JP2004340512A

JP2004340512A - Heat exchanger

Info

Publication number: JP2004340512A
Application number: JP2003139140A
Authority: JP
Inventors: Yutaka Okamoto; 裕岡元; Tatsuya Fujii; 達也藤井
Original assignee: Nippon Pillar Packing Co Ltd
Current assignee: Nippon Pillar Packing Co Ltd
Priority date: 2003-05-16
Filing date: 2003-05-16
Publication date: 2004-12-02
Anticipated expiration: 2023-05-16
Also published as: JP3927920B2

Abstract

<P>PROBLEM TO BE SOLVED: To inexpensively provide a heat exchanger having a compact and highly reliable sealing structure with a small number of parts without using an O-ring or a metal fastening member such as a tie rod or a through bolt. <P>SOLUTION: A casing 1 made of fluororesin is provided with: a tube 4 made of fluororesin surrounding an outer circumference of a heat exchange tube 3; a pair of lid members 5 made of fluororesin provided with a socket part 8 receiving each of a one end part and another end part of the tube 4, at least one sealing face 10 provided in the socket part, a lead out part 34 of the heat exchange tube 3, and connecting parts 29a and 29b with other pipings 28a and 28b; a union nut 6 made of fluororesin fit on the end part of the tube 4 and screwed on a one end part of the lid member 5; and at least one sealing part 19 formed by fastening the union nut 6 on the one end part of the lid member 5 and closely contacting the end part of the tube 4 and the sealing face 10 of the lid member 5. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

【０００１】
【発明の属する技術分野】
本発明は、半導体製造装置や液晶装置、化学薬品製造装置、食品生産ライン等で扱われる流体の配管等に好適に用いられる熱交換器に関する。
【０００２】
【従来の技術】
この種の熱交換器として、たとえば、図１４、図１５に示すように、熱交換チューブ７０が通されるケーシング７１が充分なシール性を確保して或る程度の内圧に耐えられるようにするために、ケーシング７１の本体を構成するシェル７２の外周に複数本のタイロッドや通しボルト等の金属製締結部材７３をその長手方向に沿うよう互いに平行に配するとともに、該金属製締結部材７３の両端部をシェル７２の両端部に配される蓋部材７４に挿通して、該蓋部材７４から突出する金属製締結部材７３の両端の雄ねじ部にナット７５を締め込むことによってシェル７２の両端部と蓋部材７４との突き合せ面間が密着状にシールされ、これによりケーシング７１が密封状に構成されるといったものがある（例えば、特許文献１参照。）。また、前記シェル７２の両端部と蓋部材７４との突き合せ面間にはシール部材であるＯリング７６が介在されている（前出の特許文献１参照。）。
【０００３】
【特許文献１】
特開平１０−１６０３６２号公報
【０００４】
【発明が解決しようとする課題】
しかるに、シェル７２の両端部と蓋部材７４とを複数本のタイロッドや通しボルト等の金属製締結部材７３とナット７５との締め込みによってシールする上記熱交換器では、シールするための部品点数が多く、コストアップ、ケーシング構造の大型化を招くばかりか、金属製締結部材７３は、硫酸雰囲気などに晒される場所に配置された場合、腐食しやすく、また金属汚染が避けられないため、近年、とくに半導体業界では使用制限の要求が高い。
【０００５】
また、金属製締結部材７３の締付けの緩みに対して、金属製締結部材７３を定期的に増締めする必要があるが、通常金属製締結部材７３は複数本、少なくとも４本以上であるため、各金属製締結部材７３の増締め度合いにばらつきが生じ易く、このばらつきにより蓋部材７４やシェル７２の変形を招くおそれがあった。蓋部材６４やシェル７２の変形が生じると、シェル７２の端部と蓋部材７４との間にねじれや歪みが生じるため、局部的な応力集中が生じてクリープの進行を助長する問題がある。また、金属製締結部材７３の金属製タイロッドと金属製タイロッドシースとの中心軸が一致せず、両者が擦れ合って摺動抵抗が増大し、かつ、金属粉を含む摩耗粉の発生原因となるという問題もあった。さらに、シェル７２や蓋部材７４の変形が生じた場合、これらの部材交換が必要となるが、これらの部材は通常切削品であり、比較的高価でもあるため、ケーシング構造の交換を行って内部デバイス（熱交換チューブ７０）を継続利用するという再利用が難しい構造でもあった。
【０００６】
シェル７２の両端部と蓋部材７４との突き合せ面間にシール部材としてＯリング７６を介在させる接続構造の上記熱交換器では、Ｏリング７６を使用するため、耐蝕性や使用温度範囲に制限がある。例えば、Ｏリング７６に接する空間には、高温の薬液を連通させることができない。また、Ｏリング７６の発塵による汚染が問題となることもある。したがって、近年、半導体業界ではこのようなＯリング７６の使用制限の要求が高い。
【０００７】
また、この種熱交換器が、薬液等に使用された場合、そのシェル７２や蓋部材７４等の構成部材には耐腐食性に優れるＰＴＦＥやＰＦＡ等のフッ素樹脂が使用されることが多いが、フッ素樹脂は、潤滑性が高いため、シェル７２と蓋部材７４との間の接続部が配管の震動や熱の影響でクリープし、これによりタイロッドや通しボルト等金属製締結部材７３の緩みが発生し、シェル７２の両端の接続部から流体漏れが発生する問題があった。
【０００８】
シェル７２と蓋部材７４との間のケーシング接続構造としては、その他に、ネジシールや溶接が採用されることがあるが、あまり効果的ではない。すなわち、単なるネジによる接続シール構造では、高いシール性を得ることができず、耐圧性が充分でなく、かつクリープによる漏れが生じ易い。また溶接は、一般的に熟練技術を必要とし、容易な作業ではないため、生産効率が低いとともに、現場作業性が悪く、現場での保守・点検が困難であるという問題がある。
【０００９】
本発明は、このような諸問題点を解決するためになされたものであり、その目的とするところは、タイロッドや通しボルト等の金属製締結部材、及びＯリングを用いることなく、部品点数の減少、コスト低減を図ることができるとともに、コンパクトで耐圧性の高いケーシング構造及び信頼性の高いシール構造の熱交換器を提供することにある。また本発明の目的は、金属製締結部材等の金属材を使用しないで、熱交換器の全ての構成部材を合成樹脂製のものにすることを可能にすることによりメタル溶出や金属摩耗粉発生の問題を解消できて半導体製造装置等に好適な熱交換器を提供することにある。
【００１０】
また本発明の他の目的は、熱交換器の構成部材を全てフッ素樹脂で構成しても高いシール性を確保できて腐蝕性の薬液同士の熱交換を可能にするとともに、耐薬品性雰囲気への適用、設置が可能となり、熱交換器の用途の拡大化を図れる熱交換器を提供することにある。
【００１１】
【課題を解決するための手段】
本発明は、ケーシングの内部に通された合成樹脂製の熱交換チューブ内を通過する流体と、前記ケーシングの内部と前記熱交換チューブの外部との間を通過する流体との間で熱交換を行う熱交換器において、前記ケーシングが、前記熱交換チューブの外周を包囲する合成樹脂製のチューブと、このチューブの一端部及び他端部をそれぞれ受け入れる受口部、この受口部内に設けられた少なくとも１つのシール面、前記熱交換チューブの導出部、及び前記ケーシングの内部と前記熱交換チューブの外部との間を通過する流体の導入用及び導出用の配管が接続される他の配管との接続部を備えた合成樹脂製の蓋部材と、前記チューブの一端部及び他端部にそれぞれ外嵌されるとともに前記蓋部材の一端部に螺合される合成樹脂製のユニオンナットと、前記ユニオンナットが前記蓋部材の一端部への螺進による締め付けにより前記チューブをこれの外側から押圧し、この押圧作用により前記チューブの端部と前記蓋部材のシール面とが密着することにより形成された少なくとも１箇所のシール部と、を備えていることに特徴を有するものである。
【００１２】
この場合において、前記熱交換チューブ、チューブ、蓋部材、およびユニオンナットは全て耐熱性、耐薬品性に優れるフッ素樹脂や導電性物質を含有する帯電防止フッ素樹脂で成形することができる。
【００１３】
【発明の効果】
上記構成の熱交換器によれば、ユニオンナットを蓋部材の一端部に締め付けるだけの簡単な操作でチューブの端部と蓋部材のシール面とを密着させるシール部を介して確実に密封することができる。したがって、従来のようにタイロッドや通しボルト等の金属製締結部材及びＯリングを用いることなく、部品点数を少なくして、安価に且つコンパクトで耐圧性の高いケーシング構造及び信頼性の高いシール構造の熱交換器を得ることができる。
【００１４】
熱交換器は、従来のケーシング接続構造のようにタイロッドや通しボルトを使用しない耐圧シール構造で、且つスリムなケーシング構造にすることができ、また単一のユニオンナットによる増締めによりシール性を均一に確保することが可能である。すなわち、チューブの両端部の蓋部材との接続部を単一のユニオンナットでシールするだけで、タイロッドや通しボルトに比べて信頼性の高いシール構造が得られ、しかもスリムなケーシングでもって熱交換器の小型化、コンパクト化を図ることができる。また、ユニオンナットの増締めによりシール性をその都度確保することが可能であって、ネジシールやＯリングシールと比較しても長期にわたり信頼性の高いものとなる。さらに、単一のユニオンナットを増締めするという簡単な手段で足りるため、溶着による接続構造と異なり現場施工が容易であり、現場での保守・点検も容易に行える。
【００１５】
金属製締結部材等の金属材を一切使用しないので、メタル溶出や金属摩耗粉発生の問題を解消できる。
【００１６】
ユニオンナットの締め付けによればチューブの端部の外側全周を均等に押圧することができるため、円チューブや蓋部材の不慮の変形を招くようなことが無くなる。したがって、これら部材のクリープや交換の問題を解消できる。
【００１７】
ユニオンナットの締付けを緩めることによりチューブの端部から蓋部材を簡単に取り外すことができるため、チューブ内に滞留する滞留物の除去が容易に行える。
【００１８】
また、この熱交換器は、ユニオンナットの締付けによるだけでチューブに内圧が加わっても十分気密を保つことができて流体漏れを防止できるので、従来のようにＯリングを使用しなくて済み、全ての構成部材をフッ素樹脂で成形することで、高温、腐蝕性の強い薬液にもよく対応でき、耐薬品性雰囲気への適用、設置が可能となり、熱交換器の用途範囲を拡大できる。
【００１９】
【発明の実施の形態】
本発明の好適な実施形態を図面に基づき説明する。図１は一実施例の熱交換器の正面図、図２は図１の熱交換器の側面図、図３は図１の熱交換器の断面図、図４は図１の熱交換器のチューブ端部と蓋部材との接続構造の拡大断面図、図５は他の実施例を図３に相応して示す断面図、図６は図１の熱交換器の熱交換チューブの他例を図３に相応して示す断面図、図７は図１の熱交換器の熱交換チューブの更に他例を図３に相応して示す断面図、図８は更に他の実施例を図３に相応して示す断面図、図９は更に又、他の実施例を図３に相応して示す断面図である。
【００２０】
図１ないし図４において、本発明に係る熱交換器は、ケーシング１の内部（熱交換室）２に通された熱交換チューブ３内を通過する流体と、ケーシング１の内部と熱交換チューブ３の外部との間を通過する流体との間で熱交換を行うものである。ケーシング１は、熱交換チューブ３の外周を包囲するチューブ４と、このチューブ４の一端部及び他端部をそれぞれ密封状に閉塞する１対の蓋部材５、及び各蓋部材５をチューブ４の一端部及び他端部にそれぞれ締め付けるユニオンナット６を備える。
【００２１】
チューブ４は耐熱性、耐薬品性に優れるＰＦＡやＰＴＦＥ等のフッ素樹脂や導電性物質を含有する帯電防止フッ素樹脂等の合成樹脂によって筒状に成形され、このチューブ４の両端部には、それぞれ、同じくフッ素樹脂等の合成樹脂からなる蓋部材５を挿入してフッ素樹脂等合成樹脂製のユニオンナット６の締め付けを介して接続する。
【００２２】
蓋部材５は、胴壁部７と、この胴壁部７の一端に開放する受口部８、及び胴壁部７の他端を閉塞する底壁部９とを有する形に形成される。そして、図４に示すように、蓋部材５の受口部８の内部には第１〜３のシール面１０〜１２が設けられる。第１のシール面１０は、蓋部材５の受口部８の入口より内奥に、蓋部材５の軸線Ｃに対して交差状、つまり軸線Ｃ方向の外方に向けて漸次拡径するテーパ面により構成される。第２のシール面１１は、受口部８の入口に、前記軸線Ｃに対して交差状、つまり軸線Ｃ方向の外方に向けて漸次拡径するテーパ面により構成される。第３のシール面１２は、蓋部材５の受口部８の内奥において第１のシール面１０よりも径方向外方に軸線Ｃと平行に形成された環状溝部１３により構成される。蓋部材５の受口部８の外周には雄ねじ１４が形成されている。
【００２３】
一方、チューブ４の一端部及び他端部にはそれぞれフッ素樹脂等合成樹脂製のインナーリング１５を圧入する。このインナーリング１５は、図４に示すように、チューブ４の端部に圧入されて該端部を断面山形状に拡径膨出させる断面算盤玉形状の圧入部１６と、この圧入部１６に連設されてチューブ４の端部に突出する突出部１７とを有するスリーブ形状に形成されている。断面山形状の圧入部１６はこれの一斜面部に外向きテーパ面１８を、他斜面部に前記第２のシール面１１との間でチューブ４の端部を傾斜状態に挟持して第２のシール部２１を形成する内向きテーパ面２０をそれぞれ形成している。突出部１７の先端には前記第１のシール面１０に密着状に当接して第１のシール部１９を形成するテーパ面からなる突出端面２２、および前記環状溝部１３に嵌入して第３のシール部２３を形成する円筒部２４を形成してなる。このインナーリング１５の内径はチューブ４の内径と同一か略同一に設定して流体が滞留することなく、円滑に流動するようにしている。
【００２４】
図４に示すように、ユニオンナット６はこれの内周に蓋部材５の雄ねじ１４に螺合される雌ねじ２５を形成し、かつ一端部に環状鍔部２６を内向きに張り出すとともに、該環状鍔部２６の内周面の軸方向内端に鋭角または直角の押圧エッジ部２６ａを設けてある。
【００２５】
そして、上記インナーリング１５の圧入されたチューブ４の端部を蓋部材５の受口部８に挿入し、該チューブ４の端部の外周に予め遊嵌させたユニオンナット６の雌ねじ２５を蓋部材５の雄ねじ１４に螺合させて締め付ける。この締付けに伴いユニオンナット６の押圧エッジ部２６ａがチューブ４の拡径部２７の拡径付け根部に当接してインナーリング１５を軸方向から押圧する。これにより、図４に示すように、インナーリング１５の突出端面２２が蓋部材５の第１のシール面１０に対し押し付けられて第１のシール部１９を形成するとともに、インナーリング１５の内向きテーパ面２０と蓋部材５の第２のシール面１１との間でチューブ４の端部を傾斜状態に挟持して第２のシール部２１を形成し、さらにインナーリング１５の円筒部２４が環状溝部１３に圧入して第３のシール部２３を形成する。これら第１〜３のシール部１９，２１，２３により信頼性の高いシール機能を発揮する。
【００２６】
図３に示すように、上記チューブ４の一端部の蓋部材５には、他の配管である熱交換流体の導入用配管２８ａが接続される接続部２９ａを、他端部の蓋部材５には他の配管である導出用配管２８ｂが接続される接続部２９ｂをそれぞれ備える。すなわち、他の配管との接続部２９ａ，２９ｂは、一方の蓋部材５の胴壁部７に温調水等の熱交換流体のインレットポート３０を、他方の蓋部材５の胴壁部７にアウトレットポート３１をそれぞれ形成し、インレットポート３０には熱交換流体の導入用配管２８ａの端部が、アウトレットポート３１には熱交換流体の導出用配管２８ｂの端部がそれぞれフッ素樹脂等合成樹脂製のユニオンナット３２、フッ素樹脂等合成樹脂製のインナーリング３３を介して接続されて、熱交換流体がインレットポート３０、チューブ４内の熱交換室２、アウトレットポート３１の順に流通すべく構成されている。
【００２７】
インレットポート３０及びアウトレットポート３１の各内部構造は蓋部材５の受口８の内部構造と同一に構成し（但し、径は異なる）、また熱交換流体の導入用配管２８ａ及び導出用配管２８ｂの各端部には、チューブ４の端部のインナーリング１５と同様の断面形状のインナーリング３３を圧入してあって、インレットポート３０及びアウトレットポート３１に対する導入用配管２８ａ及び導出用配管２８ｂの各端部の接続構造は、チューブ４の端部の蓋部材５の受口８に対する接続構造と同様であるため、その詳細な説明は省略する。ただし、このインレットポート３０及びアウトレットポート３１に対する熱交換流体の導入用配管２８ａ及び導出用配管２８ｂの各端部の接続構造としては、そのほかに、インレットポート３０及びアウトレットポート３１に対し熱交換流体の導入用配管２８ａ及び導出用配管２８ｂの各端部を直接溶着したり、ねじ接続したりするなどの手段を採用することもできる。つまり、他の配管との接続部２９ａ，２９ｂは溶着、ねじ接続などの接続手段であってもよい。
【００２８】
一方、チューブ４の内部には薬液が通過するフッ素樹脂等合成樹脂製のコイルチューブよりなる熱交換チューブ３が通され、この熱交換チューブ３の両端部は蓋部材５の底壁部９に開口した導出口３４から導出される。その熱交換チューブ３の導出端部にはフッ素樹脂等合成樹脂製のユニオンナット３５を外嵌して、このユニオンナット３５を導出口３４にフッ素樹脂等合成樹脂製のフェルール３６を介して締め付けることにより該導出口３４と熱交換チューブ３の端部との間の隙間を密封している。
【００２９】
このように構成された熱交換器は、熱交換チューブ３内を通過する、例えば半導体製造装置等に用いられる薬液等の流体と、チューブ４内の熱交換チューブ３の外部を通過する温調水等熱交換流体との間で熱交換が行われるが、熱交換チューブ３内に薬液等の流体を、熱交換チューブ３外部に温調水等熱交換流体をそれぞれ通過させるに代えて、それとは反対に、熱交換チューブ３内に温調水等熱交換流体を、熱交換チューブ３外部に薬液等の流体をそれぞれ通過させることもできる。
【００３０】
図５に示すように、上記熱交換チューブ３の両端部は蓋部材５の胴壁部７に開口した導出口３４に導出し、薬液等の流体のインレットポート３０およびアウトレットポート３１は蓋部材５の底壁部９に設けることもできる。
【００３１】
薬液等流体又は温調水等熱交換流体を通過させる熱交換チューブ３は、図６に示すように、フッ素樹脂製の単一のストレートなチューブで構成することもできる。この場合においても、図３に示すコイルチューブよりなる熱交換チューブの場合と同様に、熱交換チューブ３の両端部は蓋部材５の底壁部９に開口した導出口３４から導出される。その熱交換チューブ３の導出端部にはフッ素樹脂等合成樹脂製のユニオンナット３７を外嵌して、このユニオンナット３７を導出口３４にフッ素樹脂等合成樹脂製のフェルール３８を介して締め付けることにより該導出口３４と熱交換チューブ３の端部との間の隙間を密封する。
【００３２】
そのほかに、薬液等流体又は温調水等熱交換流体を通過させる熱交換チューブ３としては、図７に示すように、図１５に示される従来の熱交換器の場合と同様なフッ素樹脂等合成樹脂製の複数のストレートなチューブで構成することもできる。
【００３３】
熱交換器の全体的な形状としては、上記の各実施例のように直管状に形成するに代えて、図８に示すごとくＬ形状、あるいは図９に示すごとくＵ形状などの応用形態を採用することができる。この場合、図８に示すＬ形状の熱交換器では２個の第１，２のチューブ４Ａ，４Ｂ、２個の第１，２の蓋部材５Ａ、５Ｂ、および１個のエルボ形状のフッ素樹脂等合成樹脂製の接合部材３９を使用し、図９に示すＵ形状の熱交換器では３個の第１，２，３のチューブ４Ａ，４Ｂ，４Ｃ、２個の第１，２の蓋部材５Ａ、５Ｂ、および２個のエルボ形状のフッ素樹脂等合成樹脂製の第１，２の接合部材３９Ａ，３９Ｂを使用する。
【００３４】
図８に示すＬ形状の熱交換器においては、それぞれの一端部に第１，２の蓋部材５Ａ、５Ｂが第１のユニオンナット６で接続された第１，２のチューブ４Ａ，４Ｂの他端部同士を、１個のエルボ形状の接合部材３９及び１対の第２のユニオンナット４０で接続する。この場合、第１，２のチューブ４Ａ，４Ｂの各一端部に対して第１，２の蓋部材５Ａ、５Ｂを接続する接続構造については、上記実施例のチューブ４の端部と蓋部材５との接続構造の場合と同様に構成する。
接合部材３９はこれの両端に受口４１を互いに直交状に連通するよう開口してあり、各受口４１の内部構造は第１，２の蓋部材５Ａ、５Ｂの受口部８の内部構造と同一に構成し、第１，２のチューブ４Ａ，４Ｂの各他端部には各一端部のインナーリング１５と同様の断面形状のインナーリング１５を圧入してあるため、接合部材３９の一端の受口４１に第１のチューブ４Ａの他端部が、また他端の受口４１に第２のチューブ４Ｂの他端部が、それぞれ、上記第１，２のチューブ４Ａ，４Ｂの各一端部の第１，２の蓋部材５Ａ、５Ｂの受口部８に対する接続構造の場合と同様の接続構造を介して接続される。熱交換チューブ３は接合部材３９の内部で直角に曲げられる。
【００３５】
図９に示すＵ形状の熱交換器においては、それぞれの一端部に第１，２の蓋部材５Ａ、５Ｂが第１のユニオンナット６で接続された第１，２のチューブ４Ａ，４Ｂの他端部同士間に、第３のチューブ４Ｃを２個のエルボ形状の接合部材３９及び１対の第２のユニオンナット４０で接続する。この場合においても、第１，２のチューブ４Ａ，４Ｂの各一端部に対して第１，２の蓋部材５Ａ、５Ｂの受口部８を接続する接続構造は上記実施例のチューブ４の端部と蓋部材５との接続構造の場合と同様に構成する。そして、第１，２のチューブ４Ａ，４Ｂの各他端部に対して各接合部材３９の受口４１を接続する接続構造、および第３のチューブ４Ｃの両端部に対して各接合部材３９の受口４１を接続する接続構造は、それぞれ、上記第１，２のチューブ４Ａ，４Ｂの各一端部の第１，２の蓋部材５Ａ、５Ｂの受口部８に対する接続構造の場合と同様に接続される。熱交換チューブ３は各接合部材３９の内部で直角に曲げられる。なお、熱交換器は、図８のＬ形状の熱交換器と図９のＵ形状の熱交換器とを組み合わせた形状に構成することもできる。
【００３６】
このように熱交換器はＬ形状あるいはＵ形状などに形成することにより、配管のデッドスペースを有効に活用してコンパクトな配管システムを組むことができる。また既存配管に新たに熱交換器を設置する場合など配管システムの改造要求に対応できる形状にすることができて有利である。
【００３７】
（シール部の他の実施例）
上記チューブ４の端部と蓋部材５の受口部８との間に形成されるシール部としては、図４に示す上記実施例のように第１，２のシール部１９，２１のほかに、インナーリング１５の円筒部２４と蓋部材５の環状溝部１３による第３のシール部２３を付加することによりシール性能をより一層確実に向上させることができるが、必ずしもこれに限定されるものではない。そのほかに、たとえば、図１０に示すように、第１，２のシール部１９，２１だけを形成して、第３のシール部２３を省略するもの、すなわち蓋部材５の内奥に環状溝部１３を設けず、またインナーリング１５に円筒部２４を設けないものであってもよい。この場合、蓋部材５の内奥に設ける第１のシール面１０は、軸線Ｃに対して第２のシール面１１とは逆向きの交差状、つまり軸線Ｃ方向の外方に向けて漸次縮径するテーパ面により構成している。
【００３８】
また、図１１に示すように、蓋部材５の受口部８の先端側における端部外周に、チューブ４の内径より径大のテーパ面からなるシール面４２を形成し、このシール面４２の後方の外周に該シール面４２の外径より径大の雄ねじ１４を形成している。一方、チューブ４の端部はフレア加工して拡径部４３を形成する。かくして、チューブ４の端部の拡径部４３を蓋部材５のシール面４２上に圧入する。そして、チューブ４に外嵌されているユニオンナット６の雌ねじ２５を蓋部材５の雄ねじ１４に螺合して締め付け、ユニオンナット６の環状鍔部２６の押圧エッジ部２６ａをチューブ４の外側に当接させて拡径部４３の内周面を受口部８のシール面４２に軸方向から押し付けて密着させることにより、シール部４４を形成することもできる。
【００３９】
図１２に示すように、チューブ４の端部にフッ素樹脂等合成樹脂製の断面円弧形状のインナーリング４５を圧入して該チューブ４の端部を断面山形状に拡径膨出させ、蓋部材５の雄ねじ１４に螺合させたユニオンナット６を螺進させて強く締め付けることによって、チューブ４の端部をインナーリング４５とともに、蓋部材５の受口部８の内周に設けたテーパ状のシール面４６に対して押し付けて密着させることにより、シール部４７を形成するシール構造であってもよい。
【００４０】
また、図１３に示すように、チューブ４の端部にアウタリング４８を嵌め込み、チューブ４の末端部を該アウタリング４８の外面上に折り返して、蓋部材５の雄ねじ１４に螺合させたユニオンナット６を螺進させて強く締め付けることによって、チューブ４の端部をアウタリング４８とともに、蓋部材５の受口部８内のシール面４９に対して押し付けて密着させることにより、シール部５０を形成する、というシール構造であってもよい。
【図面の簡単な説明】
【図１】本発明の一実施例の熱交換器の正面図である。
【図２】図１の熱交換器の側面図である。
【図３】図１の熱交換器の断面図である。
【図４】図１の熱交換器のチューブ端部と蓋部材との接続構造の拡大断面図である。
【図５】他の実施例を図３に相応して示す断面図である。
【図６】図１の熱交換器の熱交換チューブの他例を図３に相応して示す断面図である。
【図７】図１の熱交換器の熱交換チューブの更に他例を図３に相応して示す断面図である。
【図８】更に他の実施例を図３に相応して示す断面図である。
【図９】更に又、他の実施例を図３に相応して示す断面図である。
【図１０】熱交換器のシール部の他例を示す断面図である。
【図１１】熱交換器のシール部の更に他例を示す断面図である。
【図１２】熱交換器のシール部の更に又、他例を示す断面図である。
【図１３】熱交換器のシール部の更に又、他例を示す断面図である。
【図１４】従来例の熱交換器の正面図である。
【図１５】図１４の熱交換器の断面図である。
【符号の説明】
１ケーシング
２熱交換室
３熱交換チューブ
４，４Ａ，４Ｂ，４Ｃチューブ
５，５Ａ，５Ｂ蓋部材
６第１のユニオンナット
８受口部
１０，１１，１２，４２，４６，４９シール面
１３環状溝部
１５インナーリング
１６圧入部
１７突出部
１９，２１，２３，４４，４７，５０シール部
２０内向きテーパ面
２２突出端面
２４円筒部
２８ａ，２８ｂ他の配管
２９ａ，２９ｂ接続部
３４導出口（導出部）
３９，３９Ａ，３９Ｂ接合部材
４０第２のユニオンナット[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a heat exchanger suitably used for a fluid pipe or the like handled in a semiconductor manufacturing device, a liquid crystal device, a chemical manufacturing device, a food production line or the like.
[0002]
[Prior art]
As this type of heat exchanger, for example, as shown in FIGS. 14 and 15, a casing 71 in which a heat exchange tube 70 is passed is ensured to have a sufficient sealing property and to withstand a certain internal pressure. To this end, a plurality of metal fastening members 73 such as a plurality of tie rods and through bolts are arranged in parallel with each other along the longitudinal direction on the outer periphery of a shell 72 constituting the main body of the casing 71. Both ends of the shell 72 are inserted into cover members 74 disposed at both ends of the shell 72, and nuts 75 are screwed into male screw portions at both ends of a metal fastening member 73 protruding from the cover members 74, thereby forming both ends of the shell 72. There is a device in which the abutting surface between the housing 71 and the lid member 74 is tightly sealed, whereby the casing 71 is configured to be sealed (for example, see Patent Document 1). Further, an O-ring 76 serving as a seal member is interposed between the butting surfaces of both ends of the shell 72 and the lid member 74 (see Patent Document 1 mentioned above).
[0003]
[Patent Document 1]
JP-A-10-160362
[Problems to be solved by the invention]
However, in the heat exchanger in which the both ends of the shell 72 and the lid member 74 are sealed by tightening the metal fastening members 73 such as a plurality of tie rods or through bolts and the nuts 75, the number of parts for sealing is reduced. In addition to increasing the cost and increasing the size of the casing structure, the metal fastening member 73 tends to corrode when placed in a place exposed to a sulfuric acid atmosphere or the like, and metal contamination cannot be avoided. In the semiconductor industry, in particular, there is a high demand for usage restrictions.
[0005]
In addition, it is necessary to periodically retighten the metal fastening member 73 in response to the loosening of the metal fastening member 73. However, since there are usually a plurality of metal fastening members 73 and at least four or more, Variations in the degree of tightening of the metal fastening members 73 are likely to occur, and this variation may cause deformation of the lid member 74 and the shell 72. If the lid member 64 or the shell 72 is deformed, the end of the shell 72 and the lid member 74 are twisted or distorted, so that a local stress concentration occurs to promote creep. In addition, the central axes of the metal tie rod and the metal tie rod sheath of the metal fastening member 73 do not coincide with each other, and the two rub against each other to increase the sliding resistance and to cause wear powder including metal powder. There was also a problem. Further, when the shell 72 and the cover member 74 are deformed, these members need to be replaced. However, since these members are usually cut products and are relatively expensive, the casing structure is replaced and the internal structure is changed. There was also a structure in which the reuse of the device (the heat exchange tube 70) was difficult due to continuous use.
[0006]
In the above heat exchanger having a connection structure in which an O-ring 76 is interposed as a seal member between both end portions of the shell 72 and the abutting surface of the lid member 74, the use of the O-ring 76 limits the corrosion resistance and the operating temperature range. There is. For example, the space in contact with the O-ring 76 cannot communicate a high-temperature chemical. In addition, contamination of the O-ring 76 due to dust generation may be a problem. Therefore, in recent years, there is a high demand in the semiconductor industry to restrict the use of such O-rings 76.
[0007]
When this type of heat exchanger is used for a chemical solution or the like, a fluorine resin such as PTFE or PFA, which has excellent corrosion resistance, is often used for components such as the shell 72 and the cover member 74. Since the fluororesin has high lubricity, the connection between the shell 72 and the lid member 74 creeps due to the vibration or heat of the pipe, thereby loosening the metal fastening members 73 such as tie rods and through bolts. Therefore, there is a problem that the fluid leaks from the connection portions at both ends of the shell 72.
[0008]
As a casing connection structure between the shell 72 and the lid member 74, a screw seal or welding may be adopted, but this is not very effective. That is, with a connection seal structure using only a screw, high sealing properties cannot be obtained, pressure resistance is not sufficient, and leakage due to creep is likely to occur. In addition, welding generally requires skill and is not an easy operation, so that there is a problem that production efficiency is low, workability on site is poor, and maintenance / inspection on site is difficult.
[0009]
The present invention has been made to solve such problems, and an object thereof is to reduce the number of parts without using metal fastening members such as tie rods and through bolts and O-rings. An object of the present invention is to provide a heat exchanger having a compact casing structure with high pressure resistance and a highly reliable seal structure, which can reduce the cost and cost. Another object of the present invention is to eliminate the use of metal members such as metal fastening members and to make all the components of the heat exchanger made of synthetic resin, thereby producing metal elution and metal abrasion powder. An object of the present invention is to provide a heat exchanger which can solve the above problem and is suitable for a semiconductor manufacturing apparatus or the like.
[0010]
Another object of the present invention is to provide a high heat-exchanger that can ensure high sealing performance even when all the components of the heat exchanger are made of fluorocarbon resin, enable heat exchange between corrosive chemicals, and reduce the temperature to a chemical resistant atmosphere. An object of the present invention is to provide a heat exchanger which can be applied and installed, and can expand the use of the heat exchanger.
[0011]
[Means for Solving the Problems]
The present invention provides heat exchange between a fluid passing through a synthetic resin heat exchange tube passed through the inside of a casing and a fluid passing between the inside of the casing and the outside of the heat exchange tube. In the heat exchanger to be performed, the casing is provided with a synthetic resin tube surrounding the outer periphery of the heat exchange tube, a receiving portion for receiving one end and the other end of the tube, and provided in the receiving portion. At least one sealing surface, a lead-out portion of the heat exchange tube, and another piping to which a piping for introducing and leading a fluid passing between the inside of the casing and the outside of the heat exchange tube is connected. A synthetic resin lid member having a connection portion, and a synthetic resin union nut which is fitted to one end and the other end of the tube and screwed to one end of the lid member, respectively. The union nut presses the tube from outside by screwing it to one end of the lid member, and the pressing action causes the end of the tube and the sealing surface of the lid member to come into close contact with each other. And at least one formed seal portion.
[0012]
In this case, the heat exchange tube, the tube, the lid member, and the union nut can all be formed of a fluororesin having excellent heat resistance and chemical resistance or an antistatic fluororesin containing a conductive substance.
[0013]
【The invention's effect】
According to the heat exchanger having the above configuration, it is possible to securely seal the end of the tube and the sealing surface of the lid member by a simple operation of simply tightening the union nut to one end of the lid member. Can be. Therefore, the number of parts is reduced, without using a metal fastening member such as a tie rod or a through bolt and an O-ring as in the related art, and an inexpensive, compact, highly pressure-resistant casing structure and a highly reliable seal structure are provided. A heat exchanger can be obtained.
[0014]
The heat exchanger has a pressure-resistant seal structure that does not use tie rods or through bolts as in the conventional casing connection structure, and can be made into a slim casing structure, and uniform sealing performance is achieved by tightening with a single union nut. It is possible to secure. In other words, by simply sealing the connection of the tube with the lid at both ends with a single union nut, a more reliable sealing structure can be obtained compared to tie rods and through bolts, and heat exchange is possible with a slim casing. The size and size of the container can be reduced. In addition, it is possible to secure the sealing performance each time by increasing the tightening of the union nut, and it is highly reliable for a long time as compared with a screw seal or an O-ring seal. Furthermore, since simple means of tightening a single union nut is sufficient, site construction is easy, unlike the connection structure by welding, and maintenance and inspection at the site can be easily performed.
[0015]
Since no metal material such as a metal fastening member is used, problems of metal elution and generation of metal abrasion powder can be solved.
[0016]
According to the tightening of the union nut, the entire outer periphery of the end of the tube can be evenly pressed, so that accidental deformation of the circular tube and the cover member does not occur. Therefore, the problem of creep and replacement of these members can be solved.
[0017]
By loosening the tightening of the union nut, the lid member can be easily removed from the end of the tube, so that the stagnation remaining in the tube can be easily removed.
[0018]
In addition, this heat exchanger can maintain sufficient airtightness even if internal pressure is applied to the tube only by tightening the union nut and can prevent fluid leakage, so that it is not necessary to use an O-ring as in the past, By molding all the constituent members with a fluororesin, it is possible to cope well with high-temperature and highly corrosive chemical liquids, and it is possible to apply and install in a chemical-resistant atmosphere, thereby expanding the range of application of the heat exchanger.
[0019]
BEST MODE FOR CARRYING OUT THE INVENTION
A preferred embodiment of the present invention will be described with reference to the drawings. 1 is a front view of the heat exchanger of one embodiment, FIG. 2 is a side view of the heat exchanger of FIG. 1, FIG. 3 is a cross-sectional view of the heat exchanger of FIG. 1, and FIG. FIG. 5 is an enlarged sectional view of a connection structure between a tube end and a lid member, FIG. 5 is a sectional view showing another embodiment corresponding to FIG. 3, and FIG. 6 is another example of the heat exchange tube of the heat exchanger of FIG. 3 is a cross-sectional view corresponding to FIG. 3, FIG. 7 is a cross-sectional view illustrating another example of the heat exchange tube of the heat exchanger of FIG. 1 corresponding to FIG. 3, and FIG. FIG. 9 is a sectional view corresponding to FIG. 3, and FIG. 9 is a sectional view corresponding to FIG.
[0020]
1 to 4, a heat exchanger according to the present invention includes a fluid passing through a heat exchange tube 3 passed through an inside (heat exchange chamber) 2 of a casing 1, and a heat exchange tube 3 inside the casing 1. Heat exchange with a fluid passing between the outside and the outside. The casing 1 includes a tube 4 surrounding the outer periphery of the heat exchange tube 3, a pair of lid members 5 for sealing one end and the other end of the tube 4, respectively, and a pair of lid members 5. It has a union nut 6 to be fastened to one end and the other end, respectively.
[0021]
The tube 4 is formed in a tubular shape from a synthetic resin such as a fluororesin having excellent heat resistance and chemical resistance, such as PFA and PTFE, and an antistatic fluororesin containing a conductive substance. Similarly, a lid member 5 made of a synthetic resin such as a fluororesin is inserted, and the connection is made by tightening a union nut 6 made of a synthetic resin such as a fluororesin.
[0022]
The lid member 5 is formed to have a body wall portion 7, a receiving portion 8 opened at one end of the body wall portion 7, and a bottom wall portion 9 closing the other end of the body wall portion 7. Then, as shown in FIG. 4, first to third sealing surfaces 10 to 12 are provided inside the receiving portion 8 of the lid member 5. The first sealing surface 10 has a tapered shape that crosses the axis C of the lid member 5, that is, gradually expands outward in the direction of the axis C, at a position inside the entrance of the receiving portion 8 of the lid member 5. It is composed of planes. The second sealing surface 11 is formed at the entrance of the receiving portion 8 by a tapered surface that crosses the axis C, that is, gradually increases in diameter outward in the direction of the axis C. The third seal surface 12 is formed by an annular groove 13 formed in the inner part of the receiving portion 8 of the lid member 5 and radially outward of the first seal surface 10 in parallel with the axis C. A male screw 14 is formed on the outer periphery of the receiving portion 8 of the lid member 5.
[0023]
On the other hand, an inner ring 15 made of a synthetic resin such as a fluororesin is pressed into one end and the other end of the tube 4. As shown in FIG. 4, the inner ring 15 is press-fitted into the end of the tube 4 to expand the end into a mountain-shaped cross-section. It is formed in a sleeve shape having a protruding portion 17 which is continuously provided and protrudes from the end of the tube 4. The press-fitting portion 16 having a mountain-shaped cross section is formed by holding the end of the tube 4 in an inclined state between the outwardly tapered surface 18 on one slope and the second sealing surface 11 on the other slope. The tapered inward surfaces 20 forming the seal portions 21 are formed. At the tip of the projecting portion 17, a projecting end surface 22 formed of a tapered surface which is in close contact with the first seal surface 10 to form a first seal portion 19, and a third end which fits in the annular groove portion 13. A cylindrical portion 24 forming the seal portion 23 is formed. The inner diameter of the inner ring 15 is set to be equal to or substantially equal to the inner diameter of the tube 4 so that the fluid flows smoothly without stagnation.
[0024]
As shown in FIG. 4, the union nut 6 has a female screw 25 formed on the inner periphery thereof, the female screw 25 being screwed to the male screw 14 of the lid member 5, and an annular flange 26 protruding inward at one end. An acute or right angle pressing edge portion 26a is provided at an axial inner end of the inner peripheral surface of the annular flange portion 26.
[0025]
Then, the end of the tube 4 into which the inner ring 15 is press-fitted is inserted into the receiving portion 8 of the lid member 5, and the female screw 25 of the union nut 6 loosely fitted in advance on the outer periphery of the end of the tube 4 is closed. It is screwed into the male screw 14 of the member 5 and tightened. With this tightening, the pressing edge portion 26a of the union nut 6 comes into contact with the enlarged diameter root portion of the enlarged diameter portion 27 of the tube 4 and presses the inner ring 15 from the axial direction. Thereby, as shown in FIG. 4, the protruding end surface 22 of the inner ring 15 is pressed against the first seal surface 10 of the lid member 5 to form the first seal portion 19, and the inner ring 15 faces inward. The end of the tube 4 is sandwiched between the tapered surface 20 and the second seal surface 11 of the lid member 5 in an inclined state to form a second seal portion 21, and the cylindrical portion 24 of the inner ring 15 is annular. The third seal portion 23 is formed by press-fitting into the groove portion 13. The first to third seal portions 19, 21 and 23 exhibit a highly reliable sealing function.
[0026]
As shown in FIG. 3, the lid 5 at one end of the tube 4 has a connecting portion 29a to which a heat exchange fluid introduction pipe 28a, which is another pipe, is connected, and the lid 5 at the other end. Is provided with a connecting portion 29b to which a lead-out pipe 28b, which is another pipe, is connected. That is, the connection portions 29a and 29b to the other pipes are provided with the inlet port 30 for heat exchange fluid such as temperature control water in the body wall 7 of one lid member 5 and the body wall 7 of the other lid member 5. An outlet port 31 is formed, and an end of the heat exchange fluid introducing pipe 28a is formed at the inlet port 30, and an end of the heat exchange fluid outlet pipe 28b is formed at the outlet port 31. Is connected via an union nut 32 and an inner ring 33 made of synthetic resin such as fluororesin, so that the heat exchange fluid flows through the inlet port 30, the heat exchange chamber 2 in the tube 4, and the outlet port 31 in this order. I have.
[0027]
The internal structure of each of the inlet port 30 and the outlet port 31 is the same as the internal structure of the receiving port 8 of the cover member 5 (however, the diameter is different), and the inlet pipe 28a and the outlet pipe 28b for the heat exchange fluid are provided. At each end, an inner ring 33 having the same cross-sectional shape as the inner ring 15 at the end of the tube 4 is press-fitted, and each of an inlet pipe 28a and an outlet pipe 28b for the inlet port 30 and the outlet port 31 is inserted. The connection structure at the end is the same as the connection structure of the end of the tube 4 to the receptacle 8 of the lid member 5, and thus a detailed description thereof will be omitted. However, the connection structure of each end of the heat exchange fluid introducing pipe 28a and the discharge pipe 28b to the inlet port 30 and the outlet port 31 is, in addition, the heat exchange fluid is connected to the inlet port 30 and the outlet port 31. Means such as direct welding or screw connection of each end of the introduction pipe 28a and the lead-out pipe 28b may be employed. That is, the connection portions 29a and 29b with other pipes may be connection means such as welding and screw connection.
[0028]
On the other hand, a heat exchange tube 3 made of a coil tube made of a synthetic resin such as a fluororesin through which a chemical solution passes passes through the inside of the tube 4, and both ends of the heat exchange tube 3 are opened to the bottom wall 9 of the lid member 5. It is derived from the derived outlet 34. A union nut 35 made of a synthetic resin such as a fluororesin is externally fitted to the leading end of the heat exchange tube 3, and the union nut 35 is fastened to the outlet 34 via a ferrule 36 made of a synthetic resin such as a fluororesin. This seals the gap between the outlet 34 and the end of the heat exchange tube 3.
[0029]
The heat exchanger configured in this manner passes through the heat exchange tube 3, for example, a fluid such as a chemical solution used in a semiconductor manufacturing apparatus or the like, and temperature-controlled water passing through the outside of the heat exchange tube 3 in the tube 4. Heat exchange is performed between the heat exchange fluid and the heat exchange fluid. Instead of passing a fluid such as a chemical solution inside the heat exchange tube 3 and a heat exchange fluid such as temperature-regulated water outside the heat exchange tube 3, respectively, Conversely, a heat exchange fluid such as temperature-regulated water can be passed through the heat exchange tube 3 and a fluid such as a chemical solution can be passed outside the heat exchange tube 3.
[0030]
As shown in FIG. 5, both ends of the heat exchange tube 3 are led out to outlets 34 opened in the body wall 7 of the lid member 5, and an inlet port 30 and an outlet port 31 for a fluid such as a chemical solution are connected to the lid member 5. May be provided on the bottom wall portion 9 of the main body.
[0031]
As shown in FIG. 6, the heat exchange tube 3 through which a fluid such as a chemical solution or a heat exchange fluid such as temperature-regulated water passes can also be constituted by a single straight tube made of a fluororesin. Also in this case, both ends of the heat exchange tube 3 are led out from the outlets 34 opened in the bottom wall 9 of the lid member 5 as in the case of the heat exchange tube composed of the coil tube shown in FIG. A union nut 37 made of a synthetic resin such as a fluororesin is externally fitted to the leading end of the heat exchange tube 3, and the union nut 37 is fastened to the outlet 34 via a ferrule 38 made of a synthetic resin such as a fluororesin. This seals the gap between the outlet 34 and the end of the heat exchange tube 3.
[0032]
In addition, as shown in FIG. 7, as the heat exchange tube 3 through which a fluid such as a chemical solution or a heat exchange fluid such as temperature-regulated water passes, as shown in FIG. It may be composed of a plurality of straight tubes made of resin.
[0033]
As the overall shape of the heat exchanger, an application form such as an L shape as shown in FIG. 8 or a U shape as shown in FIG. can do. In this case, in the L-shaped heat exchanger shown in FIG. 8, two first and second tubes 4A and 4B, two first and second lid members 5A and 5B, and one elbow-shaped fluororesin In the U-shaped heat exchanger shown in FIG. 9, three first, second, and third tubes 4A, 4B, 4C, and two first and second lid members are used. First and second joining members 39A and 39B made of synthetic resin such as 5A, 5B and two elbow-shaped fluororesins are used.
[0034]
In the L-shaped heat exchanger shown in FIG. 8, the other ends of the first and second tubes 4A and 4B, in which the first and second lid members 5A and 5B are connected to the one end by the first union nut 6, respectively. The ends are connected by one elbow-shaped joining member 39 and a pair of second union nuts 40. In this case, regarding the connection structure for connecting the first and second lid members 5A and 5B to one end of each of the first and second tubes 4A and 4B, the end of the tube 4 and the lid member 5 in the above embodiment are used. The configuration is the same as in the case of the connection structure.
The joining member 39 is opened at both ends thereof so as to communicate the receiving ports 41 at right angles to each other. The internal structure of each receiving port 41 is the internal structure of the receiving section 8 of the first and second lid members 5A and 5B. The inner ring 15 having the same cross-sectional shape as the inner ring 15 at one end is press-fitted into the other end of each of the first and second tubes 4A and 4B. The other end of the first tube 4A is connected to the other end of the first tube 4A, and the other end of the second tube 4B is connected to the other end of the first tube 4A, 4B. The first and second lid members 5A and 5B are connected to each other through a connection structure similar to that in the case of the connection structure to the receiving portion 8. The heat exchange tube 3 is bent at a right angle inside the joining member 39.
[0035]
In the U-shaped heat exchanger shown in FIG. 9, the other ends of the first and second tubes 4A and 4B, in which the first and second lid members 5A and 5B are connected to the one end by the first union nut 6, respectively. The third tube 4 </ b> C is connected between the ends by two elbow-shaped joining members 39 and a pair of second union nuts 40. Also in this case, the connection structure for connecting the receiving portions 8 of the first and second lid members 5A and 5B to the respective one end portions of the first and second tubes 4A and 4B is the same as the end structure of the tube 4 of the above embodiment. The configuration is the same as in the case of the connection structure between the unit and the lid member 5. Then, a connection structure for connecting the receiving port 41 of each joining member 39 to the other end of each of the first and second tubes 4A and 4B, and the connecting structure of each joining member 39 to both ends of the third tube 4C. The connection structure for connecting the receiving port 41 is the same as the connecting structure for connecting the one end of each of the first and second tubes 4A and 4B to the receiving section 8 of the first and second lid members 5A and 5B. Connected. The heat exchange tube 3 is bent at a right angle inside each joining member 39. Note that the heat exchanger may be configured in a shape obtained by combining the L-shaped heat exchanger in FIG. 8 and the U-shaped heat exchanger in FIG.
[0036]
By forming the heat exchanger into an L-shape or a U-shape, a compact piping system can be assembled by effectively utilizing the dead space of the piping. In addition, it is advantageous that the shape can be adapted to the demand for remodeling the piping system, for example, when a heat exchanger is newly installed in the existing piping.
[0037]
(Other Examples of Sealing Part)
As the seal portion formed between the end of the tube 4 and the receiving portion 8 of the lid member 5, in addition to the first and second seal portions 19 and 21 as in the embodiment shown in FIG. By adding the third seal portion 23 formed by the cylindrical portion 24 of the inner ring 15 and the annular groove portion 13 of the lid member 5, the sealing performance can be more reliably improved, but is not necessarily limited to this. Absent. In addition, for example, as shown in FIG. 10, only the first and second seal portions 19 and 21 are formed, and the third seal portion 23 is omitted. May not be provided, and the cylindrical portion 24 may not be provided on the inner ring 15. In this case, the first sealing surface 10 provided inside the lid member 5 has a crossing shape opposite to the axis C with respect to the second sealing surface 11, that is, gradually contracts outward in the direction of the axis C. It is constituted by a tapered surface that has a diameter.
[0038]
As shown in FIG. 11, a sealing surface 42 formed of a tapered surface having a diameter larger than the inner diameter of the tube 4 is formed on the outer periphery of the end of the receiving portion 8 of the lid member 5 on the distal end side. A male screw 14 having a diameter larger than the outer diameter of the seal surface 42 is formed on the outer periphery at the rear. On the other hand, the end of the tube 4 is flared to form an enlarged diameter portion 43. Thus, the enlarged diameter portion 43 at the end of the tube 4 is pressed into the sealing surface 42 of the lid member 5. Then, the female screw 25 of the union nut 6 externally fitted to the tube 4 is screwed into the male screw 14 of the lid member 5 and tightened, and the pressing edge 26 a of the annular flange 26 of the union nut 6 is applied to the outside of the tube 4. The sealing portion 44 can also be formed by pressing the inner peripheral surface of the enlarged diameter portion 43 against the sealing surface 42 of the receiving portion 8 from the axial direction so as to be in close contact therewith.
[0039]
As shown in FIG. 12, an inner ring 45 made of synthetic resin such as fluororesin and having an arc-shaped cross section is press-fitted into the end of the tube 4 to expand and expand the end of the tube 4 into a mountain-shaped cross section. The union nut 6 screwed into the male screw 14 is screwed forward and strongly tightened, so that the end of the tube 4 is formed together with the inner ring 45 on the inner periphery of the receiving portion 8 of the lid member 5. A seal structure in which the seal portion 47 is formed by pressing against and tightly contacting the seal surface 46 may be used.
[0040]
As shown in FIG. 13, an union in which an outer ring 48 is fitted into the end of the tube 4, the end of the tube 4 is folded over the outer surface of the outer ring 48, and screwed into the male screw 14 of the lid member 5. By screwing the nut 6 and tightening it tightly, the end of the tube 4 is pressed together with the outer ring 48 against the sealing surface 49 in the receiving portion 8 of the lid member 5 so that the sealing portion 50 is tightly attached. The seal structure may be formed.
[Brief description of the drawings]
FIG. 1 is a front view of a heat exchanger according to an embodiment of the present invention.
FIG. 2 is a side view of the heat exchanger of FIG.
FIG. 3 is a cross-sectional view of the heat exchanger of FIG.
FIG. 4 is an enlarged sectional view of a connection structure between a tube end and a lid member of the heat exchanger of FIG. 1;
FIG. 5 is a sectional view showing another embodiment corresponding to FIG. 3;
6 is a sectional view showing another example of the heat exchange tube of the heat exchanger of FIG. 1 corresponding to FIG. 3;
FIG. 7 is a sectional view showing still another example of the heat exchange tube of the heat exchanger of FIG. 1 corresponding to FIG. 3;
FIG. 8 is a sectional view showing still another embodiment corresponding to FIG. 3;
FIG. 9 is a sectional view showing still another embodiment corresponding to FIG. 3;
FIG. 10 is a cross-sectional view showing another example of the seal portion of the heat exchanger.
FIG. 11 is a cross-sectional view showing still another example of the seal portion of the heat exchanger.
FIG. 12 is a cross-sectional view showing still another example of the seal portion of the heat exchanger.
FIG. 13 is a sectional view showing still another example of the seal portion of the heat exchanger.
FIG. 14 is a front view of a conventional heat exchanger.
FIG. 15 is a cross-sectional view of the heat exchanger of FIG.
[Explanation of symbols]
Reference Signs List 1 casing 2 heat exchange chamber 3 heat exchange tubes 4, 4A, 4B, 4C tubes 5, 5A, 5B lid member 6 first union nut 8 receiving portions 10, 11, 12, 42, 46, 49 sealing surface 13 annular Groove 15 Inner ring 16 Press-fit portion 17 Projecting portion 19, 21, 23, 44, 47, 50 Sealing portion 20 Inwardly tapered surface 22 Projecting end surface 24 Cylindrical portion 28a, 28b Other piping 29a, 29b Connection portion 34 Part)
39, 39A, 39B Joining member 40 Second union nut

Claims

A heat exchanger that performs heat exchange between a fluid passing through a heat exchange tube made of synthetic resin passed through the inside of the casing and a fluid passing between the inside of the casing and the outside of the heat exchange tube. At
Said casing,
A tube made of a synthetic resin surrounding the outer periphery of the heat exchange tube,
A receiving portion for receiving one end and the other end of the tube, at least one sealing surface provided in the receiving portion, a lead-out portion of the heat exchange tube, and an inside of the casing and an outside of the heat exchange tube A pair of synthetic resin lid members having a connection portion with another pipe to which a pipe for introduction and discharge of a fluid passing therethrough is connected;
A union nut made of a synthetic resin screwed to one end and the other end of the tube, and screwed to one end of the lid member,
The union nut presses the tube from the outside thereof by screwing to one end of the lid member, and the pressing action forms the end of the tube and the sealing surface of the lid member in close contact. At least one sealed portion,
A heat exchanger, comprising:

A sealing surface formed by a tapered surface that gradually expands toward the outside in the axial direction of the lid member, and a sealing surface formed inwardly of an inlet of a receiving portion of the lid member; and an end portion of the tube. The inner ring is press-fitted so as to expand the end into a mountain-shaped cross-section. The heat exchanger according to claim 1, wherein

The sealing portion has a sealing surface formed by a tapered surface intersecting with the axis of the lid member at the entrance of the receiving portion of the lid member, and the end portion of the tube has a mountain-shaped cross section at the end portion. A seal portion is formed by sandwiching the end of the tube in an inclined state between the inner ring and the inwardly tapered surface formed on the slope of the press-fit portion of the inner ring press-fitted so as to expand and expand. The heat exchanger according to claim 1.

An inner ring in which the seal portion is press-fitted into an end portion of the tube in an annular groove formed radially outward of the seal surface inside the receiving portion of the lid member and parallel to the axis of the lid member. The heat exchanger according to claim 2, wherein a cylindrical portion formed at a tip of the protruding portion is fitted to form a seal portion.

A heat exchanger that performs heat exchange between a fluid passing through a heat exchange tube made of synthetic resin passed through the inside of the casing and a fluid passing between the inside of the casing and the outside of the heat exchange tube. At
The casing includes first and second synthetic resin tubes arranged at right angles to each other, and a synthetic resin lid member is provided at one end of each of the first and second tubes with a first union made of synthetic resin. The other ends of the first and second tubes are connected to each other by one elbow-shaped synthetic resin joining member and a pair of synthetic resin second union nuts.
The lid member has a receiving portion for receiving one end of each of the first and second tubes, at least one sealing surface provided in the receiving portion, a lead-out portion of the heat exchange tube, and the inside of the casing and It has a connection portion with another pipe to which a pipe for introduction and discharge of a fluid passing between the outside of the heat exchange tube is connected,
The first union nut is externally fitted to one end of each of the first and second tubes, and is screwed to one end of the lid member. The first union nut is screwed to one end of the lid member to tighten the screw. One end of each of the first and second tubes is pressed from the outside thereof, and the pressing action causes each end of the first and second tubes to be in close contact with the sealing surface of the lid member to seal at least one portion. Forming a part,
The joining member is formed so that the receiving ports communicate with each other at right angles at both ends, the other end of the first tube is provided at one receiving port, and the other end of the second tube is provided at the other receiving port. Are connected through the same connection structure as in the case of the connection structure of the one end portion of each of the first and second tubes to the receptacle of the lid member, and the heat exchange tubes are formed at right angles inside the joining member. A heat exchanger characterized by being bent.

A heat exchanger that performs heat exchange between a fluid passing through a heat exchange tube made of synthetic resin passed through the inside of the casing and a fluid passing between the inside of the casing and the outside of the heat exchange tube. At
The casing is a synthetic resin first and second tubes arranged in parallel and opposed to each other, and a synthetic resin first union nut connected to one end of each of the first and second tubes. A lid member and a synthetic resin second joint nut connected between the other ends of the first and second tubes by two elbow-shaped synthetic resin joining members and a pair of synthetic resin second union nuts. And three tubes,
The lid member has a receiving portion for receiving one end of each of the first and second tubes, at least one sealing surface provided in the receiving portion, a lead-out portion of the heat exchange tube, and the inside of the casing and It has a connection portion with another pipe to which a pipe for introduction and discharge of a fluid passing between the outside of the heat exchange tube is connected,
The first union nut is externally fitted to one end of each of the first and second tubes, and is screwed to one end of the lid member. The first union nut is screwed to one end of the lid member to tighten the screw. One end of each of the first and second tubes is pressed from the outside thereof, and the pressing action causes each end of the first and second tubes to be in close contact with the sealing surface of the lid member to seal at least one portion. Forming a part,
A third connecting structure for connecting the receiving ports of the respective connecting members to the other ends of the first and second tubes; The connection structures for connecting the receptacles of the respective joining members to both ends of the tube are connected in the same manner as the connection structure for the receptacles of the lid members at one end of the first and second tubes, respectively. Yes,
The heat exchanger wherein the heat exchange tube is bent at a right angle inside each joint member.

The heat exchanger according to any one of claims 1 to 6, wherein the heat exchange tube, the tube, the lid member, and the union nut are all made of a fluororesin.