JP2004303889A - Flash lamp with base and lamp annealing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a lamp in which a plurality of flash lamps can be fixed by reducing load to an arc tube even if the lamps are closely arranged and fixed on the same plane, and to provide an annealing device with which maintenance can easily be performed without causing damage of the lamp in an early stage and with less frequency of lamp exchange and which can instantaneously heat only a surface of a wafer. <P>SOLUTION: The lamp is provided with the flash lamp 1 where a pair of electrodes 21 and 22 are oppositely arranged in the arc tube 10 in which end walls 11 are formed on both ends of a cylindrical tube formed of quartz glass and are sealed, and lead bars 23 connected to the electrodes 21 and 22 are derived from the end walls, and with almost cylindrical bases 40A and 40B mounted on ends of the arc tube 10. Shrinkage parts 12 smaller than an outer diameter in a region between the electrodes of the arc tube 10 are formed in outer regions in longitudinal direction compared to the electrodes 21 and 22 at the ends of the arc tube 10, and a base which is below the outer diameter is fixed by adhesive 30. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a flash lamp and a lamp annealing apparatus used for semiconductor manufacturing and thin film transistor manufacturing.
[0002]
[Prior art]
Development of an annealing apparatus using a flash lamp is in progress in the technical field. For example, a lamp annealing apparatus is used in a process of forming a shallow diffusion layer (pn junction) on the surface layer of a silicon wafer (activating an ion-implanted impurity). In the above-described annealing process, it is necessary to avoid problems such as the profile loss of the ion-implanted impurity and volatilization of the formed pattern, and to obtain a good activated state of the impurity. Also in manufacturing a thin film transistor for a liquid crystal display panel, it is necessary to activate the semiconductor film formed on the substrate reliably and uniformly. In particular, in the case of using a glass substrate, it is necessary to prevent the substrate from being excessively heated and to suppress the expansion and contraction and “warping” while achieving such annealing. Such background art is disclosed in, for example, Japanese Patent Laid-Open Nos. 2002-198322 and 2001-319887.
[0003]
Thus, in the annealing step in the above technical field, it is necessary to heat the substrate surface layer or the thin film on the substrate surface to a predetermined temperature while suppressing the penetration of heat into the lower portion and uniformly. For example, in the above-mentioned Japanese Patent Application Laid-Open No. 2002-198322, in the annealing process of a silicon wafer, when activating impurity ions, the wafer surface should be heated at a temperature of about 1100 ° C. and a height difference of 2% or less. Yes. Moreover, the rate of temperature rise is desirably 2 × 10 ⁴ to 2 × 10 ⁶ ° C./s. Furthermore, when crystallizing amorphous silicon which is a semiconductor film on a substrate, it is heated to 1000 ° C. or higher, for example, 1400 ° C.
[0004]
As described above, the annealing apparatus using the flash lamp has severe restrictions in all aspects such as the distance between the lamp and the substrate surface, the arrangement and input of the lamp, and particularly with respect to startability, the simultaneous lighting of a plurality of lamps is surely performed. There must be. Therefore, the present applicant has previously proposed a technique relating to a lamp device in Japanese Patent Application Laid-Open No. 2002-231488. According to such a lamp device, it is possible to reduce unevenness in illuminance and to arrange the lamps close to each other with the flash lamp provided with the trigger line for improving startability.
[0005]
[Patent Document 1]
JP 2002-198322 A [Patent Document 2]
JP 2001-319887 A [Patent Document 3]
Japanese Patent Laid-Open No. 2002-231488
[Problems to be solved by the invention]
The present inventors have previously developed a lamp fixing mechanism in order to arrange the lamps in close proximity and in parallel.
The lamp fixing mechanism will be described with reference to FIGS. FIG. 5 is a diagram illustrating a lamp fixing mechanism in the lamp annealing apparatus.
The main part of the fixing mechanism 60 is made of an insulating member, and is composed of two blocks divided in the direction of the plane on which the lamps are arranged. One insulating block 61 is provided with a fitting groove 63 adapted to the outer diameter of the arc tube that accommodates the lamp. The other insulating block 62 has a substantially plate shape, and a lamp is sandwiched between the one and the other blocks and fixed. In addition, the code | symbol 67 shown in the figure is a leaf | plate spring which presses the lamp | ramp demonstrated at a back | latter stage.
6 is a plan view of an essential part of one block 61 on which a lamp is mounted as viewed from the lower side in the drawing. FIG. 7 is a longitudinal sectional view of one of the lamps in FIG. 6 cut along a plane passing through the lamp tube axis. It is.
As shown in FIG. 6, the lamps 70, 70,... Are fitted with the fitting grooves 63 of one insulating block 61 at the outer ends of the arc tubes 71, 71,. Are arranged on substantially the same plane. The fitting grooves 63, 63,... Consist of a large diameter groove that fits the arc tube 71, 71,... And a small diameter groove that fits the lead-out portion (75, 77) for supplying power to the lamp. Yes.
In FIG. 7, a lamp 70 has an arc tube 71 made of quartz glass, an outer diameter of φ10 mm to φ15 mm, a wall thickness of 1 mm to 2.5 mm, and an overall length of the arc tube of 540 mm to 600 mm. A rare gas such as gas, krypton, argon, or neon, cesium, potassium, or mercury alone or a mixture thereof is sealed, and one electrode 72 is led out from the end wall 73 of the arc tube 71 in an airtight manner. The same applies to the other electrode.
The lead-out portion for feeding in the lamp 70 is electrically connected to the lead wire 75 with a silver braze 76 or the like at a location where the external lead-out portion of the lead rod 74 connected to the electrode 72 is spaced a required distance from the end of the arc tube 71. Connected and configured. Here, in the above apparatus, in view of the narrow interval between the lamps 70, the lead rod 74 and the lead wire 75 led out from the end of the arc tube 71 are insulated by a heat-shrinkable resin tube 77 for insulation. It is covered.
[0007]
The lamp 70 is provided with a trigger tube 50 for improving startability. The trigger tube 50 is obtained by sealing the above-described trigger wire in a glass tube, and is attached to each lamp.
[0008]
In the lamp fixing mechanism 60, in order to sandwich the trigger tube 50 and the lamp 70 at the same time, a narrow groove for fitting the trigger tube 50 is provided on the bottom wall surface of the fitting groove 63 in one insulating block 61. A leaf spring 66 is disposed in the narrow groove, and a leaf spring 67 is disposed on the other insulating block 62 at a position substantially opposite to the leaf spring 66.
The trigger tube 50 abuts on the leaf spring 66 and is pushed in the direction of pushing out the lamp 70. The lamp 70 also abuts the arc tube 71 on the trigger tube 50 and is pushed in the direction of the trigger 50. The lamp can be fixed in a state in which the surface of both the tube walls is in close contact between the insulating blocks 61 and 62.
In the apparatus described above, for example, an apparatus corresponding to a silicon wafer having a diameter of about 300 mm (12 inches) or a glass substrate for a liquid crystal panel having a width of 300 mm, 20 to 30 lamps are required. These lamps are arranged with a luminous tube separation distance of 2 mm to 3 mm and a shortest distance of 40 mm to 50 mm between the arc tube and the surface to be processed (not shown) in order to ensure temperature and uniformity on the surface to be processed. It is fixed by the fixing mechanism.
[0009]
By the way, since the lamp is lighted instantaneously with a short pulse width and high energy in order to achieve the above-mentioned heating conditions for the substrate or the like, there is a phenomenon that the arc tube itself vibrates due to the load applied at that time. Arise. Such vibration is caused, for example, in a device in which a plurality of lamps are arranged, because charged particles (current) flowing inside the lamp are placed in a magnetic field, and force (hereinafter referred to as Lorentz force) acts on the charged particles. It is thought to occur. The stress due to the vibration concentrates on the fixed portion of the lamp, and the arc tube surface is damaged at the contact portion with the leaf spring. Even if the arc tube is damaged by a single operation, even if it is very small, if this is repeated every time the lamp is turned on and the damage accumulates, the arc tube of the lamp will break due to the impact of lighting. It leads to such a situation. In addition, the impact of one lamp breakage reaches the entire apparatus and causes another lamp breakage.
[0010]
Also, this lamp may rotate when absorbing its own vibration, causing the flexible lead wire connected to the lead rod to be twisted and broken, or the glass near the lead rod lead-out portion to be broken. There is a problem of doing.
The problem to be solved by the present invention is to provide a lamp that can be fixed with less addition to the arc tube even if a plurality of flash lamps are closely arranged and fixed on the same plane, and An object of the present invention is to provide an annealing apparatus capable of heating only the surface of a wafer instantaneously without incurring a situation such as premature breakage of the lamp, allowing a lamp to be replaced less frequently and performing maintenance easily.
[0011]
[Means for Solving the Problems]
In order to solve the above-mentioned problems, the present invention is configured such that a pair of electrodes are arranged opposite to each other in a sealed arc tube in which end wall portions are formed at both ends of a cylindrical tube made of quartz glass and are connected to the electrodes. A flash lamp with a base, comprising: a flash lamp in which a lead bar is led out from the end wall portion; and a substantially cylindrical base attached to an end portion of the arc tube. The end portion is formed with a reduced diameter portion having an outer diameter smaller than the outer diameter in the region between the electrodes of the arc tube at the outer side in the longitudinal direction of the electrode. The outer diameter of the reduced diameter portion and the inner peripheral surface of the base are fixed with an adhesive.
Furthermore, the base is made of ceramics.
Furthermore, a lead wire is connected to the lead rod, and the lead wire is fixed to the base inside the base.
Further, the exhaust pipe remaining portion is formed in the reduced diameter portion.
[0012]
An annealing apparatus according to the present invention includes a plurality of flash lamps with a base, and the ends of the plurality of flash lamps are sandwiched between one insulating block and the other insulating block and are the same. In a lamp annealing apparatus arranged side by side on a plane, a fitting groove is formed in the one insulating block, and the base is fitted into the fitting groove and pressed by the other insulating block. Features.
Further, in the annealing apparatus, the one or other insulating block is provided with a leaf spring that abuts against the base and presses in the opposite direction.
Further, the base and the fitting groove are formed with engaging portions for restricting movement of the lamp in the circumferential direction and / or the lamp tube axis direction.
[0013]
Further, in the flash lamp with a base for an annealing apparatus in which the above-mentioned joining portion is formed, an engaging groove that engages with the engaging portion is formed in the base.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a sectional view in the tube axis direction showing the entire flash lamp with base according to the present invention.
In the flash lamp 1, the arc tube 10 is made of quartz glass, the arc tube has an outer diameter of φ10 mm to φ15 mm, a wall thickness of 1 mm to 2.5 mm, a total length of the arc tube of 540 mm to 600 mm, and xenon gas inside is 27 kPa to 80 kPa ( 200 Torr to 600 Torr) (25 ° C. conversion). Inside the arc tube 10, a cathode 21 and an anode 22 (hereinafter also simply referred to as electrodes) are arranged to face each other, and lead rods 23 and 23 connected to the electrodes 21 and 22 are end wall portions 11 of the arc tube 10. It is derived airtight through. Further, the arc tube 10 is formed with an exhaust pipe remaining portion 10a in the vicinity of the inner end of the reduced diameter portion 12 on the anode 22 side. Lead wires 24, 24 are connected to the outer ends of the lead rods 23, 23, and lead-out portions for supplying power to the lamp are formed and covered with a resin tube or the like. In the lamp 1, the distance between the electrodes, that is, the length of the arc is, for example, 360 mm to 560 mm.
[0015]
At both ends of the arc tube 10, reduced diameter portions 12, 12 are formed outside the electrode rear end faces 21 a, 22 a in a predetermined region, and the reduced diameter portions 12, 12 have a substantially cylindrical base made of insulating ceramics. 40A and 40B are attached.
[0016]
The bases 40A and 40B have an outer diameter of φ10 mm to φ15 mm, an arc tube insertion portion inner diameter of φ9 to φ13 mm, a lead bar passage portion inner diameter of φ5 to 8 mm, and a total length of 50 to 70 mm. Has been derived. Notch-shaped grooves 42 and 42 are formed on the side surface of one base 40B at opposite locations.
[0017]
For example, when the outer diameter of the arc tube 10 is φ13, the reduced diameter portions 12 and 12 of the lamp arc tube 10 have an outer diameter of φ9 mm, and the reduced diameter portions 12 and 12 from the position retreated 3 mm to 10 mm from the rear ends of the electrodes 21 and 22. It is formed up to the end of the arc tube. The total length of the reduced diameter portions 12 and 12 is 20 mm to 30 mm including the rear end portions of the end wall portions 11 and 11. The bases 40 </ b> A and 40 </ b> B are mounted with a separation portion of 5 mm to 15 mm from the tips of the reduced diameter portions 12 and 12. A gap is formed over substantially the entire circumference between the outer peripheral surface of the reduced diameter portions 12 and 12 and the inner peripheral surface of the bases 40A and 40B, and an insulating adhesive 30, 30 is filled. The lead wires 24 and 24 are fixed to the bases 40A and 40B by adhesives 30 'and 30' in the cylindrical holes of the bases 40A and 40B. This prevents a load or tension from being applied to the lead-out portions of the lead rods 23, 23 and the connection portions between the lead rods 23, 23 and the lead wires 24, 24 when the lead wires 24, 24 are routed.
[0018]
For example, 20 to 30 flash lamps are prepared and arranged in parallel so that the cathode 21 side end and the anode 22 side end are alternately arranged. When the end on the cathode 21 side and the end on the anode 22 side are alternately arranged in this way, the directions of the current flowing in the lamps are alternated between adjacent lamps, so that the arc tube 10 is hung on the tube wall when the lamps are lit. Lorentz force is reduced.
2 to 4 are views for explaining a lamp fixing mechanism of the annealing apparatus according to the present invention. The block portion as the main part of the lamp fixing mechanism is the same as that shown in FIG. 5 except for the details, and will be described with reference to the previous figure. 2 is a plan view showing a state in which a lamp with a base is arranged on the one insulating block, and FIG. 3 is a sectional view taken along line XX ′ in FIG. 2 in the fixing mechanism according to the present invention. 4 is a cross-sectional view of a main part of the lamp fixing mechanism cut along a plane passing through the lamp tube axis and perpendicular to the parallel direction of the lamps.
[0019]
The main part of the fixing mechanism 60 includes insulating blocks 61 and 62 divided in the parallel direction of the lamps (see FIG. 5). After the lamps are arranged, these are connected using screws or the like (not shown).
As shown in FIGS. 2-5, one insulating block 61 is provided with fitting grooves 63, 63,... Adapted to the outer diameter of the arc tubes 10, 10,. As shown in detail in FIG. 2, the bases 40A, 40B,... Fixed to the lamp 1 are fitted in the fitting grooves 63, 63, so that the lamps 1, 1,. The lead wires 24, 24,... Led out from the bottom of the bases 40A, 40B,. Even in such a close arrangement, the exhaust pipe remaining portion 10a is formed in the reduced diameter portion, so that the exhaust pipe remaining portion 10a does not contact the adjacent lamp, and the occurrence of breakage can be prevented. it can.
[0020]
On the inner surface of the fitting groove 63 of one block 61, a convex portion 64 protruding in a convex shape in the lamp center direction is formed. As shown in FIGS. 2 and 3, the projection 64 and the groove 42 on the side surface of the base are engaged. By combining, the movement of the lamp 1 in the circumferential direction and the movement in the lamp axis direction are suppressed. It is desirable that this engaging portion is loosely fitted in the tube axis direction of the lamp by about 2 mm to 5 mm, so that the impact when the lamp is lit can be effectively absorbed.
[0021]
By the above engagement relationship, the lamp with the base is stably fixed to the fixing mechanism without rotating, and further, the movement of the lamp in the axial direction is restricted, so that the lead wire connected to the lead rod is twisted and broken. Or the glass near the lead-out portion of the lead rod is broken. Further, since the movement of the lamp in the axial direction is restricted, the light emitting portion of the lamp is not significantly displaced.
[0022]
The lamp 1 is provided with a trigger tube 50 for improving startability along the tube wall of the arc tube 10. For example, the trigger tube 50 electrically connects the trigger wire 52 via a sealing portion 53 formed at one end of the glass tube 51 by inserting a trigger wire 52 made of metal into an elongated glass tube 51 having an outer diameter of φ3 mm to φ5 mm. Is derived from the above. The lead-out side of the trigger line 52 is the cathode 21 side of the lamp, and a voltage independent from the lamp 1 is applied thereto.
[0023]
As shown in FIG. 3, a narrow groove 65 that fits into the trigger tube 50 is provided at the bottom of the lamp fitting groove 63 of the block 61. As shown in FIG. 4, leaf springs 66 and 67 having a pressing force toward the inside are attached to the blocks 61 and 62 in the one block and the other block, respectively. . When the blocks 61 and 62 are fixed with the lamp 1 and the trigger tube 50 interposed therebetween, the lamp 1 and the trigger tube 50 are held in close contact with each other by the cooperative action of the opposing leaf springs 66 and 67.
[0024]
Here, according to the flash lamp with a base according to the present invention, since the place clamped by the lamp fixing mechanism is the base, the metal member does not directly contact the arc tube of the lamp, so that the arc tube is damaged. No problem. Since the vibration that the arc tube receives when the lamp is lit is transmitted on the base bonding surface of the arc tube, that is, substantially the entire circumference of the outer surface of the arc tube reduced diameter portion, the impact load is concentrated directly on the arc tube. Is prevented, and the arc tube can be effectively prevented from being damaged.
According to the present invention, the base is brought into contact with the leaf spring. However, since the base is made of ceramics, it is much less likely to be damaged than the glass constituting the arc tube, and the base surface is temporarily damaged. Even so, the occurrence rate of the base breakage is remarkably low, and even if the base breaks, the arc tube will not break.
[0025]
Further, when the trigger tube is attached along the lamp as in the above embodiment, if the conductive member is in electrical contact with the underlying trigger wire, the voltage applied to the trigger wire is the conductive member. However, according to the flash lamp with a base according to the present invention, since the base is made of an insulating ceramic, the trigger tube is in contact with the base. Even if this is done, the voltage applied to the trigger line is not lowered, and there is no problem of impairing the lighting reliability of the lamp.
[0026]
The base according to the present invention described above has an outer diameter that is equal to or smaller than the outer diameter of the lamp arc tube, so that it can be arranged with a lamp pitch as small as a lamp not equipped with a conventional base. It is.
[0027]
The flash lamp with base or the annealing apparatus according to the present invention is not limited to the above configuration, and various modifications can be made. For example, the engagement relationship between the base and the fixing mechanism is not limited to the above form, but is appropriate.
[0028]
In addition, when other startability improvement measures are taken for the lamp regardless of the trigger, it is also possible to change the base material only and configure the lamp with metal. The same applies to the case where insulation can be reliably ensured between the power supply unit to the trigger line and the base. It goes without saying that even if a metal base is used, the effect of preventing the arc tube from being damaged is great.
[0029]
As described above, according to the flash lamp with a base according to the present invention, the reduced diameter portion is formed at the end of the arc tube, and the base is attached to the reduced diameter portion. Because vibration and shock at the time are transmitted over the entire peripheral surface via the base and adhesive, the load does not concentrate locally on the arc tube, and the arc tube is damaged by the lighting impact Is prevented.
[0030]
In addition, since the outer diameter of the base attached to the flash lamp is less than or equal to the outer diameter of the arc tube, the lamps can be arranged densely, and the distance between the lamps is the same as that of the case where the conventional base is not attached. It becomes possible to make it small.
Therefore, it is possible to provide a flash lamp with a base capable of effectively avoiding the problem that the service life of the lamp is shortened even when used as a lamp annealing apparatus used in the present semiconductor manufacturing or thin film transistor manufacturing.
[0031]
According to the annealing apparatus using the flash lamp with the base and the fixing mechanism according to the present invention, a plurality of lamps can be arranged densely on the same plane, and the thin film on the substrate surface layer or the substrate surface can be formed. It is possible to suppress the penetration of heat into the lower part and to heat to a predetermined temperature uniformly and reliably. And since the service life of the lamp, which is a heating source, is much longer than before, it is possible to provide an annealing apparatus that can reduce replacement work due to lamp breakage, is easy to maintain, and has high reliability. It becomes like this.
Even when the trigger tube is attached to the flash lamp with the base, the outer diameter of the base does not exceed the outer diameter of the arc tube, so it can be installed without forming a gap with the trigger tube arc tube. High reliability can be maintained even in characteristics. Furthermore, the base mounted on the flash lamp is made of ceramics, so that there is no problem that the applied voltage to the trigger wire is lowered, and no special insulation measures are required, and it can be used easily.
[0032]
【Example】
A flash lamp with a base having the same specifications as the lamp shown in FIG. 1 was manufactured. That is, the distance between the electrodes (arc length) was 500 mm, and the arc tube had an outer diameter of φ13 mm and an inner diameter of φ10 mm excluding the reduced diameter portion. Thirty lamps with such specifications are prepared and mounted on the lamp annealing device having the lamp fixing mechanism shown in FIGS. 2 to 4 with a luminous tube separation distance of 2.2 mm, and lighted with an energy input to the lamp of 5500 J did.
[0033]
As a result, even if it was lit up 300,000 times, the lamp arc tube was lit without breaking. If the lamp is further turned on, the base was damaged by the 500,000th lighting, but the flash lamp with the base did not break the arc tube, and the other lamp was damaged due to the damage of the base of one lamp. There was no problem that the lamp was damaged.
[0034]
【The invention's effect】
As described above, according to the flash lamp with a base according to the present invention, even if the lamp vibrates due to the impact of lighting, the inner surface of the base and the outer peripheral surface of the reduced diameter portion of the arc tube are fixed with an adhesive. Therefore, the impact received by the arc tube is distributed in the entire circumferential direction of the arc tube, and the load on the arc tube can be significantly reduced. Further, since the arc tube is not in direct contact with the metal member, the outer surface of the arc tube is not damaged. Further, since the outer diameter of the base does not exceed the outer diameter of the arc tube, a plurality of flash lamps can be arranged in close contact with each other at a distance of 3 mm or less on the same plane.
[0035]
Since the arc tube is not easily damaged due to the relationship between the lamp and the fixing mechanism, a flash lamp with a base suitable for an annealing apparatus used in a semiconductor manufacturing process or a thin film transistor manufacturing process can be provided. Therefore, according to the present invention, since the early breakage of the lamp arc tube can be suppressed, it is possible to provide a lamp annealing apparatus that is simple in maintenance and the like applied to the lamp.
[Brief description of the drawings]
FIG. 1 is a sectional view in the tube axis direction of a flash lamp with a base according to the present invention.
FIG. 2 is a plan view showing a state in which a lamp with a base is arranged on the one insulating block.
3 is a cross-sectional view of the main part of the fixing mechanism cut along XX ′ in FIG. 2;
FIG. 4 is a cross-sectional view taken along a plane that passes through the lamp tube axis and is perpendicular to the parallel direction of the lamps.
FIG. 5 is a perspective view of a block member in a lamp fixing mechanism previously developed by the present applicant.
FIG. 6 is a plan view of a main part for explaining a conventional lamp and a fixing mechanism thereof;
FIG. 7 is a sectional view through a lamp tube axis for explaining a lamp according to the prior art and a fixing mechanism thereof.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Flash lamp 10 Arc tube 10a Exhaust pipe remainder 11 End wall part 12 Diameter reduction part 21 Cathode (electrode)
22 Anode (electrode)
21a, 22a Rear end face 23 Lead rod 24 Lead wire 30, 30 'Adhesive 40A, 40B Base 41 Through hole 42 Groove 43 Fitting groove 50 Trigger pipe 51 Tube 52 Trigger wire 53 Sealing part 54 Deriving part 60 Lamp fixing mechanism 61 One insulating block 62 The other insulating block 63 Fitting groove 64 Protruding portion 65 Narrow groove 66, 67 Leaf spring

Claims (8)

A pair of electrodes are disposed opposite to each other in a sealed arc tube formed with end wall portions at both ends of a cylindrical tube made of quartz glass, and a lead bar connected to the electrodes is led out from the end wall portion. A flash lamp with a base comprising: a flash lamp comprising: a substantially cylindrical base mounted on an end of the arc tube;
At the end of the arc tube, a reduced diameter portion having an outer diameter smaller than the outer diameter in the inter-electrode region of the arc tube is formed on the outer side in the longitudinal direction than the electrode,
The outer diameter of the base is a size equal to or smaller than the outer diameter in the interelectrode region of the arc tube,
A flash lamp with a base, wherein an outer peripheral surface of the reduced diameter portion and an inner peripheral surface of the base are fixed with an adhesive. The flash lamp with a base according to claim 1, wherein the base is made of ceramics. The flash lamp with a base according to claim 1 or 2, wherein a lead wire is connected to the lead rod, and the lead wire is fixed to the base inside the base. The flash lamp with a base according to any one of claims 1 to 3, wherein an exhaust pipe remaining portion is formed in the reduced diameter portion. A plurality of flash lamps with a base according to any one of claims 1 to 4, wherein the ends of the plurality of flash lamps are sandwiched between one insulating block and the other insulating block and are on the same plane. In lamp annealing equipment arranged side by side,
A lamp annealing apparatus, wherein a fitting groove is formed in the one insulating block, and the base is fitted into the fitting groove and pressed by the other insulating block. 5. The lamp annealing apparatus according to claim 4, wherein a plate spring that contacts the base and presses in the opposite direction is attached to the one or other insulating block. 7. The lamp annealing apparatus according to claim 5, wherein an engagement portion for restricting movement of the lamp in the circumferential direction and / or the lamp tube axis direction is formed in the base and the fitting groove. 8. The flash lamp with a base for a lamp annealing apparatus according to claim 7, wherein an engaging groove is formed in the base at the engaging portion. Flash lamp with base as described.

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