CN112469148B - Clean fluid tubular heater with two-stage sealing structure and sealing method - Google Patents
Clean fluid tubular heater with two-stage sealing structure and sealing method Download PDFInfo
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- CN112469148B CN112469148B CN202011442579.9A CN202011442579A CN112469148B CN 112469148 B CN112469148 B CN 112469148B CN 202011442579 A CN202011442579 A CN 202011442579A CN 112469148 B CN112469148 B CN 112469148B
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- 238000007789 sealing Methods 0.000 title claims abstract description 125
- 239000012530 fluid Substances 0.000 title claims abstract description 72
- 238000000034 method Methods 0.000 title claims abstract description 12
- 238000010438 heat treatment Methods 0.000 claims abstract description 97
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 88
- 239000010453 quartz Substances 0.000 claims abstract description 87
- 238000002955 isolation Methods 0.000 claims abstract description 27
- 230000000694 effects Effects 0.000 claims abstract description 12
- 230000006835 compression Effects 0.000 claims description 18
- 238000007906 compression Methods 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 15
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 9
- 230000007774 longterm Effects 0.000 claims description 7
- -1 polytetrafluoroethylene Polymers 0.000 claims description 7
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 7
- 238000003825 pressing Methods 0.000 claims description 7
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 3
- 229910052731 fluorine Inorganic materials 0.000 claims description 3
- 239000011737 fluorine Substances 0.000 claims description 3
- 230000003749 cleanliness Effects 0.000 abstract description 10
- 239000007788 liquid Substances 0.000 description 12
- 238000007654 immersion Methods 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000000671 immersion lithography Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/02—Details
- H05B3/04—Waterproof or air-tight seals for heaters
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
- H05B3/42—Heating elements having the shape of rods or tubes non-flexible
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- Instantaneous Water Boilers, Portable Hot-Water Supply Apparatuses, And Control Of Portable Hot-Water Supply Apparatuses (AREA)
Abstract
The invention discloses a clean fluid tubular heater with a two-stage sealing structure and a sealing method, wherein the clean fluid tubular heater comprises a quartz heating pipe and two isolation sealing rings symmetrically arranged at the left side and the right side, the isolation sealing rings are outwards connected with an interface end through internal threads, a port flow path is arranged in the interface end, an annular limiting groove is arranged at the inner side of the isolation sealing ring, the left end and the right end of the quartz heating pipe are arranged in the limiting groove, the two ends of the heating pipe divide the limiting groove into inner side and outer side, and a first-stage sealing gasket is arranged at the joint of the ports at the left side and the right side of the quartz heating pipe and the limiting groove to form a first-stage sealing structure of the quartz heating pipe end; and a second-stage sealing ring is arranged between the outer side of the quartz heating pipe and the outer side of the limiting groove, so that a second-stage sealing structure of the outer side of the quartz heating pipe is formed. The sealing connection effect can be improved, the sealing connection difficulty is reduced, the risk of fluid leakage is avoided, and the high cleanliness requirement can be effectively ensured.
Description
Technical Field
The present invention relates to a fluid tube heater, and more particularly, to a clean fluid tube heater for use in a fluid system and a sealing method.
Background
Many applications in the semiconductor industry require the use of highly clean, tightly temperature controlled liquids, and often require the use of heaters suitable for use in highly clean applications to regulate the temperature of the liquid. For example, in immersion lithography systems, in order to achieve better lithography results and higher exposure quality, it is necessary to fill a steady flow of immersion liquid between the projection objective and the wafer substrate; in order to ensure that the flow of immersion liquid has minimal effect on the laser beam passing therethrough, it is required that the temperature of the flow of immersion liquid be closely regulated to ensure that its optical properties are uniform; a heater, condenser, heat exchanger, etc. are required to control the temperature of the flow of immersion liquid before it flows into the immersion unit. In order to meet the high cleanliness requirement of liquid, high cleanliness materials such as quartz glass, high cleanliness stainless steel, polytetrafluoroethylene and the like are required to be adopted as materials in contact with the liquid in the heater, and meanwhile, the characteristics of the high cleanliness materials and the problem of introducing pollutants are also considered in the assembly mode.
The invention patent in China with the application number of CN201721225348.6 discloses a stable, durable and safe liquid heating pipe, which is an integrated pipe type heater, wherein two sides of the heating pipe for fluid flow are connected with an external pipeline through connecting pieces, and leakage of fluid in the heating process of the heater is prevented by means of tightness of a connecting mode between the connecting pieces and the heating pipe. However, the sealing effect of the sealing mode is limited and the heating pipe is required to have certain good physical characteristics, so that the tight connection with the connecting piece is realized, and meanwhile, stress deformation or fracture is avoided, and materials used for manufacturing the heating pipe and having high cleanliness and high thermal conductivity, such as quartz, are difficult to realize tight sealing with the connecting piece through connection modes of welding, cementing, threaded connection and the like.
Chinese patent application No. CN201080057250.9 discloses a double-wall axial flow electric heater for leak-sensitive applications, which is an inserted heater rod heater with a single pressure seal at the through-hole of the heater rod for achieving a heated fluid seal; the sealing mode has limited sealing effect, and if the flow is increased during the heating process, the risk of fluid leakage is high.
Disclosure of Invention
The invention provides the clean fluid pipe heater with the two-stage sealing structure and the sealing method, which are used for solving the problems that the existing fluid pipe heater is high in sealing connection difficulty, limited in connection sealing effect, high in fluid leakage risk and the like, and can improve the sealing connection effect, reduce the sealing connection difficulty, avoid the occurrence of fluid leakage risk and effectively ensure the high-cleanliness requirement.
The invention adopts the concrete technical scheme for solving the technical problems that: the utility model provides a clean fluid tubular heater with two-stage seal structure, includes quartz heating pipe, its characterized in that: the device comprises a quartz heating pipe, a connecting port and a sealing gasket, wherein the connecting port is arranged on the inner side of the quartz heating pipe, the connecting port is connected with the connecting port through an inner thread, the sealing gasket is connected with the connecting port through an outer thread, the connecting port is connected with the connecting port through an inner thread, the connecting port is connected with the connecting port through an outer thread, the connecting port is connected with the connecting port through an inner thread, and the connecting port is connected with the connecting port through an outer thread; and a second-stage sealing ring is arranged between the outer side of the quartz heating pipe and the outer side of the limiting groove, so that a second-stage sealing structure of the outer side of the quartz heating pipe is formed. The tightness of the tubular heater is effectively enhanced through two-stage sealing, and the reliability, stability and effectiveness of the sealing of the heater in long-term operation are enhanced; the sealing connection effect can be improved, the sealing connection difficulty is reduced, the risk of fluid leakage is avoided, and the high cleanliness requirement can be effectively ensured.
Preferably, the inner side of the isolation seal ring is connected with a pressing ring which is positioned on the outer side of the quartz heating pipe, and the pressing ring presses the second-stage seal ring to be arranged at a position between the inner side of the isolation seal ring and the outer side of the limiting groove, so that a second-stage seal structure on the outer side of the quartz heating pipe is formed. The reliability, stability and effectiveness of press-fitting sealing of the second-stage sealing ring are improved.
Preferably, a plurality of limiting through holes are formed in the isolating seal ring and located at the outer side of the compression ring, the same fastening connecting piece is arranged between the corresponding limiting through holes in the isolating seal ring on the left side and the right side in a penetrating mode, a nut is fixedly arranged at the left end of the fastening connecting piece, pretightening force is applied to the fastening connecting piece, the stored pretightening force is locked through the nut, and tight connection between the quartz heating pipe and the isolating seal ring is achieved. The effectiveness of tight connection and compression force adjustment control between the isolation sealing rings at two sides is improved, and the problem that the quartz heating pipe cannot bear excessive radial force is solved more effectively, so that the phenomenon of breaking of the quartz heating pipe in the existing sealing structure mode is avoided.
Preferably, the inner side outer end inner thread connecting section of the isolation seal ring, the axial cut-off section of the compression ring is provided with an outer trapezoid step annular body, and an outer thread connecting section matched with the inner thread connecting section is arranged at the upper outer stage of the outer trapezoid annular body. The compression connection sealing effectiveness between the compression ring and the isolation sealing ring is improved, and the reliability, stability and effectiveness of the compression mounting sealing of the second-stage sealing ring are improved.
Preferably, the axial cut-off surface of the pressure ring is provided with an inner trapezoid step annular surface, wherein an upper inner step section of the inner trapezoid step annular surface is used for pressing the second-stage sealing ring at a position between the outer side of the quartz heating pipe and the outer side of the limiting groove, and a lower inner step section of the inner trapezoid step annular surface is provided with an inner circumference diameter dimension larger than that of the upper inner step section. The effectiveness of compression connection sealing between the compression ring and the isolation seal ring is improved, and the second-stage sealing is improved
The press-fitting sealing of the ring is reliable, stable and effective.
Preferably, a groove is formed in one side, connected with the quartz heating pipe, of the first-stage sealing gasket, and the left end part and the right end part of the quartz heating pipe are not in the groove, so that the sealing effect of the first-stage sealing structure is improved.
Preferably, the isolating seal ring is provided with 2, 3 or 4 limiting through holes at the outer side of the compression ring. The tight connection between the isolation sealing rings at the two sides and the balanced effectiveness of the adjustment and control of the pressing force are improved, and the sealing tightness of the quartz heating pipe is improved.
Preferably, the gap distance between the first-stage sealing gasket and the second-stage sealing ring in the axial direction is 2-8 mm. And the balance reliability and effectiveness between the sealing capacity of the secondary seal and the leakage accumulation are improved.
Preferably, the first-stage sealing gasket and the second-stage sealing ring adopt polytetrafluoroethylene material structures or fluorine-containing rubber material structures.
Another object of the present invention is to provide a method for sealing a clean fluid tubular heater with a two-stage sealing structure, which is characterized in that: comprising the following sealing method
A1. When the pressure of the fluid in the quartz heating pipe is maintained at a normal level, the fluid in the quartz heating pipe can be completely sealed in the quartz heating pipe under the sealing action of the first-stage sealing gasket in the first-stage sealing structure according to one of the technical schemes;
A2. when the fluid flow in the quartz heating pipe is overlarge or the pressure suddenly increases in a step-type manner, the fluid can generate larger impact on the periphery in the quartz heating pipe; at this time, a small amount of fluid may leak out through the first-stage seal, the leaked fluid enters the gap between the first-stage sealing gasket and the second-stage sealing ring, and under the second-stage sealing effect formed by the second-stage sealing ring according to one of the above technical schemes, the fluid leaked out through the first-stage sealing structure is completely sealed in the sealing gap between the first-stage sealing gasket and the second-stage sealing ring, and the second-stage sealing structure can effectively strengthen the tightness of the tubular heater and enhance the reliability of the heater in long-term operation.
When the heating temperature is controlled, when the fluid pressure in the quartz heating pipe is maintained at a normal level, the fluid in the quartz heating pipe is completely sealed in the quartz heating pipe under the first-stage seal of the device, when the fluid flow in the quartz heating pipe is overlarge or the pressure is suddenly increased in a step-like manner, the fluid can generate larger impact on the periphery in the quartz heating pipe, at the moment, a small amount of fluid possibly leaks out through the first-stage seal and enters a gap between the first-stage seal gasket and the second-stage seal ring, and under the second-stage seal of the sealing method, the fluid leaked out through the first-stage seal is completely sealed in the gap between the first-stage seal gasket and the second-stage seal ring, so that the sealing performance of the tubular heater can be effectively enhanced, and the long-term working reliability of the heater is enhanced.
The beneficial effects of the invention are as follows: by arranging the first-stage seal and the second-stage seal in the invention, the tightness of the tubular heater is effectively enhanced by the two-stage seal, and the reliability, stability and effectiveness of the seal of the heater in long-term operation are enhanced; the sealing connection effect can be improved, the sealing connection difficulty is reduced, the risk of fluid leakage is avoided, and the high cleanliness requirement can be effectively ensured. According to the invention, quartz is selected as a heating pipe manufacturing material, pollution impurities are not easy to generate when fluid is heated, and the isolating seal ring and the first-stage sealing gasket in the invention are made of materials with high cleanliness, high temperature resistance and corrosion resistance, such as ptfe, and the like, so that the pollution impurities are not easy to generate when the fluid flows through the sealing ring; the device has no specific requirement on the direction of fluid inlet and outlet, is convenient to install and use, and the interface ends in the device adopt threaded connection, and can be replaced when being connected with pipelines with different diameters.
Description of the drawings:
the invention is described in further detail below with reference to the drawings and the detailed description.
FIG. 1 is a schematic view of the structure of a clean fluid tubular heater of the present invention.
Fig. 2 is a schematic side view of the structure of fig. 1.
FIG. 3 is a schematic diagram of the internal cross-sectional structure of the clean fluid tubular heater of the present invention.
Fig. 4 is a schematic view of the internal structure of the clean fluid tubular heater of the present invention in normal use.
Fig. 5 is an enlarged schematic view of the structure at a in fig. 4.
FIG. 6 is a schematic flow diagram of the internal flow field of the clean fluid tubular heater of the present invention when a sudden flow step or large flow occurs.
Fig. 7 is an enlarged schematic view of the structure at B in fig. 6.
Detailed Description
Example 1:
in the embodiments of fig. 1, fig. 2, fig. 3, fig. 4, fig. 5, fig. 6 and fig. 7, a clean fluid pipe heater with a two-stage sealing structure comprises a quartz heating pipe 5, and further comprises two isolation sealing rings 1 symmetrically arranged at the left side and the right side, each isolation sealing ring 1 is externally connected with an interface end head 2 through internal threads, a port flow path 3 for inflow or outflow of external fluid is arranged in each interface end head 2, annular limiting grooves 4 are formed in the inner sides of the isolation sealing rings 1, the left end and the right end of the quartz heating pipe 5 are fixedly arranged in the limiting grooves 4, the two ends of the quartz heating pipe 5 divide the limiting grooves 4 into inner sides and outer sides, and first-stage sealing gaskets 6 are fixedly arranged at the joints of the ports at the left side and the right side of the quartz heating pipe 5 and the limiting grooves 4 to form a first-stage sealing structure of the ends of the quartz heating pipe 5; a second-stage sealing ring 8 is arranged between the outer side of the quartz heating pipe 5 and the outer side of the limiting groove 4 in a mounting connection manner, so that a second-stage sealing structure of the outer side of the quartz heating pipe 5 is formed. The inner side of the isolation seal ring 1 is connected with and provided with a pressure ring 7 on one side of the quartz heating pipe 5, and the pressure ring 7 is used for tightly contacting the second-stage seal ring 8 and is arranged at the position between the inner side of the isolation seal ring 1 and the outer side of the limiting groove 4, so that a second-stage seal structure on the outer side of the quartz heating pipe 5 is formed. The first-stage sealing gasket 6 and the second-stage sealing ring 8 are made of polytetrafluoroethylene (ptfe) and other materials with high cleanliness, high temperature resistance and corrosion resistance. Of course, the structure of the fluorine-containing rubber material can be adopted. The isolation seal ring 1 is provided with a plurality of limit through holes 9 at the outer side of the compression ring 7, the corresponding limit through holes 9 on the isolation seal ring 1 at the left side and the right side are fixedly connected with the same fastening connecting piece 10 in a penetrating manner, a nut 11 is fixedly arranged at the left end of the fastening connecting piece 10, a pretightening force is applied to the fastening connecting piece 10, and the stored pretightening force is locked through the nut 11, so that tight connection between the quartz heating pipe 5 and the isolation seal ring 3 is realized. Further, 2, 3 or 4 limit through holes 9 are arranged on the isolation seal ring 1 and positioned at the outer side of the compression ring 7. The fastening connectors 10 can be arranged on the outer side of the quartz heating pipe 5 in a ring-shaped uniformly distributed manner, wherein the number of the fastening connectors is the same as that of the limiting through holes 9, so that the uniformity of the pressing force applied to the quartz heating pipe 5 is enhanced, and the sealing property of the first-stage seal is enhanced. The inner side outer end of the isolation seal ring 1 is provided with an inner threaded connection section 12, the axial cut-off section of the compression ring 7 is provided with an outer trapezoid step annular body, and an outer threaded connection section matched with the inner threaded connection section 12 is arranged at the upper outer stage of the outer trapezoid annular body. The axial cut-off surface of the compression ring 7 is provided with an inner trapezoid step annular surface, wherein an upper inner step section of the inner trapezoid step annular surface is used for compressing the second-stage sealing ring 8 at a position between the outer side of the quartz heating pipe and the outer side of the limiting groove 4, and a lower inner step section 13 of the inner trapezoid step annular surface is provided with an inner circumference diameter size larger than that of the upper inner step section. The first-stage sealing gasket 6 is provided with a groove on the side which is connected with the quartz heating tube 5, and the left and right end parts of the quartz heating tube 5 are not arranged in the groove.
The gap distance between the first-stage gasket 6 and the second-stage gasket 8 in the axial direction was 5mm. Of course, the gap distance between the first-stage gasket 6 and the second-stage gasket 8 in the axial direction may be 2 to 8mm. If the gap is too small, the sealing capability of the second-stage seal is weak; if the gap is too large, the gas in the gap is heated by the quartz heating tube 5 and expands, and the liquid accumulated in the gap may be pushed out of the second-stage seal ring 8.
Quartz is a brittle material, so that the quartz heating tube 5 cannot withstand excessive radial forces to avoid breaking the quartz heating tube 5. The invention uses the nut 11 to lock the isolation seal ring 1 and the fastening connector 10 to realize the position constraint of the quartz heating pipe 5, so that the assembly force of the quartz heating pipe 5 is mainly axial; the primary seal against liquids and the external environment is achieved by means of the first-stage gasket 6. The second-stage sealing ring 8 is limited by the isolating sealing ring 1 and the compression ring 7 through axial assembly, and although the second-stage sealing ring 8 is abutted against the quartz heating pipe 5 to form a certain radial compression force, the action force is obviously smaller than the assembly force for limiting the second-stage sealing ring 8; the invention thus achieves a two-stage sealing of the quartz heating tube 5 with as little radial force on the quartz heating tube 5 as possible.
Example 2:
in the embodiments of fig. 1, 2, 3, 4, 5, 6 and 7, a method for sealing a clean fluid pipe heater with a two-stage sealing structure comprises the following sealing methods:
A1. when the fluid pressure in the quartz heating tube 5 is maintained at the normal level, the fluid in the quartz heating tube 5 can be completely sealed in the quartz heating tube 5 under the sealing action of the first-stage sealing gasket 6 in the first-stage sealing structure described in embodiment 1;
A2. when the flow rate of the fluid in the quartz heating pipe 5 is overlarge or the pressure is suddenly increased in a step-type manner, the fluid can generate larger impact on the periphery in the quartz heating pipe 5; at this time, a small amount of fluid may leak out through the first-stage seal, and the leaked fluid enters the gap between the first-stage gasket 6 and the second-stage seal ring 8, and under the second-stage seal effect formed by the second-stage seal ring 8 described in embodiment 1, the fluid leaked out through the first-stage seal structure is completely sealed in the seal gap between the first-stage gasket 6 and the second-stage seal ring 8, and the second-stage seal structure can effectively enhance the tightness of the tubular heater, and enhance the reliability of the long-term operation of the heater. Otherwise, the same as in example 1 was used.
When the heating temperature is controlled, when the pressure of fluid in the quartz heating pipe 5 is maintained at a normal level, the fluid in the quartz heating pipe 5 is completely sealed in the quartz heating pipe 5 under the first-stage seal of the device, when the flow rate of the fluid in the quartz heating pipe 5 is overlarge or the pressure is suddenly increased in a step-like manner, the fluid can generate larger impact on the periphery in the quartz heating pipe 5, at the moment, a small amount of fluid possibly leaks out through the first-stage seal and enters a gap between the first-stage sealing gasket 6 and the second-stage sealing ring 8, and under the second-stage seal of the device, the fluid leaked through the first-stage sealing gasket 6 and the second-stage sealing ring 8 are completely sealed in the gap between the first-stage sealing gasket 6 and the second-stage sealing ring 8, so that the tightness of the tubular heater can be effectively enhanced, and the reliability of the heater in long-term operation can be enhanced.
When the heater is used, the outer side of the quartz heating pipe 5 generates heat and is conducted to the inner side of the quartz heating pipe, and fluid enters from the interface end head 2 and flows into the quartz heating pipe 5 through the port flow path 3 to exchange heat with the quartz heating pipe 5. Before the device is used, the device is connected with an external pipeline through the interface end head 2, so that the inflow or outflow of liquid can be realized on both sides of the device, and the direction of the device can be changed at will.
The first and second are described above for illustrative purposes only and are not to be construed as indicating or implying a relative importance of the parts they refer to or the number of technical features they contain.
The present invention is not limited to the above-described specific embodiment, but may be an embodiment having other structures, for example:
the quartz heating tube 5 can also be a heating tube with a structure of high-cleanliness stainless steel or polytetrafluoroethylene material instead of the high-cleanliness stainless steel or polytetrafluoroethylene material, and the high-cleanliness stainless steel or polytetrafluoroethylene heating tube belongs to the protection scope of the invention.
In the description of the positional relationship of the present invention, the terms such as "inner", "outer", "upper", "lower", "left", "right", and the like, which indicate an orientation or positional relationship based on that shown in the drawings, are merely for convenience of description of the embodiments and for simplification of the description, and do not indicate or imply that the apparatus or element in question must have a specific orientation, be constructed and operated in a specific orientation, and thus are not to be construed as limiting the present invention.
The foregoing and construction describes the basic principles, principal features and advantages of the present invention product, as will be appreciated by those skilled in the art. The foregoing examples and description are provided to illustrate the principles of the invention and to provide various changes and modifications without departing from the spirit and scope of the invention as defined by the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (8)
1. The utility model provides a clean fluid tubular heater with two-stage seal structure, includes quartz heating pipe, its characterized in that: the device comprises a quartz heating pipe, a connecting port and a sealing gasket, wherein the connecting port is arranged on the inner side of the quartz heating pipe, the connecting port is connected with the connecting port through an inner thread, the sealing gasket is connected with the connecting port through an outer thread, the connecting port is connected with the connecting port through an inner thread, the connecting port is connected with the connecting port through an outer thread, the connecting port is connected with the connecting port through an inner thread, and the connecting port is connected with the connecting port through an outer thread; a second-stage sealing ring is arranged between the outer side of the quartz heating pipe and the outer side of the limiting groove to form a second-stage sealing structure of the outer side of the quartz heating pipe; the inner side of the isolation seal ring is positioned on the outer side of the quartz heating pipe and is connected with a pressing ring, and the pressing ring presses the second-stage seal ring to be arranged at a position between the inner side of the isolation seal ring and the outer side of the limiting groove, so that a second-stage seal structure on the outer side of the quartz heating pipe is formed; the isolation seal ring on and be located clamping ring outside department and be equipped with a plurality of spacing through-hole, run through between the corresponding spacing through-hole on the isolation seal ring of left and right sides and be equipped with same root fastening connection spare, lean on left end fixed mounting at fastening connection spare to have the nut, apply the pretightning force to fastening connection spare, pin the pretightning force of storage through the nut, realize tight connection between quartz heating pipe and the isolation seal ring.
2. The clean fluid tube heater as defined in claim 1, wherein: the inner side outer end inner thread connecting section of the isolation seal ring is provided with an outer trapezoid step annular body on the axial cut-off section of the compression ring, and an outer thread connecting section matched with the inner thread connecting section is arranged at the upper outer stage of the outer trapezoid annular body.
3. A clean fluid tube heater according to claim 2, wherein: the axial cut-off surface of the compression ring is provided with an inner trapezoid step annular surface, wherein an upper inner step section of the inner trapezoid step annular surface is used for compressing the second-stage sealing ring at a position between the outer side of the quartz heating pipe and the outer side of the limiting groove, and a lower inner step section of the inner trapezoid step annular surface is provided with an inner circumference diameter larger than that of the upper inner step section.
4. The clean fluid tube heater as defined in claim 1, wherein: the first-stage sealing gasket is provided with a groove at one side connected with the quartz heating pipe, and the left end and the right end of the quartz heating pipe are not in the groove.
5. The clean fluid tube heater as defined in claim 1, wherein: and 2, 3 or 4 limiting through holes are formed in the isolating seal ring and located at the outer side of the compression ring.
6. The clean fluid tube heater as defined in claim 1, wherein: the gap distance between the first-stage sealing gasket and the second-stage sealing ring in the axial direction is 2-8 mm.
7. A clean fluid tube heater according to claim 1 or 3 or 4 or 5, wherein: the first-stage sealing gasket and the second-stage sealing ring adopt polytetrafluoroethylene material structures or fluorine-containing rubber material structures.
8. A sealing method of a clean fluid pipe heater with a two-stage sealing structure is characterized by comprising the following steps of: comprising the following sealing method
A1. When the pressure of the fluid in the quartz heating pipe is maintained at a normal level, the fluid in the quartz heating pipe can be completely sealed in the quartz heating pipe under the sealing action of the first-stage sealing gasket in the first-stage sealing structure according to any one of claims 1 to 7;
A2. when the fluid flow in the quartz heating pipe is overlarge or the pressure suddenly increases in a step-type manner, the fluid can generate larger impact on the periphery in the quartz heating pipe; at this time, a small amount of fluid may leak out through the first-stage seal, and the leaked fluid enters into the gap between the first-stage gasket and the second-stage seal ring, and under the second-stage seal effect formed by the second-stage seal ring according to any one of claims 1 to 7, the fluid leaked out through the first-stage seal structure is completely sealed in the seal gap between the first-stage gasket and the second-stage seal ring, and the second-stage seal structure can effectively enhance the tightness of the tubular heater and enhance the reliability of the heater in long-term operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011442579.9A CN112469148B (en) | 2020-12-11 | 2020-12-11 | Clean fluid tubular heater with two-stage sealing structure and sealing method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011442579.9A CN112469148B (en) | 2020-12-11 | 2020-12-11 | Clean fluid tubular heater with two-stage sealing structure and sealing method |
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| CN112469148A CN112469148A (en) | 2021-03-09 |
| CN112469148B true CN112469148B (en) | 2023-06-02 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201166445Y (en) * | 2007-12-07 | 2008-12-17 | 慈溪市福音电器有限公司 | Intelligent pocket-size electric boiler |
| CN205864767U (en) * | 2016-07-04 | 2017-01-04 | 广东新宝电器股份有限公司 | A kind of multiple protective quartz ampoule heater |
| CN207219063U (en) * | 2017-10-18 | 2018-04-10 | 深圳云膜科技有限公司 | A kind of electrothermal film heating pipe |
| CN109195234A (en) * | 2018-08-28 | 2019-01-11 | 扬中市国鹰电器有限公司 | A kind of sealing structure and processing method of electric heating tube |
-
2020
- 2020-12-11 CN CN202011442579.9A patent/CN112469148B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201166445Y (en) * | 2007-12-07 | 2008-12-17 | 慈溪市福音电器有限公司 | Intelligent pocket-size electric boiler |
| CN205864767U (en) * | 2016-07-04 | 2017-01-04 | 广东新宝电器股份有限公司 | A kind of multiple protective quartz ampoule heater |
| CN207219063U (en) * | 2017-10-18 | 2018-04-10 | 深圳云膜科技有限公司 | A kind of electrothermal film heating pipe |
| CN109195234A (en) * | 2018-08-28 | 2019-01-11 | 扬中市国鹰电器有限公司 | A kind of sealing structure and processing method of electric heating tube |
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| CN112469148A (en) | 2021-03-09 |
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