JP2004306190A - Curvature setting device for polishing tool - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a curvature setting device for a polishing tool, accurately measuring the height of a vertex of a dome part of a polishing tool in a simple structure. <P>SOLUTION: A height measuring device 75 is fitted to a slider 16 elevated by a stepping motor 162. The height measuring device 75 is composed of a freely vertically elevated height detection means 88, a detection means 170 and a zero point adjusting mechanism 171. The height detection means 88 is composed of a rod 174 and a contact terminal 175, and the contact terminal 175 is pushed up by expansion of the dome part 25A. The detection means 170 uses a photo sensor composed of a light emitting diode 181a and a photo transistor 181b, detects the rod 174 when the contact terminal 175 is pushed up by the dome part 25A, and transmits the detection signal to a control part. The zero point adjusting mechanism 171 includes an adjusting screw 185, wherein a holding member 178 is moved up and down by the adjusting screw 185, thereby adjusting the height of the height measuring device 75 so that the detection means 170 detects the height detection means 88. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a curvature setting device for a polishing jig, and in particular, a balloon of a polishing jig used for a polishing device for polishing a concave surface having a toric surface, an aspheric surface, a non-toric surface, and an arbitrary free-form surface shape of a plastic lens. The present invention relates to a curvature setting device for a polishing jig that automatically sets the curvature of a dome-shaped surface of a member according to the shape of a surface of a lens to be polished.
[0002]
[Prior art]
Conventionally, in order to polish a concave surface of a lens which has been cut into a spherical surface or a toric surface shape by an NC control curve generator using a polishing apparatus, a metal polishing jig having a convex surface substantially matching the shape of the concave surface to be polished is provided with a polishing pad. And the polishing jig and the lens are relatively slid while being pressed against the concave surface to be polished. Therefore, in such a polishing method, it is necessary to prepare a different polishing jig for each concave shape of the lens to be polished. For example, in the case of a toric lens for correcting astigmatism, a toric surface (a part of a surface obtained by rotating an arc around an axis that is in the same plane as the arc and does not pass through the center of curvature of the arc) is 3000 to 4000. Since there are many types, it was necessary to prepare as many polishing jigs. For this reason, not only the manufacturing cost of the polishing jig is increased, but also a large storage space is required for orderly storing a large number of polishing jigs, and the management thereof is complicated.
[0003]
In addition to spherical and toric surfaces, aspheric surfaces (parts of the rotating surface whose curvature continuously changes from the vertex to the periphery) and non-toric surfaces (surfaces having mutually perpendicular principal meridians with different curvatures, at least In some cases, a concave surface having a complicated shape such as a shape in which the cross section of one main meridian is not a circle or a free-form surface such as a progressive multifocal lens may be formed. In such a case, a conventional polishing jig is used. The conventional polishing method has a problem that it cannot be polished. Therefore, as a method for solving such a problem, for example, a polishing apparatus and a polishing jig described in Patent Document 1 have been proposed.
[0004]
[Patent Document 1]
JP 2000-117604 A
[0005]
The polishing apparatus disclosed in Japanese Patent Application Laid-Open No. 2000-117604 includes a holder for holding an object to be polished, a polishing jig having a flexible sheet that is expanded in a dome shape by air pressure, and the flexible sheet. A polishing pad attached to the surface of the polishing tool, wherein the polishing target is reciprocally moved back and forth and back and forth by the holding jig, and the polishing locus is slightly shifted every rotation by the swinging movement of the polishing jig. The surface to be polished of the object is polished by an abrasive supplied between the polishing pad and the surface to be polished.
[0006]
As described above, when the curvature of the dome is changed by air pressure, a single jig can cope with a wide range of concave shapes. Therefore, it is not necessary to prepare a different polishing jig for each concave shape, and the polishing jig is not required. There is an advantage that the number can be greatly reduced.
[0007]
[Problems to be solved by the invention]
In using the above-mentioned polishing jig, it is desired to develop a device capable of automatically performing a dome curvature setting operation according to the curvature of the surface to be polished in order to improve workability.
[0008]
In the polishing apparatus disclosed in Japanese Patent Application Laid-Open No. 2000-117604, the curvature of the dome portion is set by changing the internal pressure of the flexible sheet, but the deformation amount of the dome portion with respect to the fluctuation amount of the pressure is large. In such a case, it may be difficult to adjust the pressure according to the curvature, or the desired curvature may not be obtained even at the same pressure due to deterioration of the flexible sheet.
[0009]
Then, the present inventors previously measured the correlation between the apex height and the curvature of the dome portion, and supplied air to move the dome portion of the balloon member to a height where the apex height corresponded to the desired curvature. We considered using a method of setting the shape of the dome by expanding it to the extent possible.
[0010]
In practical use of an apparatus using such a method, it is desired that the apparatus be capable of accurately measuring the height of the apex by a simple operation and be inexpensive with a simple structure. In addition, periodic adjustment is required to maintain the measurement accuracy, and it is desired that the adjustment work is easy.
[0011]
The present invention has been made in response to the above-mentioned conventional problems and demands, and an object of the present invention is to be able to accurately measure the apex heights of various dome portions having different curvatures with a relatively simple structure. Another object of the present invention is to provide a curvature setting device for a polishing jig in which the operation of the curvature setting operation is simple.
[0012]
[Means for Solving the Problems]
In order to achieve the above object, a first aspect of the present invention provides a polishing jig curvature setting in which a surface of the balloon member is inflated into a dome shape by supplying air to the balloon member of the polishing jig to set a predetermined curvature. An apparatus, having an air injection port to which a valve of the polishing jig is connected, an installation table on which the polishing jig is installed, a stepping motor for raising and lowering a slider, and a height measurement position of the balloon member. A height measuring device attached to the slider so as to be located above and a vertex height of a surface of the dome portion of the balloon member for measuring a vertex height; a control unit for sending and controlling a pulse signal to the stepping motor; and Height input means for inputting data of vertex height of the surface of the balloon member, wherein the height measurement is performed at a height corresponding to the vertex height data input from the height input means. The height measurement device detects the height of the apex of the surface of the balloon member inflated by the supply of air, and stops the supply of air to set the curvature of the surface of the balloon member. is there.
[0013]
In the first aspect, when air is supplied to the balloon member, the surface of the balloon member expands in a dome shape (hereinafter, the portion expanding in the dome shape is referred to as a dome portion). Since there is a correlation between the apex height of the dome and the curvature, the correlation is measured in advance, and the apex height of the dome is measured by a height measuring device, so that the dome has a predetermined curvature. It can be determined whether or not it has become.
In the actual measurement, the height measuring device is moved to a predetermined height by a stepping motor, so that even in various dome portions having different curvatures, a slight change in height of about 0.1 mm is possible. Can be measured. When the height measuring device detects the height of the top of the dome, the detection signal is sent to the control unit. The control unit determines that the curvature of the dome has reached a predetermined curvature by receiving the detection signal. When the height corresponding to the data input to the control unit is equal to the height detected by the height measuring device, the control unit stops the supply of air.
[0014]
In a second aspect based on the first aspect, the height measuring device includes a vertically movable height detecting unit that contacts a vertex of a dome-shaped surface of the balloon member, and the height detecting unit includes a balloon member. And a detecting means for detecting the height detecting means when pushed up.
[0015]
In the second aspect, when the dome is inflated by supplying air, the height detecting means is pushed up by the dome. When the height detecting means rises by a certain amount, the detecting means detects the height detecting means.
[0016]
In a third aspect based on the second aspect, the detecting means for detecting the height detecting means is a photo sensor.
[0017]
In the third aspect, since a photosensor is used, a simple and inexpensive detecting means can be obtained.
[0018]
In a fourth aspect based on the first, second, or third aspect, the height measuring device is attached to the slider via a zero-point adjusting mechanism so that the height can be adjusted.
[0019]
In the fourth invention, the zero point adjustment mechanism performs zero point adjustment of the height measuring device. Zero point adjustment is to adjust the height of the height measuring device with respect to the slider so that the height from the reference plane can be accurately detected.
[0020]
In a fifth aspect based on the fourth aspect, the position at which the slider is raised to a predetermined height is set as the origin position, and a pulse signal of a predetermined number of pulses from the origin position is sent from the control unit to the stepping motor. A position where the slider is lowered by a distance corresponding to the number of pulses is defined as a zero point adjustment position, and a pulse signal of the number of pulses required to descend from the origin position to a height position corresponding to the height data is transmitted. It is sent from the control unit to the stepping motor to lower the slider.
[0021]
In the fifth invention, when the slider is lowered from the origin position by a distance corresponding to the required number of pulses by the stepping motor, the height measuring device outputs the height corresponding to the vertex height data input from the height input means. Located in.
[0022]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described in detail based on an embodiment shown in the drawings.
FIG. 1 is a front view showing an embodiment of a curvature setting device for a polishing jig according to the present invention, FIG. 2 is a side sectional view showing the same curvature setting device, and FIG. FIG. 4 is an enlarged sectional view taken along the line IV-IV of FIG. 3, FIG. 5 is a sectional view showing the structure of the air inlet port and the valve, and FIG. 6 is a sectional view showing the state of the cover member during air supply. FIG. 7 is a sectional view of the height measuring device. 8 is a schematic configuration diagram of a polishing apparatus using the same curvature setting device, FIG. 9 is a plan view showing a polishing jig to which a polishing pad is attached, FIG. 10 is a bottom view showing the same polishing jig, and FIG. 9 is a sectional view taken along the line XI-XI of FIG. 9, FIG. 12 is a view showing the relationship between the height of the polishing jig and the radius of curvature of the dome portion of the balloon member, FIG. 13 is a plan view showing the polishing pad, and FIG. 15 (a) and (b) are diagrams showing trackless polishing trajectories, and FIGS. 16 (a), (b) and (c) are diagrams showing zero point adjustment and height adjustment of the dome portion of the height measuring device. FIG. 17 is a diagram for explaining the measurement of the vertex height, FIG. 17 is a flowchart showing a procedure of a curvature setting operation of the balloon member by the curvature setting device, and FIG. 18 is a diagram showing another embodiment of the mounting structure of the height measurement device. FIG. 19 is a block diagram of a curvature setting device.
[0023]
The curvature setting device for a polishing jig according to the present invention is used for a polishing device for polishing a concave surface of an eyeglass lens. In this embodiment, an example is shown in which the present invention is applied to a case where a concave surface formed of a toric surface of a plastic lens for correcting astigmatism is polished. As a lens to be polished, a semi-finished lens having only a convex surface made of a urethane-based or epithio-based resin was used.
[0024]
First, before describing a curvature setting device for a polishing jig according to the present invention, a polishing device and a configuration of a polishing jig used in the polishing device will be schematically described.
In FIG. 8, a spectacle lens polishing apparatus generally designated by the reference numeral 1 includes an apparatus main body 2 installed on a floor surface, and an apparatus main body 2 which is movable in the left-right direction on the plane of the paper and has a horizontal axis 3 as a center. A gate-shaped arm 4 rotatably arranged in a direction perpendicular to the paper, an arm driving device (not shown) for reciprocating the arm 4 in the left-right direction and rotating the arm 4 in a direction perpendicular to the paper surface, 4 and a lens mounting portion 6 to which a lens 5 is mounted via a lens holder 7, and a jig driving device (not shown) disposed on the device main body 2 so as to be located below the lens mounting portion 6. The swinging device 8 and the like perform a swing motion (does not rotate) around a vertical axis K. Also, a polishing jig 9 removably provided on the swinging device 8, a polishing pad 10 removably mounted on the polishing jig 9, a lens elevating device 11 for elevating the lens mounting portion 6, and the like. It has. The oscillating device 8 is attached to be inclined so as to swing and swing at an oscillating angle α (for example, 5 °) with respect to a vertical rotation axis 21, and the polishing jig 9 is installed on the upper surface. I have.
[0025]
Such a polishing apparatus 1 is widely used from the past except that the structure of the polishing jig 9 is new. For example, a general-purpose polishing apparatus (TORO-X2SL) manufactured by LOH, which is generally commercially available, is used. It is used for polishing the lens 5.
[0026]
The lens 5 is a semi-finished lens having only the convex surface 5a finished, and the concave surface 5b is previously cut into a predetermined toric surface shape by a curve generator that performs three-dimensional NC control (processing accuracy: 3 μm or less: lens diameter). 50 mm, maximum surface roughness Ry 0.3 to 0.5 μm). In order to attach the lens 5 to the curve generator and the polishing apparatus 1, the lens holder 7 is attached to the lens convex surface 5a in advance by an apparatus called a layout blocker manufactured by LOH Corporation.
[0027]
The lens holder 7 includes a toy 13 made of tool steel or the like, and an adhesive 16 for bonding the toy 13 and the lens 5. As the adhesive 16, a low-melting alloy, for example, an alloy (melting point of about 49 ° C.) composed of bismuth, lead, tin, indium, and gallium is generally used.
[0028]
The polishing of the concave surface of the lens 5 by the polishing apparatus 1 is performed by mounting the lens 5 having the concave surface 5 b cut on the lens mounting portion 6 of the arm 4 via the lens holder 7 and the polishing jig 9 to which the polishing pad 10 is mounted. Is attached to the rocking device 8, and the lens 5 is lowered by the lens lifting / lowering device 11 to press the concave surface 5 b against the surface of the polishing pad 10. In this state, the abrasive is supplied to the surface of the polishing pad 10, and the swinging device 8 is swung while the arm 4 is reciprocated in the left-right and front-rear directions. By these movements, the concave surface 5b of the lens 5 is polished by the polishing pad 10 and the abrasive with a trackless polishing locus whose polishing locus slightly shifts every one turn as shown in FIG. 15 (a) or (b). And finish to the desired toric surface. The polishing allowance is about 5 to 9 μm. As the abrasive, for example, a solution in which an abrasive (abrasive) such as alumina oxide or diamond powder is dispersed in a polishing liquid (for example, an aqueous nitric acid solution) is used.
[0029]
4, 5, and 9 to 11, the polishing jig 9 closes a balloon member 25 formed in a cup shape of an elastic material and having an open back surface side, and an opening on the lower surface side of the balloon member 25. It comprises a fixture 26 for keeping the inside airtight, and a valve 27 for supplying air 23 to the inside of the balloon member 25.
[0030]
The balloon member 25 has a dome portion 25A having a substantially elliptical front view shape and a flat or gentle convex surface, and a substantially elliptical shape integrally extending downward from the outer periphery of the dome portion 25A. It is composed of a cylindrical portion 25B and an annular inner flange 25C integrally extended from the rear end of the cylindrical portion 25B.
[0031]
As a material of the balloon member 25, for example, synthetic rubber (for example, IIR) or natural rubber having a hardness of 20 to 50 degrees (JIS) close to natural rubber is used. The thickness T of the balloon member 25 is substantially uniform throughout, and is about 0.5 to 2 mm (usually equal thickness of about 1 mm). It is preferable to prepare a plurality of types of balloon members 25 according to the size of the lens 5 to be polished and the shape of the surface to be polished.
[0032]
4 and 11, the fixing device 26 is composed of two members, an inner fixing device 29 and an outer fixing device 30, which are arranged in a stacked manner. With these components, the lower end portion of the tubular portion 25B of the balloon member 25 and the inner flange 25C are connected. By sandwiching the balloon member 25 from the inside and the outside, the opening on the lower surface side of the balloon member 25 is hermetically sealed.
[0033]
The inner fixture 29 is formed of an elliptical plate having substantially the same size as the inner shape of the cylindrical portion 25B of the balloon member 25, and forms a closed space 32 together with the dome portion 25A of the balloon member 25.
[0034]
The outer fixture 30 is composed of a main body 30A formed in an elliptical cup shape that opens upward, and a ridge 30B integrally protruding from the lower surface of the main body 30A. The inner fixing tool 29 is fitted and inserted together with the cylindrical portion 25B of the balloon member 25, and is fixed by a plurality of set screws 37. As a result, the inner flange 25C of the balloon member 25 is pressed against the bottom surface of the concave portion 36, and the closed space 32 of the balloon member 25 is kept airtight.
[0035]
The ridge 30B of the outer fixture 30 extends over the entire length of the lower surface of the main body 30A in the longitudinal direction of the concave portion 36 of the outer fixture 30, and two engagement recesses 38, 39 are provided on the lower surface of the ridge 30B. A through hole 42 (FIGS. 10 and 11) is formed on the upper surface of the main body 30A, and engagement grooves 40 (FIGS. 4 and 10) are formed on both left and right sides over the entire length.
[0036]
In FIG. 5, the valve 27 includes a valve body 43 having an upper end screwed into a screw hole 41 provided in the inner fixture 29 and a lower end located in the through hole 42 of the outer fixture 30. A ball 44, conical coil springs 45 and 46, an exhaust pin 47, a receiving seat 48, and an E-ring 49 are incorporated in the valve body 43.
[0037]
The inside of the valve body 43 is divided into two upper and lower chambers 51 a and 51 b by a partition wall 50, and these two chambers can be communicated by a communication hole 52 provided in the partition wall 50. The ball 44 is housed in the upper chamber 51a and is urged downward by the conical coil spring 45, so that the ball 44 normally sits on the valve seat 53 formed in the upper opening of the communication hole 52, thereby forming the communication hole 52. Is closed.
[0038]
The exhaust pin 47 is vertically movably disposed in the lower chamber 51b, penetrates through the receiving seat 48 and the E-ring 49, and is normally urged downward by a conical coil spring 46 so that the receiving pin 47 can be moved. It is pressed against the seat 48. An upper end 47a of the exhaust pin 47 is loosely inserted into the communication hole 52 and is opposed to and close to the ball 44, and a lower end 47b protrudes below the valve body 43.
[0039]
9, 10, 13 and 14, the polishing pad 10 used for polishing the concave surface 5 b of the lens 5 is made of, for example, a fibrous cloth such as polyurethane, felt, or non-woven fabric, or a synthetic resin. A polishing portion 55 (FIG. 13) formed of a sheet material to be formed and having an elliptical shape having substantially the same size as the shape of the dome portion 25A of the balloon member 25 when viewed from the front, and a peripheral edge of the polishing portion 55. And a plurality of fixing pieces 56 extending outward from the fixing member 56. The polishing portion 55 is composed of eight petal pieces 58 radially divided by a plurality of grooves 57 formed from the outer periphery toward the center. The fixing piece 56 is formed by extending the outer edges of four petals 58 located in the long axis direction and the short axis direction among the eight petals 58 in the radial direction.
[0040]
Such a polishing pad 10 is detachably attached to the polishing jig 9 by a tightening member 60 shown in FIG. 14 formed in a ring shape by a spring material. When the polishing pad 10 is attached, the dome portion 25A of the balloon member 25 is inflated into a predetermined shape by supplying air 23 in advance, and then the polishing portion 55 of the polishing pad 10 is placed on the dome portion 25A. Next, the both ends 60a and 60b of the tightening member 60 are sandwiched between fingers to reduce the distance therebetween, thereby increasing the diameter of the tightening member 60. In this state, the tightening member 60 is pressed against the fixing piece 56 from above. It is bent downward and fitted to the outer periphery of the outer fixture 30. Then, when the finger is released from both ends 60a and 60b, the fastening member 60 returns to the original small diameter shape by fastening the fixing piece 56 and pressing the fixing piece 56 against the outer periphery of the outer fixing tool 30, thereby completing the mounting of the polishing pad 10. I do.
[0041]
Next, the structure and the like of the curvature setting device for a polishing jig according to the present invention will be described.
1 to 7 and FIG. 19, a curvature setting device for a polishing jig generally denoted by reference numeral 70 includes a box-shaped housing 72 installed on a work table 71 and a rear end portion of an upper surface of the housing 72. And a vertically long box-shaped cover 73 erected at the center in the width direction. The air supply device (air compressor) 77 that supplies the air 23 to the balloon member 25 is provided on one side of the housing 72. Is established.
[0042]
At the center of the upper surface of the housing 72, a polishing jig transporting device 74 for reciprocating the polishing jig 9 in the front-rear direction is installed, an operation unit 80 is provided on the front surface, and a control unit 82 is provided inside. Is established. The upper surface plate 72A of the housing 72 forms a base on which the polishing jig transport device 74 is installed.
[0043]
The cover 73 has a lower front surface opened to accommodate the rear half of the polishing jig transporting device 74, and a height measuring device 75 for measuring the height of the apex of the dome portion 25 </ b> A of the balloon member 25 above the inside. And an elevating device 76 for elevating the height measuring device 75.
[0044]
The operation unit 80 includes a power switch 81, a height data input unit 83 for inputting the apex height of the dome portion 25A of the balloon member 25 to the control unit 82 according to the instruction of the lens 5, a start button 84, A pause button 85 and the like are provided. In this case, in the present embodiment, an example is shown in which an operation button is used as the height data input means 83, but not limited to this, for example, a keyboard, a barcode reader, an externally connected computer, Data input or the like.
[0045]
The polishing jig conveying device 74 includes a box-shaped fixed case 90 that is open upward and downward and is long in the front-rear direction, and is inserted into the case 90 in the front-rear direction so as to cover a part of the upper opening of the fixed case 90. An installation table 91 which is movably disposed and on which the polishing jig 9 is installed; ₁ And height measurement position C ₂ And a driving device 92 that reciprocates between the two positions. Jig mounting position C ₁ Is a front position on the upper surface of the polishing jig transport device 74, and the height measurement position C ₂ Denotes a rear position on the upper surface of the polishing jig transport device 74 and a position directly below the height measuring device 75.
[0046]
The fixed case 90 is provided with two end plates 94 and 94 (FIG. 2) installed on the base 72A of the housing 72 so as to face front and rear, and a left-right symmetrical connecting these end plates 94 and 94. And a pair of outer frames 96, 96 (FIG. 4). The outer frame 96 includes a vertical plate 96a, an upper horizontal piece 96b, and a lower horizontal piece 96c, which are formed in a U shape by bending a metal plate. The width of the upper horizontal piece 96b is not constant over the entire length as shown in FIG. 3, and the width of the front half 96b-1 is set to be smaller than the width of the rear half 96b-2. The distance D between the first half 96b-1 of the upper horizontal piece 96b of the 96 ₁ Is set slightly wider than the width of the ridge 30B of the outer fixture 30. On the other hand, the interval D between the latter half 96b-2 ₂ Is the distance D between the first half 96b-1 ₁ The inner jigs 196c and 196c are set to be narrower, and the polishing jig 9 is positioned at the height measurement position C. ₂ By moving into the engagement groove 40 (FIG. 4) of the ridge 30B, the floating of the polishing jig 9 by the air 23 during the supply of air to the balloon member 25 is restricted. The front end portion 196e of the inner front end portion 196c is bent upward at an appropriate angle by forming a cut groove 196d in order to smoothly engage the engagement groove 40.
[0047]
The lower horizontal piece 96c of each outer frame 96 is separated from the upper surface of the base 72A, and an appropriate gap G is set. The gap G allows the abrasive to flow out of the case when the abrasive enters the inside of the case from the upper open portion of the fixed case 90. The front and rear ends of the outer frame 96 are supported by support members 154 attached to the inner surfaces of the front and rear end plates 94.
[0048]
The mounting table 91 is formed in a rectangular plate shape with a material having a small coefficient of friction such as fluororesin, and a fitting groove 97 (FIG. 4) into which the ridge 30B of the outer fixing tool 30 fits is formed in the center of the upper surface. Is formed. The bottom surface of the fitting groove 97 forms a reference surface (H) for measuring the height of the apex of the dome portion 25A of the balloon member 25, and includes an air inlet 95 and a pair of front and rear positioning pins. 99a and 99b (FIG. 11) are provided. On the other hand, four engaging portions 100 (FIG. 4) for transmitting the driving force are formed on the lower side of the installation table 91 on both sides of the mounting table 91, two in front and two in front of each other. The engaging portion 100 is formed by a concave portion having a circular (or rectangular) horizontal cross section. Such a mounting table 91 is usually located at the jig mounting position C of the polishing jig transport device 74. ₁ The polishing jig 9 is installed from above in a state where the polishing jig 9 is stopped. The mounting table 91 is at the height measurement position C ₂ The height interval between the upper surface of the fitting groove 97 and the lower surface of the inner tip portion 196c of the rear half portion 96b-2 of the upper horizontal piece 96b in the state of being located at Since the height of the portion below the engagement groove 40 is the same as the height of the portion, the polishing jig 9 is positioned at the height measurement position C. ₂ Then, the polishing jig 9 is fixed in a state where the lower surface of the ridge 30B and the upper surface of the fitting groove 97 (the reference surface for height measurement) are in contact with each other.
[0049]
5 and 6, an air injection port 95 of the polishing jig curvature setting device 70 includes the injection port member 98 and a cover member 102 that covers the injection port member 98.
[0050]
The inlet member 98 is composed of a disk-shaped main body 98A and a male screw portion 98B integrally protruding at the center of the lower surface of the main body 98A. A concave portion 103 is formed at the center of the upper surface of the main body 98A. An air inlet 104 is formed. The inner diameter of the recess 103 is set to be larger than the outer diameter of the lower end 47b of the exhaust pin 47 so that the exhaust pin 47 can be loosely fitted. The air inlet 104 has a horizontal hole 104A formed in a radial direction passing through the center of the main body 98A, and a vertical vertical hole 104B having an upper end communicating with the horizontal hole 104A and a lower end opening to the lower surface of the male screw portion 98B. The openings 104a at both ends of the lateral hole 104A are open to the outer peripheral surface of the main body 98A. The lateral hole 104A is not limited to this, and may be formed obliquely, for example, as shown by a two-dot chain line 105 in FIG. 5, and may be opened on a slope 106 formed on the outer periphery of the upper surface of the main body 98A.
[0051]
The male screw portion 98B is formed in a cylindrical shape having the vertical hole 104B therein, and has a male screw screwed into a screw hole 111 formed on the upper surface of the installation table 91 on the outer periphery. The screw hole 111 forms a supply passage for the air 23, and is connected to the air supply device 77 via a pipe 112 (FIG. 1).
[0052]
The cover member 102 is formed in a cup shape by an elastic material such as rubber, and is provided integrally with a disk-shaped elastic deformation portion 102A having a round opening 115 at the center and an outer periphery of the elastic deformation portion 102A. And a cylindrical portion 102B surrounding the outer periphery of the main body 98A. The elastically deforming portion 102A is in close contact with the upper surface 116 of the inlet member 98 as shown in FIG. 5 except when air is supplied, thereby preventing the abrasive from entering the air inlet 104.
[0053]
The cylindrical portion 102B is formed thicker than the elastically deforming portion 102A, and has a lower end fixed to the lower end of the outer peripheral surface of the main body 98A of the inlet member 98 by welding or the like. An annular gap 120 is formed between the inner peripheral surface of the cylindrical portion 102B and the outer peripheral surface of the main body 98A, and the air injection port 104 communicates with the gap 120. The outer diameter of the cylindrical portion 102 </ b> B is set to be approximately the same as or slightly smaller than the diameter of the through hole 42 of the outer fixture 30, so that the cylindrical portion 102 </ b> B is easily fitted into the through hole 42. When the pressure in the cover member 102, that is, the pressure in the gap 120 is increased by the supply, the pressure is elastically deformed outward and pressed against the inner wall of the through hole 42.
[0054]
When the air 23 is supplied from the air supply device 77 to the inlet member 98, the air 23 is guided to the gap 120 through the air inlet 104 and increases the pressure inside the cover member 102. For this reason, the elastically deforming portion 102A elastically deforms upward as shown in FIG. 6, separates from the upper surface 116 of the inlet member 98, adheres closely to the lower surface 43a of the valve body 43, and is located below the air inlet 104 and the valve 27. Side chamber 51b (FIG. 5). When the air 23 is supplied to the lower chamber 51b, the pressure in the lower chamber 51b rises, and the pressure causes the ball 44 to be pushed up against the conical coil spring 45 to open the communication hole 52. Therefore, the air 23 is injected into the balloon member 25 through the communication hole 52, and inflates the dome portion 25A.
[0055]
When the top of the dome portion 25A reaches a predetermined height and the supply of the air 23 is stopped, the pressure in the air inlet 104 is reduced, and the elastically deforming portion 102A elastically returns to the original state, and the inlet member It closely adheres to the upper surface 116 of the panel 98. Further, since the pressure in the lower chamber 51b is also reduced by stopping the injection of the air 23, the ball 44 is lowered by the spring force of the conical coil spring 45 to close the communication hole 52, and the air to the balloon member 25 is thereby reduced. The injection of 23 ends. When the inside of the balloon member 25 is returned to the atmospheric pressure, the ball 44 is pushed up by the exhaust pin 47 to open the communication hole 52 of the valve 27, and the closed space 32 of the balloon member 25 may be opened to the atmosphere.
[0056]
2 and 4, a commercially available rodless air cylinder is used as the driving device 92 for linearly reciprocating the installation table 91 in the front-rear direction. The rodless air cylinder 92 includes a cylinder body 150 that is long in the front-rear direction, and a movable member 151 that is linearly reciprocated in the front-rear direction by the cylinder body 150. The upper surface of the cylinder body 150 is covered with the guide member 152, the opening is formed on the lower surface over substantially the entire length in the longitudinal direction, and a piston (not shown) is slidably incorporated therein. It is fixed to the plates 94, 94, respectively.
[0057]
The movable member 151 includes a bottom portion 151A and a pair of side portions 151B and 151C that are opposed to each other in the left-right direction by being formed in a U-shape whose front view is opened upward by bending a metal plate. Have been. The bottom 151A is located below the cylinder body 150 and is fixed to a piston in the cylinder body 150 via a connecting member 153. The bottom 151A is separated from the upper surface of the base 72A.
[0058]
Each of the side portions 151B and 151C has an engaging portion 155a (FIG. 2) integrally protruding upward from front and rear ends of an upper end surface. The engaging portions 155a of the side portions 151B and 151C are respectively engaged with the engaging portions 100 of the installation table 91 from below, and the driving force of the cylinder body 150 is controlled by these engaging portions 100 and 155a. A driving force transmitting portion for transmitting the driving force to the installation table 91 is formed. That is, when the rodless air cylinder 92 is driven, the engaging portion 155a presses the inner wall of the engaging portion 100, so that the mounting table 91 moves integrally with the movable body 151. Note that the upper end of the engaging portion 155a is not in contact with the engaging portion 100. This is to prevent the driving force transmission unit from merely transmitting the driving force and not supporting the weight of the mounting table 91 including the polishing jig 9. When supported, the mounting table 91 and the movable member 151 are distorted due to the weight thereof, so that the mounting table 91 cannot be moved smoothly.
[0059]
The guide member 152 covers the entire upper surface of the cylinder body 150, and the installation table 91 is mounted on the upper surface so as to be slidable in the front-rear direction. Further, the guide member 152 integrally has bent pieces 152a, 152a which are bent downward at both left and right ends. The guide member 152 is mounted on the upper surface of the cylinder body 150 via an intervening member 156 as necessary. Both front and rear ends of the guide member 152 are supported by support plates 157 attached to the inner surfaces of the front and rear end plates 94. Since the guide member 153 covers the upper surface of the cylinder main body, the abrasive that has entered through the opening above the fixed case 90 is prevented from directly falling on the cylinder main body.
[0060]
2, the elevating device 76 includes a Z-axis guide 160 vertically mounted on the back plate of the cover 73, a slider 161 on which the height measuring device 75 is mounted, and the Z-axis guide 160. The driving device 162 is configured to move up and down along the axis 160. The driving device 162 used a stepping motor.
[0061]
The stepping motor is a motor in which a step angle per one pulse signal is determined and moves by a predetermined step angle in accordance with an input pulse signal. The stepping motor has a small angle error per one step and can perform high-precision drive control. The error is not accumulated even when the motor is continuously rotated, and the motor has a self-holding force at the position even when the motor is stopped, so that the motor is suitable for position control. By applying such a stepping motor to the driving device 162 of the polishing jig curvature setting device 70, a highly accurate height measurement can be performed with a simple structure. Here, in this embodiment, a stepping motor having a basic step angle of 0.72 degrees is used. However, in order to enable finer position adjustment, the rotation angle is divided into 20 by a drive circuit 196 described later. And micro-stepping is performed to drive at a rotation angle of 0.036 degrees per pulse. The stepping motor is not limited to this, and for example, a linear stepping motor may be used.
[0062]
The height measuring device 75 includes, as shown in FIG. 7, the height detecting means 88, a detecting means 170 for detecting the height detecting means 88, and the detecting means 170 having a reference surface H (see FIG. 16) and a zero point adjusting mechanism 171 for manually adjusting the height of the detecting means 170 so that the height from the point 16) can be detected.
[0063]
The height detecting means 88 includes a rod 174 slidably inserted into the cylinder 172 via a bearing 173, a contact terminal 175 attached to a lower end of the rod 174, and an upper end of the rod 174. And a retaining ring 177 fixed by screws 176. The retaining ring 177 is mounted on the upper surface of a holding member 178 that supports the upper end of the cylindrical body 172, thereby preventing the rod 174 from dropping from the cylindrical body 172. The lower surface of the contact terminal 175 is formed as a flat surface, and contacts the vertex P of the dome portion 25A.
[0064]
As the detection means 170, a photo sensor including a light emitting unit (for example, a light emitting diode as a light emitting element) 181a and a light receiving unit (for example, a photodiode, a phototransistor, a photo IC) 181b as a light receiving element is used. Mounted on. In this embodiment mode, a photosensor including a light emitting diode as a light emitting element and a phototransistor as a light receiving element is used. The holder 180 is attached to the holding member 178 via the connecting plate 182 so as to be located above the holding member 178, and the tip is located above the rod 174. The holder 180 has a through-hole (or a concave portion) 183 into which the upper end of the rod 174 can be inserted, and the inner wall of the through-hole 183 is provided so that the light emitting diode 181a and the phototransistor 181b face each other. It is embedded 180 ° apart in the direction. The phototransistor 181b is configured to receive light emitted from the light emitting diode 181a, convert the light into an electric signal, and send the electric signal to the control unit 82. When the rod 174 rises and blocks the light of the light emitting diode 181a, the output signal of the phototransistor 181b changes, whereby the height detecting means 88 is detected by the detecting means 17.
[0065]
The zero point adjusting mechanism 171 includes a holding member 178 for holding the cylindrical body 172, an adjusting screw 185 for vertically moving the holding member 178, a screw supporting member 186 to which the adjusting screw 185 is attached, and the like. It is configured.
[0066]
The adjusting screw 185 is screwed with the holding member 178 and integrally has a knob 185A at the upper end. A lock nut 190 is screwed into a portion between the knob 185A and the screw supporting member 186. ing. On the other hand, a ring 191 is attached to the lower end side of the adjusting screw 185, and a compression coil spring 192 is elastically mounted between the ring 191 and the holding member 178. Prevents rattling. The screw support member 186 is fixed to the lower surface of the slider 161.
[0067]
The control unit 82 has a function of controlling the driving device 162 so as to change the height of the height measuring device 75 according to the input data of the vertex height, and the piping unit according to a detection signal from the detecting unit 170. It has a function of opening and closing a valve 166 (FIG. 1) provided in the middle of 112 to control the supply of air 23 and the like.
[0068]
Next, a procedure of a curvature setting method and a curvature setting operation of the balloon member 25 by the polishing jig curvature setting device 70 will be described with reference to FIGS. 16 and 17.
First, the zero point adjustment of the height measuring device 75 is performed according to the following procedure.
The zero point adjustment is performed so that the height measuring device 75 can accurately detect the height from the reference surface H. The height measuring device 75 detects the height of the reference surface H as zero. Thus, the height position of the height measuring device 75 with respect to the slider 161 is adjusted.
When performing this zero point adjustment, the slider 161 is moved to the lowest point position (zero point adjustment position Q) as shown in FIG. ₁ ). This zero point adjustment position Q ₁ Is the position at which the height is detected to be zero, and the origin position Q of the slider 161 is set in advance. ₀ Is a position where a pulse signal of a predetermined number of pulses (20,000 pulses in this embodiment) is sent to the stepping motor 162 and lowered.
[0069]
Home position Q ₀ Is set to a predetermined height in consideration of the height of the height measuring device 75, the height measurement range of the polishing jig, and the like. In this embodiment, when the slider 161 is raised, the slider 161 is stopped at a predetermined height on the Z-axis guide by a detection signal from the origin positioning sensor 163. ₀ And In the following description, when the position of the slider 161 on the Z-axis guide is represented by the number of pulses, the pulse for raising the slider 161 is counted as plus, and the pulse for lowering the slider 161 is counted as minus. ₀ Is set to 20,000 pulses and the zero point adjustment position Q ₁ Is the pulse number of zero.
[0070]
Move the slider 161 to the zero point adjustment position Q. ₁ When the contact terminal 175 is lowered, the lower surface of the contact terminal 175 contacts the reference surface H, the retaining ring 177 contacts or separates upward from the upper surface of the holding member 178, and the upper end of the rod 174 is above or below the detecting means 170. 16 (a), the retaining ring 177 is separated from the holding member 178, the upper end of the rod 174 is located below the detecting means 170, and the light of the light emitting diode 181a is This shows a state in which no interruption occurs.
[0071]
Next, the adjusting screw 185 is rotated to gradually lower the holding member 178. The light emitted from the light emitting diode 181a is blocked by the rod 174, and the rotation of the adjusting screw 185 is stopped at the moment when the photo sensor 170 detects the light. The holding member 178 is fixed, and the zero point adjustment of the height measuring device 75 is completed (this state is indicated by a two-dot chain line). At this time, the zero point adjustment position Q ₁ In this state, the contact terminal 175 is in contact with the reference plane H, and the detecting means 170 has detected the height detecting means 88. When the pulse number is zero, the height detected by the height measuring device 75 becomes zero. It has been adjusted.
[0072]
Note that the slider 161 is moved to the zero point adjustment position Q. ₁ When the upper end of the rod 174 is located above the detecting means 170 in a state where the contact terminal 175 is in contact with the reference plane H, the holding member is kept until the rod 174 does not block the light of the light emitting diode 181a. After raising 178, the zero point may be adjusted by the method described above.
[0073]
Further, the slider 161 is moved to the zero point adjustment position Q. ₁ If the contact terminal 175 does not contact the reference surface H at the time when the holding member 178 is turned by turning the adjusting screw 185 until the contact terminal 175 contacts the reference surface H, the zero point is adjusted by the above-described method. do it.
If the contact terminal 175 cannot be brought into contact with the reference plane H or the upper end of the rod 174 cannot be located below the detection means 170 within the adjustment range of the zero point adjustment mechanism, the origin position Q ₀ Or change the origin position Q ₀ To zero point adjustment position Q ₁ The number of pulses to be lowered may be changed so that the zero point can be adjusted.
The structure of the zero-point adjusting mechanism is not particularly limited as long as the height position of the height measuring device with respect to the slider 161 can be finely adjusted. For example, as shown in FIG. May be mounted on the upper side of the support member 186 so as to be vertically movable.
[0074]
Next, the power switch 81 is turned on (Step 200 in FIG. 17), and the mounting table 91 is moved to the jig mounting position C. ₁ (Step 201). In step 202, a pulse signal is sent to the stepping motor 162 to move the slider 161 to the origin position Q. ₀ And the height measuring device stands by upward (FIG. 16B). When the slider 161 moves up to a predetermined position, the origin positioning sensor 163 detects the slider 161. When a detection signal is sent to the control unit, the driving of the stepping motor 162 is stopped by the control unit, and the origin position Q ₀ Then, the slider 161 stops.
[0075]
Next, the polishing jig 9 described in the processing instruction column of the instruction for the lens 5 to be polished is selected and set on the mounting table 91 (step 203). At this time, the polishing pad 10 has not been attached to the balloon member 25 yet. In order to install the polishing jig 9 on the installation table 91, as shown in FIG. 5, the polishing jig 9 is placed on the installation table 91, and the injection member 98 is inserted into the through hole 42 via the cover member 102. At the same time, the polishing jig 9 may be positioned in the front-rear and left-right directions with respect to the installation table 91 by engaging the positioning recesses 38 and 39 and the positioning pins 99a and 99b shown in FIG. In this state, the lower surface 43a of the valve body 43 faces the upper surface of the elastically deforming portion 102A of the cover member 102 with a small gap as shown in FIG. Thus, the air 23 is supplied to the balloon member 25.
[0076]
Next, the vertex height data of the balloon member 25 of the polishing jig 9 set on the setting table 91 is confirmed according to the instruction, and the data is input to the control unit 82 by the height data input means 83 (step). 204).
[0077]
When the data input and the installation of the polishing jig 9 on the installation table 91 are completed, the start button 84 is operated (step 205). As a result, the control unit 82 performs arithmetic processing based on the input data, drives the stepping motor 162 by a predetermined number of pulses, and moves the slider 161 to the origin position Q. ₀ Then, as shown in FIG. 16 (c), the height is lowered by a predetermined amount, and the height measuring device 75 is held at a predetermined height position according to the input data (step 206).
[0078]
The control of the stepping motor 162 will be described in more detail with reference to FIG. 19. The vertex height data input to the control unit 82 and stored in the vertex height data storage unit 193 is converted into the number of pulses by the arithmetic processing unit 194. Origin position Q of slider 161 ₀ The number of pulses is calculated by subtracting the number of pulses at the apex height from the number of pulses of the stepping motor 162. A pulse signal having the number of pulses is generated from the pulse oscillator 195, and the driving circuit 196 converts the pulse signal into a stepping motor driving signal. To drive the stepping motor 162 to lower the slider 161.
[0079]
For example, the zero point adjustment position Q ₁ To origin position Q ₀ Height h ₁ Is 100 mm (the number of pulses is 20,000), and the apex height W of the dome portion 25A of the balloon member 25 after air injection is 28 mm (the number of pulses is 5600), the slider 161 is moved 72 mm (100-28, pulse number) from the initial position. (Equation 14,400).
[0080]
Also, almost simultaneously with the start of the lowering of the height measuring device 75, the air cylinder 92 is driven to move the installation table 91 to the jig mounting position C ₁ Height measurement position C ₂ Starts moving (step 207). When the movable member 151 of the rodless air cylinder 92 is moved by the cylinder body 150, the engaging portion 155a of the movable member 151 (FIG. 4) moves the engaging portion 100 of the installing table 91. This is performed by pressing the member 151 in the moving direction and moving the installation table 91 along the upper surface of the guide member 152. The moving speed of each of the height measuring device 75 and the mounting table 91 is the height measurement position C of the mounting table 91. ₂ It is set so that the arrival at the vehicle comes before the arrival of the height measuring device 75 at the predetermined position.
[0081]
The height measuring device 75 and the polishing jig 9 are moved to predetermined positions, and when it is confirmed that the movement has been completed (step 208), the valve 166 is opened by a signal from the control unit 82, and the air 23 from the air supply device 77 The gas is supplied to the inlet member 98 and injection into the balloon member 25 is started (step 209). When the air 23 is supplied to the balloon member 25, the dome portion 25A gradually expands as the pressure in the sealed space 32 increases, and the height of the vertex P (FIG. 7) increases. When the height of the vertex becomes equal to the predetermined height, that is, the value input to the control unit 82, the vertex P contacts the lower surface of the contact terminal 175 and pushes it up. For this reason, the upper end of the rod 174 is inserted into the through hole 183 from below to block light emitted from the light emitting diode 181a, and detects that the vertex height has reached a predetermined height (step 210).
[0082]
When the rod 174 blocks light emitted from the light emitting diode 181a, the phototransistor 181b stops receiving light from the light emitting diode 181a, so that the output signal of the detecting means 170 changes, and control is performed based on the change in the output signal. The portion 82 determines that the curvature of the dome portion 25A has reached a predetermined curvature, and stops the supply of the air 23 from the air supply device 77 by closing the valve 166 (step 211).
[0083]
When the air 23 is injected into the closed space 32 and the dome portion 25A is inflated, the radius of curvature of the cross section including the central axis of the dome portion 25A is minimized in the minor axis direction of the ellipse (Y direction in FIG. 9) and the major axis direction (Y direction). A shape close to the toric surface which is maximum in the direction (X direction in FIG. 9) is formed. In this case, since the radius of curvature of the dome portion 25A changes according to the center height (vertex height) of the dome portion 25A as shown in FIG. 12, the height of the dome center is measured by the height measuring device 75. By adjusting, the radius of curvature of the dome portion 25A can be set to a desired radius of curvature. FIG. 12 shows the jig height of the polishing jig 9 provided with the balloon member 25 in which the major axis of the dome portion 25A is 90 mmφ and the ratio of the minor axis to the major axis is 0.9 (from the bottom of the polishing jig to the center of the dome portion). FIG. 9 is a diagram showing a relationship between the height of the dome portion and a radius of curvature of the dome portion 25A.
[0084]
When the injection of the air 23 into the balloon member 25 is completed, the height measuring device 75 is moved to the origin position Q. ₀ (Step 212), and the mounting table 91 is moved to the jig mounting position C. ₁ (Step 213), and when the polishing jig 9 is removed from the mounting table 91 (Step 214), the curvature setting operation of the balloon member 25 by the polishing jig curvature setting device 70 is completed (Step 215). The switch is turned off (step 216). Further, when the curvature setting operation of another balloon member 25 is to be performed continuously, the operation of step 203 and subsequent steps is repeated.
[0085]
The polishing jig 9 in which the air 23 has been injected into the balloon member 25 is detached from the installation table 91, and then has the polishing pad 10 attached thereto, and is attached to the swinging device 8 of the polishing apparatus 1 shown in FIG. Thereby, the concave surface of the lens 5 is provided.
[0086]
In such a curvature setting device 70 for a polishing jig, since a stepping motor is used as the driving device 162 that moves the height measuring device 75 up and down, the height of the height measuring device 75 is set to one pulse of the stepping motor 162. Can be changed by the height corresponding to the rotation angle of the dome portion, and the apex height of various balloon members 25 having slightly different curvatures of the dome portion can be accurately measured.
[0087]
Further, since the height measuring device 75 includes the contact type height detecting means 88 which can move up and down and the detecting means 170 which detects the height detecting means 88, the height of the apex of the balloon member is directly measured. It does not require a complicated structure and expensive height detecting means as in the case of the above, and the structure is simple and inexpensive.
[0088]
Further, a zero point adjusting mechanism 171 is provided, and the surface of the mounting table 91 on which the polishing jig 9 is installed is set as a reference surface H. By bringing the contact terminals 175 into contact with the reference surface H, the zero of the height measuring device 75 is Since the point adjustment is performed, the zero point adjustment is performed on the surface where the polishing jig is actually mounted, so that the adjustment can be performed accurately, and the adjustment is easy, so that the measurement accuracy can be maintained. Further, the height measuring device 75 can be automatically set at a predetermined height position according to the input data only by inputting the data of the vertex height of the balloon member 25 to the control unit 82 according to the instruction. In addition, the handling of the device is easy and the burden on the operator can be reduced.
[0089]
In addition, the origin position of the pulse number count is provided above and the zero point adjustment position Q ₁ To the origin position Q ₀ , The height measuring device 75 is lowered to the lowest point position at the time of zero point adjustment, and is adjusted with respect to the reference plane H. Therefore, the origin position Q ₀ And zero point adjustment position Q ₁ The height with respect to the reference plane can be accurately measured even if the height is different. In order to accurately measure the height, the slider 161 must be once moved to the origin position Q. ₀ To the origin position Q ₀ It is important to send a predetermined number of pulses from ₀ Is positioned upward, the slider 161 is moved to the origin position Q. ₀ There is no need to hit the polishing jig 9 and the height measuring device 75 when returning to.
[0090]
In the above-described embodiment, a gap-type photosensor is used as the detection unit 170. However, the present invention is not limited to this, and a reflection-type photosensor may be used.
In the present embodiment, the mounting table 91 is located at the jig mounting position C. ₁ And height measurement position C ₂ Although the example in which the polishing jig 9 is transported while moving between the positions has been described, the height measuring position C is not limited to this, and the mounting table 91 is positioned directly below the height measuring device 75. ₂ May be fixedly arranged.
[0091]
Next, as a second embodiment, the zero point adjustment position Q of the slider 161 is set. ₁ And origin position Q ₀ 20 and 21 will be described with reference to FIGS. FIG. 20 is a flowchart showing the procedure of the curvature setting operation of the balloon member by the curvature setting device according to the second embodiment, and FIGS. 21 (a), (b) and (c) show the procedure in the second embodiment. It is a figure explaining zero point adjustment of a height measuring device, and measurement of the vertex height of a dome part.
In the second embodiment, the lowermost point position of the slider is set to the zero point adjustment position Q. ₁ And origin position Q of pulse count ₀ And this origin position Q ₀ From the initial position Q ₂ This is the same as the first embodiment except for the following.
[0092]
When performing the zero point adjustment, the slider 161 is moved to the lowest point position (zero point adjustment position Q) as shown in FIG. ₁ , Origin position Q ₀ ). The zero point adjustment position (origin position) may be set to an arbitrary position at which the zero point can be adjusted by the zero point adjustment mechanism, and this position is set as the pulse number zero position, and the zero point is adjusted by the same method as in the first embodiment. Perform point adjustment.
[0093]
Next, a procedure of the curvature setting operation, which is different from the first embodiment, will be described.
In the second embodiment, a pulse signal is sent to the stepping motor 162 in step 202 'to move the slider 161 to the initial position Q. ₂ And the height measuring device is made to stand by upward (FIG. 21B). This initial position Q ₂ Is the origin position Q as described above. ₀ From the predetermined pulse number (20,000 in the second embodiment).
[0094]
In step 206, the control unit performs arithmetic processing based on the input data, drives the stepping motor 162 by a predetermined number of pulses, and moves the slider 161 to the initial position Q. ₂ Then, as shown in FIG. 21 (c), the height is lowered by a predetermined amount, and the height measuring device 75 is held at a predetermined height position according to the input data. For example, the zero point adjustment position Q ₁ (Origin position Q ₀ ) To the initial position Q ₂ Height h ₁ Is 100 mm (pulse number 20,000) and the height of the apex of the dome portion 25A of the balloon member 25 after air injection is W 28 mm (pulse number 5,600), the slider 161 is moved 72 mm (100− 28, the number of pulses 14,400).
[0095]
In step 212 ', when the injection of the air 23 into the balloon member 25 is completed, the height measuring device 75 is returned to the initial position.
[0096]
Steps other than those described above are the same as those in the first embodiment, and a description thereof will not be repeated.
In the case of the second embodiment, the zero point adjustment position (origin position) may be set to an arbitrary position where the zero point can be adjusted, and the number of pulses at this position may be set to zero. There is an advantage that a special structure for positioning the slider 161 at a predetermined origin position as in the example is not required.
[0097]
【The invention's effect】
As described above, according to the curvature setting device for a polishing jig according to the present invention, the heights of the vertices of various balloon members having different curvatures can be automatically measured, and the curvature setting operation can be automated. . In addition, since a stepping motor is used as a drive device of a slider equipped with a height measuring device, the structure can be simplified, high-precision control can be performed, and the vertex height of the balloon can be measured with high accuracy, and the cost can be reduced A curvature setting device can be provided.
[Brief description of the drawings]
FIG. 1 is a front view showing an embodiment of a curvature setting device for a polishing jig according to the present invention.
FIG. 2 is a side sectional view showing the curvature setting device.
FIG. 3 is a plan view showing a state where a polishing jig is installed on an installation table.
FIG. 4 is an enlarged sectional view taken along line IV-IV in FIG. 3;
FIG. 5 is a cross-sectional view showing a structure of an air inlet and a valve.
FIG. 6 is a cross-sectional view illustrating a state of an elastic member when air is supplied.
FIG. 7 is a sectional view of the height measuring device.
FIG. 8 is a schematic configuration diagram of a polishing apparatus using the same curvature setting device.
FIG. 9 is a plan view showing a polishing jig to which a polishing pad is attached.
FIG. 10 is a bottom view showing the polishing jig.
FIG. 11 is a sectional view taken along line XI-XI in FIG. 9;
FIG. 12 is a diagram showing the relationship between the height of the polishing jig and the radius of curvature of the dome portion of the balloon member.
FIG. 13 is a plan view showing a polishing pad.
FIG. 14 is a perspective view showing a fastening member of the polishing pad.
FIGS. 15A and 15B are conceptual diagrams showing trackless polishing trajectories of the polishing apparatus.
FIGS. 16 (a), (b), and (c) are diagrams for explaining zero point adjustment of the height measuring device and measurement of the vertex height of the dome portion.
FIG. 17 is a flowchart showing a procedure of a curvature setting operation of the balloon member by the curvature setting device.
FIG. 18 is a view showing another embodiment of the mounting structure of the height measuring device.
FIG. 19 is a block diagram of a curvature setting device.
FIG. 20 is a flowchart illustrating a procedure of a curvature setting operation of the balloon member by the curvature setting device according to the second embodiment;
FIGS. 21 (a), (b), and (c) are diagrams illustrating zero point adjustment and measurement of a vertex height of a dome portion of the height measuring device according to the second embodiment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Polishing device, 5 ... Lens, 5a ... Convex surface, 5b ... Concave surface, 9 ... Polishing jig, 23 ... Air, 25 ... Balloon member, 25A ... Dome part, 27 ... Valve, 70 ... Polishing jig curvature setting device 74, a polishing jig conveying device, 75, a height measuring device, 77, an air supply device, 83, height data input means, 88, height detecting means, 91, installation table, 170, detecting means, 162, stepping Motor, 170 detecting means (photo sensor), 171 zero point adjusting mechanism, 174 rod, 175 contact terminal, 181a light emitting diode, 181b phototransistor, C ₁ … Jig mounting position, C ₂ ... Height measurement position, H ... Reference plane.

Claims (5)

A curvature setting device for a polishing jig for inflating the surface of the balloon member into a dome shape by supplying air to a balloon member of the polishing jig and setting the curvature to a predetermined curvature,
An installation table having an air injection port to which a valve of the polishing jig is connected and on which the polishing jig is installed,
A stepping motor for raising and lowering the slider,
A height measuring device attached to the slider so as to be located above the height measuring position of the balloon member, and measuring a vertex height of a dome surface of the balloon member;
A control unit that sends and controls a pulse signal to the stepping motor,
Height control means for inputting data of the vertex height of the surface of the balloon member to the control unit,
Positioning the height measuring device at a height corresponding to the vertex height data input from the height input means,
A polishing jig, wherein the height measuring device detects the apex height of the surface of the balloon member expanded by the supply of air, whereby the supply of air is stopped and the curvature of the surface of the balloon member is set. Tool curvature setting device. The curvature setting device for a polishing jig according to claim 1,
The height measuring device includes a vertically movable height detecting unit that contacts a vertex of the dome-shaped surface of the balloon member, and detects the height detecting unit when the height detecting unit is pushed up by the balloon member. A curvature setting device for a polishing jig, comprising: a detection unit. The curvature setting device for a polishing jig according to claim 2,
A curvature setting device for a polishing jig, wherein the detecting means for detecting the height detecting means is a photo sensor. The curvature setting device for a polishing jig according to claim 1, 2, or 3,
The height measuring device is attached to the slider via a zero-point adjusting mechanism so that the height can be adjusted, and the zero-point adjusting mechanism performs zero-point adjustment with respect to a reference surface on which a polishing jig is installed. Characteristic curvature setting device for polishing jig. The curvature setting device for a polishing jig according to claim 4,
The position where the slider is raised to a predetermined height is set as the origin position,
A position where the pulse signal of a predetermined number of pulses is sent from the control unit to the stepping motor from the origin position and the slider is lowered by a distance corresponding to the number of pulses is a zero point adjustment position,
A polishing jig, wherein a pulse signal of a pulse number required for descending from the origin position to a height position corresponding to the height data is sent from the control unit to the stepping motor to lower the slider. Curvature setting device.

Images