JP2004294168A - X-ray spectroscope for micro-portion analysis - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To perform position adjustment of a focal position without changing an optical condition, concerning a spectroscope equipped with a poly-capillary X-ray lens. <P>SOLUTION: In this X-ray spectroscope for micro-portion analysis for spectrally diffracting the secondary X-ray discharged from an analysis point of a sample 10, an optical system is equipped with a spectroscopic element 3 and the poly-capillary X-ray lens 2 for allowing the secondary X-ray discharged from the analysis point to enter the spectroscopic element 3, and the poly-capillary X-ray lens 2 and the spectroscopic element 3 are constituted so as to be integrally linear or movable in the inclined state with respect to the position of the analysis point by fixing the mutual position relation so that the incident angle to the spectroscopic element 3 of outgoing light from the poly-capillary X-ray lens 2 becomes a prescribed angle. The position of the poly-capillary X-ray lens 2 is fixed in the optical system of the spectroscope, and the whole optical system including the poly-capillary X-ray lens 2 is aligned to the sample 10, to thereby perform position adjustment of the focal position of the poly-capillary X-ray lens 2 with respect to the analytical position without changing the optical condition of the optical system. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an X-ray spectrometer used for a fluorescent X-ray analyzer, a scanning electron microscope (SEM), a transmission electron microscope, an electron probe microanalyzer (EPMA), and the like. It relates to an X-ray spectrometer.
[0002]
[Prior art]
Conventionally, in a fluorescent X-ray analyzer, a scanning electron microscope (SEM), a transmission electron microscope, an electron probe microanalyzer (EPMA), etc., a microscopic analysis is performed to analyze secondary X-rays emitted from a microscopic part on a sample. X-ray spectrometer for use.
[0003]
Conventionally, as such an X-ray spectrometer for analyzing a minute part, for example, a spectrometer equipped with a solar unit or a spectrometer using a curved crystal has been used.
[0004]
FIG. 6 is an example of a configuration of a spectroscope including a solar unit. In this configuration example, a secondary beam emitted from the sample 100 by irradiating an X-ray or an electron beam is passed through the solar unit 102a, and a parallel beam obtained is incident on the spectral element 103 and split by the spectral element 103. The secondary X-ray passes through the solar unit 10b and is detected by the detector 104.
[0005]
FIG. 7 shows an example of the configuration of a spectroscope provided with a curved crystal. In this configuration example, secondary X-rays emitted from the sample 100 by irradiating an X-ray or an electron beam are made incident on the curved crystal 112, and the secondary X-rays separated by the curved crystal 112 are detected by the detector 114. .
[0006]
In recent years, in addition to the above-mentioned spectroscope equipped with a solar unit or a spectroscope using a curved crystal, a polycapillary X-ray lens having a lens function of converting a secondary X-ray emitted from a point focus into a parallel beam has been developed. Spectrographs equipped are also being used. The polycapillary X-ray lens forms a lens by bundling a plurality of capillaries and reducing the diameter of one end. The polycapillary X-ray lens can converge the incident X-rays at the focal position, and can output the incident X-rays from the focal position as a parallel beam by reversing the relationship between the incident and the exit.
[0007]
FIG. 8 shows an example of a configuration of a spectroscope provided with a polycapillary X-ray lens, and FIG. 9 is a schematic diagram for explaining focal position adjustment in this example of the configuration. In this configuration example, secondary X-rays emitted from the sample 100 by irradiating an X-ray or an electron beam are passed through a polycapillary X-ray lens 122 to be incident on a spectroscopic element 123 as a parallel beam. The separated secondary X-rays are detected by the detector 124.
[0008]
In the spectroscope using this polycapillary X-ray lens, it is necessary to align the focal position B on the incident side of the polycapillary X-ray lens with the analysis position A where X-rays and electron beams are irradiated and excited. Conventionally, the positioning of the focal position A of the polycapillary X-ray lens to the analysis position B is performed by adjusting the inclination of the polycapillary X-ray lens or moving the polycapillary X-ray lens.
[0009]
FIG. 9 is a view for explaining this alignment. The position of the polycapillary X-ray lens 122 is adjusted by adjusting the inclination of the polycapillary X-ray lens 122 (arrow C in the figure) or by adjusting the linear movement (arrow D in the figure). The focus position B is aligned with the analysis position A.
[0010]
[Problems to be solved by the invention]
As described with reference to FIG. 9, when the focal position is adjusted by tilting or linearly moving the polycapillary X-ray lens, the incident angle of the secondary X-ray converted by the polycapillary X-ray lens to the spectral element also changes. As a result, the optical conditions change, so that it is necessary to adjust the angle of the spectral element.
[0011]
In FIG. 9, the state before the adjustment is indicated by a solid line, and the state after the adjustment is indicated by a broken line. When the polycapillary X-ray lens 122 is tilted or linearly moved, the incident angle of the secondary X-ray on the spectral element 123 changes from θB to θA. When the angle of incidence of the secondary X-rays on the spectroscopic element changes, the wavelength split by the spectroscopic element 123 changes. Therefore, in order to obtain a predetermined spectral wavelength, the angle of the spectroscopic element 123 must also be adjusted (see FIG. Arrow E). Therefore, in a spectroscope having a configuration including a polycapillary X-ray lens, it is necessary to adjust the optical condition of the spectroscopic element as well as to adjust the position of the focal position by adjusting the polycapillary X-ray lens. In addition, there is a problem that the adjustment time becomes longer.
[0012]
In view of the above, an object of the present invention is to solve the above-described conventional problems and to adjust the focal position without changing optical conditions in a spectroscope including a polycapillary X-ray lens.
[0013]
[Means for Solving the Problems]
The present invention relates to a spectroscope having a polycapillary X-ray lens, wherein the position of the polycapillary X-ray lens is fixed in the optical system of the spectroscope, and the entire optical system including the polycapillary X-ray lens is aligned with respect to the sample. By doing so, the focal position of the polycapillary X-ray lens is adjusted with respect to the analysis position without changing the optical conditions of the optical system.
[0014]
An X-ray spectrometer for analyzing a micropart of the present invention is an X-ray spectrometer for analyzing a micropart, which disperses secondary X-rays emitted from an analysis point of a sample. An optical system including a polycapillary X-ray lens that causes secondary X-rays to be incident on the spectral element is provided. The configuration is such that the mutual positional relationship is fixed so as to be able to move linearly or inclined integrally with the position of the analysis point.
[0015]
According to this configuration, since the positional relationship between the polycapillary X-ray lens and the spectroscopic element is always kept constant, the polycapillary X-ray lens and the spectroscopic element are simply moved linearly or inclinedly, and the polycapillary X-ray lens and the spectroscopic element are simply moved. The focal position of the X-ray lens can be adjusted to the position of the analysis point, and the tilt adjustment of the polycapillary X-ray lens and the angle adjustment of the spectral element can be eliminated.
[0016]
An aspect of the configuration for fixing the mutual positional relationship so that the incident angle of the outgoing light of the polycapillary X-ray lens with respect to the spectral element becomes a predetermined angle, and enabling the linear or inclined movement integrally with the position of the analysis point According to the present invention, there is provided a polycapillary X-ray lens and a base unit for fixing and maintaining a mutual positional relationship of a spectroscopic element, a measurement unit for arranging a sample, and a fine unit for linearly or inclinedly moving the base unit with respect to the measurement unit. An adjustment unit is provided.
[0017]
By fixing and maintaining the mutual positional relationship between the polycapillary X-ray lens and the spectroscopic element with respect to the base part, the incident angle of the light emitted from the polycapillary X-ray lens to the spectroscopic element is always maintained at a predetermined angle, They can be moved together. The fine adjustment unit moves the base unit linearly or inclinedly with respect to the measurement unit. Thus, the position of the polycapillary X-ray lens and the spectroscopic element can be adjusted with respect to the sample placed in the measurement unit while maintaining the positional relationship, and the focal position of the polycapillary X-ray lens can be adjusted. The position can be adjusted to the analysis point position.
[0018]
The first mode of the fine adjustment unit is a configuration in which the base unit is fixed to the spectroscope main body, and the base unit and the spectroscope main body are connected to the measuring unit so as to be able to move linearly or incline. By adjusting the position of the base together with the spectroscope main body, the focal position of the polycapillary X-ray lens is adjusted to the position of the analysis point on the sample.
[0019]
In the second mode of the fine adjustment unit, the measurement unit is fixed to the spectroscope main body, and the base unit is connected to the spectroscope main body and the measurement unit so as to be able to move linearly or tiltably. By adjusting the position of the base with respect to the measuring unit, the focal position of the polycapillary X-ray lens is aligned with the position of the analysis point on the sample.
[0020]
According to the configuration of the present invention, the focal position of the polycapillary X-ray lens can be adjusted to the analysis point position only by the linear or inclined movement of the polycapillary X-ray lens. In adjusting the position of the polycapillary X-ray lens, since the positional relationship between the polycapillary X-ray lens and the spectroscopic element is fixed, the incident angle of the secondary X-ray on the spectroscopic element is invariable, and There is no need to adjust the angle of the spectral element every time.
[0021]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a schematic diagram for explaining a first configuration example of an X-ray spectrometer for microscopic analysis according to the present invention, and FIGS. 2 and 3 illustrate an adjustment operation by a fine adjustment unit of the first configuration example. FIG.
[0022]
The spectroscope 1 includes a polycapillary X-ray lens 2 that irradiates an X-ray or an electron beam to an analysis point of the sample 10 to convert a secondary X-ray excited and emitted at the analysis point into a parallel beam, An optical system including a spectroscopic element 3 for dispersing secondary X-rays incident from a capillary X-ray lens 2 and a detector 4 for detecting a wavelength component disperse by the dispersive element 3 is provided on a base unit 5.
[0023]
In the first configuration example shown in FIG. 1, the base section 5 is installed on the spectroscope main body 6, and the sample 10 is arranged inside. The spectroscope main body 6 is connected to the measuring unit 11 that emits secondary X-rays by irradiating X-rays or electron beams by a fine adjustment unit 7 so as to be able to move linearly or incline.
[0024]
In the measuring unit 11, when an X-ray or an electron beam is irradiated from a radiation source (not shown) to an analysis point on the sample 10, secondary X-rays are emitted at the analysis point by excitation by the irradiation. The polycapillary X-ray lens 2 converts the emitted secondary X-rays into a parallel beam and enters the spectral element 3. The spectroscopic element 3 splits the incident secondary X-ray, and the detector 4 detects the split wavelength.
[0025]
The fine adjustment unit 7 moves the spectroscope main body 6 linearly or obliquely with respect to the measurement unit 11 to adjust the focal position of the polycapillary X-ray lens 2 to the position of the analysis point.
[0026]
FIG. 2 shows an example of an operation of positioning by the fine adjustment unit 7. In FIG. 2, a fine adjustment unit 7 is a mechanism that adjusts the position of the spectroscope main body 6 by linear or inclined movement with respect to the measurement chamber 11 and adjusts the gap between the measurement chamber 11 and the spectroscope main body 6. 8 and perform linear or inclined movement by a drive mechanism (not shown).
[0027]
In FIGS. 2 and 3, it is assumed that the polycapillary X-ray lens 2 and the spectroscopic element 3 are initially at positions shown by solid lines in the drawing with respect to the measurement unit 11. At the position indicated by the solid line, the focal position B of the polycapillary X-ray lens 2 is deviated from the position A of the analysis point of the sample 10 arranged in the measuring unit 11. At this time, the secondary X-ray converted into a parallel beam by the polycapillary X-ray lens 2 is incident on the incident position b of the spectral element 3 at an incident angle θ.
[0028]
In order to align the focal position B of the polycapillary X-ray lens 2 with the position A of the analysis point on the sample 10 from the above state, the fine adjustment unit 7 linearly moves the spectroscope body 6 (in the figure). Arrow). When the spectroscope main body 6 is linearly moved (arrows in the drawing) by the fine adjustment unit 7, the base unit 5 on which the optical system including the polycapillary X-ray lens 2 is mounted moves linearly with respect to the sample 1 of the measurement unit 11. Thereby, the focal position B of the polycapillary X-ray lens 2 is aligned with the analysis point position A. The broken line in the figure shows the state of alignment.
[0029]
Since the positional relationship between the polycapillary X-ray lens 2 and the spectroscopic element 3 is fixed on the base section 5, the parallel beam converted by the polycapillary X-ray lens 2 enters the spectroscopic element 3 after the alignment. The incident position a is the same position on the spectral element 3 as the incident position b before the movement, and the incident angle is also the same angle θ. Therefore, the optical system does not change due to the alignment.
[0030]
As described above, according to this configuration example, the fine adjustment unit 7 moves the spectroscope main body 6 linearly with respect to the measurement unit 11 to move the focal position of the polycapillary X-ray lens 2 to the analysis point on the sample. Can be aligned to position.
[0031]
FIG. 2 shows an example in which the fine adjustment unit 7 linearly moves the spectroscope main body 6 in the horizontal direction (the direction of the arrow in FIG. 2) with respect to the measurement unit 11, and FIG. 6 shows an example in which the reference numeral 6 is linearly moved to the polycapillary X-ray lens 2 in a direction orthogonal to the length direction. The moving direction of the linear movement by the fine adjustment unit 7 is not limited to the above example, and may be any direction. Further, the adjustment can be performed not only by the linear movement but also by the inclined movement.
[0032]
FIG. 4 is a schematic diagram for explaining a second configuration example of the X-ray spectrometer for microscopic analysis according to the present invention, and FIG. 5 is a diagram for explaining the adjustment operation by the fine adjustment unit of the second configuration example. It is a schematic diagram.
[0033]
In the second configuration example shown in FIG. 4, the spectroscope main body 6 is coupled to the measurement unit 11, and the base unit 5 can be moved linearly or inclined with respect to the spectroscope main body 6 and the measurement unit 11 by the fine adjustment unit 7. I do.
[0034]
The fine adjustment unit 7 adjusts the focal position of the polycapillary X-ray lens 2 to the position of the analysis point by moving the base unit 5 linearly or obliquely with respect to the measurement unit 11 and the spectroscope main body 6.
[0035]
FIG. 5 shows an example of an operation of positioning by the fine adjustment unit 7. In FIG. 5, a fine adjustment unit 7 is a mechanism that adjusts the position of the base unit 5 by moving the position of the base unit 5 linearly or obliquely with respect to the measurement chamber 11 and the spectroscope main body 5. The unit 5 is connected to the unit 5 by a deformable member 8, and can be moved linearly or inclined by a drive mechanism (not shown).
[0036]
In FIG. 5, it is assumed that the polycapillary X-ray lens 2 and the spectroscopic element 3 are initially at positions shown by solid lines in FIG. At the position indicated by the solid line, the focal position B of the polycapillary X-ray lens 2 is deviated from the position A of the analysis point of the sample 10 arranged in the measuring unit 11. At this time, the secondary X-ray converted into a parallel beam by the polycapillary X-ray lens 2 is at the incident position b of the spectroscopic element 3 and is incident at an incident angle θ.
[0037]
In order to align the focal position B of the polycapillary X-ray lens 2 with the position A of the analysis point on the sample 10 from the above state, the fine adjustment unit 7 linearly moves the base unit 5 (see FIG. Arrow). When the base unit 5 is linearly moved by the fine adjustment unit 7 (arrow in the figure), the optical system including the polycapillary X-ray lens 2 linearly moves with respect to the sample 1 of the measurement unit 11, and thereby, the polycapillary X The focal position B of the line lens 2 is aligned with the analysis point position A. The broken line in the figure shows the state of alignment.
[0038]
Since the positional relationship between the polycapillary X-ray lens 2 and the spectroscopic element 3 is fixed on the base section 5, the parallel beam converted by the polycapillary X-ray lens 2 enters the spectroscopic element 3 after the alignment. The incident position a is the same position on the spectral element 3 as the incident position b before the movement, and the incident angle is also the same angle θ. Therefore, the optical system does not change due to the alignment.
[0039]
As described above, according to this configuration example, the focal position of the polycapillary X-ray lens 2 can be adjusted on the sample only by linearly moving the base unit 5 with respect to the spectroscope body 6 and the measuring unit 11 by the fine adjustment unit 7. Can be aligned with the position of the analysis point.
[0040]
FIG. 5 shows an example in which the fine adjustment unit 7 linearly moves the base unit 5 in a direction orthogonal to the length direction of the polycapillary X-ray lens 2. However, the present invention is not limited to this example, and may be any direction. In addition, the adjustment can be performed not by linear movement but by tilt movement.
[0041]
In each of the above configuration examples, the positional relationship of the optical system such as the positional relationship between the polycapillary X-ray lens and the spectroscopic element is fixed on the base unit, and does not change even when the focus position is adjusted by the fine adjustment unit. The focus position can be adjusted without adjusting the optical conditions of the spectroscope.
[0042]
In addition, by using the X-ray spectrometer for microscopic analysis of the present invention, for example, the sample is irradiated with an X-ray or an electron beam with a wide diameter to excite the sample over a wide area. Adjust the optical conditions so that the secondary X-rays emitted from the sample are always incident on the polycapillary X-ray lens 2 and then narrow down the diameter of the irradiated X-rays or electron beams to a small diameter to obtain the target analysis point. Excitation of the minute part of the optical system and fine adjustment of the positional relationship between the optical system and the analysis position by the fine adjustment unit of the present invention perform the optical condition adjustment and the position adjustment more easily and in a shorter time than before. be able to.
[0043]
【The invention's effect】
As described above, according to the present invention, in a spectroscope including a polycapillary X-ray lens, it is possible to adjust the focal position without changing optical conditions.
[Brief description of the drawings]
FIG. 1 is a schematic diagram illustrating a first configuration example of an X-ray spectrometer for microscopic analysis according to the present invention.
FIG. 2 is a schematic diagram for explaining an adjustment operation by a fine adjustment unit of the first configuration example of the present invention.
FIG. 3 is a schematic diagram for explaining another adjustment operation by the fine adjustment unit of the first configuration example of the present invention.
FIG. 4 is a schematic diagram for explaining an adjustment operation by a fine adjustment unit according to a second configuration example of the present invention.
FIG. 5 is a diagram showing an example of an operation of alignment performed by the fine adjustment unit of the present invention.
FIG. 6 is a configuration example of a spectroscope including a conventional solar unit.
FIG. 7 is a configuration example of a conventional spectroscope including a curved crystal.
FIG. 8 is a configuration example of a conventional spectroscope provided with a polycapillary X-ray lens.
FIG. 9 is a view for explaining positioning of a spectroscope provided with a conventional polycapillary X-ray lens.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Spectroscope, 2 ... Polycapillary X-ray lens, 3 ... Spectral element, 4 ... Detector, 5 ... Base part, 6 ... Spectroscope main body, 7 ... Fine adjustment part, 8 ... Deformable member, 9 ... Fine adjustment Part, 10 sample, 11 measurement part, 100 sample, 101 spectroscope, 102 solar unit, 103 spectral element, 104 detector, 111 spectrometer, 113 curved crystal, 114 detector 121: spectroscope, 122: polycapillary X-ray lens, 123: spectral element, 124: detector, A: analysis position, B: focal position.

Claims (4)

An X-ray spectrometer for microscopic analysis for dispersing secondary X-rays emitted from an analysis point of a sample,
A spectroscopic element, and an optical system including a polycapillary X-ray lens that causes secondary X-rays emitted from the analysis point to enter the spectroscopic element,
The polycapillary X-ray lens and the spectral element fix the mutual positional relationship such that the incident angle of the light emitted from the polycapillary X-ray lens with respect to the spectral element becomes a predetermined angle,
The X-ray spectrometer for analyzing a minute part, wherein the polycapillary X-ray lens and the spectroscopic element can be moved linearly or inclined integrally with the position of the analysis point. A base portion for fixing and holding a mutual positional relationship between the polycapillary X-ray lens and the spectral element;
A measuring unit for placing a sample,
2. The X-ray spectrometer for analyzing a minute part according to claim 1, further comprising: a fine adjustment part that moves the base part linearly or inclinedly with respect to the measurement part. The base is fixed to the spectroscope body,
The said fine adjustment part adjusts the position of a base part with respect to a measurement part by connecting the said spectroscope main body so that linear movement or inclination movement is possible with respect to the said measurement part, The Claim 2 characterized by the above-mentioned. X-ray spectrometer for microscopic analysis. The measurement unit is fixed to the main body of the spectroscope,
The said fine adjustment part adjusts the position of the base part with respect to a measurement part by connecting the said base part so that linear movement or inclination movement is possible with respect to a spectroscope main body and a measurement part, The characteristic is characterized by the above-mentioned. The X-ray spectrometer for micropart analysis described in the above.

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