JP2004299920A - Method for manufacturing tubular single crystal zinc oxide whisker - Google Patents
Method for manufacturing tubular single crystal zinc oxide whisker Download PDFInfo
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- JP2004299920A JP2004299920A JP2003091626A JP2003091626A JP2004299920A JP 2004299920 A JP2004299920 A JP 2004299920A JP 2003091626 A JP2003091626 A JP 2003091626A JP 2003091626 A JP2003091626 A JP 2003091626A JP 2004299920 A JP2004299920 A JP 2004299920A
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- zinc oxide
- single crystal
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Abstract
Description
【0001】
【発明の属する技術分野】
本発明は、青色や紫外領域の発光ダイオードやダイオードレーザのような光学デバイスへの応用や複合材料の強化材として有用な単結晶のチューブ状酸化亜鉛ウィスカーの製造方法に関する。
【0002】
【従来の技術】
II−VI族の化合物半導体である酸化亜鉛は発光ダイオードやダイオードレーザのような青色や紫外領域での光学分野への応用が期待されている。さらに、酸化亜鉛ウィスカーは高温強度、硬度、化学的安定性に優れているので、複合材料の強化材等の分野でも注目されている。酸化亜鉛ウィスカーは通常金属亜鉛粉末の気相酸化で製造されている。例えば、反応触媒としてゼオライトと酸化亜鉛の混合物で被覆した金属亜鉛粒子を酸化することにより酸化亜鉛ウィスカーを製造している(例えば、非特許文献1参照)。また、最近では、中空部を有する酸化亜鉛ナノチューブやチューブ状ウィスカーの製造方法も報告されている ( 例えば、非特許文献2,3参照)。これらの方法によって製造されたナノチューブやチューブ状ウィスカーの結晶構造は単結晶ではなく、多結晶である。
【0003】
【非特許文献1】
T.Yoshida、ほか、アプライド・フィジックス・レターズ(APPl.Phys.Rett.)64巻、3243頁、1994年
【非特許文献2】
J.Zhang, ほか、ケミカル・コミュニケーションズ(Chem.Commun.)3号、 262頁、2002年
【非特許文献3】
J.J.Wu,ほか、アプライド・フィジックス・レターズ(Appl.Phys.Rett.)81 巻、1312頁、2002年
【0004】
【発明が解決しようとする課題】
本発明は、従来の多結晶の酸化亜鉛に比べて、電子移動度や発光強度が優れている単結晶のチューブ状酸化亜鉛ウィスカーを製造することを解決すべき課題としている。
【0005】
【課題を解決するための手段】
本発明は、硫化亜鉛粉末と活性炭粉末とをアルゴン気流中、1100〜1200℃に、2〜4時間加熱して、一旦亜鉛を生成させた後、引き続き、アルゴンを酸素に切り替えて、1100〜1200℃で、1〜3時間加熱することにより、酸化反応を行わせて単結晶のチューブ状酸化亜鉛ウィスカーを製造する方法である。
【0006】
上記の方法で得られる大部分のウィスカーは直径400nmであり、長さは15μmであるが、直径150nm、長さ数マイクロメートルを有する少量のウィスカーも含まれている。大部分のウィスカーは中空部を有するチューブ状である。その壁の厚さは100〜150nmである。本発明の方法で得られた単結晶チューブ状酸化亜鉛ウィスカーは、青色、紫外領域での発光ダイオード、ダイオードレーザ等への応用や複合材料の強化材として期待される。
【0007】
【発明の実施の形態】
本発明の製造方法における条件について以下に説明する。
加熱装置は、抵抗加熱炉、高周波誘導加熱炉等本発明の方法における温度条件が満たされれば特に限定されない。
まず、硫化亜鉛粉末と活性炭粉末とをアルゴン気流中、1100〜1200℃に、2〜4時間加熱して、一旦亜鉛を生成させる。原料粉末は、粒子径10ミクロン程度とする。アルゴンガスの他の希ガスの混合も可能である。温度は、1100〜1200℃とする。硫化亜鉛の昇華温度が1185℃付近なので、この近傍で反応活性が出始める。温度が高すぎると、系外へ逸散してしまう。加熱時間は、2〜4時間とする。反応温度の下限に近いところで、行っているので、生成物が十分に生じるのに、2時間、4時間以上行っても、あまり変化がない。
【0008】
引き続き、酸素気流中で高温での熱酸化反応を行う。酸素気流は、希ガスとの混合でも問題ない。温度は、1100〜1200℃とする。あまり高温にすると、生成物が逸散する。反応は、前段で生成した液状亜鉛と酸素が反応して酸化亜鉛の結晶が生成する。
【0009】
【実施例】
実施例1
硫化亜鉛粉末(粒子径10μm以下;アルドリッチ社製)3.0gと活性炭粉末(100メッシュ;アルドリッチ社製)0.2gの混合物をアルミナ製のボートに入れ、このボートを外径42mm、長さ80cmの石英管の中心部に配置した。石英管を抵抗加熱炉の中に水平に置いた。石英管に蓋をして、10℃/minの昇温速度で加熱して1100℃まで温度を上げた。このとき、80sccmの流速でアルゴンガスを流し、3時間この温度に保った。
【0010】
上記の方法で亜鉛前駆物を製造し、引き続きアルゴンガスを同じ流速の酸素ガスに切り替えて、2時間、1100℃に温度を維持した。その後、10℃/minの下降速度で室温まで冷却した。白色の生成物が石英管の内壁に堆積していた。生成物の収率は硫化亜鉛を基準として20〜30%であった。
【0011】
生成物のX線回折のパターンを図1に示す。得られた回折ピークを見ると、既知の六方晶系酸化亜鉛のピークとよく一致し、その格子定数はa=0.325nm、c=0.521nmであり、硫化亜鉛や金属亜鉛に基づくピークは観測されなかった。
【0012】
図2(a)に、生成物の走査型電子顕微鏡像の写真を載せたが、直線状のウィスカーが大部分で、粒子状や他の形状は見られない。大部分のウィスカーは直径400nmであり、長さは15μmであるが、直径150nm、長さ数マイクロメートルを有する少量のウィスカーも含まれている。
【0013】
図2(b)に、高倍率の走査型電子顕微鏡像を示したが、大部分のウィスカーは中空部を有するチューブ状であることが分かった。その壁の厚さは100〜150nmである。
【0014】
図3に、X線エネルギー拡散スペクトルを示したが、その化学組成は亜鉛と酸素からなり、その元素比は、1:1.05であり、化学量論的な酸化亜鉛が生成されていることが分かった。また、電子線回折のパターンからは格子定数a=0.32nm、c=0.52nmで、前述のX線回折のパターンから得られた六方晶系の酸化亜鉛の値と同じであった。別の場所から採取したサンプルも同じ値を示し、単結晶構造であることが確認された。
【0015】
図4に、チューブ状酸化亜鉛ウィスカーの室温におけるフォトルミネッセンススベクトルを示す。381nmの強い鋭い発光ピークと583nmの弱い幅の広いピークが存在し、381nmのピークはバルクの酸化亜鉛のバンドギャップと一致することが確認された。
【0016】
【発明の効果】
本発明の方法により、従来の方法では、多結晶体しか得られなかった酸化亜鉛が、単結晶が得られるようになった。このことにより、電子移動度や発光強度が多結晶体よりもすぐれているので、電子デバイスへの応用に際して、大いに期待される。
【図面の簡単な説明】
【図1】単結晶チューブ状酸化亜鉛ウィスカーのX線回折のパターンである。
【図2】図2(a)は、単結晶チューブ状酸化亜鉛ウィスカーの低倍率走査型電子顕微鏡像を示す図面代用写真である。図2(b)は、単結晶チューブ状酸化亜鉛ウィスカーの高倍率走査型電子顕微鏡像を示す図面代用写真である。
【図3】図3は、単結晶チューブ状酸化亜鉛ウィスカーのX線エネルギー拡散スペクトルの図である。
【図4】図4は、単結晶チューブ状酸化亜鉛ウィスカーの室温におけるフォトルミネッセンススペクトルの図である。[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for producing a single-crystal tubular zinc oxide whisker useful for application to optical devices such as light-emitting diodes and diode lasers in the blue and ultraviolet regions and as a reinforcing material for composite materials.
[0002]
[Prior art]
Zinc oxide, which is a II-VI group compound semiconductor, is expected to be applied to optical fields in the blue and ultraviolet regions such as light-emitting diodes and diode lasers. Further, zinc oxide whiskers have been attracting attention in the field of reinforcing materials for composite materials and the like because of their excellent high-temperature strength, hardness and chemical stability. Zinc oxide whiskers are usually produced by gas phase oxidation of zinc metal powder. For example, zinc oxide whiskers are manufactured by oxidizing metal zinc particles coated with a mixture of zeolite and zinc oxide as a reaction catalyst (for example, see Non-Patent Document 1). Recently, methods for producing zinc oxide nanotubes and tubular whiskers having a hollow portion have also been reported (for example, see Non-Patent Documents 2 and 3). The crystal structure of nanotubes and tubular whiskers manufactured by these methods is not single crystal but polycrystal.
[0003]
[Non-patent document 1]
T. Yoshida et al., Applied Physics Letters (APP1. Phys. Rett.) 64, 3243, 1994 [Non-Patent Document 2]
J. Zhang, et al., Chemical Communications (Chem. Commun.) No. 3, p. 262, 2002 [Non-Patent Document 3]
J. J. Wu, et al., Applied Physics Letters (Appl. Phys. Rett.) 81, 1312, 2002.
[Problems to be solved by the invention]
An object of the present invention is to provide a method for manufacturing a single-crystal tubular zinc oxide whisker having excellent electron mobility and emission intensity as compared with conventional polycrystalline zinc oxide.
[0005]
[Means for Solving the Problems]
In the present invention, zinc sulfide powder and activated carbon powder are heated in an argon stream to 1100 to 1200 ° C. for 2 to 4 hours to generate zinc once, and then argon is switched to oxygen to 1100 to 1200. This is a method of producing a single-crystal tubular zinc oxide whisker by heating at 1 ° C. for 1 to 3 hours to cause an oxidation reaction.
[0006]
Most whiskers obtained by the above method are 400 nm in diameter and 15 μm in length, but also include small amounts of whiskers having a diameter of 150 nm and a few micrometers in length. Most whiskers are tubular with hollows. Its wall thickness is 100-150 nm. The single-crystal tubular zinc oxide whiskers obtained by the method of the present invention are expected to be applied to light-emitting diodes and diode lasers in the blue and ultraviolet regions and to be used as reinforcing materials for composite materials.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
The conditions in the manufacturing method of the present invention will be described below.
The heating device is not particularly limited as long as the temperature conditions in the method of the present invention such as a resistance heating furnace and a high-frequency induction heating furnace are satisfied.
First, zinc sulfide powder and activated carbon powder are heated to 1100 to 1200 ° C. in an argon stream for 2 to 4 hours to once generate zinc. The raw material powder has a particle diameter of about 10 microns. Mixing of other rare gases other than argon gas is also possible. The temperature is between 1100 and 1200 ° C. Since the sublimation temperature of zinc sulfide is around 1185 ° C., the reaction activity starts to appear near this temperature. If the temperature is too high, it will escape out of the system. The heating time is 2 to 4 hours. Since the reaction is performed at a temperature near the lower limit of the reaction temperature, there is not much change even when the reaction is performed for 2 hours or 4 hours or more so that the product is sufficiently generated.
[0008]
Subsequently, a thermal oxidation reaction is performed at a high temperature in an oxygen stream. The oxygen gas flow can be mixed with a rare gas without any problem. The temperature is between 1100 and 1200 ° C. At too high a temperature, the product escapes. In the reaction, the liquid zinc produced in the preceding stage reacts with oxygen to produce zinc oxide crystals.
[0009]
【Example】
Example 1
A mixture of 3.0 g of zinc sulfide powder (particle size: 10 μm or less; manufactured by Aldrich) and 0.2 g of activated carbon powder (100 mesh; manufactured by Aldrich) is placed in an alumina boat, and the boat is 42 mm in outer diameter and 80 cm in length. At the center of the quartz tube. The quartz tube was placed horizontally in a resistance heating furnace. The quartz tube was capped and heated at a heating rate of 10 ° C./min to raise the temperature to 1100 ° C. At this time, argon gas was flowed at a flow rate of 80 sccm, and the temperature was maintained at this temperature for 3 hours.
[0010]
A zinc precursor was produced by the above method, and the temperature was maintained at 1100 ° C. for 2 hours while switching the argon gas to oxygen gas at the same flow rate. Then, it was cooled to room temperature at a rate of 10 ° C./min. A white product was deposited on the inner wall of the quartz tube. The product yield was 20-30% based on zinc sulfide.
[0011]
The X-ray diffraction pattern of the product is shown in FIG. Looking at the obtained diffraction peaks, the peaks well agree with those of the known hexagonal zinc oxide, and the lattice constants are a = 0.325 nm and c = 0.521 nm. Not observed.
[0012]
FIG. 2 (a) shows a photograph of a scanning electron microscope image of the product. Most of the whiskers are linear, and no particles or other shapes are observed. Most whiskers are 400 nm in diameter and 15 μm in length, but also include small amounts of whiskers having a diameter of 150 nm and a few micrometers in length.
[0013]
FIG. 2B shows a scanning electron microscope image at a high magnification, and it was found that most of the whiskers were tubular with a hollow portion. Its wall thickness is 100-150 nm.
[0014]
FIG. 3 shows the X-ray energy diffusion spectrum. Its chemical composition is composed of zinc and oxygen, the element ratio is 1: 1.05, and stoichiometric zinc oxide is produced. I understood. The lattice constants a = 0.32 nm and c = 0.52 nm from the electron diffraction pattern were the same as those of the hexagonal zinc oxide obtained from the above-mentioned X-ray diffraction pattern. A sample taken from another place showed the same value, and it was confirmed that the sample had a single crystal structure.
[0015]
FIG. 4 shows the photoluminescence vector of a tubular zinc oxide whisker at room temperature. There was a strong sharp emission peak at 381 nm and a weak broad peak at 583 nm, and it was confirmed that the peak at 381 nm coincided with the band gap of bulk zinc oxide.
[0016]
【The invention's effect】
According to the method of the present invention, a single crystal can be obtained from zinc oxide, which could be obtained only in a polycrystalline form by the conventional method. As a result, the electron mobility and the emission intensity are better than those of the polycrystalline material, so that they are expected to be greatly applied when applied to electronic devices.
[Brief description of the drawings]
FIG. 1 is an X-ray diffraction pattern of a single-crystal tubular zinc oxide whisker.
FIG. 2A is a drawing substitute photograph showing a low-magnification scanning electron microscope image of a single-crystal tubular zinc oxide whisker. FIG. 2B is a drawing substitute photograph showing a high-magnification scanning electron microscope image of a single-crystal tubular zinc oxide whisker.
FIG. 3 is an X-ray energy diffusion spectrum of a single-crystal tubular zinc oxide whisker.
FIG. 4 is a diagram of a photoluminescence spectrum of a single-crystal tubular zinc oxide whisker at room temperature.
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004362841A (en) * | 2003-06-02 | 2004-12-24 | National Institute For Materials Science | Manufacturing method of zinc sulfide nano-cable containing zinc |
JP2008120674A (en) * | 2007-10-18 | 2008-05-29 | National Institute For Materials Science | Zinc sulfide nano-cable |
JP2008251341A (en) * | 2007-03-30 | 2008-10-16 | Nagaoka Univ Of Technology | X-ray generator |
CN101899708A (en) * | 2010-07-23 | 2010-12-01 | 北京航空航天大学 | Tetrapod-like zinc oxide/ferrite film material and preparation method thereof |
-
2003
- 2003-03-28 JP JP2003091626A patent/JP3837540B2/en not_active Expired - Lifetime
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004362841A (en) * | 2003-06-02 | 2004-12-24 | National Institute For Materials Science | Manufacturing method of zinc sulfide nano-cable containing zinc |
JP4538620B2 (en) * | 2003-06-02 | 2010-09-08 | 独立行政法人物質・材料研究機構 | Method for producing zinc sulfide nanocable containing zinc |
JP2008251341A (en) * | 2007-03-30 | 2008-10-16 | Nagaoka Univ Of Technology | X-ray generator |
JP2008120674A (en) * | 2007-10-18 | 2008-05-29 | National Institute For Materials Science | Zinc sulfide nano-cable |
CN101899708A (en) * | 2010-07-23 | 2010-12-01 | 北京航空航天大学 | Tetrapod-like zinc oxide/ferrite film material and preparation method thereof |
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