising an intermediate layer,
    前記反射膜及び半透過膜は対向して設けられ、該反射膜及び半透過膜の間は光透過性の前記中間層で充填されていることを特徴とする光ディスク。 The reflective layer and the semi-permeable membrane provided opposite, disc between the reflective film and the semi-permeable membrane, characterized in that it is filled with a light transmissive of said intermediate layer.
  2. 前記第1の基板の反射膜は、アルミニウムで形成されていることを特徴とする請求項1記載の光ディスク。 The reflective film of the first substrate, an optical disk according to claim 1, characterized in that it is formed of aluminum.
  3. 前記第2の基板の前記半透過膜の膜厚は10から30nmであることを特徴とする請求項1記載の光ディスク。 The second optical disk according to claim 1, wherein the thickness of the semipermeable membrane of the substrate is 30nm from 10.
  4. 前記第1の基板の前記アルミニウムで形成される反射膜の膜厚は20から40nmであることを特徴とする請求項1記載の光ディスク。 Said first optical disk according to claim 1, wherein the thickness of the reflective film, wherein the aluminum in the formation of the substrate, which is a 40nm from 20.
  5. 情報を示すピットが形成された第1の成形基板上にアルミニウムの反射膜を成膜する工程と、 A step of forming a reflecting film of aluminum on the first mold substrate pits indicating information are formed,
    情報を示すピットが形成された光透過性の第2の成形基板上に銀又は銀を主成分とする銀合金の半透過膜を成膜する工程と、 A step of forming a semitransparent film of silver alloy mainly containing silver or silver on the second mold substrate pits of optical transparency formed indicating information,
    前記反射膜及び半透過膜を対向させ、紫外線硬化型接着剤を用いて前記第1及び第2の成形基板を貼り合せる工程と、 Are opposed to the reflective layer and the semi-permeable membrane, and a step of bonding said first and second green substrates with an ultraviolet curable adhesive,
    を具備することを特徴とする光ディスク製造方法。 Optical disk manufacturing method characterized by comprising the.
  6. 前記第1の基板の前記反射膜の膜厚は20から40nmであることを特徴とする請求項5記載の光ディスク製造方法。 Method of producing an optical disk according to claim 5, wherein the film thickness of the reflective film of the first substrate is 40nm from 20.
  7. 前記第2の基板の前記半透過膜の膜厚は10から30nmであることを特徴とする請求項5記載の光ディスク製造方法。 Method of producing an optical disk according to claim 5, wherein the thickness of the semipermeable membrane of the second substrate is 30nm from 10.
  8. 情報を示すピットが形成された第1の成形基板上にアルミニウムの反射膜を成膜する手段と、 Means for forming the reflective film of aluminum on the first mold substrate pits indicating information are formed,
    情報を示すピットが形成された光透過性の第2の成形基板上に銀又は銀を主成分とする銀合金の半透過膜を成膜する手段と、 It means for forming a semipermeable membrane of a silver alloy mainly containing silver or silver on the second mold substrate pits of optical transparency formed indicating information,
    前記反射膜及び半透過膜を対向させ、紫外線硬化型接着剤を用いて前記第1及び第2の成形基板を貼り合せる手段と、 It is opposed to the reflective layer and the semi-permeable membrane, and means for bonding said first and second green substrates with an ultraviolet curable adhesive,
    を具備することを特徴とする光ディスク製造装置。 Optical disc manufacturing apparatus characterized by comprising a.
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