JP2004347913A5 - - Google Patents
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- Publication number
- JP2004347913A5 JP2004347913A5 JP2003145796A JP2003145796A JP2004347913A5 JP 2004347913 A5 JP2004347913 A5 JP 2004347913A5 JP 2003145796 A JP2003145796 A JP 2003145796A JP 2003145796 A JP2003145796 A JP 2003145796A JP 2004347913 A5 JP2004347913 A5 JP 2004347913A5
- Authority
- JP
- Japan
- Prior art keywords
- resist
- inspection method
- exposing
- resist layer
- developing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims 5
- 238000000034 method Methods 0.000 claims 5
- 230000001678 irradiating effect Effects 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000003384 imaging method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003145796A JP2004347913A (ja) | 2003-05-23 | 2003-05-23 | レジスト検査方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003145796A JP2004347913A (ja) | 2003-05-23 | 2003-05-23 | レジスト検査方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004347913A JP2004347913A (ja) | 2004-12-09 |
| JP2004347913A5 true JP2004347913A5 (https=) | 2005-10-27 |
Family
ID=33532839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003145796A Pending JP2004347913A (ja) | 2003-05-23 | 2003-05-23 | レジスト検査方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004347913A (https=) |
-
2003
- 2003-05-23 JP JP2003145796A patent/JP2004347913A/ja active Pending
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