JP2007035299A - Flash light emitting device and flash lamp - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a flash light emitting device which suppresses luminance degradation by minimizing the number of points of occurrence of cracks in the circumferential direction of an arc tube, and also to provide a flash lamp. <P>SOLUTION: This flash light emitting device is so structured that the flash lamps each equipped with a pair of electrodes in the arc tube formed of translucent ceramics and starting trigger tubes arranged in parallel with the lamps are held by a holder having groove parts for arranging the lamps and the trigger tubes at ends thereof. In the arc tube of each flash lamp, a projection projecting to the radial outside on the circumferential surface of the arc tube is formed at an outer position in the tube axis direction relative to the electrode tip part; a recessed part fitted to the projection is formed on the holder; and the rotation of the lamp is restricted by engaging the projection with the recessed part. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a flash lamp light-emitting device, and more particularly to a flash lamp light-emitting device and a flash lamp used for semiconductor manufacturing, thin-film transistor manufacturing, a heat source for heat treatment of a liquid crystal substrate and the like.

  Conventionally, lamp annealing is used in a process of activating a so-called ion-implanted impurity, which forms a shallow diffusion layer (pn junction) in a surface layer of a silicon wafer in a manufacturing process of a semiconductor or the like. In such an annealing process, it is desired to obtain a good activation state for the impurities while avoiding problems such as a collapse of the profile of the implanted ions and volatilization of the formed pattern. Also, in the manufacturing process of a thin film transistor for a liquid crystal display panel, it is necessary to reliably and uniformly activate a semiconductor film formed on the substrate. It is necessary to prevent excessive heating of the substrate and suppress the expansion and contraction and warpage of the substrate.

  Heating only the surface layer of the object to be processed to a high temperature can be suitably achieved by a method of irradiating the object to be processed with flash light from a flash lamp. Then, the entire surface of the semiconductor wafer cannot be heated to a state with high temperature uniformity. Thus, it has been proposed to use a flash lamp light emitting device in which a plurality of bar-shaped flash lamps are arranged in parallel (see Patent Document 1).

As a flash lamp incorporated in such a device, a lamp using translucent ceramics has been proposed instead of a light emitting tube made of quartz glass because it is lit at a high load (Patent Document 2). reference).
According to flash lamps equipped with arc tubes made of translucent ceramics, translucent ceramics such as sapphire or aluminum oxide forming the arc tube have superior resistance to discharge plasma compared to quartz glass. Therefore, it is said that even when the lamp is lit under a high load lighting condition, the arc tube is prevented from deteriorating and the electrode is consumed less.

Since translucent alumina is a material with a relatively large linear expansion coefficient, depending on the lighting conditions, a high load is applied to the arc tube, and stress is generated due to the difference in expansion between the inner and outer surfaces, resulting in light emission. The tube may deteriorate. This phenomenon is also pointed out in Patent Document 2.
2004-303889 No. 2003-109537

  However, when this flash lamp light emitting device is driven, a minute crack is generated on the inner surface of the arc tube due to thermal shock before the arc tube reaches a level where the arc tube is damaged, and this reduces the translucency of the arc tube. It was found that the illuminance on the irradiated surface decreases early.

As a result of intensive investigations on this problem, the present inventors have confirmed the following phenomenon.
That is, in the flash lamp light emitting device, as is known from Patent Document 1 and the like, a starting external trigger tube is provided in parallel along the tube wall of the light emitting tube. At the time of starting the lamp, an arc is generated by applying 20 kV to the external trigger tube by a high frequency power source and then applying a pulsed DC power source to the lamp from the main power source for lighting the lamp. At this time, since the arc is generated in the circumferential direction of the arc tube from the portion close to the trigger tube and reaches the other electrode, the portion near the trigger tube in the arc tube is instantaneously exposed to a high temperature by the arc. Will be. Since the thermal expansion coefficient of alumina is about 20 times higher than that of quartz glass, the thermal shock resistance is inferior. The load on the inner surface of the arc tube on the trigger tube side is larger than that on the opposite side of the trigger tube. Therefore, the temperature on the inner surface of the arc tube rises rapidly, and a temperature gradient is formed inside the arc tube. The arc tube cannot withstand the increase in gas pressure, and fine arcs are generated in the arc tube. As a result, the transmittance of the arc tube decreases.

Even if the transmissivity of the arc tube is reduced only on a part of the side where the trigger tube is arranged, if the trigger tube is arranged opposite to the light extraction side, the translucency of the arc tube is reduced on the anti-trigger tube side. It can be considered that a decrease in illuminance can be suppressed with respect to light that can be maintained and is irradiated directly from the lamp onto the object.
However, when the lamp is lit at a high load such as a tube wall load of 30 kW / cm ² , the lamp rotates around the tube axis due to vibration due to Lorentz force and the like, and as a result, the fine cracks are generated on the entire tube. As a result, the illuminance on the irradiated surface is extremely reduced.

Although microcracks do not significantly reduce the strength of the arc tube, they have a significant effect on illuminance.
Therefore, the problem to be solved by the present invention is to provide a flash lamp light emitting device and a flash lamp that can minimize the occurrence of cracks in the circumferential direction of the arc tube and suppress a decrease in illuminance.

  A flash lamp light emitting device according to the present invention includes a flash lamp having a pair of electrodes inside a light emitting tube made of translucent ceramics, and a start trigger tube arranged in parallel with the lamp, wherein the lamp and the trigger tube are arranged. A flash lamp light-emitting device held at an end portion thereof by a holder having a groove for the arc tube, wherein the light-emitting tube of the flash lamp has a light-emitting tube at a position outward of the tube axial direction from the tip of the electrode. A protrusion that protrudes radially outward is formed on the outer peripheral surface, and the holder is formed with a recess that fits into the protrusion, and the protrusion and the recess are engaged to restrict the rotation of the lamp. It is characterized by.

The flash lamp according to the present invention is a flash lamp having a pair of electrodes inside an arc tube made of translucent ceramics, and the arc tube of the flash lamp has a protrusion protruding radially outward. The electrode is formed on the outer peripheral surface on the outer side in the tube axis direction than the tip of the electrode.
Further, the protrusion is made of glass.

According to the present invention, the following effects can be obtained.
(1) Since the protruding protrusion formed on the arc tube and the recess of the holder are fitted and held in a non-rotatable manner, the surface on the arc tube and trigger tube arrangement side is fixed and the occurrence of cracks is minimized. Can be limited. As a result, the surface of the arc tube that faces the object to be irradiated can maintain high illuminance over a long period of time without lowering the translucency.
(2) According to the flash lamp of the present invention, since the protrusion is formed, the rotation is restricted when held by the holding member, and even if the arc tube becomes clouded, the portion is irradiated. It does not face to the side. Accordingly, it is possible to effectively suppress a decrease in illuminance of the flash lamp light emitting device. Furthermore, according to the lamp of the third aspect, even when the protrusion and the trigger tube are arranged in contact with each other, an undesirable phenomenon that the voltage applied to the trigger tube is transferred to the lead portion other than the electrode is avoided. And stable startability can be ensured.

Hereinafter, an embodiment of the present invention will be described, but the present invention is not limited to the following configuration.
1 to 3 are diagrams showing a schematic configuration of a flash lamp light emitting device according to the present invention. FIG. 1 is a perspective view for explaining the structure of a lamp holding member, and FIG. 2 is a sectional view for explaining a flash lamp and a trigger tube according to the present invention. FIG. 3 is a cross-sectional view of the flash lamp light emitting device cut in a direction perpendicular to the tube axis of the lamp at a position corresponding to the apex of the projection formed on the arc tube, and FIG. It is arrow sectional drawing of AA 'described.

  As shown in FIG. 2, the flash lamp device has a cylindrical shape, sealed at both ends, and a flash lamp 10 including a light-emitting tube 11 made of a straight tube-type translucent ceramic that divides a light-emitting space inside. The flash lamp 10 is arranged in parallel with the arc tube 11 and has a cylindrical conductor with a proximity conductor 22 in its inner space and sealed at both ends (hereinafter referred to as “dielectric”). It is also referred to as a “body tube”). The arc tube 11 is composed of a cylindrical portion 11A made of single crystal alumina (sapphire), a sealing member 11B made of polycrystalline alumina closing both ends thereof, and an adhesive layer 11C provided between the members in an airtight manner. Has been.

  In the flash lamp 10, an anode 14 made of, for example, tungsten and molybdenum formed, for example, at the tips of electrode rods 12, 13 made of, for example, nickel and projecting inward in the tube axis direction from both ends of the arc tube 11. The cathodes 15 are in a state of facing each other in the light emission space of the arc tube 11. The arc tube 11 is filled with a rare gas such as xenon or mercury in an appropriate amount.

At one end of the arc tube 11, a protrusion 16 is formed on the outer peripheral surface. The protrusion 16 has a high melting point because the arc tube 11 is made of sapphire, and it is difficult to form the same with the same material. Therefore, it is desirable that the projection 16 is made of a material different from the material that constitutes the arc tube 11.
The material of the protrusion 16 is preferably glass or metal, and is preferably glass because it has insulating properties. In the case of forming with glass, a glass such as ZnO—SiO ₂ or B ₂ O ₃ —SiO ₂ is preferred because of its low glass transition point. As the metal, a metal material such as Ag or Ni is suitable, and an alloy such as Kovar can also be suitably employed.
Such a protrusion 16 is positioned at a position outward of the distal end of the electrode 14 in the tube axis direction, that is, outward of the effective light emitting portion in the tube axis direction. Since the protrusion 16 is not formed on the optical path of the emitted light, the protrusion 16 itself is not exposed to the strong light from the lamp, and the lamp holding member is not disposed in the effective light emitting area. The protrusion 16 can be reliably locked by the formed locking structure (concave).

The trigger tube 20 has a trigger voltage application lead rod 23 electrically connected to the outer end (left end in FIG. 2) of one end 21A of a dielectric tube 21 made of glass having an inner diameter of 1.8 mm, for example. An airtight sealing portion 21a in which, for example, a metal foil 24 made of molybdenum, for example, is electrically connected to an end (the right end in FIG. 3) of a proximity conductor 22 having a linear shape with an outer diameter of 1.0 mm, for example. The adjacent conductor 22 that protrudes inward from the one end 21A and extends inward in the tube axis direction is slidably held in a state where the tip 22A is a free end.
The inside of the dielectric tube 21 is preferably either a vacuum atmosphere or an inert gas atmosphere.
As a material constituting the proximity conductor 22, for example, a metal such as tungsten, nickel, aluminum, platinum, inconel (nickel-chromium-iron alloy), or molybdenum can be used.

  For example, 30 such flash lamps 10 and trigger tubes 20 are prepared, and are arranged side by side so that the tube axes are parallel to each other as shown in FIG.

  In this example, a plurality of bar-shaped flash lamps 10 arranged in parallel are mounted on a common support base 30 in which the fitting grooves 31 of the arc tube 11 are formed at equal intervals, and the same number as the flash lamps 10. Each of the trigger tubes 20 is also provided below the corresponding flash lamp 10 in a trigger tube fitting groove 32 provided narrower than the arc tube fitting groove 31 in a state parallel to the lamp 10. Attached to and supported by. In the figure, only one of the plurality of flash lamps 10 is shown.

As shown in FIG. 3, the arc tube fitting groove 31 of the support base 30 is formed in a substantially pentagonal cross section and is formed at the pitch of the flash lamp 10. A trigger tube receiving groove 32 having a rectangular cross section is formed so as to be narrow.
The trigger tube 20 is accommodated in the trigger tube accommodating groove 32 of the support base 30, and further, the flash lamp 10 is placed so that the protrusion 16 is accommodated in the recess formed by the trigger tube accommodating groove 32. Installed in the arc tube fitting groove 31.

  A flat pressing member 33 is disposed in the upper opening portion of the support base 30. The pressing member 33 is made of, for example, Macor (registered trademark), like the support base 30, and a leaf spring 34 is attached to the inner surface thereof. A leaf spring 35 is attached to the trigger tube storage groove 32 of the support base 30 as described above. When the flash lamp 10 is attached to the support 30 and covered with the pressing portion 33 and fastened with a bolt or the like, the flash lamp 10 The arc tube 11 and the trigger tube 20 are pressed and fixed by these elastic actions.

FIG. 3 is an axial sectional view of the flash lamp 10 according to the present invention, including a main part (protrusion part), cut in a direction perpendicular to the lamp tube axis, and FIG. 4 is a line segment AA described therein. It is sectional drawing cut | disconnected by '.
As shown in the figure, the protrusion 16 formed on the arc tube 11 of the flash lamp 10 is formed as a trigger tube fitting groove 32 formed on the support base 30 when the flash lamp 10 is disposed on the support base 30. It is accommodated in the formed recessed part, and the movement of the arc tube 11 in the rotational direction is suppressed.

As in this embodiment, when the protrusion 16 is formed outward from the rear end surface of the electrode 14 in the axial direction of the arc tube 11, it is desirable that the protrusion 16 is made of an insulating material. This is because when the protrusion 16 is accommodated in the trigger tube fitting groove 32 that also serves as a recess together with the trigger tube 20, if the protrusion 16 is made of a conductive material, the starting charge of the trigger tube 20 protrudes. It is because it may concentrate on the part 16 and may be applied to the electrode rod 12 without moving to the electrode 14.
FIG. 5 is a diagram schematically showing the transition state of the starting voltage applied to the trigger tube 20, (a) a cross-sectional view taken along the line AA 'in FIG. 3, and (b) perpendicular to the lamp tube axis. It is sectional drawing cut | disconnected by.
In the figure, an arrow P indicates a transition state of the trigger tube starting voltage when the operation is normal. Since the arc tube 11 serves as a capacitor, the voltage applied to the trigger tube 20 shifts from the arc tube 11 to the maximum diameter portion of the electrodes (14, 15) at the closest position. If a potential difference is generated between the electrodes (14, 15) without a period, dielectric breakdown occurs and a discharge is formed. As a result, a normal discharge is formed.
Thus, when the protrusion 16 in contact with the trigger tube 20 has conductivity, the electric charge concentrates on the protrusion 16 as indicated by the arrow Q, and the electrode rod 12 portion on the cross-sectional view thereof Migrate to At this time, sputtering may occur from the electrode rod 12 due to the impact. When sputtering is repeated, the electrode rod 12 is thinned, bent, bent, and the like, and the arc tube 11 is contaminated.
Therefore, when the protrusion 16 formed on the arc tube 11 is in contact with the trigger tube 20, it is preferable to use an insulating material as the material of the protrusion 16.

FIG. 6 is a cross-sectional view conceiving the previous FIG. 3 for explaining an embodiment different from the above-described embodiment according to the present invention. 7 is a cross-sectional view taken along the line BB ′ in FIG.
This figure shows an example in which the protrusion locking recess 36 formed in the support base 30 is provided separately from the trigger tube fitting groove. When the recess 36 is not used as the trigger tube fitting groove in this way, as shown in FIG. 7, the recess 36 is provided with a predetermined length in the lamp tube axis direction, in addition to the movement in the rotation direction of the lamp. As a result, axial movement can also be suppressed.
Moreover, in this embodiment, since the projection part 16 and the trigger pipe | tube 20 are in a non-contact state, it can be used as a constituent material of the projection part 16 regardless of insulation and electroconductivity.

  As described above, according to the present invention, the arc tube of the flash lamp is formed with a protrusion protruding outward in the radial direction on the outer surface at a position axially outward from the tip surface of the electrode. By fitting the protrusion into the groove formed in the holding member, movement of the flash lamp in the rotational direction is suppressed, and white turbidity derived from fine cracks on the inner surface of the arc tube is not formed on the entire circumference of the tube The illuminance on the irradiated surface can be stably maintained.

〔Example〕
Based on the configuration of FIGS. 1 to 4, a flash lamp light emitting device having 30 flash lamps arranged in parallel was manufactured.
Specific specifications are listed below, but the present invention is not limited to these.

-Flash lamp 30 flash lamps according to the present invention were produced according to the configuration shown in FIG. Specific specifications are as follows.
The arc tube was made of single crystal alumina, that is, sapphire, and the total length was 500 mm. The outer diameter of the tube was 13 mm, and the inner diameter was 10.4 mm.
The electrode is made of tungsten, the tip portion is approximately 8 mm in diameter and 7 mm in length, and the shaft portion is connected to the rear end surface so as to be integrated with the electrode tip portion, and the shaft portion is used as a lead rod. Connected. The distance between the electrodes was 450 mm. The electrode rod was made of nickel, had a diameter of 3 mm and a total length of about 50 mm, and borosilicate frit glass was used as a seal material between the sealing member and the lead rod.
Further, 60 kPa (25 ° C. conversion) of xenon gas was sealed inside the arc tube.
The sealing member of the flash lamp according to the configuration of FIG. 2 is made of polycrystalline alumina, is a substantially circular plate shape, and is molded so that its outer diameter matches the outer diameter of the arc tube.
This sealing member was joined to the arc tube using silver solder or frit glass as a sealing material.
A substantially hemispherical projection having a height of 3 mm and a diameter of 4 mm was formed on this flash lamp by welding ZnO—SiO ₂ frit glass on the outer peripheral surface of the arc tube. The protrusions were formed such that the apex position was 5 mm away from the end of the arc tube in the axial direction, that is, the axial direction of the arc tube from the electrode tip surface.

Trigger tube The dielectric tube has an outer diameter of 3 mm and an inner diameter of 1.8 mm, and is made of a silica glass tube sealed at one end. The proximity conductor was made of linear tungsten having a diameter of 1.0 mm. Connect one end of the proximity conductor to a metal foil made of molybdenum to which a lead rod for applying a trigger voltage is electrically connected, insert the proximity conductor into the dielectric tube from the other end side, and seal hermetically on the metal foil. A trigger tube was made.

-Holding member The support member is made of Macor (registered trademark), and the holding member is also made of Macor (registered trademark). Thirty parallel fitting grooves for the arc tube and the trigger tube were formed on the upper surface of the support member so that the lamp pitch was 15.2 mm. Two holding members were prepared to hold one end and the other end of the lamp.

  The trigger tube is inserted into the trigger tube housing portion, and the flash lamp is disposed thereon so that the protrusion is positioned in the gap between the fitting groove formed in the trigger tube housing portion and the trigger tube. The lamp was fixed in a pressed state. The other end of the flash lamp was similarly held by the holding member.

The flash lamp light emitting device was connected to a power supply device, and the lamp was turned on 10,000 times under the conditions of a pulse width of 100 μm and a tube wall load of 30 J / cm ^2. The sapphire, which is the constituent material of the tube, was derived from an overheated state, and fine cracks were generated and a clouded part was formed in the axial direction of the arc tube. Was not formed over the entire circumference of the arc tube, and the illuminance on the irradiated surface could be maintained at 95% (relative to the initial lighting) or more. Further, when lighting continued after that, it was confirmed that the lamp could be safely lit without damaging the intensity of the arc tube even if the lamp was lit 100,000 times.

It is a perspective view explaining a lamp holding member composition. It is sectional drawing for description which takes out and shows the flash lamp and trigger tube which concern on this invention. It is sectional drawing of the flash lamp light-emitting device cut | disconnected in the direction perpendicular | vertical with respect to the tube axis | shaft of a lamp | ramp in the position corresponded to the vertex of the projection part formed in the arc tube. FIG. 4 is a cross-sectional view taken along the line A-A ′ illustrated in FIG. 3. It is explanatory drawing which shows typically the transition state of the starting voltage applied to the trigger tube, (a) AA 'arrow sectional drawing of FIG. 3, (b) The cross section cut | disconnected perpendicularly with respect to the lamp tube axis | shaft FIG. It is a flash lamp light-emitting device sectional drawing explaining another embodiment. FIG. 7 is a cross-sectional view taken along line B-B ′ in FIG. 6.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Flash lamp 11 Arc tube 11A Cylindrical part 11B Sealing member 11C Adhesive layers 12, 13 Electrode rod 14 Anode 15 Cathode 20 Trigger tube 21 Dielectric member (dielectric tube)
21A One end 21a Airtight sealing portion 22 Proximity conductor 22A Tip 23 Lead rod 24 Metal foil 30 Support base 31 Light emitting tube fitting groove 32 Trigger tube fitting groove 33 Holding member 34 Leaf spring 35 Leaf spring 36 Recessed portion

Claims (3)

A flash lamp provided with a pair of electrodes inside a luminous tube made of translucent ceramic, and a trigger tube for starting arranged in parallel with the lamp are provided by a holder having a groove for arranging the lamp and the trigger tube. A flash lamp light emitting device held at the end,
On the arc tube of the flash lamp, a projection projecting radially outward is formed on the outer peripheral surface of the arc tube at a position axially outward from the tip of the electrode.
The holder is formed with a recess that fits into the protrusion,
A flash lamp light emitting device characterized in that protrusions and recesses are engaged to restrict the rotation of the lamp. A flash lamp provided with a pair of electrodes inside an arc tube made of translucent ceramics,
The flash lamp of the flash lamp is characterized in that a protrusion protruding outward in the radial direction is formed on an outer peripheral surface outward in the tube axis direction from the electrode tip. The flash lamp according to claim 2, wherein the protrusion is made of glass.

Images