JP2004331319A - Floating conveying device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To stably convey glass substrates by suppressing steps between floating air stages of each device within a tolerance. <P>SOLUTION: Joint mechanisms 23 are provided between substrate inspection devices 2 to 4, respectively. Upstream sides of each of the floating air stages 8 to 10 are supported by fixing bridges 20 so as to be capable of swinging, and downstream sides can be vertically rotated by elastic members 21 via semi-fixing bridges 22. The upstream sides of the floating air stages 8 to 10 are moved vertically by connecting the joint mechanisms 23, and height of each stage surface 8a to 10a of each of the floating air stages 8 to 10 is set within the tolerance (r). <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a floating transfer device that floats a glass substrate used for, for example, a liquid crystal display (LCD), a plasma display panel (PDP), and the like and transfers the glass substrate between apparatuses such as a substrate inspection apparatus.
[0002]
[Prior art]
2. Description of the Related Art In a semiconductor wafer inspection apparatus, a plurality of semiconductor wafers, for example, a transfer arm having three arms are transferred between apparatuses such as a macro inspection and a micro inspection, and the semiconductor wafer is positioned and delivered to these apparatuses. .
[0003]
On the other hand, a glass substrate inspection apparatus such as an LCD uses a floating air stage that floats and conveys the glass substrate by blowing up the air as the size of the glass substrate increases.
[0004]
[Problems to be solved by the invention]
However, a glass substrate inspection apparatus is a single apparatus such as a macro inspection or a micro inspection for a glass substrate, and there is no apparatus for arranging each apparatus such as a macro inspection or a micro inspection to inspect a glass substrate. . When these inspection devices are arranged, the surface height of each floating air stage between the devices varies, so simply arranging each device causes a step between the floating air stages of each device, The substrate cannot be stably conveyed between the devices by air.
[0005]
Accordingly, an object of the present invention is to provide a floating transfer device capable of stably transferring a glass substrate while suppressing a step between floating air stages of each device within an allowable range.
[0006]
[Means for Solving the Problems]
The present invention has a main levitation air stage fixed horizontally, a sub levitation air stage, a plurality of levitation air stages arranged at predetermined intervals in the substrate transport direction, and these levitation air stages A plurality of pedestals to be mounted, a first support member for swingably supporting one end of each sub-levitation air stage, and a second support for semi-fixingly supporting the other end of each sub-levitation air stage. Provided between the member and each pedestal via the second support member at the other end of each sub-floating air stage, and the other end can be turned up and down around one end of the sub-floating air stage as a fulcrum The elastic member to be supported on the first and second supporting members of the sub-levitation air stage and the first supporting member of the adjacent main levitation stage can be connected and disconnected from each other. other A levitation transportation device having a respective coupling mechanism for restricting within an allowable range with respect to the main floating stage surface height adjacent sub floating stage surface height of the side.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
[0008]
FIG. 1 is a configuration diagram of a substrate inspection system to which a floating transfer device is applied. In the board inspection system, a plurality of board inspection apparatuses 2 to 4 such as a macro inspection, a micro inspection, and a pattern inspection for the glass substrate 1 of the LCD are arranged along an inspection line. These board inspection apparatuses 2 to 4 are arranged at predetermined intervals S ₁ and S ₂ (several mm) between adjacent apparatuses.
[0009]
In these substrate inspection apparatuses 2 to 4, floating air stages 8 to 10 are mounted on vibration isolation tables 5 to 7 which are mounts. Each of these levitation air stages 8 to 10 includes a main levitation stage 8-1 to 10-1 and a sub levitation stage 8-2 to 10-2, and a plurality of air blowing holes are provided on the stage surfaces 8a to 10a. ing. When air having the same air pressure is blown out from these air blowing holes, an air layer is formed between the stage surfaces 8a to 10a and the glass substrate 1, so that the glass substrate 1 is placed on the stage surfaces 8a to 10a. Surface.
[0010]
Each of the portal arms 11 and 12 is provided on each of the vibration isolation tables 5 to 7, and each of the microscopes 13 and 14 is provided on each of the portal arms 11 and 12.
[0011]
The back surface of the glass substrate 1 floating on the stage surfaces 8a to 10a is suction-held by suction suction units (not shown) provided at both ends of the floating air stages 8 to 10, and is moved by the suction conveyance units. It is transported in the direction of arrow A.
[0012]
Next, the main part of the floating transfer device will be described with reference to FIG.
[0013]
FIG. 2 is a configuration diagram of a connecting portion between the first substrate inspection device 2 arranged on the upstream side and the second substrate inspection device 3 arranged on the downstream side.
[0014]
On the upper surface of the vibration isolation table 5, a main levitation stage 8-1 is horizontally provided by a plurality of fixing bars (first support members) 20. One end side (upstream side) of the sub-floating air stage 8-2 is swingably supported on the fixing bar 20 on the downstream side in the transport direction (the direction of the arrow A) of the glass substrate 1.
[0015]
The other end side (downstream side) of the sub-floating air stage 8-2 is supported by a semi-fixing bar 22 via an elastic member 21 such as rubber or a spring. The sub-floating air stage 8-2 is provided so as to be rotatable in the vertical direction (arrow B direction) with the other end side as a fulcrum p at one end side supported by the fixing bar 20. The stage surface 8a of the floating stage 8-2 is regulated so as to have the same height as the stage surface 9b of the main floating stage 9-1 of the second substrate inspection apparatus 3 arranged on the downstream side.
[0016]
Between the semi-fixing bar 22 supporting the other end of the sub-floating air stage 8-2 and the fixing bar 20 of the main levitation air stage 9-1 of the second substrate inspection device 3 arranged downstream. Is provided with a joint mechanism 23 as a connection mechanism.
[0017]
The joint mechanism 23 is capable of connecting and disconnecting with each other, and by connecting, can adjust the height of the stage surface 8a at the downstream end of the sub-floating air stage 8-2 to the second board inspection installed on the downstream side. The height position of the stage surface 9b of the main levitation air stage 9-1 of the apparatus 3 is restricted within the allowable range r.
[0018]
The joint mechanism 23 includes a first connecting member 24 formed in a concave shape, and a second connecting member 25 having a convex shape that enters the concave portion of the first connecting member 24. The opening 26 of the first connecting member 24 is formed in a tapered shape in which the opening widens from the inside to the outside of the concave shape, for example, a curved surface R having a large outer diameter. The first connecting member 24 is connected to the fixing bar 20 of the second substrate inspection apparatus 3 in which a concave opening 26 is provided at the distal end of an extendable rod 28 of an pneumatic cylinder 27 as an actuator, for example. It is provided for.
[0019]
The pneumatic cylinder 27 moves the first connecting member 24 in the direction of arrow C toward the fixing bar 20 of the second substrate inspection device 3 arranged on the downstream side by the expansion and contraction operation of the expansion and contraction rod 28. The pneumatic cylinder 27 is provided movably up and down (in the direction of the arrow D) with respect to the semi-fixing bar 22 so that the joint height of the joint mechanism 23 can be adjusted.
[0020]
The second connecting member 25 is fixed to the fixing bar 20 of the second substrate inspection device 3 arranged on the downstream side facing the opening 26 of the first connecting member 24. The second connecting member 25 includes a support 29 fixed to the fixing bar 20, and a rotating body 31 provided at the end of the support 29 so as to be rotatable about a shaft 30. The rotating body 31 is formed to have a diameter slightly smaller than the inner diameter of the concave portion of the first connecting member 24.
[0021]
Note that the first connecting member 26 may be formed in a cylindrical shape, and the second connecting member 28 may be formed in a spherical shape that fits inside the cylinder of the first connecting member 26, or may be connected or disconnected from each other. Any structure may be used as long as it has a structure.
[0022]
Further, the semi-fixing beam 22 provided with the first connecting member 24 connected to the telescopic rod 28 of the pneumatic cylinder 27 prevents interference with the first connecting member 24 when the first connecting member 24 moves. A notch may be formed.
[0023]
The sub-levitation air stage 8-2 has a separation stage 8-3 that can be attached to and detached from the downstream end of the sub-levitation air stage 8-2. The separation stage 8-3 is formed at a predetermined length on the downstream side of the entire length of the floating air stage 8. A plurality of air blowing holes are also provided on the stage surface of the separation stage 8-3. The separation stage 8-3 is provided with a roller 32 for transporting the glass substrate 1. The roller 32 is formed, for example, in a disk shape, and is provided so that the rotation axis direction is perpendicular to the transport direction of the glass substrate 1 (the direction of arrow A). The rollers 32 may be provided with a plurality of rollers at predetermined intervals, or may be provided with one or a plurality of cylindrical rollers.
[0024]
The separation stage 8-3 is preferably attached to the downstream end of the sub-floating air stage 8-2 after the second substrate inspection device 3 is installed on the first substrate inspection device 2. This makes it easy to adjust the height position of the stage surface 8a of the floating air stage 8 and the height position of the stage surface 9b of the downstream floating air stage 9.
[0025]
Next, the operation of the device configured as described above will be described.
[0026]
In the first and second substrate inspection apparatuses 2 and 3, since the respective floating air stages 8 and 9 are provided on the respective vibration isolation tables 5 and 6, these vibration isolation tables 5 and 6 and each floating air stage 8 are provided. , 9 vary in the surface height positions of the floating air stages 8, 9 of the substrate inspection devices 2, 3.
[0027]
Therefore, when the first and second substrate inspection devices 2 and 3 are installed, the height position of the stage surface 8a of the floating air stage 8 is higher than the height position of the stage surface 9a of the downstream floating air stage 9. The height of the air cylinder 27 is adjusted by moving the air cylinder 27 in the direction of the arrow d so as to be provided within the allowable range r.
[0028]
In this height adjustment, when the air cylinder 27 is moved upward, the distance between the first connecting member 24 and the stage surface 8a of the sub-floating air stage 8-2 is shortened. When 24 and 25 are connected, the height position of the stage surface 8a is lowered.
[0029]
Conversely, when the air cylinder 27 is moved downward, the distance between the first connecting member 24 and the stage surface 8a of the sub-floating air stage 8-2 increases, so that the first and second connecting members 24 are moved. , 25 are connected, the height position of the stage surface 8a rises.
[0030]
Therefore, when the joint mechanism 23 is connected, the height position of the stage surface 8a of the sub levitation air stage 8-2 is within the allowable range r with respect to the height position of the stage surface 9a of the downstream main levitation air stage 9-1. The air cylinder 27 and the first connecting member 24 are adjusted in the vertical direction so as to be set to.
[0031]
When inspecting the glass substrate 1 in the first substrate inspection device 2, the joint mechanism 23 between the first substrate inspection device 2 and the second substrate inspection device 3 adjacent on the downstream side releases the connection. .
[0032]
That is, as shown in FIG. 2, the air cylinder 27 causes the first connecting member 24 to separate from the second connecting member 25 by contracting the telescopic rod 28, and the first connecting member 24 and the second connecting member The connection with 25 is released.
[0033]
When the connection of the joint mechanism 23 is released, the first and second board inspection devices 2 and 3 separate the vibration isolation tables 5 and 6 and separate the floating air stages 8 and 9 from a predetermined position. since is provided apart a distance S _1, there is no point of connection to one another. Thus, vibration from the floor in the substrate inspection device 2 is absorbed by the anti-vibration table 5, and is not vibrated be interrupted at intervals S ₁ of each floating air stages 8,9 transmitted from the adjacent board inspection apparatus 3 .
[0034]
On the other hand, when the glass substrate 1 is air-conveyed from the first substrate inspection device 2 to the second substrate inspection device 3 arranged on the downstream side, the substrate inspection devices 2 and 3 are connected by the joint mechanism 23. .
[0035]
At this time, when the telescopic rod 28 of the air cylinder 27 is extended, the first connecting member 24 is moved in the direction of arrow C toward the second connecting member 25 by the extending operation of the telescopic rod 28, and the first connecting member is moved. The rotating body 31 of the second connecting member 25 is fitted and connected in the recess of the member 24.
[0036]
When the height positions of the first and second connecting members 24 and 25 are shifted, the curved surface R of the opening 26 of the first connecting member 24 is moved by the movement of the first connecting member 24 in the direction of arrow C. The upper or lower part of the member comes into contact with the rotating body 31 of the second connecting member 25. At this time, the sub-flying air stage 8-2 is vertically rotated about one end of the sub-floating air stage 8-2 by the reaction force acting on the rotating body 31, and the concave portion of the first connecting member 24 is fitted to the rotating body 31.
[0037]
At this time, the second connecting member 25 is fixed, and the first connecting member 24 and the pneumatic cylinder 27 are provided on the semi-fixing bar 22 supported via the elastic member 21. If 24 is higher than the second connecting member 25, the lower part of the opening 26 of the first connecting member 24 comes into contact with the rotating body 31, and a downward force is applied to the first connecting member 24.
[0038]
Thereby, the semi-fixing bar 22 descends against the elastic force of the elastic member 21, and the sub-floating air stage 8-2 rotates around the fulcrum p on the fixing bar 20 side. And the downstream side descends. When the heights of the first connection member 24 and the second connection member 25 match, the first connection member 24 is fitted to the second connection member 25, and as a result, the sub-floating air stage 8- The height position of the second stage surface 8a is set within an allowable range r with respect to the height of the stage surface 9b of the main floating air stage 9-1 on the downstream side.
[0039]
If the first connecting member 24 is lower than the second connecting member 25, the upper part of the opening 26 of the first connecting member 24 comes into contact with the rotating body 31 and the first connecting A rising force is applied to the member 24. As a result, the semi-fixing bar 22 rises against the elastic force of the elastic member 21, and accordingly, the sub-floating air stage 8-2 rotates around the fulcrum p on the fixing bar 20 side. And the downstream side rises.
[0040]
As a result, when the heights of the first connecting member 24 and the second connecting member 25 match, the first connecting member 24 is fitted to the second connecting member 25, and the sub-floating air stage 8-2. The height position of the stage surface 8a is set within an allowable range r with respect to the height of the stage surface 9a of the main floating air stage 9-1 on the downstream side.
[0041]
After the joint mechanism 23 between the first and second substrate inspection devices 2 and 3 is connected, the glass substrate 1 is backed by suction transport units (not shown) provided at both ends of the floating air stages 8 and 9. Is conveyed in the direction of arrow a while being sucked and held.
[0042]
When the glass substrate 1 is conveyed between the connection of the respective floating air stages 8 and 9, the glass substrate 1 comes in contact with the roller 32 on the back surface, and thus the air from the stage surface 8 a of the sub-floating air stage 8-1. The flying height is secured. Accordingly, when the glass substrate 1 is air-floated and conveyed between the floating air stages 8 and 9, the tip of the glass substrate 1 is stably maintained at the interval S ₁ between the floating air stages 8 and 9 without descending. It is conveyed by air levitation.
[0043]
As described above, in the above-described embodiment, each joint mechanism 23 is provided between each of the board inspection devices 2 to 4, and the upstream side of each of the floating air stages 8 to 10 is fixed by the fixing bar 20. With the fixing bar 20 as a fulcrum, the downstream side is rotatably provided in the vertical direction by an elastic member 21 via the semi-fixing bar 22, and both substrate inspections are performed when the glass substrate 1 is transferred to the downstream substrate inspection device. By connecting the joint mechanism 23 between the devices, the height position of each stage surface 8a to 10a of each of the floating air stages 8 to 10 can be set within the allowable range r.
[0044]
As a result, there is no step between the floating air stages 8 to 10 of each of the substrate inspection devices 2 to 4 which affects the air floating transfer of the glass substrate 1, and the glass substrate 1 can be stably connected between the substrate inspection devices 2 to 4. Can be conveyed by air.
[0045]
The height of the first connecting member 24 of the joint mechanism 23 can be adjusted together with the pneumatic cylinder 27, so that each stage of each of the floating air stages 8 to 10 is independent of the size of the step between the respective floating air stages 8 to 10. The height position of the surfaces 8a to 10a can be adjusted within the allowable range r.
[0046]
When various inspections of the glass substrate 1 are performed in each of the substrate inspection devices 2 to 4, the connection of the joint mechanism 23 is released, and the adjacent substrate inspection device 3 is completely separated, so that the adjacent substrate inspection device 3 can be disconnected. Various inspections can be performed accurately without being affected by vibration.
[0047]
As described above, a board inspection system capable of connecting the board inspection apparatuses 2 to 4 to allow air floating transfer can be installed on an LCD production line to perform various inspections of the glass substrate 1 in-line, thereby improving the efficiency of LCD production. be able to.
[0048]
Further, when each of the portal arms 11 and 12 moves in each of the board inspection devices 2 to 4, the height position of each of the floating air stages 8 to 10 is changed by the movement of the position where the load of the portal arms 11 and 12 is applied. Move up and down. Even in this case, a step is generated at the height position of each of the floating air stages 8 to 10, so if the first connecting member 24 of the joint mechanism 23 is adjusted in the vertical direction, the height position of each of the floating air stages 8 to 10 can be adjusted. Can be matched.
[0049]
Note that the present invention is not limited to the above-described embodiments as they are, and can be embodied by modifying the components without departing from the scope of the invention at the stage of implementation.
[0050]
For example, the joint mechanism 23 provides the first connecting member 24 so as to be movable up and down together with the air cylinder 27, and is not limited to fixing the second connecting member 25, but fixing the first connecting member 24, The second connecting member 25 may be provided so as to be vertically movable, or both the first connecting member 24 and the second connecting member 25 may be provided so as to be vertically movable.
[0051]
The joint mechanism 23 is provided with a second connecting member 25 on the upstream substrate inspection device between the substrate inspection devices 2 to 10, and a first connection member connected to the telescopic rod 28 of the air cylinder 27 on the downstream substrate inspection device. May be provided.
[0052]
The pneumatic cylinder 27 can be replaced with a hydraulic cylinder.
[0053]
The mechanism for floating the glass substrate 1 is not limited to air floating, but may be electrostatic floating. In this case, static elimination is performed on the glass substrate 1.
[0054]
Various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the above embodiments. For example, some components may be deleted from all the components shown in the embodiment. Further, components of different embodiments may be appropriately combined.
[0055]
【The invention's effect】
As described above in detail, according to the present invention, it is possible to provide a floating transfer device capable of stably transferring a glass substrate while suppressing a step between floating air stages of each device within an allowable range.
[Brief description of the drawings]
FIG. 1 is a configuration diagram showing a substrate inspection system to which an embodiment of a levitation transfer device according to the present invention is applied.
FIG. 2 is a configuration diagram of a main part of one embodiment of a floating transfer device according to the present invention.
[Explanation of symbols]
1: glass substrate, 2 to 4: substrate inspection apparatus, 5 to 7: anti-vibration table, 8 to 10: floating air stage, 8-1 to 10-1: main floating air stage, 8-2 to 10-2: Sub-floating air stage, 8-3: separation stage, 8a to 10a: stage surface, 11, 12: portal arm, 13, 14: microscope, 20: fixing bar, 21: elastic member, 22: semi-fixing bar , 23: joint mechanism, 24: first connecting member, 25: second connecting member, 26: opening, 27: pneumatic cylinder, 28: telescopic rod, 29: support, 30: shaft, 31: rotating body , 32: Roller.

Claims (8)

A plurality of floating air stages having a main floating air stage fixed horizontally, and a sub floating air stage, and arranged at predetermined intervals in the substrate transfer direction,
A plurality of mounts on which each of these floating air stages is mounted,
A first support member for supporting one end of each of the sub-floating air stages so as to be able to swing,
A second support member for semi-fixingly supporting the other end of each of the sub-floating air stages;
The other end of each of the sub-flying air stages is provided between each of the pedestals via the second support member via the second support member. An elastic member rotatably supported;
The other end is provided between the second support member of the sub levitation air stage and the first support member of the adjacent main levitation stage, and can be connected to and disconnected from each other, and is connected to the other end. Each coupling mechanism for regulating the surface height of the sub-levitation stage on the side to an allowable range with respect to the surface height of the adjacent main levitation stage,
A levitation transfer device comprising: The floating carrier according to claim 1, wherein each of the mounts is a vibration isolation table. The first and second connecting members are connected to each other and provided to face the second support member and the first support member, respectively.
An actuator that moves one of these first or second connecting members in a direction facing each other to connect or disconnect the first and second connecting members;
The levitation transfer device according to claim 1, comprising: 4. The levitation transport according to claim 3, wherein one or both of the first and second connection members are provided so that a height position thereof is adjustable with respect to the second or first support member. apparatus. 4. The levitation transport device according to claim 3, wherein the first and second connecting members include a concave member and a convex member, respectively. The connection mechanism may be connected when the substrate is levitated and transported on the floating air stage, and may be disconnected when inspecting the substrate on the floating air stage. 2. The floating transfer device according to 1. 2. The levitation transfer device according to claim 1, wherein the sub-levitation air stage has a separation stage that can be attached to and detached from the other end of the sub-levitation stage. The floating transport device according to claim 7, wherein the separation stage is provided with a roller that transports the substrate.

Images