JP2004301669A - Shape measuring machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a shape measuring machine which can also measure a finer workpiece in which the contact force against the workpiece at a measurement part is minimized, and in which the state of the workpiece before the measurement is not varied. <P>SOLUTION: The shape measuring machine 1 brings a probe 3 as a contact-type probe into contact with the surface of the workpiece 8 which relatively moves the contact-type probe and the workpiece 8 so that the contact point thereof is sequentially moved, and which measures the surface shape of the workpiece 8 by the amount of the displacement of the contact-type probe during the movement. The shape measurement machine 1 is provided with an operational shaft 5 having the contact-type probe at the tip thereof, a support part 6 for movably supporting the operational shaft 5 in the axial direction thereof, and a stopper 4 for limiting the movable range of the operational shaft 5 in the axial direction. The contact-type probe is urged toward the tip in the axial direction by the own gravity of a member including the contact-type probe. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a shape measuring machine having a contact probe.
[0002]
[Prior art]
As a measuring device for measuring the size, shape, and the like of a work, there is a contact-type measuring device for measuring the size, shape, and the like of a work by a measuring unit touching the surface of the work. In such a contact-type measuring machine, if the contact force between the measuring unit and the work is strong, the work may be damaged or the work may be damaged. Further, today's work is required to be miniaturized and miniaturized, and the contact force with the work is required to be even weaker. Further, some of these types of workpieces have already been subjected to high-precision processing before measurement. These often require several hours to several tens of hours of processing time, so if the work is damaged in the subsequent measurement stage, it will take an enormous amount of time to rework the work. Become.
[0003]
2. Description of the Related Art Conventionally, a contact-type measuring instrument such as that shown in FIG. 5 has been introduced (for example, see Patent Document 1).
This measuring machine is mounted so as to be able to move in the axial direction inside the main body 101, with a main body 101 having a measuring head 102 composed of three measuring elements 103 extending in a radial direction which are mounted at intervals of 120 degrees from each other. A measuring rod 104 and a mechanism for moving the tracing stylus 103 radially outward through a flat-head movable stopper 105. The base of each probe 103, which extends obliquely, is formed on the conical surface of the stopper 105 by a spring. (Not shown). One of two ends of the measuring rod 104 is supported by the bottom surface 106 of the stopper 105. Further, a return spring 107 is provided between a support surface of a bearing integral with the main body 101 and an axial drive ring integral with the measuring rod 104. Due to the action of the spring 107, the measuring elements 103 in the radial direction move away from each other, so that the diameter of the measuring head 102 is maximized. The return wing 107 causes the tracing stylus 103 to contact the wall surface of the hole to be measured at a predetermined measurement pressure.
[0004]
This conventional impact device attached to the inside diameter measuring device of this hole is composed of two members capable of rotating in the reverse direction and moving in the axial direction, a bolt and a nut. The nut 121, which is one of these two members, is configured by a female screw provided on a part of the cylindrical wall surface of the main body. The other member bolt is formed by a cylindrical sleeve 120 provided with a thread, and the threaded outer peripheral surface of the sleeve 120 forms the thread of the main body 101 at the end position of the stroke of the measuring rod 104. The part is engaged over its entire length. On the other hand, the flat inner peripheral surface is rotatably mounted around the measuring rod 104. This bolt-shaped sleeve 120 is axially attached to the portion of the measuring rod 104 between the ring 109 and the holding washer 123 fixed in position by the pin 124 at a position between the return spring 107 and the measuring head 102. It is attached so that it does not move.
[0005]
In this measuring machine, the frictional force due to the relative rotation of the two members engaged with each other acts as a brake, so that the axial movement speed of the measuring rod 104 in the instrument body 101 can be adjusted, and the impact or sudden It was possible to prevent damage due to operation.
[0006]
[Patent Document 1]
JP-A-5-18701 (pages 2-5, FIG. 1)
[0007]
[Problems to be solved by the invention]
However, since the contact force is generated by using the biasing force of the spring in the measuring device having such a configuration, considering the current material of the spring, the contact force on the workpiece is naturally limited. was there. For example, in a configuration using a general spring, a contact force of several hundred mgf to 1000 mgf is generated.
[0008]
The present invention has been made in order to solve such a problem, and it is intended to reduce the contact force of the measuring unit to the work and measure a more delicate work without changing the state of the work before measurement. It is an object of the present invention to provide a shape measuring machine capable of performing the measurement.
[0009]
[Means for Solving the Problems]
In order to solve the above problems, the present invention provides the following means.
The invention according to claim 1 is such that the contact probe is brought into contact with the surface of the work, the contact probe and the work are relatively moved so as to sequentially move the contact point, and the contact probe during the movement. In a shape measuring machine for measuring the surface shape of the workpiece by the amount of displacement, an operating shaft provided with the contact probe at the tip, a support portion movably supporting the operating shaft in the axial direction thereof, and A stopper that regulates a range of movement in the axial direction, wherein the contact probe is urged toward the distal end in the axial direction by the weight of a member including the contact probe.
[0010]
According to the shape measuring instrument according to the present invention, the operating shaft is moved in the axial direction with respect to the support portion by the weight of the member including the contact probe, and the contact probe moves in the axial direction toward the distal end. Moved. Then, by reaching the lowermost end of the movement allowable position by the stopper, the operation shaft is stopped. From this state, the contact probe and the work are relatively moved, and the contact probe is brought into contact with the work. Then, by measuring the displacement amount of the contact probe while continuing the relative movement so as to sequentially move the contact points, the surface shape of the work is measured. In this case, the contact probe is urged toward the distal end in the direction of the operating axis, and thus is moved while maintaining the state of contact with the surface of the work.
Thereby, the contact probe can be brought into contact with the work with a small pressing force of its own weight of the member including the contact probe, so that the contact force can be reduced as compared with the conventional spring type. Work damage can be prevented.
[0011]
According to a second aspect of the present invention, in the shape measuring apparatus according to the first aspect, an elastic body is provided between the operating shaft and the stopper and provided on at least one of the operating shaft and the stopper. It is characterized by.
According to the shape measuring instrument according to the present invention, when the operating shaft moves in the axial direction to a position permitted by the stopper, the elastic body provided between the operating shaft and the stopper causes the elastic body to move. The shaft or the stopper collides. At this time, the impact generated by the collision is absorbed by the elastic body.
This not only protects the main unit from shocks, but also prevents damage to the workpiece due to collisions between the probe and the work due to the increase in the movement speed within the probe movement range when a shock is applied during measurement. It is possible to do.
[0012]
According to a third aspect of the present invention, in the shape measuring machine according to the first or second aspect, the work is held by holding means used in a processing machine that processes the work.
According to the shape measuring machine according to the present invention, after the work is processed by the processing machine, the shape measuring machine operates in a state where the holding means of the work is maintained. Therefore, the work immediately after processing can be measured without being removed from the processing machine.
Thus, it is possible to reduce a mounting error occurring when the work is removed from the processing machine or when the work is mounted on the measuring machine, and the work load of mounting and removing can be reduced. Furthermore, correction processing can be performed immediately using data measured by the measuring machine, and processing time can be shortened when processing the shape of a workpiece with high accuracy.
[0013]
According to a fourth aspect of the present invention, in the shape measuring device according to any one of the first to third aspects, a position detecting means for detecting a position of the operating shaft in an axial direction, and And a control unit that controls a relative movement between the contact probe and the workpiece based on the detection signal.
According to the shape measuring device according to the present invention, when the axial position of the operating shaft reaches a predetermined position, the contact probe and the work are relatively separated from each other, or the relative displacement between the two is measured. It can be stopped, and it is possible to prevent shock to the device body and damage to the work.
[0014]
According to a fifth aspect of the present invention, in the shape measuring device according to any one of the second to fourth aspects, a cap that covers a tip of the contact-type probe and closely contacts the operating shaft and the elastic body is provided. It is characterized by having.
According to the shape measuring instrument of the present invention, the tip of the contact probe is covered with the cap and fixed, so that the movement of the operating shaft is restricted to the elastic body via the stopper.
Thereby, the measuring device main body and the contact probe can be protected from an impact generated when the measuring device is moved. Further, it is possible to protect the contact probe and the measuring instrument main body from oil, mist and the like generated during processing.
[0015]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, a shape measuring machine 1 according to an embodiment of the present invention will be described with reference to the drawings.
1 and 2 show a shape measuring machine as one embodiment of the present invention.
The shape measuring machine 1 according to the present embodiment is provided on a measuring machine base 11 installed on an upper surface of a processing machine bottom plate 17b of a processing machine 17, and a processing unit 17a provided at an end of the processing machine bottom plate 17b. They are arranged at substantially opposite positions.
The processing machine 17 has, for example, a vibration isolation function using an air damper.
Further, the processing section 17a has a holding device 18 as holding means, and the holding device 18 holds the spherical work 8 in a state of protruding toward the shape measuring machine 1 side.
Further, in the present embodiment, the shape measuring machine 1 includes a drive unit 2, a probe 3 provided in the drive unit 2, a position detection unit 9 as position detection means, and a stopper 4 for restricting movement of the drive unit 2. And
The drive unit 2 includes a column-shaped operation shaft 5 and a support unit 6 fixed on the measuring instrument base 11. The measuring machine stand 11 raises the end in the direction opposite to the processing portion 17a among the both ends in the operation axis direction (the moving direction of the operation shaft 5), and creates an inclination toward the processing portion 17a side. And can be moved in the direction of the operating axis and in a direction perpendicular to the operating axis. At one end of the operating shaft 5, a frusto-conical connecting portion 7 is attached with its tip end in the direction opposite to the operating shaft 5. On the other hand, a step portion 12 is formed at the other end of the operating shaft 5 so that a glass scale 14 described later can be fixed. In the vicinity of the step portion 12, a rod-shaped contact rod 13 is fixed along a direction perpendicular to the axis. The contact rod 13 is formed such that its length is longer than the width of the operating shaft 5, and when fixed to the operating shaft 5, both ends of the contact rod 13 extend along the width direction from the operating shaft 5. To protrude.
[0016]
The support portion 6 has a tubular shape, and the operating shaft 5 is passed through a hollow portion (not shown) along the axial direction. A plurality of blowout holes (not shown) are formed on the inner wall surface of the support portion 6, and compressed clean and dry compressed air is blown out from the blowout hole between the operating shaft 5 and the inner wall surface of the support portion 6. By doing so, a minute gap of several μm is generated. As the clean and dry compressed air, for example, an air dew point of 10 ° C., oil removal of 0.1 PPM, dust particles of less than 1.0 μm, and particles of 0.3 μm or more of 100 particles / cubic foot or less are obtained by a refrigeration air dryer. Use things. Due to the ejection of the air, that is, the air slide, the operating shaft 5 is in a floating state not in contact with the inner wall surface of the support portion 6. For this reason, it is not directly affected by the surface shape accuracy of the operating shaft 5 and satisfies the motion performance of about 1/10 of the surface accuracy. Thereby, the operating shaft 5 is supported so as to be able to reciprocate along the direction approaching and separating from the processing portion 17a, that is, along the axial direction, and when the measuring machine base 11 is inclined toward the processing portion 17a, The probe 3 is urged toward the tip in the axial direction only by its own weight such as the operating shaft 5.
[0017]
The probe 3 is fixed to a distal end of a connecting portion 7 provided at one end of the operation shaft 5. The probe 3 has a spherical shape, for example, a precision ruby ball having a diameter of 0.5 mm.
The position detecting section 9 has a glass scale 14 and a glass scale head 15. The glass scale 14 is formed of a plate-like member, and is fixed along the operation axis by screwing one end of the glass scale 14 to the step 12 formed at the other end of the operation shaft 5. The glass scale 14 is inserted into the glass scale head 15 so as to be reciprocally movable, and the movement of the glass scale 14 is sequentially detected.
[0018]
The stopper 4 has a U-shape, and is attached to the upper surface of the measuring machine base 11 so that the bottom surface thereof is parallel to the operation axis. The stopper 4 is adjacent to the operating shaft 5 such that one end of the contact rod 13 is located between both side walls of the U-shaped stopper 4. Therefore, as the operating shaft 5 reciprocates, the contact rod 13 reciprocates between the inner walls of the stopper 4. Elastic bodies 16 are provided on both inner side walls of the stopper 4 at both portions in contact with the reciprocating axis of the contact rod 13. The elastic body 16 is made of rubber or the like having high shock absorption. Therefore, if the operating shaft 5 attempts to move beyond the distance between the two elastic members 16, the contact rod 13 comes into contact with one of the elastic members 16, thereby restricting the movement of the operating shaft 5. Has become.
[0019]
The operation of the shape measuring instrument 1 according to the present embodiment thus configured will be described.
When the shape measuring machine 1 is installed at a predetermined position facing the processing section 17a of the processing machine 17, the measuring machine base 11 raises its end to generate an inclination toward the processing section 17a. Therefore, the entire shape measuring machine 1 is tilted, and the operating shaft 5 is tilted such that one end on the probe 3 side is obliquely downward and the other end on the step portion 12 side is obliquely upward. Therefore, the operating shaft 5 is moved toward the probe 3 along the operating axis, and at the same time, the contact rod 13 is moved between the two elastic bodies 16 of the stopper 4. When the contact rod 13 comes into contact with the elastic body 16 on the probe 3 side, the movement of the operating shaft 5 is stopped. From this state, the measuring machine stand 11 is advanced to the processing section 17a side and stopped at a predetermined position. This position is such that the probe 3 is at a predetermined horizontal distance from a vertical plane (hereinafter, referred to as a reference plane) passing through the center of the work 8 and including the operation axis, that is, from the side of the work 8 and the reference plane. It will be a separated point. Further, this position is a point separated from the contact point where the probe 3 first contacts the surface of the work 8 to the side in the horizontal direction.
[0020]
From this state, the measuring machine stand 11 starts horizontal movement toward the reference plane side in a direction orthogonal to the reference plane. The measuring stand 11 moves at a high speed over a predetermined distance, is switched from a predetermined point to a low-speed movement, and further keeps moving horizontally so that the probe 3 is directed to the contact point. As a result, the probe 3 contacts the contact point of the work 8 at a certain timing. Then, after the contact, the probe 3 is moved following the smooth protruding surface of the work 8. When the probe 3 reaches a predetermined point, measurement is started by the position detector 9. Further, the probe 3 passes through the most protruding portion of the work 8 and is horizontally moved toward the end direction of the measurement. During these movements, the probe 3 is moved along the projecting surface of the work 8, so that the operating shaft 5 is also moved linearly in the axial direction accordingly.
[0021]
In the present embodiment, for example, the probe 3 is horizontally moved at a rapid traverse speed until the relative distance from the reference plane to the workpiece 8 having a diameter of 20 mm is 10 mm. Upon reaching that point, the approach speed is switched to a lower approach speed of 2.5 mm per minute. Then, the probe 3 contacts the workpiece 8 at a point 9 mm away from the reference plane. The contact force at this time is such that the total weight of the operating shaft 5, the connecting portion 7, the contact rod 13, the probe 3, the glass scale 14, and the glass scale head 15 is 52 g and the inclination angle is 2 minutes.
52 (g) × sin (2/60) = 0.03 (g)
That is, it is about 30 mgf. Further, the probe 3 continues to relatively move while being in contact with the work 8, and measurement by the position detector 9 is started at a point where the operating shaft 5 is pushed back by 2 mm due to the convex shape of the work 8. At this time, since the operating shaft 5 is pushed back, the contact rod 13 is separated from the elastic body 16. After that, the probe 3 continues to move relative to the opposite side of the reference plane while contacting the work 8 only by its own weight, and moves away from the work 8 at a predetermined point on the opposite side. During that time, the position detector 9 continues to detect the position of the operating shaft 5 and plots the position, whereby the shape of the work 8 is accurately measured. Further, when there is an external instruction, the measurement data is fed back to processing conditions after processing such as analysis.
[0022]
As described above, according to the shape measuring instrument 1 according to the present embodiment, the contact force of the probe 3 with respect to the work 8 at the time of detection is generated only by the own weight of the operating shaft 5 or the like. Can be For example, as described above, in a configuration using a general spring, the contact force is several hundred mgf to 1000 mgf, whereas according to the shape measuring device 1 according to the present embodiment, a small contact force of about 30 mgf is obtained. realizable.
Therefore, even if it is a highly precise and more delicate work, the damage can be prevented. Incidentally, a measurement was performed on aluminum, which is a soft material, with a contact force of 30 mgf using a probe made of a diamond stylus having a radius of 2 μm. No damage was observed on the work surface even when observed with a Nomarski microscope.
[0023]
When the operating shaft 5 reaches the stroke end, the contact rod 13 comes into contact with the elastic body 16 provided on the stopper 4, so that the impact can be absorbed. Therefore, the measuring device main body can be protected from impact.
Further, since the work 8 is held by the holding device 18 used in the processing machine 17, a mounting error occurring when the work 8 is removed from the holding device 18 or mounted on the measuring machine is reduced, and the work 8 is mounted and removed. Can reduce the work load. Further, by feeding back the data measured by the measuring machine to the processing machine 17, the correction processing can be immediately performed using the processing machine 17, and the processing time can be reduced in processing the shape of the work 8 with high accuracy. It becomes possible.
[0024]
In the above embodiment, the probe 3 has a spherical shape. However, the present invention is not limited to this. For example, a probe having a tip with a small radius of curvature may be used.
Further, although the material of the probe 3 is ruby, the material is not limited thereto, and diamond, glass, sapphire, ceramics, or the like may be used.
Further, although the elastic body 16 is made of rubber, it is not limited to this, and may be a coil spring, a leaf spring, an air damper, or the like.
Furthermore, although the elastic body 16 is provided on both inner side walls of the stopper 4, the present invention is not limited to this. The elastic body 16 may be attached to the contact rod 13 or the operating shaft 5, or the contact rod 13 or the stopper 4 itself may be an elastic member. .
[0025]
Although a plurality of blowout holes are formed in the inner wall surface of the support portion 6, a porous material may be used instead. Further, the material of the air slide uses ceramics. However, the material is not limited to this, and a low expansion material having a small linear expansion coefficient, lightweight aluminum or duralumin, iron-based materials including stainless steel, resin, or the like may be used. .
Further, the position detector 9 has the glass scale 14 and the glass scale head 15, but the position detector 9 is not limited to this, and may be a device that obtains the position information of the operating shaft 5 from an interferometer or the like, or an electric / optical switch. Or the like may be used.
Further, the relative movement between the probe 3 and the work 8 is described as moving the measuring machine stand 11, but the present invention is not limited to this, and the work 8 itself may be moved by the holding device 18 or the processing unit 17a may be moved. Is also good. Further, both the measuring machine stand 11 and the processing unit 17a may be moved.
Further, regarding the measurement start position of the work 8, the measurement is started after the probe 3 reaches a predetermined position on the surface of the work 8. However, the present invention is not limited to this. The measurement may be started at the same time as the movement is started.
[0026]
FIG. 3 shows another embodiment of the present invention.
3, the same components as those shown in FIGS. 1 and 2 are denoted by the same reference numerals, and description thereof will be omitted.
The shape measuring device 1 according to the present embodiment includes a control unit having an arithmetic device 20, a control PC 21, and a measuring device control device 22.
The arithmetic unit 20 reads the position information from the position detecting unit 9.
The control PC 21 includes a memory (not shown) for storing data on the movement limit point of the operating shaft 5.
The measuring device control device 22 receives an instruction from the control PC 21 and controls the movement of the measuring device stand 11.
[0027]
Hereinafter, the operation of the shape measuring instrument 1 according to the present embodiment will be described.
The position detector 9 supplies the position information of the operating shaft 5 to the arithmetic device 20, and the arithmetic device 20 calculates the position of the operating shaft 5 from the position information. Further, the calculation result is supplied to the control PC 21, and the control PC 21 compares the movement limit point data of the operating shaft 5 input in advance with the calculation result. Then, when the calculation result exceeds the movement limit point data of the operation shaft 5, a control command is output to the measuring device control device 22. Upon receiving the control command, the measuring device control device 22 moves the measuring device base 11 so that the work 8 and the probe 3 are relatively separated from each other, or stops the relative displacement between the two. Stop moving.
Thereby, it is possible to prevent an impact generated when the operating shaft 5 reaches the stroke end.
In the above embodiment, the movement of the measuring stand 11 is controlled. However, the present invention is not limited to this. For example, at least one of the operating shaft 5, the work 8, and the processing unit 17a may be controlled. .
Further, in the present embodiment, although the movement limit point data of the operating shaft 5 previously input by the control PC 21 is compared with the calculation result, a switch is provided at the movement limit point, and a switch is provided at the movement limit point. The signal may be output to the measuring device control device 22.
[0028]
FIG. 4 shows still another embodiment of the present invention.
In FIG. 4, the same components as those shown in FIGS. 1 and 2 are denoted by the same reference numerals, and description thereof will be omitted.
The shape measuring device 1 according to the present embodiment includes a cover 25 that covers the entire measuring device and a cap 26 that covers the probe 3.
The cover 25 is formed of a rectangular parallelepiped with a hollow inside, and can accommodate a measuring instrument at a predetermined position inside the rectangular parallelepiped. An opening 27 is formed on one of both sides in the length direction of the cover 25 so that the tip of the operating shaft 5 projects from the inside of the measuring device to the outside of the measuring device when the measuring device is stored. I have.
The cap 26 has a U-shaped cross section, and can be attached to the cover 25 by screws, magnetic force, or the like so as to cover the opening 27.
[0029]
Hereinafter, the operation of the shape measuring instrument 1 according to the present embodiment will be described.
When the shape measuring instrument 1 is not used, the tip of the operating shaft 5 provided with the probe 3 is projected from the inside of the cover 25 through the opening 27 to the outside of the cover 25, and a cap 26 is attached to the tip of the probe 3. Then, the operating shaft 5 is pushed back into the cover 25 together with the cap 26 while the probe 3 and the cap 26 are in contact with each other. The position of the stopper 4 is set in advance so that when the cap 26 hits the side surface of the cover 25, the contact rod 13 comes into contact with the elastic body 16 on the opposite side of the probe 3. Therefore, the operating shaft 5 is fixed by the cap 26 and the elastic body 16 so as not to move in the axial direction.
This allows the elastic body 16 to absorb the shock generated when the measuring machine is moved or transported, thereby protecting the device body and the probe 3. Further, when the work 8 is processed, the device body and the probe 3 can be protected from liquids such as cutting liquid and grinding liquid.
In the above-described embodiment, the cap 26 and the probe 3 are in direct contact with each other. However, the present invention is not limited to this. Alternatively, an elastic member or the like for protecting the probe 3 may be provided on the probe 3 contact surface of the cap 26.
[0030]
【The invention's effect】
As described above, according to the present invention, the contact force of the measuring unit to the work can be reduced, and the shape of the work can be measured without impairing the soundness of the work.
In addition, the elastic body can absorb the impact and protect the device body from the impact.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram showing a top view of an embodiment of a shape measuring instrument according to the present invention.
FIG. 2 is a schematic configuration diagram showing an embodiment of the shape measuring instrument according to the present invention as viewed from the side.
FIG. 3 is a schematic configuration diagram showing another embodiment of the shape measuring instrument according to the present invention.
FIG. 4 is a schematic configuration diagram showing still another embodiment of a shape measuring instrument according to the present invention.
FIG. 5 is a schematic configuration diagram showing a conventional shape measuring instrument.
[Explanation of symbols]
1 shape measuring machine 3 probe (contact type probe)
4 Stopper 5 Operating shaft 6 Support section 8 Work 9 Position detecting section (Position detecting means)
16 elastic body 17 processing machine 18 holding device (holding means)
21 Control PC (control means)
22 Measuring machine control device (control means)
26 cap

Claims (5)

The contact probe is brought into contact with the surface of the work, the contact probe and the work are relatively moved so as to sequentially move the contact point, and the surface of the work is determined by the displacement of the contact probe during the movement. In a shape measuring machine that measures the shape,
An operating shaft provided with the contact probe at the tip,
A support for supporting the operating shaft movably in the axial direction,
A stopper that regulates an axial movement range of the operating shaft,
A shape measuring machine characterized in that the contact probe is urged toward the distal end in the axial direction by the weight of a member including the contact probe. The shape measuring instrument according to claim 1, further comprising an elastic body located between the operation shaft and the stopper and provided on at least one of the operation shaft and the stopper. 3. The shape measuring machine according to claim 1, wherein the work is held by a holding unit used in a processing machine that processes the work. 4. Position detecting means for detecting an axial position of the operating shaft;
4. The apparatus according to claim 1, further comprising control means for controlling a relative movement between the contact probe and the workpiece based on a detection signal from the position detection means. The shape measuring machine according to 1. The shape measuring instrument according to any one of claims 2 to 4, further comprising a cap that covers a tip of the contact-type probe and makes the operating shaft and the elastic body adhere to each other.

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