JP2004304184A - Cleaning sheet, its manufacturing method, and transporting member having the sheet - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cleaning sheet that can remove foreign matters adhering to the probe of a probe card without wearing the probe, in a state that the removed foreign matters are not allowed to again adhere to the probe at the time of removing the foreign matters; and to provide a method of manufacturing the sheet, a method of cleaning the sheet, and a transporting member having the sheet. <P>SOLUTION: The cleaning sheet which is used for removing the foreign matters adhering to the front end of the probe of the probe card has a cleaning layer. The cleaning layer is constituted so that its surface forms at least one surface of the cleaning sheet and has an initial elastic modulus of 0.5-100 N/mm<SP>2</SP>. It is preferable to form the cleaning layer by curing a mixture containing a vinyl monomer by projecting radiation upon the mixture. The transporting member has this cleaning sheet. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention provides a cleaning sheet for removing foreign matter attached to the tip of a probe needle of a probe card, a method for manufacturing the same, a transport member having the cleaning sheet, and a probe sheet using the cleaning sheet or the transport member. The present invention relates to a cleaning method for removing foreign matter.

2. Description of the Related Art A probe card is used for a continuity test of a chip formed on a semiconductor wafer. In this continuity test, a non-defective or defective product is determined by bringing a probe needle of a probe card into contact with an electrode pad formed on the surface of the chip and measuring the contact resistance value. When the probe needle is brought into contact with an electrode pad made of, for example, aluminum, a certain pressure is applied, and the tip of the probe needle scrapes off a natural oxide film made of aluminum oxide or the like formed on the surface of the electrode pad. The inspection of the wafer is performed by reliably connecting the needle and the electrode pad electrically. If the insulating aluminum oxide or the like scraped off by the probe needle adheres as a foreign matter to the tip of the probe needle, the contact resistance value when the probe needle is brought into contact with the electrode pad changes. It may interfere with the continuity test. Therefore, it is necessary to periodically remove foreign matter adhering to the tip of the probe needle.
As a method of removing foreign matter attached to the tip of the probe needle, for example, in Japanese Patent Application Laid-Open Nos. 7-244074, 10-300777, and 10-339766, diamond powder, alumina, silicon carbide, There has been proposed a method of removing foreign matter by bringing the tip of a probe needle into contact with a layer in which an abrasive such as glass is dispersed in a resin or a layer fixed with an adhesive (for example, Patent Document 1, Patent Document 2, And Patent Document 3). Further, Japanese Patent Application Laid-Open No. Hei 10-19928 proposes a method for removing foreign matter using a cleaning sheet having an adhesive force (measured based on Japanese Industrial Standard JIS Z 0237) of 100 g / 25 mm to 250 g / 25 mm (for example, see Patent Reference 4) and Japanese Patent Application Laid-Open No. 11-133116 propose a method of removing the toner using a cleaning sheet made of fibrous metal, carbon fiber, and fibrous ceramic (for example, see Patent Document 5).

JP-A-7-244074 JP-A-10-300777 JP-A-10-339766 JP-A-10-19928 JP-A-11-133116

  However, in the method of removing foreign matter by bringing the tip of the probe needle into contact with a cleaning layer containing an abrasive such as diamond powder, the probe needle itself is abraded by the abrasive during cleaning, thereby shortening the life of the probe card. Become. If foreign matter removed from the tip of the probe needle by cleaning is attached again at the base of the needle, the foreign matter may fall on the wafer and contaminate the wafer during the next continuity test. Was. In the method of removing foreign matter using a cleaning sheet having an adhesive layer, there is no abrasion of the probe needle and no reattachment of foreign matter, but there is a problem that foreign matter firmly fixed to the probe needle cannot be removed. The method of removing foreign matter by using a cleaning sheet made of fibrous metal, carbon fiber, or fibrous ceramics has the effect of reducing the wear of the probe needle and the reattachment of foreign matter, but it is possible to completely remove the foreign matter. could not.

  The present invention has been made to solve the above problems, and the present invention, when removing foreign matter attached to the probe needle of the probe card, it is possible to remove the foreign matter without wearing the probe needle, It is an object of the present invention to provide a cleaning sheet and a method of manufacturing the same, in which foreign matter once removed from a needle does not adhere again, a conveying member having the cleaning sheet, and a cleaning method.

The cleaning sheet of the present invention is a cleaning sheet that removes foreign matter attached to the tip of a probe needle of a probe card, the cleaning sheet has a cleaning layer, and the surface of the cleaning layer has at least one surface of the cleaning sheet. The cleaning layer has an initial elastic modulus of 0.5 to 100 N / mm ² .
Here, the cleaning sheet may further have a base material layer.
Further, the cleaning layer may be provided on a surface on one side of the base material layer, and may have an adhesive layer on the other side of the base material layer.
The cleaning layer may be formed by irradiating a mixture containing a vinyl monomer with radiation and curing the mixture. According to the present invention, since the cleaning layer can be formed by irradiation with radiation as described above, the process is simple, no solvent is required, and the present invention is excellent from the viewpoint of environmental protection.
Further, the cleaning layer may be formed by irradiating a mixture containing a urethane polymer and a vinyl-based monomer with radiation to cure the mixture.
In addition, by reacting a polyol and a polyisocyanate in the presence of a vinyl monomer to form a urethane polymer, a mixture containing the urethane polymer and the vinyl monomer is formed, and then irradiated with radiation and cured to form a cleaning layer. Can be formed.

The transport member of the present invention is characterized in that any one of the cleaning sheets described above is provided on a support.
Here, the cleaning sheet may be provided on the support by an adhesive means.
Further, the support may be a wafer. If a wafer is used as the pedestal for fixing the polishing member, the variation in the height direction in the vertical direction of the surface to which the cleaning sheet is fixed can be suppressed to ± 3 μm or less, thereby preventing the tip of the probe needle from being deformed. be able to.

The method for producing a cleaning sheet according to the present invention is a method for producing a cleaning sheet having a cleaning layer having an initial modulus of elasticity of 0.5 to 100 N / mm ² on one surface, wherein a polyol is used in the presence of a vinyl monomer. Forming a mixture containing a urethane polymer and a vinyl-based monomer by reacting a polyisocyanate with the mixture to form a mixture containing the urethane polymer and a vinyl-based monomer; and applying the mixture to a release sheet or a base material layer. Irradiating the substrate with radiation and curing to form the cleaning layer.

  In the cleaning method of the present invention, the cleaning layer of any one of the above cleaning sheets or the cleaning layer of any one of the above conveying members is brought into contact with a probe needle for a probe card to remove foreign matter adhering to the probe needle tip. It is characterized by being removed.

  According to the present invention, when removing foreign matter attached to the probe needle of the probe card, the foreign matter can be completely removed without abrasion of the probe needle, and the foreign matter once removed from the needle is reattached. It is possible to provide a cleaning sheet, a method of manufacturing the cleaning sheet, and a conveying member that do not need to be performed. Further, according to the present invention, it is possible to provide a cleaning method capable of completely removing foreign matter and preventing re-adhesion without damaging or deforming the probe needle using a cleaning sheet or a transport member. .

BEST MODE FOR CARRYING OUT THE INVENTION

The cleaning sheet of the present invention has a cleaning layer on one surface. Initial elastic modulus of the cleaning layer is in the range of 0.5~100N / mm ^2, preferably in the range of 1~50N / mm ^2. If the initial elastic modulus is less than 0.5 N / mm ² , it may not be possible to remove foreign matter adhered to the probe needle. If the initial elastic modulus is more than 100 N / mm ² , the tip of the probe needle may not sufficiently cover the cleaning layer. May not be inserted. Here, the initial elastic modulus refers to an autograph AGS-50D (manufactured by Shimadzu Corporation) as a tensile tester, a test sample having a cross-sectional area of 1 mm ² , a length of 10 mm, and a tensile speed of 300 mm. / Min is a value obtained by performing a tensile test at a rate of / min and calculating an initial elastic modulus from the first linear portion of the stress-strain curve by the following equation.

F / A
Initial elastic modulus = ――――――――
ΔL / L ₀

(Where F is the tensile stress when ΔL / L ₀ is 0.05 (strain 0.05), A is the cross-sectional area, ΔL is the amount of change in sample length, and L ₀ is the initial length of the sample.)

The cleaning layer according to the present invention is preferably formed by irradiating a mixture containing a vinyl monomer with radiation. In the present invention, the term “sheet” includes a film, and the term “film” includes a sheet.
As the vinyl monomer, those having an unsaturated double bond capable of radical polymerization are used. From the viewpoint of reactivity, acrylic monomers are preferred.
The acrylic monomer preferably used in the present invention includes, for example, (meth) acrylic acid, methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate, and (meth) acrylate. ) Pentyl acrylate, hexyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, octyl (meth) acrylate, isooctyl (meth) acrylate, nonyl (meth) acrylate, isononyl (meth) acrylate, Examples include isobornyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, and 6-hydroxyhexyl (meth) acrylate. These (meth) acrylic monomers can be used alone or in combination of two or more.
In addition, together with these (meth) acrylic monomers, vinyl acetate, vinyl propionate, acrylamide, methacrylamide, mono or diester of maleic acid, styrene and its derivatives, N-methylol acrylamide, glycidyl acrylate, glycidyl methacrylate, N, N -Dimethylaminoethyl acrylate, N, N-dimethylaminopropyl methacrylamide, 2-hydroxypropyl acrylate, acryloylmorpholine, N, N-dimethylacrylamide, N, N-diethylacrylamide, imidoacrylate, N-vinylpyrrolidone, oligoester acrylate , Ε-caprolactone acrylate and the like, and may be copolymerized with a (meth) acrylic monomer. These selections are appropriately determined in consideration of the characteristics of the obtained high molecular weight product.
In the present invention, if necessary, a polyfunctional monomer such as trimethylolpropane triacrylate or dipentaerythritol hexaacrylate may be used as a crosslinking agent.

  The mixture containing the vinyl monomer contains a photopolymerization initiator. Examples of the photopolymerization initiator include benzoin ethers such as benzoin methyl ether and benzoin isopropyl ether; substituted benzoin ethers such as anisole methyl ether; substituted acetophenones such as 2,2-diethoxyacetophenone and 2,2-dimethoxy-2-phenylacetophenone. , 1-hydroxy-cyclohexyl-phenyl-ketone, substituted alpha-ketol such as 2-methyl-2-hydroxypropiophenone, aromatic sulfonyl chloride such as 2-naphthalenesulfonyl chloride, 1-phenyl-1,1-propanedione- Photoactive oximes such as 2- (o-ethoxycarbonyl) -oxime are preferably used.

The cleaning layer according to the present invention may be obtained by irradiating a mixture containing a urethane polymer and a vinyl monomer with radiation to cure the mixture. The above-mentioned thing is mentioned as a preferable thing as a vinyl-type monomer.
In the present invention, it is preferable to first form a urethane polymer in the presence of a vinyl-based monomer, and then irradiate a mixture of the urethane polymer and the radical polymerizable monomer with radiation or the like and cure the mixture to form a cleaning layer.
The urethane polymer is obtained by reacting a polyol with a polyisocyanate. A catalyst may be used for the reaction between the isocyanate and the hydroxyl group of the polyol. For example, a catalyst generally used in a urethane reaction, such as dibutyltin dilaurate, tin octoate, 1,4-diazabicyclo (2,2,2) octane, or the like can be used.

The polyol has two or more hydroxyl groups in one molecule. Examples of the low molecular weight polyol include dihydric alcohols such as ethylene glycol, diethylene glycol, propylene glycol, butylene glycol, and hexamethylene glycol, and trihydric or tetrahydric alcohols such as trimethylolpropane, glycerin, and pentaerythritol.
Examples of the high molecular weight polyol include a polyether polyol obtained by addition polymerization of ethylene oxide, propylene oxide, tetrahydrofuran, or the like, or the above-mentioned dihydric alcohol, dipropylene glycol, 1,4-butanediol, 1,6 -Polyester polyols, acrylic polyols, carbonate polyols, epoxy polyols, caprolactone polyols and the like, which are formed from polycondensates of hexanediol, neopentyl glycol and the like with dibasic acids such as adipic acid, azelaic acid and sebacic acid. Examples of the acrylic polyol include a copolymer of a monomer having a hydroxyl group such as hydroxylethyl (meth) acrylate and hydroxypropyl (meth) acrylate, and a copolymer of a hydroxyl group-containing substance and an acrylic monomer. Examples of the epoxy polyol include an amine-modified epoxy resin.
These polyols can be used alone or in combination of two or more in consideration of the properties of the obtained high molecular weight product, solubility in radical polymerizable monomers, reactivity with isocyanate, and the like.

Examples of the polyisocyanate include aromatic, aliphatic and alicyclic diisocyanates, and dimers and trimers of these diisocyanates. As aromatic, aliphatic and alicyclic diisocyanates, tolylene diisocyanate, diphenylmethane diisocyanate, hexamethylene diisocyanate, xylylene diisocyanate, hydrogenated xylylene diisocyanate, isophorone diisocyanate, hydrogenated diphenylmethane diisocyanate, 1,5-naphthylene diisocyanate 1,3-phenylene diisocyanate, 1,4-phenylene diisocyanate, butane-1,4-diisocyanate, 2,2,4-trimethylhexamethylene diisocyanate, 2,4,4-trimethylhexamethylene diisocyanate, cyclohexane-1,4 -Diisocyanate, dicyclohexylmethane-4,4-diisocyanate, 1,3-bis (isocyanatomethyl) cyclohexane, methyl Cyclohexane diisocyanate, m- tetramethylxylylene diisocyanate, and the like. Further, dimers and trimers of these and polyphenylmethane polyisocyanate are used. Examples of the trimer include an isocyanurate type, a burette type, an allophanate type, and the like, which can be used as appropriate.
These polyisocyanates can be used alone or in combination of two or more in consideration of the characteristics of the obtained high molecular weight product, the solubility in a radical polymerizable monomer, the reactivity with a hydroxyl group, and the like.

  In the present invention, the amounts of the polyol component and the polyisocyanate component used to form the urethane polymer are not particularly limited. For example, the amount of the polyol component used may be NCO / OH (equivalent to the polyisocyanate component). Ratio) is preferably set to 0.8 to 3.0, more preferably 1.0 to 3.0. When NCO / OH is less than 0.8 or more than 3.0, the molecular chain length of the urethane polymer cannot be sufficiently increased, and the strength and elongation tend to decrease.

In the cleaning layer according to the present invention, if necessary, commonly used additives such as an antioxidant, a filler, a pigment, a colorant, a flame retardant, an antistatic agent, an ultraviolet ray inhibitor, etc. It can be added within a range that does not impair the effect. These additives may be added in advance before the polymerization reaction of the polyisocyanate and the polyol, or may be added before the polymerization of the urethane polymer and the reactive monomer.
Further, a small amount of a solvent may be added for adjusting the viscosity of the coating. The solvent can be appropriately selected from commonly used solvents, and examples thereof include ethyl acetate, toluene, chloroform, dimethylformamide and the like.

The cleaning sheet of the present invention may further have a base layer, for example, a cleaning layer may be provided directly on the base layer, or a cleaning layer may be provided using an adhesive. Further, the cleaning sheet of the present invention may be provided with an adhesive layer on the other surface side of the base material layer.
Examples of the material for forming the base layer include polyester resins such as polyethylene terephthalate (PET), polyolefin resins such as polyethylene (PE) and polypropylene (PP), polyimide (PI), and polyetheretherketone (PEEK). In addition to thermoplastic resins such as polyvinyl chloride (PVC), polyvinylidene chloride resin, polyamide resin, polyurethane resin, polystyrene resin, acrylic resin, fluororesin, cellulose resin, polycarbonate resin, etc., Thermosetting resins and the like can be exemplified. The base layer may have a single-layer structure, or may have a multilayer structure including a plurality of layers made of the same or different materials.

  The pressure-sensitive adhesive for forming the pressure-sensitive adhesive layer is not particularly limited, and a general one such as an acrylic-based or rubber-based adhesive can be used. The method for forming the pressure-sensitive adhesive layer is also not particularly limited, and for example, a method in which a solvent-based or emulsion-based pressure-sensitive adhesive is directly applied to a base layer or a support and dried, or a method in which the pressure-sensitive adhesive is applied to a release sheet and formed in advance. A method of attaching the applied adhesive layer to a base material layer or the like can be applied. Applying a method of applying a photo-curing adhesive to the base layer, irradiating both the adhesive layer and the cleaning layer with radiation, etc., thereby simultaneously curing and forming the cleaning layer and the adhesive layer. Can be.

Hereinafter, the layer structure of the cleaning sheet of the present invention will be specifically described with reference to the drawings.
FIG. 1A is a diagram illustrating a layer configuration of the cleaning sheet according to the first embodiment of the present invention. In FIG. 1A, a cleaning sheet 10 has a cleaning layer 1 on one surface. Here, the cleaning layer 1 is provided on the base material layer 2. In the present invention, the cleaning layer 1 may be formed without the base layer.
FIG. 1B is a diagram illustrating a layer configuration of a cleaning sheet according to a second embodiment of the present invention. In FIG. 1B, the cleaning layer 1 is provided on one surface of the base material layer 2, and the adhesive layer 3 is provided on the other surface of the base material layer 2. As described above, the cleaning sheet having the adhesive layer on the back surface can be easily and firmly fixed when the cleaning sheet is fixed to the base for the cleaning operation. Note that a release sheet (separator) may be temporarily attached to the surface of the adhesive layer 3 in order to protect the adhesive layer 3 until use.

Next, the layer configuration of the transport member of the present invention will be specifically described with reference to the drawings.
FIG. 2A is a diagram illustrating a layer configuration of the transport member according to the first embodiment of the present invention. In FIG. 2A, a cleaning sheet 10 provided with a cleaning layer 1 on one surface of a base material layer 2 is disposed on a support 5 via an adhesive means such as an adhesive layer 4. The adhesive layer 4 may be the same as or different from the adhesive layer 3 of the cleaning sheet in FIG. 1B. In the case where the adhesive layer 3 is the same, the cleaning sheet in FIG. It is equivalent to the configuration directly disposed on the. Further, the adhesive layer may be a double-sided adhesive tape.
FIG. 2B is a diagram illustrating a layer configuration of the transport member according to the second embodiment of the present invention. Here, the cleaning layer 1 is disposed on the support 5 via the adhesive layer 4. If the cleaning sheet is considered to have a single-layer structure including only the cleaning layer 1, it can be said that the present embodiment is one in which the cleaning sheet is provided on the support 5 with the adhesive layer 4 interposed therebetween. Further, in the present invention, the adhesive means means that a treatment is performed so that the support 5 and the cleaning sheet can maintain the adhered state. For example, the cleaning layer 1 is directly provided on the support 5. Is provided by coating or the like to form a laminate in which the support and the cleaning layer are adhered.

  The support 5 in FIGS. 2A and 2B may be a silicon wafer or the like. Since the silicon wafer is polished so that the height variation in the vertical direction is ± 3 μm or less, for example, the cleaning operation is performed by pressing the cleaning sheet 10 on a silicon wafer or the like to perform cleaning. Even if the probe needle is pierced into the layer 1, the tip of the probe needle is not deformed.

  The cleaning sheet of the present invention is obtained, for example, by applying a mixture containing a vinyl monomer onto a base material layer or onto a release-treated sheet (release sheet, separator) and irradiating with radiation to cure the mixture. Formed. Further, the conveying member of the present invention, the cleaning sheet of the present invention is adhered to a support using an adhesive or the like, or a mixture containing a vinyl monomer is directly applied to the support and radiation cured. It is formed.

Here, as a coating method, a known method such as casting, spin coating, or roll coating can be employed. Examples of the radiation to be applied include ionizing radiation such as α-ray, β-ray, γ-ray, neutron beam, and electron beam, and radiation such as ultraviolet rays.
At this time, in order to avoid polymerization inhibition by oxygen, a release-treated sheet (release sheet, separator) may be placed on the surface coated with the mixture containing the vinyl monomer to block oxygen, or Curing may be performed in a container filled with an inert gas to reduce the oxygen concentration.
In the present invention, the type of radiation and the lamp used for irradiation are appropriately selected according to the characteristics required for the sheet. For example, the dose of radiation is typically, 100~5,000mJ / cm ^2, it is preferably 1,000~4,000mJ / cm ^2, more preferably 2,000~3,000mJ / cm ² . If the radiation irradiation amount is less than 100 mJ / cm ² , a sufficient polymerization rate may not be obtained, and if it is more than 5,000 mJ / cm ² , it may cause deterioration.

  The thicknesses of the cleaning sheet and the cleaning layer of the present invention are not particularly limited, and can be appropriately set according to the purpose and use. However, the thickness of the cleaning layer is preferably 10 to 500 μm, and more preferably 30 to 300 μm, since the tip of the probe needle needs to be sufficiently inserted.

For example, a method (cleaning operation) of removing foreign matter at the tip of the probe needle of the probe card using the transport member 20 of the present invention will be described below with reference to FIG.
First, the cleaning layer 1 is arranged to face the probe card. That is, the transfer member is placed on the wafer fixing base, and the cleaning layer 1 is opposed to the probe card. Next, as shown in FIG. 3A, after the tip end portion 22 of the probe needle 21 pierces the cleaning layer 1, the probe needle 21 is pulled out as shown in FIG. 3B. By this operation, the foreign matter 23 such as aluminum oxide attached to the tip of the probe needle remains in the cleaning layer 1 and is removed from the probe needle. This operation is repeated a predetermined number of times, for example, about 10 to 30 times. The piercing position of the cleaning layer is moved little by little, for example, the pedestal for fixing the wafer is moved slightly in the horizontal direction, and the portion where no foreign matter remains is removed. It is preferable to pierce the cleaning layer. Since the cleaning layer according to the present invention has an initial elastic modulus of 0.5 to 100 N / mm ² , the tip of the probe needle can be sufficiently inserted into the cleaning layer, and the removed foreign matter can be contained in the cleaning layer. Since the probe needle can be reliably held, the foreign matter does not adhere to the probe needle after the cleaning operation.

  Hereinafter, the present invention will be described in detail with reference to Examples, but the present invention is not limited thereto. In the following examples, “parts” means “parts by weight”.

(Synthesis example 1)
In a reaction vessel equipped with a cooling pipe, a thermometer, and a stirrer, 50 parts of methyl acrylate and 50 parts of ethyl acrylate as acrylic monomers, and 1-hydroxy-cyclohexyl-phenyl-ketone as a photopolymerization initiator ( 0.1 g of “IRGACURE 184” (product name of Ciba Specialty Chemicals Co., Ltd.) was added thereto, and the syrup containing the prepolymer was obtained by partially exposing it to ultraviolet light under a nitrogen atmosphere to cause photopolymerization. Obtained. After 0.2 parts of trimethylolpropane triacrylate, which is a polyfunctional monomer, is added to the partially polymerized syrup and stirred, the resulting syrup is cured to a thickness of 100 μm on a PET film (thickness: 38 μm). Was applied as follows. A PET film (thickness: 38 μm) that had been subjected to a release treatment as a separator was overlaid thereon and covered, and ultraviolet light was irradiated from above the separator using a high-pressure mercury lamp (illuminance: 170 mW / cm ² , light amount: 2500 mJ / cm ² ). After curing, a cleaning layer was formed. Thereafter, the separator and the peeled PET film were peeled off, and a tensile test of the cleaning layer was performed to determine an initial elastic modulus. The initial elastic modulus of the cleaning layer was 0.9 N / mm ² .

(Synthesis example 2)
In Synthesis Example 1, a cleaning layer was formed in the same manner as in Synthesis Example 1, except that the acrylic monomer was changed to 50 parts of methyl acrylate and 50 parts of n-butyl acrylate. The initial elastic modulus of this cleaning layer was 0.3 N / mm ² .

(Synthesis example 3)
In Synthesis Example 1, 40 parts of methyl acrylate, 40 parts of ethyl acrylate, and 20 parts of N, N-dimethylacrylamide were used as acrylic monomers, and 0.4 part of trimethylolpropane triacrylate was used as a polyfunctional monomer. A cleaning layer was formed in the same manner as in Synthesis Example 1 except for the difference. The initial elastic modulus of the cleaning layer was 158 N / mm ² .

(Synthesis example 4)
In a reaction vessel equipped with a cooling pipe, a thermometer, and a stirrer, 50 parts of t-butyl acrylate, 30 parts of acrylic acid, 20 parts of n-butyl acrylate as an acrylic monomer, and 1 part of a photopolymerization initiator as a photopolymerization initiator. -[4- (2-hydroxyethoxy) -phenyl] -2-hydroxy-2-methyl-1-propan-1-one (trade name "Irgacure 2959", manufactured by Ciba Specialty Chemicals Co., Ltd.) 0.3 And 73.4 parts of polyoxytetramethylene glycol (molecular weight: 650, manufactured by Mitsubishi Chemical Corporation) as a polyol, and 0.05 parts of dibutyltin dilaurate as a urethane reaction catalyst. 26.6 parts of isocyanate was added dropwise and reacted at 65 ° C. for 2 hours to obtain a mixture of a urethane polymer and an acrylic monomer. The amounts of the polyisocyanate component and the polyol component used were NCO / OH (equivalent ratio) = 1.25. A mixture of a urethane polymer and an acrylic monomer was applied on a peeled PET film (38 μm thick) so that the thickness after curing became 100 μm. A PET film (thickness: 38 μm) that had been subjected to a release treatment as a separator was overlaid thereon and covered, and ultraviolet light was irradiated from above the separator using a high-pressure mercury lamp (illuminance: 170 mW / cm ² , light amount: 2500 mJ / cm ² ). After curing, a cleaning layer was formed. Thereafter, the separator and the peeled PET film were peeled off, and a tensile test of the cleaning layer was performed to determine an initial elastic modulus. The initial elastic modulus of the cleaning layer was 2 N / mm ² .

(Synthesis example 5)
In Synthesis Example 4, a cleaning layer was formed in the same manner as in Synthesis Example 4, except that the acrylic monomer was changed to 50 parts of t-butyl acrylate and 50 parts of acrylic acid. The initial elastic modulus of this cleaning layer was 16 N / mm ² .

(Synthesis example 6)
In Synthesis Example 4, a cleaning layer was formed in the same manner as in Synthesis Example 4 except that the acrylic monomer was changed to 50 parts of acryloylmorpholine and 50 parts of acrylic acid. The initial elastic modulus of this cleaning layer was 60 N / mm ² .

(Examples 1-4, Comparative Examples 1-2)
The mixture of the partially polymerized syrup and the polyfunctional monomer obtained in Synthesis Examples 1 to 3, and the mixture of the urethane polymer and the acrylic monomer obtained in Synthesis Examples 4 to 6 were used as shown in Table 1. It was applied on a PET film having a thickness of 100 μm so that the thickness after curing became 100 μm. A PET film (thickness: 38 μm) which had been subjected to a release treatment as a separator was overlaid thereon and coated, and ultraviolet light was irradiated from above the separator (illuminance: 170 mW / cm ² , light amount: 2,500 mJ / cm ² ), and cured. A cleaning layer was formed. Thereafter, the peeled PET film (separator) was peeled off to obtain a cleaning sheet.
The following evaluation tests were performed on each of the obtained cleaning sheets. Table 1 shows the results.

(Evaluation test)
In the prober, a probe card (20 probe needles) was continuously contacted with the aluminum solid wafer 10,000 times with an overdrive amount of 60 μm. After 10,000 contacts, the probe card was contacted with the cleaning sheet placed on the stage 30 times at an overdrive amount of 60 μm to clean the probe needles. Note that when the tip of the probe needle of the probe card was brought into contact with the cleaning sheet, the stage was moved so that cleaning was performed so as not to contact the same location. After the cleaning was completed, the tip of the probe needle was observed with an SEM, and it was confirmed whether or not foreign matter attached to the needle remained.

As is clear from Table 1, it was confirmed that the cleaning sheets of Examples 1 to 4 of the present invention had no foreign matter left after cleaning.
On the other hand, it was found that the cleaning sheets of Comparative Examples 1 and 2 had foreign matters remaining after cleaning.

(A) is a diagram showing a layer configuration of a cleaning sheet according to the first embodiment of the present invention, and (b) is a diagram showing a layer configuration of a cleaning sheet according to a second embodiment of the present invention. is there. (A) is a figure which shows the layer structure of the conveyance member which concerns on 1st Embodiment of this invention, (b) is a figure which shows the layer structure of the conveyance member which concerns on 2nd Embodiment of this invention. is there. FIG. 4 is a view illustrating a state of the cleaning method of the present invention.

Explanation of reference numerals

DESCRIPTION OF SYMBOLS 1 Cleaning layer 2 Base material layer 3, 4 Adhesive layer 5 Support 10 Cleaning sheet 20 Conveying member 21 Probe needle 22 Probe needle tip part 23 Foreign substance

Claims (11)

A cleaning sheet for removing foreign matter adhering to the tip of a probe needle of a probe card, wherein the cleaning sheet has a cleaning layer, and the surface of the cleaning layer forms at least one surface of the cleaning sheet. A cleaning sheet having an initial elastic modulus of 0.5 to 100 N / mm ² ;   The cleaning sheet according to claim 1, further comprising a base material layer.   The cleaning sheet according to claim 1, wherein the cleaning layer is provided on a surface on one side of the base material layer, and has an adhesive layer on the other side of the base material layer.   The cleaning sheet according to any one of claims 1 to 3, wherein the cleaning layer is obtained by irradiating a mixture containing a vinyl monomer with radiation and curing the mixture.   The cleaning sheet according to any one of claims 1 to 4, wherein the cleaning layer is formed by irradiating a mixture containing a urethane polymer and a vinyl monomer with radiation and curing the mixture.   In the presence of a vinyl-based monomer, a polyol and a polyisocyanate are reacted to form a urethane polymer.After forming a mixture containing the urethane polymer and the vinyl-based monomer, the mixture is irradiated with radiation and cured to form a cleaning layer. The cleaning sheet according to claim 5, wherein the cleaning sheet is used.   A transport member comprising the cleaning sheet according to any one of claims 1 to 6 provided on a support.   The transport member according to claim 7, wherein the cleaning sheet is provided on the support by an adhesive unit.   9. The transfer member according to claim 7, wherein the support is a wafer. A method for producing a cleaning sheet having a cleaning layer having an initial elastic modulus of 0.5 to 100 N / mm ² on one surface,
In the presence of a vinyl-based monomer, a step of forming a mixture containing a urethane polymer and a vinyl-based monomer by reacting a polyol and a polyisocyanate to form a urethane polymer,
A step of applying the mixture on a release sheet or a substrate layer,
Irradiating the applied mixture with radiation and curing to form the cleaning layer.   By bringing the cleaning layer of the cleaning sheet according to any one of claims 1 to 6 or the cleaning layer of the transport member according to any one of claims 7 to 9 into contact with a probe needle for a probe card. A method for cleaning a probe needle, comprising removing foreign matter attached to the tip of the probe needle.

Images