JP2004337727A5 - - Google Patents
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- Publication number
- JP2004337727A5 JP2004337727A5 JP2003136481A JP2003136481A JP2004337727A5 JP 2004337727 A5 JP2004337727 A5 JP 2004337727A5 JP 2003136481 A JP2003136481 A JP 2003136481A JP 2003136481 A JP2003136481 A JP 2003136481A JP 2004337727 A5 JP2004337727 A5 JP 2004337727A5
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- JP
- Japan
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003136481A JP4320561B2 (en) | 2003-05-14 | 2003-05-14 | Droplet discharge device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003136481A JP4320561B2 (en) | 2003-05-14 | 2003-05-14 | Droplet discharge device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004337727A JP2004337727A (en) | 2004-12-02 |
| JP2004337727A5 true JP2004337727A5 (en) | 2006-06-29 |
| JP4320561B2 JP4320561B2 (en) | 2009-08-26 |
Family
ID=33526436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003136481A Expired - Fee Related JP4320561B2 (en) | 2003-05-14 | 2003-05-14 | Droplet discharge device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4320561B2 (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007132726A1 (en) * | 2006-05-12 | 2007-11-22 | Toray Engineering Co., Ltd. | Method and apparatus for manufacturing color filter |
| WO2007132727A1 (en) * | 2006-05-15 | 2007-11-22 | Toray Engineering Co., Ltd. | Method and apparatus for manufacturing color filter |
| JP2008012874A (en) * | 2006-07-10 | 2008-01-24 | Ricoh Co Ltd | Image forming apparatus |
| JP2008123993A (en) * | 2006-10-19 | 2008-05-29 | Sharp Corp | Droplet coating device, and droplet coating method |
| JP4976117B2 (en) * | 2006-12-11 | 2012-07-18 | ニスカ株式会社 | Printing device |
| JP2009128830A (en) * | 2007-11-27 | 2009-06-11 | Sharp Corp | Substrate processing apparatus and method for controlling substrate processing apparatus |
| JP5088280B2 (en) * | 2008-09-18 | 2012-12-05 | 大日本印刷株式会社 | Color filter manufacturing equipment |
| JP5282515B2 (en) * | 2008-10-01 | 2013-09-04 | 大日本印刷株式会社 | Color filter manufacturing equipment |
| JP5606258B2 (en) * | 2010-10-06 | 2014-10-15 | 東レエンジニアリング株式会社 | Coating method and coating apparatus |
| JP5697967B2 (en) * | 2010-12-20 | 2015-04-08 | 東レエンジニアリング株式会社 | Coating method and coating apparatus |
| JP5663342B2 (en) * | 2011-02-21 | 2015-02-04 | 東レエンジニアリング株式会社 | Coating method and coating apparatus |
| KR102510910B1 (en) * | 2020-12-21 | 2023-03-15 | 세메스 주식회사 | Maintenance unit and apparatus for treating substrate including the same |
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2003
- 2003-05-14 JP JP2003136481A patent/JP4320561B2/en not_active Expired - Fee Related