JP2004288504A - Charged particle beam device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To realize a charged particle device capable of easily recognizing a state of progress of a working process, and where an error, if any, occurs. <P>SOLUTION: A working process is divided into groups (POSITION 1, POSITION 2, POSITION 3) in compliance with the kinds of works, and displayed in layered sequence (Catalog 1 to 3) of the start of a treatment, or by discriminating between a pretreatment (FABRICATION 1 to 3) and an actual work treatment (SPUTTER 1), and whether it is before practice, or in practice, or after practice, and whether an error has occurred or not, is discriminated and displayed. By the above, an operator can easily recognize the state of progress of the working process, and the position of the error in case it occurs. As a temporal suspension of a process (SUSPENSION) is defined and inserted between a certain process and a succeeding process, an additional process can be easily inserted after the temporal suspension. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a charged particle beam apparatus, and more particularly, to a screen display during processing and setting of processing.
[0002]
[Prior art]
Among the charged particle beam apparatuses, for example, in a focused ion beam processing apparatus, a processing alignment step, an adjustment step following other conditions, and actual operations such as stutter pattering performed after this adjustment step are performed. May be present in plural types.
[0003]
In the related art, each of the above-described processing alignment steps is displayed on the display screen as one continuous processing step type including a subsequent processing step in a list format. Then, the type of the machining process that has been processed and has been completed is displayed on the display screen so that the type of the processed process can be determined (the display of the type of the processed process that has been completed and has been completed is a status display).
[0004]
The display method on this display screen is a processing step type name fixed to the apparatus, and the status display during processing indicates that the processing is being performed by inverting the data, and is indicated by the processing step type. Displayed only the status of processing in progress or processing completed.
[0005]
In addition, when performing a plurality of types of machining continuously, a flow of a series of machining steps is created, and machining is performed in accordance with the machining process. However, during the machining, it may be necessary to perform additional machining. There is.
[0006]
When performing additional processing, the operator instructs the processing apparatus to temporarily stop the processing currently being performed, and then instructs the processing apparatus to perform additional processing.
[0007]
As a known technique of the focused ion beam apparatus, there is a technique described in Patent Document 1.
[0008]
The technology described in Patent Document 1 relates to an unmanned processing apparatus that automatically sequentially processes a plurality of registered processing patterns, and continuously discharges ions even when processing is completed in the middle of the night. This prevents the ionic material from decreasing.
[0009]
In other words, before the start of processing, the ion emission state after the end of processing is registered, and by registering the ion emission as off, when the processing of ion emission is completed during consecutive nights, ion emission is also stopped, and ion emission is stopped. This is a technique to prevent material reduction.
[0010]
[Patent Document 1]
JP-A-11-144669
[0011]
[Problems to be solved by the invention]
By the way, in a charged particle beam apparatus such as a focused ion beam, when performing continuous processing, it often takes time, and therefore, it is usual for an operator to perform another operation at a place away from the apparatus.
[0012]
In this case, after a certain amount of time has passed, the operator needs to confirm the progress of processing and the like on the display screen.
[0013]
At that time, in the above-described conventional technology, since the status indicated by the processing step type only indicates the status of processing in progress or the end of processing, it is possible to determine how far processing has progressed within the processing step type. It was difficult, and during processing, it was also difficult to determine the required elapsed time until the next confirmation.
[0014]
Further, when an error has occurred during machining, it is possible to display the occurrence of the error, but it was difficult to determine where the error occurred in the machining process type.
[0015]
In addition, during the execution of the machining process, if the machining requires precision or if it is necessary to perform additional machining, the machining in progress must be stopped. It was difficult to determine if he was out.
[0016]
For this reason, when performing additional processing or the like, it is necessary to change or reset the processing conditions and the like (movement of the stage, setting of the deflection position of the beam, processing conditions and the like), and rework from the initial processing step. When creating a flow of a series of machining including additional machining, it is created by combining the file names of registered individual machining processes, and the work is complicated and sometimes it can not be completed in a short time Many.
[0017]
Therefore, in the prior art, the above-mentioned problem has hindered the improvement of the processing efficiency.
[0018]
An object of the present invention is to realize a charged particle beam apparatus that allows an operator to easily recognize how far processing has progressed in a processing step and where an error has occurred when an error has occurred.
[0019]
[Means for Solving the Problems]
In order to achieve the above object, the present invention is configured as follows.
(1) A charged particle beam optical system for irradiating a charged particle beam, a detector for detecting a secondary charged particle generated from an irradiation target of the charged particle beam, and a secondary charged particle detected by the detector In the charged particle beam apparatus comprising an image display means for forming a charged particle image based on the, a plurality of types of processing is grouped by processing type, for each within one group, the order is set in the processing order, For each processing, whether the processing is before the processing, during the processing, or when the processing is completed is displayed on the image display means.
[0020]
(2) Preferably, in the above (1), it is displayed whether or not an error has occurred for each of the processings, and whether the processing has not been completed, is being processed, has been completed, or an error has occurred. The status display of whether or not the status has been displayed is displayed in a tree structure, and a color determined for each of the status displays is displayed.
[0021]
(3) Preferably, in the above (1) and (2), the name of the processing is arbitrarily set, and the name of the processing is displayed on the display means.
[0022]
(4) Preferably, in the above (1), (2), and (3), the processing is started from the processing specified via the display among the plurality of processing displayed on the display. Then, the processing is ended from the specified processing.
[0023]
(5) Preferably, in the above (1) and (4), the processing includes temporarily stopping the processing.
[0024]
(6) Preferably, in the above (1) and (5), the set groups and the order of the processing order are stored in the storage means, and the selected plural or singular processing is combined. , A new processing group is set and stored in the storage means.
[0025]
(7) Also, preferably, in the above (1), a mark determined for each state display is displayed.
[0026]
(8) Preferably, in (3), by designating the display area of the processing name by the specifying means, the processing content of the specified processing name is displayed on the display means.
[0027]
(9) A charged particle beam optical system for irradiating a charged particle beam, a detector for detecting a secondary charged particle generated from an irradiation target of the charged particle beam, and a secondary charged particle detected by the detector Image display means for forming a charged particle image based on the image data, and image display processing control means for controlling the operation of the charged particle beam optical system and the detector and controlling the screen display of the image display means. In the particle beam apparatus, in the computer program for image control, a plurality of types of processing are grouped by processing type, and within one group, the charged particle beam based on data in which the order is set in the processing order. The operations of the optical system and the detector are controlled, and according to the control operation, before each processing, during the processing, or at the end of the processing for each processing. Or the to be displayed on said image display means.
[0028]
ADVANTAGE OF THE INVENTION According to this invention, the set processing order is displayed visually intelligibly to an operator, and the operation procedure at the time of multiple continuous processing is simplified.
[0029]
That is, the set processing order is sequentially displayed using, for example, a tree structure or the like, such as stage movement, beam change position, and processing. In addition, a pause function has been added, color display etc. is performed for each status such as processing, processing end, pause, error occurrence, stage position information, beam deflection position, processing conditions are filed respectively, and the file is sequentially Describe in.
[0030]
This realizes a charged particle beam apparatus that allows an operator to easily recognize how far the processing has progressed in the processing process and, if an error has occurred, where the processing has occurred.
[0031]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a schematic configuration diagram of a charged particle beam apparatus to which one embodiment of the present invention is applied.
[0032]
In FIG. 1, a sample 3 is irradiated with a focused beam 2 from a charged particle beam optical system 1. The sample 3 is mounted on a sample stage 4, and the sample stage 4 can move in three axial directions of x, y, and z directions, and can move in the rotation direction of the sample stage 4 itself. It is possible to observe and process substantially any part of the sample 3 from an arbitrary angle.
[0033]
For observation, secondary charged particles generated from the sample 3 are detected by the detector 5, and the image display and processing setting device 6 images the sample 3 with the detected charged particles. Then, while observing the image display device 6 by an operator or automatically, the observation region and the processing region of the sample are determined, and the control of the charged particle beam optical system 1 is performed via the linked beam deflection control device 7. I do.
[0034]
In the processing, the beam 2 focused from the charged particle beam optical system 1 is irradiated to an arbitrary position of the sample 3 to perform sputtering for shaving the sample 3 and using a tungsten compound gas or a carbon compound gas as a gas source 9. There is a deposit that releases a gas to the vicinity of the sample 3 by the nozzle 8 to form a film on the sample 3.
[0035]
The processing is set by the processing setting device 6. In other words, the sample stage 4 is moved while looking at the secondary charged particles displayed in the image, the deflection area of the beam 2 is designated, and the position where the beam is actually applied is determined using the figure on the sample stage 4.
[0036]
After the processing area is determined, the beam, beam diameter, irradiation time, etc., conditions such as sputtering / deposition, etc. actually used for processing are designated, and processing is performed under the designated conditions.
[0037]
Here, the processing conditions such as the beam irradiation position figure and the beam deflection area are filed (hereinafter referred to as a tertiary catalog), and the created files are listed in the processing order and the stage stop position. Each file is made into a file (hereinafter referred to as a secondary catalog).
[0038]
At this time, the secondary and tertiary catalog names are set to arbitrary names that can be understood by the operator, and the respective catalogs are classified by the system by adding respective extensions.
[0039]
Also, the moving position of the stage 4 is filed (hereinafter, referred to as a primary catalog), and when "SUSPEND" indicating a processing suspension process is displayed, the primary, secondary, and tertiary catalogs are filed according to the registered position. Will be done.
[0040]
In order to perform these multiple processes at once, a recipe is created.
FIG. 2 is a diagram showing an example of the above recipe. The recipe shown in FIG. 2 lists the primary and secondary catalogs in the order of processing. In FIG. 2, “POSITION” indicates a movement position, and “FABRICATION” indicates a pre-machining process following the movement. Also, a “SUSPEND” command indicating a suspension of the process is prepared.
[0041]
By creating a catalog in this way, it is possible to use it in a plurality of recipes. As described above, a series of processing shows a process flow of moving the stage, instructing a processing area, and irradiating a beam according to processing conditions.
[0042]
Therefore, in the created recipe, the primary catalog is considered as a set of secondary and tertiary catalogs, and the secondary catalog is considered as a set of tertiary catalogs. The recipe is created by using the tree structure of the box 10 as shown in FIG.
[0043]
When creating a recipe, each catalog is displayed in another window on the display screen, and first, the primary catalog is selected and dragged. Next, the secondary catalog is dragged to the primary catalog in which the secondary catalog is to be included, so that a primary-secondary relationship is created.
[0044]
For example, if it is desired to include the secondary catalog "FABRICATION1" in the primary catalog "POSITION1", dragging "FABRICATION1" to "POSITION1" will result in a display as shown in FIG. It is displayed separately from the display column of Catalog 2 (Catalog 2).
[0045]
Regarding the tertiary catalog, the relationship with the secondary catalog is created in the same manner as the relationship between the secondary catalog and the primary catalog. That is, the recipe information is displayed such that the primary catalog is at the top, the secondary catalog is at the middle, and the tertiary catalog is at the bottom. Note that the recipe can be edited by the same operation as the recipe creation.
[0046]
In FIG. 3, the default display shows the primary catalog box in a tree structure. The secondary catalog and the tertiary catalog are not normally displayed, but clicking the +/- symbol 12 displays a hierarchical box such as a secondary catalog and a tertiary catalog.
[0047]
In the example shown in FIG. 3, "POSITION1" is displayed in the primary catalog, and "FABRICATION1" and "SUSPEND" are displayed in parallel in the secondary catalog as a lower process (next process) of this "POSITION1". Is done.
[0048]
Also, “POSITION 2” is displayed in the primary catalog, and “FABRICATION 2” and “FABRICATION 3” are displayed in the secondary catalog as lower processing (next processing) of this “POSITION 2”. Then, “SPUTTER1” and “SUSPEND” are displayed in the tertiary catalog as lower processing of “FABRICATION2”.
Further, “POSITION 3” is displayed in the primary catalog.
[0049]
By displaying in this manner, the sequence of a series of processing can be easily and visually understood. Also, by coloring or marking the box 10 according to the catalog, it is possible to visually understand what catalog the box represents next.
[0050]
A plurality of types of recipes created as described above can be stored in an appropriate storage unit. Then, the processing is executed according to the recipe selected from the plurality of types of stored recipes. Depending on the selected recipe, the default is to execute from the beginning to the end of the processing. However, if an arbitrary box is specified as the start position, it is possible to specify that only the box after that box is processed. As for the end, processing end processing can be performed in the designated box.
[0051]
FIG. 4 is a diagram illustrating an example of a status table stored in the storage unit. The status table has three types of information: group information 13, catalog information 14, and status information 15.
[0052]
In the group information 13, a group of processes from the stage movement to the next stage movement is regarded as one group.
[0053]
The catalog information 14 is denoted by reference numeral 1 for a primary catalog, denoted by reference numeral 2 for a secondary catalog, and denoted by reference numeral 3 for a tertiary catalog.
[0054]
However, the sign is set to 0 for the stage movement. When the processing by the recipe is actually started, the status information 15 is stored in the status table corresponding to one processing of the recipe.
[0055]
The types of status information 15 include processing (2), normal termination (0), error termination (-1), and unexecuted (1). The status information 15 corresponds to blue, yellow, red, and white, respectively. Then, the color is displayed in the status display area 11 of the box 10.
[0056]
As a result, the operator can easily understand at a glance, "Where is the box 10 currently being executed, what is the state of each process, and whether or not there is."
[0057]
When the recipe is created, the "SUSPEND" process is inserted as appropriate, and when the "SUDPEND" process is performed, the operation of the apparatus is temporarily stopped, and semi-automatic processing such as confirmation of the processing state by the operator and additional processing manually can be performed. Become.
[0058]
Further, unless a "SUSPEND" process is inserted at the time of creating a recipe, a primary stop state is not caused by the process and a fully automatic process can be performed by the apparatus.
[0059]
The display box 10 of each catalog can display its detailed processing contents in another window by clicking with a mouse.
Next, embodiments of the present invention will be described in more detail.
[0060]
[First Embodiment]
As a first embodiment of the present invention, an example of creating a processing recipe and displaying a recipe screen on a charged particle device will be described.
[0061]
First, as actual processing types, sputtering 1, 2, 3, 4, 5, 6, 7, and deposits 1, 2, and 3 are used as tertiary catalogs, and Splitter_A1_1, Sputter_A1_2, Sputter_A2_1, Sputter_A2_2, Sputter_B1_1, Sputter_B1, respectively. Names Sputter_B1_3, Depo_A1_1, Depo_B1_1, and Depo_B1_2 are stored in the storage unit.
[0062]
In addition, as a secondary catalog, processing A1 was made into sputtering 1, deposit 1, and sputtering 2, processing A2 was made as sputtering 3 and sputtering 4, and processing B was made as deposit 2, sputtering 5, deposit 3, sputtering 6, and sputtering 7, Names Fabrication_A1, Fabrication_A2, and Fabrication_B are stored in the processing order.
[0063]
Further, as the primary catalog, the stage positions A and B are respectively named as Position_A and Position_B and stored.
[0064]
As the processing operation, the process moves to the stage position A, performs the processes A1 and A2, then moves to the stage position B, and creates a recipe (recipe AB) assuming that the process B is performed.
[0065]
At this time, a pause is always made before and after the deposit processing.
FIG. 5 is a diagram showing the recipe AB in the above-described processing.
[0066]
FIG. 6 is a diagram showing a display screen example of the above-described recipe AB. The processing box 10 displays the catalog name used here.
[0067]
In FIG. 6, "POSITION A" is displayed in the primary catalog, and "FABRICATION A1" and "FABRICATION A2" are displayed in parallel in the secondary catalog as a lower process of "POSITION A". Also, “Sputer A2 1” and “Sputter A2 2” are displayed in parallel in the tertiary catalog.
[0068]
Further, “POSITION B” is displayed in the primary catalog, and “FABRICATION B” is displayed in the secondary catalog as a lower process of “POSITION B”. Then, as lower-order processing of this “FABRICATION B”, “SUSPEND 3”, “Depo B1 1”, “SUSPEND 4”, “Sputter B1”, “Sputter B2”, “SUSPEND 5”, and “Depo B1 2” are stored in the tertiary catalog. "," SUSPEND 6 ", and" Sputer B3 "are displayed.
[0069]
When the recipe AB is displayed, a status table for the recipe AB is created.
FIG. 7 is a diagram showing a status table of the recipe AB before processing.
6 and 7, the group information 13 includes Position_A, Fabrication_A1 (Sputter_A1_1, SUSPEND1, Depo_A1_1, SUSPEND2, Sputter_A1_2), and Fabrication_A2 (Sputer_A2_1 and Apt2_A2_A2_1).
[0070]
In addition, Position_B, Fabrication_B (SUSPEND3, Depo_B1_1, SUSPEND4, Sputter_B1_1, SUSPEND5, Depo_B1_2, SUSPEND6, Sputter_B1_2, Sputter_B1 to be a group of Sputter_B1).
[0071]
Further, as the catalog information 14, Position A and Position B become "0", Fabrication A1, Fabrication A2, and Fabrication B become "2", and Sputter A21, Sputter A22, SUSPEND 3, DepoSPEB and DepoSPE1. , Sputter B1, Sputter B2, SUSPEND 5, Depo B12, SUSPEND 6, and Sputter B3 are “3”.
[0072]
Before the start of the processing, the status information of all the catalogs is "1" indicating that execution has not been performed.
[0073]
Next, a description will be given of a case where machining is started with Fabrication A2 as the machining start and Sputter B2 as the machining end.
First, the stage is moved to the position of Position_A, and after Sputter A21 is processed, Sputter A22 is processed. Next, the stage is moved to the position of Position B, and the stage is suspended (SUSPEND3).
[0074]
At this time, Position_A indicates that processing is completed normally, Fabrication A1 (Sputter A11, SUSPEND 1, Depo A11, SUSPEND 2, Sputter A12) is not executed, Fabrication A2, SputterA2, and SutterA2, Indicates that the processing has been completed normally.
[0075]
Also, Position B, Fabrication B, and SUSPEND 3 are displayed as being executed, Depo B1 1, SUSPEND 4, Sputter B1, Sputter B2, SUSPEND 5, Depo B12, SUSPEND 6, and Sputer are not displayed.
[0076]
Here, since the apparatus is in the temporary stop (SUSPEND3) state, when the operator manually instructs the processing to be resumed, the apparatus performs Depo B11 and then temporarily stops (SUSPEND 4). In this temporary stop (SUSPEND 4) state, it is also possible to perform additional deposit processing.
[0077]
Then, in the same manner as described above, when the operator issues a restart instruction, when the execution of the Sputter B1 and the Sputter B2 ends, the processing based on the recipe ends.
[0078]
At this time, Position A indicates that the processing has been completed successfully, Position A indicates that processing has been completed, Fabrication A1 (Sputter A1, SUSPEND 1, Depo A11, SUSPEND 2, Sputter A1 2) has not been executed, and Fabrication A2, SputterA2, SputterA2, SputterA2 2 indicates that processing has been completed successfully, Position B, Fabrication B, SUSPEND 3, Depo B1, 1, SUSPEND 4, Sputter B1, and Sputter B2 indicate that processing has been completed successfully, and SUSPEND 5, Depo B1 2, and SUSPEND not displayed. It becomes.
[0079]
If some error occurs in the processing of Sputter A21 and the processing cannot be performed or the processing is completed in the middle, the status of Sputter A21 becomes -1 and the display color becomes "red". FIG. 8 is a diagram showing a status table of the processed recipe AB.
[0080]
As described above, according to the first embodiment of the present invention, the machining processes are grouped according to the machining types, and the process start order or the pre-process and the actual process are distinguished and displayed in a hierarchical manner. Is configured to display separately before, during, during or after execution, or when an error has occurred, so how far the machining is progressing in the machining process or if an error occurs Thus, it is possible to realize a charged particle beam device that allows an operator to easily recognize where the light beam has occurred.
[0081]
In addition, since the pause process is inserted and defined between a certain process and the next process, it is possible to easily insert an additional process after the pause.
[0082]
[Second embodiment]
As a second embodiment of the present invention, an example of creating a length measurement recipe and displaying a recipe in a charged particle device will be described.
[0083]
Measurement points 1, 2, 3, 4, 5, 6, and 7 are used as tertiary catalogs, and named and stored as Measurement C1, Measurement C12, Measurement C13, Measurement C14, Measurement D11, and Measurement D12, respectively. Keep it.
[0084]
Then, the length measurement C1 is the side length processing of the length measurement point 1, the length measurement point 2, the length measurement point 3, and the length measurement point 4, and the length measurement D1 is the side of the length measurement point 5, the length measurement point 6, and the side length turn 7. Long processing is performed, and in this order, as a secondary catalog, the names of “Measure C1” and “Measure D1” are respectively stored.
[0085]
The stage positions C and D are stored as primary catalogs, named Position C and Position D, respectively.
[0086]
In the processing, the stage is moved to the stage position C, the length measurement C1 is performed, and then, the stage is moved to the stage position D, and a recipe (recipe CD) is created assuming that the length measurement D1 is performed. At this time, a pause is always made before the measurement point is designated.
[0087]
FIG. 9 is a diagram showing the processing recipe CD at this time. Then, the length measurement process is performed according to the processing recipe CD.
[0088]
FIG. 10 is a diagram showing a process display screen of the recipe CD. The processing box 10 displays the catalog name used here. At this point, a status table for the recipe CD is created. This status table has a format similar to that shown in FIG.
[0089]
Position C, Measure C1 (SUSPEND 1, Measure C1, SUSPEND 2, Measure C12, SUSPEND 3, Measure C1, SUSPEND 4, Measure C1 4), Group 1, Positive Measure, Positive Measure D , SUSPEND 6, and Measure D1 2) are group 2.
[0090]
The catalog information is “Position C”, “Position D” is “0”, Measurement C1 and Measurement D1 are “1”, Measurement C1, Measurement C1 2, Measurement C1 3, Measurement C1 4, Measurement D1 3 and Measurement D1 1 and Measure D1 1. It becomes. Before the start of the measurement, the statuses of all the catalogs are not executed “1”.
[0091]
The operation display and the status change display during the processing are the same as in the first embodiment.
[0092]
In the second embodiment of the present invention, the same effect as in the first embodiment can be obtained.
[0093]
[Method of Creating / Editing Recipe of Charged Particle Device in Embodiment of the Present Invention]
A method for creating / editing a recipe for a charged particle device according to an embodiment of the present invention will be described.
First, a plurality of types of catalogs 1, 2, and 3 are created in advance. FIG. 11 is a diagram showing a recipe creation display screen. From the created catalog 1 (catalog 11, catalog 12, catalog 13), drag the necessary catalog to the recipe name with a mouse. With this operation, the recipe selected in the catalog 1 is added to the recipe.
[0094]
Next, necessary items are dragged from catalog 2 (catalog 21 to catalog 26) to a box of catalog 2 set in the recipe with a mouse.
[0095]
Similarly, necessary items are dragged from the catalog 3 (catalog 31 to catalog 39) to the box of the catalog 3 set in the recipe with the mouse.
[0096]
A group is created by the above operation, and when another group is required, a recipe is created by selecting from the catalogs 1 to 3.
[0097]
FIG. 12 is a diagram illustrating an example of a test recipe in which Catalog 1 is selected from Catalog 1, Catalog 2 is selected from Catalog 2, Catalog 31 and Catalog 3 are selected from Catalog 3, and one group is formed.
[0098]
At this time, the box lines of the catalog 1 are displayed in different colors, such as blue, the box lines of the catalog 2 are green, and the box lines of the catalog 3 are purple. Or, in the upper left part of the box, catalog 1 is indicated by ○, catalog 2 is indicated by Δ, and catalog 3 is? Displays a mark such as display. Clicking on this box with the mouse displays the catalog details in text-based format.
[0099]
Clicking on the box 10 causes the detailed contents of the process displayed in the box to be displayed in another window. For example, when the user clicks on a box labeled "POSITION 1", processing contents such as "move to stage position A" are displayed.
[0100]
FIG. 13 is a diagram showing a display screen at the time of editing. As shown in FIG. 13, with regard to editing, a delete menu is displayed by left-clicking the mouse on the box to enable deletion. Addition can be performed by the same operation as that at the time of creation.
[0101]
As described above, by setting and processing the recipe as described above, the following effects (1) to (9) can be obtained.
[0102]
{Circle around (1)} By creating a detailed catalog, it can be reused for a plurality of recipes, and the time and labor for the creation operation can be reduced as compared with the case of creating each time. Further, even when the beam irradiation positions are the same and the processing conditions are different, it is possible to create a recipe by changing only the combination.
[0103]
{Circle around (2)} By displaying the processing in a tree structure in the processing based on the recipe, the operator can easily understand visually.
[0104]
(3) By having a status for each process, when the process is started, the status of each process can be easily determined. In addition, by displaying them in different colors, they can be visually understood.
[0105]
(4) By arbitrarily assigning a catalog name, the operator can determine what processing is to be performed by the name.
[0106]
(5) By attaching a color or a mark defined for each process to the display box of the catalog, the operator can visually determine what process to perform by name.
[0107]
{Circle around (6)} The processing can be started and ended from an arbitrary position in the recipe, and one recipe can also serve as a large number of recipes, so that the recipe creation operation can be simplified.
[0108]
{Circle around (7)} By specifying the pause processing, full-auto processing and semi-auto processing can be performed by one recipe. As a result, the recipe is automatically stopped at a necessary time without stopping the recipe by the stop processing, and at that time, the processing can be confirmed and additional processing can be performed manually.
[0109]
{Circle around (8)} The recipe can be created and edited only by operating the mouse, and the operator can easily create and edit the recipe.
[0110]
(9) Since the details of the process can be confirmed by clicking the created recipe box with the mouse, it is possible to easily cope with the confirmation at the time of editing.
[0111]
As a result of the above effects, the present invention can improve the operability of the operator by the charged particle beam device, and can improve the throughput.
[0112]
In the above-described example, the processing boxes are displayed on the screen in a tree structure. However, the processing boxes are not limited to the tree structure, and may be displayed by other methods. For example, a branch number may be assigned to each catalog, and the processing may be displayed in rows or columns for each group. In other words, any order may be provided as long as an order is provided for each processing, and a step display or a hierarchical display is performed based on the order.
[0113]
Further, as another embodiment of the present invention, since the image display processing setting device 6 is constituted by a computer, there is an operation control and image display program for the computer.
[0114]
That is, the image display processing setting device (image display processing control means) controls the operation of the charged particle beam optical system and the secondary charged particle detector and controls the screen display. There is.
[0115]
A plurality of types of processing are grouped for each processing type, and in each group, data in which an order is set in the processing order is stored in the storage means, and the computer program includes a charged particle beam optical system. And controlling the operation of the detector, and displaying, on the image display means, before the processing, during the processing, or after the processing for each processing according to the control operation. It is.
[0116]
This computer program also performs display control in the above-described embodiment.
[0117]
【The invention's effect】
According to the present invention, it is possible to realize a charged particle beam apparatus that allows an operator to easily recognize how far processing has progressed in a processing process, and where an error has occurred, where the error has occurred.
[0118]
Further, it is possible to easily create a recipe in the charged particle beam device, to improve the operability and visibility of the operator during execution of the recipe, and to improve the throughput.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram of a charged particle beam apparatus to which the present invention is applied.
FIG. 2 is a diagram illustrating an example of a recipe file.
FIG. 3 is a diagram showing a display example of a recipe screen at the time of processing using a recipe.
FIG. 4 is a diagram showing a status table.
FIG. 5 is a diagram showing a recipe AB file.
FIG. 6 is a diagram showing a screen display example of a recipe AB.
FIG. 7 is a diagram showing a status table of a recipe AB before processing.
FIG. 8 is a diagram showing a status table of a processed recipe AB.
FIG. 9 is a diagram showing a recipe CD file.
FIG. 10 is a diagram showing a display screen of a recipe CD.
FIG. 11 is a diagram showing a recipe creation screen.
FIG. 12 is a diagram showing a screen after a recipe is created.
FIG. 13 is a diagram showing a screen at the time of editing a recipe.
[Explanation of symbols]
1 charged particle beam optical system
2 Focused beam
3 samples
4 Sample table
5 Secondary charged particle detector
6 Image display and processing setting device
7 Beam scanning controller
8 Gas jet nozzle
9 Gas source
10 Processing box
11 Status display area
12 +/- symbol display
13 Group information
14 Catalog Information
15 Status information

Claims (9)

Based on a charged particle beam optical system for irradiating a charged particle beam, a detector for detecting secondary charged particles generated from an irradiation target of the charged particle beam, and a secondary charged particle detected by the detector. A charged particle beam apparatus comprising image display means for forming a charged particle image,
A plurality of types of processing are grouped for each processing type, and the order of the processing is set for each group, and for each processing, whether the processing is before the processing, during the processing, A charged particle beam apparatus, wherein whether the processing is completed is displayed on the image display means. 2. The charged particle beam apparatus according to claim 1, wherein whether an error has occurred for each of the processings is displayed, and whether an error has occurred before the processing, during the processing, when the processing has been completed, or not. A charged particle beam apparatus characterized by displaying a status display in a tree structure and displaying a color determined for each status display. 3. The charged particle beam apparatus according to claim 1, wherein a name of the processing is arbitrarily set and the set processing name is displayed on the display means. 4. The charged particle beam apparatus according to claim 1, wherein the processing is started from a processing specified through the display among the plurality of processings displayed on the display. 5. A charged particle beam apparatus, wherein the processing is terminated from a designated processing. 5. The charged particle beam apparatus according to claim 1, wherein the processing includes temporarily stopping the processing. 6. The charged particle beam apparatus according to claim 1, wherein the set groups and the order of the processing order are stored in a storage unit, and a new processing is performed by combining a selected plurality or a single processing. A charged particle beam apparatus, wherein a group is set and stored in the storage means. 2. The charged particle beam apparatus according to claim 1, wherein a mark defined for each of said state displays is displayed. 4. The charged particle beam apparatus according to claim 3, wherein a processing area of the specified processing name is displayed on the display means by designating a display area of the processing name by a specifying means. Particle beam device. Based on a charged particle beam optical system for irradiating the charged particle beam, a detector for detecting secondary charged particles generated from an irradiation target of the charged particle beam, and a secondary charged particle detected by this detector A charged particle beam apparatus comprising: image display means for forming a charged particle image; and image display processing control means for controlling the operation of the charged particle beam optical system and the detector and for controlling the screen display of the image display means. In the image control computer program,
A plurality of types of processing are grouped for each processing type, and within each group, based on data in which the order is set in the processing order, based on the operation of the charged particle beam optical system and the detector, An image control computer program for causing the image display means to display, for each processing, whether the processing is before the processing, during the processing, or when the processing is completed in accordance with a control operation.

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