JPH10321177A - Device state display method for electron beam device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device state display method for an electron beam device always observing the device state of the electron beam device without adding any display device. SOLUTION: In a display method of a monitor 2 provided on a control device 1 connected to an electron beam device (an electron beam microanalyzer 4), first display area 21 capable of switching display display contents and a second display area 22 independent of the first display area 21 are formed on the same display screen by a monitor 2, and the device state of the electron device 4 is always displayed on the second display area 22. Thereby the device state of the electron beam device can be always observed without adding any display device.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron beam apparatus such as an electron beam microanalyzer and a scanning electron microscope, and more particularly to a display method for displaying the state of an electron beam apparatus.

[0002]

2. Description of the Related Art In an electron beam apparatus such as an electron beam microanalyzer or a scanning electron microscope, various data such as the degree of vacuum of the electron beam apparatus and the acceleration voltage of the electron beam source are known in order to know the operating state of the electron beam apparatus. Need to be displayed. Conventionally, in order to display the device status of such an electron beam device, a dedicated display unit is used, or in the case of an electron beam device having a device control computer, the device status display connected to the computer is used. Monitor. In addition to the display on the dedicated display unit or monitor, the analysis is also performed by displaying or recording the measured data on a monitor or a printer, or by visually observing the operation of the mechanical drive unit of the electron beam device. It is possible to know the state of the inside device to some extent.

In such a display method using a dedicated display unit or a device status display monitor connected to a device control computer, only the device status of the electron beam device can be displayed. There is a problem that a dedicated display device is required, and there is also a problem that the entire electron beam device becomes large. In addition, the method of indirectly knowing the measurement state based on the measurement data or the operation of the driving unit has a problem that the measurement state cannot be quickly and precisely known.

On the other hand, recent computer systems use OS
With the improvement of performance such as multitasking and networking, the analysis operation of the electron beam device and the data analysis are processed in parallel, or the electron beam device and the computer are connected by a network, so that they can be installed at remote locations It is also possible to perform data processing such as data analysis on a computer that has been made, and to display a plurality of display contents on a single display screen using a window display.

Therefore, a method of displaying a plurality of display contents on one display screen by using a window display is also adopted in an electron beam apparatus.

[0006]

However, when the analysis operation and the data analysis are performed in parallel on a single computer, a window for the analysis operation and a window for displaying the device data are provided to facilitate the computer operation. Processing such as iconizing the window is performed, and only the window is displayed on the display screen during the processing, and the other windows are hidden in the background. Therefore, in order to know the state of the electron beam apparatus and the progress of the measurement, an operator's operation is required each time, and the operation is complicated.

[0007] When the analysis is performed for a long time by the electron beam apparatus, the operator monitors the display screen only when necessary, and usually moves away from the computer. In such a case, an erroneous operation by another operator may occur, and in some cases, measurement may not be possible.

Accordingly, the present invention solves the above-mentioned conventional problems, and provides a device state display method for an electron beam device capable of constantly monitoring the device state of the electron beam device without adding a display device. The purpose is to:

[0009]

According to the present invention, there is provided a method for displaying a device state of an electron beam apparatus, comprising the steps of: A first display area and a second display area independent of the first display area are created on the same display screen, and the device state of the electron beam device is constantly displayed in the second display area. It is possible to constantly monitor the state of the electron beam device without adding a display device.

The control device is connected to the electron beam device via an interface or the like, and sends and receives signals such as control commands and measurement data to and from the electron beam device, controls the device of the electron beam device, and performs analysis operations and It is a device that analyzes the measurement data and has a monitor. This monitor has a display function called a window for displaying a plurality of display areas on the same display screen. The first display area allows display contents to be switched and displayed, and the second display area constantly displays the device state of the electron beam device. indicate. Thus, the device state of the electron beam device can be always displayed in the second display area regardless of the operation content of the control device and the display content of the first display area.

The first display area may include, as display contents, device control such as analysis operation for setting analysis conditions and the like, measurement data measured by an electron beam device, and data analysis for analyzing measurement data and the like. Can be switched and displayed.
The second display area can display the device state of the electron beam device in a graphic display or a numerical display.

According to the method for displaying the state of an electron beam device of the present invention, the control device is connected to the electron beam device via an interface or the like, and exchanges signals such as control commands and measurement data with the electron beam device. To perform device control of the electron beam device, perform analysis operation and analysis of measurement data, and switch the display related to device control, measurement data, data analysis, and the like in the first display area on the monitor as necessary. Do it. Further, the control device always displays the device state of the electron beam device on the monitor in the second display area on the monitor.

According to an embodiment of the present invention, the state of the electron beam apparatus to be displayed on the second display area is displayed by using a vacuum degree, an acceleration voltage, an emission current, a probe diameter, a probe current, and a suction current. Can be.

[0014]

Embodiments of the present invention will be described below in detail with reference to the drawings. A configuration example of an embodiment of the present invention will be described with reference to a schematic configuration diagram for explaining a device state display method of the electron beam apparatus of the present invention in FIG.
FIG. 1 shows the case of an electron beam microanalyzer as the electron beam device, and shows only a portion necessary for explaining a device state display method of the electron beam device of the present invention, and omits other portions. .

The control device 1 shown in FIG. 1 is connected to the electron beam micro-analyzer 4 via an interface (not shown), transmits a control command to the electron beam micro-analyzer 4 to control the device, and From the electron beam microanalyzer 4, device status data such as the degree of vacuum, acceleration voltage, emission current, probe diameter, and probe current (absorption current) of the electron beam microanalyzer, and measurement data measured by the electron beam microanalyzer are received.

In the control device 1 shown in FIG.
Are represented by programs (shown in broken lines) that realize the functions. The program included in the control device 1 includes a main control program 10 for controlling the entire control device, and a device control for transmitting and receiving signals between the electron beam microanalyzer 4 and performing control related to the operation of the electron beam microanalyzer 4. Program 11, an apparatus state display program 12 for controlling the display of the apparatus state of the electron beam microanalyzer 4, an analysis operation program 13 for controlling the operation and display related to the analysis operation, A measurement data display program 14 for controlling the display of measurement data and a data analysis program 15 for analyzing data such as measurement data are provided.

The main control program 10 includes a device control program 11 and a data analysis program 15
The apparatus control program 11 controls the apparatus state display program 12, the analysis operation program 13, and the measurement data display program 14. Therefore, the data analysis program 15 can be executed independently of the electron beam micro analyzer 4, and the data analysis and the operation of the electron beam micro analyzer 4 can be performed in parallel. Further, an apparatus state display program 12, an analysis operation program 13, and a measurement data display program 14
Can read data in the device control program 11 and execute the program without affecting the operation of the electron beam microanalyzer 4. The main program 10 receives an instruction command such as a device control instruction or an automatic analysis instruction from the input device 3.

The control device 1 has a monitor 2. The monitor 2 includes a first display area 21 and a second display area 22, and icons 23 and 24. The first display area 21 includes the analysis operation program 13 and the measurement data display program 1.
4, and display control is performed by the data analysis program 15. The analysis operation program 13 performs display control for various settings associated with analysis operations such as analysis conditions,
The measurement data display program 14 receives and displays the measurement data of the electron beam microanalyzer 4 from the measurement control program 11, and the data analysis program 15 stores the measurement data and other data stored in a data storage device (not shown). The analysis data obtained by using is displayed.

The display contents of the first display area 21 can be switched under the control of the main control program 11, and the display contents not displayed in the first display area 21 can be displayed on the icons 23 and 24. The display contents can be switched by selecting the icons 23 and 24 or by an instruction from the input device 3.

The display of the second display area 22 is controlled by the apparatus state display program 12, and the apparatus state data of the electron beam microanalyzer 4 is measured by the measurement control program 1.
1 and display it. This display is always performed independently of the display contents of the first display area 21 and the operation of the control device 1, and has a cycle (for example, 0.1 seconds to several seconds) that does not affect the operation of the control device 1. At (interval), the device status data stored in the device status display program 12 is read and displayed. Therefore, the first display area 21
Can be displayed without affecting the operations of the control device 1 and the electron beam microanalyzer 4.

In FIG. 1, the second display area 22 is displayed on the display screen of the monitor 2 independently of the first display area 21, and the display position and the display size can be arbitrarily set. Normally, the display position and the display size of the second display area 22 are set to positions and sizes that do not hinder the display of the first display area 21. Also, the control device 1
When the operation of the monitor 2 is stopped, the second display area 22 is displayed in a large size at the center of the display screen of the monitor, and it is possible to call attention that the electron beam microanalyzer 4 is being used.

The second display area 22 can also be iconified, but the iconization process is controlled by the apparatus control program so that the second display area 22 can be displayed even when the iconization instruction is given. Is prohibited, and the device status can be always displayed.

Next, a display example of a device status display window in the second display area 22 will be described with reference to FIG. In FIG. 2, a second display area 22 schematically displays a schematic configuration of an electron beam device such as the electron beam microanalyzer 4, and graphically or numerically displays a device state. FIG. 2 schematically shows the electron beam, the sample stage, the X spectroscope, etc. in a graphic display, the electron beam and the sample stage are moved together with the scanning operation, and the X spectrometer 31 moves and displays the position of the spectral crystal. can do. This movement display can indicate that the electron beam device is operating. The graphic display can be easily viewed by color coding.

The acceleration voltage 32, the emission current 3
3, probe diameter 34, degree of vacuum 35, probe current 36,
Numerical values such as the suction current 37 and the progress display 38, 3 of the analysis
9, the remaining time 40, the display 41 of the operation content, and the like are displayed at relevant positions. As the display 41 of the operation content, a comment on the measurement can be displayed in addition to the name of the analysis mode and the file name being executed. In addition, the above numerical values can change the display color when an abnormality occurs.

Next, the operation of the method for displaying the state of the electron beam apparatus according to the present invention will be described with reference to the flowchart of FIG. When the activation control signal is input from the input device 3 (step S1), the main control program 10 activates the device control program 11 (step S2). The device control program 11 starts communication with the electron beam device (electron beam microanalyzer 4) (step S3).

The device control program 11 activates the device status display program 12 to activate the second display area 22.
Creates a window for displaying the device status (step S
4) The device status data received from the electron beam device is displayed on the device status display window. The display of the device status data is always performed during the operation of the device (step S
5).

The apparatus control program 11 starts the analysis operation program 13 to create an analysis operation window in the first display area 21 (step S6), receives the display contents from the apparatus control program 11, and analyzes the window. It is displayed on the operation window (step S7).

Hereinafter, display control is performed in accordance with the instruction of the operator (step S8). If the operator's instruction is an analysis operation (step S9), the device control program 1
1 transmits a control command relating to the analysis operation to the electron beam device (step S10), receives the device status data from the electron beam device, and displays it on the analysis operation window (step S11).

If the operator's instruction is an automatic analysis such as a quantitative analysis or a qualitative analysis (step S12), the apparatus control program 11 activates the measurement data display program 14 and displays the measurement data in the first display area 21. A display window is created (step S13), and if necessary, a control command is transmitted to the electron beam device (step S14), and the measurement data is received from the electron beam device and displayed on the measurement display window (step S13). Step S15).

If the instruction of the operator is a data analysis (step S16), the main control program 11 activates the data analysis program 15 to activate the first display area 21.
A data analysis window is created (step S1).
7), necessary data is read from a storage device (not shown) and analysis processing is performed (step S18), and the analysis data is displayed in a data analysis window (step S19).

When there is an instruction to display a window other than the currently displayed window in the first display area 21 (step S
20) Iconify the displayed window and display the specified window (step S21).

By this operation, the device status can be always displayed in the device status display window. In the device status display window, the display content can be changed according to the request of the operator. Although the above embodiment has been described with reference to a single computer, the same display control is performed on another computer connected to the device control computer via a network.
You can also do remote monitoring. In the above embodiment, the measurement data to be displayed can also indicate the progress during the measurement.

According to the apparatus status display method for an electron beam apparatus of the present invention, the apparatus status can be graphically displayed in a relatively small display area, so that data measurement and data analysis can be performed by one computer and monitor. Even in the case of parallel processing, it is possible to monitor the device status without hindering the data analysis work, and to monitor the data being measured without adding hardware, thereby improving operability. it can.

Further, according to the method for displaying the state of an electron beam apparatus of the present invention, the operating state of the electron beam apparatus during operation or measurement can be easily recognized, and visibility can be improved. .

Further, according to the apparatus state display method for an electron beam apparatus of the present invention, by constantly displaying the apparatus state,
Even if the operator is away from the control device, it is possible to prevent malfunction from occurring, and to measure the safety of the measurement data, the electron beam device, and the control device.

[0036]

As described above, according to the apparatus status display method for an electron beam apparatus of the present invention, the apparatus state of the electron beam apparatus can be constantly monitored without adding a display device.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram for explaining an apparatus state display method of an electron beam apparatus according to the present invention.

FIG. 2 is a schematic diagram for explaining a display example of a device status display window in a second display area 22 according to the present invention.

FIG. 3 is a flowchart for explaining the operation of an apparatus state display method for an electron beam apparatus according to the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Control device, 2 ... Monitor, 3 ... Input device, 4 ... Electron beam micro analyzer, 10 ... Main control program,
11: Device control program, 12: Device status display program, 13: Analysis operation program, 14: Measurement data display program, 15: Data analysis program, 21: First display area, 22: First display area , 23,
24 ... icon, 31 ... X spectrometer, 32 ... acceleration voltage, 3
3: Emission current, 34: Probe diameter, 35: Vacuum degree, 36: Probe current, 37: Suction current, 38, 39
... Analysis progress display, 40 ... Remaining time, 41 ... Display of operation contents.

Claims (1)

[Claims] 1. A display method for a monitor provided in a control device connected to an electron beam device, comprising: a first display area on a monitor capable of switching and displaying display contents; and a second display independent of the first display area. An apparatus state display method for an electron beam apparatus, wherein an area is created on the same display screen, and the apparatus state of the electron beam apparatus is always displayed in a second display area.