JP2004281663A5 - - Google Patents
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- Publication number
- JP2004281663A5 JP2004281663A5 JP2003070140A JP2003070140A JP2004281663A5 JP 2004281663 A5 JP2004281663 A5 JP 2004281663A5 JP 2003070140 A JP2003070140 A JP 2003070140A JP 2003070140 A JP2003070140 A JP 2003070140A JP 2004281663 A5 JP2004281663 A5 JP 2004281663A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003070140A JP2004281663A (ja) | 2003-03-14 | 2003-03-14 | 半導体記憶装置及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003070140A JP2004281663A (ja) | 2003-03-14 | 2003-03-14 | 半導体記憶装置及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004281663A JP2004281663A (ja) | 2004-10-07 |
| JP2004281663A5 true JP2004281663A5 (ja) | 2005-12-08 |
Family
ID=33286964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003070140A Pending JP2004281663A (ja) | 2003-03-14 | 2003-03-14 | 半導体記憶装置及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004281663A (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5118341B2 (ja) | 2006-12-22 | 2013-01-16 | 株式会社東芝 | 半導体記憶装置及びその製造方法 |
| JP5668303B2 (ja) * | 2010-03-19 | 2015-02-12 | 富士通セミコンダクター株式会社 | 半導体装置及びその製造方法 |
| CN104752358B (zh) * | 2013-12-30 | 2019-01-22 | 中芯国际集成电路制造(上海)有限公司 | 闪存器件及其形成方法 |
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2003
- 2003-03-14 JP JP2003070140A patent/JP2004281663A/ja active Pending