CN112503758B - Clean fluid tubular heater with double-layer isolation seal ring - Google Patents
Clean fluid tubular heater with double-layer isolation seal ring Download PDFInfo
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- CN112503758B CN112503758B CN202011436532.1A CN202011436532A CN112503758B CN 112503758 B CN112503758 B CN 112503758B CN 202011436532 A CN202011436532 A CN 202011436532A CN 112503758 B CN112503758 B CN 112503758B
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- seal ring
- ring
- seal
- heater
- isolation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/101—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium using electric energy supply
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H9/00—Details
- F24H9/0005—Details for water heaters
- F24H9/001—Guiding means
- F24H9/0015—Guiding means in water channels
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H9/00—Details
- F24H9/18—Arrangement or mounting of grates or heating means
- F24H9/1809—Arrangement or mounting of grates or heating means for water heaters
- F24H9/1818—Arrangement or mounting of electric heating means
Abstract
The invention discloses a clean fluid tubular heater with double-layer isolation seal rings, which comprises isolation seal rings arranged at two sides of the heater, wherein the isolation seal rings are of a double-layer split structure and comprise a seal ring outer ring and a seal ring inner liner, the seal ring outer ring is used for reducing the seal ring outer ring under a high pressure-bearing state so as to avoid the heater damage caused by deformation failure, the seal ring outer ring is coaxially sleeved at the outer side of the seal ring inner liner, and the inner side wall of the seal ring outer ring is tightly attached to the outer side wall of the seal ring inner liner; the inner side of the sealing ring lining and the position, close to the outer side, of the port flow passage are provided with annular limiting grooves, and the left end and the right end of the tubular heating pipe are respectively and fixedly connected with the positions between the limiting grooves on the two corresponding sides. The flow of fluid in the clearance can be accelerated, the accumulation of air bubbles in the clearance is avoided, the phenomenon that the local heat accumulation of the heat pipe cannot be dissipated in time is avoided, the local high temperature is prevented from being caused, and the use safety and reliability of the heat pipe are improved.
Description
Technical Field
The present invention relates to a fluid tube heater, and more particularly, to a clean fluid tube heater used in a fluid system.
Background
Many applications in the semiconductor industry require the use of high-cleanliness, closely controlled temperature fluids, often requiring the use of heaters suitable for high-cleanliness applications to regulate the temperature of the fluid. For example, in an immersion lithography system, in order to achieve better lithography and higher exposure quality, it is necessary to fill a steady flow of immersion liquid between the projection objective and the wafer substrate; to ensure that the flow of immersion liquid has minimal effect on the laser beam passing therethrough, it is desirable that the temperature of the flow of immersion liquid be precisely regulated to ensure uniform optical properties thereof; a heater, condenser and heat exchanger etc. may be required to provide temperature control of the immersion liquid flow before it flows into the immersion unit. In order to meet the requirement of high cleanliness of liquid, high-cleanliness materials such as quartz glass, high-cleanliness stainless steel and polytetrafluoroethylene need to be adopted in the heater as materials contacting with the liquid, and meanwhile, the characteristics of the high-cleanliness materials and the introduction problem of pollutants need to be considered in an assembly mode.
The tubular heater uses the isolation seal ring for the assembly of the heat pipe for heating the volume fluid and the external pipeline, and not only needs to bear the pressing force to realize the fluid flow in the heater in a leak-free state, but also needs to ensure the corrosion resistance of the contact part of the heat pipe and the fluid to avoid the impurity pollution generated by the fluid. The joint of the isolation seal ring and the heat pipe is limited by the assembly and matching mode, gaps often exist, when liquid in the heat pipe flows through the gaps, gas can be bound in the gaps to form bubbles, and the bubbles can fall uncontrollably into the liquid flow and flow along with the liquid flow to become pollutants of the liquid flow; in addition, the bubbles collected in the gap reduce the contact between the fluid and the heat pipe, and the problem that the local heat accumulation of the heat pipe cannot be dissipated in time is possibly caused due to the poor heat conduction capability of the gas, so that local high temperature is caused, and the heat pipe or the surrounding structure is overheated, aged and even burnt.
The invention discloses a stable and durable safe liquid heating pipe in the Chinese patent with the application number of CN201721225348.6, which is an integrated pipe type heater, wherein an isolation seal ring and a heat pipe for heating volume fluid are integrated into a whole, after the heating pipe is used for a long time, because the internal space of the heat pipe is not easy to contact, impurities carried by the fluid and accumulated in the pipe are difficult to remove in the using process, and the cleanliness of the fluid flowing out after heating cannot be controlled.
Chinese invention patent No. CN201080057250.9 discloses a double-wall axial-flow electric heater for leakage sensitive applications, in which a split design is adopted between an isolation seal ring and a heat pipe for heating a volume fluid, the split type is fixed by screwing a bolt, the fixing method requires that one end of the heat pipe has a flange part radially extending for realizing bolt connection, and in the heater for heating a clean fluid, the flange part for bolt connection is difficult to process by a material having high temperature resistance, corrosion resistance and high cleanliness while being limited by the selection of the material of the heat pipe.
Disclosure of Invention
The invention provides a clean fluid pipe heater with a double-layer isolation seal ring, which can accelerate fluid flow in a gap, avoid bubble accumulation in the gap, avoid the problem that the local heat accumulation of a heat pipe cannot be dissipated in time, prevent local high temperature from being caused and improve the use safety and reliability of the heat pipe, and aims to solve the current situations that the local heat accumulation of the heat pipe is easily caused and cannot be dissipated in time in the conventional fluid pipe heater so as to cause local high temperature and cause overheating aging and even burning of the heat pipe or surrounding structures.
The invention adopts the following specific technical scheme for solving the technical problems: a clean fluid tubular heater with double-layer isolation seal ring comprises a tubular heating pipe, and is characterized in that: the heater is characterized by further comprising isolation seal rings arranged on two sides of the heater, wherein the isolation seal rings are of a double-layer split structure, each isolation seal ring comprises a seal ring outer ring arranged on the outer side of the isolation seal ring and a seal ring inner liner arranged on the inner side of the isolation seal ring, the seal ring outer ring is used for reducing the seal ring outer ring in a high-pressure-bearing state, the heater damage caused by deformation failure is avoided, the seal ring outer ring is coaxially sleeved on the outer side of the seal ring inner liner, and the inner side wall of the seal ring outer ring is tightly attached to the outer side wall of the seal ring inner liner; the sealing ring lining is internally provided with a port flow passage for external fluid to flow in or out, the sealing ring lining is internally provided with an annular limiting groove at one side close to the outside of the port flow passage, and the left end and the right end of the tubular heating pipe for heating the volume fluid are respectively and fixedly connected with the limiting grooves at the corresponding two sides. The isolation seal ring is used as a contact part with heating fluid and a sealing pressure-bearing part of the tubular heating pipe, the double-layer split type corrosion resistance in contact with the heating fluid is better realized, the phenomenon that the heater is damaged due to deformation and failure of the isolation seal ring due to overhigh pressure is avoided, and the use safety and reliability of the heat pipe are improved.
Preferably, the outer side of the seal ring outer ring is provided with a plurality of flange parts distributed in an array manner, each flange part is internally provided with a fastening and mounting connection hole site, and one side of the outer side of the seal ring outer ring, which is connected with the flange parts, is provided with an anti-interference groove. The fastening installation connecting hole positions in the flange parts improve the effectiveness of adjusting and controlling pressing force applied to the isolation seal ring towards the inner side direction, and improve the effectiveness of realizing tight connection between the seal ring outer ring and the seal ring inner liner and adjusting and controlling the pressing force. The bolt fastener nail head is effectively prevented from being abutted against the outer side wall of the outer ring of the seal ring, and installation interference is avoided.
Preferably, a distance gap is formed between the tubular heating pipe arranged in the limiting groove and the inner side wall of the limiting groove. The effectiveness of the flow of bubbles and fluid through the distance gap is improved.
Preferably, a gap flow channel for communicating the limiting groove and the port flow channel is arranged in the inner side wall of the limiting groove. Fluid flow in the clearance can be accelerated, bubble gathering in the clearance is avoided, the problem that local heat of the heat pipe is accumulated and cannot be timely dissipated is avoided, local high temperature is prevented from being caused, and the use safety and reliability of the heat pipe are improved.
Preferably, the outer ring of the seal ring is of an aluminum alloy material structure. The deformation of the outer ring of the seal ring under a high pressure-bearing state is reduced, and the heater damage caused by deformation failure is avoided.
Preferably, the seal ring liner has a stepped annular body having an outer stepped shape, wherein an outer diameter of the annular body on a side away from the stopper groove is smaller than an outer diameter of the annular body on a side where the stopper groove is provided. The installation reliability and effectiveness of the seal ring lining and the tubular heating pipe are improved, and the isolation sealing installation connection reliability and effectiveness of the double-layer split type isolation seal ring are improved.
Preferably, the inner side wall of the outer ring of the seal ring is tightly attached to the outer side wall of the lining of the seal ring, and the flange part is provided with a bolt fastener; the isolation seal ring is pressed inwards by the same bolt fastener arranged at the corresponding flange part of the isolation seal ring at the two sides of the heater, the isolation seal ring is supported outwards by the tubular heating pipe arranged in the limiting groove, and the tight connection between the outer ring of the seal ring and the inner lining of the seal ring is realized by the pressing force and the supporting force. The fastening installation connecting hole positions in the flange parts improve the pressing force adjusting and controlling effectiveness of the isolation seal ring in the inward direction, and the tight connection between the seal ring outer ring and the seal ring inner liner is realized through the tight connection of the pressing force and the supporting force and the pressing force adjusting and controlling effectiveness.
Preferably, the seal ring lining is of a polytetrafluoroethylene clean material structure. When the port runner of the seal ring lining is contacted with fluid, pollutants such as anions, cations or particles are hardly generated, and the cleanliness of the fluid is ensured.
Preferably, the outer side of the seal ring outer ring is provided with 2, 3 or 4 flange parts distributed in an array, and each flange part is provided with a fastening installation connecting hole site. The tight connection of the supporting force of the isolating seal ring in the direction towards the outside and the balance, the adjustment and the control of the pressing force are improved, and the effectiveness is simple.
Preferably, the gap flow channel is arranged perpendicular to the port flow channel or obliquely arranged at the outer end of the port flow channel. The circulation guiding effectiveness of the gap flow channel flowing to the port flow channel is improved, and the problem that heat accumulation at the gap position cannot be timely dissipated due to poor fluidity is solved.
The invention has the beneficial effects that: according to the invention, the isolation seal ring is designed into a double-layer split type, and the gap flow channel is arranged in the seal ring lining, so that the flow of fluid in the gap is accelerated, the accumulation of bubbles in the gap is avoided, and the problem that heat accumulation cannot be timely dissipated due to poor fluidity at the gap is solved. The outer ring of the seal ring on the outer side is made of high-strength materials such as aluminum alloy and the like, the inner lining of the seal ring on the inner side is made of clean materials such as PTFE and the like, so that the isolation seal ring has high pressure-bearing performance and high cleanliness of a part in contact with fluid.
Description of the drawings:
the invention is described in further detail below with reference to the figures and the detailed description.
FIG. 1 is a schematic diagram of a clean fluid tube heater with a double layer isolation seal of the present invention.
FIG. 2 is a schematic diagram of an outer ring structure of an isolation seal ring in a clean fluid tube heater with a double-layer isolation seal ring according to the present invention.
FIG. 3 is a schematic diagram of the liner structure of the isolation seal ring in the clean fluid tube heater with the double layer isolation seal ring of the present invention.
FIG. 4 is a schematic diagram of the internal structure of the isolation seal ring in the clean fluid tube heater with the double layer isolation seal ring of the present invention.
FIG. 5 is a schematic view of the flow of the internal flow field of the isolation seal ring in a clean fluid tubular heater with a double layer isolation seal ring according to the present invention.
Fig. 6 is an enlarged schematic view of a structure at a in fig. 5.
Detailed Description
In the embodiment shown in fig. 1, 2, 3, 4, 5, and 6, a clean fluid tubular heater with a double-layer isolation seal ring comprises a tubular heating pipe and isolation seal rings 1 arranged at two sides of the heater, wherein the isolation seal rings 1 are of a double-layer split structure, the isolation seal rings 1 comprise seal ring outer rings 1a arranged at the outer sides of the isolation seal rings and seal ring liners 1b arranged at the inner sides of the isolation seal rings, the seal ring outer rings 1a are used for reducing deformation of the seal ring outer rings 1a under a high pressure state to avoid damage of the heater due to deformation failure, the seal ring outer rings 1a are coaxially sleeved at the outer sides of the seal ring liners 1b, and the inner side walls of the seal ring outer rings 1a are tightly attached to the outer side walls of the seal ring liners 1 b; a port flow channel 2 (shown as an arrow in fig. 5) for external fluid to flow in or out is formed in the seal ring lining 1b, an annular limiting groove 3 is formed in the seal ring lining 1b and located on one side, close to the outside, of the port flow channel 2, and the left end and the right end of a tubular heating pipe 4 for heating the volume fluid are respectively and fixedly connected to the limiting grooves 3 on the two corresponding sides. The outer side of the seal ring outer ring 1a is provided with a plurality of flange parts 8 in an extending connection mode, the flange parts 8 are distributed in an array mode, a fastening installation connection hole position is arranged in each flange part 8, and an anti-interference groove 9 is formed in the outer side of the seal ring outer ring 1a and the side, connected with the flange parts 8, of the seal ring outer ring. A certain distance gap 5 is arranged between the tubular heating pipe 4 arranged in the limiting groove 3 and the inner side wall of the limiting groove 3.
And a gap flow channel 6 for communicating the limiting groove 3 with the port flow channel 2 is arranged in the inner side wall of the limiting groove 3. A gap flow channel 6 for communicating the limiting groove 3 with the port flow channel 2 is formed in the seal ring lining 1b, so that the problems that heat accumulation at the gap 5 cannot be timely dissipated and even local high temperature is caused due to poor flowability, and the structure is overheated, deformed and melted are solved effectively. The further clearance runner is arranged perpendicular to the port runner or obliquely arranged at the outer end of the port runner. The circulation guiding effectiveness of the gap flow channel flowing to the port flow channel is improved, and the problem that heat accumulation at the gap 5 cannot be timely dissipated due to poor fluidity is solved. The seal ring outer ring 1a is made of a material having high strength such as aluminum alloy. The seal ring liner 1b has a stepped annular body having an outer stepped shape, wherein the outer diameter of the annular body on the side away from the stopper groove 3 is smaller than the outer diameter of the annular body on the side where the stopper groove 3 is provided. The inner side wall of the seal ring outer ring 1a is tightly attached to the outer side wall of the seal ring lining 1b, and a connecting bolt fastener 10 is installed on the flange part 8; the isolation seal ring 1 is pressed inwards by the bolt fastener 10 arranged at the flange part 8, the isolation seal ring 1 is supported outwards by the tubular heating pipe 4 arranged in the limiting groove 3, and the seal ring outer ring 1a and the seal ring inner liner 1b are tightly connected by the pressing force and the supporting force. The outer side of the seal ring outer ring 1a is provided with 2, 3 or 4 flange parts 8 in an extending connection mode, and fastening and mounting connection hole positions for mounting connecting bolt fasteners 10 are formed in each flange part 8. The seal ring liner 1b is made of a clean material such as Polytetrafluoroethylene (PTFE) or other fluorine-containing resin.
When the heating fluid flows in the isolation seal ring 1, the fluid may be mixed with gas in the form of bubbles, according to the bernoulli principle, the fluid in the gap 5 has a large pressure due to the poor fluidity, the fluid in the port flow channel 2 has a small pressure due to the high flow rate, and the bubbles and the fluid originally accumulated in the gap 5 flow into the port flow channel 2 through the gap flow channel 6 under the pressure difference of the two (see the flow direction shown by the arrow in fig. 6), so that the flow of the fluid and the bubbles in the gap 5 is promoted, and the problem that the heat accumulation at the gap 5 cannot be dissipated in time due to the poor fluidity is solved.
When the heater is started, when the liquid flow in the tubular heating pipe 4 is absent, the gap flow passage 6 can enable the bubbles bound in the gap 5 to flow away along with the fluid in time, and the hidden danger of bubble pollutants caused by the bubbles retained in the gap 5 for a long time is avoided.
The present invention is not limited to the above-described specific embodiments, and may have other structural embodiments, for example:
the seal ring outer ring 1a is made of other high-strength materials, and the seal ring liner 1b is made of other clean materials such as fluorine-containing resin. All fall within the scope of the invention.
In the positional relationship description of the present invention, the appearance of terms such as "inner", "outer", "upper", "lower", "left", "right", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the drawings is merely for convenience of describing the embodiments and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation and operation, and thus, is not to be construed as limiting the present invention.
The foregoing summary and structure are provided to explain the principles, general features, and advantages of the product and to enable others skilled in the art to understand the invention. The foregoing examples and description have been presented to illustrate the principles of the invention and are intended to provide various changes and modifications within the spirit and scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (9)
1. A clean fluid tubular heater with double-layer isolation seal ring comprises a tubular heating pipe, and is characterized in that: the heater is characterized by further comprising isolation seal rings arranged on two sides of the heater, wherein the isolation seal rings are of a double-layer split structure, each isolation seal ring comprises a seal ring outer ring arranged on the outer side of the isolation seal ring and a seal ring inner liner arranged on the inner side of the isolation seal ring, the seal ring outer ring is used for reducing the seal ring outer ring in a high-pressure-bearing state, the heater damage caused by deformation failure is avoided, the seal ring outer ring is coaxially sleeved on the outer side of the seal ring inner liner, and the inner side wall of the seal ring outer ring is tightly attached to the outer side wall of the seal ring inner liner; a port flow passage for external fluid to flow in or out is arranged in the seal ring lining, an annular limiting groove is arranged in the seal ring lining and positioned at one side of the port flow passage close to the outside, and the left end and the right end of the tubular heating pipe for heating the volume fluid are respectively and fixedly connected between the limiting grooves at the two corresponding sides; and a gap flow channel for communicating the limiting groove with the port flow channel is arranged in the inner side wall of the limiting groove.
2. A clean fluid tube heater with a double layer isolation seal as claimed in claim 1 wherein: the outer side of the seal ring outer ring is provided with a plurality of flange parts which are distributed in an array mode, a fastening installation connecting hole position is arranged in each flange part, and an anti-interference groove is arranged on one side, connected with the flange parts, of the outer side of the seal ring outer ring.
3. A clean fluid tube heater with a double layer isolation seal as claimed in claim 1 wherein: and a distance gap is formed between the tubular heating pipe arranged in the limiting groove and the inner side wall of the limiting groove.
4. A clean fluid tube heater with a double layer isolation seal as claimed in claim 1 or 2 wherein: the outer ring of the seal ring is of an aluminum alloy material structure.
5. A clean fluid tube heater with a double layer isolation seal as claimed in claim 1 wherein: the seal ring lining is provided with a stepped annular body in an outer ladder shape, wherein the size of the outer diameter of the annular body at the side far away from the limiting groove is smaller than that of the outer diameter of the annular body at the side provided with the limiting groove.
6. A clean fluid tube heater with a double layer isolation seal as claimed in claim 2 wherein: the inner side wall of the outer ring of the seal ring is tightly attached to the outer side wall of the liner of the seal ring, and the flange part is provided with a bolt fastener; the isolation seal ring is pressed inwards by the same bolt fastener arranged at the corresponding flange part of the isolation seal ring at the two sides of the heater, the isolation seal ring is supported outwards by the tubular heating pipe arranged in the limiting groove, and the tight connection between the outer ring of the seal ring and the inner lining of the seal ring is realized by the pressing force and the supporting force.
7. A clean fluid tube heater with a double layer isolation seal as claimed in claim 1 or 5 or 6 wherein: the seal ring lining is of a polytetrafluoroethylene clean material structure.
8. A clean fluid tube heater with a double layer isolation seal as claimed in claim 1 or 2 or 6 wherein: the outer side of the outer ring of the seal ring is provided with 2, 3 or 4 flange parts which are distributed in an array mode, and each flange part is provided with a fastening installation connecting hole position.
9. A clean fluid tube heater with a double layer isolation seal as claimed in claim 1 wherein: the gap flow channel is arranged perpendicular to the port flow channel or obliquely arranged at the outer end of the port flow channel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011436532.1A CN112503758B (en) | 2020-12-11 | 2020-12-11 | Clean fluid tubular heater with double-layer isolation seal ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011436532.1A CN112503758B (en) | 2020-12-11 | 2020-12-11 | Clean fluid tubular heater with double-layer isolation seal ring |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112503758A CN112503758A (en) | 2021-03-16 |
| CN112503758B true CN112503758B (en) | 2022-04-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011436532.1A Active CN112503758B (en) | 2020-12-11 | 2020-12-11 | Clean fluid tubular heater with double-layer isolation seal ring |
Country Status (1)
| Country | Link |
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| CN (1) | CN112503758B (en) |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008082655A (en) * | 2006-09-28 | 2008-04-10 | Covalent Materials Corp | Liquid heating device |
| CN203446046U (en) * | 2013-07-12 | 2014-02-19 | 罗日良 | Novel electric heating tube |
| CN204344924U (en) * | 2014-07-07 | 2015-05-20 | 余文清 | wide sealing |
| WO2016016225A1 (en) * | 2014-07-29 | 2016-02-04 | Nestec S.A. | Instant tube heater with homogenous temperature control |
| CN205864767U (en) * | 2016-07-04 | 2017-01-04 | 广东新宝电器股份有限公司 | A kind of multiple protective quartz ampoule heater |
| CN208143519U (en) * | 2018-03-31 | 2018-11-23 | 江苏路求科技服务有限公司 | A kind of quartz ampoule can use infrared heating |
| CN108679827A (en) * | 2018-06-12 | 2018-10-19 | 佛山市共智新能源科技有限公司 | A kind of induction heating apparatus |
| CN211118213U (en) * | 2019-06-24 | 2020-07-28 | 胜利油田新海兴达实业集团有限责任公司 | Plastic composite pipe joint |
| CN214579538U (en) * | 2021-03-03 | 2021-11-02 | 坎布里奇环保科技(北京)有限公司 | Sealing device for gap between pipeline and sleeve |
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2020
- 2020-12-11 CN CN202011436532.1A patent/CN112503758B/en active Active
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